CN115955141B - Integrated two-degree-of-freedom stepping actuator based on piezoelectric driving - Google Patents
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Abstract
The application discloses integrated two-degree-of-freedom stepping actuator based on piezoelectric drive relates to piezoelectric motor technical field, including stator, guide rail, actuating mechanism and moving rotor four parts, sliding guide includes guide rail A and guide rail B, guide rail A and guide rail B symmetry set up on flexible mechanism lower surface, guide rail A, guide rail B and flexible mechanism lower surface constitute the guide rail spout, the stator assemble in the guide rail spout, actuating mechanism includes flexible mechanism, piezoceramics A and piezoceramics B, flexible mechanism includes moving rotor mount pad, board type flexible hinge, right circular flexible hinge and flexible mounting frame. The invention utilizes the inverse piezoelectric effect of two piezoelectric ceramics to push the flexible mechanism to generate periodic deformation, and further drives the movable rotor to generate linear displacement and rotation angle displacement output, thereby realizing linear-rotation two-degree-of-freedom motion.
Description
Technical Field
The invention belongs to the technical field of piezoelectric motors, and particularly relates to an integrated two-degree-of-freedom stepping actuator based on piezoelectric driving.
Background
Along with the gradual development of application potential of the single-degree-of-freedom piezoelectric actuator in the technical fields of aerospace, optical instruments, biomedical science, integrated circuits and the like, the multi-degree-of-freedom piezoelectric actuator also becomes a hot spot for research of a plurality of scientific researchers. The traditional multi-degree-of-freedom actuator mainly uses an electromagnetic motor as a driving force, and the positioning accuracy of the driving mode is low and electromagnetic interference exists. Compared with the traditional multi-degree-of-freedom actuator, the multi-degree-of-freedom piezoelectric actuator based on the inverse piezoelectric effect of the piezoelectric material has the advantages of simple structure, quick response, high precision, no magnetic field interference and the like. In addition, the traditional multi-degree-of-freedom actuator needs a plurality of parts to be matched together, the control difficulty is high, and the cost of the micro actuator for realizing power output through a mechanical structure is high.
Disclosure of Invention
The invention aims at solving the problems that the traditional multi-degree-of-freedom actuator has complex structure, large occupied space, easy electromagnetic interference, complex control difficulty, high cost of the micro actuator for realizing power output through a mechanical structure and the like. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving is provided, piezoelectric ceramics are adopted as a driving unit according to a stepping principle, linear motion along the direction of a guide rail and rotary motion of a rotating shaft of a winding rotor can be realized, and the output precision of the actuator can be controlled by adjusting the tightening degree of an adjusting bolt.
The specific technical scheme is as follows: the integrated two-degree-of-freedom stepping actuator based on piezoelectric driving comprises a stator, a sliding guide rail, a driving mechanism and a moving rotor.
The sliding guide rail comprises a guide rail A and a guide rail B, the guide rail A and the guide rail B are symmetrically arranged on the lower surface of the flexible mechanism, the guide rail A, the guide rail B and the lower surface of the flexible mechanism form a guide rail chute, and the stator is assembled in the guide rail chute;
the driving mechanism comprises a flexible mechanism, piezoelectric ceramics A and piezoelectric ceramics B, the flexible mechanism comprises a movable rotor mounting seat, a plate-type flexible hinge, a right circular flexible hinge and a flexible mounting frame, two pairs of plate-type flexible hinges are mounted on the inner side of one end of the flexible mounting frame, each pair of plate-type flexible hinges form a piezoelectric ceramics mounting groove, the two pairs of plate-type flexible hinges are respectively connected with the movable rotor mounting seat through a right circular flexible hinge, and the movable rotor is mounted on the movable rotor mounting seat.
Further, the two piezoelectric ceramic mounting grooves are symmetrically distributed about the central axis of the flexible mechanism and are respectively positioned at two sides of the movable rotor mounting seat.
Further, the flexible mechanism is integrally machined from a unitary piece of resilient metallic material.
Further, the movable rotor is a part with a rotating shaft, the movable rotor is installed on the movable rotor installation seat through the rotating shaft, and the rotating shaft of the movable rotor is in transition fit with a central hole of the movable rotor installation seat.
Further, the rotating shaft of the movable rotor sequentially penetrates through the gasket, the central hole of the rotor mounting seat, the gasket, the elastic ring and the other gasket and then is matched and locked with the nut.
Further, an adjusting bolt is arranged on the outer side face of each of the guide rail A and the guide rail B.
Further, the driving mechanism further comprises a pre-tightening gasket A, a pre-tightening bolt A, a pre-tightening gasket B and a pre-tightening bolt B, wherein the pre-tightening gasket A and the pre-tightening bolt A are used for adjusting the pre-tightening force of the piezoelectric ceramics A, and the pre-tightening gasket B and the pre-tightening bolt B are used for adjusting the pre-tightening force of the piezoelectric ceramics B.
Further, the elastic metal material is 65Mn spring steel subjected to quenching treatment.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention discloses an integrated two-degree-of-freedom stepping actuator based on piezoelectric driving, which is specially designed to comprise a movable rotor mounting seat, a plate-type flexible hinge, a right circular flexible hinge, a flexible mechanism of a flexible mounting frame and a guide rail chute matched with a stator, wherein the two pairs of plate-type flexible hinges are pushed to realize periodic telescopic deformation by utilizing time sequence strain of two piezoelectric ceramics under the excitation of two saw-tooth wave driving voltages in phase and out of phase, and further the movable rotor mounting seat is driven to generate linear displacement or rotate around a central hole of the movable rotor mounting seat by the two right circular flexible hinges, and the movable rotor can realize linear-rotary two-degree-of-freedom movement under the action of friction force or friction moment of the central hole on a movable rotor rotating shaft;
2. the stator is characterized in that the rotor can realize linear motion along the advancing direction of the stator by applying in-phase slowly-pressurizing and rapidly-depressurizing sawtooth wave driving signals to two symmetrically-arranged piezoelectric ceramics, and can realize rotary motion with the rotating shaft as the center by applying out-phase sawtooth wave driving signals to the symmetrically-arranged piezoelectric ceramics, and when the opposite sawtooth wave driving signals are adopted for the two mutually-matched piezoelectric ceramics, the rotor can realize linear motion or rotary motion in opposite directions;
3. the piezoelectric ceramic is used as a driving unit, so that the power integration degree is high, the structure is simple, the flexible control is convenient, the electromagnetic interference influence can be eliminated, and the reliability of the actuator is high;
4. the invention has good application prospect in the technical fields of aerospace, optical instruments, biomedical treatment, integrated circuits and the like, and the motion output of two degrees of freedom of linear-rotation further widens the application range of the multi-degree-of-freedom piezoelectric actuator in the field of precise motor driving.
Drawings
FIG. 1 is a schematic perspective view of an integrated two-degree-of-freedom stepper actuator based on piezoelectric actuation;
FIG. 2 is a top view of an integrated two degree of freedom stepper actuator based on piezoelectric actuation;
FIG. 3 is a schematic diagram of an assembly of a movable rotor and a flexible mechanism of an integrated two-degree-of-freedom stepper actuator based on piezoelectric actuation;
FIG. 4 is a top view of the flexible mechanism of the piezoelectric driven integrated two-degree-of-freedom stepper actuator of FIG. 1;
FIG. 5 is a waveform diagram of a drive signal for an integrated two-degree-of-freedom stepper actuator based on piezoelectric drive, wherein (a) is an in-phase sawtooth signal and (b) is an out-of-phase sawtooth signal;
FIG. 6 is a schematic diagram of the drive of an integrated two-degree-of-freedom stepper actuator based on piezoelectric actuation to produce a linear displacement output;
FIG. 7 is a schematic diagram of the drive of an integrated two-degree-of-freedom stepper actuator based on piezoelectric actuation to produce rotational angular displacement output;
in the figure: 1. pre-tightening the bolt A; 2. pre-tightening the gasket A; 3. piezoelectric ceramics A; 4. an adjusting bolt A; 5. a guide rail A; 6. a stator; 7. a rotor; 8. a flexible mechanism; 9. piezoelectric ceramics B; 10. pre-tightening a gasket B; 11. a guide rail B; 12. pre-tightening a bolt B; 13. an adjusting bolt B; 14. a movable rotor mounting seat; 15. a plate-type flexible hinge; 16. a perfect circle flexible hinge; 17. an elastic ring; 18. a gasket; 19. and (5) a flexible mounting frame.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Example 1
Referring to fig. 1 to 4, the piezoelectric driving-based integrated two-degree-of-freedom stepping actuator according to the present embodiment includes four parts including a stator 6, a sliding rail, a driving mechanism, and a moving rotor 7.
The stator 6 can be fixedly connected with the workbench through bolts, and plays a role in guiding the whole actuator;
the sliding guide rail comprises a guide rail A5 and a guide rail B11, wherein the guide rail A5 and the guide rail B11 are symmetrically fixed on the lower surface of the flexible mechanism 8 through bolts, the guide rail A5, the guide rail B11 and the lower surface of the flexible mechanism 8 form a guide rail chute, the stator 6 is assembled in the guide rail chute, the whole actuator can output linear movement displacement along the extending direction of the stator 6 under the action of the sliding guide rail, an adjusting bolt A4 is arranged on the outer side surface of the guide rail A5, an adjusting bolt B13 is arranged on the outer side surface of the guide rail B11, the guide rail A5 and the adjusting bolt A4 are matched for working, the guide rail B11 and the adjusting bolt B13 are matched for working, the friction force between the stator 6 and the guide rail is controlled through adjusting the positions of the adjusting bolt A4 and the adjusting bolt B13 in the working process, and then the stepping precision of the linear displacement of the actuator is adjusted.
As shown in fig. 1, the driving mechanism includes a flexible mechanism 8, a piezoelectric ceramic A3, a pretensioning spacer A2, a pretensioning bolt A1, a piezoelectric ceramic B9, a pretensioning spacer B10, and a pretensioning bolt B12. As shown in fig. 4, the flexible mechanism 8 includes a movable rotor mounting seat 14, a plate-type flexible hinge 15, a right circular flexible hinge 16 and a flexible mounting frame 19, the flexible mounting frame 19 is square, and a guide rail A5 and a guide rail B11 are respectively fixed on the lower surfaces of the side frames on both sides of the flexible mounting frame 19. Two pairs of plate-type flexible hinges 15 are arranged on the inner side of one end of the flexible mounting frame 19, each pair of plate-type flexible hinges 15 form a piezoelectric ceramic mounting groove, the two piezoelectric ceramic mounting grooves are symmetrically distributed about the central axis of the flexible mechanism 8, the two pairs of plate-type flexible hinges 15 are respectively connected with the movable rotor mounting seat 14 through a perfect circle type flexible hinge 16, namely one end of each of the two piezoelectric ceramic mounting grooves is connected with the flexible mounting frame 19, the other end of each of the two piezoelectric ceramic mounting grooves is connected with the movable rotor mounting seat 14 through two perfect circle type flexible hinges 16, and the two pairs of plate-type flexible hinges 15 are respectively positioned on two sides of the movable rotor mounting seat 14; the piezoelectric ceramic A3 is arranged in the mounting groove on the right side of the flexible mechanism 8, the initial pre-tightening force of the piezoelectric ceramic A3 can be adjusted through the pre-tightening gasket A2 and the pre-tightening bolt A1, the piezoelectric ceramic B9 is arranged in the mounting groove on the left side of the flexible mechanism 8, and the initial pre-tightening force of the piezoelectric ceramic B9 can be adjusted through the pre-tightening gasket B10 and the pre-tightening bolt B12.
Further, in order to ensure that the plate-type flexible hinge 15, the right circular flexible hinge 16 and the flexible mounting frame 19 have better deformation accuracy, the whole flexible mechanism 8 is integrally formed by a whole piece of elastic metal material, and the elastic metal material is 65Mn spring steel subjected to quenching treatment.
The movable rotor 7 is mounted on the movable rotor mounting seat 14, and the specific connection modes can be selected from threaded connection, clamping connection, sleeving connection and the like.
Specifically, the whole moving rotor 7 is a part with a rotating shaft, preferably a disc part with a rotating shaft, wherein one end of the rotating shaft away from the disc is provided with threads, as shown in fig. 3, when the moving rotor 7 is assembled, the rotating shaft part of the moving rotor 7 sequentially passes through the gasket 18, the central hole of the moving rotor mounting seat 14, the gasket 18, the elastic ring 17 and the other gasket 18 to be finally matched and locked with a nut, wherein the rotating shaft of the moving rotor 7 and the central hole of the moving rotor mounting seat 14 are in transition fit, the diameter of the central hole is slightly larger than that of the rotating shaft, and the friction contact between the outer surface of the rotating shaft and the inner surface of the central hole is ensured. In addition, the pre-tightening friction force between the movable rotor 7 and the movable rotor mounting seat 14 can be adjusted by adjusting the tightening degree of the nut, the application of the elastic ring 17 ensures continuous friction force between the movable rotor 7 and the movable rotor mounting seat 14, the problem that the whole motion output efficiency of the actuator is influenced due to loosening of the nut in the long-term working process of the actuator is avoided, and the output precision of the rotation angular displacement of the actuator is further improved.
The load can be fixedly arranged in the threaded hole on the upper surface of the disc of the movable rotor 7 through bolts, linear displacement output along the extending direction of the stator 6 or rotation angle displacement output taking the rotating shaft of the movable rotor 7 as the center can be realized by utilizing the mutual matching of the driving mechanism, the sliding guide rail and the movable rotor 7, and finally, the two-degree-of-freedom motion of the integrated stepping actuator is realized.
In this embodiment, the driving mechanism is divided into A, B parts which are symmetrically arranged, and the piezoelectric ceramic mounting grooves on the left and right sides of the driving mechanism have identical structures and are symmetrically distributed with the center line of the flexible mechanism 8 as an axis. The piezoelectric ceramic A3 and the piezoelectric ceramic B9 can drive the flexible mounting frame 19, the plate-type flexible hinge 15, the perfect circular flexible hinge 16 and the movable rotor mounting seat to output linear motion along the length direction of the stator 6 or rotate around the shaft by taking the rotating shaft of the movable rotor 7 as the center under the drive of different driving signals, so that the movable rotor 7 is driven to realize the motion output of two degrees of freedom of the linear motion and the rotation under the action of friction force or friction moment. The movable rotor 7 and the flexible mechanism 8 are assembled together in a mode of bolts, gaskets 18 and elastic rings 17, so that the problem that the whole movement output efficiency of the actuator is influenced due to loosening of nuts in the long-term working process of the actuator is avoided, and the output precision of the rotation angular displacement of the actuator is further improved.
Example 2
The present embodiment will be described in detail with reference to fig. 5 to 7, and the present embodiment will be further described with reference to an integrated two-degree-of-freedom stepping actuator based on piezoelectric driving as described in example 1. In this embodiment, the piezoelectric ceramic A3 and the piezoelectric ceramic B9 each use a sawtooth voltage driving signal. When the in-phase sawtooth wave signals shown in fig. 5 (a) are simultaneously applied to the piezoelectric ceramic A3 and the piezoelectric ceramic B9, the movable rotor 7 realizes linear displacement output along the advancing direction of the stator 6, and the specific working principle is shown in fig. 6; when the out-of-phase sawtooth wave signals shown in fig. 5 (B) are applied to the piezoelectric ceramic A3 and the piezoelectric ceramic B9, the movable rotor 7 realizes the output of the rotational angular displacement around the shaft as the center, and the specific working principle is shown in fig. 7.
As shown in fig. 6 to 7, the specific working procedure of the present invention is as follows:
1. as shown in fig. 6, when the same-phase sawtooth wave driving voltage excitation signal shown in fig. 5 (a) is applied to both the piezoelectric ceramics A3 and B9, the initial state voltage of the two piezoelectric ceramics is 0, and in the original long state, when the voltage slowly rises to U, the two piezoelectric ceramics slowly extend by a distance L1 under the reverse piezoelectric effect, at this time, the two pairs of plate-shaped flexible hinges 15 deform by a distance L1 under the pushing of the piezoelectric ceramics, and the movable rotor mounting base 14 generates linear displacement L1 under the driving of the plate-shaped flexible hinges 15 and the right circular flexible hinges 16, so that the movable rotor 7 generates linear displacement by a distance L1 under the pushing of the movable rotor mounting base 14. When the driving voltage drops to 0 sharply, the two piezoelectric ceramics lose voltage excitation and quickly recover to original length, the plate-type flexible hinge 15 recovers to original position under the condition of no piezoelectric ceramic pushing force, at the moment, the moving rotor 7 generates tiny displacement L2 backwards under the load and the self-weight inertia effect, through the driving of a sawtooth wave waveform signal, the moving rotor 7 generates linear displacement (L1-L2) relative to the stator 6, namely the stepping precision of the output linear displacement of the piezoelectric actuator is (L1-L2), and the pretightening friction force between the sliding guide rail and the stator 6 can be controlled by adjusting the screwing degree of the adjusting bolt A4 and the adjusting bolt B13, so that the linear displacement output precision of the actuator is further adjusted. By applying opposite sawtooth wave driving signals to the piezoelectric ceramic A3 and the piezoelectric ceramic B9, the movable rotor 7 can generate displacement output of opposite movement;
2. as shown in fig. 7, when the out-of-phase sawtooth wave signal shown in fig. 5 (B) is applied to the piezoelectric ceramic A3 and the piezoelectric ceramic B9, the piezoelectric ceramic A3 initial state signal voltage is 0, and the piezoelectric ceramic B9 initial state signal voltage is 0, both of which are in the original length state. Along with the gradual increase of the driving voltage of the piezoelectric ceramic A3 to U, the driving voltage of the piezoelectric ceramic B9 is gradually reduced to-U, the displacement output of the piezoelectric ceramic A3 is L, and the output displacement of the piezoelectric ceramic B9 is-L under the inverse piezoelectric effect of the piezoelectric ceramic, namely the shortening amount of the piezoelectric ceramic is L. In the process, the movable rotor mounting seat 14 is driven by the moment generated by the deformation of the piezoelectric ceramic mounting groove to rotate anticlockwise along the central axis by an angle theta 1 The movable rotor 7 follows the rotation angle theta of the mounting seat under the inertia effect 1 . When the driving voltage of the piezoelectric ceramic A3 suddenly decreases to 0 and the driving voltage of the piezoelectric ceramic B9 suddenly increases to 0, the piezoelectric ceramic A3 and the piezoelectric ceramic B9 quickly recover to their original lengths, the movable rotor mounting base 14 is driven by the plate-type flexible hinge 15 and the right circular flexible hinge 16 to return to the initial position, and the rotation shaft of the movable rotor 7 rotates clockwise by an angle θ under the friction action of the central hole of the movable rotor mounting base 14 2 . Driven by a sawtooth waveform signal, the movable rotor 7 generates anticlockwise angular displacement (theta) relative to the movable rotor mounting seat 14 1 -θ 2 ) I.e. the piezoelectric actuator outputs a rotation angle displacement with a stepping accuracy (theta) 1 -θ 2 ). By applying opposite sawtooth wave driving signals to the piezoelectric ceramics A3 and B9, the movable rotor 7 can realize rotation angular displacement output in the clockwise direction about its rotation axis.
The piezoelectric actuator is driven by an in-phase sawtooth waveform, under the driving of two piezoelectric ceramics, the movable rotor 7 can generate linear displacement output along the advancing or retreating direction of the stator 6, and under the driving of an out-phase sawtooth waveform signal, the movable rotor 7 can generate rotation angle displacement output along the anticlockwise or clockwise direction around the rotating shaft. The piezoelectric actuator can realize linear-rotary two-degree-of-freedom motion by cycling the process.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (7)
1. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving is characterized by comprising a stator (6), a sliding guide rail, a driving mechanism and a movable rotor (7);
the sliding guide rail comprises a guide rail A (5) and a guide rail B (11), the guide rail A (5) and the guide rail B (11) are symmetrically arranged on the lower surface of the flexible mechanism (8), the guide rail A (5), the guide rail B (11) and the lower surface of the flexible mechanism (8) form a guide rail chute, and the stator (6) is assembled in the guide rail chute;
the driving mechanism comprises a flexible mechanism (8), piezoelectric ceramics A (3) and piezoelectric ceramics B (9), the flexible mechanism (8) comprises a movable rotor mounting seat (14), a plate-type flexible hinge (15), a perfect circle type flexible hinge (16) and a flexible mounting frame (19), two pairs of plate-type flexible hinges (15) are mounted on the inner side of one end of the flexible mounting frame (19), each pair of plate-type flexible hinges (15) form a piezoelectric ceramics mounting groove, the two pairs of plate-type flexible hinges (15) are respectively connected with a movable rotor mounting seat (14) through the perfect circle type flexible hinge (16), the movable rotor (7) is mounted on the movable rotor mounting seat (14), the movable rotor (7) is a part with a rotating shaft, the movable rotor (7) is mounted on the movable rotor mounting seat (14) through the rotating shaft, and the rotating shaft of the movable rotor (7) is in friction fit with a center hole of the movable rotor mounting seat (14).
2. The piezoelectric-driven integrated two-degree-of-freedom stepper actuator of claim 1, wherein the two piezoelectric ceramic mounting grooves are symmetrically distributed about the central axis of the flexible mechanism (8) and are respectively located on two sides of the movable rotor mounting seat (14).
3. The piezoelectric-driven integrated two-degree-of-freedom stepper actuator of claim 2, wherein the flexible mechanism (8) is integrally machined from a single piece of resilient metallic material.
4. The piezoelectric-driven integrated two-degree-of-freedom stepper actuator according to claim 1, wherein the rotating shaft of the moving rotor (7) sequentially passes through the gasket (18), the central hole of the moving rotor mounting seat (14), the gasket (18), the elastic ring (17) and the other gasket (18) and then is matched and locked with the nut.
5. The piezoelectric-driven integrated two-degree-of-freedom stepper actuator of claim 1, wherein the outer side surfaces of the guide rail a (5) and the guide rail B (11) are respectively provided with an adjusting bolt.
6. The integrated two-degree-of-freedom stepper actuator based on piezoelectric driving according to claim 1, wherein the driving mechanism further comprises a pre-tightening gasket a (2), a pre-tightening bolt a (1), a pre-tightening gasket B (10) and a pre-tightening bolt B (12), wherein the pre-tightening gasket a (2) and the pre-tightening bolt a (1) are used for adjusting the pre-tightening force of the piezoelectric ceramic a (3), and the pre-tightening gasket B (10) and the pre-tightening bolt B (12) are used for adjusting the pre-tightening force of the piezoelectric ceramic B (9).
7. The piezoelectric-driven integrated two-degree-of-freedom stepper actuator of claim 3 wherein the resilient metallic material is quenched 65Mn spring steel.
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| CN116191927B (en) * | 2023-05-04 | 2023-07-04 | 吉林大学 | Planar three-degree-of-freedom actuator based on piezoelectric bimorph driving |
| CN116388609B (en) * | 2023-05-26 | 2023-08-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
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| CN115242121A (en) * | 2022-08-05 | 2022-10-25 | 吉林大学 | Piezoelectric stepping actuator based on synchronous double-foot driving |
| CN115566930A (en) * | 2022-11-10 | 2023-01-03 | 吉林大学 | Large-stroke piezoelectric actuator capable of outputting continuous angular displacement |
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| CN102291040B (en) * | 2011-07-22 | 2013-10-09 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN103916045B (en) * | 2014-02-21 | 2015-02-25 | 西安交通大学 | Stepping type rotation driving device and method on basis of piezoelectric ceramics |
| CN104362889B (en) * | 2014-11-14 | 2015-08-05 | 西安交通大学 | Self adaptation stepping angular displacement piezoelectric actuator and realize stepping rotate method |
| CN107953120B (en) * | 2018-01-12 | 2019-08-27 | 长春工业大学 | Piezoelectricity stick-slip micro-nano angular displacement platform and its driving method |
| CN112994515B (en) * | 2021-02-03 | 2022-03-01 | 哈尔滨工业大学 | Wide-speed-range two-degree-of-freedom large-scale piezoelectric platform and excitation method thereof |
| CN112865597A (en) * | 2021-03-30 | 2021-05-28 | 吉林大学 | Time-lag effect inertial piezoelectric driver based on flexible hinge |
| CN115441769B (en) * | 2022-11-07 | 2022-12-30 | 吉林大学 | Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115242121A (en) * | 2022-08-05 | 2022-10-25 | 吉林大学 | Piezoelectric stepping actuator based on synchronous double-foot driving |
| CN115566930A (en) * | 2022-11-10 | 2023-01-03 | 吉林大学 | Large-stroke piezoelectric actuator capable of outputting continuous angular displacement |
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