CN116388609B - Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle - Google Patents
Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle Download PDFInfo
- Publication number
- CN116388609B CN116388609B CN202310602362.7A CN202310602362A CN116388609B CN 116388609 B CN116388609 B CN 116388609B CN 202310602362 A CN202310602362 A CN 202310602362A CN 116388609 B CN116388609 B CN 116388609B
- Authority
- CN
- China
- Prior art keywords
- pretension
- flexible structure
- piezoelectric
- movable rotor
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005452 bending Methods 0.000 claims abstract description 13
- 230000005284 excitation Effects 0.000 claims abstract description 11
- 230000009471 action Effects 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 7
- 239000007769 metal material Substances 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 4
- 229910000639 Spring steel Inorganic materials 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000010791 quenching Methods 0.000 claims description 3
- 230000000171 quenching effect Effects 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/16—Mechanical energy storage, e.g. flywheels or pressurised fluids
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a flat-rotary two-degree-of-freedom piezoelectric actuator driven based on an inertia stepping principle, which belongs to the technical field of precise driving and comprises a base, wherein sliding grooves are formed in guide rails on two sides of the base, two mounting seats are diagonally arranged on the upper surface of a sliding block, the mounting seats are used for fixing one end of a piezoelectric vibrator, sliding tables are formed on two sides of the sliding block, a central hole in the middle part of a flexible structure is matched with a connecting shaft of a movable rotor to realize the action output of the actuator, two sides of the flexible structure are connected with two mounting tables through plate-type flexible hinges, the other end of the piezoelectric vibrator is fixedly connected with the mounting tables, the lower surface of the movable rotor is connected with the connecting shaft, external loads are arranged on the upper surface of the movable rotor, and the bending of the piezoelectric vibrator under the driving of different excitation signals are utilized to drive the plate-type flexible hinges to deform, so that the sliding block and the movable rotor are driven to realize the movement along the extending direction of the sliding grooves and the rotation movement taking the connecting shaft as the center, and the movement output of two degrees of freedom of the plane movement of the actuator is realized.
Description
Technical Field
The invention belongs to the technical field of precise driving, and particularly relates to a flat-rotary two-degree-of-freedom piezoelectric actuator driven based on an inertial stepping principle.
Background
Along with the rapid development of scientific technology, the high-precision driving technology plays an increasingly important role in the related technical fields of aerospace, micro-mechanical systems, bioengineering, optical engineering and the like, and the existing high-precision actuators can be classified into magnetostrictive actuators, piezoelectric ceramic actuators, shape memory alloy actuators and the like according to the types of driving units, wherein the piezoelectric ceramic actuators are widely applied due to the advantages of quick response, no electromagnetic interference, small volume, flexible control and the like. At present, piezoelectric ceramic actuators are mainly divided into piezoelectric stack type piezoelectric crystal plate type piezoelectric ceramic actuators, wherein the piezoelectric stack type piezoelectric ceramic actuators are high in driving voltage and small in output displacement, and the piezoelectric crystal plate type piezoelectric ceramic actuators can achieve larger deformation. The single-degree-of-freedom actuator can not meet a plurality of requirements of the high-tip technical field on efficient, precise and intelligent driving, the piezoelectric wafer actuator provides a new research thought for the research of the multi-degree-of-freedom piezoelectric actuator, and the flat-rotary two-degree-of-freedom piezoelectric actuator driven based on the inertia stepping principle provided by the invention takes the piezoelectric vibrator as a driving unit, has a highly integrated structure, is flexible to control and is not affected by electromagnetic interference.
Disclosure of Invention
The invention aims to provide a flat-rotary two-degree-of-freedom piezoelectric actuator driven based on an inertia stepping principle, which uses a piezoelectric vibrator as a driving unit and combines large-size deformation of a flexible hinge to provide a reliable structural design thought for the two-degree-of-freedom piezoelectric actuator, thereby laying a foundation for wide application of the two-degree-of-freedom piezoelectric actuator.
A flat-rotation two-degree-of-freedom piezoelectric actuator driven based on an inertial stepping principle comprises a base, a sliding block, a piezoelectric vibrator, a flexible structure and a movable rotor;
the base is of a central symmetrical structure, and sliding grooves are formed in guide rails on two sides of the base;
two mounting seats with threaded holes are diagonally arranged on the upper surface of the sliding block, the mounting seats are used for fixing one end of the piezoelectric vibrator, sliding tables matched with the sliding grooves are machined on two sides of the sliding block, and a round hole is machined in the center of the bottom surface of the sliding block;
the central hole in the middle of the flexible structure is matched with the movable rotor connecting shaft to realize the action output of the actuator, two sides of the flexible structure are connected with two mounting tables through plate-type flexible hinges, a threaded hole is formed in the center of each mounting table, the other end of each piezoelectric vibrator is fixedly connected with each mounting table through a fixing bolt, and the flexible structure, the plate-type flexible hinges and the mounting tables can transmit deformation in the deformation process of the excited signals of the piezoelectric vibrator;
the lower surface of the movable rotor is connected with a connecting shaft with internal threads, and the connecting shaft is connected with an adjusting bolt through a central hole, an elastic ring and a gasket in the middle part of the flexible structure in sequence;
the external load is fixedly arranged on the upper surface of the movable rotor in a connecting way by adopting a connecting piece, and the bending driving plate type flexible hinge driven by different excitation signals of the piezoelectric vibrator is utilized to deform, so that the sliding block and the movable rotor are driven to realize movement along the extending direction of the sliding groove and rotation movement taking the connecting shaft as the center, and the movement output of two degrees of freedom of plane movement and rotation of the actuator is realized.
Furthermore, the piezoelectric vibrators are symmetrically distributed on two sides of the flexible structure, the sliding tables are symmetrically distributed on two sides of the sliding blocks, and the mounting tables are diagonally arranged on two sides of the flexible structure.
Further, the piezoelectric vibrator is composed of two piezoelectric ceramic elements and a metal elastic sheet sandwiched between the piezoelectric ceramic elements.
Still further, still include pretension mechanism, pretension mechanism comprises pretension pole A, pretension screw, pretension bolt and pretension pole B jointly, base upper surface both sides symmetrical arrangement have with pretension pole A and pretension pole B complex mounting hole, pretension pole A and pretension pole B loop through pretension bolt fixed mounting on the base, pretension pole A and pretension pole B mid portion processing has the screw hole of installation pretension screw, pretension screw terminal contact slip table, through the degree of screwing up of adjusting pretension screw and then regulating and controlling the pretension force of slip table in the guide rail spout.
Furthermore, the flexible structure, the mounting table and the plate-type flexible hinge are integrally formed by integrally processing a whole piece of elastic metal material.
Further, the elastic metal material is 65Mn spring steel subjected to quenching treatment.
Further, the upper surface of the movable rotor is provided with a threaded hole for fixing external load.
Furthermore, the diameter of the connecting shaft is smaller than that of the central hole of the flexible structure, the connecting shaft is in transition fit with the central hole of the flexible structure, the outer surface of the connecting shaft is in friction contact with the central hole of the middle part of the flexible structure, and the pre-tightening friction force between the movable rotor and the flexible structure can be adjusted by controlling the tightening degree of the adjusting bolt.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention utilizes the bending deformation of the two piezoelectric vibrators under the excitation of the heterogeneous sawtooth wave driving voltage to drive the sliding block and the movable rotor to realize the movement along the extending direction of the sliding chute and the rotary movement taking the connecting shaft as the center, and finally completes the movement output of two degrees of freedom of plane movement and rotation;
2. the invention has high structural integration level and flexible control, utilizes the piezoelectric vibrators as a driving unit, can realize motion output by matching with a flexible structure, has high integration degree, simple structure and flexible control, can realize linear motion along the extending direction of the sliding chute by applying the same sawtooth wave driving signals to the two piezoelectric vibrators, can realize rotary motion by taking the connecting shaft as the center by applying opposite sawtooth wave driving signals to the two piezoelectric vibrators, and can realize linear motion or rotary motion in opposite directions when the opposite sawtooth wave driving signals are adopted for the two piezoelectric vibrators;
3. the invention has good application prospect in the technical fields of optical instruments, integrated circuits, precision and ultra-precision machining, micro robots and the like, and the two-freedom-degree inertia piezoelectric actuator with high structural integration and flexible control provides a new thought for the design of the multi-freedom-degree piezoelectric actuator and lays a foundation for the wide application of the piezoelectric actuator in the field of precision motor driving.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a top view of the present invention;
FIG. 3 is a top view of the moving rotor not attached to the present invention;
FIG. 4 is an exploded view of the present invention;
FIG. 5 is a waveform diagram of an excitation voltage signal according to the present invention;
FIG. 6 is a diagram showing bending deformation of the piezoelectric vibrator under different excitation voltages according to the present invention;
FIG. 7 is a schematic diagram of the drive of the present invention when generating a rotational displacement output;
FIG. 8 is a schematic diagram of the driving of the present invention when producing a linear displacement output;
FIG. 9 is a schematic perspective view of a flexible structure, mounting table and plate type flexible hinge connection;
fig. 10 is a schematic perspective view of the connection of the slider, the mounting base and the sliding table.
In the figure: 1. a slide block; 1-1, a mounting seat; 1-2, a sliding table; 2. a flexible structure; 2-1, an installation table; 2-2, a plate-type flexible hinge; 3. a piezoelectric vibrator A; 4. a base; 5. a pre-tightening rod A; 6. pre-tightening a screw; 7. pre-tightening a bolt; 8. a rotor; 9. a fixing bolt; 10. a pre-tightening rod B; 11. a piezoelectric vibrator B; 12. an elastic ring; 13. a gasket; 14. and (5) adjusting a bolt.
Detailed Description
Embodiment of the invention,
Referring to fig. 1 to 4, 9 and 10, a flat-rotary two-degree-of-freedom piezoelectric actuator driven based on an inertial stepping principle comprises a base 4, a sliding block 1, a piezoelectric vibrator, a pre-tightening mechanism, a flexible structure 2 and a movable rotor 8;
the center of the base 4 is provided with a round hole, the function of facilitating the assembly between the movable rotor 8 and the flexible structure 2 is achieved, the base 4 is of a central symmetrical structure, mounting holes are symmetrically arranged on two sides of the upper surface of the base 4, and sliding grooves are formed in guide rails on two sides of the base 4;
two mounting seats 1-1 with threaded holes are diagonally arranged on the upper surface of the sliding block 1, the mounting seats 1-1 are used for fixing one end of the piezoelectric vibrator, sliding tables 1-2 matched with sliding grooves are machined on two sides of the sliding block 1, a round hole is machined in the center of the bottom surface of the sliding block 1, assembly between the movable rotor 8 and the flexible structure 2 is facilitated, and the whole sliding block 1 can move along the extending direction of the sliding grooves;
the piezoelectric vibrator consists of two piezoelectric ceramic elements and a metal elastic sheet clamped between the piezoelectric ceramic elements, and can generate bending deformation under the drive of different electric excitation signals;
the pre-tightening mechanism consists of a pre-tightening rod A5, a pre-tightening screw 6, a pre-tightening bolt 7 and a pre-tightening rod B10, wherein the pre-tightening rod A5 and the pre-tightening rod B10 are fixedly arranged on the base 4 sequentially through the pre-tightening bolt 7, threaded holes for installing the pre-tightening screw 6 are formed in the middle parts of the pre-tightening rod A5 and the pre-tightening rod B10, the tail end of the pre-tightening screw 6 contacts the sliding table 1-2, and the pre-tightening force of the sliding table 1-2 in a guide rail sliding groove is regulated and controlled by regulating the tightening degree of the pre-tightening screw 6;
the middle part of the flexible structure 2 is in a ring shape, a central hole of the middle part of the flexible structure 2 is matched with a connecting shaft of the movable rotor 8 to realize the action output of the actuator, two sides of the flexible structure 2 are connected with two mounting tables 2-1 through plate-type flexible hinges 2-2, a threaded hole is formed in the center of each mounting table 2-1, the other end of each piezoelectric vibrator is fixedly connected with each mounting table 2-1 through a fixing bolt 9, and the flexible structure 2, the plate-type flexible hinges 2-2 and the mounting tables 2-1 can be transmitted to deform in the deformation process of the excited signals of the piezoelectric vibrator; in order to ensure that the flexible structure 2, the mounting table 2-1 and the plate-type flexible hinge 2-2 have good deformation precision, the flexible structure 2, the mounting table 2-1 and the plate-type flexible hinge 2-2 are integrally formed by integrally processing a whole piece of elastic metal material, and specific elastic metal materials can be as follows: quenching 65Mn spring steel;
the movable rotor 8 is of a disc-shaped structure, the lower surface of the movable rotor 8 is connected with a connecting shaft with internal threads, the upper surface of the movable rotor 8 is provided with a threaded hole for fixing external load, the connecting shaft is connected with an adjusting bolt 14 through a central hole in the middle of the flexible structure 2, an elastic ring 12 and a gasket 13 in sequence, the diameter of the connecting shaft is slightly smaller than that of the central hole of the flexible structure 2, the connecting shaft is in transition fit with the central hole of the flexible structure 2, the friction contact between the outer surface of the connecting shaft and the central hole in the middle of the flexible structure 2 is ensured, the aim of adjusting the pre-tightening friction force between the movable rotor 8 and the flexible structure 2 can be fulfilled by controlling the tightening degree of the adjusting bolt 14, the elastic ring 12 can avoid the problem of actuator failure caused by loosening of the adjusting bolt 14 in the periodic operation process of an actuator, continuous pre-tensioning force is provided for the connection of the movable rotor 8 and the flexible structure 2, and the working reliability of the actuator is further improved;
the external load can be fixedly arranged on the upper surface of the movable rotor 8 in a connecting way by adopting a connecting piece, and the bending driving plate type flexible hinge 2-2 driven by the piezoelectric vibrator under different excitation signals is utilized to deform, so that the sliding block 1 and the movable rotor 8 are driven to realize movement along the extending direction of the sliding groove and rotation movement taking the connecting shaft as the center, and the movement output of two degrees of freedom of plane movement and rotation of the actuator is realized.
In the first embodiment, the piezoelectric vibrator and the sliding table 1-2 are symmetrically installed, the mounting table 2-1 is diagonally installed, and the two piezoelectric vibrators are driven by the out-of-phase excitation signals to drive the flexible structure 2, the mounting table 2-1 and the plate type flexible hinge 2-2 to deform, so that the movable rotor 8 is pushed to generate linear displacement output along the extending direction of the sliding groove and rotary motion taking the central line of the movable rotor 8 as a rotating shaft, and two-degree-of-freedom motion output of the actuator is realized. The movable rotor 8 and the flexible structure 2 are assembled together by adopting the elastic ring 12, the gasket 13 and the adjusting bolt 14, so that the problem that the whole motion output efficiency of the actuator is influenced due to loosening in the long-term working process of the actuator is avoided, and the working reliability of the actuator is further improved.
Both the piezoelectric vibrator A3 and the piezoelectric vibrator B11 use the sawtooth wave voltage as the excitation signal, and when the out-of-phase sawtooth wave voltage signal shown in fig. 5 (a) is applied to both the piezoelectric vibrator A3 and the piezoelectric vibrator B11, the movable rotor 8 generates a rotational displacement output centered on the connecting shaft, and when the out-of-phase sawtooth wave voltage signal shown in fig. 5 (a) is applied to the piezoelectric vibrator A3 and the out-of-phase sawtooth wave voltage signal shown in fig. 5 (B) is applied to the piezoelectric vibrator B11, the movable rotor 8 generates a linear displacement output along the extending direction of the chute.
As shown in fig. 6, the lower end of the piezoelectric vibrator is fixed, the upper end of the piezoelectric vibrator is a movable end, the piezoelectric vibrator is in a positive direction when bending deformation to the right occurs, and the piezoelectric vibrator is in a negative direction when bending deformation to the left occurs, and the specific working process of the invention is as follows:
1. as shown in fig. 7, when the out-of-phase sawtooth voltage signals shown in fig. 5 (a) are simultaneously applied to the piezoelectric vibrator A3 and the piezoelectric vibrator B11, the voltage applied to the initial states of the two piezoelectric vibrators is 0, and the initial states are in the original long state, at the moment, the actuator does not move and outputs, when the voltage slowly reaches the U/-U value at the same step-up/step-down speed, the bending deformation amount of the two piezoelectric vibrators along the extending direction of the chute is L, in the process, the mounting table 2-1 of the flexible structure 2 also generates displacement L, the plate-type flexible hinge 2-2 also generates bending deformation under the pushing action of the two piezoelectric vibrators and the mounting table 2-1, the plate-type flexible hinges 2-2 on two sides jointly generate a moment in the clockwise direction on the middle part of the flexible structure 2, the middle part of the flexible structure 2 generates a rotary motion with the central axis as an axis under the moment, at the moment, the load jointly moves along the middle part of the flexible structure 2, and the clockwise rotation angle of the two is θ1. When the driving voltage is rapidly reduced/increased from U/-U to 0, the two piezoelectric vibrators quickly recover to an initial state after losing voltage excitation, and then the mounting table 2-1, the plate-type flexible hinge 2-2 and the middle part of the flexible structure 2 are driven to return to the original position, the movable rotor 8 and the load rotate by an angle theta 2 along the anticlockwise direction under the combined action of the gravity inertia action of the movable rotor and the friction force of the inner wall of the central hole of the middle part of the flexible structure 2, and through the driving of a sawtooth waveform electric signal, the movable rotor 8 generates clockwise angular displacement (theta 1-theta 2) relative to the middle part of the flexible structure 2, namely the rotation angle displacement output precision of the piezoelectric actuator is (theta 1-theta 2).
If the process is repeated continuously, the actuator can realize the output of large-stroke stepping rotation angle displacement clockwise around the Z axis, and the actuator can realize the output of rotation angle displacement anticlockwise around the Z axis by applying opposite sawtooth wave driving signals to the piezoelectric vibrator A3 and the piezoelectric vibrator B11.
2. As shown in fig. 8, when the fig. 5 (a) is applied to the piezoelectric vibrator A3 and the out-of-phase sawtooth voltage signal shown in fig. 5 (B) is applied to the piezoelectric vibrator B11, the initial voltage of the two piezoelectric vibrators is 0, and in the original length state, when the driving voltages of the piezoelectric ceramics at both sides of the piezoelectric vibrator A3 and the piezoelectric vibrator B11 are slowly increased to U and slowly decreased to-U, the piezoelectric vibrator A3 undergoes bending deformation in the positive direction, a horizontal leftward force is generated on the flexible structure 2 through the mounting table 2-1 and the plate-type flexible hinge 2-2, the piezoelectric vibrator B11 undergoes bending deformation in the negative direction, a horizontal leftward force is also generated on the flexible structure 2 through the mounting table 2-1 and the plate-type flexible hinge 2-2, the flexible mechanism 2 and the movable rotor 8 undergo leftward linear displacement L1 under the combined action of the two piezoelectric vibrators, the slider 1 is kept in the static state in the process, and when the voltage signals of the piezoelectric ceramics at both sides of the piezoelectric vibrator A3 and the piezoelectric vibrator B11 are quickly restored to 0, the two piezoelectric vibrators rapidly recover to the original length, the movable rotor 8 and the load has a tendency to remain stationary under the inertia effect, but the two piezoelectric vibrators move in the leftward direction (i.e., the distance L2 is the distance L1 is extended in the leftward direction under the action of the piezoelectric vibrator 2-1).
If the process is repeated continuously, the actuator can realize the large-stroke stepping linear displacement output along the positive direction of the Y axis, and the actuator can realize the large-stroke stepping linear displacement output along the negative direction of the Y axis by applying reverse sawtooth wave driving signals to each piezoelectric vibrator.
The piezoelectric actuator is driven by two piezoelectric vibrators to generate rotation angle displacement output clockwise or anticlockwise around a connecting shaft, and the movable rotor 8 can generate linear displacement output leftwards or rightwards along the extending direction of the sliding chute under the driving of different sawtooth waveform signals. The piezoelectric actuator can realize motion output with two degrees of freedom of flat-rotating in the process of cyclic reciprocation.
Claims (7)
1. The utility model provides a flat-change two degrees of freedom piezoelectric actuator based on inertia stepping principle drive which characterized in that: comprises a base (4), a sliding block (1), a piezoelectric vibrator, a flexible structure (2) and a movable rotor (8);
the center of the base (4) is provided with a round hole, the base (4) is in a central symmetrical structure, and guide rails at two sides of the base (4) are provided with sliding grooves;
two mounting seats (1-1) with threaded holes are diagonally arranged on the upper surface of the sliding block (1), the mounting seats (1-1) are used for fixing one end of the piezoelectric vibrator, sliding tables (1-2) matched with sliding grooves are machined on two sides of the sliding block (1), and a round hole is machined in the center of the bottom surface of the sliding block (1);
the central hole in the middle of the flexible structure (2) is matched with the connecting shaft of the movable rotor (8) to realize the action output of the actuator, two sides of the flexible structure (2) are connected with two mounting tables (2-1) through plate-type flexible hinges (2-2), threaded holes are machined in the centers of the mounting tables (2-1), the other ends of the piezoelectric vibrators are fixedly connected with the mounting tables (2-1) through fixing bolts (9), and the flexible structure (2), the plate-type flexible hinges (2-2) and the mounting tables (2-1) can be guaranteed to transmit deformation in the deformation process of the excited signals of the piezoelectric vibrators;
the lower surface of the movable rotor (8) is connected with a connecting shaft with internal threads, and the connecting shaft is connected with an adjusting bolt (14) through a central hole, an elastic ring (12) and a gasket (13) in the middle part of the flexible structure (2) in sequence;
the external load is fixedly arranged on the upper surface of the movable rotor (8) in a connecting way by adopting a connecting piece, and the bending driving plate type flexible hinge (2-2) driven by the piezoelectric vibrator under different excitation signals is utilized to deform, so that the sliding block (1) and the movable rotor (8) are driven to realize movement along the extending direction of the sliding chute and rotary movement taking a connecting shaft as the center, and the actuator realizes movement output of two degrees of freedom of plane movement and rotation;
the piezoelectric vibrators are symmetrically distributed on two sides of the flexible structure (2), the sliding tables (1-2) are symmetrically distributed on two sides of the sliding blocks (1), and the mounting tables (2-1) are diagonally arranged on two sides of the flexible structure (2).
2. The inertial stepping principle driven two-degree-of-freedom piezoelectric actuator of claim 1, wherein: the piezoelectric vibrator is composed of two piezoelectric ceramic elements and a metal elastic sheet sandwiched between the piezoelectric ceramic elements.
3. The inertial stepping principle driven two-degree-of-freedom piezoelectric actuator of claim 1, wherein: still include pretension mechanism, pretension mechanism comprises pretension pole A (5), pretension screw (6), pretension bolt (7) and pretension pole B (10) jointly, base (4) upper surface both sides symmetrical arrangement have with pretension pole A (5) and pretension pole B (10) complex mounting hole, pretension pole A (5) and pretension pole B (10) loop through pretension bolt (7) fixed mounting on base (4), pretension pole A (5) and pretension pole B (10) mid portion processing have the screw hole of installation pretension screw (6), pretension screw (6) terminal contact slip table (1-2), through adjusting the tightening degree of pretension screw (6) and then regulate and control slip table (1-2) pretension force in the guide rail spout.
4. The inertial stepping principle driven two-degree-of-freedom piezoelectric actuator of claim 1, wherein: the flexible structure (2), the mounting table (2-1) and the plate-type flexible hinge (2-2) are integrally processed by a whole piece of elastic metal material.
5. The inertial stepping principle driven two-degree-of-freedom piezoelectric actuator of claim 4, wherein: the elastic metal material is 65Mn spring steel subjected to quenching treatment.
6. The inertial stepping principle driven two-degree-of-freedom piezoelectric actuator of claim 1, wherein: the upper surface of the movable rotor (8) is provided with a threaded hole for fixing external load.
7. The inertial stepping principle driven two-degree-of-freedom piezoelectric actuator of claim 1, wherein: the diameter of the connecting shaft is smaller than that of a central hole of the flexible structure (2), the connecting shaft is in transition fit with the central hole of the flexible structure (2), and the pre-tightening friction force between the movable rotor (8) and the flexible structure (2) can be adjusted by controlling the tightening degree of the adjusting bolt (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310602362.7A CN116388609B (en) | 2023-05-26 | 2023-05-26 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310602362.7A CN116388609B (en) | 2023-05-26 | 2023-05-26 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116388609A CN116388609A (en) | 2023-07-04 |
| CN116388609B true CN116388609B (en) | 2023-08-04 |
Family
ID=86969661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310602362.7A Active CN116388609B (en) | 2023-05-26 | 2023-05-26 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116388609B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117155162B (en) * | 2023-10-31 | 2024-01-23 | 吉林大学 | Three-rotational-freedom piezoelectric actuator based on inertia principle |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110460264A (en) * | 2019-09-06 | 2019-11-15 | 吉林大学 | Piezoelectric actuator and control method based on four-footed coupled motions mode improving performance |
| CN210431263U (en) * | 2019-04-08 | 2020-04-28 | 浙江师范大学 | Novel piezoelectric rotation precision driving platform |
| CN111384872A (en) * | 2020-01-08 | 2020-07-07 | 浙江师范大学 | Rotary driving platform and control method thereof |
| CN114567206A (en) * | 2022-02-28 | 2022-05-31 | 宁波大学 | Piezoelectric stick-slip rotary motion platform |
| CN115441769A (en) * | 2022-11-07 | 2022-12-06 | 吉林大学 | Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving |
| CN115955141A (en) * | 2023-03-14 | 2023-04-11 | 吉林大学 | Integrated two-degree-of-freedom stepping actuator based on piezoelectric drive |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9312790B2 (en) * | 2013-09-13 | 2016-04-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Compact versatile stick-slip piezoelectric motor |
-
2023
- 2023-05-26 CN CN202310602362.7A patent/CN116388609B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN210431263U (en) * | 2019-04-08 | 2020-04-28 | 浙江师范大学 | Novel piezoelectric rotation precision driving platform |
| CN110460264A (en) * | 2019-09-06 | 2019-11-15 | 吉林大学 | Piezoelectric actuator and control method based on four-footed coupled motions mode improving performance |
| CN111384872A (en) * | 2020-01-08 | 2020-07-07 | 浙江师范大学 | Rotary driving platform and control method thereof |
| CN114567206A (en) * | 2022-02-28 | 2022-05-31 | 宁波大学 | Piezoelectric stick-slip rotary motion platform |
| CN115441769A (en) * | 2022-11-07 | 2022-12-06 | 吉林大学 | Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving |
| CN115955141A (en) * | 2023-03-14 | 2023-04-11 | 吉林大学 | Integrated two-degree-of-freedom stepping actuator based on piezoelectric drive |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116388609A (en) | 2023-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10483877B2 (en) | One-dimensional large-stroke precise positioning platform | |
| CN109980990B (en) | Piezoelectric-electromagnetic hybrid drive type multi-degree-of-freedom precision positioning device and control method | |
| CN115242121B (en) | Piezoelectric stepping actuator based on synchronous double-foot drive | |
| CN116388609B (en) | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle | |
| CN116191927B (en) | Planar three-degree-of-freedom actuator based on piezoelectric bimorph driving | |
| CN115441769B (en) | Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving | |
| CN115955141B (en) | Integrated two-degree-of-freedom stepping actuator based on piezoelectric driving | |
| CN107786120B (en) | Piezoelectric rotary positioning platform with macro-micro hybrid motion characteristics and control method | |
| CN110752771A (en) | Novel efficient piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN110798094B (en) | Piezoelectric linear precision driving device based on parasitic inertia principle | |
| CN110912444B (en) | Bionic creeping type piezoelectric actuator | |
| CN110768571A (en) | Novel bionic creeping type piezoelectric precision driving device based on parasitic inertia principle | |
| CN110995058A (en) | Novel piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN110855181B (en) | Rotary piezoelectric driving device based on asymmetric triangular hinge mechanism | |
| CN110912448B (en) | Piezoelectric driving platform based on asymmetric triangle flexible hinge mechanism | |
| CN111193435A (en) | Rotary actuator | |
| CN110829882A (en) | T-shaped piezoelectric driving device | |
| CN113078845B (en) | Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof | |
| CN110855179B (en) | Creeping type piezoelectric precision driving device | |
| CN118264149B (en) | Plane three-degree-of-freedom inertial stepping piezoelectric actuator | |
| CN117277866B (en) | Four-degree-of-freedom trans-scale stepping actuator based on piezoelectric driving | |
| CN110752768B (en) | Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism | |
| CN110798093B (en) | Linear piezoelectric precision driving platform | |
| CN110829880B (en) | T-shaped crawling piezoelectric driving platform | |
| CN110768570B (en) | Micro-nano stepping piezoelectric driving device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |