CN107171589A - A kind of cymbal type two-freedom piezoelectric actuator and the motivational techniques for the two-freedom motion realized using the driver - Google Patents
A kind of cymbal type two-freedom piezoelectric actuator and the motivational techniques for the two-freedom motion realized using the driver Download PDFInfo
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Abstract
A kind of cymbal type two-freedom piezoelectric actuator and the motivational techniques for the two-freedom motion realized using the driver, belong to piezoelectric driving technology field.Solving existing two-freedom Piexoelectric actuator is realized in the form of the superposition of single-degree-of-freedom drive device, and physical dimension is big, and is not easy to realize miniaturization issues.Driver includes piezoelectric ceramic piece, cymbal shape sheet metal, driving foot, pedestal and mover；When piezoelectric ceramics applies voltage excitation signals, the full existing two-freedom of driving of piezoelectric actuator is encouraged to swing.By changing the voltage excitation signals of cymbal type two-freedom piezoelectric actuator, the swaying direction of its driving foot can be controlled, further by the use of frictional force as driving force, driving mover realizes that two-freedom is moved.Present invention is mainly applied to the field such as the narrow and small life science of working space and nanometer manufacture.
Description
Technical field
The invention belongs to piezoelectric driving technology field.
Background technology
In recent years, piezoelectric actuator is as a kind of novel driving device, using the inverse piezoelectric effect of piezoelectric, in elasticity
The specific location of body motivates specific movement locus, using elastomer as stator or mover, using frictional force, realizes to dynamic
The driving of son.Piezoelectric actuator has simple in construction, precision height, and soon, power density is big, cuts off self-lock for response, not dry by electromagnetism
The advantages of disturbing, this makes it have great application prospect in fields such as Ultra-precision Turning, positioning.
Two-freedom Piexoelectric actuator, can be achieved two-freedom driving, and single driver can realize more functions,
Have been obtained for extensive research.Existing two-freedom Piexoelectric actuator, it is main to include two kinds：One kind is two single free
Piexoelectric actuator parallel manipulator structure is spent, is connected using flexible hinge, realizes that two-freedom drives, but such drive device knot
Structure is complicated, and matching requirements are high, and delivery stroke is small, limits its application.Another is two single-degree-of-freedom Piezoelectric Drivings
Device is connected, and realizes that two-freedom drives, although such drive device effectively increases its and drives stroke, but is serially connected and makes
Obtain output error to be overlapped mutually, reduce driving precision.Meanwhile, both two-freedom Piexoelectric actuators are all single-degree-of-freedoms
The form of drive device superposition, physical dimension is too big, is not easy to realize miniaturization.
The content of the invention
The present invention be in order to solve existing two-freedom Piexoelectric actuator all be using single-degree-of-freedom drive device superposition
Form realize that physical dimension is big, and is not easy to realize miniaturization issues, and the invention provides a kind of cymbal type two-freedom piezoelectricity
Driver and the motivational techniques for the two-freedom motion realized using the driver.
Cymbal type two-freedom piezoelectric actuator, it includes piezoelectric ceramic piece, cymbal shape sheet metal, driving foot, pedestal and mover；
The piezoelectric ceramic piece through-thickness polarization, including four polarization subregions, are one area of polarization, polarization two respectively
Area, 4th area of 3rd area of polarization and polarization, wherein, one area of polarization and 3rd area of polarization are diagonally arranged, and polarised direction is on the contrary, 2nd area of polarization
It is diagonally arranged with 4th area of polarization, and polarised direction is opposite；
The cymbal shape sheet metal includes upper cymbal shape sheet metal and lower cymbal shape sheet metal, and the two is symmetrically arranged in piezoelectric ceramics
The upper and lower surface of piece, lower cymbal shape sheet metal is fixedly connected with pedestal；
The head end of the driving foot is fixedly connected with the upper surface of upper cymbal shape sheet metal, and the outer surface of its end and mover connects
Touch, mover is rotated with pedestal and is connected.
The described piezoelectric ceramic piece upper and lower surface sets exciting electrode piece and grounding electrode piece respectively.
The raised sheet metal in cymbal shape centered on described cymbal shape sheet metal, and upper cymbal shape sheet metal central protuberance points to drive
Action spot, lower cymbal shape sheet metal central protuberance points to pedestal.
Described mover is ball-type mover, plane mover or tubular mover.
The motivational techniques for the two-freedom motion realized using described cymbal type two-freedom piezoelectric actuator, the excitation side
Method can drive mover to realize that two-freedom is moved, and be embodied in：Driving mover is rotated clockwise or counterclockwise around X-axis, and
Rotated clockwise or counterclockwise around Y-axis；
Wherein, X-axis and direction pointed by Y-axis are two in piezoelectric actuator sagittal plane mutual vertical directions；
(1) driving mover is around the detailed process that X-axis is rotated counterclockwise：
Step applies the driving voltage signal that amplitude is gradually increasing, rise time one by one, to 2nd area of polarization with 4th area of polarization
For t1, extreme position is gradually rocked to along Y-axis forward direction so as to drive driving sufficient, using the stiction driven between foot and mover,
Driving mover rotates counterclockwise an angle around X-axis；
Step one two, the driving voltage signal that 2nd area of polarization are gradually reduced with 4th area of polarization application amplitude, fall time
For t2, and t2<<T1, so as to drive driving foot to return to initial position along Y-axis forward direction, due to inertia, mover maintains the original state；
Step one three, repeat step arrive step one two one by one, realize cymbal type two-freedom piezoelectric actuator to mover
Continuous stepped drives, and finally realizes driving mover and is persistently rotated counterclockwise around X-axis；
(2) driving mover is around the detailed process that X-axis is rotated clockwise：
Step 2 one, the driving voltage signal that 2nd area of polarization are gradually reduced with 4th area of polarization application amplitude, fall time
For t1, foot is driven gradually to be rocked to extreme position along Y-axis negative sense so as to drive, using the stiction driven between foot and mover,
Driving mover rotates clockwise an angle around X-axis；
Step 2 two, the driving voltage signal that 2nd area of polarization are gradually increasing with 4th area of polarization application amplitude, rise time
For t2, and t2<<T1, so as to drive driving foot to return to initial position along Y-axis negative sense, due to inertia, mover maintains the original state；
Step 2 three, repeat step 21 arrive step 2 two, realize cymbal type two-freedom piezoelectric actuator to mover
Continuous stepped drives, and finally realizes driving ball-type mover and is persistently rotated clockwise around X-axis；
(3) driving mover is around the detailed process that Y-axis is rotated clockwise：
Step 3 one, the driving voltage signal being gradually increasing to one area of polarization with 3rd area of polarization application amplitude, rise time
For t1, extreme position is gradually rocked to along X-axis forward direction so as to drive driving sufficient, using the stiction driven between foot and mover,
Driving mover rotates clockwise an angle around Y-axis；
Step 3 two, the driving voltage signal being gradually reduced to one area of polarization with 3rd area of polarization application amplitude, fall time
For t2, and t2<<T1, so as to drive driving foot to return to initial position along X-axis forward direction, due to inertia, mover maintains the original state；
Step 3 three, repeat step 31 arrive step 3 two, realize cymbal type two-freedom piezoelectric actuator to mover
Continuous stepped drives, and finally realizes driving mover around Y-axis persistent movement clockwise；
(4) driving mover is around the detailed process that Y-axis is rotated counterclockwise：
Step 4 one, the driving voltage signal being gradually reduced to one area of polarization with 3rd area of polarization application amplitude, fall time
For t1, foot is driven gradually to be rocked to extreme position along X-axis negative sense so as to drive, using the stiction driven between foot and mover,
Driving mover rotates counterclockwise an angle around Y-axis；
Step 4 two, the driving voltage signal being gradually increasing to one area of polarization with 3rd area of polarization application amplitude, rise time
For t2, and t2<<T1, so that drive driving foot to return to initial position along X-axis negative sense or swing to X-axis direct limit position, by
In inertia, mover maintains the original state；
Step 4 three, repeat step 41 arrive step 4 two, realize cymbal type two-freedom piezoelectric actuator to mover
Continuous stepped drives, and finally realizes driving mover and is persistently rotated counterclockwise around Y-axis.
Applied in the motivational techniques for the two-freedom motion realized using cymbal type two-freedom piezoelectric actuator, this method
Voltage excitation signals waveform be asymmetric triangular wave or asymmetric trapezoidal ripple.
The beneficial effect that the present invention is brought is that a kind of cymbal type two-freedom piezoelectric actuator of the present invention is working
In, it is possible to achieve two directions drive, and realize a variety of functions.The present invention is connected by one group of piezoelectric ceramic piece and two groups of cymbal shape sheet metals
Connect, using the sufficient output driving power of driving, realize that two-freedom drives.Acted on using the displacement equations of cymbal shape sheet metal, with corpusculum
Long-pending piezoelectric ceramic piece realizes effective displacement output, so as to realize the miniaturization of piezoelectric actuator.Meanwhile, piezoelectric ceramic piece is set
Four polarization subregions are set to, under voltage excitation signals excitation, the swing of full existing two frees degree of driving is driven, is rubbed using quiet
Wipe power and inertial drive principle, the two-freedom motion of driving mover.The cymbal type two-freedom piezoelectric actuator physical dimension is small,
Space mechanism, life science, nanometer manufacture etc. working space it is small, the high field of precision has broad application prospects.
Brief description of the drawings
Fig. 1 is the overall structure diagram of cymbal type two-freedom piezoelectric actuator when mover is ball-type mover；Wherein, Z
Axle is the axial direction of piezoelectric actuator；
Fig. 2 is Fig. 1 axial sectional view；
Fig. 3 is four polarization block plans of piezoelectric ceramic piece；
Fig. 4 is the axial sectional view of cymbal type two-freedom piezoelectric actuator when mover is plane mover；
Fig. 5 is the axial sectional view of cymbal type two-freedom piezoelectric actuator when mover is tubular mover；
Fig. 6 be piezoelectric actuator driving ball-type mover around X-axis turn clockwise when, the waveform of the driving voltage signal applied
Figure；
Wherein, VmaxFor the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For it is initial when
Between, T is the cycle；
Fig. 7 and Fig. 8 are the piezoelectric actuator driving ball-type mover under conditions of the driving voltage signal that Fig. 6 is applied
The state diagram rotated clockwise around X-axis；
Fig. 9 be electric drive driving ball-type mover around X-axis rotate counterclockwise when, the waveform of the driving voltage signal applied
Figure；
Wherein, VmaxFor the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For it is initial when
Between, T is the cycle；
Figure 10 and Figure 11 are that under conditions of the driving voltage signal that Fig. 9 is applied, piezoelectric actuator driving ball-type is moved
The state diagram that son is rotated counterclockwise around X-axis.
Embodiment
Embodiment one：Illustrate present embodiment referring to Fig. 1 to Fig. 5, the cymbal type two described in present embodiment is freely
Piezoelectric actuator is spent, it includes piezoelectric ceramic piece 1, cymbal shape sheet metal 2, driving foot 3, pedestal 4 and mover 5；
The through-thickness of piezoelectric ceramic piece 1 polarization, including four polarization subregions, are one area 1-1 of polarization, polarization respectively
Two area 1-3, three area 1-2 of polarization and four area 1-4 of polarization, wherein, one area 1-1 of polarization and three area 1-3 of polarization are diagonally arranged, and polarization
In the opposite direction, two area 1-2 of polarization and four area 1-4 of polarization are diagonally arranged, and polarised direction is opposite；
The cymbal shape sheet metal 2 includes upper cymbal shape sheet metal 2-2 and lower cymbal shape sheet metal 2-1, and the two is symmetrically arranged in
The upper and lower surface of piezoelectric ceramic piece 1, lower cymbal shape sheet metal 2-1 is fixedly connected with pedestal 4；
The head end of the driving foot 3 is fixedly connected with upper cymbal shape sheet metal 2-2 upper surface, and its end is outer with mover 5
Surface is contacted, and mover 5 is rotated with pedestal 4 and is connected.
Present embodiment, is acted on using the displacement equations of cymbal shape sheet metal, the effective chi for reducing piezoelectric ceramic piece 1
It is very little, so as to realize the miniaturization of piezoelectric actuator.Piezoelectric ceramic piece 1 is set to four polarization subregions, swashs in voltage excitation signals
Encourage down, drive the swing of full existing two frees degree of driving, using stiction and inertial drive principle, driving mover two is freely
Degree motion.The cymbal type two-freedom piezoelectric actuator physical dimension is small, realizes miniaturization.
Embodiment two：Illustrate present embodiment, present embodiment and embodiment one referring to Fig. 1 to Fig. 5
The difference of described cymbal type two-freedom piezoelectric actuator is that described mover 5 is ball-type mover, plane mover or tubular are dynamic
Son.
In present embodiment, when mover 5 is ball-type mover, the outer surface of ball-type mover is rotated with pedestal 4 to be connected；When dynamic
When son 5 is plane mover, the bottom surface of plane mover is rotated with pedestal 4 to be connected；When mover 5 is tubular mover, tubular mover
Outer surface rotates with pedestal 4 and is connected, and around tubular mover axial rotation.
Embodiment three：Illustrate present embodiment referring to Fig. 1 to Fig. 5, using the cymbal described in embodiment one
The motivational techniques for the two-freedom motion that type two-freedom piezoelectric actuator is realized, the motivational techniques can drive mover 5 to realize two
The free degree is moved, and is embodied in：Driving mover 5 rotated clockwise or counterclockwise around X-axis, and around Y-axis clockwise or the inverse time
Pin is rotated；
Wherein, X-axis and direction pointed by Y-axis are two in piezoelectric actuator sagittal plane mutual vertical directions；
(1) driving mover 5 is around the detailed process that X-axis is rotated counterclockwise：
Step applies the driving voltage signal that amplitude is gradually increasing one by one, to two area 1-2 of polarization with four area 1-4 of polarization, on
The time of liter is t1, so as to drive driving foot 3 to be gradually rocked to extreme position along Y-axis forward direction, using between driving foot 3 and mover 5
Stiction, driving mover 5 rotates counterclockwise an angle around X-axis；
Step one two, the driving voltage signal that two area 1-2 of polarization are gradually reduced with polarization four area 1-4 applications amplitude, on
The time of liter is t2, and t2<<T1, so as to drive driving foot 3 to return to initial position along Y-axis forward direction, due to inertia, mover 5 keeps former
State；
Step one three, repeat step arrive step one two one by one, realize cymbal type two-freedom piezoelectric actuator to mover 5
Continuous stepped drives, and finally realizes driving mover 5 and is persistently rotated counterclockwise around X-axis；
Wherein, under conditions of Fig. 9 applies driving voltage signal, the motion shape that driving mover 5 is rotated counterclockwise around X-axis
State, is a cycle voltage magnitude descending branch time referring specifically to the t1 in Figure 10 and Figure 11, and Fig. 9, and t2 is a cycle electricity
Time pressure amplitude value ascent stage；
(2) driving mover 5 is around the detailed process that X-axis is rotated clockwise：
Step 2 one, the driving voltage signal that two area 1-2 of polarization are gradually reduced with polarization four area 1-4 applications amplitude, under
The drop time is t1, so as to drive driving foot 3 to be gradually rocked to extreme position along Y-axis negative sense, using between driving foot 3 and mover 5
Stiction, driving mover 5 rotates clockwise an angle around X-axis；
Step 2 two, the driving voltage signal that two area 1-2 of polarization are gradually increasing with polarization four area 1-4 applications amplitude, on
The time of liter is t2, and t2<<T1, so as to drive driving foot 3 to return to initial position along Y-axis negative sense, due to inertia, mover 5 keeps former
State；Step 2 three, repeat step 21 arrive step 2 two, realize company of the cymbal type two-freedom piezoelectric actuator to mover 5
Continuous step-by-step movement driving, finally realizes driving ball-type mover 5 and is persistently rotated clockwise around X-axis；
Wherein, under conditions of Fig. 6 applies driving voltage signal, the motion shape that driving mover 5 is rotated clockwise around X-axis
State, referring specifically to Fig. 7 and Fig. 8；And the t1 in Fig. 6 is time a cycle voltage magnitude ascent stage, t2 is a cycle voltage
The amplitude descending branch time；
(3) driving mover 5 is around the detailed process that Y-axis is rotated clockwise：
Step 3 one, the driving voltage signal being gradually increasing to one area 1-1 of polarization with polarization three area 1-3 applications amplitude, on
The time of liter is t1, so as to drive driving foot 3 to be gradually rocked to extreme position along X-axis forward direction, using between driving foot 3 and mover 5
Stiction, driving mover 5 rotates clockwise an angle around Y-axis；
Step 3 two, the driving voltage signal being gradually reduced to one area 1-1 of polarization with polarization three area 1-3 applications amplitude, under
The drop time is t2, and t2<<T1, so as to drive driving foot 3 to return to initial position along X-axis forward direction, due to inertia, mover 5 keeps former
State；Step 3 three, repeat step 31 arrive step 3 two, realize company of the cymbal type two-freedom piezoelectric actuator to mover 5
Continuous step-by-step movement driving, finally realizes driving mover 5 around Y-axis persistent movement clockwise；
(4) driving mover 5 is around the detailed process that Y-axis is rotated counterclockwise：
Step 4 one, the driving voltage signal being gradually reduced to one area 1-1 of polarization with polarization three area 1-3 applications amplitude, under
The drop time is t1, so as to drive driving foot 3 to be gradually rocked to extreme position along X-axis negative sense, using between driving foot 3 and mover 5
Stiction, driving mover 5 rotates counterclockwise an angle around Y-axis；
Step 4 two, the driving voltage signal being gradually increasing to one area 1-1 of polarization with polarization three area 1-3 applications amplitude, on
The time of liter is t2, and t2<<T1, so as to drive driving foot 3 to return to initial position along X-axis negative sense or swing to X-axis direct limit
Position, due to inertia, mover 5 maintains the original state；
Step 4 three, repeat step 41 arrive step 4 two, realize cymbal type two-freedom piezoelectric actuator to mover 5
Continuous stepped drives, and finally realizes driving mover 5 and is persistently rotated counterclockwise around Y-axis.
In present embodiment, described mover 5 maintains the original state, and specific explanations are：Mover 5 keeps the motion of last moment
State.
The angle of step one by one, in step 2 one, step 3 one and step 4 one, is very small angle.
Embodiment four：Illustrate present embodiment, present embodiment and embodiment five referring to Fig. 1 to Fig. 5
The difference of the motivational techniques for the two-freedom motion that described use cymbal type two-freedom piezoelectric actuator is realized is, this method
Applied in voltage excitation signals waveform be asymmetric triangular wave or asymmetric trapezoidal ripple.
In present embodiment, asymmetric triangular wave is sawtooth waveforms.
Claims (6)
1. cymbal type two-freedom piezoelectric actuator, it is characterised in that it includes piezoelectric ceramic piece (1), cymbal shape sheet metal (2), driven
Action spot (3), pedestal (4) and mover (5)；
Piezoelectric ceramic piece (1) the through-thickness polarization, including four polarization subregions, are polarization one area (1-1), polarization respectively
2nd area (1-3), polarization 3rd area (1-2) and polarization 4th area (1-4), wherein, polarization one area (1-1) is diagonal with polarization 3rd area (1-3)
Arrangement, and polarised direction is on the contrary, polarization 2nd area (1-2) and polarization 4th area (1-4) are diagonally arranged, and polarised direction is opposite；
The cymbal shape sheet metal (2) includes upper cymbal shape sheet metal (2-2) and lower cymbal shape sheet metal (2-1), and the two is arranged symmetrically
Upper and lower surface in piezoelectric ceramic piece (1), lower cymbal shape sheet metal (2-1) is fixedly connected with pedestal (4)；
The head end of the driving foot (3) is fixedly connected with the upper surface of upper cymbal shape sheet metal (2-2), its end and mover (5)
Outer surface is contacted, and mover (5) is rotated with pedestal (4) and is connected.
2. cymbal type two-freedom piezoelectric actuator according to claim 1, it is characterised in that the described piezoelectric ceramics
Piece (1) upper and lower surface sets exciting electrode piece and grounding electrode piece respectively.
3. cymbal type two-freedom piezoelectric actuator according to claim 1, it is characterised in that described cymbal shape sheet metal
(2) the raised sheet metal in cymbal shape centered on, and upper cymbal shape sheet metal (2-2) central protuberance points to driving foot (3), lower cymbal shape gold
Belong to piece (2-1) central protuberance and point to pedestal (4).
4. cymbal type two-freedom piezoelectric actuator according to claim 1, it is characterised in that described mover (5) is ball
Type mover, plane mover or tubular mover.
5. the motivational techniques for the two-freedom motion realized using the cymbal type two-freedom piezoelectric actuator described in claim 1,
Characterized in that, the motivational techniques can drive mover (5) to realize that two-freedom is moved, it is embodied in：Mover (5) is driven around X
Axle is rotated clockwise or counterclockwise, and is rotated clockwise or counterclockwise around Y-axis；
Wherein, X-axis and direction pointed by Y-axis are two in piezoelectric actuator sagittal plane mutual vertical directions；
(1) driving mover (5) is around the detailed process that X-axis is rotated counterclockwise：
Step applies the driving voltage signal that amplitude is gradually increasing one by one, to polarization 2nd area (1-2) and polarization 4th area (1-4), on
The time of liter is t1, so as to drive driving foot (3) to be gradually rocked to extreme position along Y-axis forward direction, utilizes driving foot (3) and mover
(5) stiction between, driving mover (5) rotates counterclockwise an angle around X-axis；
Step one two, the driving voltage signal being gradually reduced to polarization 2nd area (1-2) with polarization 4th area (1-4) application amplitude, under
The drop time is t2, and t2<<T1, so as to drive driving foot (3) to return to initial position along Y-axis forward direction, due to inertia, mover (5) is protected
Hold original state；
Step one three, repeat step arrive step one two one by one, realize company of the cymbal type two-freedom piezoelectric actuator to mover (5)
Continuous step-by-step movement driving, finally realizes driving mover (5) and is persistently rotated counterclockwise around X-axis；
(2) driving mover (5) is around the detailed process that X-axis is rotated clockwise：
Step 2 one, the driving voltage signal being gradually reduced to polarization 2nd area (1-2) with polarization 4th area (1-4) application amplitude, under
The drop time is t1, so as to drive driving foot (3) to be gradually rocked to extreme position along Y-axis negative sense, utilizes driving foot (3) and mover
(5) stiction between, driving mover (5) rotates clockwise an angle around X-axis；
Step 2 two, the driving voltage signal being gradually increasing to polarization 2nd area (1-2) with polarization 4th area (1-4) application amplitude, on
The time of liter is t2, and t2<<T1, so as to drive driving foot (3) to return to initial position along Y-axis negative sense, due to inertia, mover (5) is protected
Hold original state；
Step 2 three, repeat step 21 arrive step 2 two, realize company of the cymbal type two-freedom piezoelectric actuator to mover (5)
Continuous step-by-step movement driving, finally realizes driving ball-type mover (5) and is persistently rotated clockwise around X-axis；
(3) driving mover (5) is around the detailed process that Y-axis is rotated clockwise：
Step 3 one, the driving voltage signal being gradually increasing to polarization one area (1-1) with polarization 3rd area (1-3) application amplitude, on
The time of liter is t1, so as to drive driving foot (3) to be gradually rocked to extreme position along X-axis forward direction, utilizes driving foot (3) and mover
(5) stiction between, driving mover (5) rotates clockwise an angle around Y-axis；
Step 3 two, the driving voltage signal being gradually reduced to polarization one area (1-1) with polarization 3rd area (1-3) application amplitude, under
The drop time is t2, and t2<<T1, so as to drive driving foot (3) to return to initial position along X-axis forward direction, due to inertia, mover (5) is protected
Hold original state；
Step 3 three, repeat step 31 arrive step 3 two, realize company of the cymbal type two-freedom piezoelectric actuator to mover (5)
Continuous step-by-step movement driving, finally realizes driving mover (5) around Y-axis persistent movement clockwise；
(4) driving mover (5) is around the detailed process that Y-axis is rotated counterclockwise：
Step 4 one, the driving voltage signal being gradually reduced to polarization one area (1-1) with polarization 3rd area (1-3) application amplitude, under
The drop time is t1, so as to drive driving foot (3) to be gradually rocked to extreme position along X-axis negative sense, utilizes driving foot (3) and mover
(5) stiction between, driving mover (5) rotates counterclockwise an angle around Y-axis；
Step 4 two, the driving voltage signal being gradually increasing to polarization one area (1-1) with polarization 3rd area (1-3) application amplitude, on
The time of liter is t2, and t2<<T1, so as to drive driving foot (3) to return to initial position along X-axis negative sense or swing to the positive pole of X-axis
Extreme position, due to inertia, mover (5) maintains the original state；
Step 4 three, repeat step 41 arrive step 4 two, realize company of the cymbal type two-freedom piezoelectric actuator to mover (5)
Continuous step-by-step movement driving, finally realizes driving mover (5) and is persistently rotated counterclockwise around Y-axis.
6. the excitation side for the two-freedom motion that use cymbal type two-freedom piezoelectric actuator according to claim 5 is realized
Method, it is characterised in that the waveform of the voltage excitation signals applied in this method is asymmetric triangular wave or asymmetric trapezoidal ripple.
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|---|---|---|---|
| CN201710475306.6A CN107171589B (en) | 2017-06-21 | 2017-06-21 | A kind of cymbal type two-freedom piezoelectric actuator and the motivational techniques for the two-freedom movement realized using the driver |
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| CN201710475306.6A CN107171589B (en) | 2017-06-21 | 2017-06-21 | A kind of cymbal type two-freedom piezoelectric actuator and the motivational techniques for the two-freedom movement realized using the driver |
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| CN107171589A true CN107171589A (en) | 2017-09-15 |
| CN107171589B CN107171589B (en) | 2019-01-08 |
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| CN109951104A (en) * | 2019-04-09 | 2019-06-28 | 哈尔滨工业大学 | A kind of ultraprecise five degree of freedom piezoelectricity positioning pose_adjuster and its motivational techniques |
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