CN109849021A - One kind being used for the molding two-freedom precision Manipulation of the machine people of surface microfeatures and its motivational techniques - Google Patents
One kind being used for the molding two-freedom precision Manipulation of the machine people of surface microfeatures and its motivational techniques Download PDFInfo
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Abstract
The present invention proposes that one kind for the molding two-freedom precision Manipulation of the machine people of surface microfeatures and its motivational techniques, belongs to rapid shaping technique field.The robot includes accurate pose_adjuster, piezoelectric micromotor spraying mechanism and contact target face;The precision pose_adjuster is connected and fixed with piezoelectric micromotor spraying mechanism;The piezoelectric micromotor spraying mechanism and contact target face are in discrete state, and piezoelectric micromotor spraying mechanism between the two of contact target face at a distance from can be adjusted by accurate pose_adjuster.The robot carries out integrated design using the thought that piezoelectric micromotor spray structure is combined with movement mechanism with multiple degrees of freedom, it is simple with structure, the advantages that cheap and equipment operation and maintenance is at low cost, also have shaping speed very fast simultaneously, form high resolution, device operating noise is low, meets the requirement of multiple material injection forming.It is with a wide range of applications in fields such as biologic medical, aerospace, material, chemistry and microelectronic components.
Description
Technical field
The invention belongs to rapid shaping technique fields, free for surface microfeatures molding two more particularly to one kind
Spend accurate Manipulation of the machine people and its motivational techniques.
Background technique
Rapid shaping technique based on " discrete/accumulation " thought " growth form " manufacturing method, usually by computer, swash
The modern means such as light, micro-injection, precision drive and numerical control, integrated computer Computer Aided Design and computer-aided manufacturing in one,
According to the three-dimensional data model designed on computers, product or sample can be directly manufactured within a very short time.Rapid shaping
Technology is a kind of completely new manufacturing philosophy, i.e. addition type increasing material manufacturing.With the mode phase of traditional subtraction formula removal material processing
Than addition type increasing material manufacturing mode machining accuracy is high, stock utilization is high and can manufacture arbitrarily complicated Shape Parts, has
Apparent advantage.Using rapid shaping technique, rapid forming equipment is only needed in whole process, gets rid of traditional processing side
Dependence of the method to a variety of machining tools, tooling and mold, processing technology simplify, and process velocity also significantly improves.
Currently, rapid shaping technique mainly includes photocureable rapid shaping, layer separated growth method, selective laser burning
Knot, fused glass pellet, piezo jet molding.Wherein, photocureable rapid shaping is high with dimensional accuracy, surface is smooth, can make
The advantages that making Arbitrary surfaces prototype product, but there are process equipments and processing cost height for photocureable rapid shaping, to cantilever
Structure needs the disadvantages of using supporting, and can generate gas with foreign flavor in forming process;Layer separated growth method has processing big
The advantages that type entity component speed is fast, product hardness and compressive property is preferable, the disadvantage is that article surface have apparent step texture,
Material deterioration inside is larger;The advantages of selective laser sintering is stock utilization height, disadvantage wide without support construction, material category
It is that surface quality is not high, has a small amount of smog when involving great expense, processing;Fused glass pellet with precision, spray by higher, hot melt extruded
Header structure is simple, can manufacture the advantages that product of arbitrarily complicated degree, the disadvantage is that needing to have using support construction, article surface bright
Aobvious striped, thin-walled porous part are not easy to be processed.
It is deposited compared to photocureable rapid shaping, layer separated growth method, selective laser sintering and fused glass pellet etc.
The technical problems such as processing cost is high, pollution environment, material deterioration inside is big, surface quality is poor and molding object is limited, piezoelectricity
Injection molding has many advantages, such as that very fast shaping speed, molding high resolution, material are applied widely and pollution-free, noiseless, right
This, is based on piezoelectricity micro-spray technology, and research and development are used for the molding two-freedom precision Manipulation of the machine people of surface microfeatures, fast to meet
The performance requirement of fast forming technique seems especially urgent and needs, in biologic medical, aerospace, material, chemistry and micro- electricity
The fields such as sub- device are with a wide range of applications.
Summary of the invention
The invention aims to solve traditional photocureable rapid shaping, layer separated growth method, selective laser sintering
And processing cost existing for fused glass pellet etc. is high, pollution environment, material deterioration inside is big, surface quality is poor and molding object by
The technical problems such as limit propose a kind of for the molding two-freedom precision Manipulation of the machine people of surface microfeatures and its excitation side
Method.
The present invention is achieved by the following technical solutions, and the present invention proposes a kind of for surface microfeatures molding two
Freedom degree precision Manipulation of the machine people, the robot include accurate pose_adjuster 1, piezoelectric micromotor spraying mechanism 2 and contact target face 3;
The precision pose_adjuster 1 is fixedly connected with piezoelectric micromotor spraying mechanism 2;The piezoelectric micromotor spraying mechanism 2 is in contact target face 3 to be divided
From state, and piezoelectric micromotor spraying mechanism 2 between 3 the two of contact target face at a distance from can be adjusted by accurate pose_adjuster 1.
Further, the accurate pose_adjuster 1 includes installation pedestal 1-1, supporter 1-2, cover board 1-3, bending piezoelectricity
Ceramic component 1-4, driving foot 1-5, terminal follower 1-6, I 1-7 of connection component, II 1-8 of connection component and follower support group
Part 1-9;The installation pedestal 1-1 is fixed by II 1-8 of connection component and supporter 1-2;The cover board 1-3 and supporter 1-2
It is fixed by II 1-8 of connection component;The bending piezo ceramic element 1-4 and driving foot 1-5 are fixed by I 1-7 of connection component;
The driving foot 1-5 and terminal follower 1-6 is cooperated using sliding contact;The terminal follower 1-6 is supported by follower
Component 1-9 carries out position constraint.
Further, the piezoelectric micromotor spraying mechanism 2 includes upper cover 2-1, barrel assemblies 2-2, retraction assemblies 2-3, trunnion 2-
4, diffusion component 2-5, piezoelectric element 2-6, elastic film 2-7, I 2-8 of liquid-inlet connector, II 2-9 of liquid-inlet connector, sealing
I 2-10 of component, II 2-11 of seal assembly, III 2-12 of seal assembly, IV 2-13 of seal assembly, V 2-14 of seal assembly, sealing group
Part VI 2-15 and nozzle plate 2-16;The upper cover 2-1 is fixedly connected with terminal follower 1-6, passes through the appearance of terminal follower 1-6
State adjustment, and then piezoelectric micromotor spraying mechanism 2 is driven to move, realize that piezoelectric micromotor spraying mechanism 2 carries out liquid spray with different initial positions
It penetrates, the upper cover 2-1 and barrel assemblies 2-2 are clamped fixation to elastic film 2-7, and are carried out by I 2-10 of seal assembly
Sealing;The barrel assemblies 2-2 is fixedly connected with retraction assemblies 2-3, and is sealed by II 2-11 of seal assembly;The receipts
Contracting component 2-3 is fixedly connected with trunnion 2-4, and is sealed by III 2-12 of seal assembly;The trunnion 2-4 and diffusion component 2-5
It is fixedly connected, and is sealed by IV 2-13 of seal assembly;The piezoelectric element 2-6 is fixedly connected with elastic film 2-7;The liquid
I 2-8 of body inlet union is fixedly connected with barrel assemblies 2-2, and is fixedly connected by VI 2-15 of seal assembly;The liquid-inlet
II 2-9 of connector is fixedly connected with trunnion 2-4, and is sealed by V 2-14 of seal assembly;The nozzle plate 2-16 and diffusion
Component 2-5 is fixedly connected, while nozzle plate 2-16 is provided with spray orifice 2-17, and the diameter of spray orifice 2-17 is adjustable.
Further, the barrel assemblies 2-2 be provided with annular connection plane 2-2-1, barrel assemblies groove I 2-2-2, into
Mouth connector limits I 2-2-3 of plane, barrel assemblies groove II 2-2-4, inlet union fixation hole 2-2-5, III 2- of barrel assemblies groove
2-6, retraction assemblies limit plane 2-2-7 and retraction assemblies fixation hole 2-2-8;The annular connection plane 2-2-1 is used for and end
End follower 1-6 is fixed;The barrel assemblies groove I 2-2-2 for placing I 2-10 of seal assembly, realize barrel assemblies 2-2 with
Sealing between elastic film 2-7;Inlet union limit I 2-2-3 of plane provides branch for fixed I 2-8 of liquid inlet union
Support face, and I 2-8 of liquid-inlet connector is fixed on by inlet union by inlet union fixation hole 2-2-5 and limits I 2-2-3 of plane
On;The barrel assemblies groove II 2-2-4 realizes I 2-8 of liquid-inlet connector and cylinder group for placing VI 2-15 of seal assembly
Sealing between part 2-2;The retraction assemblies limit plane 2-2-7 is used for the position of confined shrinkage component 2-3;The contraction group
Part fixation hole 2-2-8 is used to for retraction assemblies 2-3 being fixed on retraction assemblies limit plane 2-2-7;The barrel assemblies groove
III 2-2-6 realizes the sealing between barrel assemblies 2-2 and retraction assemblies 2-3 for placing II 2-11 of seal assembly.
Further, the retraction assemblies 2-3 is provided with barrel assemblies connector 2-3-1, shrinks circular conical surface 2-3-2, trunnion
Fixation hole 2-3-3, trunnion limit plane 2-3-4 and retraction assemblies groove 2-3-5;The barrel assemblies connector 2-3-1 be used for
The fixation of barrel assemblies 2-2 and retraction assemblies 2-3 are realized in the 2-2-8 connection of retraction assemblies fixation hole;The contraction circular conical surface 2-3-
2 for increasing and the flow velocity of retraction assemblies 2-3 inner wall face contact fluid, and then required pressure when increase fluid injection;It is described
Trunnion fixation hole 2-3-3 is used for fixed choke 2-4, and the trunnion limit plane 2-3-4 is for limiting trunnion 2-4 relative to contraction
The position of component 2-3;The retraction assemblies groove 2-3-5 realizes trunnion 2-4 and contraction group for placing III 2-12 of seal assembly
Sealing between part 2-3.
Further, the diffusion component 2-5 is provided with trunnion fixation hole 2-5-1, diffuser cone face 2-5-2, trunnion limit
Bit plane 2-5-3 and diffusion component groove 2-5-4;The trunnion fixation hole 2-5-1 is used to connect with diffusion component connector 2-4-5
It connects, realizes the fixation between diffusion component 2-5 and trunnion 2-4;The diffuser cone face 2-5-2 is used for the pressure and stream of fluid
Quick-release is put, and piezoelectric micromotor spraying mechanism 2 is made to realize better jeting effect;The trunnion limit plane 2-5-3 is for limiting trunnion 2-4
Position;The diffusion component groove 2-5-4 for placing IV 2-13 of seal assembly, realize trunnion 2-4 and diffusion component 2-5 it
Between sealing.
Further, the diameter of the barrel assemblies 2-2 is D1, axial length L1;The axial direction of the retraction assemblies 2-3
Length is L2, and outside diameter is equal with the diameter of barrel assemblies 2-2, and the diameter of small end is D2;The diameter of the trunnion 2-4 is
D2, axial length L3;The axial length of the diffusion component 2-5 is L4, the diameter and trunnion 2-4 of diffusion component 2-5 small end
Diameter it is equal, the diameter of big end is D3;The diameter of the spray orifice 2-17 is D4;The value of the diameter of the barrel assemblies 2-2
Range is 10mm≤D1≤1200mm, and the relationship that the axial length and diameter of the barrel assemblies 2-2 meets is D1=L1;It is described
The relationship that the diameter of retraction assemblies 2-3 small end and the diameter of barrel assemblies 2-2 meet is D2=(1/3~1/4) D1, the contraction
The relationship that the axial length of component 2-3 and the diameter of barrel assemblies 2-2 and retraction assemblies 2-3 meet is L2=(1~2.7) (D1-
D2);The relationship met between the diameter and axial length of the trunnion 2-4 is D2=L3;The diffusion component 2-5 big end it is straight
The relationship that the diameter of diameter and small end meets is D3=(1.2~3) D2, is met between the diameter and length of the diffusion component 2-5
Relationship be L4=(1.5~4) D3;Needed for the size that the diameter of the spray orifice 2-17 is D4 depends in the forming of micro-structure part
The material for the injection wanted, when for common material injection molding, the value of spray orifice 2-17 diameter is 20 μm≤D4≤40 μm;For
When bulky grain polymer solution injection molding, the diameter of setting spray orifice 2-17 is 50 μm≤D4≤100 μm.
Further, the terminal follower 1-6 of the accurate pose_adjuster 1 can realize the clockwise, inverse time around X-axis respectively
Needle rotate an angle, or around Y-axis clockwise, rotate counterclockwise an angle;
The driving method for realizing that terminal follower 1-6 is rotated clockwise around X-axis is as follows:
Step 1 one applies on slowly I 1-4-1 of polarized area and III 1-4-3 of polarized area of bending piezo ceramic element 1-4
The alternating voltage pumping signal risen deforms and driving foot 1-5 is driven slowly to be rotated clockwise around X-axis to extreme position,
Under the action of driving the stiction between foot 1-5 and terminal follower 1-6, terminal follower 1-6 is real clockwise around X-axis
Existing angle output;
Step 1 two, to bending piezo ceramic element 1-4 I 1-4-1 of polarized area and III 1-4-3 of polarized area apply quickly under
The alternating voltage pumping signal of drop, deformation drive driving foot 1-5 to be back to initial bit around the quick rotation of X-axis counter clockwise direction
It sets, under the action of the inertia of terminal follower 1-6, occurs to protect with respect to sliding between terminal follower 1-6 and driving foot 1-5
It holds static;
Step 1 three repeats step 1 one to step 1 two, and terminal follower 1-6 may be implemented around X-axis clockwise direction
Precise rotation;
The driving method for realizing that terminal follower 1-6 is rotated counterclockwise around X-axis is as follows:
Step 2 one, to bending piezo ceramic element 1-4 I 1-4-1 of polarized area and III 1-4-3 of polarized area apply slowly under
The alternating voltage pumping signal of drop deforms and driving foot 1-5 is driven counterclockwise slowly to rotate around X-axis to extreme position,
Under the action of driving the stiction between foot 1-5 and terminal follower 1-6, terminal follower 1-6 is counterclockwise real around X-axis
Existing angle output;
Step 2 two applies on quickly I 1-4-1 of polarized area and III 1-4-3 of polarized area of bending piezo ceramic element 1-4
The alternating voltage pumping signal risen, around X-axis, quickly rotation is back to initial bit to deformation drive driving foot 1-5 clockwise
It sets, under the action of the inertia of terminal follower 1-6, occurs to protect with respect to sliding between terminal follower 1-6 and driving foot 1-5
It holds static;
Step 2 three repeats step 2 one to step 2 two, and terminal follower 1-6 may be implemented around X-axis counter clockwise direction
Precise rotation;
It similarly may be implemented that terminal follower 1-6 is clockwise around Y-axis, anticlockwise precise rotation.
Further, the piezoelectric micromotor spraying mechanism 2 includes two kinds of operating modes, respectively push-pull mode and drawing push-model;
Realize that the course of work of push-pull mode is as follows:
Step 3 one, in original state, piezoelectric element 2-6 no power, the intracavity liquid volume of piezoelectric micromotor spraying mechanism 2 at this time
It does not change, intracavity liquid remain stationary state;
Step 3 two, in the stage of pushing away, piezoelectric element 2-6 passes to positive high level signal, drive elastic film 2-7 generate to
Under Bending Deformation cause pressure to increase due to the reduction of intracavitary volume, generate positive pressure wave, work of the liquid in positive pressure wave
With lower ejection;
Step 3 three, draw the stage, piezoelectric element 2-6 apply electric signal low level is become from positive high level, to
Under Bending Deformation be gradually restored to original state, cause intracavitary pressure to be gradually reduced, generate negative pressure wave, the liquid ejected
Body stream is truncated under the action of negative pressure wave, forms drop;
Step 3 four repeats step 3 one to step 3 three, and piezoelectric micromotor spraying mechanism 2 can be realized intermittent microlayer model spray
It penetrates;
It realizes and draws the course of work of push-model as follows:
Step 4 one, in original state, piezoelectric element 2-6 is in no power, at this time the intracavity liquid of piezoelectric micromotor spraying mechanism 2
Volume does not change, and intracavity liquid remain stationary state;
Step 4 two, in the stage of drawing, piezoelectric element 2-6 passes to negative high level signal, generates upward Bending Deformation, chamber
Inner volume increases, and generates negative pressure wave, partially liq enters cavity;
Step 4 three, in the stage of pushing away, the electric signal that piezoelectric element 2-6 applies becomes low level from negative high level, to
On Bending Deformation be gradually restored to original state, cause intracavitary pressure to be gradually increased, generate positive pressure wave, liquid is just
It is sprayed as liquid stream under the action of pressure wave, forms microlayer model;
Step 4 four repeats step 4 one to step 4 three, and piezoelectric micromotor spraying mechanism 2 can be realized intermittent microlayer model spray
It penetrates.
The present invention also proposes a kind of excitation side for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Method, by the cooperation of accurate pose_adjuster 1 and piezoelectric micromotor spraying mechanism 2, to realize that the surface on contact target face 3 is small
Shaping structures;
A) pose adjustment is carried out to robot using accurate pose_adjuster 1, can realize respectively around X-axis or Y-axis two from
Pose adjustment, the accurate initial injection position for demarcating piezoelectric micromotor spraying mechanism 2 are rotated by degree, while realizing piezoelectric micromotor spraying mechanism 2
Precise movement in jet path;
B) after accurate pose_adjuster 1 is ready, the voltage of the piezoelectric element 2-6 by controlling piezoelectric micromotor spraying mechanism 2
And frequency, realize the micro ejection of molding reagent;
C) trace reagent sprayed acts on contact target face 3, realizes single droplet and the contact in contact target face 3 simultaneously
Uniformly spread;
Above step is repeated, multiple droplets can be made constantly to be injected on contact target face 3, realize surface microfeatures
Molding.
The beneficial effects of the present invention are:
The present invention provides one kind to be used for the molding two-freedom precision Manipulation of the machine people of surface microfeatures and its excitation
Method, the thought which mainly uses drop-on-demand piezoelectric micromotor spray structure to combine with movement mechanism with multiple degrees of freedom carry out
Integrated design has many advantages, such as that structure is simple, and cheap and equipment operation and maintenance is at low cost, while also having molding speed
Degree is very fast, forms high resolution, and device operating noise is low, meets the requirement of multiple material injection forming.Of the present invention one
Kind for the molding two-freedom precision Manipulation of the machine people of surface microfeatures biologic medical, aerospace, material, chemistry with
And the fields such as microelectronic component are with a wide range of applications.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram for the molding two-freedom precision Manipulation of the machine people of surface microfeatures;
Fig. 2 is that a kind of accurate pose_adjuster for the molding two-freedom precision Manipulation of the machine people of surface microfeatures shows
It is intended to;
Fig. 3 is a kind of installation pedestal signal for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Figure;
Fig. 4 is a kind of supporter schematic diagram for the molding two-freedom precision Manipulation of the machine people of surface microfeatures;
Fig. 5 is a kind of cover plate schematic diagram for the molding two-freedom precision Manipulation of the machine people of surface microfeatures;
Fig. 6 is a kind of bending piezoelectric ceramics group for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Part schematic diagram;
Fig. 7 is a kind of driving foot section signal for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Figure;
Fig. 8 is a kind of accurate pose_adjuster for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
The motivational techniques drive waveforms schematic diagram an of angle is rotated clockwise around X-axis or Y-axis;
Fig. 9 is a kind of accurate pose_adjuster for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
The motivational techniques drive waveforms schematic diagram an of angle is rotated counterclockwise around X-axis or Y-axis;
Figure 10 is a kind of piezoelectric micromotor spraying mechanism for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Schematic diagram;
Figure 11 is a kind of barrel assemblies signal for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Figure;
Figure 12 is a kind of retraction assemblies signal for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Figure;
Figure 13 is a kind of trunnion schematic diagram for the molding two-freedom precision Manipulation of the machine people of surface microfeatures;
Figure 14 is a kind of diffusion component signal for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Figure;
Figure 15 is a kind of liquid-inlet connector I for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Schematic diagram;
Figure 16 is a kind of liquid-inlet connector for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
II schematic diagram;
Figure 17 is a kind of piezoelectric micromotor spraying mechanism for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Structure size schematic diagram;
Figure 18 is a kind of piezoelectric micromotor spraying mechanism for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
The operation principle schematic diagram of push-pull mode motivational techniques;
Figure 19 is a kind of piezoelectric micromotor spraying mechanism for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
Draw push-model motivational techniques operation principle schematic diagram.
Specific embodiment
Technical solution in the embodiment of the present invention that following will be combined with the drawings in the embodiments of the present invention carries out clear, complete
Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Specific embodiment 1: illustrating present embodiment in conjunction with FIG. 1 to FIG. 7.Present embodiments provide for one kind to be used for table
The molding two-freedom precision Manipulation of the machine people of face micro-structure;The robot includes accurate pose_adjuster 1, piezoelectric micromotor spraying machine
Structure 2 and contact target face 3;The precision pose_adjuster 1 is connected and fixed with piezoelectric micromotor spraying mechanism 2;The piezoelectric micromotor spraying mechanism 2 with
Contact target face 3 is in discrete state, and piezoelectric micromotor spraying mechanism 2 between 3 the two of contact target face at a distance from can pass through accurate adjust
Appearance mechanism 1 is adjusted.
The precision pose_adjuster 1 includes installation pedestal 1-1, supporter 1-2, cover board 1-3, bending piezo ceramic element 1-
4, foot 1-5, terminal follower 1-6, I 1-7 of connection component, II 1-8 of connection component and follower support component 1-9 are driven;It is described
Installation pedestal 1-1 is fixed by II 1-8 of connection component and supporter 1-2;The cover board 1-3 and supporter 1-2 passes through connection group
II 1-8 of part is fixed;The bending piezo ceramic element 1-4 and driving foot 1-5 are fixed by I 1-7 of connection component;The driving foot
1-5 and terminal follower 1-6 is cooperated using sliding contact;The terminal follower 1-6 is carried out by follower support component 1-9
Position constraint guarantees preferable friction-driven state between driving foot 1-5 and terminal follower 1-6.
The installation pedestal 1-1 is provided with pedestal mounting hole 1-1-1 and energy converter mounting hole 1-1-2, the pedestal installation
Hole 1-1-1 is fixed pedestal 1-1 and supporter 1-2 by II 1-8 of connection component, and the energy converter mounting hole 1-1-2 passes through company
I 1-7 of connected components will be bent piezo ceramic element 1-4 and driving foot 1-5 is fixed;The supporter 1-2 is provided with supporter installation
Hole 1-2-1 and supporter through-hole 1-2-2, the supporter mounting hole 1-2-1 are described for fixed pedestal 1-1 and supporter 1-2
The inside of supporter through-hole 1-2-2 is placed with bending piezo ceramic element 1-4, driving foot 1-5, terminal follower 1-6;The lid
Plate 1-3 is provided with cover board mounting hole 1-3-1, support component mounting hole 1-3-2 and cover plate through hole 1-3-3, the cover board mounting hole
Cover board 1-3 is fixedly connected by 1-3-1 by II 1-8 of connection component with supporter 1-2, the support component mounting hole 1-3-2 with
Follower support component 1-9 is cooperatively connected together, and for terminal follower 1-6 to be pressed on driving foot 1-5, the cover board is logical
Terminal follower 1-6 is placed with inside the 1-3-3 of hole, and terminal follower 1-6 is downward along cover plate through hole 1-3-3 axis direction
Prominent certain height realizes piezoelectric micromotor spraying mechanism 2 in order to which terminal follower 1-6 and piezoelectric micromotor spraying mechanism 2 are attached
Pose adjustment.
The bending piezo ceramic element 1-4 is provided with I 1-4-1 of polarized area, II 1-4-2 of polarized area, III 1-4- of polarized area
3, IV 1-4-4 of polarized area, unpolarized area 1-4-5 and bending piezoelectric ceramics group through-hole 1-4-6;The unpolarized area 1-4-5 is used for
I 1-4-1 of polarized area, II 1-4-2 of polarized area, III 1-4-3 of polarized area and IV 1-4-4 of polarized area are separated, I 1- of polarized area
4-1 and III 1-4-3 of polarized area are diagonally arranged, and II 1-4-2 of polarized area and IV 1-4-4 of polarized area is diagonally arranged, the bending
The polarization direction of piezo ceramic element 1-4 is through-thickness polarization, wherein III 1-4-3's of I 1-4-1 of polarized area and polarized area
Polarization direction on the contrary, the polarization direction of IV 1-4-4 of II 1-4-2 of polarized area and polarized area on the contrary, I 1-4-1 of polarized area and polarized area
The polarization direction of II 1-4-2 is identical, and the polarization direction of adjacent two panels bending piezo ceramic element 1-4 is opposite;P piece bending pressure
In electroceramics component 1-4, the polarized area and i+1 piece for being bent piezo ceramic element 1-4 from one end number i-th are bent piezoelectric ceramics
The polarized area of component 1-4 is provided with excitation electrode, and i+1 piece is bent piezo ceramic element 1-4 and the i-th+2 bending piezoelectric ceramics
Grounding electrode is provided between component 1-4, wherein i is the odd number more than or equal to 1.The driving foot 1-5 is provided with circular arc concave surface
1-5-1, amplitude transformer enlarger 1-5-2 and driving sufficient connecting hole 1-5-3, the circular arc concave surface 1-5-1 are capable of increasing driving foot
Traditional point contact mode is become face contact mode by effective contact area of 1-5 and terminal follower 1-6, is driven by improving
The frictional contact conditions of action spot 1-5 and terminal follower 1-6, and then dynamic response characteristic for promoting terminal follower 1-6 etc. is comprehensive
Performance indicator is closed, the amplitude transformer enlarger 1-5-2 is used to amplify the amplitude of the driving foot end 1-5, promotes terminal follower
The output characteristics of 1-6, the driving foot connecting hole 1-5-3 and I 1-7 of connection component, which are cooperatively connected, will be bent piezo ceramic element 1-
4 and driving foot 1-5 is fixed together.
Specific embodiment 2: illustrating present embodiment in conjunction with FIG. 1 to FIG. 8.Present embodiments provide for a kind of essences
The embodiment of close pose_adjuster, under program excitation, the terminal follower 1-6 of the precision pose_adjuster 1 can be real respectively
Now an angle is rotated clockwise around X-axis;
Motivational techniques are described for convenience, do following regulation first, the polarization to bending piezo ceramic element 1-4
When I 1-4-1 of area and III 1-4-3 of polarized area applies the alternating voltage pumping signal risen, driving foot 1-5 can be clockwise around X-axis
Direction deflects an angle, applies decline to I 1-4-1 of polarized area and III 1-4-3 of polarized area of bending piezo ceramic element 1-4
When alternating voltage pumping signal, generates and counterclockwise deflect an angle around X-axis;To the pole of bending piezo ceramic element 1-4
When changing the alternating voltage pumping signal that II 1-4-2 of area and IV 1-4-4 of polarized area application rises, driving foot 1-5 can be around Y-axis up time
Needle direction deflects an angle, under applying to II 1-4-2 of polarized area and IV 1-4-4 of polarized area of bending piezo ceramic element 1-4
When the alternating voltage pumping signal of drop, driving foot 1-5 can counterclockwise deflect an angle around Y-axis;
The driving method for realizing that terminal follower 1-6 is rotated clockwise around X-axis is as follows:
Step 1 one applies on slowly I 1-4-1 of polarized area and III 1-4-3 of polarized area of bending piezo ceramic element 1-4
The alternating voltage pumping signal risen deforms and driving foot 1-5 is driven slowly to be rotated clockwise around X-axis to extreme position,
Under the action of driving the stiction between foot 1-5 and terminal follower 1-6, terminal follower 1-6 is real clockwise around X-axis
Existing angle output;
Step 1 two, to bending piezo ceramic element 1-4 I 1-4-1 of polarized area and III 1-4-3 of polarized area apply quickly under
The alternating voltage pumping signal of drop, deformation drive driving foot 1-5 to be back to initial bit around the quick rotation of X-axis counter clockwise direction
It sets, under the action of the inertia of terminal follower 1-6, occurs to protect with respect to sliding between terminal follower 1-6 and driving foot 1-5
It holds static;
Step 1 three repeats step 1 one to step 1 two, and terminal follower 1-6 may be implemented around X-axis clockwise direction
Precise rotation.
Specific embodiment 3: illustrating present embodiment in conjunction with FIG. 1 to FIG. 7, Fig. 9.Present embodiments provide for one
The embodiment of the accurate pose_adjuster of kind, under program excitation, the terminal follower 1-6 of the precision pose_adjuster 1 can be real
Now an angle is rotated counterclockwise around X-axis;
The driving method for realizing that terminal follower 1-6 is rotated counterclockwise around X-axis is as follows:
Step 2 one, to bending piezo ceramic element 1-4 I 1-4-1 of polarized area and III 1-4-3 of polarized area apply slowly under
The alternating voltage pumping signal of drop deforms and driving foot 1-5 is driven counterclockwise slowly to rotate around X-axis to extreme position,
Under the action of driving the stiction between foot 1-5 and terminal follower 1-6, terminal follower 1-6 is counterclockwise real around X-axis
Existing angle output;
Step 2 two applies on quickly I 1-4-1 of polarized area and III 1-4-3 of polarized area of bending piezo ceramic element 1-4
The alternating voltage pumping signal risen, around X-axis, quickly rotation is back to initial bit to deformation drive driving foot 1-5 clockwise
It sets, under the action of the inertia of terminal follower 1-6, occurs to protect with respect to sliding between terminal follower 1-6 and driving foot 1-5
It holds static;
Step 2 three repeats step 2 one to step 2 two, and terminal follower 1-6 may be implemented around X-axis counter clockwise direction
Precise rotation.
Specific embodiment 4: illustrating present embodiment in conjunction with FIG. 1 to FIG. 9.Present embodiments provide for a kind of essences
The embodiment of close pose_adjuster, under program excitation, the terminal follower 1-6 of the precision pose_adjuster 1 be can be realized around Y
Axis rotates an angle;
Realize that terminal follower 1-6 turns about the X axis one with terminal follower 1-6 is realized around the driving method that Y-axis rotates
The driving method of angle is similar, applies phase to II 1-4-2 of polarized area and IV 1-4-4 of polarized area of bending piezo ceramic element 1-4
The pumping signal answered can be realized terminal follower 1-6 around Y-axis and rotate an angle.
Specific embodiment 5: illustrating present embodiment in conjunction with Figure 10~Figure 17.Present embodiments provide for one kind
For the molding two-freedom precision Manipulation of the machine people of surface microfeatures, the piezoelectric micromotor spraying mechanism 2 of the robot includes upper
Cover 2-1, barrel assemblies 2-2, retraction assemblies 2-3, trunnion 2-4, diffusion component 2-5, piezoelectric element 2-6, elastic film 2-7, liquid
I 2-8 of body inlet union, II 2-9 of liquid-inlet connector, I 2-10 of seal assembly, II 2-11 of seal assembly, III 2-12 of seal assembly,
IV 2-13 of seal assembly, V 2-14 of seal assembly, seal assembly VI 2-15 and nozzle plate 2-16;The upper cover 2-1 and terminal are defeated
Device 1-6 is fixedly connected out, by the pose adjustment of terminal follower 1-6, and then piezoelectric micromotor spraying mechanism 2 is driven to move, is realized pressure
The micro- spraying mechanism 2 of electricity carries out liquid injection with different initial positions, and the upper cover 2-1 and barrel assemblies 2-2 are to elastic film 2-7
It is clamped fixation, and is sealed by I 2-10 of seal assembly;The barrel assemblies 2-2 and retraction assemblies 2-3 is fixed to be connected
It connects, and is sealed by II 2-11 of seal assembly;The retraction assemblies 2-3 is fixedly connected with trunnion 2-4, and passes through sealing group
III 2-12 of part sealing;The trunnion 2-4 is fixedly connected with diffusion component 2-5, and is sealed by IV 2-13 of seal assembly;The pressure
Electric device 2-6 is fixedly connected with elastic film 2-7;I 2-8 of liquid-inlet connector is fixedly connected with barrel assemblies 2-2, and is led to
VI 2-15 of seal assembly is crossed to be fixedly connected;II 2-9 of liquid-inlet connector is fixedly connected with trunnion 2-4, and passes through sealing group
V 2-14 of part is sealed;The nozzle plate 2-16 is fixedly connected with diffusion component 2-5, while nozzle plate 2-16 is provided with spray orifice
2-17, and the diameter of spray orifice 2-17 is adjustable.
The barrel assemblies 2-2 is provided with annular connection plane 2-2-1, barrel assemblies groove I 2-2-2, inlet union limit
I 2-2-3 of bit plane, it barrel assemblies groove II 2-2-4, inlet union fixation hole 2-2-5, III 2-2-6 of barrel assemblies groove, shrinks
Component limits plane 2-2-7 and retraction assemblies fixation hole 2-2-8;The annular connection plane 2-2-1 is used for and terminal follower
1-6 is fixed;The barrel assemblies groove I 2-2-2 realizes barrel assemblies 2-2 and elastic film for placing I 2-10 of seal assembly
Sealing between 2-7;Inlet union limit I 2-2-3 of plane provides supporting surface for fixed I 2-8 of liquid inlet union, and leads to
It crosses inlet union fixation hole 2-2-5 I 2-8 of liquid-inlet connector is fixed on inlet union limit I 2-2-3 of plane;The circle
Cartridge module groove II 2-2-4 is realized between liquid-inlet connector I 2-8 and barrel assemblies 2-2 for placing VI 2-15 of seal assembly
Sealing;The retraction assemblies limit plane 2-2-7 is used for the position of confined shrinkage component 2-3;The retraction assemblies fixation hole
2-2-8 is used to for retraction assemblies 2-3 being fixed on retraction assemblies limit plane 2-2-7;III 2-2-6 of barrel assemblies groove is used
In placing II 2-11 of seal assembly, the sealing between barrel assemblies 2-2 and retraction assemblies 2-3 is realized.
The retraction assemblies 2-3 is provided with barrel assemblies connector 2-3-1, shrinks circular conical surface 2-3-2, trunnion fixation hole 2-3-
3, trunnion limits plane 2-3-4 and retraction assemblies groove 2-3-5;The barrel assemblies connector 2-3-1 is used for solid with retraction assemblies
Determine hole 2-2-8 connection, realizes the fixation of barrel assemblies 2-2 and retraction assemblies 2-3;The contraction circular conical surface 2-3-2 is for increasing
With the flow velocity of retraction assemblies 2-3 inner wall face contact fluid, and then required pressure when increasing fluid injection;The trunnion fixation hole
2-3-3 is used for fixed choke 2-4, and the trunnion limit plane 2-3-4 is for limiting trunnion 2-4 relative to retraction assemblies 2-3's
Position;The retraction assemblies groove 2-3-5 is realized between trunnion 2-4 and retraction assemblies 2-3 for placing III 2-12 of seal assembly
Seal protection.
The trunnion 2-4 is provided with retraction assemblies connector 2-4-1, inlet union limit II 2-4-2 of plane, inlet union and connects
Meet hole 2-4-3, trunnion groove 2-4-4 and diffusion component connector 2-4-5;The retraction assemblies connector 2-4-1 is used for solid with trunnion
Determine hole 2-3-3 connection, realizes that barrel assemblies 2-2 is fixedly connected with retraction assemblies 2-3;The inlet union connecting hole 2-4-3 is used
It is limited on II 2-4-2 of plane in II 2-9 of liquid-inlet connector to be fixed on to inlet union;The trunnion groove 2-4-4 is for putting
V 2-14 of seal assembly is set, realizes the seal protection between liquid-inlet connector II 2-9 and trunnion 2-4;The diffusion component connects
Head 2-4-5 is fixedly connected for realizing trunnion 2-4 and diffusion component 2-5's;
The diffusion component 2-5 is provided with trunnion fixation hole 2-5-1, diffuser cone face 2-5-2, trunnion limit plane 2-5-
3 and diffusion component groove 2-5-4;The trunnion fixation hole 2-5-1 realizes diffusion for connecting with diffusion component connector 2-4-5
Fixation between component 2-5 and trunnion 2-4;The diffuser cone face 2-5-2 is used to discharge the pressure of fluid and flow velocity, makes to press
The micro- spraying mechanism 2 of electricity realizes better jeting effect;The trunnion limit plane 2-5-3 is used to limit the position of trunnion 2-4;It is described
Diffusion component groove 2-5-4 realizes that the sealing between trunnion 2-4 and diffusion component 2-5 is protected for placing IV 2-13 of seal assembly
Shield.
I 2-8 of liquid-inlet connector is provided with I 2-8-1 of pipeline connecting hole, I 2-8-2 of inlet union inner conical surface and cylinder
Component connecting pin 2-8-3;I 2-8-1 of pipeline connecting hole with peripheral liquid pipeline for connecting, the barrel assemblies connecting pin
2-8-3 is fixed with barrel assemblies 2-2, I both ends 2-8-2 of inlet union inner conical surface respectively with I 2-8-1 of pipeline connecting hole and circle
Cartridge module connecting pin 2-8-3 is fixedly connected;II 2-9 of liquid-inlet connector is provided with II 2-9-1 of pipeline connecting hole, import connects
Head II 2-9-2 of inner conical surface and trunnion component connecting pin 2-9-3;II 2-9-1 of pipeline connecting hole is used for and peripheral liquid pipeline
Connection, trunnion component connecting pin 2-9-3 and trunnion 2-4 fixes, II both ends 2-9-2 of inlet union inner conical surface respectively with
II 2-9-1 of pipeline connecting hole is fixedly connected with trunnion component connecting pin 2-9-3.
The diameter of the barrel assemblies 2-2 is D1, axial length L1;The axial length of the retraction assemblies 2-3 is L2,
Outside diameter is equal with the diameter of barrel assemblies 2-2, and the diameter of small end is D2;The diameter of the trunnion 2-4 is D2, axial length
For L3;The axial length of the diffusion component 2-5 is L4, and the diameter of diffusion component 2-5 small end is equal with the diameter of trunnion 2-4,
The diameter of big end is D3;The diameter of the spray orifice 2-17 is D4;The value range of the diameter of the barrel assemblies 2-2 is generally
The axial length of 10mm≤D1≤1200mm, the barrel assemblies 2-2 and the relationship of diameter general satisfaction are D1=L1;The receipts
The relationship of the diameter general satisfaction of the diameter and barrel assemblies 2-2 of contracting component 2-3 small end is D2=(1/3~1/4) D1, the receipts
The relationship that the axial length of contracting component 2-3 and the diameter of barrel assemblies 2-2 and retraction assemblies 2-3 meet is L2=(1~2.7)
(D1-D2);The relationship met between the diameter and axial length of the trunnion 2-4 is D2=L3;The diffusion component 2-5 big end
Diameter and small end diameter meet relationship be D3=(1.2~3) D2, between the diameter and length of the diffusion component 2-5
The relationship of satisfaction is L4=(1.5~4) D3;The diameter of the spray orifice 2-17 be D4 depend mainly on the size of micro-structure part at
The material of required injection in shape, when for general material injection molding, the value of spray orifice 2-17 diameter be 20 μm≤D4≤
40μm;When for certain bulky grain polymer solution injection moldings, the diameter for needing to be arranged spray orifice 2-17 is 50 μm≤D4≤100
μm。
Specific embodiment 6: illustrating present embodiment in conjunction with Figure 10, Figure 18.Present embodiments provide for a kind of pressures
The embodiment of the micro- spraying mechanism of electricity, realizes that the course of work of push-pull mode is as follows:
Step 3 one, in original state, piezoelectric element 2-6 no power, the intracavity liquid volume of piezoelectric micromotor spraying mechanism 2 at this time
It does not change, intracavity liquid remain stationary state;
Step 3 two, in the stage of pushing away, piezoelectric element 2-6 passes to positive high level signal, drive elastic film 2-7 generate to
Under Bending Deformation cause pressure to increase due to the reduction of intracavitary volume, generate positive pressure wave, work of the liquid in positive pressure wave
With lower ejection;
Step 3 three, draw the stage, piezoelectric element 2-6 apply electric signal low level is become from positive high level, to
Under Bending Deformation be gradually restored to original state, cause intracavitary pressure to be gradually reduced, generate negative pressure wave, the liquid ejected
Body stream is truncated under the action of negative pressure wave, forms drop;
Step 3 four repeats step 3 one to step 3 three, and piezoelectric micromotor spraying mechanism 2 can be realized intermittent microlayer model spray
It penetrates.
Specific embodiment 7: illustrating present embodiment in conjunction with Figure 10, Figure 19.Present embodiments provide for a kind of pressures
The embodiment of the micro- spraying mechanism of electricity, realizes and draws the course of work of push-model as follows:
It realizes and draws the course of work of push-model as follows:
Step 4 one, in original state, piezoelectric element 2-6 is in no power, at this time the intracavity liquid of piezoelectric micromotor spraying mechanism 2
Volume does not change, and intracavity liquid remain stationary state;
Step 4 two, in the stage of drawing, piezoelectric element 2-6 passes to negative high level signal, generates upward Bending Deformation, chamber
Inner volume increases, and generates negative pressure wave, partially liq enters cavity;
Step 4 three, in the stage of pushing away, the electric signal that piezoelectric element 2-6 applies becomes low level from negative high level, to
On Bending Deformation be gradually restored to original state, cause intracavitary pressure to be gradually increased, generate positive pressure wave, liquid is just
It is sprayed as liquid stream under the action of pressure wave, forms microlayer model;
Step 4 four repeats step 4 one to step 4 three, and piezoelectric micromotor spraying mechanism 2 can be realized intermittent microlayer model spray
It penetrates.
Two kinds of mode of operation feature comparisons are as follows:
A) it for given spray orifice 2-17 diameter, works in the case where drawing push-model, the diameter of droplets that piezoelectric micromotor spraying mechanism 2 generates
The about half of push-pull mode generation diameter of droplets;
B) work is in the case where drawing push-model, and the drop velocity that piezoelectric micromotor spraying mechanism 2 generates is faster;
C) in the case where drawing push-model, it is only push-pull mode that piezoelectric micromotor spraying mechanism 2, which generates driving voltage required for droplet, for work
Half;
In conclusion work in the case where drawing push-model, piezoelectric micromotor spraying mechanism 2 be more suitable for injection smaller particle diameter solution into
The molding of row micro-structure;Work under push-pull mode, piezoelectric micromotor spraying mechanism 2 be more suitable for spray larger particles diameter solution into
The forming of row micro-structure.
Specific embodiment 8: illustrating present embodiment in conjunction with Fig. 1, Fig. 8~Fig. 9, Figure 18~Figure 19.This is specific real
The mode of applying provides a kind of motivational techniques for the molding two-freedom precision Manipulation of the machine people of surface microfeatures, passes through essence
The cooperation of close pose_adjuster 1 and piezoelectric micromotor spraying mechanism 2, to realize the surface microfeatures molding on contact target face 3;
Step 5 one carries out pose adjustment to robot using accurate pose_adjuster 1, can realize respectively around X-axis or Y-axis
Two-freedom rotate pose adjustment, the accurate initial injection position for demarcating piezoelectric micromotor spraying mechanism 2, while realizing that piezoelectric micromotor sprays
Precise movement of the mechanism 2 in jet path;
Step 5 two, after accurate pose_adjuster 1 is ready, pass through control piezoelectric micromotor spraying mechanism 2 alternating voltage letter
Number, realize the micro extrusion of molding reagent;
Step 5 three, squeeze out trace reagent it is uniform be injected on contact target face 3, realize single droplet and connect
It touches the contact of target face 3 and is uniformly spread;
Step 5 four repeats step 5 one to step 5 three, can make each droplet constantly on contact target face 3, in fact
The molding of existing surface microfeatures.
In conclusion provided by the invention a kind of for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
And its motivational techniques, the robot mainly use drop-on-demand piezoelectric micromotor spray structure to combine with movement mechanism with multiple degrees of freedom
Thought carries out integrated design, has many advantages, such as that structure is simple, cheap and equipment operation and maintenance is at low cost, while also having
Have that shaping speed is very fast, form high resolution, operating noise is low, meets the requirement of multiple material injection forming.The present invention relates to
One kind for the molding two-freedom precision Manipulation of the machine people of surface microfeatures in biologic medical, aerospace, material, change
It learns and the fields such as microelectronic component is with a wide range of applications.
Above to provided by the present invention a kind of for the molding two-freedom precision Manipulation of the machine people of surface microfeatures
And its motivational techniques, it is described in detail, specific case used herein carries out the principle of the present invention and embodiment
It illustrates, the above description of the embodiment is only used to help understand the method for the present invention and its core ideas;Meanwhile for ability
The those skilled in the art in domain, according to the thought of the present invention, there will be changes in the specific implementation manner and application range, comprehensive
Upper described, the contents of this specification are not to be construed as limiting the invention.
Claims (10)
1. one kind is used for the molding two-freedom precision Manipulation of the machine people of surface microfeatures, it is characterised in that: the robot
Including accurate pose_adjuster (1), piezoelectric micromotor spraying mechanism (2) and contact target face (3);The precision pose_adjuster (1) and piezoelectricity
Micro- spraying mechanism (2) is fixedly connected;The piezoelectric micromotor spraying mechanism (2) and contact target face (3) are in discrete state, and piezoelectric micromotor sprays
Mechanism (2) between contact target face (3) the two at a distance from can be adjusted by accurate pose_adjuster (1).
2. robot according to claim 1, it is characterised in that: the precision pose_adjuster (1) includes installation pedestal (1-
1), supporter (1-2), cover board (1-3), bending piezo ceramic element (1-4), driving foot (1-5), terminal follower (1-6), company
Connected components I (1-7), connection component II (1-8) and follower support component (1-9);The installation pedestal (1-1) passes through connection group
Part II (1-8) and supporter (1-2) are fixed;The cover board (1-3) and supporter (1-2) are fixed by connection component II (1-8);
The bending piezo ceramic element (1-4) and driving foot (1-5) are fixed by connection component I (1-7);The driving foot (1-5)
Cooperated with terminal follower (1-6) using sliding contact;The terminal follower (1-6) passes through follower support component (1-9)
Carry out position constraint.
3. robot according to claim 1, it is characterised in that: the piezoelectric micromotor spraying mechanism (2) include upper cover (2-1),
Barrel assemblies (2-2), retraction assemblies (2-3), trunnion (2-4), diffusion component (2-5), piezoelectric element (2-6), elastic film (2-
7), liquid-inlet connector I (2-8), liquid-inlet connector II (2-9), seal assembly I (2-10), seal assembly II (2-11), close
Sealing assembly III (2-12), seal assembly IV (2-13), seal assembly V (2-14), seal assembly VI (2-15) and nozzle plate (2-
16);The upper cover (2-1) is fixedly connected with terminal follower (1-6), by the pose adjustment of terminal follower (1-6), in turn
Piezoelectric micromotor spraying mechanism (2) movement is driven, realizes that piezoelectric micromotor spraying mechanism (2) carry out liquid injection with different initial positions, it is described
Upper cover (2-1) and barrel assemblies (2-2) are clamped fixation to elastic film (2-7), and are carried out by seal assembly I (2-10)
Sealing;The barrel assemblies (2-2) are fixedly connected with retraction assemblies (2-3), and are sealed by seal assembly II (2-11);
The retraction assemblies (2-3) are fixedly connected with trunnion (2-4), and are sealed by seal assembly III (2-12);The trunnion (2-4)
It is fixedly connected with diffusion component (2-5), and is sealed by seal assembly IV (2-13);The piezoelectric element (2-6) and Thin Elastic
Film (2-7) is fixedly connected;The liquid-inlet connector I (2-8) is fixedly connected with barrel assemblies (2-2), and passes through seal assembly
VI (2-15) is fixedly connected;The liquid-inlet connector II (2-9) is fixedly connected with trunnion (2-4), and passes through seal assembly V
(2-14) is sealed;The nozzle plate (2-16) is fixedly connected with diffusion component (2-5), while nozzle plate (2-16) is provided with
Spray orifice (2-17), and the diameter of spray orifice (2-17) is adjustable.
4. robot according to claim 3, it is characterised in that: it is flat that the barrel assemblies (2-2) are provided with annular connection
Face (2-2-1), barrel assemblies groove I (2-2-2), inlet union limit plane I (2-2-3), barrel assemblies groove II (2-2-
4), inlet union fixation hole (2-2-5), barrel assemblies groove III (2-2-6), retraction assemblies limit plane (2-2-7) and contraction
Component fixation hole (2-2-8);Annular connection plane (2-2-1) is used for fixed with terminal follower (1-6);The cylinder group
Part groove I (2-2-2) is realized between barrel assemblies (2-2) and elastic film (2-7) for placing seal assembly I (2-10)
Sealing;Inlet union limit plane I (2-2-3) is that fixed liquid inlet union I (2-8) provides supporting surface, and by into
Liquid-inlet connector I (2-8) is fixed in inlet union limit plane I (2-2-3) by mouth connector fixation hole (2-2-5);It is described
Barrel assemblies groove II (2-2-4) realizes liquid-inlet connector I (2-8) and cylinder group for placing seal assembly VI (2-15)
Sealing between part (2-2);Retraction assemblies limit plane (2-2-7) is used for the position of confined shrinkage component (2-3);It is described
Retraction assemblies fixation hole (2-2-8) is used to for retraction assemblies (2-3) to be fixed on retraction assemblies limit plane (2-2-7);It is described
Barrel assemblies groove III (2-2-6) realizes barrel assemblies (2-2) and retraction assemblies (2- for placing seal assembly II (2-11)
3) sealing between.
5. robot according to claim 3, it is characterised in that: the retraction assemblies (2-3) are provided with barrel assemblies and connect
Head (2-3-1), contraction circular conical surface (2-3-2), trunnion fixation hole (2-3-3), trunnion limit plane (2-3-4) and retraction assemblies are recessed
Slot (2-3-5);The barrel assemblies connector (2-3-1) realizes barrel assemblies for connecting with retraction assemblies fixation hole (2-2-8)
The fixation of (2-2) and retraction assemblies (2-3);The contraction circular conical surface (2-3-2) is for increasing and retraction assemblies (2-3) inner wall
The flow velocity of fluid is contacted, and then increases pressure required when fluid injection;The trunnion fixation hole (2-3-3) is used for fixed choke
(2-4), trunnion limit plane (2-3-4) is for limiting position of the trunnion (2-4) relative to retraction assemblies (2-3);It is described
Retraction assemblies groove (2-3-5) is realized between trunnion (2-4) and retraction assemblies (2-3) for placing seal assembly III (2-12)
Sealing.
6. robot according to claim 3, it is characterised in that: the diffusion component (2-5) is provided with trunnion fixation hole
(2-5-1), diffuser cone face (2-5-2), trunnion limit plane (2-5-3) and diffusion component groove (2-5-4);The trunnion is solid
Hole (2-5-1) is determined for connecting with diffusion component connector (2-4-5), realizes consolidating between diffusion component (2-5) and trunnion (2-4)
It is fixed;The diffuser cone face (2-5-2) is used to discharge the pressure of fluid and flow velocity, realizes piezoelectric micromotor spraying mechanism (2) more preferable
Jeting effect;Trunnion limit plane (2-5-3) is used to limit the position of trunnion (2-4);Diffusion component groove (the 2-
5-4) for placing seal assembly IV (2-13), the sealing between trunnion (2-4) and diffusion component (2-5) is realized.
7. robot according to claim 3, it is characterised in that: the diameter of the barrel assemblies (2-2) is D1, axial long
Degree is L1;The axial length of the retraction assemblies (2-3) is L2, and outside diameter is equal with the diameter of barrel assemblies (2-2), small end
Diameter be D2;The diameter of the trunnion (2-4) is D2, axial length L3;The axial length of the diffusion component (2-5) is
The diameter of L4, diffusion component (2-5) small end are equal with the diameter of trunnion (2-4), and the diameter of big end is D3;The spray orifice (2-17)
Diameter be D4;The value range of the diameter of the barrel assemblies (2-2) is 10mm≤D1≤1200mm, the barrel assemblies
The relationship that the axial length and diameter of (2-2) meet is D1=L1;The diameter and barrel assemblies of retraction assemblies (2-3) small end
The relationship that the diameter of (2-2) meets is D2=(1/3~1/4) D1, the axial length and barrel assemblies of the retraction assemblies (2-3)
The relationship that (2-2) and the diameter of retraction assemblies (2-3) meet is L2=(1~2.7) (D1-D2);The diameter of the trunnion (2-4)
The relationship met between axial length is D2=L3;The diameter of diffusion component (2-5) big end and the diameter of small end meet
Relationship be D3=(1.2~3) D2, the relationship met between the diameter and length of the diffusion component (2-5) be L4=(1.5
~4) D3;The size that the diameter of the spray orifice (2-17) is D4 depends on the material of required injection in the forming of micro-structure part
Material, when for common material injection molding, the value of spray orifice (2-17) diameter is 20 μm≤D4≤40 μm;Bulky grain is polymerize
When object solution injection molding, the diameter of setting spray orifice (2-17) is 50 μm≤D4≤100 μm.
8. robot described in any one of -7 according to claim 1, it is characterised in that: the end of the precision pose_adjuster (1)
End follower (1-6) can realize respectively around X-axis clockwise, rotate counterclockwise an angle, or around Y-axis clockwise, the inverse time
Needle rotates an angle;
The driving method for realizing that terminal follower (1-6) is rotated clockwise around X-axis is as follows:
Step 1 one applies slowly the polarized area I (1-4-1) and polarized area III (1-4-3) of bending piezo ceramic element (1-4)
The alternating voltage pumping signal of rising, deformation drive drive foot (1-5) slowly to rotate clockwise around X-axis and extremely limit
It sets, under the action of driving the stiction between foot (1-5) and terminal follower (1-6), terminal follower (1-6) is around X-axis
An angle output is realized clockwise;
Step 1 two applies quickly the polarized area I (1-4-1) and polarized area III (1-4-3) of bending piezo ceramic element (1-4)
The alternating voltage pumping signal of decline, deformation drive driving foot (1-5) is counterclockwise quickly rotated around X-axis to be back to initially
Position occurs opposite under the action of the inertia of terminal follower (1-6), between terminal follower (1-6) and driving foot (1-5)
It slides and remain stationary;
Step 1 three repeats step 1 one to step 1 two, and it is clockwise around X-axis that terminal follower (1-6) may be implemented
Precise rotation;
The driving method for realizing that terminal follower (1-6) is rotated counterclockwise around X-axis is as follows:
Step 2 one applies slowly the polarized area I (1-4-1) and polarized area III (1-4-3) of bending piezo ceramic element (1-4)
The alternating voltage pumping signal of decline, deformation drive drive foot (1-5) counterclockwise slowly to rotate around X-axis and extremely limit
It sets, under the action of driving the stiction between foot (1-5) and terminal follower (1-6), terminal follower (1-6) is around X-axis
Counterclockwise realize an angle output;
Step 2 two applies quickly the polarized area I (1-4-1) and polarized area III (1-4-3) of bending piezo ceramic element (1-4)
The alternating voltage pumping signal of rising, deformation drive driving foot (1-5) quickly rotates clockwise around X-axis to be back to initially
Position occurs opposite under the action of the inertia of terminal follower (1-6), between terminal follower (1-6) and driving foot (1-5)
It slides and remain stationary;
Step 2 three repeats step 2 one to step 2 two, and it is anticlockwise around X-axis that terminal follower (1-6) may be implemented
Precise rotation;
It similarly may be implemented that terminal follower (1-6) is clockwise around Y-axis, anticlockwise precise rotation.
9. robot described in any one of -7 according to claim 1, it is characterised in that: the piezoelectric micromotor spraying mechanism (2) includes
Two kinds of operating modes, respectively push-pull mode and drawing push-model;
Realize that the course of work of push-pull mode is as follows:
Step 3 one, in original state, piezoelectric element (2-6) no power, the intracavity liquid volume of piezoelectric micromotor spraying mechanism (2) at this time
It does not change, intracavity liquid remain stationary state;
Step 3 two, in the stage of pushing away, piezoelectric element (2-6) passes to positive high level signal, drive elastic film (2-7) generate to
Under Bending Deformation cause pressure to increase due to the reduction of intracavitary volume, generate positive pressure wave, work of the liquid in positive pressure wave
With lower ejection;
Step 3 three, draw the stage, piezoelectric element (2-6) apply electric signal low level is become from positive high level, by downward
Bending Deformation be gradually restored to original state, cause intracavitary pressure to be gradually reduced, generate negative pressure wave, the liquid ejected
Stream is truncated under the action of negative pressure wave, forms drop;
Step 3 four repeats step 3 one to step 3 three, and piezoelectric micromotor spraying mechanism (2) can be realized intermittent fine liquid drop spray;
It realizes and draws the course of work of push-model as follows:
Step 4 one, in original state, piezoelectric element (2-6) is in no power, at this time the intracavity liquid of piezoelectric micromotor spraying mechanism (2)
Volume does not change, and intracavity liquid remain stationary state;
Step 4 two, draw the stage, piezoelectric element (2-6) passes to negative high level signal, generates upward Bending Deformation, intracavitary
Volume increases, and generates negative pressure wave, partially liq enters cavity;
Step 4 three, in the stage of pushing away, the electric signal that piezoelectric element (2-6) applies becomes low level from negative high level, by upward
Bending Deformation be gradually restored to original state, cause intracavitary pressure to be gradually increased, generate positive pressure wave, liquid is in positive pressure
It is sprayed as liquid stream under the action of Reeb, forms microlayer model;
Step 4 four repeats step 4 one to step 4 three, and piezoelectric micromotor spraying mechanism (2) can be realized intermittent fine liquid drop spray.
10. a kind of motivational techniques for the molding two-freedom precision Manipulation of the machine people of surface microfeatures, the motivational techniques
It is based on of any of claims 1-9 a kind of for the molding two-freedom precision Manipulation of the machine of surface microfeatures
What people realized, it is characterised in that: by the cooperation of accurate pose_adjuster (1) and piezoelectric micromotor spraying mechanism (2), connect with realizing
Touch the surface microfeatures molding on target face (3);
A) pose adjustment is carried out to robot using accurate pose_adjuster (1), can realizes two freedom around X-axis or Y-axis respectively
Degree rotation pose adjustment, the accurate initial injection position for demarcating piezoelectric micromotor spraying mechanism (2), while realizing piezoelectric micromotor spraying mechanism
(2) precise movement in jet path;
B) after accurate pose_adjuster (1) is ready, the electricity of the piezoelectric element (2-6) by controlling piezoelectric micromotor spraying mechanism (2)
Pressure and frequency realize the micro ejection of molding reagent;
C) trace reagent sprayed acts on contact target face (3), realizes single droplet and the contact of contact target face (3) simultaneously
Uniformly spread;
Repeat above step, multiple droplets can be made constantly to be injected on contact target face (3), realize surface microfeatures at
Type.
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