CN104320015A - Bionic multi-degree of freedom precise piezoelectric driving device - Google Patents
Bionic multi-degree of freedom precise piezoelectric driving device Download PDFInfo
- Publication number
- CN104320015A CN104320015A CN201410542000.4A CN201410542000A CN104320015A CN 104320015 A CN104320015 A CN 104320015A CN 201410542000 A CN201410542000 A CN 201410542000A CN 104320015 A CN104320015 A CN 104320015A
- Authority
- CN
- China
- Prior art keywords
- stator
- rotor
- piezoelectric stack
- middle level
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a bionic multi-degree of freedom precise piezoelectric driving device and belongs to the precise machining field. The multi-degree of freedom precise piezoelectric driving device is formed by a rotor and a stator; the stator comprises a first layer, a second layer and a third layer which form into an integral structure through flexible hinges; a thin wall flexible hinge, a rotation driving mechanism and a straight line driving mechanism are packed inside the stator. According to the multi-degree of freedom precise piezoelectric driving device, stepping forward and reverse 360-degree continuous rotational motion and straight line motion of the rotor are achieved based on a loopworm movement principle through the forward reasoning function of piezoelectric stack, the reverse elastic function of the flexible hinges and the clamping function of the flexible hinges. The multi-degree of freedom precise piezoelectric driving device has the advantages of being compact in structure, compact, high in displacement control accuracy, rapid in response, low in driving power, wide in working frequency and high in benefit, applied to fields such as ultraprecise machine tools, micro electro mechanical systems, precision optics, aerospace and robots and wide in development prospect and application values.
Description
Technical field
The present invention relates to Precision Machining field, particularly the accurate Piexoelectric actuator of the bionical multiple degrees of freedom of one, can be applicable to the fields such as super-precision machine tools, MEMS (micro electro mechanical system), precision optics, Aero-Space and robot.
Background technology
In today of scientific and technical develop rapidly, the research field of people is by expanding into microcosmic from macroscopic view, the requirement of accurate displacement and precision positioning is improved day by day, especially in Aero-Space science and technology, military technology, Precision Machining, precision optics, semiconductor technology, microscopy, scanning tunnel microscope, the operation of miniature parts and assembling, in the science and technology field at the contour tip such as semiconductor manufacturing facility and photoelectricity, up-to-date achievement in research and the application of high-end technology precision actuation and location technology the are walked out restriction of Traditional Thinking, increasing precision actuation miscellaneous and precision positioning device are developed, enter into our visual field.
Physical dimension is large, positioning precision is low, easily occur the shortcoming such as creeping phenomenon, processing difficulties as common electric machine, stem nut pair, turbine-cam mechanism, gear-lever mechanism etc. exist for traditional driver, can not meet the technical requirement of modern precision driver far away.Especially, when needing the movement output of the degree of freedom, need multiple single-degree-of-freedom driving mechanism to combinationally use, such combination makes above-mentioned shortcoming more outstanding.Therefore, in this context, design and a kind ofly there is multiple degrees of freedom and the high accurate microminiature driver of positioning precision is very important.So, researchers start to seek new material as electric energy one mechanical energy conversion element, and piezoceramic material is just possessing the advantage required for this type of precision driver, as piezoceramic material has, volume is little, lightweight, response is fast, precision is high, actuating force is large, driving power is low, operating frequency is wide, not by electromagnetic interference, without the feature such as backlash, low energy consumption.In recent years, along with the continuous progress of piezoelectric element technology, class component receives as the precision driver driven and pays close attention to widely thus.
Summary of the invention
The object of the present invention is to provide the accurate Piexoelectric actuator of a kind of bionical multiple degrees of freedom, solve that the physical dimension that prior art exists is large, positioning precision is low, easily occur the problem such as creeping phenomenon, processing difficulties.Present invention employs the conversion elements of new material as electric energy and mechanical energy, and this device rotation driving section and straight driven portions are integrated, compact conformation.
The present invention is mainly divided into rotary actuation module with Linear Moving Module two parts and rotation driving section is connected without the need to any element with before straight driven portions, and be integrated design.Drive unit is formed primarily of rotor and stator two large divisions, and rotor is a rotating shaft, and output has screw thread mouth, can output power.This drive unit adopts internal rotor to stablize clamped mode, and between stator with rotor, bearing-free is connected, therefore its dynamic characteristic is stablized, and operates steadily, compact conformation.Stator is upper, middle and lower-ranking structure, and is packaged with piezoelectric stack and thin shelf flexible hinge.Driving effect realizes by driving piezoelectric stack and corresponding thin shelf flexible hinge; Clamping action is by clamp piezoelectric stack and the thin shelf flexible hinge realization being embedded in stator center.By certain each piezoelectric stack of sequencing control electric and dead electricity, the upper and lower straight line step motion of output shaft around suitable, the counterclockwise Arbitrary Rotation motion of central shaft and the axial direction of output shaft can be realized.The flexible hinge structure encapsulated in described stator had both improve the stability that the stability of rotation and high precision in turn ensure that clamp, made itself and piezoelectric stack comprehensive function, just can realize clamp and drive the Stepping Drive Mode hocketed.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
The accurate Piexoelectric actuator of bionical multiple degrees of freedom, can realize rotary motion and rectilinear motion simultaneously, comprise rotor 1, stator 2, described rotor 1 is a rotating shaft, and its output is provided with link screwed hole and axis hole interference fits in the middle part of axle and stator 2, described stator 2 is divided on stator, in, lower three-decker, by thin shelf flexible hinge A between stator three-decker, B connects, stator upper strata and stator middle level are rotation driving section, stator middle level and stator lower floor are straight driven portions, four groups of rotary motion piezoelectric stacks I are embedded in stator upper strata, II, III, IV6, 7, 10, 11 and two groups of stator upper strata clamp piezoelectric stacks I, II 8, 9, layer embeds two groups of stator middle level clamp piezoelectric stacks I in the stator, II 22, 23, two groups of linear drives piezoelectric stacks I are embedded in stator lower floor, II 34, 39 and Liang Zu stator lower floor clamp piezoelectric stack I, II 36, 37.
Described rotor 1 is without winding structure.
Described rotary motion piezoelectric stack I, II, III, IV6,7,10,11, stator upper strata clamp piezoelectric stack I, II 8,9, stator middle level clamp piezoelectric stack I, II 22,23, linear drives piezoelectric stack I, II 34,39 and stator lower floor clamp piezoelectric stack I, II 36,37 all adopt the piezoelectric stack of body controllable face type, by what control to realize to the time-sequential voltage of piezoelectric stack.
The motion of described rotor 1 and stopping realize by the clamping action of the thin shelf flexible hinge C of encapsulation in stator 2.
Described rotor 2, around axial rotation, can also realize rotor along axle rectilinear motion.
Described rotation driving section and straight driven portions are a monolithic construction.
Beneficial effect of the present invention is: the accurate Piexoelectric actuator of the bionical multiple degrees of freedom of the present invention has the monolithic construction of rotary drive mechanism and straight-line motion mechanism, and therefore system rigidity and stability are all stronger.This device adopts internal rotor to stablize clamped mode, and realize the clamping action to rotor by encapsulation thin shelf flexible hinge in the stator, between stator with rotor, bearing-free is connected, therefore drive unit dynamic characteristic is stablized, operate steadily, compact conformation, has high rotation resolution, and can realize the continuous step motion of Long Distances.By control chronologically each piezoelectric stack electric or dead electricity, the motion of rotor about axis two-way Arbitrary Rotation can be realized and the two-way linear along this axis direction moves, and the deformation thrust all stacked by rotary piezoelectric at two rightabouts of rotary actuation is realized, actuating force is more stable, and rotary motion is more accurate.Can be outputed power by three uniform screwed holes of rotor output.Present invention employs piezoelectric stack as drive source, have that structure is little, precision is high, the actuating force degree of freedom is many, response is fast, actuating force is large, driving power is low, operating frequency is wide, by electromagnetic interference, without the advantage such as backlash, low energy consumption, can be applicable to the various fields such as Precision Machining, precision optics, semiconductor manufacturing, Aero-Space, military science and technology, there is boundless application prospect.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms a application's part, and illustrative example of the present invention and explanation thereof, for explaining the present invention, do not form inappropriate limitation of the present invention.
Fig. 1 is overall structure schematic diagram of the present invention;
Fig. 2 is schematic front view of the present invention;
Fig. 3 is schematic rear view of the present invention
Fig. 4 is schematic top plan view of the present invention;
Fig. 5 is elevational schematic view of the present invention;
Fig. 6 is that schematic diagram is looked on a left side of the present invention;
Fig. 7 is that schematic diagram is looked on the right side of the present invention;
Fig. 8 is the A-A cross-sectional schematic of Fig. 2.
In figure: 1. rotor; 2. stator; 3. screwed hole I; 4. screwed hole II; 5. screwed hole III; 6. rotary actuation piezoelectric stack I; 7. rotary actuation piezoelectric stack II; 8. stator upper strata clamp piezoelectric stack I; 9. stator upper strata clamp piezoelectric stack II; 10. rotary actuation piezoelectric stack III; 11. rotary actuation piezoelectric stack IV; 12. screws I; 13. screws II; 14. screws III; 15. screw IV; 16. screw V; 17. screw VI; 18. screw VII; 19. screw VIII; 20. screw IX; 21. screw X; 22. stator middle level clamp piezoelectric stacks I; 23. stator middle level clamp piezoelectric stacks II; 24. screw XI; 25. screw XII; 26. screw XIII; 27. screw XIV; 28. screw XV; 29. screw XVI; 30. screw XVII; 31. screw XVIII; 32. screw XIX; 33. screw XX; 34. linear drives piezoelectric stacks I; 35. screw XXI; 36. stator lower floor clamp piezoelectric stacks I; 37. stator lower floor clamp piezoelectric stacks II; 38. screw XXII; 39. linear drives piezoelectric stacks II; 40. sunk screws I; 41. sunk screws II.
Embodiment
Detailed content of the present invention and embodiment thereof is further illustrated below in conjunction with accompanying drawing.
See shown in Fig. 1 to Fig. 8, the accurate Piexoelectric actuator of bionical multiple degrees of freedom of the present invention, comprise rotor 1 and stator 2 two parts, described rotor 1 is a rotating shaft, with the axis hole interference fits in the middle part of stator 2, its output has three equally distributed screwed holes I, II, III 3,4,5 as Power output.
Shown in Fig. 4, Fig. 6 and Fig. 7, described stator 2 is divided into stator upper, middle and lower-ranking structure, connected by thin shelf flexible hinge A, B between stator three-decker, stator upper strata and stator middle level are rotation driving section, stator middle level and stator lower floor are straight driven portions, arrange two groups of linear drives piezoelectric stacks I, II 34,39 and directly act on stator middle level in stator lower floor.To drive and clamping institution is all arranged in stator, stator upper strata embed four groups of rotary actuation piezoelectric stacks I, II, III, IV6,7,10,11 and two groups of stator upper strata clamp piezoelectric stacks I, II 8,9; Stator middle level embeds two groups of stator middle level clamp piezoelectric stacks I, II 22,23, in stator lower floor, there are two groups of linear drives piezoelectric stacks I, II 34,39, during assembling, these two groups of piezoelectric stacks are fixed on stator lower floor by sunk screw I, II 40,41, and directly act on stator interlayer structure.
To the clamping action of rotor 1 by being embedded in the clamp piezoelectric stack of stator 2 and the thin shelf flexible hinge C between stator 2 and rotor 1 comprehensively realizes.
Described stator 2 superstructure be embedded with four groups of rotary motion piezoelectric stacks I, II, III, IV6,7,10,11 and stator upper strata clamp piezoelectric stack I, II 8,9, and respectively by screw VI, VII; XII, XIII; VIII, IX; XIV, XV; III; XVIII 17,18; 25,26; 19,20; 27,28; 14; 31 are fixed on stator upper strata.Stator upper strata is packaged with thin shelf flexible hinge A, C, makes stator superstructure realize more stable minor rotation.In addition, the thin shelf flexible hinge C of stator center encapsulation, through stator upper, middle and lower layer, realizes the clamping action to rotor.
Described stator middle level embeds stator middle level clamp piezoelectric stack I, II 22,23, and is fixed on stator middle level by screw X, XI 21,24.In addition, by screw I, II, stator topmost edge becomes to be integrated with stator middle level edge conjunction by IV, VXVI, XVII, XIX, XX 12,13,15,16,29,30,32,33.
Described stator lower floor embeds linear drives piezoelectric stack I, II 34,39 and stator lower floor clamp piezoelectric stack I, II 36,37, and by the fixing linear drives piezoelectric stack I, II 34,39 of sunk screw I, II 40,41; By screw XXI, XXII 35,38 fixed stator lower floor clamp piezoelectric stack I, II 36,37.Two groups of linear drives piezoelectric stacks I, II 34,39 directly act on stator middle level through stator lower floor.Stator lower floor, stator middle level connect with crossing thin shelf flexible hinge B.
Described rotation driving section and straight driven portions are a monolithic construction, and compact conformation is small and exquisite.
The present invention is a monolithic construction, is conducive to improving system rigidity, thus increases the stability of system cloud gray model.
Rotor 1 can rotate by any direction without coiling, when driving mechanism applies power, can realize the rotary motion around the positive and negative both direction of axis direction and axial rectilinear motion, can be outputed power by the output attachment screw of rotor 1 axle head, specific works flow process is as follows:
initial condition: all driving piezoelectric stacks and clamp piezoelectric stack 6,7,8,9,10,11,22,23,34,36,37,39 all not charged, system is in free state, and now rotor is also in travelling state.
z axis clockwise rotation: rotor 1 starts to rotate around axis direction at low frequency: stator upper strata clamp piezoelectric stack I 8, II 9 obtains electric elongation, make stator 2 upper strata endoporus clamping rotor 1 by the thin shelf flexible hinge C in stator 2 superstructure, it is an entirety that rotor 1 is connected with the superstructure of stator 2; The pressure of rotary actuation simultaneously piezoelectric stack I 6, IV 11 extend the generation minor rotation driving stator 2 superstructure, because rotor 1 now links together with the superstructure of stator 2, therefore rotor driven 1 turns over certain minute angle simultaneously; Stator middle level clamp piezoelectric stack I 22, II 23 obtains electric elongation, makes stator 2 middle level endoporus clamping rotor 1 by the thin shelf flexible hinge C in stator 2 media layer damage, and it is an entirety that rotor 1 is connected with stator 2 media layer damage; Stator upper strata clamp piezoelectric stack I 8, II 9 dead electricity, rotor 1 is separated with stator 2 superstructure, rotary actuation pressure piezoelectric stack I 6, IV 11 dead electricity return to original state, so the superstructure of stator 2 elasticity under the effect of the thin shelf flexible hinge A on upper strata returns to initial condition; Stator upper strata clamp piezoelectric stack I 8, II 9 obtains electric, simultaneously piezoelectric stack stator middle level clamp piezoelectric stack I 22, II 23 dead electricity; Repeat above step and coordinate corresponding time sequence can realize rotor (1) stepping rotation continuously clockwise at low frequency.
z axis counter-clockwise rotary motion: rotor 1 starts to rotate around axis direction at low frequency: stator upper strata clamp piezoelectric stack I 8, II 9 obtains electric elongation, make stator 2 upper strata endoporus clamping rotor 1 by the thin shelf flexible hinge C in stator 2 superstructure, it is an entirety that rotor 1 is connected with the superstructure of stator 2; The piezoelectric stack II 7, III 10 of rotary actuation simultaneously extends the generation minor rotation driving stator 2 superstructure, stator middle level clamp piezoelectric stack I 22, II 23 obtains electric elongation, make stator 2 middle level endoporus clamping rotor 1 by the thin shelf flexible hinge C in stator 2 media layer damage, it is an entirety that rotor 1 is connected with stator 2 media layer damage; Stator upper strata clamp piezoelectric stack I 8, II 9 dead electricity, rotor 1 is separated with stator 2 superstructure, rotary actuation pressure piezoelectric stack II 7, III 10 dead electricity returns to original state, so superstructure elasticity under the effect of the thin shelf flexible hinge A on upper strata of stator 2 returns to initial condition; Stator upper strata clamp piezoelectric stack I 8, II 9 obtains electric, simultaneously piezoelectric stack stator middle level clamp piezoelectric stack I 22, II 23 dead electricity; Repeat above step and coordinate corresponding time sequence can realize rotor 1 stepping rotation continuously counterclockwise at low frequency.
z axis moves upward: rotor 1 starts straight line vertically at low frequency and moves upward: stator middle level clamp piezoelectric stack I 22, II 23 obtains electric elongation, make stator 2 middle level endoporus clamping rotor 1 by the thin shelf flexible hinge C in stator 2 media layer damage, it is an entirety that rotor 1 is connected with stator 2 media layer damage; Linear drives piezoelectric stack I 34, II 39 obtains electric elongation, and in axial direction move slight distance, directly act on stator 2 middle level, because rotor 1 and stator 2 media layer damage connect as one, therefore rotor 1 in axial direction upwards creates minute movement; Stator lower floor clamp piezoelectric stack I 36, II 37 obtains electric elongation, stator 2 lower floor endoporus clamping rotor 1 is made by the thin shelf flexible hinge C in stator 2 understructure, it is an entirety that rotor 1 is connected with stator 2 understructure, stator middle level clamp piezoelectric stack I 22, II 23 and linear drives piezoelectric stack I 34, II 39 dead electricity return to initial condition, rotor 1 is separated with stator 2 media layer damage, and stator 2 media layer damage elasticity under middle level and lower interlayer thin shelf flexible hinge B effect returns to initial condition; Stator middle level clamp piezoelectric stack I 22, II 23 obtains electric, simultaneously stator lower floor clamp piezoelectric stack I 36, II 37 dead electricity; Repeat above step coordinate corresponding time sequence can realize rotor 3 at low frequency continuously vertically upwards stepping move.
z axis linear downward motion:rotor 3 starts linear downward motion vertically at low frequency: stator lower floor clamp piezoelectric stack I 36, II 37 obtains electric elongation, make stator 2 lower floor endoporus clamping rotor 1 by the thin shelf flexible hinge C in stator 2 understructure, it is an entirety that rotor 1 is connected with stator 2 understructure; Linear drives piezoelectric stack I 34, II 39 obtains electric elongation, and in axial direction move up slight distance, directly acts on stator 2 middle level, and because rotor 1 now and stator 2 understructure connect as one, therefore rotor 1 is not moved in Z-direction; Stator lower floor clamp piezoelectric stack I 36, II 37 dead electricity, simultaneously, stator middle level clamp piezoelectric stack I 22, II 23 obtains electric elongation, makes stator 2 middle level endoporus clamping rotor 1 by the thin shelf flexible hinge C in stator 2 media layer damage, and it is an entirety that rotor 1 is connected with stator 2 media layer damage; Linear drives piezoelectric stack I 34, II 39 returns to initial condition, stator 2 media layer damage elasticity under middle level and lower interlayer thin shelf flexible hinge B effect returns to initial condition, stator 2 media layer damage produces and moves down slight distance vertically, due to rotor 1 connect as one with stator 2 media layer damage, now thus rotor 1 also move down slight distance vertically; Stator lower floor clamp piezoelectric stack I 36, II 37 obtains electric, simultaneously stator middle level clamp piezoelectric stack I 22, II 23 dead electricity; Repeat above step coordinate corresponding time sequence can realize rotor 1 at low frequency continuously stepping downwards vertically move.
Outer output block, for completing power, load output, can be connected on rotor 3 by corresponding connected mode by rotor 1.The motion of whole multiple degrees of freedom driver has strict sequential logic.
The foregoing is only preferred embodiment of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.All any amendments made for the present invention, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. the accurate Piexoelectric actuator of bionical multiple degrees of freedom, it is characterized in that: rotary motion and rectilinear motion can be realized simultaneously, comprise rotor (1), stator (2), described rotor (1) is a rotating shaft, and its output is provided with link screwed hole and the axis hole interference fits at axle and stator (2) middle part, described stator (2) is divided on stator, in, lower three-decker, by thin shelf flexible hinge A between stator three-decker, B connects, stator upper strata and stator middle level are rotation driving section, stator middle level and stator lower floor are straight driven portions, four groups of rotary motion piezoelectric stacks I are embedded in stator upper strata, II, III, IV(6, 7, 10, 11) and two groups of stator upper strata clamp piezoelectric stacks I, II (8, 9), layer embeds two groups of stator middle level clamp piezoelectric stacks I in the stator, II (22, 23), two groups of linear drives piezoelectric stacks I are embedded in stator lower floor, II (34, 39) and Liang Zu stator lower floor clamp piezoelectric stack I, II (36, 37).
2. the accurate Piexoelectric actuator of bionical multiple degrees of freedom according to claim 1, is characterized in that: described rotor (1) is without winding structure.
3. the accurate Piexoelectric actuator of bionical multiple degrees of freedom according to claim 1, it is characterized in that: described rotary motion piezoelectric stack I, II, III, IV(6,7,10,11), stator upper strata clamp piezoelectric stack I, II (8,9), stator middle level clamp piezoelectric stack I, II (22,23), linear drives piezoelectric stack I, II (34,39) and stator lower floor clamp piezoelectric stack I, II (36,37) all adopt the piezoelectric stack of body controllable face type, by what control to realize to the time-sequential voltage of piezoelectric stack.
4. the accurate Piexoelectric actuator of bionical multiple degrees of freedom according to claim 1, is characterized in that: the motion of described rotor (1) and stopping realize by the clamping action of the thin shelf flexible hinge C of encapsulation in stator (2).
5. the accurate Piexoelectric actuator of bionical multiple degrees of freedom according to claim 1, is characterized in that: described rotor (2), around axial rotation, can also realize rotor along axle rectilinear motion.
6. the accurate Piexoelectric actuator of bionical multiple degrees of freedom according to claim 1, is characterized in that: described rotation driving section and straight driven portions are a monolithic construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410542000.4A CN104320015A (en) | 2014-10-15 | 2014-10-15 | Bionic multi-degree of freedom precise piezoelectric driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410542000.4A CN104320015A (en) | 2014-10-15 | 2014-10-15 | Bionic multi-degree of freedom precise piezoelectric driving device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104320015A true CN104320015A (en) | 2015-01-28 |
Family
ID=52375212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410542000.4A Pending CN104320015A (en) | 2014-10-15 | 2014-10-15 | Bionic multi-degree of freedom precise piezoelectric driving device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104320015A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN108577926A (en) * | 2018-05-17 | 2018-09-28 | 杭州电子科技大学 | A kind of biological tissue's saw cutting device and its sawing method |
| CN108712104A (en) * | 2018-08-08 | 2018-10-26 | 吉林大学 | A kind of parasitic type piezoelectricity stick-slip driver |
| CN109361327A (en) * | 2018-11-08 | 2019-02-19 | 中国人民解放军陆军工程大学 | The super mangneto rotation drive device of clutch type |
| CN110798093A (en) * | 2019-04-08 | 2020-02-14 | 浙江师范大学 | Linear piezoelectric precision driving platform |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN102291039A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom bionic piezoelectric driver |
| JP2012120370A (en) * | 2010-12-02 | 2012-06-21 | Olympus Corp | Ultrasonic transducer and ultrasonic motor |
| CN202957768U (en) * | 2012-12-12 | 2013-05-29 | 吉林大学 | Bionic multi-degree of freedom micro nanoscale piezoelectric driver based on hybrid driving mechanism |
| CN204190646U (en) * | 2014-10-15 | 2015-03-04 | 吉林大学 | The accurate Piexoelectric actuator of bionical multiple degrees of freedom |
-
2014
- 2014-10-15 CN CN201410542000.4A patent/CN104320015A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012120370A (en) * | 2010-12-02 | 2012-06-21 | Olympus Corp | Ultrasonic transducer and ultrasonic motor |
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN102291039A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom bionic piezoelectric driver |
| CN202957768U (en) * | 2012-12-12 | 2013-05-29 | 吉林大学 | Bionic multi-degree of freedom micro nanoscale piezoelectric driver based on hybrid driving mechanism |
| CN204190646U (en) * | 2014-10-15 | 2015-03-04 | 吉林大学 | The accurate Piexoelectric actuator of bionical multiple degrees of freedom |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN107705821B (en) * | 2017-09-14 | 2019-11-15 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN108577926A (en) * | 2018-05-17 | 2018-09-28 | 杭州电子科技大学 | A kind of biological tissue's saw cutting device and its sawing method |
| CN108712104A (en) * | 2018-08-08 | 2018-10-26 | 吉林大学 | A kind of parasitic type piezoelectricity stick-slip driver |
| CN108712104B (en) * | 2018-08-08 | 2024-03-01 | 吉林大学 | Parasitic piezoelectric stick-slip driver |
| CN109361327A (en) * | 2018-11-08 | 2019-02-19 | 中国人民解放军陆军工程大学 | The super mangneto rotation drive device of clutch type |
| CN109361327B (en) * | 2018-11-08 | 2023-10-03 | 中国人民解放军陆军工程大学 | Clutch type super magnetic rotary driving device |
| CN110798093A (en) * | 2019-04-08 | 2020-02-14 | 浙江师范大学 | Linear piezoelectric precision driving platform |
| CN110798093B (en) * | 2019-04-08 | 2022-08-23 | 浙江师范大学 | Linear piezoelectric precision driving platform |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102291039B (en) | Multi-degree-of-freedom bionic piezoelectric driver | |
| CN104320015A (en) | Bionic multi-degree of freedom precise piezoelectric driving device | |
| CN102291040B (en) | Multi-degree-of-freedom micronano-level bionic precision rotary driver | |
| CN107147328B (en) | It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver | |
| CN102946210B (en) | Inchworm type multi-degree of freedom piezoelectric driving device | |
| CN102723893A (en) | Micro-nano simulation rotating drive device | |
| CN203233339U (en) | Micro-nano bionic piezoelectric rotating driving device | |
| CN110752771A (en) | Novel efficient piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| Saito et al. | Study on electrostatic inchworm motor device for a heterogeneous integrated microrobot system | |
| CN103904937A (en) | Rotation type driving device and method based on three piezoelectric stacks | |
| CN207010573U (en) | A kind of multiple degrees of freedom Inchworm type precision piezoelectric actuator | |
| CN202957768U (en) | Bionic multi-degree of freedom micro nanoscale piezoelectric driver based on hybrid driving mechanism | |
| CN102751899B (en) | Micro nano bionic multi-degree of freedom driving device | |
| CN204190646U (en) | The accurate Piexoelectric actuator of bionical multiple degrees of freedom | |
| CN104852627B (en) | Inchworm-type piezoelectric torque actuator capable of realizing single-step large torsion angle and actuating method | |
| CN107171589B (en) | A kind of cymbal type two-freedom piezoelectric actuator and the motivational techniques for the two-freedom movement realized using the driver | |
| CN110855181B (en) | Rotary piezoelectric driving device based on asymmetric triangular hinge mechanism | |
| CN110774260A (en) | Ultra-precise piezoelectric micro-clamping manipulator | |
| CN202957767U (en) | Inchworm type multi-freedom piezoelectric driving device | |
| Saito et al. | Study on silicon device of microrobot system for heterogeneous integration | |
| CN102522916B (en) | Nano-motor based on frictional force variation | |
| CN202135076U (en) | Multi-freedom bionic piezoelectric driving device | |
| CN116388609A (en) | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle | |
| CN214480332U (en) | Differential inertia type piezoelectric rotary driver | |
| CN202135077U (en) | Multiple-degree-of-freedom micro-nano bionic precision rotation driving device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150128 |
|
| WD01 | Invention patent application deemed withdrawn after publication |