CN110829882B - T-shaped piezoelectric driving device - Google Patents
T-shaped piezoelectric driving device Download PDFInfo
- Publication number
- CN110829882B CN110829882B CN201910724516.3A CN201910724516A CN110829882B CN 110829882 B CN110829882 B CN 110829882B CN 201910724516 A CN201910724516 A CN 201910724516A CN 110829882 B CN110829882 B CN 110829882B
- Authority
- CN
- China
- Prior art keywords
- piezoelectric stack
- flexible hinge
- hinge mechanism
- piezoelectric
- shaped flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 47
- 230000033001 locomotion Effects 0.000 claims abstract description 19
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000639 Spring steel Inorganic materials 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000002457 bidirectional effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a T-shaped piezoelectric driving device which comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a rotor, a pre-tightening screw, a pre-tightening wedge block, a screw micrometer head and a base. The piezoelectric stack can be stretched and restored under the drive of a voltage signal, and the T-shaped flexible hinge mechanism is deformed under the drive of the piezoelectric stack; the pre-tightening screw and the screw micrometer head can adjust the initial pre-tightening force between the T-shaped flexible hinge mechanism and the rotor; the base supports other parts. The piezoelectric stack drives the T-shaped flexible hinge mechanism to move, so that bidirectional linear motion can be realized. The device can be applied to the fields of precise ultra-precise machining, micro-electromechanical systems, micro-operation robots, large-scale integrated circuit manufacturing and biotechnology.
Description
Technical Field
The invention relates to the fields of precise ultra-precise machining, micro-nano operation robots and micro-electromechanical systems, in particular to a T-shaped piezoelectric driving device.
Background
The precise driving technology with micro/nano positioning precision is a key technology in the fields of high-tip science and technology such as ultra-precise machining and measurement, optical engineering, modern medical treatment, aerospace science and technology and the like. In order to realize the micro/nano-scale output precision, the application of modern precise driving technology puts higher demands on the precision of the driving device. The traditional driving device has low output precision and large overall size, and cannot meet the requirements of a precision system on micro/nano-level high precision and the micro size of the driving device in the modern advanced technology. The piezoelectric driving device has the advantages of small size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-level output precision, has been increasingly applied to micro positioning and precise ultra-precise machining, but has very limited working stroke due to the fact that the working stroke is limited by the inverse piezoelectric effect of a single piezoelectric element, and greatly limits the application of the piezoelectric driving device. Therefore, it is necessary to design a piezoelectric precision driving device capable of achieving micro/nano positioning accuracy and realizing a large working stroke.
Disclosure of Invention
The invention aims to provide a T-shaped piezoelectric driving device which solves the problems existing in the prior art. The invention has the characteristics of simple and compact structure, high output precision, large output rigidity and output load and high output frequency, and can realize the linear motion output function of large stroke.
The piezoelectric stack is utilized to drive the deformation of the T-shaped flexible hinge mechanism to push the mover to do linear motion.
The above object of the present invention is achieved by the following technical solutions:
The utility model provides a T type piezoelectricity drive arrangement, mainly includes active cell, piezoelectricity stack, pretension voussoir, pretension screw, spiral micrometer head, T type flexible hinge mechanism and base, accurate drive arrangement utilizes piezoelectricity stack drive T type flexible hinge mechanism to warp and realizes micro-nano level linear drive. The mover adopts a high-precision linear guide rail with a sliding block, and the guide rail is fixed on the base through a screw; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism; the pre-tightening wedge block is arranged between the piezoelectric stack and the T-shaped flexible hinge mechanism and can be used for pre-tightening; the pre-tightening screw and the spiral micrometer head are fastened on the base, and the arc-shaped structure at the upper end of the T-shaped flexible hinge mechanism is contacted with the rotor; the base plays a role in supporting, installing and fixing other parts.
The T-shaped piezoelectric driving device is characterized in that the piezoelectric stack is electrified to push the T-shaped flexible hinge mechanism to generate driving force and pretightening force, the driving force pushes the mover to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism to prop against the mover.
The T-shaped piezoelectric driving device is characterized in that the mover can adopt a mechanism capable of realizing reciprocating linear motion, such as a ball linear guide, a roller linear guide, a V-shaped groove linear guide, a dovetail groove linear guide and the like.
The piezoelectric stack adopts a shape-controllable surface type piezoelectric ceramic stack PZT.
The T-shaped flexible hinge mechanism can be made of spring steel, high-strength aluminum alloy and other materials, and is connected into a T shape through a thin-wall flexible hinge.
The invention has the main advantages that: the piezoelectric stack is used for driving the T-shaped flexible hinge mechanism to move so as to provide driving force and pretightening force, and the mover is pushed to do linear motion. The device has the advantages of high driving reliability, good stability, high working efficiency and the like. The micro-motion precision control method can be applied to important scientific engineering fields such as precise ultra-precise machining, micro-operation robots, micro-electromechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like, greatly improves micro-motion precision of the micro-electromechanical systems, and simultaneously improves the disadvantages of large structural complexity, unreliable performance and the like of the traditional driver, and has wide application prospect.
Drawings
The accompanying drawings are included to provide a further understanding of the application, and are incorporated in and constitute a part of this specification, illustrate and explain the application and are not to be construed as limiting the application.
FIG. 1 is an isometric view of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic left-hand view of the present invention;
Fig. 4 is a schematic view of a T-shaped flexible hinge mechanism of the present invention.
In the figure:
1. A mover; secondly, piezoelectric stacks I; third, pre-tightening the wedge I;
4. piezoelectric stack II; fifthly, pre-tightening the wedge II; t-shaped flexible hinge mechanisms;
7. Pre-tightening a screw; eighthly, a base; a screw micrometer head;
10. Piezoelectric stack III; 11, pre-tightening the wedge block III.
Detailed Description
The details of the present invention and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a T-type piezoelectric driving device mainly comprises a rotor (1), a piezoelectric stack I (2), a pre-tightening wedge I (3), a piezoelectric stack II (4), a pre-tightening wedge II (5), a T-type flexible hinge mechanism (6), a pre-tightening screw (7), a base (8), a screw micrometer head (9), a piezoelectric stack III (10) and a pre-tightening wedge III (11). The rotor (1) adopts a high-precision linear guide rail with a sliding block, and the guide rail is fixed on the base (8) through a screw; the T-shaped flexible hinge mechanism (6) is arranged on the base (8) through a screw; the piezoelectric stack I (2), the piezoelectric stack II (4) and the piezoelectric stack III (10) are arranged in the T-shaped flexible hinge mechanism (6), and the pre-tightening wedge block I (3), the pre-tightening wedge block II (5) and the pre-tightening wedge block III (11) are respectively arranged between the piezoelectric stack and the T-shaped flexible hinge mechanism (6) so as to realize initial pre-tightening; the pre-tightening screw (7) is fastened on the base (8), and the initial pre-tightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1) can be adjusted through the pre-tightening screw (7) and the screw micrometer head (9); the arc-shaped structure at the upper end of the T-shaped flexible hinge mechanism (6) is contacted with the rotor (1); the base (8) plays roles in supporting, installing and fixing other parts, and the rotor (1) and the T-shaped flexible hinge mechanism (6) are installed on the base (8) through screws.
The piezoelectric stack I (2) and the piezoelectric stack II (4) are electrified to push the T-shaped flexible hinge mechanism (6) to generate driving force and pretightening force, the driving force pushes the rotor (1) to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism (6) to jack the rotor (1).
The rotor (1) can adopt a ball linear guide rail, a roller linear guide rail, a V-shaped groove linear guide rail, a dovetail groove linear guide rail and other mechanisms capable of realizing reciprocating linear motion.
The piezoelectric stack I (2), the piezoelectric stack II (4) and the piezoelectric stack III (10) are made of a shape-controllable surface type piezoelectric ceramic stack PZT.
The T-shaped flexible hinge mechanism (6) can be made of spring steel, high-strength aluminum alloy and other materials, and is connected into a T shape through a thin-wall flexible hinge.
Referring to fig. 1 to 4, the specific working procedure of the present invention is as follows:
Realization of linear motion of the mover (1), initial state: the initial pre-tightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1) is adjusted by adjusting the pre-tightening screw (7) and the screw micrometer head (9). The piezoelectric signals in the form of square waves are used for controlling the piezoelectric stacks I (2) and II (4). The piezoelectric stack I (2) and the piezoelectric stack II (4) are not electrified, and the system is in a free state; when the piezoelectric stack I (2) and the piezoelectric stack II (4) are electrified, the T-shaped flexible hinge mechanism (6) is driven to move through extension of the inverse piezoelectric effect, pretightening force and driving force are provided, the piezoelectric stack II (4) drives the T-shaped flexible hinge mechanism (6) to press the rotor (1), and the piezoelectric stack I (2) drives the T-shaped flexible hinge mechanism (6) to drive the rotor (1) to move; when the piezoelectric stack I (2) and the piezoelectric stack II (4) lose electricity and quickly retract to the initial positions, the T-shaped flexible hinge mechanism (6) also returns to the initial state, and the rotor (1) still keeps at the moved positions under the action of inertia force, so that one movement period of the driving device in a certain direction in a linear movement mode is completed. The driving device can realize stepping large-stroke linear motion along a certain direction to obtain larger output displacement by repeating the steps. The same voltage is applied to the piezoelectric stack III (10) and the piezoelectric stack II (4), and the steps are repeated, so that the stepping large-stroke linear motion along the opposite directions can be realized.
The T-shaped piezoelectric driving device adopts the piezoelectric stack as a driving source and the T-shaped flexible hinge mechanism as a power transmission element, has the characteristics of small heating, stable and reliable driving and high efficiency, and can realize stepping large-stroke linear precise driving.
Claims (3)
1. The utility model provides a T type piezoelectricity drive arrangement, includes piezoelectric stack, T type flexible hinge mechanism, active cell, pretension screw, pretension voussoir, spiral micrometer head and base, its characterized in that: the driving device drives the T-shaped flexible hinge mechanism to deform to realize micro-nano linear driving by utilizing the piezoelectric stack, the T-shaped flexible hinge mechanism is connected into a T shape through a thin-wall flexible hinge, and the piezoelectric stack comprises a piezoelectric stack I, a piezoelectric stack III and a piezoelectric stack II, wherein the piezoelectric stack I is arranged in parallel with the moving direction of the mover, and the piezoelectric stack II is arranged perpendicular to the moving direction of the mover;
The mover adopts a high-precision linear guide rail with a sliding block, and the guide rail is fixed on the base through a screw, so that high-precision reciprocating linear motion can be realized; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism and is pre-tightened through the pre-tightening wedge block;
Initial state: the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor is adjusted by adjusting the pretightening screw and the spiral micrometer head;
The piezoelectric signals in square wave form are used for controlling the piezoelectric stack I and the piezoelectric stack II, the piezoelectric stack I and the piezoelectric stack II are not electrified, and the system is in a free state; when the piezoelectric stack I and the piezoelectric stack II are electrified, the T-shaped flexible hinge mechanism is driven to move by stretching through the inverse piezoelectric effect, a pretightening force and a driving force are provided, the piezoelectric stack II drives the T-shaped flexible hinge mechanism to compress the mover, and the piezoelectric stack I drives the T-shaped flexible hinge mechanism to drive the mover to move; when the piezoelectric stack I and the piezoelectric stack II are powered off and quickly retreated to the initial positions, the T-shaped flexible hinge mechanism also returns to the initial state, and the mover still keeps at the moved position under the action of inertia force, so that one movement period of the driving device in a certain direction in a linear movement mode is completed; the steps are repeated, and the driving device can realize stepping large-stroke linear motion along a certain direction to obtain output displacement;
The same voltage is applied to the piezoelectric stack III and the piezoelectric stack II, and the steps are repeated, so that the stepping large-stroke linear motion along the opposite directions can be realized.
2. The T-type piezoelectric driving device according to claim 1, wherein: the T-shaped flexible hinge mechanism can be made of spring steel and high-strength aluminum alloy materials.
3. The T-type piezoelectric driving device according to claim 1, wherein: the mover can adopt a mechanism which can realize reciprocating linear motion by adopting a ball linear guide rail, a roller linear guide rail, a V-shaped groove linear guide rail and a dovetail groove linear guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910724516.3A CN110829882B (en) | 2019-07-25 | 2019-07-25 | T-shaped piezoelectric driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910724516.3A CN110829882B (en) | 2019-07-25 | 2019-07-25 | T-shaped piezoelectric driving device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110829882A CN110829882A (en) | 2020-02-21 |
| CN110829882B true CN110829882B (en) | 2024-04-26 |
Family
ID=69547800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910724516.3A Active CN110829882B (en) | 2019-07-25 | 2019-07-25 | T-shaped piezoelectric driving device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110829882B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113872464B (en) * | 2021-08-06 | 2024-03-08 | 季华实验室 | Piezoelectric actuator with adjustable pretightening force and automatic driving mode switching method thereof |
| CN113612406B (en) * | 2021-08-17 | 2023-07-21 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050107056A (en) * | 2004-05-07 | 2005-11-11 | 학교법인 포항공과대학교 | High speed, ultraprecision and long displacement stage |
| CN104167953A (en) * | 2014-08-26 | 2014-11-26 | 哈尔滨工业大学 | Inner driving type passive clamping piezoelectric actuator |
| CN107040163A (en) * | 2017-06-08 | 2017-08-11 | 盐城工学院 | A kind of step-by-step movement miniature piezoelectric motors and its method of work |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | The device of the pre- parasitic principle piezoelectric actuator output performance of frictional force regulation and control |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
-
2019
- 2019-07-25 CN CN201910724516.3A patent/CN110829882B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050107056A (en) * | 2004-05-07 | 2005-11-11 | 학교법인 포항공과대학교 | High speed, ultraprecision and long displacement stage |
| CN104167953A (en) * | 2014-08-26 | 2014-11-26 | 哈尔滨工业大学 | Inner driving type passive clamping piezoelectric actuator |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| CN107040163A (en) * | 2017-06-08 | 2017-08-11 | 盐城工学院 | A kind of step-by-step movement miniature piezoelectric motors and its method of work |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | The device of the pre- parasitic principle piezoelectric actuator output performance of frictional force regulation and control |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110829882A (en) | 2020-02-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111384872B (en) | Rotary driving platform and control method thereof | |
| CN110829882B (en) | T-shaped piezoelectric driving device | |
| CN110798094B (en) | Piezoelectric linear precision driving device based on parasitic inertia principle | |
| CN111162692B (en) | Clamping type piezoelectric driving platform and excitation method thereof | |
| CN110752771A (en) | Novel efficient piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN110912444B (en) | Bionic creeping type piezoelectric actuator | |
| CN110912448B (en) | Piezoelectric driving platform based on asymmetric triangle flexible hinge mechanism | |
| CN110768571B (en) | Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle | |
| CN110855181B (en) | Rotary piezoelectric driving device based on asymmetric triangular hinge mechanism | |
| CN111193435A (en) | Rotary actuator | |
| CN111245289B (en) | Piezoelectric-driven rotary motion device and control method thereof | |
| CN110855179B (en) | Creeping type piezoelectric precision driving device | |
| CN110995058A (en) | Novel piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN111384873B (en) | Bionic inchworm type driving device and excitation method thereof | |
| CN110829880B (en) | T-shaped crawling piezoelectric driving platform | |
| CN110768570B (en) | Micro-nano stepping piezoelectric driving device | |
| CN110798093B (en) | Linear piezoelectric precision driving platform | |
| CN110752768B (en) | Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism | |
| CN111130383B (en) | Inchworm type driving platform and control method thereof | |
| CN110829883A (en) | Umbrella-shaped piezoelectric driving device | |
| CN111181437B (en) | Variable friction driving device | |
| CN111193436B (en) | Stepping driving device | |
| CN110829881A (en) | Umbrella-shaped crawling type piezoelectric driving platform | |
| CN111162690B (en) | Piezoelectric driving device and control method thereof | |
| CN110912447B (en) | Piezoelectric rotary driving platform based on crawling principle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |