JP2005342842A - Driving force transmission mechanism and micromanipulator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a driving force transmission mechanism having a room for plastic deformation and having a high safety ratio for creep deformation. <P>SOLUTION: This driving force transmission mechanism 31 is provided with two pantographs each having an input end where a driving force from an X direction is input, an input end where a driving force from a Y direction is input, and an output end output by composing and expanding displacements by the driving forces input from the X direction and the Y direction, and formed by connecting four linear links 31d, 31e, 31f and 31g (31d', 31e', 31f' and 31g') to four connecting points A-D (A'-D') via elastic hinges; a link 31a connecting the X input ends to each other via elastic hinges; a link 31b connecting the Y input ends to each other via elastic hinges; and a link 31c connecting the output ends to each other via elastic hinges. The elastic hinge is composed of a polymer material, has a structure capable of swinging in both sides within a range of an elastic deformation and an approximate center of the region of the elastic deformation is defined as its home position. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a driving force transmission mechanism and a micromanipulator, and in particular, includes a plurality of substantially linear links connected at a plurality of locations by an elastic hinge made of a polymer material and having a structure capable of swinging both within an elastic deformation range. The present invention relates to a driving force transmission mechanism that has a parallel four-bar mechanism and a micromanipulator that grips a minute gripping object by bringing the tip of a gripping finger into close proximity.

  Conventionally, a planar mechanism having a degree of freedom in two directions, such as an XY table, is known as a driving force transmission mechanism. The XY table can be procured from the market at an appropriate price, but is arranged so that another one-degree-of-freedom drive system overlaps with one degree-of-freedom drive system, so that the overall configuration is large and complicated, and the operation load increases. .

  In order to solve this problem, a component mounting apparatus using a parallel four-bar (pantograph) mechanism having a degree of freedom in the XZ2 direction is disclosed (for example, see Patent Document 1). In this technology, the electronic components to be mounted are supported by each parallel four-bar mechanism in the movement direction of the substrate and are arranged at predetermined positions on the substrate. Therefore, a large number of parallel four-bar mechanism is arranged along the movement direction of the substrate. Thus, electronic components can be efficiently arranged, and a polymer material such as polypropylene is exemplified for the elastic hinge.

  In addition, for example, a micromanipulator is used for assembling minute parts, operating cells, and the like. In general, a micromanipulator has a mechanism (gripping means) for moving the tip portions of a plurality of gripping fingers close to and away from each other to grasp a minute grasping object (for example, a patent) Since the object to be grasped is very small, the operation by the micromanipulator is performed under the microscope visual field by the naked eye or by referring to the image output to the display via the CCD camera attached to the microscope (see FIG. 2). For example, see Patent Document 3).

  Even in such a micromanipulator, a driving force transmission mechanism is used to move the gripping fingers in the XY directions. In order to solve the problems in the XY table described above, a so-called person skilled in the art can move the gripping fingers. Employing a driving force transmission mechanism using a parallel four-bar mechanism is also being studied.

JP 2000-296486 A JP-A-8-168979 JP-A-4-303810

  However, even with an elastic hinge made of a polymer material, if the amount of deformation increases, the elastic deformation range is exceeded and plastic deformation occurs. Further, there is a problem that creep deformation occurs when stored under stress due to deformation. With a parallel four-bar mechanism using an elastic hinge, if plastic deformation or creep deformation occurs in the elastic hinge, the desired mechanism accuracy cannot be obtained. With a driving force transmission mechanism having a parallel four-bar mechanism, an appropriate drive Force transmission becomes impossible. In particular, in a micromanipulator having such a drive transmission mechanism, it is impossible to grip a minute gripping object by bringing the tips of gripping fingers close to each other.

  An object of the present invention is to provide a driving force transmission mechanism having a margin for plastic deformation and having a high safety factor against creep deformation, and a micromanipulator equipped with the driving force transmission mechanism. .

  In order to solve the above-mentioned problem, a first aspect of the present invention is a plurality of substantially linear links connected at a plurality of positions by an elastic hinge made of a polymer material and having a structure capable of swinging in an elastic deformation range. The elastic hinge is characterized in that a substantially center of the elastic deformation range is a home position. In the first aspect, since the elastic hinge is made of a polymer material, it has excellent durability, and has a structure capable of performing both vibrations in the elastic deformation range and can reduce deformation at both ends of the operation range, so that there is room for plastic deformation. As the home position is the approximate center of the elastic deformation range where the average stress of both vibrations is zero, the safety factor can be increased against creep deformation by storing it back to the home position. It is possible to obtain a driving force transmission mechanism that can maintain high accuracy even if the use is continued.

  Further, the second aspect of the present invention is a driving force transmission mechanism having a plurality of substantially linear links connected at a plurality of positions by an elastic hinge made of a polymer material and having a structure capable of swinging both within an elastic deformation range. The elastic hinge is characterized in that the shape when molded at the home position of the elastic hinge is maintained. In the second aspect, since the elastic hinge is made of a polymer material, it has excellent durability and has a structure capable of both vibrations in the elastic deformation range, and the deformation at both ends of the operation range can be reduced, so there is room for plastic deformation. In addition, since the shape when molded is the center of the home position of the elastic hinge, it is possible to increase the safety factor against creep deformation by storing it back to the home position, so use is continued However, the drive force transmission mechanism that can maintain high accuracy can be obtained, and the elastic hinge and the link constituting the drive transmission mechanism are integrally formed by molding. It becomes unnecessary.

  Furthermore, a third aspect of the present invention is a driving force transmission mechanism, a first input end to which a driving force from the first direction is input, and a second input perpendicular to the first direction. A second input end to which a driving force from the direction is input, and an output end to which the displacement in the first and second directions by the input driving force is combined and enlarged or reduced and output. Two parallel four-joint mechanisms in which four substantially linear first to fourth links are connected to each other at four connection points via elastic hinges, and the first input ends are connected to each other via elastic hinges. A fifth link that connects the second input ends via an elastic hinge, and a seventh link that connects the output ends via an elastic hinge, The elastic hinge is made of a polymer material and has a structure capable of both vibrations within an elastic deformation range. Substantially in the center of the elastic deformation range, characterized in that it is a home position.

  In the third aspect, the first and second input ends and the output ends of the two parallel four-joint mechanisms are connected by the fifth to seventh links via the elastic hinges, respectively. Since the third link connected to the output ends of the four-bar mechanism is supported by the two output ends, it is possible to maintain a stable posture, and since the elastic hinge is made of a polymer material, it has excellent durability. In addition, since it has a structure capable of both vibrations in the elastic deformation range and can reduce the deformation at both ends of the operating range, there is a margin for plastic deformation, and the approximate center of the elastic deformation range where the average stress of both vibrations is zero Since it is considered as the home position, it is possible to increase the safety factor against creep deformation by storing it back to the home position, thus obtaining a driving force transmission mechanism that can maintain high accuracy even if it is used continuously. Can do.

  Each parallel four-bar mechanism includes, for example, one end of the first link as the fifth link, one end of the second and third links as the sixth link, and one end of the fourth link as the seventh link. The other end of the first link is connected to the other end of the fourth link, the other ends of the second and third links are connected to one end of the first link and the fifth link; The fourth and first shapes are similar to the triangular shape having the elastic hinge connecting the one end of the link and the seventh link and the elastic hinge connecting the other ends of the first and fourth links. Each of the links can be connected via an elastic hinge. The elastic hinge is preferably located at the home position when no driving force is input to the first and second input ends.

  And in order to solve the above-mentioned subject, the 4th mode of the present invention is a micromanipulator, and it has a gripping means for gripping a minute gripping object by bringing the tip of the gripping finger close to it, A first input end to which a driving force from a direction is input, a second input end to which a driving force from a second direction perpendicular to the first direction is input, and the input driving force The first and fourth links are connected to each other via elastic hinges. The output ends of the first and second directions are combined and enlarged or reduced and output. Two parallel four-joint mechanisms respectively connected at points, a fifth link connecting the first input ends via an elastic hinge, and connecting the second input ends via an elastic hinge A sixth link and a second link connecting the output ends via an elastic hinge A first moving means for moving the gripping means in the first and second directions, and the gripping means in a third direction orthogonal to the first and second directions. A second moving means for moving the elastic hinge, wherein the elastic hinge is made of a polymer material and has a structure capable of swinging in an elastic deformation range, and the approximate center of the elastic deformation range is a home position. It is characterized by that.

  In the fourth aspect, by inputting the driving force to the first and second input ends, the input driving force is synthesized and enlarged or reduced by the first moving means and output to the third link. The gripping means is moved in the first and second directions, and the gripping means is moved in the third direction orthogonal to the first and second directions by the second moving means. Then, the gripping means grips the minute gripping object by bringing the tip of the gripping finger close to the gripping means. According to the second aspect, since the third link is supported by the two output ends, it is possible to maintain a stable posture and increase the accuracy of movement of the gripping means in the first and second directions. Because the parallel four-bar mechanism is used instead of the XY table, the micromanipulator can be made compact and lightweight, and the above-mentioned elastic hinge allows the tip of the gripping finger to be highly accurate even if it is used continuously. A minute object to be grasped can be grasped close to each other.

  In the fourth aspect, the apparatus further comprises an output stage fixed to the third link and movable in the first and second directions, and the second moving means moves the gripping means in the third direction on the output stage. You may make it make it.

  According to the present invention, since the elastic hinge is made of a polymer material, it is excellent in durability and has a structure capable of both vibrations in the elastic deformation range, and can reduce deformation at both ends of the operation range, so that there is room for plastic deformation. The center position of the elastic deformation range where the average stress of both vibrations is zero is the home position, or the shape when molded is the center of the home position of the elastic hinge. Since the safety factor against creep deformation can be increased by returning to the position and storing it, a driving force transmission mechanism that can maintain high accuracy even if it is used continuously or a micromanipulator equipped with the driving force transmission mechanism The effect that can be obtained can be obtained.

  Hereinafter, an embodiment in which a micromanipulator according to the present invention is applied to a minute object handling system for handling minute objects will be described with reference to the drawings.

  As shown in FIG. 1, a minute object handling system 200 of this embodiment includes a micromanipulator 110, a minute object placement base 102, and a microscope 101, and a minute object handling fixed to a thick plate-like surface plate 106. An apparatus 100, a personal computer (hereinafter referred to as a personal computer) 202, and a programmable logic controller (hereinafter referred to as a PLC) 204 that controls the micromanipulator 110 as a slave computer of the personal computer 202 are provided. Yes.

  A personal computer 202 is connected to a display 201 such as a liquid crystal display device and an input device 203 such as a mouse. The microscope 101 is equipped with a CCD camera 107, and an output terminal from the CCD camera 107 is connected to the personal computer 202. Therefore, the operator of the minute object handling system 200 can visually observe the minute object placed on the minute object placement surface 17 directly from the eyepiece of the microscope 101 or via the display 201.

  Further, the personal computer 202 is connected to the PLC 204 via an interface, and the PLC 204 is connected to a relay board 205 mounted with a drive control unit and the like for performing drive control of various actuators arranged in the micromanipulator 110. Yes. The relay substrate 205 and various actuators disposed on the micromanipulator 110 are connected by a flexible substrate (not shown). The PLC 204 is configured to include a D / A converter, an A / D converter, etc. in addition to the CPU, ROM, and RAM. In accordance with a program and program data stored in the ROM, an operation command is sent from the personal computer 202. In addition to receiving the data, the computer 202 transmits data detected by a sensor, which will be described later, and statuses of various actuators to the computer 202 via Ethernet.

  As shown in FIG. 2, a plate-like microscope base 105 and a receiving base 103 are fixed to the surface plate 106. A column for supporting the microscope 101 is erected on the microscope base 105, and a micro object / manipulator base 108 having a plate shape and a smaller area than the base 103 is fixed on the base 103. . On the minute object / manipulator base 108, a block-shaped minute object placement base 102 and a manipulator placement base 104 for fixing the micro manipulator 100 having four legs are provided. It is fixed. The above-described relay substrate 205 is fixed to the leg portion of the manipulator mounting base 104.

  The micro object mounting base 102 has a substantially horizontal micro object mounting surface 17 at the top portion thereof, and the object to be grasped is mounted on the micro object mounting base 102. On the other hand, the manipulator mounting base 104 has two gripping fingers and a gripping finger driving actuator 1c (see FIG. 10) including a meter, and the tip portions of the two gripping fingers (hereinafter referred to as end effectors). The length of the leg portion and the fixed position to the minute object / manipulator base 108 so that the end effector of the micro gripper mechanism portion 1 as a gripping means for moving the objects closer to or away from each other is positioned substantially at the center of the minute object placement surface 17. Is set. In addition, the microscope 101 is supported on the microscope base 105 by the above-described support so that the objective lens is positioned at a substantially central portion of the minute object placement surface 17. The two gripping fingers are each biased by a spring (not shown), the gripper finger driving actuator 1c is in a non-energized normal state, the end effector is separated, and the opening (hereinafter referred to as the end effector opening 1a). ) Is formed (see FIG. 10).

  As shown in FIGS. 2 to 4, the micromanipulator 100 can rotate in a circular arc shape around the micro gripper mechanism 1 and the end effector, and can change the posture direction of the end effector in the X and Y directions simultaneously. XY moving mechanism 30 as first moving means for moving changing mechanism section 60, micro gripper mechanism section 1 and posture changing mechanism section 60 in the XY direction, and second moving means for moving in the Z direction intersecting with XY direction The Z movement mechanism unit 50 is provided.

  As shown in FIG. 3 and FIG. 4, the XY movement mechanism unit 30 has a driving force transmission mechanism 31 that synthesizes and transmits or outputs displacement due to the driving force from the X and Y directions. The driving force transmission mechanism 31 includes eleven links and twelve elastic hinges made of a polymer material such as polypropylene for connecting (connecting) the links.

  As shown in FIG. 5, the driving force transmission mechanism 31 has two pantographs (parallel four-bar mechanism). One pantograph is composed of a linear link 31d as a first link, a linear link 31e as a fourth link, a linear link 31f as a second link, and a linear link 31g as a third link. One link and four elastic hinges B, C, D, and F, and the other pantograph includes a linear link 31d ′ as a first link, a linear link 31e ′ as a fourth link, The linear link 31f ′ as the second link and the linear link 31g ′ as the third link and four elastic hinges B, C, D, and F are configured.

  One end of the link 31d is a first input end to which driving force from the X direction is input, and is connected (connected) to the substantially U-shaped link 31a as the fifth link via the elastic hinge A. ing. One end of the link 31f and the link 31g is a second input end to which driving force from the Y direction perpendicular to the X direction is input, and the elastic hinge F is attached to the linear link 31b as the sixth link. Are connected through. One end of the link 31e is an output end from which displacement due to the driving force input from the X direction and the Y direction is combined and enlarged or reduced and output. The elastic hinge E is connected to the linear link 31c as the seventh link. It is connected through. The other ends of the link 31d and the link 31e are connected via an elastic hinge C.

  Further, the other end of the link 31f is connected to the link 31e via an elastic hinge D, and the other end of the link 31g is connected to the link 31d via an elastic hinge B. As shown in FIG. 8 (a), when the positions of the elastic hinges A to E are represented as dots by the lower case letters a to e of the alphabet, Δabf, Δfde, and Δace constitute a similar triangle. . Therefore, the other end of the link 31f and the link 31g is a connection point a in which one end of the link 31d is connected (linked) to the link 31a by the elastic hinge A, and one end of the link 31e is connected to the link 31c by the elastic hinge E. Connected to the link 31e and the link 31d, respectively, so as to be similar to the triangle having the apex at the connection point c where the other end of the link e and the link 31d and the link 31e are connected by the elastic hinge C. Has been.

  On the other hand, the other pantograph is configured similarly. That is, one end of the link 31d 'is a first input end to which driving force from the X direction is input, and is connected to the link 31a via the elastic hinge A'. One end of the link 31f 'and the link 31g' is a second input end to which driving force from the Y direction is input, and is connected to the link 31b via an elastic hinge F '. Further, one end of the link 31e ′ is an output end that is output by combining and magnifying or reducing the displacement due to the driving force input from the X direction and the Y direction, and is connected to the link 31c via the elastic hinge E ′. Has been. The other ends of the link 31d 'and the link 31e' are connected via an elastic hinge C '. Further, the other end of the link 31f ′ and the link 31g ′ is a connection point where one end of the link 31d ′ is connected to the link 31a ′ by the elastic hinge A ′, and one end of the link 31e ′ is connected to the link 31c ′ by the elastic hinge E ′. Each of the links 31e has a similar shape to a triangle having apexes at the three connected points where the other ends of the connected points and the links 31d ′ and 31e ′ are connected by the elastic hinge C ′. 'And the link 31d' are connected via an elastic hinge D 'and an elastic hinge B'.

  Therefore, the link 31a connects the input ends (one end of the links 31d and 31d ′) of the two pantographs via the elastic hinges A and A ′, and the link 31b passes through the elastic hinges F and F ′. Input ends (one end of the links 31f and 31g and the links 31f 'and 31g') of the two pantographs are connected to each other, and the link 31c is connected to the output ends of the two pantographs via elastic hinges E and E '. (One end of link 31e, 31e ') is connected. In addition, the two pantographs are symmetrically arranged with a virtual line XX as a center line as a first virtual line connecting the midpoints of the links 31a, 31b, and 31c.

  The elastic hinge includes a type of elastic hinges A to E and A ′ to E ′ that connect two links having an obtuse end, and an elastic hinge F that connects three links having an acute end, Two types of F 'type are used. However, in these two types of elastic hinges, as shown in FIG. 6A, the approximate center of the elastic deformation range is the home position, and as shown in FIGS. 6B and 6C, the elastic hinges are elastic. This is common in that it has a double vibration structure that can be deformed in both directions around the home position within the deformation range. The elastic hinges A to F and A to F ′ are located at the home positions when no driving force is input to the input ends of the two pantographs in the X and Y directions.

  As shown in FIGS. 3 and 4, the XY movement mechanism unit 30 includes a slide table 32 a and a stator unit (stator portion) in order to input a driving force in the X direction and the Y direction to the drive transmission mechanism 31. And an X-direction actuator 32 made up of a linear stepping motor, and a Y-direction actuator 33 made up of a linear stepping motor that also has a slide table 33a and a stator portion. The link 31 a of the drive transmission mechanism 31 is fixed to the slide table 32 a of the X direction actuator 32, and the link 31 b of the drive transmission mechanism 31 is fixed to the slide table 33 a of the Y direction actuator 33. Further, the link 31 c of the drive transmission mechanism 31 is fixed (fixed) to the Z moving mechanism unit 50. For this reason, when the rectilinear driving force from the X direction actuator 32 and the Y direction actuator 33 is input to the links 31a and 31b, the two pantographs are displaced by the rectilinear driving force, and the displacement amounts are combined in the X and Y directions. -Enlarged and output to the link 31c.

  The Z moving mechanism 50 has a flat bottom frame 53 as an output stage. The link 31c described above is fixed to the bottom frame 53. Further, four micro casters 36 are disposed at the corners of the bottom frame 53. Therefore, the bottom frame 53 is configured to be movable in the XY directions on the cradle 34 fixed to the manipulator mounting base 104 in accordance with the output from the fixed link 31c. Further, the Z moving mechanism unit 50 includes a moving frame 54 that is located above the bottom frame 53 and can be separated from and approached the bottom frame 53 in the Z direction. The moving frame 54 accommodates a linear motion mechanism including a Z-direction actuator 51 having a stepping motor capable of forward / reverse rotation and a shaft 52 supported at one end by a bottom frame 53. The moving frame 54 is configured to be separated from the bottom frame 53 when the Z-direction actuator 51 rotates in the forward direction and close to the bottom frame 53 by rotating in the reverse direction.

  Therefore, since the moving frame 54 can move relative to the bottom frame 53 in the Z direction, the moving frame 54 is driven by the driving force from the X direction actuator 32, the Y direction actuator 33, and the Z direction actuator 51. Movement of Z in the three-dimensional direction is allowed. The posture changing mechanism 60 is fixed to the moving frame 54.

  As shown in FIG. 7, the posture change mechanism unit 60 includes a substantially fan-shaped base frame 2 and a moving unit 55 that can move relative to the base frame 2. The micro gripper mechanism 1 is connected to the tip of the moving unit 55 through the shaft 71.

  The base frame 2 forms a central portion of the base frame 2 and is a substantially fan-shaped and substantially horizontal slide plane 2a, and a slide slope that is adjacent to the end effector side of the slide plane 2a and is substantially fan-shaped and tapered at an angle of approximately 30 °. Surface 2b, curved wall 2d adjacent to the moving frame 54 side of the slide plane 2a and forming a part of a concentric circle (arc) centering on the end effector on the front and back, with teeth fixed to the slide plane 2a side of the curved wall 2d A belt 2c, a curved wall 2e that forms a part of a concentric circle centering on the end effector and faces the curved wall 2d, a transmission integrated sensor 2f that is fixed to one side of the curved wall 2e, and a posture changing mechanism 60 The connecting portion 16 (see FIG. 11A) for connecting (fixing) to the moving frame 54 is provided. An arcuate groove 2g is formed between the curved wall 2d and the curved wall 2e.

  The moving unit 55 is assembled with a posture changing actuator 61 composed of a stepping motor capable of forward and reverse rotation. A pulley gear is fitted to the actuator shaft of the posture changing actuator 61, and the rotational driving force from the posture changing actuator 61 is transmitted to the reduction gear 66 via a toothed endless belt. The reduction gear 66 is configured by fitting a large-diameter gear and a small-diameter gear (not shown) disposed below the large-diameter gear on a rotating shaft. The small-diameter gear extends through the moving unit 55 to the base frame 2 side. Further, two columnar sliders (not shown) and two shafts (not shown) project from the moving unit 55 toward the base frame 2 side. The rollers 70 are rotatably supported on these shafts. A rectangular plate-shaped light shielding plate (not shown) is planted toward the base frame 2 side. The micro gripper mechanism 1 has a ring-shaped connecting portion at the end, and is fixed to the moving unit 55 by the shaft 71 passing through the connecting portion.

  The small diameter gear of the moving unit 55 meshes with the toothed belt 2 c of the base frame 2. The roller 70 of the moving unit 55 is disposed in the groove 2g of the base frame 2 and abuts against the curved surface of the curved wall 2d. A spring 68 is stretched so that the small-diameter gear presses the curved wall 2d. Further, the tip of the slider (not shown) is in contact with the slide plane 2 b of the base frame 2. Therefore, when the posture changing actuator 61 is driven, the moving unit 55 is transmitted to the small-diameter gear meshed with the toothed belt 2b, and moves on the base frame 2 in an arc shape around the end effector. It is taken.

  The micro gripper mechanism unit 1 is directed downward so that the end effector can grip the minute object placed on the minute object placement surface 17 except for the horizontal coupling portion fixed to the moving unit 55 by the shaft 71. Are inclined at an angle of approximately 30 °. A slider (not shown) projects downward from the bottom surface of the micro gripper mechanism 1 in the vicinity of the horizontal connecting portion. The front end of the slider is in contact with the slide inclined surface 2 b of the base frame 2.

(Operation)
Next, the operation of the minute object handling system 200 when placing a rectangular parallelepiped minute chip element on a land on a printed circuit board will be described.

  When power is turned on to all the components constituting the minute object handling system such as the personal computer 202 and the micromanipulator 110 and the application software is started on the personal computer 202 and the initial setting process of the micromanipulator 110 is completed, the PLC 204 ( CPU) sends the statuses of various actuators and sensors on the micromanipulator 110 side to the personal computer 202.

  The personal computer 202 refers to the program data to determine whether there is an abnormality in the received status. If there is an abnormality, the personal computer 202 displays the abnormality location and the degree of abnormality on the display 201, and if there is no abnormality (or the degree of abnormality). Whether or not the end effector may be positioned at the reference position so that the end effector does not inadvertently come into contact with a mounted object (for example, a printed circuit board) on the minute object mounting surface 17. Is displayed on the display 201 and waits until there is a positive input from the input device 203. When there is an input from the input device 203, the personal computer 202 instructs the PLC 204 to position the end effector at the reference position.

  The PLC 204 drives the attitude change actuator 61 to move the moving unit 55 to the sensor 2f side, and determines whether there is a change in the binary signal from the sensor 2f. When a light shielding plate (not shown) installed at the bottom of the moving unit 55 blocks light emitted from the sensor 2f, for example, the signal from the sensor 2f changes from a low level signal to a high level signal. Thereby, the PLC 204 can know that the moving unit 55 has reached the reference position. In other words, the PLC 204 can obtain posture coordinates serving as a reference for the end effector in the X and Y directions. When the moving unit 55 reaches the reference position, the PLC 204 stops driving the posture changing actuator 61 and informs the personal computer 202 that preparation for handling a minute object is completed.

  The personal computer 202 displays on the display 201 that a minute object (minute chip element) can be handled with a small window, and waits for an input from the input device 203. The operator inputs with the input device 203 so that the chip element is positioned in the end effector opening 1a while referring to the microscope image on the display 201. In this embodiment, such an input operation is supported by application software, and can be performed by dragging with the mouse or by using a left-right click.

  The personal computer 202 converts the input information from the input device 203 for each of the X, Y, and Z direction components and sends the converted information to the PLC 204. The PLC 204 drives the X direction actuator 32, the Y direction actuator 33 of the XY movement mechanism unit 30, and the Z direction actuator 51 of the Z movement mechanism unit 50 in accordance with the X, Y, and Z direction components sent from the personal computer 202. Then, the chip element 20 is moved so as to be positioned at the end effector opening 1a (the state shown in FIG. 11A), and waits until a command from the personal computer 202 is issued.

  Here, the operation of the drive transmission mechanism 31 of the XY movement mechanism unit 30 will be described in detail. First, the operation principle of one pantograph will be described with reference to FIG. As described above, Δabf, Δfde, and Δace are similar to each other. In general, the points a, f, and e are often on a straight line, but may not be on the same straight line. The shape of the pantograph is determined by the line segment ab, the coefficient k1 (≡line segment bc length / line segment ab length) and the coefficient k2 (≡line segment ac length / line segment ce length).

  When the point a is moved while the point f is fixed, the displacement of the point a is enlarged (or reduced) by k1 times to become the displacement of the point e (see FIG. 8B). Conversely, when the point a is fixed and the point f is moved, the displacement of the point e is (1 + k1) times the displacement of the point f. Further, the movement direction of the point e is inclined by 180 ° with respect to the movement direction of the point a, and is the same direction as the movement direction of the point f (see FIG. 8C).

  Next, the operation of the drive transmission mechanism 31 of this embodiment in which two pantographs are connected by links 31a, 31b, 31c will be described with reference to FIG. As described above, one pantograph represented by the points a to f and the other pantograph represented by the points a ′ to f ′ are virtual lines that connect the midpoints of the links 31a, 31b, and 31c. They are arranged symmetrically with XX as the center line. Δabf, Δfde, and Δace are similar to each other, and Δa′b′f ′, Δf′d′e ′, and Δa′c′e ′ are also similar to each other. Also, Δabf and Δa′b′f ′, Δfde and Δf′d′e ′, and Δace and Δa′c′e ′ are line symmetric with respect to the virtual line XX, respectively. In other words, it has an optical mirror image relationship.

  As in the case of one pantograph as described above, one pantograph represented by the points a to f has the displacement of the point a enlarged by k1 times when the point a is fixed and the point a is moved ( (Or reduced) to a displacement at point e. Conversely, when the point a is fixed and the point f is moved, the displacement of the point e is (1 + k1) times the displacement of the point f. Further, the movement direction of the point e is inclined by 180 ° with respect to the movement direction of the point a, and is the same direction as the movement direction of the point f. On the other hand, the displacement of the other pantograph represented by the points a 'to f' is similarly enlarged (or reduced).

  Accordingly, when the points f and f ′ are fixed and the points a and a ′ are simultaneously displaced, the points e and e ′ are subjected to the same displacement enlarged by k1 times, and the points a and a are If 'is fixed and point f and point f' are displaced simultaneously, point e and point e 'will produce the same displacement magnified (1 + k1) times. Therefore, when the displacement is given while maintaining the postures of the line segments aa 'and ff', the posture of the line segment ee 'is kept constant before and after the displacement.

  FIG. 10 schematically shows the operation form of the drive transmission mechanism 31, and FIG. 10E corresponds to the home position of the drive transmission mechanism 31. Here, the home position refers to an initial position or a storage position of the drive transmission mechanism 31 before the drive force from the X direction actuator 32 and the Y direction actuator 33 of the XY movement mechanism unit 30 is applied. The drive transmission mechanism 31 including two pantographs and links 31a, 31b, and 31c is controlled from the home position by arbitrary driving force control of the X-direction actuator 32 and the Y-direction actuator 33 by the PLC 204, as shown in FIG. Each form of (f) is deformed with the deformation of the elastic hinge.

  As shown in FIGS. 10A to 10F, the link 31c maintains its posture in the vertical direction (Y direction) regardless of the shape of the link 31c. That is, when the driving force is input from the X-direction actuator 32 and the Y-direction actuator 33 to the links 31a and 31b, the links 31a, 31b, and 31c are displaced so as to maintain a substantially parallel state. In other words, when a driving force is input to the links 31a and 31b from the X-direction actuator 32 and the Y-direction actuator 33, an imaginary line connecting the points a, f, and e of one pantograph shown in FIG. The phantom lines connecting the points a ′, f ′ and e ′ of the pantograph are displaced so as to maintain a substantially parallel state with the phantom lines XX.

  The elastic hinges A to F and A ′ to F ′ are arranged in accordance with the driving force from the X direction actuator 32 and the Y direction actuator 33 from the substantially central home position in the elastic deformation range shown in FIG. b) Deformation about the home position within the elastic deformation range shown in (c). When the drive transmission mechanism 31 is located at the home position, the elastic hinges A to F and A ′ to F ′ are also located at the home position.

  Accordingly, when a driving force is input to the links 31a and 31b from the X direction actuator 32 and the Y direction actuator 33, the drive transmission mechanism 31 is deformed by the elastic hinges A to F and A ′ to F ′ and is based on two pantographs. A predetermined displacement is output to the link 31c and moved on the cradle 34 in the X and Y directions (see FIG. 4). Further, by driving the Z-direction actuator 51 of the Z movement mechanism unit 50, the chip element 20 is positioned in the end effector opening 1a.

  Since the gripping direction of the end effector and the orientation of the chip element 20 are inconsistent, the operator inputs with the input device 203 so that the X and Y directions of the end effector are directions in which the chip element 20 can be gripped. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the posture changing actuator 61 so that the moving unit 55 is formed in an arc shape with the end effector as the center with respect to the base frame 2 so that the X and Y directions of the end effector are in the direction in which the chip element 20 can be gripped. Rotate (the state shown in FIG. 11B) and wait until a command from the personal computer 202 is received.

  Since the gripping direction of the end effector and the orientation of the chip element 20 are matched, the operator inputs with the input device 203 in order to grip the chip element 20 with the end effector. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the gripping finger driving actuator 1c, causes the end effector to grip the gripping target object 20, and waits for a command from the personal computer 202.

  The operator inputs with the input device 203 so as to be positioned at the land position of the end effector printed circuit board while holding the chip element 20. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the XYZ moving mechanism unit 40 to move the chip element 20 so as to be positioned at the land position, and waits for an instruction from the personal computer 202.

  Since the gripping direction of the end effector that grips the chip element 20 and the direction of the land position are inconsistent, the operator inputs with the input device 203 so that the direction of the end effector is the same as the land position. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the attitude changing actuator 61 to rotate the moving unit 55 in an arc shape with respect to the end effector with respect to the base frame 2 so that the direction of the end effector is the same as the land position. Wait until there is an order.

  The operator inputs with the input device 203 so as to separate the end effector. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the gripping finger driving actuator 1c to separate the end effector (forms the end effector opening 1c to release gripping of the minute object). As a result, the chip element 20 is placed at the land position 21 (the state shown in FIG. 11C).

  Since the operator has finished placing the chip element 20 on the land position 21, the operator inputs a return command for returning the drive transmission mechanism 31 to the home position using the input device 203. The personal computer 202 sends the input information (return command) from the input device 203 to the PLC 204. The PLC 204 drives the X-direction actuator 32 and the Y-direction actuator 33 to return the drive transmission mechanism 31 to the home position where the elastic hinges A to F and A ′ to F ′ are not deformed.

(Action etc.)
Next, the operation and the like of the minute object handling system 200 of the present embodiment will be described focusing on the operation and the like of the drive transmission mechanism 31 of the micromanipulator 110.

  In the micromanipulator 110 of the present embodiment, the two pantographs of the drive transmission mechanism 31 are arranged symmetrically about a virtual line XX connecting the midpoints of the links 31a, 31b, and 31c. The direction input ends (points a and a ′ and points f and f ′ shown in FIG. 9) and the output ends (points e and e ′ shown in FIG. 9) are connected by links 31a, 31b, and 31c, respectively. . The link 31c is maintained parallel to the links 31a and 31b regardless of the displacement of the two pantographs in the X and Y directions, and the link 31c is supported on both sides by two elastic hinges E and E ′. . Therefore, the link 31c can maintain a stable posture, and the drive transmission mechanism 31 synthesizes the driving force from the X-direction actuator 32 and the Y-direction actuator 33 input from the input ends in the X and Y directions to expand or contract. Thus, it can be accurately transmitted to the link 31c. Therefore, according to the present embodiment, since the link 31c is supported by the two output ends, it is possible to maintain a stable posture and improve the accuracy of movement of the micro gripper mechanism unit 1 in the X direction and the Y direction. Since the drive transmission mechanism 31 having two pantographs is used in place of the XY table, the micromanipulator 110 can be made compact and lightweight.

  Further, the micromanipulator 110 of the present embodiment is excellent in durability because the elastic hinges A to F and A ′ to F ′ of the drive transmission mechanism 31 are made of a polymer material, and as shown in FIG. It has a structure that can swing both in the deformation range, and can reduce deformation at both ends of the operation range. That is, when the state shown in FIG. 6A is used as the home position and the state shown in FIGS. 6B and 6C can be deformed, the state shown in FIGS. 6B and 6C is changed. In addition, since only about half of the deformation is required, the stress is reduced, and there is a margin for plastic deformation. Furthermore, since the approximate center of the elastic deformation range where the average stress of both vibrations is zero is the home position, the safety factor against creep deformation can be increased by returning to the home position and storing. Therefore, it is possible to obtain the driving force transmission mechanism 31 that can maintain high accuracy even if it is continuously used.

  Furthermore, the micromanipulator 110 according to the present embodiment includes an attitude changing mechanism unit 60 that includes the base frame 2 and the moving unit 55. The moving unit 55 can turn in an arc shape around the end effector with respect to the base frame 2, and the posture of the end effector of the micro gripper mechanism unit 1 connected to the moving unit 55 can be changed. Accordingly, the micromanipulator 110 can remove a minute object by one operation (contact) even if the shape of the minute object (object to be grasped) such as a chip element has a feature (even if the grasping direction is limited). The end effector can be securely gripped, and a minute object (chip element) can be placed at an appropriate placement position (land position). Therefore, even if the minute object is an easily fragile object such as a living body, the living body can be grasped by one contact, and it is not necessary to repeat trial and error for grasping the living body, so that the living body is not damaged.

  Further, in the micro manipulator 110 of the present embodiment, the moving unit 55 rotates in an arc shape around the end effector with respect to the base frame 2, so that the end effector that grips a minute object is the center of the rotation operation. Therefore, a change in position caused by changing the orientation direction of the end effector can be reduced, and the micromanipulator 110 can be operated within the microscope field of view.

  Further, the micromanipulator 110 according to the present embodiment has a slider (not shown) in which the moving unit 55 comes into contact with the base frame 2, and the moving unit 55 comes into contact with the base frame 2 at a plurality of locations by the slider and the roller 70. Therefore, stable movement of the moving unit 55 relative to the base frame 2 can be ensured. Further, in the micro manipulator 110 of this embodiment, the moving unit 55 is disposed above the base frame 2 in the Z direction, and the micro gripper mechanism unit 1 is supported by the moving unit 55 so as to be inclined in the Z direction. Therefore, the minute object placed on the minute object placement base 102 can be grasped by the end effector from above, and can be easily grasped by the tip of the grasping finger while observing in the microscope visual field. Furthermore, since the slider (not shown) of the micro gripper mechanism portion 1 is in contact with the slide inclined surface 2b of the base frame 2, even if the micro gripper mechanism portion 1 is inclined, the movement unit 55 is moved. Thus, stable movement of the micro gripper mechanism 1 can be ensured.

  Further, the micromanipulator 110 of the present embodiment includes a sensor 2f in which the posture changing mechanism unit 60 is disposed in the base frame 2 and a light shielding plate (not shown) implanted in the moving unit 55. Since the end effector posture (position in the X and Y directions) is detected before the minute object is gripped by the effector, the end effector posture can be accurately grasped even if the moving unit 55 moves. it can.

  In the present embodiment, the link 31a is illustrated as being substantially U-shaped, but the present invention is not limited to the shape of the link, and the link 31a may be a linear one as in the link 31c. It may be used. Further, in the present embodiment, an example in which the Z movement mechanism unit 50 and the micro gripper mechanism unit 1 are connected via the posture change mechanism unit 60 has been described, but the posture deformation mechanism 60 is not provided and the Z movement mechanism unit 50 is directly connected. The micro gripper mechanism 1 may be connected.

  Further, in the present embodiment, the driving force transmission mechanism 31 configured with 11 links and 12 elastic hinges is illustrated, but the present invention is not limited to this, and a plurality of links and a plurality of hinges are provided. It is applicable to a drive transmission mechanism having Further, for example, these links and elastic hinges may be integrally formed of a polymer material by molding or the like, and the two pantograph pantographs are integrally formed so that the above-described symmetrical arrangement is obtained. The input end and output end of the pantograph and the links 31a, 31b, 31c may be connected by elastic hinges A, A ′, F, F ′, E, E ′.

  In the present embodiment, the gripper has two gripping fingers and the end effector has a substantially linear shape. However, the present invention is not limited to this, and a minute object (grip target) It goes without saying that the number (multiple) of gripping fingers and the shape of the tip can be changed according to the shape of the finger. Furthermore, in the present embodiment, an example is shown in which both gripping fingers are brought close to each other. However, only one gripping finger is driven (moved) by the gripping finger driving actuator 3 and the other gripping finger remains fixed. You may make it do.

  In order to provide a driving force transmission mechanism that can afford a plastic deformation and has a high safety factor against creep deformation, the present invention manufactures and sells a driving force transmission mechanism and a micromanipulator equipped with the driving force transmission mechanism. Therefore, it has industrial applicability.

1 is a schematic configuration diagram of a minute object handling system according to an embodiment to which the present invention is applicable. It is an appearance perspective view of a micromanipulator of a minute object handling system of an embodiment. It is a top view of a micromanipulator. It is a side view of a micromanipulator. It is a top view of the drive transmission mechanism of the XY movement mechanism part of a micromanipulator. It is a partial enlarged plan view which shows the deformation | transformation aspect of the elastic hinges C and F of a drive transmission mechanism, (a) shows the aspect in a home position, (b) shows the aspect in one deformation | transformation limit of the elastic deformation range. (C) shows the mode in the other deformation limit of the elastic deformation range. It is an external appearance perspective view of the micro gripper mechanism part and attitude | position change mechanism part of a micro manipulator. It is a mechanism diagram schematically showing one pantograph, (a) is in a home position where no input is made to points a and f, (b) is a state where point a is fixed and point a is moved, (C) shows a state in which the point a is fixed and the point f is moved. It is a mechanism figure which shows typically the drive transmission mechanism of an XY movement mechanism part. FIG. 4 is a mechanism diagram schematically showing displacement of a drive transmission mechanism, where (a) is a displacement state, (b) is a displacement state, (c) is a displacement state, and (d) is a displacement state, 4; (E) is the home position without displacement, (f) is the displacement state 5, (g) is the displacement state 6, (h) is the displacement state 7, (i) is the displacement state 8. Show. It is a top view of the operation state of a micro gripper mechanism part and an attitude | position change mechanism part, (a) shows the operation state 1, (b) shows the operation state 2, and (c) shows the operation state 3.

Explanation of symbols

1 Micro gripper mechanism (gripping means)
30 XY moving mechanism (first moving means)
31 drive transmission mechanism 31a link (fifth link)
31b link (sixth link)
31c link (seventh link)
31d, 31d 'link (first link)
31e, 31e 'link (fourth link)
31f, 31f 'link (second link)
31g, 31g 'link (third link)
50 Z moving mechanism (second moving means)
54 Bottom frame (output stage)
110 Micromanipulator A, B, C, D, E, F, A ', B', C ', D', E ', F' Elastic hinge

Claims (9)

  A driving force transmission mechanism having a plurality of substantially linear links connected at a plurality of positions by an elastic hinge made of a polymer material and having a structure capable of swinging in an elastic deformation range, wherein the elastic hinge is the elastic deformation A driving force transmission mechanism characterized in that the approximate center of the range is the home position.   A driving force transmission mechanism having a plurality of substantially linear links connected at a plurality of locations by an elastic hinge made of a polymer material and having a structure capable of both vibrations within an elastic deformation range, wherein the elastic hinge includes the elastic hinge A driving force transmission mechanism characterized in that the shape when molded at the home position of the hinge is maintained. A first input end to which a driving force from a first direction is input, a second input end to which a driving force from a second direction perpendicular to the first direction is input, and the input. The first and fourth links having a substantially linear shape via the elastic hinges. Two parallel four-bar mechanisms connected respectively at four connecting points;
A fifth link connecting the first input ends via an elastic hinge;
A sixth link connecting the second input ends via an elastic hinge;
A seventh link connecting the output ends via an elastic hinge;
And the elastic hinge is made of a polymer material and has a structure capable of swinging in the elastic deformation range, and the approximate center of the elastic deformation range is the home position. .   The two parallel four-joint mechanisms have one end of the first link as the fifth link, one end of the second and third links as the sixth link, and the fourth link, respectively. One end is connected to the seventh link via the elastic hinge, and the other ends of the first and fourth links are connected to each other via the elastic hinge, and the second and third The other end of the link includes the elastic hinge connecting the one end of the first link and the fifth link, the elastic hinge connecting the one end of the fourth link and the seventh link, and the The first and fourth links are connected to the fourth and first links via the elastic hinges, respectively, so as to be similar to a triangle having the elastic hinge as a vertex connecting the other ends of the first and fourth links. As described in claim 3, Of the driving force transmission mechanism.   5. The driving force transmission mechanism according to claim 3, wherein the elastic hinge is positioned at the home position when no driving force is input to the first and second input ends. 6. . A gripping means for gripping a minute gripping object by bringing the tip of the gripping finger close to the gripping finger;
A first input end to which a driving force from a first direction is input, a second input end to which a driving force from a second direction perpendicular to the first direction is input, and the input. The first and fourth links having a substantially linear shape via the elastic hinges. Two parallel four-joint mechanisms respectively connected at four connecting points, a fifth link connecting the first input ends via an elastic hinge, and the second input ends via an elastic hinge A first link for moving the gripping means in the first and second directions, and a sixth link for connecting the output ends via an elastic hinge. Means,
Second moving means for moving the gripping means in a third direction orthogonal to the first and second directions;
The micromanipulator is characterized in that the elastic hinge is made of a polymer material and has a structure that can be vibrated both in the elastic deformation range, and the approximate center of the elastic deformation range is the home position.   The two parallel four-joint mechanisms have one end of the first link as the fifth link, one end of the second and third links as the sixth link, and the fourth link, respectively. One end is connected to the seventh link via the elastic hinge, and the other ends of the first and fourth links are connected to each other via the elastic hinge, and the second and third The other end of the link includes the elastic hinge connecting the one end of the first link and the fifth link, the elastic hinge connecting the one end of the fourth link and the seventh link, and the The first and fourth links are connected to the fourth and first links via the elastic hinges, respectively, so as to be similar to a triangle having the elastic hinge as a vertex connecting the other ends of the first and fourth links. It is described in claim 6 Of micro-manipulator.   The micromanipulator according to claim 6 or 7, wherein the elastic hinge is positioned at the home position when a driving force is not input to the first and second input ends.   An output stage fixed to the third link and further movable in the first and second directions is further provided, and the second moving means moves the gripping means in the third direction on the output stage. The micromanipulator according to any one of claims 6 to 8, characterized in that: