CN106911264B - Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method - Google Patents

Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method Download PDF

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Publication number
CN106911264B
CN106911264B CN201710213572.1A CN201710213572A CN106911264B CN 106911264 B CN106911264 B CN 106911264B CN 201710213572 A CN201710213572 A CN 201710213572A CN 106911264 B CN106911264 B CN 106911264B
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output shaft
actuating arm
concave surface
arc concave
circular arc
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CN106911264A (en
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邵妍
徐明龙
邵恕宝
肖瑞江
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Xi'an Langwei Technology Co ltd
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Xian Jiaotong University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details

Abstract

Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method, the actuator are made of pedestal, bearing, output shaft, actuation surface plate and piezoelectric pile;Chassis left side is equipped with installation base, and the pedestal upper right corner is equipped with bearing block, and the Bearing inner interference fit being installed in bearing block has output shaft;The installation base of pedestal is fixedly arranged above the actuation surface plate being integrally machined, the actuation surface plate is made of longitudinal plate, actuating arm, diamond shape ring and flexible hinge, wherein it is connected through horizontal flexibility hinge with longitudinal plate on the left of actuating arm, actuating arm is connected through longitudinal flexible hinge with diamond shape ring upper end close to the lower section of horizontal flexibility hinged end, interference fit has piezoelectric pile inside the diamond shape ring, in addition actuating arm end is equipped with circular arc concave surface, and circular arc concave surface is concentric with output shaft and the two fits closely;Structure of the invention is novel, easy to process, in conjunction with inertial drive and lever amplification principle, has actuation fast accurate, the small and exquisite feature of the light letter of structure.

Description

Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method
Technical field
The invention belongs to inertial piezoelectric Actuator technique fields, and in particular to a kind of small-sized single piezoelectric stack drive-type is double To rotatory inertia actuator and actuation method.
Background technique
Inertia-type piezoelectric actuator is a kind of using asymmetrical driving signal, asymmetrical mechanical clamping structure or non-right Frictional force be referred to as control mode, the mechanism to form driving is moved by inertia impact.
Compared with other kinds of Piezoelectric Driving, inertial piezoelectric actuator simple, fast response time, resolution ratio with structure The major advantages such as high, big stroke, movement velocity be fast and at low cost, it can be achieved that larger stroke and have nanoscale positioning accurate simultaneously Degree.Therefore, inertial piezoelectric actuator is applicable to the occasion of high-resolution, big stroke.Currently, scientific worker successfully will Inertial piezoelectric actuator is applied to high accuracy positioning mechanism, multiple degrees of freedom driver, micromachine person joint and micro-operation hand Equal fields.
Generally, rotary inertia piezoelectric actuator is usually using twin lamella as driving element, and structure is complicated and intensity It is low;It at present in most rotary inertia actuator, only relies on line contact and carries out clamper, be easy clamper due to surface abrasion and lose Effect;In addition, most of rotatory inertia actuator need high voltage that could export small step pitch, efficiency is lower.
Summary of the invention
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of small-sized single piezo stacks Heap drive-type bidirectional rotation inertia actuator and actuation method are enable to respond quickly simultaneously stabilized driving under the conditions of high-frequency drive Load bidirectional rotation;This actuator configurations is novel, easy to process, in conjunction with inertial drive and lever amplification principle, has actuation high Effect is accurate, the small and exquisite feature of the light letter of structure.
In order to achieve the above object, the present invention adopts the following technical scheme:
A kind of small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator, including pedestal 14, bearing 16, output shaft 13, actuation surface plate 1 and piezoelectric pile 9;Installation base 12 is equipped on the left of the pedestal 14,14 upper right corner of pedestal is equipped with bearing block 15, interference fit has output shaft 13 inside the bearing 16 being installed in bearing block 15;12 top of installation base of pedestal 14 is through pacifying Cartridge screw 11 is fixed with the actuation surface plate 1 being integrally machined, the actuation surface plate 1 by longitudinal plate 2, actuating arm 3, diamond shape ring 4 with And flexible hinge 5 forms, wherein 3 left side of actuating arm is connected through horizontal flexibility hinge 5-1 with longitudinal plate 2, and actuating arm 3 is close to horizontal The end flexible hinge 5-1 is connected through longitudinal flexible hinge 5-2 with 4 one end of diamond shape ring, and interference fit has piezoelectric pile 9 inside diamond shape ring 4, 4 other end of diamond shape ring be equipped with installation through-hole 10, mounting screw 11-3 pass through installation through-hole 10 and with the installation base on pedestal 14 12 are threadedly coupled, and in addition 3 end of actuating arm is equipped with circular arc concave surface 6, and the circular arc concave surface 6 is concentric with output shaft 13 and the two is close Fitting.
It is provided at the 2 inside face horizontal flexibility hinge 5-1 of longitudinal plate and adjusts straight trough mouth 7, adjust screw 8 by longitudinal plate 2 left side screw in simultaneously be closely against adjust 7 right wall of straight trough mouth, change adjust screw 8 screw-in amount, 3 circular arc concave surface 6 of actuating arm with it is defeated Normal pressure between shaft 13 changes, and frictional force between the two changes correspondingly, i.e. the clamper torque of actuator is adjusted.It is described Diamond shape ring 4 is set to actuating arm 3 close to the end horizontal flexibility hinge 5-1, and when piezoelectric pile 9 extends, actuating arm 3 is around horizontal flexibility hinge 5-1 rotation, 6 output displacement of circular arc concave surface of 3 end of actuating arm, the displacement are 9 elongation of piezoelectric pile gained after lever amplification.
The actuation method of small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator, it is defeated when being not powered on Shaft 13 is in clamping state;To rotate clockwise output shaft 13, the first step slowly applies voltage, piezoelectric pile to piezoelectric pile 9 9, along its axial slowly elongation, drive actuating arm 3 to rotate counterclockwise around horizontal flexibility hinge 5-1, at this time the circle of 3 end of actuating arm Arc concave surface 6 because stiction and 13 axial plane of output shaft keep opposing stationary, 13 axial plane of output shaft with actuating arm 3 circular arc concave surface 6 It moves together, and opposite Pivot Point Center generates a small tangential displacement clockwise, and output shaft 13 is pushed to rotate clockwise one A minute angle;Second step, to piezoelectric pile 9, drop electricity, piezoelectric pile 9 are axially shunk rapidly along it rapidly, drive actuating arm 3 around level Flexible hinge 5-1 is rotated clockwise, at this time the stiction between 13 axial plane of the circular arc concave surface 6 of 3 end of actuating arm and output shaft without Faville both hold it is opposing stationary, the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3 occur it is opposite slide, dropping, electrode is short In time, output shaft 13 keeps in situ substantially, and thus output shaft 13 retains a clockwise rotation step pitch;Repeat first and second Step can make output shaft 13 that load continuously be driven to rotate clockwise;Similarly, to rotate output shaft 13 counterclockwise, first Step applies rapidly voltage to piezoelectric pile 9, and piezoelectric pile 9 drives actuating arm 3 around horizontal flexibility hinge 5-1 along its axial elongation rapidly Rotation counterclockwise, the stiction between the circular arc concave surface 6 of 3 end of actuating arm and 13 axial plane of output shaft is unable to maintain that the two phase at this time To static, the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3 occur it is opposite slide, within liter electrode short time, output shaft 13 basic holdings are in situ;Second step, to the slow drop electricity of piezoelectric pile 9, piezoelectric pile 9 along its it is axial slowly shorten, drive actuating arm 3 around Horizontal flexibility hinge 5-1 is rotated clockwise, and the circular arc concave surface 6 of 3 end of actuating arm is because of stiction and 13 axial plane of output shaft at this time Keep opposing stationary, 13 axial plane of output shaft is moved with the circular arc concave surface 6 of actuating arm 3, and opposite Pivot Point Center generates one Small tangential displacement counterclockwise pushes one minute angle of rotation counterclockwise of output shaft 13, and thus output shaft 13 retains one Rotation step pitch counterclockwise;The first and second step is repeated, output shaft 13 can be made continuously to drive load rotation counterclockwise.
Compared to the prior art, the present invention has the advantage that
1) diamond shape ring 4 of the invention is set to actuating arm 3 close to the lower section at the end horizontal flexibility hinge 5-1, when piezoelectric pile 9 is stretched Long, actuating arm 3 is rotated around horizontal flexibility hinge 5-1, and the circular arc concave surface 6 of 3 end of actuating arm drives output shaft 13 to generate tangential position It moves, which is that the elongation of piezoelectric pile 9 utilizes obtained by lever amplification principle through actuating arm 3, can effectively increase output shaft 13 The corner of single step, that improves actuator makees efficiency of movement.
2) adjusting screw 8 of the invention adjusts 7 right wall of straight trough mouth by screwing in and being closely against on the left of longitudinal plate 2, by changing The screw-in amount of modified tone section screw 8, the frictional force between 3 circular arc concave surface 6 of actuating arm and output shaft 13 change correspondingly, i.e. actuator Clamper torque can be adjusted as needed.
3) structure of the invention is compact, small in size, light weight, only needs single piezoelectric stack that can drive by inertial drive principle Dynamic load carries out bidirectional rotation actuation.
Detailed description of the invention
Fig. 1 is structure of the invention top view.
Fig. 2 is actuation surface plate perspective view of the present invention.
Fig. 3 is pedestal perspective view of the present invention.
Fig. 4 is the driving voltage timing diagram that the present invention rotates clockwise.
Fig. 5 is the driving voltage timing diagram that the present invention rotates counterclockwise.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, invention is further described in detail.
As shown in Figure 1 to Figure 3, the small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator of the present invention, including bottom Seat 14, bearing 16, output shaft 13, actuation surface plate 1 and piezoelectric pile 9;Installation base 12, pedestal 14 are wherein equipped on the left of pedestal 14 The upper right corner is equipped with bearing block 15, and interference fit has output shaft 13 inside the bearing 16 being installed in bearing block 15;The peace of pedestal 14 12 top of dress boss is fixed with the actuation surface plate 1 being integrally machined through mounting screw 11, and the actuation surface plate 1 is by longitudinal plate 2, work Swing arm 3, diamond shape ring 4 and flexible hinge 5 form, and wherein 3 left side of actuating arm is connected through horizontal flexibility hinge 5-1 with longitudinal plate 2, Actuating arm 3 is connected through longitudinal flexible hinge 5-2 with 4 upper end of diamond shape ring close to the lower section at the end horizontal flexibility hinge 5-1, diamond shape ring 4 Inside interference fit has piezoelectric pile 9, and 4 lower end of diamond shape ring is equipped with installation through-hole 10, and mounting screw 11-3 passes through installation through-hole 10 simultaneously It is threadedly coupled with the installation base 12 on pedestal 14, in addition 3 end of actuating arm is equipped with circular arc concave surface 6, the circular arc concave surface 6 and output Axis 13 is with one heart and the two fits closely.
As the preferred embodiment of the present invention, adjusting is provided at the 2 inside face horizontal flexibility hinge 5-1 of longitudinal plate Straight trough mouth 7 adjusts screw 8 by screwing in and being closely against on the left of longitudinal plate 2 and adjusts 7 right wall of straight trough mouth, changes the rotation for adjusting screw 8 Enter amount, the normal pressure between 3 circular arc concave surface 6 of actuating arm and output shaft 13 changes, and frictional force between the two changes correspondingly, i.e. actuation The clamper torque of device is adjusted.
As the preferred embodiment of the present invention, the diamond shape ring 4 is set to actuating arm 3 close to horizontal flexibility hinge 5-1 The lower section at end, when piezoelectric pile 9 extends, actuating arm 3 is rotated around horizontal flexibility hinge 5-1, and the circular arc concave surface 6 of 3 end of actuating arm is defeated It is displaced out, which is 9 elongation of piezoelectric pile gained after lever amplification.
As shown in Figure 4 and Figure 5, the actuation side of the small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator of the present invention Method, when being not powered on, output shaft 13 is in clamping state;To rotate clockwise output shaft 13, the first step is slow to piezoelectric pile 9 Apply voltage, piezoelectric pile 9 drives actuating arm 3 to rotate counterclockwise around horizontal flexibility hinge 5-1, at this time along its axial slowly elongation The circular arc concave surface 6 of 3 end of actuating arm is because stiction and the holding of 13 axial plane of output shaft are opposing stationary, and 13 axial plane of output shaft is with actuation The circular arc concave surface 6 of arm 3 moves together, and opposite Pivot Point Center generates a small tangential displacement clockwise, pushes output shaft 13 rotate clockwise a minute angle;Second step, to piezoelectric pile 9, drop electricity, piezoelectric pile 9 are axially shunk rapidly along it rapidly, band Movement swing arm 3 is rotated clockwise around horizontal flexibility hinge 5-1, at this time the circular arc concave surface 6 of 3 end of actuating arm and 13 axial plane of output shaft Between stiction both be unable to maintain that opposing stationary, the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3 occurs relatively sliding Dynamic, within the drop electrode short time, output shaft 13 keeps in situ substantially, and thus output shaft 13 retains a clockwise rotation step Away from;The first and second step is repeated, can make output shaft 13 that load continuously be driven to rotate clockwise;Similarly, to keep output shaft 13 inverse Hour hands rotation, the first step apply rapidly voltage to piezoelectric pile 9, and piezoelectric pile 9 drives actuating arm 3 around water along its axial elongation rapidly Flat flexible hinge 5-1 rotates counterclockwise, at this time the stiction between 13 axial plane of the circular arc concave surface 6 of 3 end of actuating arm and output shaft It is unable to maintain that the two is opposing stationary, sliding relatively occurs in the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3, short in liter electrode Time in, output shaft 13 keeps in situ substantially;Second step, to piezoelectric pile 9, slowly drop is electric, and piezoelectric pile 9 is along its axial slowly contracting It is short, drive actuating arm 3 to rotate clockwise around horizontal flexibility hinge 5-1, the circular arc concave surface 6 of 3 end of actuating arm is because of static friction at this time Power keeps opposing stationary with 13 axial plane of output shaft, and 13 axial plane of output shaft is moved with the circular arc concave surface 6 of actuating arm 3, and opposite Pivot Point Center generates a small tangential displacement counterclockwise, pushes one minute angle of rotation counterclockwise of output shaft 13, thus Output shaft 13 retains a rotation step pitch counterclockwise;The first and second step is repeated, output shaft 13 can be made continuously to drive load inverse Hour hands rotation.

Claims (3)

1. a kind of small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator, it is characterised in that: including pedestal (14), axis Hold (16), output shaft (13), actuation surface plate (1) and piezoelectric pile (9);Installation base (12) wherein are equipped on the left of pedestal (14), Pedestal (14) upper right corner is equipped with bearing block (15), and interference fit has output shaft inside the bearing (16) being installed in bearing block (15) (13);The actuation surface plate (1) being integrally machined is fixed with through mounting screw (11) above the installation base (12) of pedestal (14), it should Actuation surface plate (1) is made of longitudinal plate (2), actuating arm (3), diamond shape ring (4) and flexible hinge (5), wherein actuating arm (3) Left side is connected through horizontal flexibility hinge (5-1) with longitudinal plate (2), and actuating arm (3) is held close to horizontal flexibility hinge (5-1) through longitudinal direction Flexible hinge (5-2) is connected with diamond shape ring (4) one end, there is piezoelectric pile (9) interference fit inside diamond shape ring (4), and diamond shape ring (4) is another One end be equipped with installation through-hole (10), mounting screw (11) pass through installation through-hole (10) and with the installation base (12) on pedestal (14) It is threadedly coupled, in addition actuating arm (3) end is equipped with circular arc concave surface (6), and the circular arc concave surface (6) is concentric with output shaft (13) and two Person fits closely;
It is provided at the internal face horizontal flexibility hinge (5-1) of the longitudinal plate (2) and adjusts straight trough mouth (7), adjust screw (8) by indulging It screws in and is closely against on the left of to plate (2) and adjust straight trough mouth (7) right wall, change the screw-in amount for adjusting screw (8), actuating arm (3) Normal pressure between circular arc concave surface (6) and output shaft (13) changes, and frictional force between the two changes correspondingly, i.e. the clamper of actuator Torque is adjusted.
2. small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator according to claim 1, it is characterised in that: The diamond shape ring (4) is set to actuating arm (3) and holds close to horizontal flexibility hinge (5-1), when piezoelectric pile (9) elongation, actuating arm (3) It is rotated around horizontal flexibility hinge (5-1), circular arc concave surface (6) output displacement of actuating arm (3) end, which is piezoelectric pile (9) Elongation gained after lever amplification.
3. the actuation method of small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator described in claim 1, special Sign is: when being not powered on, output shaft (13) is in clamping state;To rotate clockwise output shaft (13), the first step, to piezoelectricity Heap (9) slowly applies voltage, and piezoelectric pile (9) drives actuating arm (3) around horizontal flexibility hinge (5-1) along its axial slowly elongation Counterclockwise rotation, at this time the circular arc concave surface (6) of actuating arm (3) end because stiction and output shaft (13) axial plane holding it is relatively quiet Only, output shaft (13) axial plane is moved with the circular arc concave surface (6) of actuating arm (3), and Pivot Point Center generation one relatively small Tangential displacement clockwise, push output shaft (13) rotate clockwise a minute angle;Second step is rapid to piezoelectric pile (9) Drop electricity, piezoelectric pile (9) drive actuating arm (3) to rotate clockwise around horizontal flexibility hinge (5-1) along its axial contraction rapidly, this When actuating arm (3) end circular arc concave surface (6) and output shaft (13) axial plane between stiction both be unable to maintain that it is opposing stationary, There is opposite sliding in the circular arc concave surface (6) of output shaft (13) axial plane and actuating arm (3), within the drop electrode short time, output shaft (13) basic to keep in situ, thus output shaft (13) retains a clockwise rotation step pitch;The first and second step is repeated, can be made Output shaft (13) continuously drives load to rotate clockwise;Similarly, to rotate output shaft (13) counterclockwise, the first step is right Piezoelectric pile (9) applies rapidly voltage, and piezoelectric pile (9) drives actuating arm (3) around horizontal flexibility hinge along its axial elongation rapidly (5-1) counterclockwise rotate, at this time the stiction between the circular arc concave surface (6) of actuating arm (3) end and output shaft (13) axial plane without Faville both is held opposing stationary, and opposite sliding occurs in the circular arc concave surface (6) of output shaft (13) axial plane and actuating arm (3), in a liter electricity In the extremely short time, output shaft (13) keeps in situ substantially;Second step, to piezoelectric pile (9), slowly drop is electric, and piezoelectric pile (9) is along it It is axial slowly to shorten, drive actuating arm (3) to rotate clockwise around horizontal flexibility hinge (5-1), at this time the circle of actuating arm (3) end Arc concave surface (6) because stiction and output shaft (13) axial plane keep opposing stationary, output shaft (13) axial plane with actuating arm (3) circle Arc concave surface (6) moves together, and opposite Pivot Point Center generates a small tangential displacement counterclockwise, pushes output shaft (13) inverse Hour hands rotate a minute angle, and thus output shaft (13) retains a rotation step pitch counterclockwise;Repeat the first and second step, energy Output shaft (13) is enough set continuously to drive load rotation counterclockwise.
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Families Citing this family (4)

* Cited by examiner, † Cited by third party
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CN107623461B (en) * 2017-09-05 2018-12-18 西安交通大学 A kind of shearing-type inertial piezoelectric rotary actuator and actuation method
CN107994805A (en) * 2017-11-27 2018-05-04 西安交通大学 Clamper power is adjustable tangential driving rotatory inertia formula piezoelectric actuator and method
CN110707963B (en) * 2019-10-21 2020-11-17 西安交通大学 Self-locking high-thrust linear actuator driven based on inertia type principle and actuating method
CN113258824A (en) * 2021-05-31 2021-08-13 吉林大学 Microminiature stick-slip piezoelectric motor and driving method thereof

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06245557A (en) * 1993-02-15 1994-09-02 Toyo Electric Mfg Co Ltd Ultrasonic motor
US5912527A (en) * 1996-08-05 1999-06-15 Dr. Khaled Karrai Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts Inertial positioner
CN2766450Y (en) * 2004-07-06 2006-03-22 吉林大学 Piezoelectric-type single-degree-of-freedom precision rotary actuator
CN102570900A (en) * 2012-01-18 2012-07-11 哈尔滨工业大学 Piezoelectric-type stepping rotation driver
CN203251240U (en) * 2013-05-13 2013-10-23 吉林大学 Positive pressure adjustable micro nano stick slip inertia drive platform
DE102013204026A1 (en) * 2013-03-08 2014-09-11 Physik Instrumente (Pi) Gmbh & Co. Kg Actuator arrangement for an ultrasonic motor
CN104320016A (en) * 2014-10-13 2015-01-28 吉林大学 Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform
CN205376486U (en) * 2016-01-08 2016-07-06 武汉理工大学 Realize high accuracy rotary motion's microbit and move amplification device
CN106026766A (en) * 2016-06-06 2016-10-12 长春工业大学 Rhombic hinge shifting piece type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor
CN106208806A (en) * 2016-07-06 2016-12-07 西安交通大学 Rotatory inertia piezoelectric actuator and start method containing Double Diamond tandem drive mechanism

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012202945A1 (en) * 2011-03-14 2012-12-13 Smaract Gmbh Method for controlling an inertial drive

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06245557A (en) * 1993-02-15 1994-09-02 Toyo Electric Mfg Co Ltd Ultrasonic motor
US5912527A (en) * 1996-08-05 1999-06-15 Dr. Khaled Karrai Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts Inertial positioner
CN2766450Y (en) * 2004-07-06 2006-03-22 吉林大学 Piezoelectric-type single-degree-of-freedom precision rotary actuator
CN102570900A (en) * 2012-01-18 2012-07-11 哈尔滨工业大学 Piezoelectric-type stepping rotation driver
DE102013204026A1 (en) * 2013-03-08 2014-09-11 Physik Instrumente (Pi) Gmbh & Co. Kg Actuator arrangement for an ultrasonic motor
CN203251240U (en) * 2013-05-13 2013-10-23 吉林大学 Positive pressure adjustable micro nano stick slip inertia drive platform
CN104320016A (en) * 2014-10-13 2015-01-28 吉林大学 Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform
CN205376486U (en) * 2016-01-08 2016-07-06 武汉理工大学 Realize high accuracy rotary motion's microbit and move amplification device
CN106026766A (en) * 2016-06-06 2016-10-12 长春工业大学 Rhombic hinge shifting piece type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor
CN106208806A (en) * 2016-07-06 2016-12-07 西安交通大学 Rotatory inertia piezoelectric actuator and start method containing Double Diamond tandem drive mechanism

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