CN110774260A - Ultra-precise piezoelectric micro-clamping manipulator - Google Patents
Ultra-precise piezoelectric micro-clamping manipulator Download PDFInfo
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- CN110774260A CN110774260A CN201910291973.8A CN201910291973A CN110774260A CN 110774260 A CN110774260 A CN 110774260A CN 201910291973 A CN201910291973 A CN 201910291973A CN 110774260 A CN110774260 A CN 110774260A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
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Abstract
The invention relates to an ultra-precise piezoelectric micro-clamping manipulator which consists of a precise multi-degree-of-freedom micro-nano piezoelectric driving unit and a precise micro-clamping unit. The precise multi-degree-of-freedom micro-nano piezoelectric driving unit is composed of a stator flexible hinge and a rotor, and can perform ultra-precise stepping rotary motion and linear motion by utilizing the driving of a piezoelectric stack. Three layers of self-centering three-jaw piezoelectric hoop positioning mechanisms, rotary driving mechanisms and linear driving mechanisms are embedded in the stator flexible hinge, and precise hoop positioning, rotation and linear driving can be performed; the rotor interface is variable and can be conveniently connected with the precise micro-clamping unit. And a secondary flexible hinge amplifying mechanism is embedded in the precise micro-clamping unit and is driven by the piezoelectric stack to perform precise micro-clamping operation. The clamping device has the advantages of simple structure, stable clamping performance, large clamping stroke, low investment, high benefit and the like, and can be applied to the engineering and scientific fields of precise micro-nano mechanical clamping operation, precise ultra-precision machining, micro electro mechanical systems, biotechnology and the like.
Description
Technical Field
The invention relates to the technical field of engineering such as precision micro-nano mechanical clamping operation, precision ultra-precision machining, micro electro mechanical systems, biotechnology and the like, in particular to an ultra-precision piezoelectric micro-clamping manipulator.
Background
In recent years, with the rapid development of related technologies such as micro-electromechanical systems, micro-clamping machines, micro-nano drivers and the like, the development and production of robots in the high-technology field are rapidly developed and become a new technology, so that the development of the manipulator is promoted, and the micro-clamping manipulator can better realize the organic combination of mechanization and automation. Meanwhile, along with the rapid development of the fields of precision ultra-precision machining, electronics, biotechnology, precision measurement and the like, the requirement of human beings on ultra-precision micro-clamping manipulators is higher and higher, and all the scientific research centers around the world also actively research and experiment the micro-clamping technology. The traditional manipulator has larger volume, complex structure and low motion resolution, and can not meet the application requirements in the fields of precise micro-nano mechanical clamping operation, precise ultra-precision machining, micro electro mechanical systems and the like in modern industry for a long time, so that the development of the ultra-precise micro-clamping manipulator is very important. Because the piezoelectric stack has the advantages of small volume, less frequency response, low output load, low noise, stable performance and the like, and the flexible hinge has the characteristics of no mechanical friction, no clearance, high motion sensitivity and the like, the high-precision piezoelectric micro-clamping manipulator based on the piezoelectric stack driving source and the flexible hinge chain transmission mechanism is widely adopted in the technical field of micro-clamping. With the rapid and rapid development of the current high-precision industrial field, the technical indexes of the traditional manipulator cannot meet the requirements of the manipulator, so that the significance of designing the ultra-precise piezoelectric micro-clamping manipulator is very important.
Disclosure of Invention
The invention aims to meet the urgent need of micro-clamping technology in the existing high-precision industrial field, overcome the fatal defects of complex structure, large volume and low motion resolution of the traditional manipulator, and designs an ultra-precision piezoelectric micro-clamping manipulator which is mainly used in the field of precision micro-nano mechanical clamping and has the advantages of simple structure, stable clamping performance, large clamping stroke, less investment, high benefit and the like.
According to the invention, the alternating hoop position motion of the upper layer, the middle layer and the lower layer of the rotor is realized by controlling the logic power-on time sequence of the hoop position piezoelectric stack. And finally, ultra-precise stepping rotary motion and linear movement of the micro-clamping flexible manipulator are realized by combining corresponding logic electrification control time sequences of the rotary driving piezoelectric stack and the linear driving piezoelectric stack. The ultra-precise micro-nano clamping process of the micro-clamping flexible manipulator is realized by controlling the electrifying time sequence of the micro-clamping piezoelectric stack. Therefore, the general requirements in the field of micro clamping can be met by controlling the energizing sequence of each piezoelectric stack through parallel logic.
The above object of the present invention is achieved by the following technical solutions:
the ultra-precise piezoelectric micro-clamping manipulator mainly comprises a precise multi-degree-of-freedom micro-nano piezoelectric driving unit and a precise micro-clamping unit, wherein the precise multi-degree-of-freedom micro-nano piezoelectric driving unit consists of a stator flexible hinge and a rotor, and can perform ultra-precise stepping rotary motion and linear motion by being driven by a piezoelectric stack. The method is characterized in that: the stator flexible hinge (8) is embedded into the upper, middle and lower layers of self-centering three-jaw piezoelectric hoop positioning mechanism, the rotary driving mechanism and the linear driving mechanism, and can perform precise hoop positioning, rotation and linear driving.
The upper, middle and lower three-layer self-centering three-jaw piezoelectric hoop positioning mechanisms are completely the same, each hoop positioning mechanism is three groups, are in triangular symmetrical arrangement and respectively comprise upper, middle and lower hoop positioning piezoelectric stacks (7, 19 and 17), upper, middle and lower wedge block pairs (6, 18 and 16) and upper, middle and lower fastening screws (9, 10 and 11) which are correspondingly assembled.
The three groups of rotary driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a rotary driving piezoelectric stack (4) and a rotary supporting block (5).
The three linear driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a linear driving piezoelectric stack (12), a bottom layer wedge block pair (13) and a bottom layer fastening screw (14).
The rotor (15) is designed as a variable interface and is connected with the precise micro-clamping unit through a connecting screw (1).
The precise micro-clamping unit mainly comprises a micro-clamping piezoelectric stack (2), a micro-clamping flexible manipulator (3) and a pre-tightening screw (20).
The main advantages of the invention are: the ultra-precise micro-nano clamping operation function can be realized, and the device has the characteristics of good clamping performance, nano-level clamping operation resolution, good repeatability and the like. The micro-mechanical clamping device can be applied to the engineering and technology fields of precise micro-nano mechanical clamping operation, precise ultra-precision machining, micro electro mechanical systems, biotechnology and the like, and aims to improve the precision and the clamping stroke of the micro-mechanical clamping operation of the micro electro mechanical systems, reduce the size of a mechanical mechanism, improve the performance of the whole mechanical structure and simultaneously improve the disadvantages of large volume, complex structure and low motion resolution of the traditional mechanical hand. The invention is mainly used in the field of precise micro-nano mechanical clamping, and has the advantages of simple structure, stable clamping performance, large clamping stroke, low investment, high benefit and the like, and has wide application prospect.
Drawings
Fig. 1 is an axial view of the present invention.
Fig. 2 is a front view of the present invention.
Fig. 3 is a top view of the present invention.
Fig. 4 is a bottom view of the present invention.
Fig. 5 is a cross-sectional view of a middle layer of the present invention.
Fig. 6 is a schematic view of a precision robot of the present invention.
In the figure:
1. a connecting screw; 2. micro-clamping the piezoelectric stack; 3. micro-clamping a flexible manipulator; 4. rotationally driving the piezoelectric stack X3;
5. a rotating support block X3; 6. a pair of upper tier wedge blocks X3; 7. the upper hoop piezoelectric stack X3; 8. a flexible hinge;
9. upper layer fastening screws X3; 10. middle layer fastening screw X3; 11. lower layer fastening screw X3; 12. linearly driving the piezoelectric stack X3;
13. a pair of bottom tier wedge blocks X3; 14. bottom layer fastening screws X3; 15. a rotor; 16. a lower layer wedge block pair X3;
17. a lower hoop piezoelectric stack X3; 18. a middle layer wedge pair X3; 19. a middle hoop piezoelectric stack X3; 20. pre-tightening the screw;
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 6, the ultra-precise piezoelectric micro-clamping manipulator designed by the invention mainly comprises a precise multi-degree-of-freedom micro-nano piezoelectric driving unit and a precise micro-clamping unit, wherein the precise multi-degree-of-freedom micro-nano piezoelectric driving unit is composed of a stator flexible hinge and a rotor, and can perform ultra-precise stepping rotary motion and linear motion by being driven by a piezoelectric stack. The method is characterized in that: the stator flexible hinge (8) is embedded into the upper, middle and lower layers of self-centering three-jaw piezoelectric hoop positioning mechanism, the rotary driving mechanism and the linear driving mechanism, and can perform precise hoop positioning, rotation and linear driving.
The upper, middle and lower three-layer self-centering three-jaw piezoelectric hoop positioning mechanisms are completely the same, each hoop positioning mechanism is three groups, are in triangular symmetrical arrangement and respectively comprise upper, middle and lower hoop positioning piezoelectric stacks (7, 19 and 17), upper, middle and lower wedge block pairs (6, 18 and 16) and upper, middle and lower fastening screws (9, 10 and 11) which are correspondingly assembled.
The three groups of rotary driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a rotary driving piezoelectric stack (4) and a rotary supporting block (5).
The three linear driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a linear driving piezoelectric stack (12), a bottom layer wedge block pair (13) and a bottom layer fastening screw (14).
The rotor (15) is designed as a variable interface and is connected with the precise micro-clamping unit through a connecting screw (1).
The precise micro-clamping unit mainly comprises a micro-clamping piezoelectric stack (2), a micro-clamping flexible manipulator (3) and a pre-tightening screw (20).
The precise micro-clamping unit is characterized in that the micro-clamping flexible manipulator (3) is embedded into a diamond-shaped and lever amplification structure secondary flexible hinge amplification mechanism, and the range of the clamping stroke of the micro-clamping manipulator (3) is extended.
The precise multi-degree-of-freedom micro-nano piezoelectric driving unit is characterized in that the rotor (15) and the stator flexible hinge (8) are in transition fit connection.
The stator flexible hinge (8) is integrated in the whole structure and is arranged in a triangular symmetrical mode, wherein the three layers of the self-centering three-jaw piezoelectric hoop positioning mechanisms, the rotary driving mechanisms and the linear driving mechanisms are three groups with the same structure, and the three groups of the self-centering three-jaw piezoelectric hoop positioning mechanisms, the rotary driving mechanisms and the linear driving mechanisms are integrally processed by linear cutting, so that the precision and the stability of piezoelectric driving are ensured.
The three-layer self-centering three-jaw piezoelectric hoop positioning mechanism realizes the precise movement of the upper, middle and lower wedge-shaped block pairs (6, 18 and 16) by adjusting the fastening screws (9, 10 and 11) of the upper, middle and lower layers, and controls the precise pre-tightening of the hoop positioning piezoelectric stacks (7, 19 and 17) of the upper, middle and lower layers.
The ultra-precise piezoelectric micro-clamping manipulator realizes the alternative hoop position movement of the upper layer, the middle layer and the lower layer by controlling the logic electrification time sequence of the hoop position piezoelectric stacks (7, 19 and 17) of the upper layer, the middle layer and the lower layer. And finally, ultra-precise stepping rotary motion and linear movement of the micro-clamping flexible manipulator (3) are realized by combining corresponding logic power-on control time sequences of the rotary driving piezoelectric stack (4) and the linear driving piezoelectric stack (12). And controlling the electrifying time sequence of the micro-clamping piezoelectric stack (2) to control the ultra-precise micro-nano clamping process.
Referring to fig. 1-6, the specific working process of the present invention is as follows:
the specific realization of the clamping operation of the ultraprecise piezoelectric micro-clamping manipulator is as follows: firstly, adjusting a pretightening screw (20) to directly pretighten a clamping piezoelectric stack (2), and adjusting upper, middle and lower fastening screws (9, 10 and 11) and a bottom fastening screw (14) to slightly adjust upper, middle and lower wedge blocks (6, 18 and 16) and a bottom wedge block pair (13) to indirectly pretighten the clamping piezoelectric stack (2), the upper, middle and lower hoop position piezoelectric stacks (7, 19 and 17) and a linear driving piezoelectric stack (12); and secondly, controlling the logic power-on time sequence of the upper, middle and lower hoop position piezoelectric stacks (7, 19 and 17) to realize the alternating hoop position movement of the upper, middle and lower layers. And the ultra-precise stepping rotary motion and linear movement of the micro-clamping flexible manipulator (3) are realized by combining corresponding logic electrification control time sequences of the rotary driving piezoelectric stack (4) and the linear driving piezoelectric stack (12). Finally, the ultra-precise micro-nano clamping process is adjusted and controlled by controlling the power-on time sequence of the micro-clamping piezoelectric stack (2).
The movement of the ultra-precise piezoelectric micro-clamping manipulator is carried out according to a strict logic power-on time sequence, the hoop position is changed, the piezoelectric stack control time sequence is driven, the directions of rotation and linear movement can be changed, meanwhile, the precise piezoelectric stack is used as a driving source and the precise flexible hinge is used as a power transmission element, and the ultra-precise piezoelectric micro-clamping manipulator has the characteristics of compact mechanism, high resolution, no mechanical abrasion, no idle stroke, small heat productivity, stable driving, reliability and high efficiency, and can realize the functions of micro-nano precise micro-clamping and the like.
Claims (6)
1. The ultra-precise piezoelectric micro-clamping manipulator mainly comprises a precise multi-degree-of-freedom micro-nano piezoelectric driving unit and a precise micro-clamping unit, wherein the precise multi-degree-of-freedom micro-nano piezoelectric driving unit consists of a stator flexible hinge and a rotor, and can perform ultra-precise stepping rotary motion and linear motion by being driven by a piezoelectric stack. The method is characterized in that: the stator flexible hinge (8) is embedded into the upper, middle and lower layers of self-centering three-jaw piezoelectric hoop positioning mechanism, the rotary driving mechanism and the linear driving mechanism, and can perform precise hoop positioning, rotation and linear driving.
The upper, middle and lower three-layer self-centering three-jaw piezoelectric hoop positioning mechanisms are completely the same, each hoop positioning mechanism is three groups, are in triangular symmetrical arrangement and respectively comprise upper, middle and lower hoop positioning piezoelectric stacks (7, 19 and 17), upper, middle and lower wedge block pairs (6, 18 and 16) and upper, middle and lower fastening screws (9, 10 and 11) which are correspondingly assembled.
The three groups of rotary driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a rotary driving piezoelectric stack (4) and a rotary supporting block (5).
The three linear driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a linear driving piezoelectric stack (12), a bottom layer wedge block pair (13) and a bottom layer fastening screw (14).
The rotor (15) is designed as a variable interface and is connected with the precise micro-clamping unit through a connecting screw (1).
The precise micro-clamping unit mainly comprises a micro-clamping piezoelectric stack (2), a micro-clamping flexible manipulator (3) and a pre-tightening screw (20).
2. The precise micro clamping unit according to claim 1, wherein the micro clamping flexible manipulator (3) is embedded into a diamond-shaped, lever amplification structure secondary flexible hinge amplification mechanism, extending the range of the clamping stroke of the micro clamping manipulator (3).
3. The precise multi-degree-of-freedom micro-nano piezoelectric driving unit according to claim 1, wherein the rotor (15) and the stator flexible hinge (8) are in transition fit connection.
4. The stator flexible hinge (8) of claim 1 is integrated in a whole structure and is arranged in a triangular symmetrical mode, wherein three layers of the self-centering three-jaw piezoelectric hoop positioning mechanism, the rotary driving mechanism and the linear driving mechanism are three groups with the same structure, and are integrally processed by linear cutting, so that the piezoelectric driving precision and stability are guaranteed.
5. The three-layer self-centering three-jaw piezoelectric hoop positioning mechanism of claim 1, wherein the upper, middle and lower wedge block pairs (6, 18 and 16) are precisely moved by adjusting the fastening screws (9, 10 and 11) of the upper, middle and lower layers, and the precise pre-tightening of the hoop positioning piezoelectric stacks (7, 19 and 17) of the upper, middle and lower layers is controlled.
6. The ultra-precise piezoelectric micro-clamping manipulator as claimed in claim 1, wherein the upper, middle and lower hoop position piezoelectric stacks (7, 19, 17) are controlled to be in logic power-on sequence, so that the upper, middle and lower hoop position motions are realized alternately. And finally, ultra-precise stepping rotary motion and linear movement of the micro-clamping flexible manipulator (3) are realized by combining corresponding logic power-on control time sequences of the rotary driving piezoelectric stack (4) and the linear driving piezoelectric stack (12). And controlling the electrifying time sequence of the micro-clamping piezoelectric stack (2) to control the ultra-precise micro-nano clamping process.
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| CN201910291973.8A CN110774260A (en) | 2019-04-08 | 2019-04-08 | Ultra-precise piezoelectric micro-clamping manipulator |
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| CN201910291973.8A CN110774260A (en) | 2019-04-08 | 2019-04-08 | Ultra-precise piezoelectric micro-clamping manipulator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059556A (en) * | 2021-04-02 | 2021-07-02 | 江苏大学附属医院 | Multi-joint multi-degree-of-freedom medical piezoelectric micro-mechanical manipulator |
| CN113078845A (en) * | 2021-04-27 | 2021-07-06 | 吉林大学 | Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342842A (en) * | 2004-06-03 | 2005-12-15 | Nisca Corp | Driving force transmission mechanism and micromanipulator |
| JP2011049498A (en) * | 2009-08-28 | 2011-03-10 | Kaijo Corp | Clamp mechanism and wire bonding device equipped with the same |
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN102581854A (en) * | 2012-02-20 | 2012-07-18 | 苏州大学 | Piezoelectric driving micro gripper |
| CN104637859A (en) * | 2013-11-14 | 2015-05-20 | 先进科技新加坡有限公司 | WIRE clamp, method and apparatus for applying a preload force to a piezoelectric actuator |
| CN104647347A (en) * | 2014-09-26 | 2015-05-27 | 浙江大学 | Flexible hinge amplification-based piezoelectric microgripper |
| CN109129411A (en) * | 2018-09-30 | 2019-01-04 | 重庆大学 | The micro-clamp of integrated clamping force snesor and clamping jaw displacement sensor |
-
2019
- 2019-04-08 CN CN201910291973.8A patent/CN110774260A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342842A (en) * | 2004-06-03 | 2005-12-15 | Nisca Corp | Driving force transmission mechanism and micromanipulator |
| JP2011049498A (en) * | 2009-08-28 | 2011-03-10 | Kaijo Corp | Clamp mechanism and wire bonding device equipped with the same |
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN102581854A (en) * | 2012-02-20 | 2012-07-18 | 苏州大学 | Piezoelectric driving micro gripper |
| CN104637859A (en) * | 2013-11-14 | 2015-05-20 | 先进科技新加坡有限公司 | WIRE clamp, method and apparatus for applying a preload force to a piezoelectric actuator |
| CN104647347A (en) * | 2014-09-26 | 2015-05-27 | 浙江大学 | Flexible hinge amplification-based piezoelectric microgripper |
| CN109129411A (en) * | 2018-09-30 | 2019-01-04 | 重庆大学 | The micro-clamp of integrated clamping force snesor and clamping jaw displacement sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059556A (en) * | 2021-04-02 | 2021-07-02 | 江苏大学附属医院 | Multi-joint multi-degree-of-freedom medical piezoelectric micro-mechanical manipulator |
| CN113078845A (en) * | 2021-04-27 | 2021-07-06 | 吉林大学 | Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof |
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