CN108494286A - Using the twist mode precision piezoelectric actuator and preparation method thereof of shearing work pattern - Google Patents
Using the twist mode precision piezoelectric actuator and preparation method thereof of shearing work pattern Download PDFInfo
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- 238000010008 shearing Methods 0.000 title claims abstract description 28
- 238000002360 preparation method Methods 0.000 title abstract description 5
- 239000000919 ceramic Substances 0.000 claims abstract description 158
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- 230000010287 polarization Effects 0.000 claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 claims abstract description 34
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- 230000033001 locomotion Effects 0.000 claims description 24
- 238000000465 moulding Methods 0.000 claims description 22
- 238000005245 sintering Methods 0.000 claims description 22
- 238000003754 machining Methods 0.000 claims description 9
- 229910052573 porcelain Inorganic materials 0.000 claims description 9
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- 238000013461 design Methods 0.000 abstract description 11
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
Abstract
The present invention proposes a kind of twist mode precision piezoelectric actuator and preparation method thereof using shearing work pattern, belongs to Piezoelectric Driving field.Solves the problems such as existing rotary-type accurate piezoelectric actuator is complicated, cost is higher and making is cumbersome.Driver is cylindrical or circular ring shape, is made of piezoelectric ceramics and powered electrode piece, the polarization direction of the piezoelectric ceramics can be divided into along shaft drive axis to two kinds of radial polarised, piezoelectric ceramics can be divided into positive polarization and negative sense polarized piezoelectric ceramics group again in each case.After powered electrode piece applies driving voltage, piezoelectric ceramics generation is shear-deformable, and accurately angular displacement can be exported by structure design and appropriate connection.The fabrication processing of driver includes the making of piezoelectric ceramics and powered electrode piece and the assembly of driver, and technological process can be adjusted flexibly according to application scenario, processing conditions and performance indicator etc., convenient for batch production.
Description
Technical field
The invention belongs to piezoelectric driving technology fields, accurate more particularly to a kind of twist mode using shearing work pattern
Piezoelectric actuator and preparation method thereof.
Background technology
Along with precision and ultra-precision machining, precision optics, microelectronics, Life Science and Technology, accurate measurement, intelligent device
The fast development in the fields such as part requires also higher and higher, each research institution for the actuation techniques of micro-nano rank positioning accuracy
Also the field is had made extensive and intensive studies.In these fields, traditional electromagnetic machine is difficult to meet harsh performance
Index request, and piezoelectric actuator is with simple in structure, small, precision is high, response is fast, output is big, low energy consumption, electromechanical transformation
Coefficient is big, not by a variety of advantages such as electromagnetic interference, therefore shows up prominently in numerous type of drive, become research hotspot it
One.
The development of material science and the progress for fabricating technology promote the various piezoelectric actuators haveing excellent performance to gush in succession
It is existing.Make a general survey of existing achievement in research, most of precision piezoelectric actuator is all linear movement output, wherein using the most universal and
Ripe is exactly piezoelectric stack driving, but in many application fields accurately angle position be there is an urgent need to.It is existing
The accurate piezoelectric actuator majority that can export rotary motion to use certain mapping device, it is multiple thus to bring structure
The shortcomings that miscellaneous, cost increases and precision reduces, therefore propose a kind of precision that can export rotary motion simple and compact for structure
Piezoelectric driving device and its processing technology thereof being simple and efficient have a very important significance.
Invention content
Existing rotary-type accurate piezoelectric actuator type is single, complicated, cost is higher, smart in order to solve by the present invention
Degree is insufficient and the cumbersome technical problem of manufacture craft, proposes a kind of twist mode precision piezoelectric actuator using shearing work pattern
And preparation method thereof.
The purpose of the present invention is achieved through the following technical solutions：A kind of twist mode precision piezoelectricity using shearing work pattern
Driver, its shape are cylindrical or circular ring shape；The driver includes that m layers of shape are cylindrical or circular ring shape actuating list
Member 1, and m layers of actuating unit 1 are using the whole driver that is composed of a fixed connection by the way of the folded spelling in actuator axis direction；Every layer institute
It is fan-shaped or the piezoelectric ceramics 2 and 2n powered electrode piece 3 of fan annular that state actuating unit 1, which include 2n shape, wherein m for more than
0 integer, n are the integer more than 1；2n piezoelectric ceramics 2 in every layer of actuating unit 1 is circumferentially uniformly distributed along driver, and
A powered electrode piece 3 is fixed between two neighboring piezoelectric ceramics 2；2n piezoelectricity pottery in every layer of actuating unit 1
Porcelain 2 includes n a along actuator axis direction negative sense along actuator axis direction positive polarized first piezoelectric ceramics 2-1 and n
Polarized second piezoelectric ceramics 2-2, and the n polarized first piezoelectric ceramics 2-1 of forward direction and the polarized second piezoelectricity pottery of n negative sense
Porcelain 2-2 is alternately arranged.
Further, it after applying driving voltage on the powered electrode piece 3 of the piezoelectric actuator, is generated in piezoelectric ceramics 2
The electric field vertical with polarization direction, to occur along circumferential shear-deformable, the two bottom surfaces generations up and down of driver of driver
The relative angle deflection proportional to driving voltage, and then realize the output of rotary motion.
The present invention also proposes that a kind of twist mode precision piezoelectric actuator using shearing work pattern, its shape are cylinder
Shape or circular ring shape；The driver includes that m layers of shape are cylindrical or circular ring shape actuating unit 1, and m layers of actuating unit 1 are adopted
It is composed of a fixed connection whole driver with along the folded mode spelled in driver radial line direction；Every layer of actuating unit 1 includes 2n
Shape is fan-shaped or the piezoelectric ceramics 2 and 2n powered electrode piece 3 of fan annular, and wherein m is the integer more than 0, and n is more than 1
Integer；2n piezoelectric ceramics 2 in every layer of actuating unit 1 is circumferentially uniformly distributed along driver, and two neighboring piezoelectric ceramics 2 it
Between be fixed with a powered electrode piece 3；2n piezoelectric ceramics 2 in every layer of actuating unit 1 includes n along driver diameter
Positive polarized first piezoelectric ceramics 2-1 and n of line direction is along the driver radial line direction polarized second piezoelectric ceramics 2- of negative sense
2, and n positive polarization the first piezoelectric ceramics 2-1 and polarized second piezoelectric ceramics 2-2 of n negative sense is alternately arranged.
Further, it after applying driving voltage on the powered electrode piece 3 of the piezoelectric actuator, is generated in piezoelectric ceramics 2
The electric field vertical with polarization direction, to occur along circumferential shear-deformable, the inside and outside two cylinders generation of driver of driver
The relative angle deflection proportional to driving voltage, and then realize the output of rotary motion.
Further, apply opposite polarity driving voltage on the two neighboring powered electrode piece of the piezoelectric actuator 3, drive
Dynamic device output corner is proportional to driving voltage is applied, and is embodied in：Driving voltage is higher, and driver output corner is bigger,
The waveform of driving voltage is different, and the dynamic characteristic of driver output movement is also different.
The present invention also proposes a kind of production method of the twist mode precision piezoelectric actuator using shearing work pattern, described
Production method execution sequence be piezoelectric ceramics 2 molding and sintering, the polarization of piezoelectric ceramics 2, the machining of piezoelectric ceramics 2 with it is upper
Electrode and piezoelectric ceramics 2 and powered electrode piece 3 are assembled into driver one layer of actuating unit 1 process；Or piezoelectric ceramics
2 molding and with sintering, the machining of piezoelectric ceramics 2, the polarization of piezoelectric ceramics 2 and top electrode and by piezoelectric ceramics 2 be powered
Electrode slice 3 is assembled into the process of one layer of actuating unit 1 of driver；Or the molding of piezoelectric ceramics 2 and sintering, piezoelectric ceramics 2
Polarization is assembled into the process of one layer of actuating unit 1 of driver with top electrode and by piezoelectric ceramics 2 and powered electrode piece 3；Or
Molding, sintering and the top electrode of piezoelectric ceramics 2, the assembly of driver and the 2 polarized process of piezoelectric ceramics to having assembled；
Or in molding, sintering and the top electrode and driver of driver piezoelectric ceramics 2 polarization process.
The beneficial effects of the present invention are：The present invention provides a kind of twist mode precision piezoelectricity using shearing work pattern
Driver and its fabrication processing, driver are generated by the structure of reasonable design using the shearing work pattern of piezoelectric ceramics
Torsional deflection and then output accurately rotary motion.The present invention is by designing multilayered structure so that is often laminated the microbit of electroceramics
Move the fine angle positioning being overlapped mutually to obtain big stroke；The present invention is derived by the polarization direction of change piezoelectric ceramics
Axial torsion deformation and radial two kinds of structures of torsional deflection and operation principle, different workplaces and performance indicator are adapted to this
It is required that；The present invention can accurately control the size of angle displacement by adjusting the size of driving voltage, and essence is realized with this
Close angle positioning；The present invention by designing piezoelectric ceramics, the manufacture craft of powered electrode piece and the assembly technology of driver,
So that the processing and fabricating simple and flexible of driver, is adapted to a variety of different application scenarios, processing conditions and performance indicator and wants
It asks；In addition, the present invention can carry out structure optimization and the dimensionally-optimised micromation for accomplishing driver, Integration Design, have very
Big development space.During specific works and making, the connection by reasonable design and fixed form can make driver
Adapt to different structures and application scenario；By controlling driving voltage, thus it is possible to vary the size of driver output displacement；By changing
The waveform for becoming driving voltage, can obtain the different dynamical output of driver, to obtain desired output campaign；Added by changing
The built-up sequence of each technique in work production process is adapted to small lot production and large-scale production, has considerable flexibility.
Therefore, the present invention has very wide answer in the processing and fabricating field of ultraprecise driving, positioning, processing and piezoelectric actuator
Use foreground.
Description of the drawings
Fig. 1 is the piezoelectric ceramics with two layers of actuating unit along shaft drive axis to polarized accurate piezoelectric actuator three-dimensional knot
Structure schematic diagram；
Fig. 2 is three-dimensional structure of the piezoelectric ceramics along shaft drive axis one layer of actuating unit into polarized accurate piezoelectric actuator
Schematic diagram；
Fig. 3 is piezoelectric ceramics along shaft drive axis into polarized accurate piezoelectric actuator in one layer of actuating unit, piezoelectricity pottery
Shape, polarization mode and the arrangement schematic diagram of positive polarized piezoelectric ceramics group and negative sense polarized piezoelectric ceramics group in porcelain；
Fig. 4 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along shaft drive axis into polarized accurate piezoelectric actuator
The shape and arrangement schematic diagram of pole piece；
Fig. 5 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along shaft drive axis into polarized accurate piezoelectric actuator
The driving voltage schematic diagram applied on pole piece；
Fig. 6 is that the piezoelectric ceramics with two layers of actuating unit swashs along shaft drive axis to polarized accurate piezoelectric actuator application
Encourage the deformation after voltage and output movement schematic diagram；
Fig. 7 is accurate piezoelectric actuator three-dimensional knot of the piezoelectric ceramics with two layers of actuating unit along driver radial polarised
Structure schematic diagram；
Fig. 8 is the three-dimensional structure of piezoelectric ceramics one layer of actuating unit along the accurate piezoelectric actuator of driver radial polarised
Schematic diagram；
Fig. 9 is piezoelectric ceramics along the accurate piezoelectric actuator of driver radial polarised in one layer of actuating unit, piezoelectricity pottery
Shape, polarization mode and the arrangement schematic diagram of positive polarized piezoelectric ceramics group and negative sense polarized piezoelectric ceramics group in porcelain；
Figure 10 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along the accurate piezoelectric actuator of driver radial polarised
The shape and arrangement schematic diagram of pole piece；
Figure 11 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along the accurate piezoelectric actuator of driver radial polarised
The driving voltage schematic diagram applied on pole piece；
Figure 12 is that the piezoelectric ceramics with two layers of actuating unit applies along the accurate piezoelectric actuator of driver radial polarised
Deformation after driving voltage and output movement schematic diagram；
Figure 13 is a kind of manufacture craft stream of the accurate piezoelectric actuator of process for machining after first being polarized using piezoelectric ceramics
Journey；
Figure 14 is a kind of manufacture craft stream for the accurate piezoelectric actuator that after-polarization technique is first machined using piezoelectric ceramics
Journey；
Figure 15 is a kind of fabrication processing using the accurate piezoelectric actuator of piezoelectric ceramics straight forming technique；
Figure 16 is a kind of fabrication processing for the accurate piezoelectric actuator that after-polarization technique is first assembled using piezoelectric ceramics；
Figure 17 is a kind of making work of the accurate piezoelectric actuator using final driver straight forming and then polarization process
Skill flow.
Specific implementation mode
Technical solution in the embodiment of the present invention that following will be combined with the drawings in the embodiments of the present invention carries out clear, complete
Ground describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Specific implementation mode one：With reference to the accompanying drawings of the specification 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6 do present embodiment
Further details of explanation.Present embodiments provide for a kind of piezoelectric ceramics to use shearing work mould along shaft drive axis to polarized
The twist mode precision piezoelectric actuator of formula, its appearance are circular ring shape；The driver includes two layers of axially disposed actuating
Unit 1, every layer of actuating unit 1 include 16 piezoelectric ceramics 2 and 16 powered electrode pieces 3；The cross section of the piezoelectric ceramics 2
For fan annular；The piezoelectric ceramics 2 includes the polarized first piezoelectric ceramics 2-1 of 8 forward directions and polarized second piezoelectricity of 8 negative senses
Ceramic 2-2, their polarization direction are opposite along the axis direction and polarization direction of driver.
The piezoelectric ceramics 2 and powered electrode piece 3 are circumferentially disposed in every layer of actuating unit 1.The driver
Two bottom surfaces up and down be respectively drive surface and stationary plane, with other parts or the connection type of mechanical interface can be it is Nian Jie,
The connection types such as mechanical connection.Described two adjacent polarized second pressures of the polarized first piezoelectric ceramics 2-1 of forward direction and negative sense
Powered electrode piece 3 is equipped between electroceramics 2-2.Two adjacent 2 polarization directions of piezoelectric ceramics are opposite.It is described two neighboring
Apply opposite polarity driving voltage on powered electrode piece 3.The piezoelectric ceramics 2 along actuator axis direction polarization, application
Driving voltage generate electric field approximately along driver circumferencial direction, therefore the piezoelectric ceramics 2 using shearing work pattern become
Shape.In actual operation, apply corresponding driving voltage on the powered electrode piece 3, the piezoelectric ceramics 2 is in driving voltage
Electric field action under generate approximately along circumferential shear-deformable of driver, according to the piezoelectric ceramics polarization direction of design and excitation electricity
The polarity arrangement of pressure, all piezoelectric ceramics are deformed all along same circumferencial direction, are limited according to the driver shape and structure of design
System, two bottom surfaces up and down of driver generate opposite angular deflection, and certain rotary motion is exported to realize.The piezoelectricity
The shear deformation of ceramics 2 is related with the size of the driving voltage of application and the two accurately corresponds to, therefore the driver can be with
Realize accurately angle positioning and rotary motion output.The driver can be designed to that multilayer actuating unit 1 is connected in an axial direction
Form, thus by the angular displacement of each layer of actuating unit be overlapped mutually realize rotary motion stroke amplification export, such as Fig. 6 institutes
Show, arrow direction indicates the direction of motion, the driving voltage pole that the direction of motion can apply by changing powered electrode on piece in figure
It sexually revises.
Specific implementation mode two：With reference to the accompanying drawings of the specification 7, Fig. 8, Fig. 9, Figure 10, Figure 11, Figure 12 are to present embodiment
It is further described in detail.Similar to specific implementation mode one, present embodiments provide for a kind of piezoelectric ceramics along driver
The twist mode precision piezoelectric actuator using shearing work pattern of radial polarised, its appearance are circular ring shape；The driver
Including two layers of radially arranged actuating unit 1, every layer of actuating unit 1 includes 16 piezoelectric ceramics 2 and 16 powered electrode pieces
3；The cross section of the piezoelectric ceramics 2 is fan annular；The piezoelectric ceramics 2 includes polarized first piezoelectric ceramics of 8 forward directions
The polarized second piezoelectric ceramics 2-2 of 2-1 and 8 negative sense, radial direction and polarization direction of their polarization direction along driver
On the contrary.
The piezoelectric ceramics 2 and powered electrode piece 3 are circumferentially disposed in every layer of actuating unit 1.The driver
Inside and outside two cylinders be respectively stationary plane and drive surface, with other parts or the connection type of mechanical interface can be it is Nian Jie,
The connection types such as mechanical connection.Described two adjacent polarized second pressures of the polarized first piezoelectric ceramics 2-1 of forward direction and negative sense
Powered electrode piece 3 is equipped between electroceramics 2-2.Two adjacent 2 polarization directions of piezoelectric ceramics are opposite.It is described two neighboring
Apply opposite polarity driving voltage on powered electrode piece 3.The piezoelectric ceramics 2 polarizes along driver radial direction, application
Driving voltage generate electric field approximately along driver circumferencial direction, therefore the piezoelectric ceramics 2 using shearing work pattern become
Shape.In actual operation, apply corresponding driving voltage on the powered electrode piece 3, the piezoelectric ceramics 2 is in driving voltage
Electric field action under generate approximately along circumferential shear-deformable of driver, according to the piezoelectric ceramics polarization direction of design and excitation electricity
The polarity arrangement of pressure, all piezoelectric ceramics are deformed all along same circumferencial direction, are limited according to the driver shape and structure of design
System, inside and outside two cylinders of driver generate opposite angular deflection, and certain rotary motion is exported to realize.The piezoelectricity
The shear deformation of ceramics 2 is related with the size of the driving voltage of application and the two accurately corresponds to, therefore the driver can be with
Realize accurately angle positioning and rotary motion output.The driver can radially be designed to that multilayer actuating unit 1 is connected
Form, thus by the angular displacement of each layer of actuating unit be overlapped mutually realize rotary motion stroke amplification export, such as Figure 12
Shown, arrow direction indicates the direction of motion, the driving voltage that the direction of motion can apply by changing powered electrode on piece in figure
Reversing.
The twist mode precision piezoelectric actuator using shearing work pattern of described two structures, in the two neighboring logical of it
Apply opposite polarity driving voltage on electric electrode slice, driver output corner is proportional to driving voltage is applied, specific manifestation
For：Driving voltage is higher, and driver output corner is bigger, and the waveform of driving voltage is different, and the dynamic of driver output movement is special
Property is also different.The piezoelectric actuator utilizes the inverse piezoelectric effect of part piezoelectric ceramics 2 to realize the same of driving effect after powered up
When, the charge that the direct piezoelectric effect of one of them or several piezoelectric ceramics 2 generates can be utilized to realize that measurement is acted on sensing, it is real
The information such as existing drive location, speed, acceleration from sensing function, make driver applications in intelligent device field.
The present invention is driven using the inverse piezoelectric effect of piezoelectric ceramics, by applying suitable voltage drive piezoelectric ceramics
Shearing work pattern, make piezoelectric actuator around own axes generate and the proportional torsional deflection of driving voltage, to realize
Accurately rotary motion exports.Actuator body in the present invention only includes that piezoelectric ceramics and powered electrode piece, structure are very simple
Single, by applying suitable driving voltage, driver can export certain corner, easy to operate, and movement is accurate.
Specific implementation mode three：13 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of the twist mode precision piezoelectric actuator using shearing work pattern.This implementation
Mode include mainly piezoelectric ceramics 2 molding and sintering, the polarization of piezoelectric ceramics 2, the machining of piezoelectric ceramics 2 and top electrode,
And piezoelectric ceramics 2 and powered electrode piece 3 are assembled into the process of one layer of actuating unit 1 of driver.
The molding and sintering of the piezoelectric ceramics 2, according to the difference of process equipment, may include dispensing, mixing, pre-burning,
The processes such as crushing, molding, dumping, sintering, its object is to the embryo materials of piezoelectric ceramics needed for the ceramic structure of construction of stable, formation
For subsequent polarization and processing.The polarization of the piezoelectric ceramics 2 is needed according to its technological requirement under corresponding polarization condition
It carries out, can specifically include the various ways such as oil bath polarization, air polarization, air high-temperature poling.The machine of the piezoelectric ceramics 2 adds
Work and top electrode can select a variety of processing methods according to process equipment condition, and its object is to form final required piezoelectricity
Ceramic shape is for finally assembling.The assembly of the actuating unit 1, including powered electrode piece 3 processing and piezoelectricity is made pottery
For porcelain 2 with powered electrode piece 3 according to the Standard of design, specific assembly method includes a variety of methods such as bonding, mechanical connection,
It can be reasonably selected according to practical application and assembled condition.The piezoelectric actuator can be linked and packed by multilayer actuating unit 1
It forms, the stroke range that the specific number of plies can be according to actual needs determines.The fabrication processing of the piezoelectric actuator is more
Flexibly, different processing conditions and requirement can be adapted to by slightly adjusting.
Specific implementation mode four：14 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of the twist mode precision piezoelectric actuator using shearing work pattern.This implementation
Mode include mainly piezoelectric ceramics 2 molding and sintering, the machining of piezoelectric ceramics 2, the polarization of piezoelectric ceramics 2 and top electrode,
And piezoelectric ceramics 2 and powered electrode piece 3 are assembled into the process of one layer of actuating unit 1 of driver.
The molding and sintering of the piezoelectric ceramics 2, and it is essentially identical described in specific implementation mode three.The difference is that
The fabrication processing of piezoelectric ceramics 2 is first to polarize to machine afterwards, and piezoelectricity is made pottery in present embodiment in specific implementation mode three
First machining may be used in porcelain, and then polarized production order, the two can be wanted according to the precision of piezoelectric ceramics geomery again
It asks, process equipment situation and polarization condition etc. are selected.It is similar with specific implementation mode three, it is activated in present embodiment
Unit 1 be also be assembled by piezoelectric ceramics 2 and powered electrode piece 3, piezoelectric actuator can by multilayer actuating unit 1 connect and
At manufacture craft can be adjusted flexibly.
Specific implementation mode five：15 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of the twist mode precision piezoelectric actuator using shearing work pattern.This implementation
Mode mainly and with sintering, the polarization of piezoelectric ceramics 2 and top electrode and by piezoelectric ceramics 2 lead to by the molding including piezoelectric ceramics 2
Electric electrode slice 3 is assembled into the process of one layer of actuating unit 1 of driver.
Present embodiment and specific implementation mode three and specific implementation mode four the difference is that, described in present embodiment
Piezoelectric ceramics 2 just directly makes final required shape during molding is with sintering, and this manufacture craft is to piezoelectric ceramics
Molding and sintering technology it is more demanding, but be the reduction of technical process, advantageously reduce cost, be suitable for producing in enormous quantities.
The polarization of piezoelectric ceramics 2 in present embodiment and the assembly of top electrode and driver are with specific implementation mode three and specifically real
The process applied in mode four is similar.Final piezoelectric actuator can also be connected by multilayer actuating unit 1 and be formed, and manufacture craft can
It is adjusted with making situation according to actual processing, there is certain flexibility.
Specific implementation mode six：16 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of the twist mode precision piezoelectric actuator using shearing work pattern.This implementation
Mode mainly includes molding, sintering and the top electrode of piezoelectric ceramics 2, the assembly of driver, and the piezoelectric ceramics to having assembled
Polarized process.
Different from specific implementation mode three, specific implementation mode four, specific implementation mode five, present embodiment, which uses, first will
Piezoelectric ceramics 2 and powered electrode piece 3 are assembled into required driver shape and then carry out polarized technological process to piezoelectric ceramics again.
This production method is more demanding to the polarization condition of piezoelectric ceramics, but more compact between similar technological process, efficiency
It improves, is suitable for producing in enormous quantities.The molding, sintering of piezoelectric ceramics 2, top electrode, polarization and driver in present embodiment
Assembling process it is similar to specific implementation mode three, specific implementation mode four and specific implementation mode five.Final piezoelectricity drives
Dynamic device can also be connected by multilayer actuating unit 1 and be formed, and manufacture craft can make situation according to actual processing and be adjusted.
Specific implementation mode seven：17 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of the twist mode precision piezoelectric actuator using shearing work pattern.This implementation
Mode includes mainly molding, sintering and the top electrode of driver and the polarization process of piezoelectric ceramics 2 in driver.
Similar to specific implementation mode six, present embodiment is also first to make final driver shape then again to make pottery to piezoelectricity
Porcelain 2 polarizes, but different, be first fabricated in specific implementation mode six piezoelectric ceramics 2 shape then by its with
Powered electrode piece 3 is assembled to form final driver shape, and in present embodiment is the electricity that will directly be powered before sintering process
Pole piece 3 is embedded into piezoelectric ceramics 2, then integral sintered at final piezoelectric actuator shape, eliminates the process of assembly.This stream
Journey is more demanding to the molding of piezoelectric ceramics and polarization process, but is the reduction of the manufacture craft process of driver, is also easier to
The shape and size precision for ensureing final driver makes cost reduction, precision improve, is more suitable for mass producing.This implementation
Concrete technology method in mode is similar to previous embodiment.Final piezoelectric actuator can also be activated single by multilayer
1 connection of member is formed, and can be adjusted to this flow according to processing conditions, performance indicator etc. in actual production.
Fabrication processing in the present invention includes processing and polarization, the processing of electrode slice and driver of piezoelectric ceramics
Assembly, technological process simple and flexible, according to different application scenarios and performance indicator requirement, a variety of processing methods can be by
Different sequence combinations, making full use of for equipment easy to process are advantageously implemented large-scale mass production, are somebody's turn to do to reach to reduce
The purpose of driver cost.The present invention integrally have many characteristics, such as simple in structure, the operation is stable and it is simple for process flexibly.
The twist mode precision piezoelectric actuator and its fabrication processing of shearing work pattern are used in the present invention, it is proposed that
It is a kind of to export the piezoelectric actuator of precision rotation movement, and specific planning is made that its fabrication processing, have
Good application prospect.The present invention is compared to existing rotary-type accurate piezoelectric actuator, structure very simple, no transmission and transformation
Device, scalability is strong, and control method is simple, low to operating environment requirements, and structure design and size design are flexible, can apply
In the workplace of a variety of demand fine angles positioning.The fabrication processing of the present invention is simple and efficient, and precision is higher, convenient for real
Existing large-scale mass production, can be relatively low by cost control, by the combination of a variety of processing methods and processing sequence, may be implemented
The requirement of different application occasion and performance indicator greatly extends the application range of the precision piezoelectric actuator, for broadening
The development of the application field and promotion piezoelectric driving technology of piezoelectric actuator has far-reaching influence.
Above to a kind of twist mode precision piezoelectric actuator and its system using shearing work pattern provided by the present invention
To make method, is described in detail, principle and implementation of the present invention are described for specific case used herein,
The explanation of above example is only intended to facilitate the understanding of the method and its core concept of the invention；Meanwhile for the one of this field
As technical staff, according to the thought of the present invention, there will be changes in the specific implementation manner and application range, to sum up institute
It states, the content of the present specification should not be construed as limiting the invention.
Claims (6)
1. a kind of twist mode precision piezoelectric actuator using shearing work pattern, which is characterized in that its shape is cylinder
Or circular ring shape；It is cylindrical or circular ring shape actuating unit (1) that the driver, which includes m layers of shape, and m layers of actuating unit (1)
Using the whole driver that is composed of a fixed connection by the way of the folded spelling in actuator axis direction；Every layer of actuating unit (1) include
The piezoelectric ceramics (2) and 2n powered electrode piece (3) that 2n shape is fan-shaped or fan is annular, wherein m are the integer more than 0, and n is
Integer more than 1；2n piezoelectric ceramics (2) in every layer of actuating unit (1) is circumferentially uniformly distributed along driver and two neighboring
A powered electrode piece (3) is fixed between piezoelectric ceramics (2)；2n piezoelectric ceramics in every layer of actuating unit (1)
(2) include n negative along actuator axis direction along positive polarized first piezoelectric ceramics (2-1) in actuator axis direction and n
To polarized second piezoelectric ceramics (2-2), and n positive polarized first piezoelectric ceramics (2-1) and n negative sense polarized second
Piezoelectric ceramics (2-2) is alternately arranged.
2. driver according to claim 1, which is characterized in that applied on the powered electrode piece (3) of the piezoelectric actuator
After adding driving voltage, the electric field vertical with polarization direction is generated in piezoelectric ceramics (2), to which the shearing along driver circumferential direction occur
Two bottom surfaces up and down of deformation, driver generate the relative angle deflection proportional to driving voltage, and then realize rotation fortune
Dynamic output.
3. a kind of twist mode precision piezoelectric actuator using shearing work pattern, which is characterized in that its shape is cylinder
Or circular ring shape；It is cylindrical or circular ring shape actuating unit (1) that the driver, which includes m layers of shape, and m layers of actuating unit (1)
Using the whole driver that is composed of a fixed connection by the way of the folded spelling in driver radial line direction；Every layer of actuating unit (1) include
The piezoelectric ceramics (2) and 2n powered electrode piece (3) that 2n shape is fan-shaped or fan is annular, wherein m are the integer more than 0, and n is
Integer more than 1；2n piezoelectric ceramics (2) in every layer of actuating unit (1) is circumferentially uniformly distributed along driver and two neighboring
A powered electrode piece (3) is fixed between piezoelectric ceramics (2)；2n piezoelectric ceramics in every layer of actuating unit (1)
(2) include n negative along driver radial line direction along positive polarized first piezoelectric ceramics (2-1) in driver radial line direction and n
To polarized second piezoelectric ceramics (2-2), and n the first piezoelectric ceramics of positive polarization (2-1) and n negative sense polarized second are pressed
Electroceramics (2-2) is alternately arranged.
4. driver according to claim 3, which is characterized in that applied on the powered electrode piece (3) of the piezoelectric actuator
After adding driving voltage, the electric field vertical with polarization direction is generated in piezoelectric ceramics (2), to which the shearing along driver circumferential direction occur
Inside and outside two cylinders of deformation, driver generate the relative angle deflection proportional to driving voltage, and then realize rotation fortune
Dynamic output.
5. according to the driver described in any one of claim 1-4, which is characterized in that the piezoelectric actuator is two neighboring logical
Apply opposite polarity driving voltage on electric electrode slice (3), driver output corner is proportional to driving voltage is applied, specific table
It is now：Driving voltage is higher, and driver output corner is bigger, and the waveform of driving voltage is different, the dynamic of driver output movement
Characteristic is also different.
6. the system of the twist mode precision piezoelectric actuator according to any one of claims 1-5 using shearing work pattern
Make method, which is characterized in that the production method execution sequence is molding and sintering, the piezoelectric ceramics (2) of piezoelectric ceramics (2)
Polarization, the machining of piezoelectric ceramics (2) and top electrode and piezoelectric ceramics (2) is assembled into driver with powered electrode piece (3)
One layer of actuating unit (1) process；Or the molding of piezoelectric ceramics (2) is made pottery with sintering, the machining of piezoelectric ceramics (2), piezoelectricity
One layer of actuating that the polarization of porcelain (2) is assembled into driver with top electrode and by piezoelectric ceramics (2) and powered electrode piece (3) is single
The process of first (1)；Or the molding of piezoelectric ceramics (2) is made pottery with sintering, the polarization of piezoelectric ceramics (2) and top electrode and by piezoelectricity
Porcelain (2) is assembled into the process of one layer of actuating unit (1) of driver with powered electrode piece (3)；Or piezoelectric ceramics (2) molding,
Sintering and top electrode, the assembly of driver and the piezoelectric ceramics to having assembled (2) polarized process；Or driver molding,
The polarization process of sintering and piezoelectric ceramics (2) in top electrode and driver.
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| CN111614817A (en) * | 2020-05-27 | 2020-09-01 | 维沃移动通信有限公司 | Electronic device |
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