CN110912444A - Bionic creeping type piezoelectric actuator - Google Patents
Bionic creeping type piezoelectric actuator Download PDFInfo
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- CN110912444A CN110912444A CN201910291894.7A CN201910291894A CN110912444A CN 110912444 A CN110912444 A CN 110912444A CN 201910291894 A CN201910291894 A CN 201910291894A CN 110912444 A CN110912444 A CN 110912444A
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- 230000007246 mechanism Effects 0.000 claims abstract description 86
- 230000033001 locomotion Effects 0.000 claims abstract description 41
- 230000009193 crawling Effects 0.000 claims abstract description 15
- 230000008901 benefit Effects 0.000 claims abstract description 7
- 230000036316 preload Effects 0.000 claims abstract 5
- 230000003071 parasitic effect Effects 0.000 claims description 14
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
本发明涉及一种仿生爬行式压电驱动器，主要包括压电叠堆、非对称薄壁式柔性铰链机构和动子。两个压电叠堆安装在非对称薄壁式柔性铰链机构内；预紧旋钮调节非对称薄壁式柔性铰链机构与动子间的初始预紧力；底座支撑和安装固定其他零件。优点是：非对称薄壁式柔性铰链机构刚度高，能承受较大的负载，提高了驱动装置的输出负载；两个压电叠堆通过对电信号的时序控制，交替提供驱动力，增加了输出负载，提高了输出性能；两个非对称薄壁式柔性铰链机构在两个压电叠堆交替驱动下，做仿生爬行运动，可消除运动周期内动子的回退现象；该装置结构简单，可应用于精密超精密机械加工、微机电系统、微操作机器人领域。
The invention relates to a bionic crawling piezoelectric driver, which mainly includes a piezoelectric stack, an asymmetric thin-walled flexible hinge mechanism and a mover. Two piezoelectric stacks are installed in the asymmetric thin-walled flexible hinge mechanism; the preload knob adjusts the initial preload force between the asymmetrical thin-walled flexible hinge mechanism and the mover; the base supports and installs and fixes other parts. The advantages are: the asymmetric thin-walled flexible hinge mechanism has high rigidity, can withstand a large load, and improves the output load of the driving device; two piezoelectric stacks alternately provide driving force through the timing control of the electrical signal, which increases the The output load improves the output performance; two asymmetric thin-walled flexible hinge mechanisms are alternately driven by two piezoelectric stacks to perform a bionic crawling motion, which can eliminate the retraction of the mover during the motion cycle; the device has a simple structure , can be used in the fields of precision ultra-precision machining, micro-electromechanical systems, and micro-manipulation robots.
Description
Technical Field
The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a bionic crawling type piezoelectric driver.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving device. The traditional driving device has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving device. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. In the conventional piezoelectric inertia driving device, a piezoelectric element and a rotor mass block are usually arranged in parallel in the motion direction of the piezoelectric element, the pretightening force is perpendicular to the main output direction of the piezoelectric element, and the output load of the whole device mainly depends on the friction force generated by the pretightening force. However, a piezoelectric element such as a piezoelectric stack generally adopts a d33 operating mode, and the rigidity of the piezoelectric element on a cross section perpendicular to the main output direction is small, so that the generated pretightening force is small, the output load of the whole device is greatly reduced, and the large rigidity of the piezoelectric element in the main output direction is not fully utilized; the output load provided by a single piezoelectric stack is small; the rollback phenomenon in motion further degrades output performance. Therefore, it is necessary to design a piezoelectric driver that fully utilizes the stiffness of the piezoelectric stack in the main output direction, eliminates the rollback phenomenon, improves the output load, and further improves the output load of the piezoelectric driving device by generating the pretightening force and the driving force through the parasitic inertia motion of the asymmetric thin-wall flexible hinge mechanism.
Disclosure of Invention
The invention aims to provide a bionic crawling type piezoelectric actuator, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the linear motion output function.
The bionic crawling type piezoelectric power generator adopts two groups of piezoelectric driving units, the main output direction of the piezoelectric stacks and the motion direction of the rotor are obliquely arranged, two asymmetric flexible hinge mechanisms connected by four thin-wall flexible hinges are adopted, and parasitic inertia motion is sequentially realized by the asymmetric thin-wall flexible hinge mechanisms according to time sequence under the alternate driving of the two piezoelectric stacks.
The above object of the present invention is achieved by the following technical solutions:
a bionic creeping type piezoelectric driver comprises a piezoelectric stack (3), an asymmetric thin-wall flexible hinge mechanism (4), a piezoelectric stack (7), an asymmetric thin-wall flexible hinge mechanism (6), a rotor (5), a pre-tightening wedge block (2), a pre-tightening wedge block (8), a pre-tightening knob (1), a pre-tightening knob (10) and a base (9), wherein the precise driving device realizes micro-nano bionic creeping type precise linear driving by utilizing a parasitic inertia principle. The rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base (9) through a screw; the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) are arranged on the base (9) through screws; the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4), the pre-tightening wedge block (8) is arranged between the piezoelectric stack (7) and the asymmetric thin-wall flexible hinge mechanism (6), and the piezoelectric stack (3) and the piezoelectric stack (7) can be pre-tightened through the pre-tightening wedge block (2) and the pre-tightening wedge block (8) respectively; the pre-tightening knob (1) and the pre-tightening knob (10) are fastened on the base (9) and are in contact with the lower ends of the asymmetric thin-wall hinge mechanism (4) and the asymmetric thin-wall hinge mechanism (6); the asymmetric thin-wall hinge mechanism (4) and the asymmetric thin-wall hinge mechanism (6) are formed in an asymmetric mode by connecting four thin-wall flexible hinges, and the arc-shaped structure at the upper end of the asymmetric thin-wall hinge mechanism is in contact with the rotor (5); the base (9) plays a role in supporting and installing and fixing other parts.
The piezoelectric stacks (3) and (7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6), the piezoelectric stacks (3) are driven to drive the asymmetric thin-wall flexible hinge mechanism (4) to extend, the piezoelectric stacks (7) are driven to drive the asymmetric thin-wall flexible hinge mechanism (6) to extend, and the bionic crawling type motion among the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) is realized by controlling the time sequence between the piezoelectric stacks (3) and the piezoelectric stacks (7), so that the rotor (5) is driven to linearly and precisely move.
The initial pretightening force among the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) is respectively adjusted through the pretightening knob (1) and the pretightening knob (10);
the piezoelectric stacks (3) and (7) adopt piezoelectric ceramic stacks PZT with controllable shapes and surfaces, parasitic inertial motion is realized by controlling the voltage of the piezoelectric stacks (3) and (7), and bionic crawling type linear driving can be realized by orderly controlling the voltage of the piezoelectric stacks (3) and (7).
The main advantages of the invention are: the main output direction of the piezoelectric stack and the motion direction of the rotor are obliquely arranged by utilizing a parasitic inertial motion principle; two asymmetric flexible hinge mechanisms connected by four thin-wall flexible hinges are adopted; under the alternate driving of the two piezoelectric stacks, the asymmetric thin-wall flexible hinge mechanism sequentially performs parasitic inertia motion according to time sequence, and the bionic crawling motion can eliminate the backspacing phenomenon of the rotor in the motion period; the invention can greatly improve the output performance of the device, realizes the linear motion of the rotor along a certain direction, and has the advantages of high driving reliability, good stability, high working efficiency and the like; the method can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like; the invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic left side view of the present invention;
FIG. 4 is a schematic view of an asymmetric thin wall flexible hinge mechanism of the present invention.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, the bionic crawling type piezoelectric driver mainly comprises a rotor (5), a piezoelectric stack (3), a piezoelectric stack (7), a pre-tightening wedge block (2), a pre-tightening wedge block (8), a pre-tightening knob (1), a pre-tightening knob (10), an asymmetric thin-wall flexible hinge mechanism (4), an asymmetric thin-wall flexible hinge mechanism (6) and a base (9), and the precise driving device realizes piezoelectric linear precise driving through a parasitic inertia principle. The rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw; the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) are arranged on the base through screws; the piezoelectric stacks (3) and (7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6), and the main output direction of the piezoelectric stacks and the motion direction of the rotor (5) are obliquely arranged; the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4), the pre-tightening wedge block (8) is arranged between the piezoelectric stack (7) and the asymmetric thin-wall flexible hinge mechanism (6), and the piezoelectric stack (3) and the piezoelectric stack (7) can be pre-tightened through the pre-tightening wedge block (2) and the pre-tightening wedge block (8) respectively; the pre-tightening knob (1) and the pre-tightening knob (10) are fastened on the base (9) and are in contact with the lower ends of the asymmetric thin-wall hinge mechanism (4) and the asymmetric thin-wall hinge mechanism (6); the asymmetric thin-wall hinge mechanism (4) and the asymmetric thin-wall hinge mechanism (6) are formed in an asymmetric mode by connecting four thin-wall flexible hinges, and the arc-shaped structure at the upper end of the asymmetric thin-wall hinge mechanism is in contact with the rotor (5); the base (9) plays a role in supporting and installing and fixing other parts, and the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) are installed on the base (9) through screws.
The bionic creeping type piezoelectric actuator realizes piezoelectric linear precision driving by utilizing a parasitic inertia principle. The main output directions of the piezoelectric stacks (3) and (7) and the motion direction of the rotor (5) are obliquely arranged, so that the large rigidity of the piezoelectric stacks (3) and (7) in the main output directions is fully utilized; the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) have good rigidity output performance, can bear larger pretightening force, and move stably and efficiently, the piezoelectric stack (3) and the piezoelectric stack (7) are electrified to transmit the driving force of the linear motion of the rotor (5) and the pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) respectively through the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6), so that the output load of the piezoelectric driving device is greatly improved, and the linear motion along a certain direction is realized.
The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) is adjusted through the pretightening knob (1) and the pretightening knob (10).
The piezoelectric stacks (3) and (7) adopt piezoelectric ceramic stacks PZT with controllable surface shapes, and parasitic inertial motion is realized by controlling the voltage of the piezoelectric stacks (3) and (7).
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
realizing linear motion of the rotor, and in an initial state: adjusting a pre-tightening knob (1) to adjust the contact distance between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5), and adjusting a pre-tightening knob (10) to adjust the contact distance between the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5), namely the initial pre-tightening force in the parasitic motion process; the piezoelectric stack (3) and the piezoelectric stack (7) are controlled by adopting a piezoelectric signal in a sawtooth wave or triangular wave form, and the piezoelectric stack (3) and the piezoelectric stack (7) are sequentially electrified according to a time sequence by controlling voltage; the piezoelectric stacks (3) and (7) are not electrified, and the system is in a free state; when the piezoelectric stack (3) is electrified, the piezoelectric stack is extended through the inverse piezoelectric effect to push the asymmetric thin-wall flexible hinge mechanism (4) to deform, the rotor (5) is pressed by the asymmetric thin-wall flexible hinge mechanism (4), and the rotor (5) is driven to move by the asymmetric thin-wall flexible hinge mechanism (4) under the action of the static friction force between the rotor (5) and the rotor; when the piezoelectric stack (3) loses power and rapidly returns to an initial position, the asymmetric thin-wall flexible hinge mechanism (4) also returns to the initial state, the rotor (5) is still kept at the moved position under the action of inertia force, meanwhile, the piezoelectric stack (7) is electrified, the piezoelectric stack is extended through the inverse piezoelectric effect to push the asymmetric thin-wall flexible hinge mechanism (6) to deform, the asymmetric thin-wall flexible hinge mechanism (6) compresses the rotor (5), and the asymmetric thin-wall flexible hinge mechanism (6) drives the rotor (5) to move under the action of static friction force between the rotor (5) and the rotor (6); when the piezoelectric stack (7) loses power and rapidly retracts to the initial position, the asymmetric thin-wall flexible hinge mechanism (6) also restores to the initial state, and the mover (5) is still kept at the position after the second movement under the action of inertia force, so that one movement cycle of the driving device is completed. By repeating the steps, the driving device can realize linear motion in the required direction, and large output displacement is obtained.
The bionic creeping type piezoelectric actuator adopts two groups of piezoelectric stacks as driving sources and an asymmetric thin-wall type flexible hinge mechanism as a power transmission element, has the characteristics of small heat, stable driving, reliability and high efficiency, and can realize the functions of linear precise motion and the like.
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| CN201910291894.7A CN110912444B (en) | 2019-04-08 | 2019-04-08 | A bionic crawling piezoelectric driver |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112497186A (en) * | 2020-12-15 | 2021-03-16 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device and method based on bionic surface |
| CN113219649A (en) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
| CN113938052A (en) * | 2021-09-29 | 2022-01-14 | 东北电力大学 | Piezoelectric stick-slip driver based on two-stage lever amplification mechanism |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05121790A (en) * | 1991-10-29 | 1993-05-18 | Hitachi Ltd | Piezoelectric drive device |
| US20030137218A1 (en) * | 2000-04-07 | 2003-07-24 | Frank Hermle | Piezoelectric actuating device for controlling the flaps on the rotor blade of a helicopter |
| WO2012165189A1 (en) * | 2011-05-27 | 2012-12-06 | 株式会社村田製作所 | Piezoelectric motor and piezoelectric motor device |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro-nano scale stick-slip inertial drive platform |
| CN105583692A (en) * | 2016-03-02 | 2016-05-18 | 吉林大学 | Method and device for measuring three-direction cutting force of fast tool servo turning |
| CN207039485U (en) * | 2017-06-16 | 2018-02-23 | 吉林大学 | A Single Ω-shaped Piezoelectric Linear Actuator |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | A device for adjusting the output performance of a parasitic piezoelectric actuator by pre-friction force |
| CN208597034U (en) * | 2018-09-26 | 2019-03-12 | 吉林大学 | A device for suppressing the retraction motion of parasitic piezoelectric actuators by hinges with arc structure |
-
2019
- 2019-04-08 CN CN201910291894.7A patent/CN110912444B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05121790A (en) * | 1991-10-29 | 1993-05-18 | Hitachi Ltd | Piezoelectric drive device |
| US20030137218A1 (en) * | 2000-04-07 | 2003-07-24 | Frank Hermle | Piezoelectric actuating device for controlling the flaps on the rotor blade of a helicopter |
| WO2012165189A1 (en) * | 2011-05-27 | 2012-12-06 | 株式会社村田製作所 | Piezoelectric motor and piezoelectric motor device |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro-nano scale stick-slip inertial drive platform |
| CN105583692A (en) * | 2016-03-02 | 2016-05-18 | 吉林大学 | Method and device for measuring three-direction cutting force of fast tool servo turning |
| CN207039485U (en) * | 2017-06-16 | 2018-02-23 | 吉林大学 | A Single Ω-shaped Piezoelectric Linear Actuator |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | A device for adjusting the output performance of a parasitic piezoelectric actuator by pre-friction force |
| CN208597034U (en) * | 2018-09-26 | 2019-03-12 | 吉林大学 | A device for suppressing the retraction motion of parasitic piezoelectric actuators by hinges with arc structure |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112497186A (en) * | 2020-12-15 | 2021-03-16 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device and method based on bionic surface |
| CN113219649A (en) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
| CN113219649B (en) * | 2021-04-30 | 2022-11-22 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
| CN113938052A (en) * | 2021-09-29 | 2022-01-14 | 东北电力大学 | Piezoelectric stick-slip driver based on two-stage lever amplification mechanism |
| CN113938052B (en) * | 2021-09-29 | 2023-09-08 | 东北电力大学 | A piezoelectric stick-slip actuator based on a two-stage lever amplification mechanism |
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