JP2005342844A - Micromanipulator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micromanipulator capable of gripping an object to be gripped with gripping finger tips in a single operation in a microscopic field and placing the gripping object on an appropriate position. <P>SOLUTION: This micromanipulator 110 is provided with a micro-gripper mechanism part 1 approaching the tips of gripping fingers to each other and gripping a micro-object to be gripped, an XYZ moving mechanism part 40 moving the micro-gripper mechanism part 1 in the directions of the X, Y, and Z three dimensions, and an attitude change mechanism part 60 disposed between the micro-gripper mechanism part 1 and the XYZ moving mechanism part 40 and changing the attitude direction of the gripping finger tip parts to rotationally turn the gripping fingers around the gripping finger tip parts. Even if the shape of the object is characteristic, this micromanipulator can grip the object by an end effector in a single contact and place the object to the appropriate position to be placed. Even if the gripping object is an organism, this micromanipulator inflicts no damage thereon. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a micromanipulator, and more particularly, to a micromanipulator that grips a minute gripping object by bringing tips of gripping fingers close to each other.

  Conventionally, for example, a micromanipulator has been used for assembling a minute part or operating a cell. In general, a micromanipulator has a mechanism (gripping means) for moving the tip portions of a plurality of gripping fingers close to and away from each other to grasp a minute grasping object (for example, a patent) Since the object to be grasped is very small, the operation by the micromanipulator is performed under the microscope visual field by the naked eye or by referring to the image output to the display via the CCD camera attached to the microscope (see FIG. 1). For example, see Patent Document 2).

  Further, in the conventional micromanipulator, when the orientation of the gripping finger tip is matched with the orientation of the gripping target, the gripping target is aligned in advance with the orientation of the gripping finger tip. A mechanism is provided that can be mounted on a mounting table (mounting stage) or that can change the orientation of the gripping object mounting table. When a rectangular chip element is gripped and mounted on a substrate, the tip of the gripping finger or the direction of the substrate in the state where the object to be gripped is gripped to align the terminal position of the chip element with the land position of the substrate. Are adjusted manually.

JP-A-8-168979 JP-A-4-303810

  However, in the conventional micromanipulator, since the orientation of the tip of the gripping finger is manually adjusted with respect to the gripping target, multiple trials and errors are required until the gripping target is gripped by the tip of the gripping finger. It took time and effort. In particular, when the object to be grasped is a cell, if a plurality of trials and errors are performed, the cell is damaged. Therefore, a micromanipulator capable of grasping the object to be grasped by the tip of the grasping finger by one operation is required. ing. In addition, standardization of the 0402 type (0.4 mm × 0.2 mm) chip element, which is smaller than the current size by two, is being promoted, and it is possible to grip a finer gripping object and accurately place it on the land position. Micromanipulators are needed.

  In view of the above time, the present invention provides a micromanipulator capable of gripping a gripping object with a tip of a gripping finger by a single operation in a microscope field of view and placing the gripping object at an appropriate position. This is the issue.

  In order to solve the above-described problems, the present invention provides a micromanipulator, a gripping means for gripping a minute gripping object by bringing a tip of a gripping finger close to the gripper, and the gripping means in X, Y, and Z. A three-dimensional movement means for moving in a three-dimensional direction; a posture changing means arranged between the gripping means and the three-dimensional movement means, and simultaneously changing the posture direction of the tip of the gripping finger in the X and Y directions; Is provided.

  In the present invention, the gripping means is moved in the three-dimensional directions of X, Y, and Z so that the minute gripping object is positioned at the tip of the gripping finger by the three-dimensional moving means, and the gripping means, the three-dimensional moving means, By the posture changing means arranged between the two, the posture direction of the tip of the gripping finger with respect to the gripping object is simultaneously changed in the X and Y directions, and the gripping target is gripped by bringing the tip of the gripping finger close to the gripping means. The Then, when placing the gripped gripping object at a predetermined position, the three-dimensional moving means causes the gripping finger tip of the gripping means gripping the gripping object to be positioned at a predetermined position by X, Y, The posture direction of the gripping finger tip is simultaneously changed in the X and Y directions so that the object to be gripped is accurately positioned at a predetermined position by the posture changing means. The tip portion is separated and the object to be grasped is placed at a predetermined position. According to the present invention, since the posture changing means for simultaneously changing the posture direction of the gripping finger tip in the X and Y directions is provided, the gripping object is gripped by the gripping finger tip in one operation within the microscope field of view. It is possible to obtain a micromanipulator capable of placing the object to be gripped at an appropriate position in the X and Y directions.

  In the present invention, if the posture changing means changes the posture direction of the gripping finger tip so that the gripping finger rotates about the gripping finger tip, the gripping finger tip that grips the gripping object is Since it becomes the center of the rotation operation, the position change caused by changing the posture direction of the tip of the gripping finger can be reduced, and the micromanipulator can be operated within the microscope field of view. In such a configuration, for example, the posture changing means outputs an output stage in which the amount of movement in the X, Y, and Z directions from the three-dimensional moving means is output, and an arc shape centering on the tip of the gripping finger with respect to the output stage. And a movable body that is movable, and the gripping means is supported by the movable body. In this case, the output stage may have an arcuate guide, and an engaging protrusion that is movably engaged with the guide may be provided on the movable body. Further, if the moving body further includes a first abutting projection that abuts the output stage, the moving body abuts the output stage at a plurality of locations by the first abutting projection and the engaging projection. Stable movement of the moving body relative to the stage can be ensured. Furthermore, if the moving body is arranged above the output stage in the Z direction and the gripping means is supported by the moving body so as to be inclined in the Z direction, the gripping object placed on the mounting table can be moved. It becomes easy to grip with the tip of the gripping finger while observing in the microscope field of view. At this time, it is preferable that the gripping means has a second contact protrusion that contacts the output stage. A posture for detecting the posture of the tip of the gripping finger in the X and Y directions, having a sensor arranged on one of the output stage and the moving body and a light shielding plate arranged on the other If the detection means is further provided, the posture of the tip of the gripping finger can be accurately grasped even if the moving body moves.

  According to the present invention, since the posture changing means for simultaneously changing the posture direction of the tip of the gripping finger in the X and Y directions is provided, the gripping target can be gripped by the tip of the gripping finger in a single operation within the microscope visual field. In addition, it is possible to obtain an effect that a micromanipulator capable of placing the object to be grasped at an accurate position in the X and Y directions can be obtained.

  Hereinafter, an embodiment in which a micromanipulator according to the present invention is applied to a minute object handling system for handling a minute object to be grasped will be described with reference to the drawings.

  As shown in FIG. 1, a minute object handling system 200 of this embodiment includes a micromanipulator 110, a minute object placement base 102, and a microscope 101, and a minute object handling fixed to a thick plate-like surface plate 106. An apparatus 100, a personal computer (hereinafter referred to as a personal computer) 202, and a programmable logic controller (hereinafter referred to as a PLC) 204 that controls the micromanipulator 110 as a slave computer of the personal computer 202 are provided. Yes.

  A personal computer 202 is connected to a display 201 such as a liquid crystal display device and an input device 203 such as a mouse. The microscope 101 is equipped with a CCD camera 107, and an output terminal from the CCD camera 107 is connected to the personal computer 202. Therefore, the operator of the minute object handling system 200 can visually observe the minute gripping object placed on the minute object placement surface 17 directly from the eyepiece of the microscope 101 or via the display 201.

  Further, the personal computer 202 is connected to the PLC 204 via an interface, and the PLC 204 is connected to a relay board 205 mounted with a drive control unit and the like for performing drive control of various actuators arranged in the micromanipulator 110. Yes. The relay substrate 205 and various actuators disposed on the micromanipulator 110 are connected by a flexible substrate (not shown). The PLC 204 is configured to include a D / A converter, an A / D converter, etc. in addition to the CPU, ROM, and RAM. In accordance with a program and program data stored in the ROM, an operation command is sent from the personal computer 202. In addition to receiving the data, the computer 202 transmits data detected by a sensor, which will be described later, and statuses of various actuators to the computer 202 via Ethernet.

  As shown in FIG. 2, a plate-like microscope base 105 and a receiving base 103 are fixed to the surface plate 106. A column for supporting the microscope 101 is erected on the microscope base 105, and a micro object / manipulator base 108 having a plate shape and a smaller area than the base 103 is fixed on the base 103. . On the minute object / manipulator base 108, a block-shaped minute object placement base 102 and a manipulator placement base 104 for fixing the micro manipulator 100 having four legs are provided. It is fixed. The above-described relay substrate 205 is fixed to the leg portion of the manipulator mounting base 104.

  The micro object mounting base 102 has a substantially horizontal micro object mounting surface 17 at the top portion thereof, and the object to be grasped is mounted on the micro object mounting base 102. On the other hand, the manipulator mounting base 104 has two gripping fingers and a gripping finger driving actuator 1c (see FIGS. 5 and 6) composed of a meter, and the tip end portions (hereinafter referred to as end effectors) of the two gripping fingers. To the micro object / manipulator base 108 so that the end effector of the micro gripper mechanism section 1 as a gripping means for moving them close to or away from each other is positioned substantially at the center of the micro object placement surface 17. The fixed position is set. In addition, the microscope 101 is supported on the microscope base 105 by the above-described support so that the objective lens is positioned at a substantially central portion of the minute object placement surface 17. The two gripping fingers are each biased by a spring (not shown), the gripper finger driving actuator 1c is in a non-energized normal state, the end effector is separated, and the opening (hereinafter referred to as the end effector opening 1a). ) Is formed (see FIGS. 5 and 6A).

  As shown in FIGS. 2 to 4, the micromanipulator 100 includes a micro gripper mechanism unit 1, a posture changing mechanism unit 60 as posture changing means that simultaneously changes the posture direction of the end effector in the X and Y directions, and a micro manipulator 100. An XYZ moving mechanism unit 40 is provided as a three-dimensional moving unit having an XY moving mechanism 30 that moves the gripper mechanism unit 1 and the posture changing mechanism unit 60 in the XY direction and a Z moving mechanism 50 that moves the gripper mechanism unit 1 and the posture changing mechanism unit 60 in the Z direction.

  As shown in FIGS. 3 and 4, the XY moving mechanism 30 includes an X-direction actuator 32 having a linear mechanism, an encoder, and a stepping motor capable of forward / reverse rotation, and Y having a linear mechanism, an encoder, and a stepping motor capable of forward / reverse rotation. A directional actuator 33, an X direction input unit 31 a, a Y direction input unit 31 b, and an XY direction output unit 31 c fixed to the Z moving mechanism 50; the X direction input unit 31 a, the Y direction input unit 31 b, and the XY direction output unit And a parallel four-bar mechanism 31 in which two pantographs are symmetrically arranged with a virtual line connecting the midpoints of each of 31c as a center line. For this reason, when the rectilinear driving force from the X direction actuator 32 and the Y direction actuator 33 is respectively input to the X direction input unit 31a and the Y direction input unit 31b, the two pantographs are displaced by the rectilinear driving force, and the displacement amount Are combined and enlarged in the X and Y directions and output to the XY direction output unit 31c.

  The Z moving mechanism 50 has a flat bottom frame 53. The above-described XY direction output part 31 c is fixed to the bottom frame 53. Further, four micro casters are disposed at the corners of the bottom frame 53. For this reason, the bottom frame 53 is configured to be movable in the XY directions on the cradle 34 fixed to the manipulator mounting base 104 in accordance with the output from the fixed XY direction output part 31c. The Z moving mechanism 50 includes a moving frame 54 that is located above the bottom frame 53 and can be separated from and approached the bottom frame 53 in the Z direction. The moving frame 54 accommodates a linear motion mechanism including a Z-direction actuator 51 having an encoder and a stepping motor capable of forward and reverse rotation, and a shaft 52 supported at one end by a bottom frame 53. The moving frame 54 is configured to be separated from the bottom frame 53 when the Z-direction actuator 51 rotates in the forward direction and close to the bottom frame 53 by rotating in the reverse direction.

  Accordingly, since the moving frame 54 can move relative to the bottom frame 53 in the Z direction, the XYZ moving mechanism 40 (the moving frame 54 thereof) is moved from the X direction actuator 32, the Y direction actuator 33, and the Z direction actuator 51. The movement in the three-dimensional directions of X, Y, and Z is allowed by the driving force. The posture changing mechanism 60 is fixed to the moving frame 54.

  As shown in FIG. 5, the posture change mechanism unit 60 includes a substantially fan-shaped base frame 2 serving as an output stage, and a moving unit 55 serving as a moving body movable with respect to the base frame 2. The micro gripper mechanism 1 is connected to the tip of the moving unit 55 through the shaft 71.

  As shown in FIGS. 5 and 7, the base frame 2 forms a central portion of the base frame 2 and is substantially fan-shaped and substantially horizontal slide plane 2a, adjacent to the end effector side of the slide plane 2a, and substantially fan-shaped and tapered. As a part of a guide that forms a part (arc) of a concentric circle centering on the end effector on the front and back adjacent to the XYZ moving mechanism 40 side of the slide inclined surface 2b inclined at an angle of about 30 °. A curved wall 2d, a toothed belt 2c fixed to the sliding plane 2a side of the curved wall 2d, a curved wall 2e as a part of a guide forming a part of a concentric circle centering on the end effector and facing the curved wall 2d, The transmission integrated sensor 2f as a part of the posture detecting means fixed to one side of the curved wall 2e, and the connecting portion 16 for connecting (fixing) the posture changing mechanism 60 to the moving frame 54. It is. An arcuate groove 2g is formed between the curved wall 2d and the curved wall 2e.

  As shown in FIG. 8, the moving unit 55 has a speed reduction mechanism base 63 on which a speed reduction mechanism is arranged, an upper bracket 62 that covers the upper side of the speed reduction mechanism base 63, and a lower bracket 69 that covers the lower part of the speed reduction mechanism base 63. doing.

  The upper bracket 62 has a flat portion and a falling portion that is bent substantially vertically from both side surfaces of the flat portion and extends downward. A posture changing actuator 61 composed of a stepping motor capable of forward / reverse rotation is assembled on the flat surface portion, and bosses 62a and 62b and 62d and 62e (not shown) project from the falling portion.

  The speed reduction mechanism base 63 has a flat portion and a rising portion that is raised substantially vertically from both side surfaces of the flat portion. A pulley gear 65, a reduction gear 66, and a toothed endless transmission belt 67 are disposed on the flat portion. One side of the pulley gear 65 is rotatably supported by the speed reduction mechanism base 63, and the actuator shaft of the posture changing actuator 61 is fitted thereto. The reduction gear 66 is configured such that a large-diameter gear 66 a and a small-diameter gear 66 a disposed below the large-diameter gear 66 a are fitted to a rotation shaft, and one end of the rotation shaft is rotatably supported by the upper bracket 62. Has been. The belt 67 is stretched between the pulley gear 65 and the large diameter gear 66a and meshes with both. On the other hand, a spring 68 having a hook 68a at the other end is fixed to the rising portion. The upper bracket 62 is assembled to the speed reduction mechanism base 63 with screws 64. The small-diameter gear 66b protrudes downward through the flat portion.

  The lower bracket 69 includes a flat portion, a side rising portion that is raised substantially vertically from both side surfaces of the flat portion, a front rising portion that is raised substantially vertically from the flat portion on the XYZ moving side, and a micro gripper mechanism. And a falling part that is substantially vertically lowered from both side surfaces of the flat part on the part 1 side.

  Two sliders 72 as first cylindrical contact protrusions and two shafts as part of the engagement protrusions protrude from the flat surface portion downward. Each of these shafts is rotatably supported by a roller 70 as a part of the engaging projection, and a locking ring 73 is fitted to the tip of the shaft. Further, a light shielding plate 69f as a part of the rectangular plate-shaped posture detecting means is planted downward on the plane portion (see FIGS. 6B and 6C). A long hole is formed in the flat portion, and the small diameter gear 66b passes through the long hole.

  Slits 69a and 69b and slits 69d and 69e are formed at both ends of the side rising portion. The bosses 62a and 62b of the upper bracket 62 and bosses 62d and 62e (not shown) are slidably in contact with these slits. Further, spring hooks 69c are formed at both ends of the front rising part, and hooks 68a of the springs 68 are hooked on these spring hooks 69c. The shaft 71 described above is fixed to the falling portion, and the micro gripper mechanism portion 1 is supported (connected) to the falling portion of the moving unit 55.

  As shown in FIGS. 5 to 7, the small-diameter gear 66 b of the moving unit 55 meshes with the toothed belt 2 c of the base frame 2. The roller 70 of the moving unit 55 is disposed in the groove 2g of the base frame 2 and abuts against the curved surface of the curved wall 2d. The spring 68 is stretched so that the small-diameter gear 66b presses the curved wall 2d, and the upper surface of the locking ring 73 and the bottom surfaces of the curved walls 2d and 2e are opposed to each other with a certain clearance. Furthermore, the tip of the slider 72 is in contact with the slide plane 2 b of the base frame 2. Accordingly, when the posture changing actuator 61 is driven, the moving unit 55 is transmitted to the small diameter gear 66b meshed with the toothed belt 2b, and moves on the base frame 2 in an arc shape around the end effector. Has been adopted.

  As shown in FIGS. 5 and 6, the micro gripper mechanism unit 1 is a micro object in which an end effector is placed on a micro object placement surface 17 except for a horizontal coupling part that is coupled to a moving unit 55 by a shaft 71. Is inclined at an angle of approximately 30 ° downward. A slider 1b as a second abutting protrusion is provided on the bottom surface of the micro gripper mechanism 1 in the vicinity of the horizontal connecting portion so as to protrude downward. The tip of the slider 1b is in contact with the slide inclined surface 2b of the base frame 2.

(Operation)
Next, the operation of the minute object handling system 200 when placing a rectangular parallelepiped minute chip element on a land on a printed circuit board will be described.

  When power is turned on to all the components constituting the minute object handling system such as the personal computer 202 and the micromanipulator 110 and the application software is started on the personal computer 202 and the initial setting process of the micromanipulator 110 is completed, the PLC 204 ( CPU) sends the statuses of various actuators and sensors on the micromanipulator 110 side to the personal computer 202.

  The personal computer 202 refers to the program data to determine whether there is an abnormality in the sent status, and when there is an abnormality, displays the abnormality location and the degree of abnormality on the display 201, and when there is no abnormality (or abnormal condition) In a case where the end effector is at a reference position so that the end effector does not inadvertently come into contact with a mounted object (for example, a printed circuit board) on the minute object mounting surface 17 Is displayed on the display 201 and waits until there is a positive input from the input device 203. When there is an input from the input device 203, the personal computer 202 instructs the PLC 204 to position the end effector at the reference position.

  The PLC 204 drives the attitude change actuator 61 to move the moving unit 55 to the sensor 2f side, and determines whether there is a change in the binary signal from the sensor 2f. When the light shielding plate 69f (see FIG. 6B) shields light emitted from the sensor 2f, for example, the signal from the sensor 2f changes from a low level signal to a high level signal. Thereby, the PLC 204 can know that the moving unit 55 has reached the reference position. In other words, the PLC 204 can obtain posture coordinates serving as a reference for the end effector in the X and Y directions. When the moving unit 55 reaches the reference position, the PLC 204 stops driving the posture changing actuator 61 and informs the personal computer 202 that preparation for handling a minute object is completed.

  The personal computer 202 displays on the display 201 that a minute object (minute chip element) can be handled with a small window, and waits for an input from the input device 203. The operator inputs with the input device 203 so that the tip element is positioned in the end effector opening 1a while referring to the microscope image on the display 201. In the present embodiment, such an input operation is supported by application software, and can be performed using dragging or right-clicking.

  The personal computer 202 converts the input information from the input device 203 for each of the X, Y, and Z direction components and sends the converted information to the PLC 204. The PLC 204 drives the XYZ movement mechanism unit 40 (the XY movement mechanism 30, the X direction actuator 32 of the Z movement mechanism 50, the Y direction actuator 33, and the Z direction actuator 51) so that the chip element 20 is positioned at the end effector opening 1a. (The state shown in FIG. 9A), and waits for an instruction from the personal computer 202.

  Since the gripping direction of the end effector and the orientation of the chip element 20 are inconsistent, the operator inputs with the input device 203 so that the X and Y directions of the end effector are directions in which the chip element 20 can be gripped. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the posture changing actuator 61 so that the moving unit 55 is formed in an arc shape with the end effector as the center with respect to the base frame 2 so that the X and Y directions of the end effector are in the direction in which the chip element 20 can be gripped. Rotate (the state shown in FIG. 9B) and wait until a command from the personal computer 202 is received.

  Since the gripping direction of the end effector and the orientation of the chip element 20 are matched, the operator inputs with the input device 203 in order to grip the chip element 20 with the end effector. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the gripping finger driving actuator 1c, causes the end effector to grip the gripping target object 20, and waits for a command from the personal computer 202.

  The operator inputs with the input device 203 so as to be positioned at the land position of the end effector printed circuit board while holding the chip element 20. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the XYZ movement mechanism unit 40 to move the chip element 20 so as to be positioned at the land position 21 and waits until a command from the personal computer 202 is received.

  Since the gripping direction of the end effector that grips the chip element 20 and the direction of the land position 21 are inconsistent, the operator inputs with the input device 203 so that the direction of the end effector is the same as the land position 21. . The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the attitude changing actuator 61 to rotate the moving unit 55 in an arc shape with respect to the end effector with respect to the base frame 2 so that the direction of the end effector is the same as the land position. Wait until there is an order.

  The operator inputs with the input device 203 so as to separate the end effector. The personal computer 202 converts the input information from the input device 203 and sends it to the PLC 204. The PLC 204 drives the gripping finger driving actuator 1c to separate the end effector (forms the end effector opening 1c to release gripping of the minute object). As a result, the chip element 20 is placed at the land position 21 (the state shown in FIG. 9C).

(Action etc.)
Next, the operation and the like of the minute object handling system 200 of the present embodiment will be described focusing on the operation and the like of the micromanipulator 110.

  The micromanipulator 110 according to the present embodiment includes an attitude change mechanism unit 60 including the base frame 2 and the moving unit 55. The moving unit 55 can turn in an arc shape around the end effector with respect to the base frame 2, and the posture of the end effector of the micro gripper mechanism unit 1 connected to the moving unit 55 can be changed. Accordingly, the micromanipulator 110 can remove a minute object by one operation (contact) even if the shape of the minute object (object to be grasped) such as a chip element has a feature (even if the grasping direction is limited). The end effector can be securely gripped, and a minute object (chip element) can be placed at an appropriate placement position (land position). Therefore, even if the minute object is an easily fragile object such as a living body, the living body can be grasped by one contact, and it is not necessary to repeat trial and error for grasping the living body, so that the living body is not damaged.

  Further, in the micro manipulator 110 of the present embodiment, the moving unit 55 rotates in an arc shape around the end effector with respect to the base frame 2, so that the end effector that grips a minute object is the center of the rotation operation. Therefore, a change in position caused by changing the orientation direction of the end effector can be reduced, and the micromanipulator 110 can be operated within the microscope field of view.

  Further, the micromanipulator 110 of the present embodiment has a slider 72 with which the moving unit 55 comes into contact with the base frame 2, and the moving unit 55 comes into contact with the base frame 2 at a plurality of locations by the slider 72 and the roller 70. The stable movement of the moving unit 55 relative to the base frame 2 can be ensured. Further, in the micro manipulator 110 of this embodiment, the moving unit 55 is disposed above the base frame 2 in the Z direction, and the micro gripper mechanism unit 1 is supported by the moving unit 55 so as to be inclined in the Z direction. Therefore, the minute object placed on the minute object placement base 102 can be grasped by the end effector from above, and can be easily grasped by the tip of the grasping finger while observing in the microscope visual field. Furthermore, since the slider 1b of the micro gripper mechanism 1 is in contact with the slide inclined surface 2b of the base frame 2, even if the micro gripper mechanism 1 is inclined, the micro gripper is moved along with the movement of the moving unit 55. Stable movement of the mechanism unit 1 can be ensured.

  Further, the micromanipulator 110 of the present embodiment includes the sensor 2f in which the posture changing mechanism unit 60 is disposed in the base frame 2 and the light shielding plate 69f that is implanted in the moving unit 55. Since the end effector posture (position in the X and Y directions) is detected before the object is gripped, the end effector posture can be accurately grasped even if the moving unit 55 moves.

  In the present embodiment, the gripper has two gripping fingers and the end effector has a substantially linear shape. However, the present invention is not limited to this, and a minute object (grip target) It goes without saying that the number (multiple) of gripping fingers and the shape of the tip can be changed according to the shape of the finger. Further, in the present embodiment, an example is shown in which both gripping fingers are brought close to each other, but only one gripping finger is driven (moved) by the gripping finger driving actuator 3 and the other gripping finger remains fixed. You may make it do.

  Furthermore, in the present embodiment, the posture changing mechanism unit 60 having the sensor 2f arranged on the base frame 2 and the light shielding plate 69f implanted in the moving unit 55 is illustrated, but the light shielding plate 69f is implanted in the base frame 2. It is also possible to arrange the sensor 2 f on the moving unit 55. In the present embodiment, the base frame 2 has the curved walls 2d and 2e. However, the present invention is not limited to this example. For example, the moving unit 55 is placed on the rail provided on the base frame 2. You may make it move.

  The present invention provides a micromanipulator capable of gripping an object to be grasped by the tip of the grasping finger with a single operation in a microscope field of view and capable of placing the object to be grasped at an appropriate position. This contributes to the manufacture and sale of products, and thus has industrial applicability.

1 is a schematic configuration diagram of a minute object handling system according to an embodiment to which the present invention is applicable. It is an appearance perspective view of a micromanipulator of a minute object handling system of an embodiment. It is a top view of a micromanipulator. It is a side view of a micromanipulator. It is an external appearance perspective view of the micro gripper mechanism part and attitude | position change mechanism part of a micro manipulator. The micro gripper mechanism part and the attitude | position change mechanism part are shown, (A) is a top view, (B) A side view, (C) is a bottom view. It is a top view of the base frame of a posture change mechanism part. It is a disassembled perspective view of the movement unit of an attitude | position change mechanism part. It is a top view of the operation state of a micro gripper mechanism part and an attitude | position change mechanism part, (A) shows the operation state 1, (B) shows the operation state 2, and (C) shows the operation state 3.

Explanation of symbols

1 Micro gripper mechanism (gripping means)
1b Slider (second contact protrusion)
2 Base frame (output stage)
2d, 2e Curved wall (guide)
2f Transmission-integrated sensor (part of attitude detection means)
40 XYZ moving mechanism (three-dimensional moving means)
55 Moving unit (moving body)
60 Posture change mechanism (posture change means)
70 Roller (part of engagement protrusion)
72 Slider (first contact protrusion)
110 Micromanipulator

Claims (8)

A gripping means for gripping a minute gripping object by bringing the tip of the gripping finger close to the gripping finger;
Three-dimensional movement means for moving the gripping means in three-dimensional directions of X, Y, and Z;
A posture changing means that is disposed between the gripping means and the three-dimensional moving means, and simultaneously changes the posture direction of the tip of the gripping finger in the X and Y directions;
Micromanipulator equipped with.   The micromanipulator according to claim 1, wherein the posture changing means changes a posture direction of the gripping finger tip so that the gripping finger rotates about the gripping finger tip.   The posture changing means is an output stage that outputs movement amounts in the X, Y, and Z directions from the three-dimensional moving means, and a movement that can move in an arc shape with the gripping finger tip as a center with respect to the output stage. The micromanipulator according to claim 1, wherein the gripping means is supported by the movable body.   4. The micromanipulator according to claim 3, wherein the output stage has an arcuate guide, and an engaging projection that is movably engaged with the guide is provided on the movable body.   The micromanipulator according to claim 4, wherein the movable body further includes a first abutting protrusion that abuts on the output stage.   6. The movable body according to claim 3, wherein the movable body is disposed above the output stage in the Z direction, and the gripping means is supported by the movable body so as to be inclined in the Z direction. The micromanipulator according to any one of the above.   The micromanipulator according to claim 6, wherein the gripping means has a second abutting protrusion that abuts on the output stage.   A sensor disposed on one of the output stage and the movable body, and a light shielding plate disposed on the other, for detecting the posture of the tip of the gripping finger in the X and Y directions; The micromanipulator according to any one of claims 3 to 7, further comprising posture detection means.