CN102291040B - Multi-degree-of-freedom micronano-level bionic precision rotary driver - Google Patents
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Abstract
The invention relates to a multi-degree-of-freedom micronano-level bionic precision rotary driver, which belongs to the field of precision machining. The multi-degree-of-freedom micronano-level bionic precision rotary driver can carry out ultraprecision stepping rotary movement around a determined direction and linear stepping movement along a determined direction. High-precision piezoelectric driving units are utilized to drive flexible hinge structures to carry out related clamping, and by controlling the clamping time sequence of a first layer of piezoelectric clamping mechanism and a second layer of piezoelectric clamping mechanism of a stator, the multi-degree-of-freedom micronano-level bionic precision rotary driver can carry out ultraprecision stepping rotary movement around the determined rotary axis; and meanwhile, by controlling the extension magnitudes of the vertical piezoelectric stacks on the bottom of the stator and the clamping of the first, the second and the third layers of flexible hinges, the multi-degree-of-freedom micronano-level bionic precision rotary driver controls linear stepping displacement along the determined direction. The multi-degree-of-freedom micronano-level bionic precision rotary driver mainly comprises a stator and a rotor, wherein three layers of three-jaw self-centering piezoelectric clamping mechanism, low-frequency rotary driving mechanisms and linear stepping driving mechanisms are packaged in the stator; and the rotor is a variable interface rotary shaft. The multi-degree-of-freedom micronano-level bionic precision rotary driverhas the advantages of low cost, little investment, quick return, high benefit and the like.
Description
Technical field
The present invention relates to the Precision Machining field, particularly the bionical accurate rotating driving device of a kind of multiple degrees of freedom micro/nano level.Be applied to the science and technology field at super-precision machine tools, accurate ultra microfabrication and measuring technique, the detection of material test specimen nanometer dynamic performance, MEMS (micro electro mechanical system) (MEMS), precision optics, semiconductor manufacturing, modern medicine and bio-genetics, Aero-Space, robot, the contour tip of military technology.
Background technology
Be accompanied by rapid development of science and technology, requirement to processing precision of products is more and more higher, especially seems especially important in the science and technology field at accurate ultra microfabrication and measuring technique, MEMS (micro electro mechanical system) (MEMS), nanosecond science and technology, semiconductor manufacturing, modern medicine and bio-genetics, Aero-Space science and technology, the contour tip of military technology.Want to realize the accurate ultra processing of product parts, a kind of suitable high-precision drive unit just must be provided.Traditional drive unit can not satisfy its required precision as macroscopical large scale drive units such as common electric machine, feed screw nut, turbine and worms.Therefore, the scientific research personnel of various countries goes all out in the more superior novel high-precision drive unit of research performance.
So-called new drive refers to adopt new material as electric energy-mechanical energy conversion element, again by transmission mechanism, makes target mechanism produce the device of certain action.By various countries scientific research personnel's continuous exploration, considerable novel driving device has been developed out, and wherein some have obtained relevant application in practice.According to the difference of driving element, novel driving device can be divided into following a few class substantially: phase-change material drive unit, thermal deformation drive unit, driving device made of shape-memory alloy, electromagnetic actuator device, electrostatic drive, magnetostriction drive unit, electric current become drive unit, electrostriction drive unit, Piexoelectric actuator etc.What wherein can reach nano-precision has only electrostriction drive unit and Piexoelectric actuator at present.Than the electrostriction drive unit, Piexoelectric actuator is because little in light weight, the response fast (microsecond level) of volume, control characteristic is good, energy density is big, energy consumption is low, characteristics such as not affected by magnetic fields and obtained using widely.
Drive unit in the past often exists that physical dimension is bigger than normal, stepping accuracy is low, come and go repetitive positioning accuracy low, be difficult to shortcoming such as processing; Some driver outputs are stable, precision is high although wherein also have, and stroke is little, has only tens microns, has seriously limited the scope of its application; Simultaneously, if will reach the purpose of the output of multifreedom motion, often need to have a plurality of single free movement module combinations, assembling to realize, cause whole device quite complicated, influence integral rigidity.Therefore be necessary to design a kind of positioning accuracy and repetitive positioning accuracy is all higher, be applicable to the microminiature precision driver that rotation and rectilinear motion are exported simultaneously.
Summary of the invention
The object of the present invention is to provide the bionical accurate rotating driving device of a kind of multiple degrees of freedom micro/nano level, solved the problems referred to above that prior art exists.It has the advantages that clamp is stable, load output is bigger, and can realize big stroke motion, straight line and rotatablely move functions such as output develops simultaneously.The present invention adopts the method for rotatablely move module and Linear Moving Module realize rotating rotatablely moving of sub-axis and along the rectilinear motion of this axis; In order to improve the stability of step motion, clamp device adopts a kind of special flexible hinge structure, and each clamp has three clamp flexible hinges to move simultaneously, have good in neutrality, and clamper, type of drive are hocketed, thereby realize the stability of clamper and the accuracy of axially rotating.Its rotary driving part branch is designed to three jaw self-centering flexible hinges, makes compact conformation and response rapidly.Rotatablely moving to thrust works under the low frequency, the present invention adopts nine groups of piezoelectric stack actings in conjunction to realize pincers tightly and promotes, and pincers are tight and driving hockets by corresponding time sequence.Rotor portion does not have winding structure, can make rotor realize rotation at any angle.The straight line step motion is driven by three groups of piezoelectric stacks, and the sequential of nine groups of piezoelectricity clamping institutions of three layers replaces clamping action on the cooperation stator, makes rotor realize lengthwise step motion.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
The bionical accurate rotating driving device of multiple degrees of freedom micro/nano level comprises rotor 1 and stator 2, and described rotor 1 is a rotating shaft, and the output of axle has the axis hole interference fits at screwed hole and stator 2 middle parts;
Described stator 2 comprises the stator one that is embedded with piezoelectric stack clamp flexible hinge respectively, two, three layers and is embedded with the stator bottom of vertical piezoelectric stack; Wherein partly by three clamp flexible hinges and rotor 1 clamp, three clamp flexible hinges realize that by A type piezoelectric stack I, II, the III 3,11,19 that embeds stator one deck clamp drives respectively to stator one deck near axis hole; Screw threads for fastening A type wedge I, this A type piezoelectric stack I 3 of Type B wedge I 6,7 pretensions, screw threads for fastening A type wedge II, Type B wedge II 14,13 pretension A type piezoelectric stack II 11, screw threads for fastening A type wedge III, 19, three clamp flexible hinges of Type B wedge III 21,20 pretension A type piezoelectric stack III have been formed the three-pawl type self-centering piezoelectricity clamp structure of stator one deck;
Stator two, three layers clamp, the pre-pressing structure with said stator one deck is identical respectively, and stator one, two interlayers are connected by three place's thin shelf flexible hinges
,The clamp that stator is two layers, pre-pressing structure and ground floor are identical, regulate the degree that compresses of A type wedge VII, Type B wedge IV, Type B wedge VIII, A type wedge VIII, Type B wedge IX, A type wedge IX 48,49,52,53,58,59 by regulating pretension screw IV, V, VI 28,29,44, thereby control A type piezoelectric stack V, VI, VIII 50,51,57 realize pretension and the clamp of flexible hinge; The clamp that stator is three layers, pre-pressing structure are with preceding two-layer identical, regulate the degree that compresses of Type B wedge X, A type wedge X, A type wedge XI, Type B wedge XI, A type wedge XII, Type B wedge XII 46,47,54,55,60,61 by adjusting pretension screw VII, VIII, IX 27,30,42, thereby control A type piezoelectric stack V, VI, VIII 50,51,57 realize pretension and the clamp of flexible hinge, there are three place's thin shelf flexible hinges to link to each other between the 3rd layer and the second layer, in order to realize the straight line step motion;
The stator bottom is the linear drives part, its inside is embedded with Type B piezoelectric stack IV, V, VI 31,35,40, screw threads for fastening A type wedge IV, Type B wedge V 33, this Type B piezoelectric stack IV 31 of 32 pretensions, screw threads for fastening A type wedge V, Type B wedge VI 37,36 pretension Type B piezoelectric stack V 35, screw threads for fastening A type wedge VI, Type B wedge VII 38,39 pretension Type B piezoelectric stack VI 40, this Type B piezoelectric stack IV, V, VI 31,35,40 pass the circular hole of reserving in three layers of the stators respectively, withstand on the lower surface of two layers of stators, stator one, two layers periphery is embedded with three rotation Drive Structure, specifically be to drive the indentation I, II, III 8,16,24 are embedded in interference fit in two layers of words, Type B piezoelectric stack I, II, III 5,15,23 1 ends are separately fixed at and drive the indentation I, II, III 8,16,24 upper strata, the other end withstand on stator one deck;
Described rotor 1 is no winding structure.
Described rotor 1 is the rotating shaft of type variable interface.
Rotation or movement that described rotor 1 is realized under the different frequency by A type piezoelectric stack I ~ IX 3,11,19,45,50,51,56,57,62.
Two layers of the stators of described stator 2 by hold-down screw I, II, III, IV, V, VI 4,9,12,17,22,25 and external shell fix.
Beneficial effect of the present invention have in: can improve the driving precision of generic drive greatly, reduce complexity and the size of structure, and have that cost is low, small investment, instant effect, benefit advantages of higher.Can be applied to precision finishing machine, MEMS (micro electro mechanical system) and robot field, purpose is to improve system's fine motion precision, reduces physical dimension.The present invention has extremely important meaning for the development of China's accurate ultra manufacture field, and it must have broad application prospects in various fields such as Precision Machining, semiconductor manufacturing, Aero-Space, military science and technology.Have the advantages that clamp is stable, load output is bigger, and can realize big stroke motion, straight line and rotatablely move functions such as output develops simultaneously.A kind of multiple degrees of freedom superhigh precision drive unit involved in the present invention, overall dimension is 80 * 49mm, overall structure is less, can conveniently be positioned in the various apparatuses, be used for to realize that the rotation around fixed axis to different objects drives and drives along the straight line step motion of fixed-direction.Major function of the present invention rotatablely moves and the stepping rectilinear motion for the stepping that realizes superhigh precision, and its output has the characteristics of big stroke, high pulling torque.The maximum angular displacement that the rotor single step turns over is 10
2The μ rad order of magnitude; The maximum linear displacement of rotor single step is the 10 μ m orders of magnitude, and with respect to drive unit in the past, its precision has great raising.
Description of drawings
Fig. 1 is overall structure schematic diagram of the present invention.
Fig. 2 is that master of the present invention looks schematic diagram.
Fig. 3 is elevational schematic view of the present invention.
Fig. 4 is schematic top plan view of the present invention.
Fig. 5 is the A-A cross-sectional schematic of Fig. 2.
Fig. 6 is the B-B cross-sectional schematic of Fig. 2.
Among the figure:
1. rotor; 2. stator; 3. A type piezoelectric stack I; 4. hold-down screw I;
5.B type piezoelectric stack I; 6. A type wedge I; 7. Type B wedge I; 8. drive the indentation I;
9. hold-down screw II; 10. pretension screw I; 11. A type piezoelectric stack II; 12. hold-down screw III;
13. Type B wedge II; 14. A type wedge II; 15.B type piezoelectric stack II; 16. drive the indentation II;
17. hold-down screw IV; 18. pretension screw II; 19.A type piezoelectric stack III; 20. Type B wedge III;
21. A type wedge III; 22. hold-down screw V; 23.B type piezoelectric stack III; 24. drive the indentation III;
25. hold-down screw VI; 26. pretension screw III; 27. pretension screw VII; 28. pretension screw IV;
29. pretension screw V; 30. pretension screw VIII; 31.B type piezoelectric stack IV; 32. Type B wedge V;
33. A type wedge IV; 34. pretension screw X; 35.B type piezoelectric stack V; 36. Type B wedge VI;
37. A type wedge V; 38.A type wedge VI; 39.B type wedge VII; 40.B type piezoelectric stack VI;
41. pretension screw XI; 42. pretension screw IX; 43. pretension screw XII; 44. pretension screw VI;
45. A type piezoelectric stack IV; 46. Type B wedge X; 47. A type wedge X; 48. A type wedge VII;
49. Type B wedge IV; 50. A type piezoelectric stack V; 51 A type piezoelectric stack VI; 52. Type B wedge VIII;
53. A type wedge VIII; 54. A type wedge XI; 55. Type B wedge XI; 56. A type piezoelectric stack VII;
57.A type piezoelectric stack VIII; 58. Type B wedge IX; 59. A type wedge IX; 60.A type wedge XII;
61.B type wedge XII; 62.A type piezoelectric stack IX.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 6, the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level of the present invention comprises rotor 1 and stator 2, and described rotor 1 is a rotating shaft, and the output of axle has the axis hole interference fits at screwed hole and stator 2 middle parts; By changing the rotor connector, can be used for rotation and the straight line output of variety classes parts.Owing to adopt piezoelectric stack to drive, make that the output load ratio is bigger, can drive relatively large parts; And adopt looper stepping type of drive, theoretical corner and rectilinear motion are apart from infinity.
Described stator 2 comprises the stator one that is embedded with piezoelectric stack clamp flexible hinge respectively, two, three layers and is embedded with the stator bottom of vertical piezoelectric stack; Wherein partly by three flexible hinges and rotor 1 clamp, three flexible hinges realize that by A type piezoelectric stack I, II, the III 3,11,19 that embeds stator one deck clamp drives respectively to stator one deck near axis hole; Screw threads for fastening A type wedge I, this A type piezoelectric stack I 3 of Type B wedge I 6,7 pretensions, and realize the adjusting of clamp pretension by the degree that compresses that pretension screw I 10 is regulated A type wedge I, Type B wedge I 6,7; Screw threads for fastening A type wedge II, Type B wedge II 14,13 pretension A type piezoelectric stack II 11, and realize the adjusting of clamp pretension by the degree that compresses that pretension screw II 18 is regulated A type wedge II, Type B wedge II 14,13; Screw threads for fastening A type wedge III, Type B wedge III 21,20 pretension A type piezoelectric stack III 19, and realize the adjusting of clamp pretension by the degree that compresses that pretension screw III 26 is regulated A type wedge III, Type B wedge III 21,20; Three flexible hinges have been formed the three-pawl type self-centering piezoelectricity clamp structure of stator one deck, and this type clamp structure has self-centering and the accurate advantage of clamp;
Stator two, three layers clamp, the pre-pressing structure with said stator one deck is identical respectively, stator one, two interlayers are connected by three place's flexible hinges, in order to realize that circumference rotatablely moves, stator two, three interlayers are connected by three place's flexible hinges, in order to realize the straight line step motion; The clamp that stator is two layers, pre-pressing structure and ground floor are identical, regulate the degree that compresses of wedge A type wedge VII, Type B wedge IV, Type B wedge VIII, A type wedge VIII, Type B wedge IX, A type wedge IX 48,49,52,53,58,59 by regulating pretension screw IV, V, VI 28,29,44, thereby control A type piezoelectric stack V, VI, VIII 50,51,57 realize pretension and the clamp of flexible hinge; The 3rd layer clamp, pre-pressing structure are with preceding two-layer identical, regulate the degree that compresses of Type B wedge X, A type wedge X, A type wedge XI, Type B wedge XI, A type wedge XII, Type B wedge XII 46,47,54,55,60,61 by adjusting pretension screw VII, VIII, IX 27,30,42, thereby control A type piezoelectric stack V, VI, VIII 50,51,57 realize pretension and the clamp of flexible hinge, there are three place's flexible hinges to link to each other between the 3rd layer and the second layer, in order to realize the straight line step motion;
The stator bottom is the linear drives part, its inside is embedded with Type B piezoelectric stack IV, V, VI 31,35,40, screw threads for fastening A type wedge IV, Type B wedge V 33, this Type B piezoelectric stack IV 31 of 32 pretensions, and by pretension screw X 34 adjusting A type wedge IV, Type B wedge V 33,32 the degree that compresses realizes the adjusting of clamp pretension, screw threads for fastening A type wedge V, Type B wedge VI 37,36 pretension Type B piezoelectric stack V 35, and by pretension screw XI 41 adjusting A type wedge V, Type B wedge VI 37,36 the degree that compresses realizes the adjusting of clamp pretension, screw threads for fastening A type wedge VI, Type B wedge VII 38,39 pretension Type B piezoelectric stack VI 40, and by pretension screw XII 43 adjusting A type wedge VI, Type B wedge VII 38,39 the degree that compresses realizes the adjusting of clamp pretension; This Type B piezoelectric stack IV, V, VI 31,35,40 are passed the circular hole of reserving in three layers of the stators respectively, withstand on the lower surface of two layers of stators, to realize rectilinear motion; Stator one, two layers periphery are embedded with three rotation Drive Structure, specifically be to drive indentation I, II, III 8,16,24 to be embedded in interference fit in two layers of words, Type B piezoelectric stack I, II, III 5,15,23 1 ends are separately fixed at and drive indentation I, II, III 8,16,24 upper strata, the other end withstands on stator one deck, does the stepping circular motion in order to drive ground floor;
Described rotor 1 is no winding structure.
Described rotor 1 is the rotating shaft of type variable interface.
Rotation or movement that described rotor 1 is realized under the different frequency by A type piezoelectric stack I ~ IX 3,11,19,45,50,51,56,57,62.
Two layers of the stators of described stator 2 by hold-down screw I, II, III, IV, V, VI 4,9,12,17,22,25 and external shell fix.
Movable member of the present invention all adopts the piezoelectric stack of controlled type of body, and its motion is to realize by the sequencing control to A type piezoelectric stack I ~ IX 3,11,19,45,50,51,56,57,62 control voltages.The motion of rotor 1 and stop to realize by the clamping action of flexible hinge.Clamping institution A type piezoelectric stack I, Type B wedge I, A type piezoelectric stack II, A type wedge I, Type B wedge II, A type wedge II, A type piezoelectric stack III, Type B wedge III, A type wedge III, A type piezoelectric stack IX, A type wedge X, A type wedge VII, Type B wedge IV, A type piezoelectric stack V, A type piezoelectric stack VI, Type B wedge VIII, A type wedge VIII, A type wedge XI, Type B wedge XI, A type piezoelectric stack VII, A type piezoelectric stack VIII, Type B wedge IX, A type wedge IX, A type wedge XII, Type B wedge XII, Type B wedge X 3,6,7,11,13,14,19,20,21,46,47,48,49,50,51,52,53,54,56,57,58,59,60,61,62 through A type piezoelectric stack I ~ IX 3,11,19,45,50,51,56,57,62 effect can be out of shape along rotor 1 radial expansion.Rotor 1 is except swaying, can also be by being positioned at the Type B piezoelectric stack IV of stator 2 bottoms, V, VI 31,35,40 and stator 2 in the encapsulation clamping institution A type piezoelectric stack I, Type B wedge I, A type piezoelectric stack II, A type wedge I, Type B wedge II, A type wedge II, A type piezoelectric stack III, Type B wedge III, A type wedge III, A type piezoelectric stack IX, A type wedge X, A type wedge VII, Type B wedge IV, A type piezoelectric stack V, A type piezoelectric stack VI, Type B wedge VIII, A type wedge VIII, A type wedge XI, Type B wedge XI, A type piezoelectric stack VII, A type piezoelectric stack VIII, Type B wedge IX, A type wedge IX, A type wedge XII, Type B wedge XII, Type B wedge X 3,6,7,11,13,14,19,20,21,46,47,48,49,50,51,52,53,54,56,57,58,59,60,61,62 sequencing control makes rotor mobile and rotation vertically.Rotor 1 can be by the rotation under A type piezoelectric stack I ~ IX 3,11,19,45,50,51,56,57,62 realization different frequencies.
Referring to Fig. 1,2,3,4,5,6, the concrete course of work of the present invention is as follows:
The realization that the rotor stepping rotatablely moves, initial condition: A type piezoelectric stack I, II, III, Type B piezoelectric stack I ~ VI, A type piezoelectric stack IV ~ IX 3,11,19,5,15,23,31,35,40,45,50,51,56,57,62 are all not charged, system is in free state, and this moment, rotor 1 also was in the state of moving about; When rotor is realized rotatablely moving: be packaged in A type piezoelectric stack I, II, III 3,11,19 energisings in the stator ground floor, because inverse piezoelectric effect, A type piezoelectric stack I, II, III 3,11,19 elongations, make that three clamp flexible hinge pincers of stator ground floor are tight, thus rotor and stator ground floor pincers is solid; Be embedded in the Type B piezoelectric stack I in the driving indentation mechanism of stator ground floor and second layer periphery, II, III 5,15,23 energising elongations, drive the indentation I, II, III 8,16,24 bottom and stator second layer interference fit, stator second layer hold-down screw I, II, III, IV, V, VI 4,9,12,17,22,25 are fixed on the shell, and Type B piezoelectric stack I, II, III 5,15, an end of 23 is fixed on and drives in the indentation, the other end withstands on the groove side of stator ground floor, so when Type B piezoelectric stack I, II, III 5,15, during 23 energising elongations, will promote the stator ground floor rotates with respect to the stator second layer, again because rotor by the stator ground floor flexible hinge and stator ground floor pincers admittedly together, thereby make rotor 1 rotate with respect to the stator second layer, corner is 10
2The μ rad order of magnitude; Be packaged in A type piezoelectric stack VIII, A type piezoelectric stack VI, 50,51, the 57 energising elongations of A type piezoelectric stack V of the stator second layer, by the flexible hinge of the stator second layer that rotor 1 and stator second layer pincers is solid; Be packaged in A type piezoelectric stack I, II, III 3,11,19 dead electricity of stator ground floor, flexible hinge and the rotor of stator ground floor unclamp; Type B piezoelectric stack I, II, III 5,15,23 dead electricity, because the effect of thin shelf flexible hinge between stator ground floor and the second layer, the stator ground floor has been got back to initial condition with respect to the second layer; Be packaged in A type piezoelectric stack I, II, III 3,11, the 19 energising elongations of stator ground floor, the flexible hinge of ground floor and rotor pincers are tight; Be packaged in A type piezoelectric stack VIII, A type piezoelectric stack VI, A type piezoelectric stack V 50,51,57 dead electricity of the stator second layer.So just finished a step that rotatablely moves of rotor, repeating above motion can be so that rotor be realized step-type rotatablely moving, and its theoretical corner be infinity.
The straight-line realization of rotor stepping, initial condition: A type piezoelectric stack I, II, III, Type B piezoelectric stack I ~ VI, A type piezoelectric stack IV ~ IX 3,11,19,5,15,23,31,35,40,45,50,51,56,57,62 are all not charged, system is in free state, and this moment, rotor 1 also was in the state of moving about; Be packaged in the Type B piezoelectric stack VI of stator bottom, Type B piezoelectric stack V, Type B piezoelectric stack IV 31,35,40 energising elongations, because the stator second layer and shell are fixed, connect by thin shelf flexible hinge between the stator second layer and the 3rd layer, and Type B piezoelectric stack VI, Type B piezoelectric stack V, Type B piezoelectric stack IV 31,35, an end of 40 is by Type B wedge V, A type wedge IV, Type B wedge VI, A type wedge V, A type wedge VI, Type B wedge VII 32,33,36,37,38,39 are connected bottom stator, the other end is the circular hole by reserving in the 3rd layer of the stator then, withstand on the lower surface of the stator second layer, so when Type B piezoelectric stack VI, Type B piezoelectric stack V, Type B piezoelectric stack IV 31,35, after the 40 energising elongations, will make the 3rd layer of stator and stator bottom do rectilinear motion downwards with respect to the stator second layer; Be packaged in A type piezoelectric stack IV, IX, VII 45,56, the 62 energising elongations of the 3rd layer of stator, by the flexible hinge of the 3rd layer of stator that rotor and the 3rd layer of pincers of stator is tight; Be packaged in the Type B piezoelectric stack VI of stator bottom, Type B piezoelectric stack V, Type B piezoelectric stack IV 31,35,40 dead electricity, make the 3rd layer of stator and stator bottom under the effect of flexible hinge, move upward with respect to the stator second layer and to get back to initial condition, again because the 3rd layer of rotor and stator are tight by the flexible hinge pincers, so rotor is done rectilinear motion upwards with respect to the stator second layer: the A type piezoelectric stack I that is packaged in stator ground floor and the second layer, II, III, VIII, VI, V 3,11,19,50,51,57 energisings, all pincers is tight to make rotor and stator ground floor and the second layer; Be packaged in A type piezoelectric stack IV, IX, VII 45,56,62 dead electricity of the 3rd layer of stator.So just finished a straight-line step of rotor stepping, repeating above operation can be so that rotor be done the stepping rectilinear motion along fixed-direction.
Claims (5)
1. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level comprises rotor (1) and stator (2), and it is characterized in that: described rotor (1) is a rotating shaft, and the output of axle has the axis hole interference fits at screwed hole and stator (2) middle part;
Described stator (2) comprises first, second and third layer of stator that is embedded with piezoelectric stack clamp flexible hinge respectively and is embedded with the stator bottom of vertical piezoelectric stack; Wherein partly by three clamp flexible hinges and rotor (1) clamp, three clamp flexible hinges realize that by A type piezoelectric stack I, II, the III (3,11,19) that embeds the stator ground floor clamp drives respectively to the stator ground floor near axis hole; Screw threads for fastening A type wedge I, this A type piezoelectric stack I (3) of Type B wedge I (6,7) pretension, screw threads for fastening A type wedge II, Type B wedge II (14,13) pretension A type piezoelectric stack II (11), screw threads for fastening A type wedge III, Type B wedge III (21,20) pretension A type piezoelectric stack III (19), three flexible hinges have been formed the three-pawl type self-centering piezoelectricity clamp structure of stator ground floor; Second and third layer of stator clamp, pre-pressing structure with the said stator ground floor respectively is identical, and first and second interlayer of stator is connected by three place's thin shelf flexible hinges, and second and third interlayer of stator is connected by three place's thin shelf flexible hinges; The stator bottom is the linear drives part, its inside is embedded with Type B piezoelectric stack IV, V, VI (31,35,40), screw threads for fastening A type wedge IV, Type B wedge V (33,32) this Type B piezoelectric stack IV (31) of pretension, screw threads for fastening A type wedge V, Type B wedge VI (37,36) pretension Type B piezoelectric stack V (35), screw threads for fastening A type wedge VI, Type B wedge VII (38,39) pretension Type B piezoelectric stack VI (40), this Type B piezoelectric stack IV, V, VI (31,35,40) pass the circular hole of reserving in the 3rd layer of the stator respectively, withstand on the lower surface of the stator second layer; The periphery of first and second layer of stator is embedded with three rotation Drive Structure, specifically be to drive indentation I, II, III (8,16,24) to be embedded in interference fit in the stator second layer, Type B piezoelectric stack I, II, III (5,15, a 23) end are separately fixed at the upper strata that drives indentation I, II, III (8,16,24), and the other end withstands on the groove side of stator ground floor.
2. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1, it is characterized in that: described rotor (1) is no winding structure.
3. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1 and 2 is characterized in that: described rotor (1) is the rotating shaft of type variable interface.
4. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1 is characterized in that: described rotor (1) is realized rotation or movement under the different frequency by A type piezoelectric stack I ~ IX (3,11,19,45,50,51,56,57,62).
5. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1 is characterized in that: the stator second layer of described stator (2) is fixed with external shell by hold-down screw I, II, III, IV, V, VI (4,9,12,17,22,25).
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| CN103465258B (en) * | 2013-09-13 | 2015-08-26 | 浙江大学 | A kind of Three-degree-of-freeprecision precision adjustment device based on flexible hinge |
| CN103501129B (en) * | 2013-10-18 | 2016-01-13 | 吉林大学 | A kind of Bionic inchworm type piezoelectric rotary driver |
| CN103904937B (en) * | 2014-02-21 | 2015-04-15 | 西安交通大学 | Rotation type driving device and method based on three piezoelectric stacks |
| CN104320015A (en) * | 2014-10-15 | 2015-01-28 | 吉林大学 | Bionic multi-degree of freedom precise piezoelectric driving device |
| CN110311587B (en) * | 2018-04-08 | 2021-03-23 | 中国人民解放军陆军工程大学 | Stepping type ultra-magnetic precise rotation driving device |
| CN109361327B (en) * | 2018-11-08 | 2023-10-03 | 中国人民解放军陆军工程大学 | Clutch type super magnetic rotary driving device |
| CN110774260A (en) * | 2019-04-08 | 2020-02-11 | 浙江师范大学 | Ultra-precise piezoelectric micro-clamping manipulator |
| CN112713805B (en) * | 2020-12-22 | 2022-04-22 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | Rotary driving device based on piezoelectric stack |
| CN115955141B (en) * | 2023-03-14 | 2023-05-26 | 吉林大学 | Integrated two-degree-of-freedom stepping actuator based on piezoelectric driving |
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