CN108494286B - Using the twist mode precision piezoelectric actuator and preparation method thereof of shearing work mode - Google Patents
Using the twist mode precision piezoelectric actuator and preparation method thereof of shearing work mode Download PDFInfo
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- 238000010008 shearing Methods 0.000 title claims abstract description 26
- 238000002360 preparation method Methods 0.000 title abstract description 5
- 239000000919 ceramic Substances 0.000 claims abstract description 158
- 238000000034 method Methods 0.000 claims abstract description 50
- 230000010287 polarization Effects 0.000 claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 claims abstract description 38
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- 230000033001 locomotion Effects 0.000 claims description 26
- 238000000465 moulding Methods 0.000 claims description 22
- 238000005245 sintering Methods 0.000 claims description 22
- 238000003754 machining Methods 0.000 claims description 9
- 229910052573 porcelain Inorganic materials 0.000 claims description 9
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
Abstract
The invention proposes a kind of twist mode precision piezoelectric actuators and preparation method thereof using shearing work mode, belong to Piezoelectric Driving field.The problems such as solving existing rotary-type accurate piezoelectric actuator structure is complicated, higher cost and production are cumbersome.Driver is cylindrical or circular ring shape, is made of piezoelectric ceramics and powered electrode piece, the polarization direction of the piezoelectric ceramics can be divided into along shaft drive axis to two kinds of radial polarised, piezoelectric ceramics can be divided into positive polarization and negative sense polarized piezoelectric ceramics group again in each case.After powered electrode piece applies driving voltage, piezoelectric ceramics generation is shear-deformable, can export accurately angular displacement by structure design and appropriate connection.The fabrication processing of driver includes the production of piezoelectric ceramics and powered electrode piece and the assembly of driver, and process flow can be adjusted flexibly according to application, processing conditions and performance indicator etc., convenient for batch production.
Description
Technical field
The invention belongs to piezoelectric driving technology fields, accurate more particularly to a kind of twist mode using shearing work mode
Piezoelectric actuator and preparation method thereof.
Background technique
Along with precision and ultra-precision machining, precision optics, microelectronics, Life Science and Technology, accurate measurement, intelligent device
The fast development in the fields such as part requires also higher and higher, each research institution for the actuation techniques of micro-nano rank positioning accuracy
Also the field is had made extensive and intensive studies.In these fields, traditional electromagnetic machine is difficult to meet harsh performance
Index request, and piezoelectric actuator is with structure is simple, small in size, precision is high, response is fast, power output is big, low energy consumption, electromechanical transformation
Coefficient is big, does not show up prominently by a variety of advantages such as electromagnetic interference, therefore in numerous driving methods, become research hotspot it
One.
The development of material science and the progress for fabricating technology promote the various piezoelectric actuators haveing excellent performance to gush in succession
It is existing.Make a general survey of existing research achievement, most of precision piezoelectric actuator is all linear movement output, wherein using the most universal and
Mature is exactly piezoelectric stack driving, but in many application fields accurately angle position be there is an urgent need to.It is existing
The accurate piezoelectric actuator majority that can export rotary motion to use certain mapping device, it is multiple thus to bring structure
The shortcomings that miscellaneous, increased costs and precision reduce, therefore propose a kind of precision that can export rotary motion simple and compact for structure
Piezoelectric driving device and its processing technology thereof being simple and efficient have a very important significance.
Summary of the invention
Existing rotary-type accurate piezoelectric actuator type is single, structure is complicated, higher cost, essence in order to solve by the present invention
Degree is insufficient and the cumbersome technical problem of manufacture craft, proposes a kind of twist mode precision piezoelectric actuator using shearing work mode
And preparation method thereof.
The purpose of the present invention is achieved through the following technical solutions: a kind of twist mode precision piezoelectricity using shearing work mode
Driver, its shape are cylindrical or circular ring shape；The driver includes that m layers of shape are cylindrical or circular ring shape actuating list
Member 1, and m layers of actuating unit 1 are using the whole driver that is composed of a fixed connection by the way of the folded spelling in actuator axis direction；Every layer institute
It is fan-shaped or the piezoelectric ceramics 2 and 2n powered electrode piece 3 of fan annular that state actuating unit 1, which include 2n shape, wherein m for greater than
0 integer, n are the integer greater than 1；2n piezoelectric ceramics 2 in every layer of actuating unit 1 is circumferentially uniformly distributed along driver, and
A powered electrode piece 3 is fixed between two neighboring piezoelectric ceramics 2；2n piezoelectricity pottery in every layer of actuating unit 1
Porcelain 2 includes n a along actuator axis direction negative sense along actuator axis direction positive polarized first piezoelectric ceramics 2-1 and n
Polarized second piezoelectric ceramics 2-2, and the n polarized first piezoelectric ceramics 2-1 of forward direction and the polarized second piezoelectricity pottery of n negative sense
Porcelain 2-2 is alternately arranged.
Further, it after applying driving voltage on the powered electrode piece 3 of the piezoelectric actuator, is generated in piezoelectric ceramics 2
The electric field vertical with polarization direction, so that shear-deformable, the up and down two bottom surfaces generation of driver circumferential along driver occur
The relative angle deflection proportional to driving voltage, and then realize the output of rotary motion.
The present invention also proposes a kind of twist mode precision piezoelectric actuator using shearing work mode, its shape is cylinder
Shape or circular ring shape；The driver includes that m layers of shape are cylindrical or circular ring shape actuating unit 1, and m layers of actuating unit 1 are adopted
It is composed of a fixed connection whole driver with along the folded mode spelled in driver radial line direction；Every layer of actuating unit 1 includes 2n
Shape is fan-shaped or the piezoelectric ceramics 2 and 2n powered electrode piece 3 of fan annular, and wherein m is the integer greater than 0, and n is greater than 1
Integer；2n piezoelectric ceramics 2 in every layer of actuating unit 1 is circumferentially uniformly distributed along driver, and two neighboring piezoelectric ceramics 2 it
Between be fixed with a powered electrode piece 3；2n piezoelectric ceramics 2 in every layer of actuating unit 1 includes n along driver diameter
Positive polarized first piezoelectric ceramics 2-1 and n of line direction is along the driver radial line direction polarized second piezoelectric ceramics 2- of negative sense
2, and n positive polarization the first piezoelectric ceramics 2-1 and polarized second piezoelectric ceramics 2-2 of n negative sense is alternately arranged.
Further, it after applying driving voltage on the powered electrode piece 3 of the piezoelectric actuator, is generated in piezoelectric ceramics 2
The electric field vertical with polarization direction, so that shear-deformable, the inside and outside two cylinder generation of driver circumferential along driver occur
The relative angle deflection proportional to driving voltage, and then realize the output of rotary motion.
Further, apply opposite polarity driving voltage on the two neighboring powered electrode piece 3 of the piezoelectric actuator, drive
Dynamic device output corner is proportional to driving voltage is applied, specific manifestation are as follows: and driving voltage is higher, and driver output corner is bigger,
The waveform of driving voltage is different, and the dynamic characteristic of driver output movement is also different.
The production method that the present invention also proposes a kind of twist mode precision piezoelectric actuator using shearing work mode, it is described
Production method execution sequence be piezoelectric ceramics 2 molding and sintering, the polarization of piezoelectric ceramics 2, the machining of piezoelectric ceramics 2 with it is upper
Electrode and piezoelectric ceramics 2 and powered electrode piece 3 are assembled into driver one layer of actuating unit 1 process；Or piezoelectric ceramics
2 molding is with sintering, the machining of piezoelectric ceramics 2, the polarization of piezoelectric ceramics 2 and top electrode and by piezoelectric ceramics 2 and is powered
Electrode slice 3 is assembled into the process of one layer of actuating unit 1 of driver；Or the molding of piezoelectric ceramics 2 and sintering, piezoelectric ceramics 2
Polarization is assembled into the process of one layer of actuating unit 1 of driver with top electrode and by piezoelectric ceramics 2 and powered electrode piece 3；Or
Molding, sintering and the top electrode of piezoelectric ceramics 2, the assembly of driver and to the polarized process of piezoelectric ceramics 2 assembled；
Or in molding, sintering and the top electrode and driver of driver piezoelectric ceramics 2 polarization process.
The beneficial effects of the present invention are: the present invention provides a kind of twist mode precision piezoelectricity using shearing work mode
Driver and its fabrication processing, driver are generated by designing reasonable structure using the shearing work mode of piezoelectric ceramics
Torsional deflection and then output accurately rotary motion.The present invention is by design multilayered structure, so that the microbit of every lamination electroceramics
Shifting is overlapped mutually to obtain the positioning of the fine angle of big stroke；The present invention is derived by the polarization direction of change piezoelectric ceramics
Axial torsion deformation and radial two kinds of structures of torsional deflection and working principle, different workplace and performance indicator are adapted to this
It is required that；The present invention can accurately control the size of angle displacement by adjusting the size of driving voltage, realize essence with this
Close angle positioning；The present invention passes through design piezoelectric ceramics, the manufacture craft of powered electrode piece and the assembly technology of driver,
So that the processing and fabricating simple and flexible of driver, is adapted to a variety of different applications, processing conditions and performance indicator and wants
It asks；In addition, the present invention can carry out structure optimization and the dimensionally-optimised micromation for accomplishing driver, Integration Design, have very
Big development space.During specific works and production, by designing reasonable connection and fixed form, driver can be made
Adapt to different structure and application；By controlling driving voltage, thus it is possible to vary the size of driver output displacement；By changing
Become the waveform of driving voltage, the different dynamical output of available driver, to obtain desired output campaign；Added by changing
The built-up sequence of each technique in work production process is adapted to small lot production and large-scale production, has considerable flexibility.
Therefore, the present invention has very wide answer in the processing and fabricating field of ultraprecise driving, positioning, processing and piezoelectric actuator
Use prospect.
Detailed description of the invention
Fig. 1 is the piezoelectric ceramics with two layers of actuating unit along shaft drive axis to polarized accurate piezoelectric actuator three-dimensional knot
Structure schematic diagram；
Fig. 2 is three-dimensional structure of the piezoelectric ceramics along shaft drive axis one layer of actuating unit into polarized accurate piezoelectric actuator
Schematic diagram；
Fig. 3 is piezoelectric ceramics along shaft drive axis into polarized accurate piezoelectric actuator in one layer of actuating unit, piezoelectricity pottery
Shape, polarization mode and the arrangement schematic diagram of positive polarized piezoelectric ceramics group and negative sense polarized piezoelectric ceramics group in porcelain；
Fig. 4 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along shaft drive axis into polarized accurate piezoelectric actuator
The shape and arrangement schematic diagram of pole piece；
Fig. 5 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along shaft drive axis into polarized accurate piezoelectric actuator
The driving voltage schematic diagram applied on pole piece；
Fig. 6 is that the piezoelectric ceramics with two layers of actuating unit swashs along shaft drive axis to polarized accurate piezoelectric actuator application
Deformation and output movement schematic diagram after encouraging voltage；
Fig. 7 is accurate piezoelectric actuator three-dimensional knot of the piezoelectric ceramics with two layers of actuating unit along driver radial polarised
Structure schematic diagram；
Fig. 8 is the three-dimensional structure of piezoelectric ceramics one layer of actuating unit along the accurate piezoelectric actuator of driver radial polarised
Schematic diagram；
Fig. 9 is piezoelectric ceramics along the accurate piezoelectric actuator of driver radial polarised in one layer of actuating unit, piezoelectricity pottery
Shape, polarization mode and the arrangement schematic diagram of positive polarized piezoelectric ceramics group and negative sense polarized piezoelectric ceramics group in porcelain；
Figure 10 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along the accurate piezoelectric actuator of driver radial polarised
The shape and arrangement schematic diagram of pole piece；
Figure 11 is that piezoelectric ceramics in one layer of actuating unit, is powered electric along the accurate piezoelectric actuator of driver radial polarised
The driving voltage schematic diagram applied on pole piece；
Figure 12 is that the piezoelectric ceramics with two layers of actuating unit applies along the accurate piezoelectric actuator of driver radial polarised
Deformation and output movement schematic diagram after driving voltage；
Figure 13 is a kind of manufacture craft stream of the accurate piezoelectric actuator of process for machining after first being polarized using piezoelectric ceramics
Journey；
Figure 14 is a kind of manufacture craft stream that the accurate piezoelectric actuator of after-polarization technique is first machined using piezoelectric ceramics
Journey；
Figure 15 is a kind of fabrication processing using the accurate piezoelectric actuator of piezoelectric ceramics straight forming technique；
Figure 16 is a kind of fabrication processing that the accurate piezoelectric actuator of after-polarization technique is first assembled using piezoelectric ceramics；
Figure 17 is a kind of production work of the accurate piezoelectric actuator using final driver straight forming and then polarization process
Skill process.
Specific embodiment
Technical solution in the embodiment of the present invention that following will be combined with the drawings in the embodiments of the present invention carries out clear, complete
Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Specific embodiment 1: with reference to the accompanying drawings of the specification 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6 do present embodiment
Further details of explanation.Present embodiments provide for a kind of piezoelectric ceramics to use shearing work mould to polarized along shaft drive axis
The twist mode precision piezoelectric actuator of formula, its appearance are circular ring shape；The driver includes two layers of axially disposed actuating
Unit 1, every layer of actuating unit 1 include 16 piezoelectric ceramics 2 and 16 powered electrode pieces 3；The cross section of the piezoelectric ceramics 2
For fan annular；The piezoelectric ceramics 2 includes the polarized first piezoelectric ceramics 2-1 of 8 forward directions and polarized second piezoelectricity of 8 negative senses
Ceramic 2-2, their polarization direction are opposite along the axis direction and polarization direction of driver.
The piezoelectric ceramics 2 and powered electrode piece 3 are circumferentially disposed in every layer of actuating unit 1.The driver
Two bottom surfaces up and down be respectively drive surface and stationary plane, with other parts or the connection type of mechanical interface can for it is Nian Jie,
The connection types such as mechanical connection.Described two adjacent polarized second pressures of the polarized first piezoelectric ceramics 2-1 of forward direction and negative sense
Powered electrode piece 3 is equipped between electroceramics 2-2.Two adjacent 2 polarization directions of piezoelectric ceramics are opposite.It is described two neighboring
Apply opposite polarity driving voltage on powered electrode piece 3.The piezoelectric ceramics 2 along actuator axis direction polarization, application
Driving voltage generate electric field approximately along driver circumferencial direction, therefore the piezoelectric ceramics 2 using shearing work mode become
Shape.In actual operation, apply corresponding driving voltage on the powered electrode piece 3, the piezoelectric ceramics 2 is in driving voltage
Electric field action under generate approximately along circumferential shear-deformable of driver, according to the piezoelectric ceramics polarization direction of design and excitation electricity
The polarity arrangement of pressure, all piezoelectric ceramics are deformed all along same circumferencial direction, are limited according to the driver shape and structure of design
System, two bottom surfaces up and down of driver generate opposite angular deflection, export certain rotary motion to realize.The piezoelectricity
The shear deformation of ceramics 2 is related with the size of the driving voltage of application and the two is accurately corresponding, therefore the driver can be with
Realize accurately angle positioning and rotary motion output.The driver can be designed to that multilayer actuating unit 1 is connected along axial
Form, thus by the angular displacement of each layer of actuating unit be overlapped mutually realize rotary motion stroke amplification export, such as Fig. 6 institute
Show, arrow direction indicates the direction of motion, the driving voltage pole that the direction of motion can apply by changing powered electrode on piece in figure
It sexually revises.
Specific embodiment 2: with reference to the accompanying drawings of the specification 7, Fig. 8, Fig. 9, Figure 10, Figure 11, Figure 12 be to present embodiment
It is further described in detail.Similar to specific embodiment one, present embodiments provide for a kind of piezoelectric ceramics along driver
The twist mode precision piezoelectric actuator using shearing work mode of radial polarised, its appearance are circular ring shape；The driver
Including two layers of radially arranged actuating unit 1, every layer of actuating unit 1 includes 16 piezoelectric ceramics 2 and 16 powered electrode pieces
3；The cross section of the piezoelectric ceramics 2 is fan annular；The piezoelectric ceramics 2 includes polarized first piezoelectric ceramics of 8 forward directions
The polarized second piezoelectric ceramics 2-2 of 2-1 and 8 negative sense, the radial direction and polarization direction of their polarization direction along driver
On the contrary.
The piezoelectric ceramics 2 and powered electrode piece 3 are circumferentially disposed in every layer of actuating unit 1.The driver
Inside and outside two cylinders be respectively stationary plane and drive surface, with other parts or the connection type of mechanical interface can for it is Nian Jie,
The connection types such as mechanical connection.Described two adjacent polarized second pressures of the polarized first piezoelectric ceramics 2-1 of forward direction and negative sense
Powered electrode piece 3 is equipped between electroceramics 2-2.Two adjacent 2 polarization directions of piezoelectric ceramics are opposite.It is described two neighboring
Apply opposite polarity driving voltage on powered electrode piece 3.The piezoelectric ceramics 2 polarizes along driver radial direction, application
Driving voltage generate electric field approximately along driver circumferencial direction, therefore the piezoelectric ceramics 2 using shearing work mode become
Shape.In actual operation, apply corresponding driving voltage on the powered electrode piece 3, the piezoelectric ceramics 2 is in driving voltage
Electric field action under generate approximately along circumferential shear-deformable of driver, according to the piezoelectric ceramics polarization direction of design and excitation electricity
The polarity arrangement of pressure, all piezoelectric ceramics are deformed all along same circumferencial direction, are limited according to the driver shape and structure of design
System, inside and outside two cylinders of driver generate opposite angular deflection, export certain rotary motion to realize.The piezoelectricity
The shear deformation of ceramics 2 is related with the size of the driving voltage of application and the two is accurately corresponding, therefore the driver can be with
Realize accurately angle positioning and rotary motion output.The driver can radially be designed to that multilayer actuating unit 1 is connected
Form, thus by the angular displacement of each layer of actuating unit be overlapped mutually realize rotary motion stroke amplification export, such as Figure 12
Shown, arrow direction indicates the direction of motion, the driving voltage that the direction of motion can apply by changing powered electrode on piece in figure
Reversing.
The twist mode precision piezoelectric actuator using shearing work mode of described two structures, in the two neighboring logical of it
Apply opposite polarity driving voltage on electric electrode slice, driver output corner is proportional to driving voltage is applied, specific manifestation
Are as follows: driving voltage is higher, and driver output corner is bigger, and the waveform of driving voltage is different, and the dynamic of driver output movement is special
Property is also different.The piezoelectric actuator utilizes the inverse piezoelectric effect of part piezoelectric ceramics 2 to realize the same of driving effect after powered up
When, it can use the charge that the direct piezoelectric effect of one of them or several piezoelectric ceramics 2 generates and realize that measurement is acted on sensing, it is real
The information such as existing drive location, speed, acceleration from sensing function, make driver applications in intelligent device field.
The present invention is driven using the inverse piezoelectric effect of piezoelectric ceramics, by applying suitable voltage drive piezoelectric ceramics
Shearing work mode, make piezoelectric actuator around own axes generate and the proportional torsional deflection of driving voltage, to realize
Accurately rotary motion exports.Actuator body in the present invention only includes piezoelectric ceramics and powered electrode piece, and structure is very simple
Single, by applying suitable driving voltage, driver can export certain corner, easy to operate, and movement is accurate.
Specific embodiment 3: 13 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of twist mode precision piezoelectric actuator using shearing work mode.This implementation
Mode mainly include piezoelectric ceramics 2 molding and sintering, the polarization of piezoelectric ceramics 2, the machining of piezoelectric ceramics 2 and top electrode,
And piezoelectric ceramics 2 and powered electrode piece 3 are assembled into the process of one layer of actuating unit 1 of driver.
The molding and sintering of the piezoelectric ceramics 2, according to the difference of process equipment, may include ingredient, mixing, pre-burning,
The processes such as crushing, molding, dumping, sintering, its object is to the embryo materials of piezoelectric ceramics needed for the ceramic structure of construction of stable, formation
For subsequent polarization and processing.The polarization of the piezoelectric ceramics 2 needs to be required under corresponding polarization condition according to its technique
It carries out, can specifically include the various ways such as oil bath polarization, air polarization, air high-temperature poling.The machine of the piezoelectric ceramics 2 adds
Work and top electrode can select a variety of processing methods according to process equipment condition, and its object is to form final required piezoelectricity
Ceramic shape is for finally assembling.The assembly of the actuating unit 1, processing including powered electrode piece 3 and makes pottery piezoelectricity
According to the Standard of design, specific assembly method includes a variety of methods such as bonding, mechanical connection for porcelain 2 and powered electrode piece 3,
It can be reasonably selected according to practical application and assembled condition.The piezoelectric actuator can be linked and packed by multilayer actuating unit 1
Form, the specific number of plies can stroke range according to actual needs determine.The fabrication processing of the piezoelectric actuator is more
Flexibly, different processing conditions and requirement can be adapted to by slightly adjusting.
Specific embodiment 4: 14 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of twist mode precision piezoelectric actuator using shearing work mode.This implementation
Mode mainly include piezoelectric ceramics 2 molding and sintering, the machining of piezoelectric ceramics 2, the polarization of piezoelectric ceramics 2 and top electrode,
And piezoelectric ceramics 2 and powered electrode piece 3 are assembled into the process of one layer of actuating unit 1 of driver.
The molding and sintering of the piezoelectric ceramics 2, and it is essentially identical described in specific embodiment three.The difference is that
The fabrication processing of piezoelectric ceramics 2 is first to polarize to machine afterwards, and piezoelectricity is made pottery in present embodiment in specific embodiment three
Porcelain can then polarized production order, the two can be wanted according to the precision of piezoelectric ceramics geomery again using first machining
It asks, process equipment situation and polarization condition etc. are selected.It is similar with specific embodiment three, it is activated in present embodiment
Unit 1 be also be assembled by piezoelectric ceramics 2 and powered electrode piece 3, piezoelectric actuator can by multilayer actuating unit 1 connect and
At manufacture craft can be adjusted flexibly.
Specific embodiment 5: 15 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of twist mode precision piezoelectric actuator using shearing work mode.This implementation
Mode mainly include piezoelectric ceramics 2 molding and sintering, the polarization of piezoelectric ceramics 2 and top electrode and by piezoelectric ceramics 2 with lead to
Electric electrode slice 3 is assembled into the process of one layer of actuating unit 1 of driver.
Present embodiment and specific embodiment three and specific embodiment four the difference is that, described in present embodiment
Piezoelectric ceramics 2 is just directly made into final required shape during molding is with sintering, and this manufacture craft is to piezoelectric ceramics
Molding and sintering technology it is more demanding, but be the reduction of technical process, advantageously reduce cost, be suitable for producing in enormous quantities.
The assembly of the polarization of piezoelectric ceramics 2 in present embodiment and top electrode and driver is real with specific embodiment three and specifically
The process applied in mode four is similar.Final piezoelectric actuator can also be connected by multilayer actuating unit 1 and be formed, and manufacture craft can
It is adjusted with making situation according to actual processing, there is certain flexibility.
Specific embodiment 6: 16 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of twist mode precision piezoelectric actuator using shearing work mode.This implementation
Mode mainly includes the molding, sintering and top electrode of piezoelectric ceramics 2, the assembly of driver, and to the piezoelectric ceramics assembled
Polarized process.
Different from specific embodiment three, specific embodiment four, specific embodiment five, present embodiment, which uses, first will
Piezoelectric ceramics 2 and powered electrode piece 3 are assembled into required driver shape and then carry out polarized process flow to piezoelectric ceramics again.
This production method is more demanding to the polarization condition of piezoelectric ceramics, but more compact between similar process flow, efficiency
It improves, is suitable for producing in enormous quantities.The molding, sintering of piezoelectric ceramics 2, top electrode, polarization and driver in present embodiment
Assembling process it is similar to specific embodiment three, specific embodiment four and specific embodiment five.Final piezoelectricity drives
Dynamic device can also be connected by multilayer actuating unit 1 and be formed, and manufacture craft can make situation according to actual processing and be adjusted.
Specific embodiment 7: 17 pairs of present embodiments are further described in detail with reference to the accompanying drawings of the specification.This
Embodiment provides a kind of fabrication processing of twist mode precision piezoelectric actuator using shearing work mode.This implementation
Mode mainly includes the polarization process of piezoelectric ceramics 2 in molding, sintering and the top electrode and driver of driver.
Similar to specific embodiment six, present embodiment is also first to make final driver shape then again to make pottery to piezoelectricity
Porcelain 2 polarizes, but different, be first fabricated in specific embodiment six piezoelectric ceramics 2 shape then by its with
Powered electrode piece 3 is assembled to form final driver shape, and in present embodiment is the electricity that will directly be powered before sintering process
Pole piece 3 is embedded into piezoelectric ceramics 2, then integral sintered at final piezoelectric actuator shape, eliminates the process of assembly.This stream
Journey is more demanding to the molding of piezoelectric ceramics and polarization process, but is the reduction of the manufacturing process of driver, is also easier to
The shape and size precision for guaranteeing final driver reduces cost, precision raising, is more suitable for being mass produced.This implementation
Concrete technology method in mode is similar to previous embodiment.Final piezoelectric actuator can also be activated single by multilayer
1 connection of member is formed, and can be adjusted according to processing conditions, performance indicator etc. to this process in actual production.
Fabrication processing in the present invention includes processing and polarization, the processing of electrode slice and driver of piezoelectric ceramics
Assembly, process flow simple and flexible, according to different applications and performance indicator requirement, a variety of processing methods can be by
Different sequence combinations, making full use of for equipment easy to process are advantageously implemented large-scale serial production, so that reaching reduction should
The purpose of driver cost.The present invention integrally has many characteristics, such as that simple structure, the operation is stable and simple process are flexible.
The twist mode precision piezoelectric actuator and its fabrication processing that shearing work mode is used in the present invention, propose
A kind of piezoelectric actuator that can export precision rotation movement, and specific planning is made that its fabrication processing, have
Good application prospect.The present invention is compared to existing rotary-type accurate piezoelectric actuator, structure very simple, no transmission and transformation
Device, scalability is strong, and control method is simple, low to operating environment requirements, and structure design and size flexible design can be applied
In the workplace of a variety of demand fine angles positioning.Fabrication processing of the invention is simple and efficient, and precision is higher, convenient for real
Existing large-scale serial production, can be lower by cost control, by the combination of a variety of processing methods and processing sequence, may be implemented
The requirement of different application and performance indicator greatly extends the application range of the precision piezoelectric actuator, for broadening
The development of the application field and promotion piezoelectric driving technology of piezoelectric actuator has far-reaching influence.
Above to a kind of twist mode precision piezoelectric actuator and its system using shearing work mode provided by the present invention
Make method, is described in detail, it is used herein that a specific example illustrates the principle and implementation of the invention,
The above description of the embodiment is only used to help understand the method for the present invention and its core ideas；Meanwhile for the one of this field
As technical staff, according to the thought of the present invention, there will be changes in the specific implementation manner and application range, to sum up institute
It states, the contents of this specification are not to be construed as limiting the invention.
Claims (4)
1. a kind of twist mode precision piezoelectric actuator using shearing work mode, which is characterized in that its shape is cylinder
Or circular ring shape；It is cylindrical or circular ring shape actuating unit (1) that the driver, which includes m layers of shape, and m layers of actuating unit (1)
Using the whole driver that is composed of a fixed connection by the way of the folded spelling in actuator axis direction；Every layer of actuating unit (1) include
The piezoelectric ceramics (2) and 2n powered electrode piece (3) that 2n shape is fan-shaped or fan is annular, wherein m is the integer greater than 1, and n is
Integer greater than 1；2n piezoelectric ceramics (2) in every layer of actuating unit (1) is circumferentially uniformly distributed along driver and two neighboring
A powered electrode piece (3) is fixed between piezoelectric ceramics (2)；2n piezoelectric ceramics in every layer of actuating unit (1)
It (2) include n negative along actuator axis direction along positive polarized first piezoelectric ceramics (2-1) in actuator axis direction and n
To polarized second piezoelectric ceramics (2-2), and n positive polarized first piezoelectric ceramics (2-1) and n negative sense polarized second
Piezoelectric ceramics (2-2) is alternately arranged；
After applying driving voltage on the powered electrode piece (3) of the piezoelectric actuator, generation and polarization direction in piezoelectric ceramics (2)
Vertical electric field, so that shear-deformable, up and down two bottom surfaces generations and the driving voltage of driver circumferential along driver occur
Proportional relative angle deflection, and then realize the output of rotary motion.
2. a kind of twist mode precision piezoelectric actuator using shearing work mode, which is characterized in that its shape is cylinder
Or circular ring shape；It is cylindrical or circular ring shape actuating unit (1) that the driver, which includes m layers of shape, and m layers of actuating unit (1)
Using the whole driver that is composed of a fixed connection by the way of the folded spelling in driver radial line direction；Every layer of actuating unit (1) include
The piezoelectric ceramics (2) and 2n powered electrode piece (3) that 2n shape is fan-shaped or fan is annular, wherein m is the integer greater than 1, and n is
Integer greater than 1；2n piezoelectric ceramics (2) in every layer of actuating unit (1) is circumferentially uniformly distributed along driver and two neighboring
A powered electrode piece (3) is fixed between piezoelectric ceramics (2)；2n piezoelectric ceramics in every layer of actuating unit (1)
It (2) include n negative along driver radial line direction along positive polarized first piezoelectric ceramics (2-1) in driver radial line direction and n
To polarized second piezoelectric ceramics (2-2), and n positive polarization the first piezoelectric ceramics (2-1) and n negative sense polarized second are pressed
Electroceramics (2-2) is alternately arranged；
After applying driving voltage on the powered electrode piece (3) of the piezoelectric actuator, generation and polarization direction in piezoelectric ceramics (2)
Vertical electric field, so that shear-deformable, the inside and outside two cylinder generation of driver and the driving voltage circumferential along driver occur
Proportional relative angle deflection, and then realize the output of rotary motion.
3. driver described in any one of -2 according to claim 1, which is characterized in that the piezoelectric actuator is two neighboring logical
Apply opposite polarity driving voltage on electric electrode slice (3), driver output corner is proportional to driving voltage is applied, specific table
It is existing are as follows: driving voltage is higher, and driver output corner is bigger, and the waveform of driving voltage is different, the dynamic of driver output movement
Characteristic is also different.
4. the system of the twist mode precision piezoelectric actuator according to any one of claim 1-3 using shearing work mode
Make method, which is characterized in that the production method execution sequence is the molding and sintering, piezoelectric ceramics (2) of piezoelectric ceramics (2)
Polarization, the machining of piezoelectric ceramics (2) and top electrode and piezoelectric ceramics (2) are assembled into driver with powered electrode piece (3)
One layer of actuating unit (1) process；Or the molding of piezoelectric ceramics (2) and sintering, the machining of piezoelectric ceramics (2), piezoelectricity are made pottery
The polarization of porcelain (2) and top electrode and one layer of actuating that piezoelectric ceramics (2) and powered electrode piece (3) are assembled into driver are single
The process of first (1)；Or the molding of piezoelectric ceramics (2) is made pottery with sintering, the polarization of piezoelectric ceramics (2) and top electrode and by piezoelectricity
Porcelain (2) and powered electrode piece (3) are assembled into the process of one layer of actuating unit (1) of driver；Or piezoelectric ceramics (2) molding,
Sintering is with top electrode, the assembly of driver and to piezoelectric ceramics (2) the polarized process assembled；Or driver molding,
The polarization process of sintering and piezoelectric ceramics (2) in top electrode and driver.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0556670A (en) * | 1991-08-26 | 1993-03-05 | Canon Inc | Progressive wave type motor |
| CN102931874A (en) * | 2012-11-22 | 2013-02-13 | 上海交通大学 | Piezoelectric motor driven by longitudinal-torsional piezoelectric ceramic cylinder |
| CN203788191U (en) * | 2014-03-28 | 2014-08-20 | 海鹰企业集团有限责任公司 | Major diameter driver based on inlaying-splicing structure |
| CN104347794A (en) * | 2014-09-09 | 2015-02-11 | 清华大学 | Torsional vibration magnetoelectric coupling device based on shear piezoelectric effect |
| CN106940346A (en) * | 2017-03-20 | 2017-07-11 | 北京大学 | Omnidirectional encourages the PZT (piezoelectric transducer) and preparation method with receiving horizontal shear wave |
-
2018
- 2018-04-27 CN CN201810394727.0A patent/CN108494286B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0556670A (en) * | 1991-08-26 | 1993-03-05 | Canon Inc | Progressive wave type motor |
| CN102931874A (en) * | 2012-11-22 | 2013-02-13 | 上海交通大学 | Piezoelectric motor driven by longitudinal-torsional piezoelectric ceramic cylinder |
| CN203788191U (en) * | 2014-03-28 | 2014-08-20 | 海鹰企业集团有限责任公司 | Major diameter driver based on inlaying-splicing structure |
| CN104347794A (en) * | 2014-09-09 | 2015-02-11 | 清华大学 | Torsional vibration magnetoelectric coupling device based on shear piezoelectric effect |
| CN106940346A (en) * | 2017-03-20 | 2017-07-11 | 北京大学 | Omnidirectional encourages the PZT (piezoelectric transducer) and preparation method with receiving horizontal shear wave |
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