CN107147328A - Bend the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom motion realized using the driver - Google Patents
Bend the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom motion realized using the driver Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 46
- 238000005452 bending Methods 0.000 claims abstract description 83
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 7
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- MROJXXOCABQVEF-UHFFFAOYSA-N Actarit Chemical compound CC(=O)NC1=CC=C(CC(O)=O)C=C1 MROJXXOCABQVEF-UHFFFAOYSA-N 0.000 claims 28
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Abstract
Bend the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom motion realized using the driver.Belong to piezoelectric driving technology field.The problem of solving complicated existing two-freedom Piexoelectric actuator, high cost and small stroke.Driver includes pedestal, piezoelectric vibrator and mover, the bending ceramic component is two parts, respectively first group bending piezoelectric ceramics group and second group of bending piezoelectric ceramics group, when two groups of bending piezoelectric ceramics apply voltage excitation signals, piezoelectric vibrator can realize the bending motion of two frees degree respectively.By changing voltage excitation signals, the bending direction of piezoelectric vibrator can be controlled；By the use of frictional force as driving force, using piezoelectric vibrator as stator, driving mover realizes that two-freedom is moved.Present invention is mainly applied to ultraprecise driving, positioning, processing and other fields.
Description
Technical field
The invention belongs to piezoelectric driving technology field.
Background technology
In recent years, piezoelectric driving technology is widely used in Ultra-precision Turning, positioning etc. as a kind of new actuation techniques
Field, has obtained great development.Piezoelectric driving technology is the inverse piezoelectric effect using piezoelectric, converts electrical energy into machinery
A kind of actuation techniques of energy.Piezoelectric actuator has simple in construction, precision height, and power density greatly, do by High power output, no electromagnetism
Disturb, it is easy to accomplish the advantages of miniaturization, in space flight, robot, the ultraprecise field such as nanometer manufacture has obtained great application.Two
Free degree piezoelectric actuator, multiple driving functions are realized with single driver, can effectively be reduced the size of driver, be obtained
Increasing concern.Existing two-freedom piezoelectric actuator mainly uses the single-degree-of-freedom piezoelectricity that piezoelectric stack drives
Driver is in parallel or in series, still, defeated due to what is stacked using the driver of parallel way to realize that two-freedom drives
Go out limited displacement, cause stroke too small；Using the driver of series system, can effectively stroke extension, but precision damaged
Lose, meanwhile, the price of piezoelectric stack is sufficiently expensive, and these all greatly affected the application of two-freedom piezoelectric actuator.
The motivational techniques of the two-freedom piezoelectric actuator using bending piezoelectric vibrator of the present invention, the two of control driver
The free degree drives, and compared to piezoelectric stack, cost has obtained great reduction, is carried out using the frictional force driven between foot and mover
Driving, expands its stroke.Meanwhile, the mover driven can be plane, for realizing that two-freedom is moved；Mover can also
It is cartridge type, for realizing the movement of one degree of freedom and the rotation of one degree of freedom；Mover can also be ball-type, for realizing two
The rotation of the free degree.Due to the diversity of mover shape, the application of the two-freedom piezoelectric actuator has greatly been expanded,
There is good application prospect.
The content of the invention
The present invention is that existing two-freedom Piexoelectric actuator is complicated, cost is high and stroke is small asks in order to solve
Topic.The invention provides the two of a kind of two-freedom piezoelectric actuator for bending piezoelectric vibrator and use driver realization are free
Spend the motivational techniques of motion.
The two-freedom piezoelectric actuator of piezoelectric vibrator is bent, it includes pedestal, piezoelectric vibrator and mover；
The piezoelectric vibrator includes bending piezoelectric ceramics group, ultrasonic transformer and driving foot, and bending piezoelectric ceramics group is arranged at base
Between seat and ultrasonic transformer, ultrasonic transformer taper end sets driving foot, and driving foot is contacted with mover；
The bending piezoelectric ceramics group is divided into two parts, respectively first group bending piezoelectric ceramics group and second group of bending
Piezoelectric ceramics group.
Adjacent two panels piezoelectric ceramics in first group of described bending piezoelectric ceramics group and second group of bending piezoelectric ceramics group
Powered electrode piece is provided between piece.
The excitation side for the two-freedom motion realized using the two-freedom piezoelectric actuator of described bending piezoelectric vibrator
Method, the motivational techniques of two-freedom motion can drive mover to be moved along two two-freedoms of X-axis and Y-axis, be embodied in：Drive
Dynamic mover is positively or negatively moved along X-axis, and is positively or negatively moved along Y-axis；
Wherein, X-axis and the direction pointed by Y-axis are two mutually orthogonal directions in bending piezoelectric vibrator sagittal plane,
And the two signified direction is forward direction；
(1) detailed process of the driving mover along X-axis positive movement is：
Step applies the driving voltage signal that amplitude is gradually increasing one by one, to first group of bending piezoelectric ceramics group, during rising
Between be t1, piezoelectric vibrator produces flexural deformation to extreme position along X-axis forward direction, under stiction effect, passes through and drives foot to drive
Dynamic mover produces displacement output along X-axis forward direction；
Step one two, the driving voltage signal being gradually reduced to first group of bending piezoelectric ceramics group application amplitude, during decline
Between be t2, and t2<<T1, piezoelectric vibrator is produced along the flexural deformation of X-axis negative sense to initial position, and mover keeps quiet due to inertia
Only；
Mover can be achieved along the positive continuous movement output of X-axis one by one to step one two in step one three, repeat step；
(2) detailed process of the driving mover along X-axis negative movement is：
Step 2 one, the driving voltage signal being gradually reduced to first group of bending piezoelectric ceramics group application amplitude, during decline
Between be t1, piezoelectric vibrator produces flexural deformation to extreme position along X-axis negative sense, under stiction effect, passes through and drives foot to drive
Dynamic mover produces displacement output along X-axis negative sense；
Step 2 two, the driving voltage signal being gradually increasing to first group of bending piezoelectric ceramics group application amplitude, during rising
Between be t2, and t2<<T1, piezoelectric vibrator is produced along the positive flexural deformation of X-axis to initial position, and mover keeps quiet due to inertia
Only；
Continuous movement output of the mover along X-axis negative sense can be achieved to step 2 two in step 2 three, repeat step 21；
(3) detailed process of the driving mover along Y-axis positive movement is：
Step 3 one, the driving voltage signal being gradually increasing to second group of bending piezoelectric ceramics group application amplitude, during rising
Between be t1, piezoelectric vibrator produces flexural deformation to extreme position along Y-axis forward direction, under stiction effect, passes through and drives foot to drive
Dynamic mover produces displacement output along Y-axis forward direction；
Step 3 two, the voltage excitation signals being gradually reduced to second group of bending piezoelectric ceramics group application amplitude, during decline
Between be t2, and t2<<T1, piezoelectric vibrator is produced along the flexural deformation of Y-axis negative sense to initial position, and mover keeps quiet due to inertia
Only；
Mover can be achieved along the positive continuous movement output of Y-axis to step 3 two in step 3 three, repeat step 31；
(4) detailed process of the driving mover along Y-axis negative movement is：
Step 4 one, the driving voltage signal being gradually reduced to second group of bending piezoelectric ceramics group application amplitude, during decline
Between be t1, piezoelectric vibrator produces flexural deformation to extreme position along Y-axis negative sense, under stiction effect, passes through and drives foot to drive
Dynamic mover produces displacement output along Y-axis negative sense；
Step 4 two, the driving voltage signal being gradually increasing to second group of bending piezoelectric ceramics group application amplitude, during decline
Between be t2, and t2<<T1, piezoelectric vibrator is produced along the positive flexural deformation of Y-axis to initial position, and mover keeps quiet due to inertia
Only；
Continuous movement output of the mover along Y-axis negative sense can be achieved to step 4 two in step 4 three, repeat step 41.
The motivational techniques for the two-freedom motion realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator, the party
The waveform of voltage excitation signals applied in method is asymmetric triangular wave or asymmetric trapezoidal ripple.
Described mover is cartridge type mover, ball-type mover or plane mover.
When mover is plane mover, driving mover is positively or negatively moved along X-axis, and along Y-axis positively or negatively
Motion, is embodied in：In plane mover institute planar, driving plane mover is positively or negatively moved along X-axis, and
Positively or negatively moved along Y-axis.
When mover is cartridge type mover, driving mover is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Driving cartridge type mover positively or negatively moved along X-axis, and around X-axis clockwise or counterclockwise two
Individual free degree motion.
When mover is ball-type mover, driving mover is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Drive ball-type mover around X-axis clockwise or counterclockwise, and around Y-axis clockwise or counterclockwise
Two frees degree motion.
The beneficial effect that the present invention is brought is that the invention provides a kind of two-freedom Piezoelectric Driving for bending piezoelectric vibrator
Device and the motivational techniques for the two-freedom motion realized using the driver, in work, it is possible to achieve the driving of both direction, are matched somebody with somebody
A variety of functions can be realized altogether.The two-freedom piezoelectric actuator using bending piezoelectric vibrator of the present invention, cost is low, drives
Dynamic stroke is big.Meanwhile, Structure of mover can be the shapes such as plane, cylinder, ball, and driven object variation has a wide range of application.
In specific work process, by the amplitude for controlling application driving voltage, it is possible to achieve mover single stepping step pitch
Accurate adjustment；By the frequency for controlling application driving voltage, it is possible to achieve the accurate control of mover movement velocity.Driven in ultraprecise
Dynamic, positioning, processing and other fields have broad application prospects.
Brief description of the drawings
Fig. 1 is the main sectional view for the two-freedom piezoelectric actuator that piezoelectric vibrator is bent when mover is plane mover；
Fig. 2 is the three dimensional structure diagram of bending piezoelectric vibrator；
Fig. 3 is the three-dimensional structure for the two-freedom piezoelectric actuator that piezoelectric vibrator is bent when mover is plane mover
Schematic diagram；
Fig. 4 is that the three-dimensional structure for the two-freedom piezoelectric actuator that piezoelectric vibrator is bent when mover is cartridge type mover is shown
It is intended to；
Fig. 5 is that the three-dimensional structure for the two-freedom piezoelectric actuator that piezoelectric vibrator is bent when mover is ball-type mover is shown
It is intended to；
Fig. 6 be plane mover along X-axis forward direction move when, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the cycle；
Fig. 7 and Fig. 8 are that plane mover is moved along X-axis forward direction under conditions of the driving voltage signal that Fig. 6 is applied
State diagram；
Fig. 9 be plane mover along X-axis negative sense move when, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the cycle；Figure 10 and
Figure 11 is the state diagram that plane mover is moved along X-axis negative sense under conditions of the driving voltage signal that Fig. 9 is applied；
Figure 12 be plane mover along Y-axis forward direction move when, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the cycle；
Figure 13 and Figure 14 are that under conditions of the driving voltage signal that Figure 12 is applied, plane mover is positive along Y-axis
Mobile state diagram；
Figure 15 be plane mover along Y-axis negative sense move when, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the cycle；
Figure 16 and Figure 17 are that under conditions of the driving voltage signal that Figure 15 is applied, plane mover is along Y-axis negative sense
Mobile state diagram.
Embodiment
Embodiment one：Illustrate present embodiment referring to Fig. 1 to Fig. 5, the bending piezoelectricity described in present embodiment shakes
The two-freedom piezoelectric actuator of son, it includes pedestal 1, piezoelectric vibrator 2 and mover 3；
The piezoelectric vibrator 2 includes bending piezoelectric ceramics group 2-1, ultrasonic transformer 2-2 and driving foot 2-3, bends piezoelectric ceramics
Group 2-1 is arranged between pedestal 1 and ultrasonic transformer 2-2, and ultrasonic transformer 2-2 taper ends set driving foot 2-3, driving foot 2-3 and mover 3
Contact；
The bending piezoelectric ceramics group 2-1 is divided into two parts, respectively first group bending piezoelectric ceramics group 2-1-1 and
Two groups of bending piezoelectric ceramics group 2-1-2.
In present embodiment, the two-freedom piezoelectric actuator using bending piezoelectric vibrator of the invention, cost is low, driving
Stroke is big.In specific work process, the amplitude of bending piezoelectric ceramics group 2-1 driving voltages is applied to by control, it is possible to achieve
The accurate adjustment of mover single stepping step pitch；The frequency of bending piezoelectric ceramics group 2-1 driving voltages is applied to by control, can be with
Realize the accurate control of mover movement velocity.
Embodiment two：Illustrate present embodiment, present embodiment and embodiment one referring to Fig. 1 to Fig. 5
The difference of the two-freedom piezoelectric actuator of described bending piezoelectric vibrator is that described mover 3 is cartridge type mover, ball-type is moved
Son or plane mover.
Embodiment three：Illustrate present embodiment, present embodiment and embodiment one referring to Fig. 1 to Fig. 5
The difference of the two-freedom piezoelectric actuator of described bending piezoelectric vibrator is, first group of described bending piezoelectric ceramics group
Powered electrode piece 2-4 is provided with 2-1-1 and second group of bending piezoelectric ceramics group 2-1-2 between adjacent two panels piezoelectric ceramic piece.
Embodiment four：Illustrate present embodiment referring to Fig. 1 to Fig. 5, using curved described in embodiment one
The motivational techniques for the two-freedom motion that the two-freedom piezoelectric actuator of bent piezoelectric vibrator is realized, what the two-freedom was moved swashs
The method of encouraging can drive mover 3 to be moved along two two-freedoms of X-axis and Y-axis, be embodied in：Drive mover 3 positive or negative along X-axis
Positively or negatively moved to motion, and along Y-axis；
Wherein, X-axis and the direction pointed by Y-axis are two mutually orthogonal directions in bending piezoelectric vibrator sagittal plane,
And the two signified direction is forward direction；
(1) detailed process of the driving mover 3 along X-axis positive movement is：
Step applies the driving voltage signal that amplitude is gradually increasing one by one, to first group of bending piezoelectric ceramics group 2-1-1, on
The time of liter is t1, and piezoelectric vibrator 2 produces flexural deformation to extreme position along X-axis forward direction, under stiction effect, passes through driving
Sufficient 2-3 drives mover 3 to produce displacement output along X-axis forward direction；
Step one two, the driving voltage signal being gradually reduced to first group of bending piezoelectric ceramics group 2-1-1 applications amplitude, under
The drop time is t2, and t2<<T1, piezoelectric vibrator 2 is produced along the flexural deformation of X-axis negative sense to initial position, and mover 3 is due to inertia
Remains stationary；
Mover 3 can be achieved along the positive continuous movement output of X-axis one by one to step one two in step one three, repeat step；
(2) detailed process of the driving mover 3 along X-axis negative movement is：
Step 2 one, the driving voltage signal being gradually reduced to first group of bending piezoelectric ceramics group 2-1-1 applications amplitude, under
The drop time is t1, and piezoelectric vibrator 2 produces flexural deformation to extreme position along X-axis negative sense, under stiction effect, passes through driving
Sufficient 2-3 drives mover 3 to produce displacement output along X-axis negative sense；
Step 2 two, the driving voltage signal being gradually increasing to first group of bending piezoelectric ceramics group 2-1-1 applications amplitude, on
The time of liter is t2, and t2<<T1, piezoelectric vibrator 2 is produced along the positive flexural deformation of X-axis to initial position, and mover 3 is due to inertia
Remains stationary；
Continuous movement output of the mover 3 along X-axis negative sense can be achieved to step 2 two in step 2 three, repeat step 21；
(3) detailed process of the driving mover 3 along Y-axis positive movement is：
Step 3 one, the driving voltage signal being gradually increasing to second group of bending piezoelectric ceramics group 2-1-2 applications amplitude, on
The time of liter is t1, and piezoelectric vibrator 2 produces flexural deformation to extreme position along Y-axis forward direction, under stiction effect, passes through driving
Sufficient 2-3 drives mover 3 to produce displacement output along Y-axis forward direction；
Step 3 two, the voltage excitation signals being gradually reduced to second group of bending piezoelectric ceramics group 2-1-2 applications amplitude, under
The drop time is t2, and t2<<T1, piezoelectric vibrator 2 is produced along the flexural deformation of Y-axis negative sense to initial position, and mover 3 is due to inertia
Remains stationary；
Mover 3 can be achieved along the positive continuous movement output of Y-axis to step 3 two in step 3 three, repeat step 31；
(4) detailed process of the driving mover 3 along Y-axis negative movement is：
Step 4 one, the driving voltage signal being gradually reduced to second group of bending piezoelectric ceramics group 2-1-2 applications amplitude, under
The drop time is t1, and piezoelectric vibrator 2 produces flexural deformation to extreme position along Y-axis negative sense, under stiction effect, passes through driving
Sufficient 2-3 drives mover 3 to produce displacement output along Y-axis negative sense；
Step 4 two, the driving voltage signal being gradually increasing to second group of bending piezoelectric ceramics group 2-1-2 applications amplitude, under
The drop time is t2, and t2<<T1, piezoelectric vibrator 2 is produced along the positive flexural deformation of Y-axis to initial position, and mover 3 is due to inertia
Remains stationary；
Continuous movement output of the mover 3 along Y-axis negative sense can be achieved to step 4 two in step 4 three, repeat step 41.
In present embodiment, step one by one, the displacement ten that mover 3 is produced in step 2 one, step 3 one and step 4 one
Divide small.
Embodiment five：Illustrate present embodiment, present embodiment and embodiment four referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the described two-freedom motion realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, described mover 3 is cartridge type mover, ball-type mover or plane mover.
Embodiment six：Illustrate present embodiment, present embodiment and embodiment four referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the described two-freedom motion realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, the waveform of the voltage excitation signals applied in this method is asymmetric triangular wave or asymmetric trapezoidal ripple.
Embodiment seven：Illustrate present embodiment, present embodiment and embodiment five referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the described two-freedom motion realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, when mover 3 is plane mover, driving mover 3 is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：In plane mover institute planar, driving plane mover is positively or negatively moved along X-axis, Yi Jiyan
Y-axis is positively or negatively moved.
In present embodiment, plane mover is realized and said along detailed process combination Fig. 6 to Fig. 8 of X-axis positive movement
It is bright, wherein, accompanying drawing 7 and accompanying drawing 8 correspond to respectively step one by one with step one two；Step one by one in, first group of bending piezoelectric ceramics
Group 2-1-1 applies in the t1 sections of voltage excitation signals in the driving voltage signal that amplitude slowly rises, corresponding diagram 7, step one two,
Voltage drive is believed in the driving voltage signal amplitude rapid decrease that first group of bending piezoelectric ceramics group 2-1-1 is applied, corresponding diagram 8
Number t2 sections.
The realization of plane mover is illustrated along detailed process combination Fig. 9 to Figure 11 of X-axis negative movement, wherein, accompanying drawing
10 and accompanying drawing 11 correspond to step 2 one and step 2 two respectively；In step 2 one, first group of bending piezoelectric ceramics group 2-1-1 is applied
Plus the driving voltage signal that amplitude slowly declines, the t1 sections of voltage excitation signals in corresponding diagram 10；In step 2 two, first group curved
The t2 of voltage excitation signals in the driving voltage signal amplitude rapid increase that bent piezoelectric ceramics group 2-1-1 is applied, corresponding diagram 11
Section.
The realization of plane mover is illustrated along detailed process combination Figure 12 to Figure 14 of Y-axis positive movement, wherein, accompanying drawing
13 and accompanying drawing 14 correspond to step 3 one and step 3 two respectively；In step 3 one, second group of bending piezoelectric ceramics group 2-1-2 is applied
Plus the driving voltage signal that amplitude slowly rises, the t1 sections of voltage excitation signals in corresponding diagram 13；In step 3 two, second group curved
The t2 of voltage excitation signals in the driving voltage signal amplitude rapid decrease that bent piezoelectric ceramics group 2-1-2 is applied, corresponding diagram 14
Section.
The realization of plane mover is illustrated along detailed process combination Figure 15 to Figure 17 of Y-axis negative movement, wherein, accompanying drawing
16 and accompanying drawing 17 correspond to step 4 one and step 4 two respectively；In step 4 one, second group of bending piezoelectric ceramics group 2-1-2 is applied
Plus the driving voltage signal that amplitude slowly declines, the t1 sections of voltage excitation signals in corresponding diagram 16；In step 4 two, second group curved
The t2 of voltage excitation signals in the driving voltage signal amplitude rapid decrease that bent piezoelectric ceramics group 2-1-2 is applied, corresponding diagram 17
Section.
Embodiment eight：Illustrate present embodiment, present embodiment and embodiment five referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the described two-freedom motion realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, when mover 3 is cartridge type mover, driving mover 3 is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Driving cartridge type mover positively or negatively moved along X-axis, and around X-axis clockwise or counterclockwise two
Individual free degree motion.
Embodiment nine：Illustrate present embodiment, present embodiment and embodiment five referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the described two-freedom motion realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, when mover 3 is ball-type mover, driving mover 3 is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Drive ball-type mover around X-axis clockwise or counterclockwise, and around Y-axis clockwise or counterclockwise
Two frees degree motion.
Claims (9)
1. bend piezoelectric vibrator two-freedom piezoelectric actuator, it is characterised in that it include pedestal (1), piezoelectric vibrator (2) and
Mover (3)；
The piezoelectric vibrator (2) includes bending piezoelectric ceramics group (2-1), ultrasonic transformer (2-2) and driving foot (2-3), bends piezoelectricity
Ceramic group (2-1) is arranged between pedestal (1) and ultrasonic transformer (2-2), and ultrasonic transformer (2-2) taper end sets driving foot (2-3), driving
Foot (2-3) is contacted with mover (3)；
The bending piezoelectric ceramics group (2-1) is divided into two parts, respectively first group bending piezoelectric ceramics group (2-1-1) and the
Two groups of bending piezoelectric ceramics groups (2-1-2).
2. the two-freedom piezoelectric actuator of bending piezoelectric vibrator according to claim 1, it is characterised in that described is dynamic
Sub (3) are cartridge type mover, ball-type mover or plane mover.
3. the two-freedom piezoelectric actuator of bending piezoelectric vibrator according to claim 1, it is characterised in that described the
Adjacent two panels piezoelectric ceramic piece in one group of bending piezoelectric ceramics group (2-1-1) and second group of bending piezoelectric ceramics group (2-1-2)
Between be provided with powered electrode piece (2-4).
4. the two-freedom motion realized using the two-freedom piezoelectric actuator of the bending piezoelectric vibrator described in claim 1
Motivational techniques, it is characterised in that the motivational techniques of two-freedom motion can drive mover (3) free along X-axis and Y-axis two two
Degree motion, is embodied in：Driving mover (3) is positively or negatively moved along X-axis, and is positively or negatively moved along Y-axis；
Wherein, X-axis and the direction pointed by Y-axis are two mutually orthogonal directions in bending piezoelectric vibrator sagittal plane, and two
The signified direction of person is forward direction；
(1) detailed process of the driving mover (3) along X-axis positive movement is：
Step applies the driving voltage signal that amplitude is gradually increasing one by one, to first group of bending piezoelectric ceramics group (2-1-1), rises
Time is t1, and piezoelectric vibrator (2) produces flexural deformation to extreme position along X-axis forward direction, under stiction effect, passes through driving
Foot (2-3) driving mover (3) produces displacement output along X-axis forward direction；
Step one two, the driving voltage signal being gradually reduced to first group of bending piezoelectric ceramics group (2-1-1) application amplitude, decline
Time is t2, and t2<<T1, piezoelectric vibrator (2) is produced along the flexural deformation of X-axis negative sense to initial position, and mover (3) is due to used
Property remains stationary；
Mover (3) can be achieved along the positive continuous movement output of X-axis one by one to step one two in step one three, repeat step；
(2) detailed process of the driving mover (3) along X-axis negative movement is：
Step 2 one, the driving voltage signal being gradually reduced to first group of bending piezoelectric ceramics group (2-1-1) application amplitude, decline
Time is t1, and piezoelectric vibrator (2) produces flexural deformation to extreme position along X-axis negative sense, under stiction effect, passes through driving
Foot (2-3) driving mover (3) produces displacement output along X-axis negative sense；
Step 2 two, the driving voltage signal being gradually increasing to first group of bending piezoelectric ceramics group (2-1-1) application amplitude, rise
Time is t2, and t2<<T1, piezoelectric vibrator (2) is produced along the positive flexural deformation of X-axis to initial position, and mover (3) is due to used
Property remains stationary；
Continuous movement output of the mover (3) along X-axis negative sense can be achieved to step 2 two in step 2 three, repeat step 21；
(3) detailed process of the driving mover (3) along Y-axis positive movement is：
Step 3 one, the driving voltage signal being gradually increasing to second group of bending piezoelectric ceramics group (2-1-2) application amplitude, rise
Time is t1, and piezoelectric vibrator (2) produces flexural deformation to extreme position along Y-axis forward direction, under stiction effect, passes through driving
Foot (2-3) driving mover (3) produces displacement output along Y-axis forward direction；
Step 3 two, the voltage excitation signals that amplitude is gradually reduced that apply to second group of bending piezoelectric ceramics group (2-1-2), decline
Time is t2, and t2<<T1, piezoelectric vibrator (2) is produced along the flexural deformation of Y-axis negative sense to initial position, and mover (3) is due to used
Property remains stationary；
Mover (3) can be achieved along the positive continuous movement output of Y-axis to step 3 two in step 3 three, repeat step 31；
(4) detailed process of the driving mover (3) along Y-axis negative movement is：
Step 4 one, the driving voltage signal being gradually reduced to second group of bending piezoelectric ceramics group (2-1-2) application amplitude, decline
Time is t1, and piezoelectric vibrator (2) produces flexural deformation to extreme position along Y-axis negative sense, under stiction effect, passes through driving
Foot (2-3) driving mover (3) produces displacement output along Y-axis negative sense；
Step 4 two, the driving voltage signal being gradually increasing to second group of bending piezoelectric ceramics group (2-1-2) application amplitude, decline
Time is t2, and t2<<T1, piezoelectric vibrator (2) is produced along the positive flexural deformation of Y-axis to initial position, and mover (3) is due to used
Property remains stationary；
Continuous movement output of the mover (3) along Y-axis negative sense can be achieved to step 4 two in step 4 three, repeat step 41.
5. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 4 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, it is characterised in that described mover (3) is cartridge type mover, ball-type mover or plane mover.
6. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 4 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, it is characterised in that the waveform of the voltage excitation signals applied in this method is asymmetric triangular wave or non-
Symmetric trapezium ripple.
7. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 5 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, it is characterised in that when mover (3) is plane mover, driving mover (3) is positively or negatively transported along X-axis
It is dynamic, and positively or negatively moved along Y-axis, it is embodied in：In plane mover institute planar, driving plane mover edge
X-axis is positively or negatively moved, and is positively or negatively moved along Y-axis.
8. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 5 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, it is characterised in that when mover (3) is cartridge type mover, driving mover (3) is positively or negatively moved along X-axis,
And positively or negatively moved along Y-axis, it is embodied in：Driving cartridge type mover is positively or negatively moved along X-axis, and around X-axis
Two frees degree motion clockwise or counterclockwise.
9. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 5 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, it is characterised in that when mover (3) is ball-type mover, driving mover (3) is positively or negatively moved along X-axis,
And positively or negatively moved along Y-axis, it is embodied in：Drive ball-type mover around X-axis clockwise or counterclockwise, and around
The two frees degree motion of Y-axis clockwise or counterclockwise.
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