CN102291040B - Multi-degree-of-freedom micro-nano-scale bionic precision rotary drive device - Google Patents

Abstract

The invention relates to a multi-degree-of-freedom micronano-level bionic precision rotary driver, which belongs to the field of precision machining. The multi-degree-of-freedom micronano-level bionic precision rotary driver can carry out ultraprecision stepping rotary movement around a determined direction and linear stepping movement along a determined direction. High-precision piezoelectric driving units are utilized to drive flexible hinge structures to carry out related clamping, and by controlling the clamping time sequence of a first layer of piezoelectric clamping mechanism and a second layer of piezoelectric clamping mechanism of a stator, the multi-degree-of-freedom micronano-level bionic precision rotary driver can carry out ultraprecision stepping rotary movement around the determined rotary axis; and meanwhile, by controlling the extension magnitudes of the vertical piezoelectric stacks on the bottom of the stator and the clamping of the first, the second and the third layers of flexible hinges, the multi-degree-of-freedom micronano-level bionic precision rotary driver controls linear stepping displacement along the determined direction. The multi-degree-of-freedom micronano-level bionic precision rotary driver mainly comprises a stator and a rotor, wherein three layers of three-jaw self-centering piezoelectric clamping mechanism, low-frequency rotary driving mechanisms and linear stepping driving mechanisms are packaged in the stator; and the rotor is a variable interface rotary shaft. The multi-degree-of-freedom micronano-level bionic precision rotary driverhas the advantages of low cost, little investment, quick return, high benefit and the like.

Description

Multi-degree-of-freedom micro-nano-scale bionic precision rotary drive device

technical field

The present invention relates to the field of precision machining, in particular to a multi-degree-of-freedom micro-nano-scale bionic precision rotary drive device. Applied to ultra-precision machining machine tools, precision ultra-precision micromachining and measurement technology, nanomechanical performance testing of material specimens, micro-electromechanical systems (MEMS), precision optics, semiconductor manufacturing, modern medicine and biogenetic engineering, aerospace, robotics, military Technology and other high-tech fields of science and technology.

Background technique

With the rapid development of science and technology, the requirements for product processing accuracy are getting higher and higher, especially in precision ultra-precision micromachining and measurement technology, micro-electromechanical systems (MEMS), nanotechnology, semiconductor manufacturing, modern medicine and biogenetic engineering It is particularly important in high-tech fields such as aerospace technology, military technology, etc. In order to achieve precise ultra-precision machining of product parts, it is necessary to provide a suitable high-precision drive device. Traditional driving devices, such as ordinary motors, screw nuts, worm gears and other macroscopic large-scale driving devices, can no longer meet their precision requirements. Therefore, researchers from all over the world are devoting themselves to researching new high-precision drive devices with superior performance.

The so-called new driving device refers to a device that uses new materials as electrical energy-mechanical energy conversion components, and then passes through the transmission mechanism to make the target mechanism produce a certain movement. Through the continuous exploration of scientific researchers from various countries, quite a lot of new driving devices have been developed, and some of them have been applied in practice. According to the different driving components, new driving devices can be roughly divided into the following categories: phase change material driving devices, thermal deformation driving devices, shape memory alloy driving devices, electromagnetic driving devices, electrostatic driving devices, magnetostrictive driving devices, electrorheological Drive device, electrostrictive drive device, piezoelectric drive device, etc. Among them, there are only electrostrictive drive devices and piezoelectric drive devices that can achieve nanometer precision. Compared with the electrostrictive drive device, the piezoelectric drive device has been widely used because of its small size, light weight, fast response (microsecond level), good control characteristics, high energy density, low energy consumption, and no influence of magnetic fields. Applications.

In the past, the drive devices often had shortcomings such as large structural size, low stepping accuracy, low reciprocating positioning accuracy, and difficulty in processing; although some drives have stable output and high precision, their strokes are small, only tens of microns, which seriously limits The scope of its application; at the same time, in order to achieve the output of multi-degree-of-freedom motion, it is often necessary to combine and assemble multiple single-free motion modules, which makes the whole device quite complicated and affects the overall stiffness. Therefore, it is necessary to design a micro-miniature precision driver with high positioning accuracy and repeat positioning accuracy, which is also suitable for rotary and linear motion output.

Contents of the invention

The purpose of the present invention is to provide a multi-degree-of-freedom micro-nano level bionic precision rotary drive device, which solves the above-mentioned problems existing in the prior art. It has the characteristics of stable clamping and large load output, and can realize functions such as large-stroke motion, linear and rotary motion output simultaneously. The present invention adopts the method of the rotary motion module and the linear motion module to realize the rotary motion around the rotor axis and the linear motion along the axis; in order to improve the stability of the stepping motion, the clamping device adopts a special flexible hinge structure, and Each clamp has three clamp flexible hinges that move at the same time, which has good centering, and makes the clamping and driving modes alternate, so as to realize the stability of the clamp and the accuracy of the axial rotation. Its rotary drive part is designed as a three-jaw self-centering flexible hinge, making the structure compact and responsive. Rotational motion at low frequency acts as thrust, and the present invention uses nine groups of piezoelectric stacks to work together to realize clamping and pushing, and clamping and driving are performed alternately according to corresponding timing. The rotor part has no winding structure, which can make the rotor rotate at any angle. The linear stepping motion is driven by three sets of piezoelectric stacks, which cooperate with the timing alternating clamping action of the nine sets of piezoelectric clamping mechanisms on the three layers on the stator, so that the rotor can realize the stepping motion along the linear direction.

Above-mentioned purpose of the present invention is achieved through the following technical solutions:

The multi-degree-of-freedom micro-nano-level bionic precision rotary drive device includes a rotor 1 and a stator 2, the rotor 1 is a rotating shaft, and the output end of the shaft is provided with a threaded hole to transitionally fit with the shaft hole in the middle of the stator 2;

The stator 2 includes the first, second, and third layers of the stator embedded with flexible hinges of piezoelectric stack clamps and the bottom of the stator embedded with vertical piezoelectric stacks; wherein the first layer of the stator near the shaft hole passes through three clamps The flexible hinge and the rotor 1 are clamped, and the three flexible hinges are respectively clamped and driven by the A-type piezoelectric stacks I, II, III3, 11, and 19 embedded in the first layer of the stator; the A-type wedge blocks I, Type B wedge Ⅰ 6, 7 pre-tighten the A-type piezoelectric stack Ⅰ 3, thread fasten A-type wedge Ⅱ, B-type wedge Ⅱ 14, 13 pre-tighten A-type piezoelectric stack Ⅱ 11, thread A-type wedge Block Ⅲ, B-type wedge block Ⅲ21, 20 pre-tighten A-type piezoelectric stack Ⅲ19, and three clamping flexible hinges form a three-claw self-centering piezoelectric clamping structure on the first layer of the stator;

The second and third layers of the stator have the same clamping and preloading structure as the first layer of the stator, and the first and second layers of the stator are connected by three thin-walled flexible hinges . The clamping and preloading structures of the second layer of the stator are the same Exactly the same, adjust A-type wedge block VII, B-type wedge block IV, B-type wedge block VIII, A-type wedge block VIII, B-type wedge block IX, A by adjusting pre-tightening screws IV, V, VI 28, 29, 44 The compression degree of wedge-shaped blocks IX 48, 49, 52, 53, 58, 59, so as to control the A-type piezoelectric stack Ⅴ, Ⅵ, Ⅷ 50, 51, 57 to realize the pre-tightening and clamping of the flexible hinge; the stator has three layers The clamping and pre-tightening structures are the same as those of the first two layers. By adjusting the pre-tightening screws VII, VIII, IX 27, 30, 42 to adjust the B-type wedge X, A-type wedge X, A-type wedge XI, and B-type wedge block Ⅺ, A-type wedge block Ⅻ, B-type wedge block Ⅻ46, 47, 54, 55, 60, 61, so as to control the A-type piezoelectric stack Ⅴ, Ⅵ, Ⅷ 50, 51, 57 to realize the flexible hinge Pre-tightening and clamping, there are three thin-wall flexible hinges connected between the third layer and the second layer to realize linear stepping motion;

The bottom of the stator is a linear drive part, and there are B-type piezoelectric stacks IV, V, VI 31, 35, 40 embedded in it, and the A-type wedge block IV and B-type wedge block V33, 32 are screwed to pre-tighten the B-type piezoelectric stack. Stack Ⅳ31, screw fastening A-type wedges Ⅴ, B-type wedges Ⅵ37, 36 pre-tightening B-type piezoelectric stack Ⅴ35, threading A-type wedges Ⅵ, B-type wedges Ⅶ38, 39 pre-tightening B-type Piezoelectric stack Ⅵ40, the B-type piezoelectric stacks Ⅳ, Ⅴ, Ⅵ31, 35, 40 pass through the round holes reserved in the third layer of the stator respectively, and stand on the lower surface of the second layer of the stator, and the first and second layers of the stator There are three rotary drive structures embedded in the periphery, specifically, the drive indentations I, II, III8, 16, and 24 are embedded in the second layer of the letter for interference fit, and the B-type piezoelectric stacks I, II, III5, 15, and 23 are respectively It is fixed on the upper layer of drive indentation Ⅰ, Ⅱ, Ⅲ8, 16, 24, and the other end is on the stator layer;

The rotor 1 described above is a non-winding structure.

The rotor 1 is a variable interface shaft.

The rotor 1 realizes rotation or movement at different frequencies through A-type piezoelectric stacks I~IX 3, 11, 19, 45, 50, 51, 56, 57, and 62.

The second layer of the stator of the stator 2 is fixed to the outer casing by fixing screws I, II, III, IV, V, VI4, 9, 12, 17, 22, 25.

The beneficial effects of the present invention are: the driving precision of the common driver can be greatly improved, the complexity and size of the structure can be reduced, and the invention has the advantages of low cost, less investment, quick effect and high benefit. It can be applied to the fields of precision machining machine tools, micro-electromechanical systems and robots, with the purpose of improving the micro-motion accuracy of the system and reducing the structural size. The invention has extremely important significance for the development of precision ultra-precision machining field in our country, and it must have broad application prospects in many fields such as precision machining, semiconductor manufacturing, aerospace, military science and technology. It has the characteristics of stable clamping and large load output, and can realize the functions of large stroke motion, linear and rotary motion output simultaneously. A multi-degree-of-freedom ultra-high-precision driving device involved in the present invention has an overall size of 80×49mm and a small overall structure, which can be conveniently placed in various instruments and used to realize the rotational drive of different objects around a fixed axis and a linear stepping motion drive in a fixed direction. The main function of the invention is to realize ultra-high precision stepping rotary motion and stepping linear motion, and its output has the characteristics of large stroke and large torque. The maximum angular displacement of the rotor in a single step rotation is on the order of 10 ² μrad; the maximum linear displacement of the rotor in a single step is on the order of 10 μm. Compared with the previous driving device, its precision is greatly improved.

Description of drawings

Fig. 1 is a schematic diagram of the overall structure of the present invention.

Fig. 2 is a schematic front view of the present invention.

Fig. 3 is a schematic bottom view of the present invention.

Fig. 4 is a schematic top view of the present invention.

FIG. 5 is a schematic cross-sectional view along line A-A of FIG. 2 .

FIG. 6 is a schematic cross-sectional view along B-B of FIG. 2 .

In the picture:

1. Rotor; 2. Stator; 3. A-type piezoelectric stack Ⅰ; 4. Fixing screw Ⅰ;

5. Type B piezoelectric stack Ⅰ; 6. Type A wedge block Ⅰ; 7. Type B wedge block Ⅰ; 8. Drive indentation Ⅰ;

9. Fixing screw Ⅱ; 10. Pre-tightening screw Ⅰ; 11. A-type piezoelectric stack Ⅱ; 12. Fixing screw Ⅲ;

13. Type B wedge II; 14. Type A wedge II; 15. Type B piezoelectric stack II; 16. Drive retraction II;

17. Fixing screw Ⅳ; 18. Pre-tightening screw Ⅱ; 19. A-type piezoelectric stack Ⅲ; 20. B-type wedge block Ⅲ;

21. A-type wedge block Ⅲ; 22. Fixing screw Ⅴ; 23. B-type piezoelectric stack Ⅲ; 24. Drive retraction Ⅲ;

25. Fixing screw Ⅵ; 26. Pre-tightening screw Ⅲ; 27. Pre-tightening screw Ⅶ; 28. Pre-tightening screw Ⅳ;

29. Pre-tightening screw Ⅴ; 30. Pre-tightening screw Ⅷ; 31. B-type piezoelectric stack Ⅳ; 32. B-type wedge block Ⅴ;

33. Type A wedge Ⅳ; 34. Preload screw Ⅹ; 35. Type B piezoelectric stack Ⅴ; 36. Type B wedge Ⅵ;

37. Type A wedge Ⅴ; 38. Type A wedge Ⅵ; 39. Type B wedge Ⅶ; 40. Type B piezoelectric stack Ⅵ;

41. Pre-tightening screw Ⅺ; 42. Pre-tightening screw Ⅸ; 43. Pre-tightening screw Ⅻ; 44. Pre-tightening screw Ⅵ;

45. Type A piezoelectric stack IV; 46. Type B wedge block X; 47. Type A wedge block X; 48. Type A wedge block VII;

49. Type B wedge IV; 50. Type A piezoelectric stack V; 51 Type A piezoelectric stack VI; 52. Type B wedge VIII;

53. A-type wedge Ⅷ; 54. A-type wedge Ⅺ; 55. B-type wedge Ⅺ; 56. A-type piezoelectric stack Ⅶ;

57. A-type piezoelectric stack Ⅷ; 58. B-type wedge Ⅸ; 59. A-type wedge Ⅸ; 60. A-type wedge Ⅸ;

61. Type B wedge Ⅻ; 62. Type A piezoelectric stack Ⅸ.

Detailed ways

The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.

Referring to Fig. 1 to Fig. 6, the multi-degree-of-freedom micro-nano level bionic precision rotary driving device of the present invention includes a rotor 1 and a stator 2, the rotor 1 is a rotating shaft, and the output end of the shaft is provided with a threaded hole and the middle part of the stator 2 Shaft hole transition fit; by changing the rotor connection port, it can be used for the rotation and linear output of different types of components. Due to the piezoelectric stack drive, the output load is relatively large, and relatively large components can be driven; and the inchworm stepping drive method is adopted, and the theoretical rotation angle and linear motion distance are infinite.

The stator 2 includes the first, second and third layers of the stator respectively embedded with piezoelectric stack clamp flexible hinges, and the bottom of the stator embedded with vertical piezoelectric stacks; wherein the stator layer near the shaft hole passes through three flexible The hinge and the rotor 1 are clamped, and the three flexible hinges are clamped and driven by the A-type piezoelectric stacks I, II, III3, 11, and 19 embedded in the first layer of the stator; the A-type wedge block I and B-type wedge are screwed Blocks I6 and 7 pre-tighten the A-type piezoelectric stack I3, and adjust the compression degree of the A-type wedge block I and B-type wedge block I6 and 7 through the pre-tightening screw I10 to realize the adjustment of the clamp pre-tightening; Fix A-type wedge II, B-type wedge II14, 13 to pre-tighten A-type piezoelectric stack II11, and adjust the compression degree of A-type wedge II and B-type wedge II14, 13 by pre-tightening screw II18 Clamp pre-tightening adjustment; thread fastening A-type wedge block III, B-type wedge block III 21, 20 to pre-tighten A-type piezoelectric stack Ⅲ19, and adjust A-type wedge block III and B-type wedge block through pre-tightening screw Ⅲ26 Ⅲ21, 20 to achieve the adjustment of clamp preload; three flexible hinges form a three-jaw self-centering piezoelectric clamping structure on the first layer of the stator. This type of clamping structure has self-centering and clamping the advantage of precision;

The second and third layers of the stator have the same clamping and pre-tightening structure as the first layer of the stator. The first and second layers of the stator are connected by three flexible hinges to realize circular rotation. The second and third layers of the stator are connected by three flexible hinges. The flexible hinges are connected to realize linear stepping motion; the clamping and pre-tightening structure of the second layer of the stator is exactly the same as that of the first layer, and the wedge block type A is adjusted by adjusting the pre-tightening screws Ⅳ, Ⅴ, Ⅵ 28, 29, 44 Wedge VII, Type B Wedge IV, Type B Wedge VIII, Type A Wedge VIII, Type B Wedge IX, Type A Wedge IX 48, 49, 52, 53, 58, 59 the degree of compression to control A-type piezoelectric stacks Ⅴ, Ⅵ, Ⅷ 50, 51, 57 to realize the pre-tightening and clamping of the flexible hinge; the clamping and pre-tightening structure of the third layer is the same as the first two layers, by adjusting the pre-tightening screws , Ⅸ27, 30, 42 to adjust B-type wedge Ⅹ, A-type wedge Ⅺ, A-type wedge Ⅺ, B-type wedge Ⅺ, A-type wedge Ⅻ, B-type wedge Ⅻ46, 47, 54, 55, 60, 61, so as to control the A-type piezoelectric stack Ⅴ, Ⅵ, Ⅷ 50, 51, 57 to realize the pre-tightening and clamping of the flexible hinge. There are three flexible hinges connected between the third layer and the second layer. To realize linear stepping motion;

The bottom of the stator is a linear drive part, and there are B-type piezoelectric stacks IV, V, VI 31, 35, 40 embedded in it, and the A-type wedge block IV and B-type wedge block V33, 32 are screwed to pre-tighten the B-type piezoelectric stack. Stack IV 31, and adjust the compression degree of A-type wedge IV and B-type wedge V33, 32 through the pre-tightening screw X34 to realize the adjustment of clamp pre-tightening, and screw the A-type wedge V and B-type wedge Ⅵ37 and 36 pre-tighten the B-type piezoelectric stack Ⅴ35, and adjust the compression degree of the A-type wedge Ⅴ and B-type wedge Ⅵ37 and 36 through the pre-tightening screw Ⅺ41 to realize the adjustment of the clamp pre-tightening. Type B wedge Ⅵ, B type wedge Ⅶ38, 39 pre-tighten B type piezoelectric stack Ⅵ40, and adjust the compression degree of A type wedge Ⅵ, B type wedge Ⅶ38, 39 through the pretightening screw Ⅻ43 to achieve clamping Preload adjustment; the B-type piezoelectric stacks IV, V, VI 31, 35, and 40 respectively pass through the round holes reserved in the third layer of the stator, and stand on the lower surface of the second layer of the stator to achieve linear motion; the stator one 1. There are three rotary drive structures embedded in the periphery of the second floor, specifically, the drive indentations Ⅰ, Ⅱ, Ⅲ8, 16, and 24 are embedded in the second layer of the word for interference fit, and the B-type piezoelectric stack Ⅰ, Ⅱ, Ⅲ5, 15 , 23 are respectively fixed on the upper layer of drive indentation Ⅰ, Ⅱ, Ⅲ 8, 16, 24, and the other end is placed on the stator layer to drive the first layer to do step-by-step circular motion;

The rotor 1 described above is a non-winding structure.

The rotor 1 is a variable interface shaft.

The rotor 1 realizes rotation or movement at different frequencies through A-type piezoelectric stacks I~IX 3, 11, 19, 45, 50, 51, 56, 57, and 62.

The second layer of the stator of the stator 2 is fixed to the outer casing by fixing screws I, II, III, IV, V, VI4, 9, 12, 17, 22, 25.

The movable parts of the present invention all adopt piezoelectric stacks with controllable shape, and their movement is controlled by A-type piezoelectric stacks I~IX3, 11, 19, 45, 50, 51, 56, 57, and 62 The timing control of the voltage is realized. Both the movement and stop of the rotor 1 are realized by the clamping action of the flexible hinge. Clamping mechanism Type A piezoelectric stack Ⅰ, Type B wedge Ⅰ, Type A piezoelectric stack Ⅱ, Type A wedge Ⅰ, Type B wedge Ⅱ, Type A wedge Ⅱ, Type A piezoelectric stack Ⅲ , Type B Wedge III, Type A Wedge III, Type A Piezoelectric Stack IX, Type A Wedge X, Type A Wedge VII, Type B Wedge IV, Type A Piezoelectric Stack V, Type A Piezoelectric Stack Electric stack Ⅵ, B-type wedge Ⅷ, A-type wedge Ⅷ, A-type wedge Ⅺ, B-type wedge Ⅺ, A-type piezoelectric stack Ⅶ, A-type piezoelectric stack Ⅷ, B-type wedge Ⅸ , A-type wedge Ⅸ, A-type wedge Ⅻ, B-type wedge Ⅻ, B-type wedge Ⅸ3, 6, 7, 11, 13, 14, 19, 20, 21, 46, 47, 48, 49, 50 , 51, 52, 53, 54, 56, 57, 58, 59, 60, 61, 62 through the role of A-type piezoelectric stack I~IX , can expand and deform along the radial direction of the rotor 1. In addition to rotating around the axis, the rotor 1 can also pass through the B-type piezoelectric stacks IV, V, VI 31, 35, 40 located at the bottom of the stator 2 and the clamping mechanism A-type piezoelectric stacks I and B in the stator 2. Type Wedge I, Type A Piezoelectric Stack II, Type A Wedge I, Type B Wedge II, Type A Wedge II, Type A Piezoelectric Stack III, Type B Wedge III, Type A Wedge III , A-type piezoelectric stack Ⅸ, A-type wedge Ⅸ, A-type wedge Ⅶ, B-type wedge Ⅳ, A-type piezoelectric stack Ⅴ, A-type piezoelectric stack Ⅵ, B-type wedge Ⅷ, A Type Wedge Ⅷ, Type A Wedge Ⅺ, Type B Wedge Ⅺ, Type A Piezoelectric Stack Ⅶ, Type A Piezoelectric Stack Ⅷ, Type B Wedge Ⅸ, Type A Wedge Ⅸ, Type A Wedge Ⅻ , Type B wedge XII, Type B wedge X3, 6, 7, 11, 13, 14, 19, 20, 21, 46, 47, 48, 49, 50, 51, 52, 53, 54, 56, 57 , 58, 59, 60, 61, 62 timing control, so that the rotor moves and rotates in the axial direction. The rotor 1 can rotate at different frequencies through the A-type piezoelectric stacks I~IX3, 11, 19, 45, 50, 51, 56, 57, and 62.

Referring to Fig. 1, 2, 3, 4, 5, 6, the concrete work process of the present invention is as follows:

The realization of the stepping rotary motion of the rotor, initial state: A-type piezoelectric stack Ⅰ, Ⅱ, Ⅲ, B-type piezoelectric stack Ⅰ-Ⅵ, A-type piezoelectric stack Ⅳ-Ⅸ 3, 11, 19, 5, 15, 23, 31, 35, 40, 45, 50, 51, 56, 57, and 62 are not charged, the system is in a free state, and the rotor 1 is also in a swimming state at this time; when the rotor realizes rotating motion: encapsulated in the stator The A-type piezoelectric stacks I, II, III 3, 11, and 19 in the first layer are energized, and due to the inverse piezoelectric effect, the A-type piezoelectric stacks I, II, III 3, 11, and 19 are elongated, making the stator's first The three-clamp flexible hinge on the first layer is clamped tightly, thereby clamping the rotor and the first layer of the stator; the B-type piezoelectric stack I and II embedded in the driving retraction mechanism on the periphery of the first layer and the second layer of the stator , Ⅲ5, 15, 23 are energized and elongated, and the lower part of the driving indentation Ⅰ, Ⅱ, Ⅲ8, 16, 24 is interference fit with the second layer of the stator, and the second layer of the stator is fixed with screws Ⅰ, Ⅱ, Ⅲ, Ⅳ, Ⅴ, Ⅵ4, 9, 12, 17, 22, 25 are fixed on the casing, and one end of B-type piezoelectric stack I, II, III 5, 15, 23 is fixed on the driving indentation, and the other end is on the first layer of the stator. On the side of the groove, when the B-type piezoelectric stack I, II, III5, 15, and 23 are energized and extended, the first layer of the stator will be pushed to rotate relative to the second layer of the stator, and because the rotor passes through the second layer of the stator The flexible hinge on the first layer is clamped with the first layer of the stator, so that the rotor 1 rotates relative to the second layer of the stator, and the rotation angle is on the order of 10 ² μrad; the A-type piezoelectric stack Ⅷ encapsulated in the second layer of the stator , A-type piezoelectric stack Ⅵ, A-type piezoelectric stack Ⅴ 50, 51, 57 are energized and elongated, and the rotor 1 and the second layer of the stator are clamped by the flexible hinge of the second layer of the stator; Type A piezoelectric stacks Ⅰ, Ⅱ, Ⅲ3, 11, 19 lose power, the flexible hinge of the first layer of the stator is loosened from the rotor; type B piezoelectric stacks Ⅰ, Ⅱ, Ⅲ5, 15, 23 lose power, because the stator The role of the thin-walled flexible hinge between the first layer and the second layer, the first layer of the stator returns to the initial state relative to the second layer; A-type piezoelectric stacks I, II, III3, 11 packaged in the first layer of the stator , 19 energized elongation, the flexible hinge of the first layer is clamped tightly with the rotor; A-type piezoelectric stack VIII, A-type piezoelectric stack VI, A-type piezoelectric stack V50, 51, and A-type piezoelectric stack packaged in the second layer of the stator 57 out of power. In this way, one step of the rotary motion of the rotor is completed. Repeating the above motion can make the rotor realize a step-by-step rotary motion, and its theoretical rotation angle is infinite.

The realization of stepping linear motion of the rotor, the initial state: A-type piezoelectric stack Ⅰ, Ⅱ, Ⅲ, B-type piezoelectric stack Ⅰ-Ⅵ, A-type piezoelectric stack Ⅳ-Ⅸ 3, 11, 19, 5, 15, 23, 31, 35, 40, 45, 50, 51, 56, 57, and 62 are all uncharged, the system is in a free state, and the rotor 1 is also in a swimming state at this time; the B-type piezoelectric stack packaged at the bottom of the stator Stack Ⅵ, B-type piezoelectric stack Ⅴ, B-type piezoelectric stack Ⅳ 31, 35, 40 are energized and elongated, because the second layer of the stator is fixed to the shell, and the thin-walled flexible hinge is used between the second layer and the third layer of the stator connected, and one end of B-type piezoelectric stack VI, B-type piezoelectric stack V, and B-type piezoelectric stack IV 31, 35, and 40 passes through B-type wedge block V, A-type wedge block IV, and B-type wedge block VI , A-type wedge Ⅴ, A-type wedge Ⅵ, B-type wedge Ⅶ 32, 33, 36, 37, 38, 39 are connected to the bottom of the stator, and the other end passes through the round hole reserved in the third layer of the stator, and the top is on the The lower surface of the second layer of the stator, so when the B-type piezoelectric stack Ⅵ, B-type piezoelectric stack Ⅴ, and B-type piezoelectric stack Ⅳ 31, 35, 40 are energized and stretched, the third layer of the stator and the stator The bottom makes a linear motion downward relative to the second layer of the stator; the A-type piezoelectric stacks IV, IX, VII 45, 56, and 62 encapsulated in the third layer of the stator are energized and elongated, and the rotor and the The third layer of the stator is clamped tightly; the B-type piezoelectric stack VI, B-type piezoelectric stack V, and B-type piezoelectric stack IV 31, 35, and 40 encapsulated in the bottom of the stator are de-energized, so that the third layer of the stator and the bottom of the stator Under the action of the flexible hinge, it moves upward relative to the second layer of the stator and returns to the initial state, and because the rotor and the third layer of the stator are clamped by the flexible hinge, the rotor makes an upward linear motion relative to the second layer of the stator: packaged in The A-type piezoelectric stacks I, II, III, VIII, VI, V3, 11, 19, 50, 51, and 57 of the first and second layers of the stator are energized, so that the rotor and the first and second layers of the stator are both Clamp tightly; A-type piezoelectric stacks IV, IX, VII 45, 56, and 62 encapsulated in the third layer of the stator are de-energized. In this way, one step of the stepping linear motion of the rotor is completed, and repeating the above operations can make the rotor perform stepping linear motion along a fixed direction.

The rotor 1 is used to complete power and load output, and the external output components can be connected to the rotor 1 through corresponding connection methods. The movement of the whole multi-degree-of-freedom drive has strict timing logic. The maximum angular displacement of the rotor in a single step rotation is on the order of 10 ² μrad; the maximum linear displacement of the rotor in a single step is on the order of 10 μm, and the precision is extremely high. Due to the piezoelectric stack drive, its output load is relatively large.

Claims (5)

1. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level comprises rotor (1) and stator (2), and it is characterized in that: described rotor (1) is a rotating shaft, and the output of axle has the axis hole interference fits at screwed hole and stator (2) middle part;

Described stator (2) comprises first, second and third layer of stator that is embedded with piezoelectric stack clamp flexible hinge respectively and is embedded with the stator bottom of vertical piezoelectric stack; Wherein partly by three clamp flexible hinges and rotor (1) clamp, three clamp flexible hinges realize that by A type piezoelectric stack I, II, the III (3,11,19) that embeds the stator ground floor clamp drives respectively to the stator ground floor near axis hole; Screw threads for fastening A type wedge I, this A type piezoelectric stack I (3) of Type B wedge I (6,7) pretension, screw threads for fastening A type wedge II, Type B wedge II (14,13) pretension A type piezoelectric stack II (11), screw threads for fastening A type wedge III, Type B wedge III (21,20) pretension A type piezoelectric stack III (19), three flexible hinges have been formed the three-pawl type self-centering piezoelectricity clamp structure of stator ground floor; Second and third layer of stator clamp, pre-pressing structure with the said stator ground floor respectively is identical, and first and second interlayer of stator is connected by three place's thin shelf flexible hinges, and second and third interlayer of stator is connected by three place's thin shelf flexible hinges; The stator bottom is the linear drives part, its inside is embedded with Type B piezoelectric stack IV, V, VI (31,35,40), screw threads for fastening A type wedge IV, Type B wedge V (33,32) this Type B piezoelectric stack IV (31) of pretension, screw threads for fastening A type wedge V, Type B wedge VI (37,36) pretension Type B piezoelectric stack V (35), screw threads for fastening A type wedge VI, Type B wedge VII (38,39) pretension Type B piezoelectric stack VI (40), this Type B piezoelectric stack IV, V, VI (31,35,40) pass the circular hole of reserving in the 3rd layer of the stator respectively, withstand on the lower surface of the stator second layer; The periphery of first and second layer of stator is embedded with three rotation Drive Structure, specifically be to drive indentation I, II, III (8,16,24) to be embedded in interference fit in the stator second layer, Type B piezoelectric stack I, II, III (5,15, a 23) end are separately fixed at the upper strata that drives indentation I, II, III (8,16,24), and the other end withstands on the groove side of stator ground floor.

2. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1, it is characterized in that: described rotor (1) is no winding structure.

3. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1 and 2 is characterized in that: described rotor (1) is the rotating shaft of type variable interface.

4. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1 is characterized in that: described rotor (1) is realized rotation or movement under the different frequency by A type piezoelectric stack I ~ IX (3,11,19,45,50,51,56,57,62).

5. the bionical accurate rotating driving device of multiple degrees of freedom micro/nano level according to claim 1 is characterized in that: the stator second layer of described stator (2) is fixed with external shell by hold-down screw I, II, III, IV, V, VI (4,9,12,17,22,25).

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