CN111162690B - Piezoelectric driving device and control method thereof - Google Patents
Piezoelectric driving device and control method thereof Download PDFInfo
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- CN111162690B CN111162690B CN202010049865.2A CN202010049865A CN111162690B CN 111162690 B CN111162690 B CN 111162690B CN 202010049865 A CN202010049865 A CN 202010049865A CN 111162690 B CN111162690 B CN 111162690B
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The application belongs to the field of precision driving, and particularly relates to a piezoelectric driving device and a control method thereof. The inchworm-type piezoelectric driving device solves the technical problems that the inchworm-type piezoelectric driving device is complex in structure and difficult to control. The device comprises a driving unit, a clamping unit, a rotor, a screw and a base; the driving unit and the clamping unit are mounted on the base through screws; the device enables the driving unit and the clamping unit to alternately and cooperatively work through time sequence control of the voltage signal, can realize large-stroke high-precision rotary motion, and can be applied to the fields of precision ultra-precision machining, micro-electromechanical systems, micro-operation robots, biotechnology, aerospace and the like.
Description
Technical Field
The application relates to a micro-nano precise driving device, in particular to a piezoelectric driving device and a control method thereof.
Background
The precise driving technology with micro/nano positioning precision is a key technology in the fields of high-tip science and technology such as ultra-precise machining and measurement, optical engineering, intelligent robots, modern medical treatment, aerospace science and technology and the like. In order to realize the micro/nano-scale output precision, the application of modern precise driving technology puts higher demands on the precision of the driving device. The traditional driving device has low output precision and large overall size, and cannot meet the requirements of a precision system on micro/nano-level high precision and the micro size of the driving device in the modern advanced technology. The piezoelectric driving device has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and has been increasingly applied to micro-positioning and precise ultra-precise machining. The inchworm piezoelectric driving device can ensure higher output precision and bearing capacity while obtaining larger output stroke, and is widely focused by researchers. The inchworm type driving device usually needs to adopt two clamping units and one driving unit, and has the problems of complex structure and difficult control due to multi-path time sequence control, so that the inchworm type piezoelectric driving device is not beneficial to practical application of inchworm type piezoelectric driving. Therefore, there is a need for a piezoelectric driving apparatus that can be simplified in structure and control.
Disclosure of Invention
The present application is directed to a piezoelectric driving device and a control method thereof, which solve the above problems of the prior art. The application enables a group of driving units and a group of clamping units to alternately and cooperatively work through the time sequence control of the voltage signals, can realize large-stroke high-precision rotary driving, and can effectively simplify the structure and control of the device.
The above object of the present application is achieved by the following technical solutions:
a piezoelectric driving device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are arranged on the base through the screw; the piezoelectric driving device enables the driving unit and the clamping unit to work cooperatively through time sequence control, and drives the rotor to do rotary motion.
The driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through the pre-tightening wedge block; the flexible hinge mechanism is isosceles trapezoid-like and comprises four semicircular arc-shaped thin-wall flexible hinges, the semicircular arc-shaped thin-wall flexible hinges on the same side are the same in wall thickness, the semicircular arc-shaped thin-wall flexible hinges on the left side and the right side are different in wall thickness, the arc-shaped protrusions on the tops are in contact with the rotor, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, and the piezoelectric stack can be stretched electrically to push the arc-shaped protrusions to push the rotor tightly and drive the rotor to rotate.
The clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through the pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, the initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped protrusions are in contact with the rotor, and the piezoelectric stack can stretch electrically to push the arc-shaped protrusions to prop against the rotor to achieve clamping.
A control method of a piezoelectric driving device, comprising the steps of:
step (1), initial state: the adjusting screw is used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor; two groups of voltage signals are adopted to respectively control the driving unit and the clamping unit; the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
step (2), the driving unit pushes the rotor to rotate;
step (3), the clamping unit clamps the rotor;
step (4), the driving unit is restored to an initial state;
step (5), the clamping unit is restored to an initial state, and one movement period is ended;
and (6) repeating the steps, wherein the driving unit and the clamping unit work alternately, and the driving device can realize large-stroke high-precision rotary motion.
The application has the main advantages that: the time sequence control of the voltage signals enables a group of driving units and a group of clamping units to alternately and cooperatively work, so that micro-nano large-stroke rotary motion can be realized, and meanwhile, the structure and control of the device can be effectively simplified. The device can be applied to important scientific engineering fields such as precise ultra-precise machining, micro-operation robots, micro-electromechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like.
Drawings
The accompanying drawings are included to provide a further understanding of the application, and are incorporated in and constitute a part of this specification, illustrate and explain the application and are not to be construed as limiting the application.
FIG. 1 is an isometric view of the present application;
FIG. 2 is a schematic view of a drive unit flexible hinge mechanism of the present application;
FIG. 3 is a schematic view of the flexible hinge mechanism of the clamping unit of the present application;
fig. 4 is a voltage signal applied to the drive unit piezoelectric stack and the clamp unit piezoelectric stack.
In the figure:
1. a driving unit; secondly, a rotor; third, the base;
4. a clamp unit; fifthly, screws; 1-1, piezoelectric stack I;
1-2, pre-tightening a wedge block I; 1-3, a flexible hinge mechanism I; 4-1, piezoelectric stack II;
4-2, pre-tightening the wedge block II; 4-3, a flexible hinge mechanism II; 1-3-1. Arc-shaped protrusions I;
1-3-2, a semicircular arc thin-wall flexible hinge; 4-3-1, arc-shaped protrusions II; 4-3-2. Thin-wall flexible hinge.
Detailed Description
The details of the present application and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a piezoelectric driving apparatus mainly includes a driving unit (1), a clamping unit (4), a rotor (2), a screw (5) and a base (3), the driving unit (1) and the clamping unit (4) being mounted on the base (3) by the screw (5); the piezoelectric driving device enables the driving unit (1) and the clamping unit (4) to work cooperatively through time sequence control, and the rotor (2) is driven to rotate.
The driving unit (1) comprises a flexible hinge mechanism I (1-3), a pre-tightening wedge I (1-2) and a piezoelectric stack I (1-1); the piezoelectric stack I (1-1) is arranged in the flexible hinge mechanism I (1-3) and is pre-tensioned through the pre-tensioning wedge I (1-2); the flexible hinge mechanism I (1-3) is an isosceles trapezoid, comprises four semicircular arc-shaped thin-wall flexible hinges, the semicircular arc-shaped thin-wall flexible hinges on the same side are the same in wall thickness, the semicircular arc-shaped thin-wall flexible hinges on the left side and the right side are different in wall thickness, the arc-shaped protrusions I (1-3-1) are in contact with the rotor (2), initial pretightening force between the flexible hinge mechanism I (1-3) and the rotor (2) can be adjusted through the screws (5), and the piezoelectric stack I (1-1) can be stretched electrically to push the arc-shaped protrusions I (1-3-1) to push the rotor (2) tightly and drive the rotor (2) to rotate.
The clamping unit (4) comprises a piezoelectric stack II (4-1), a pre-tightening wedge block II (4-2) and a flexible hinge mechanism II (4-3); the piezoelectric stack II (4-1) is arranged in the flexible hinge mechanism II (4-3) and is pre-tensioned through the pre-tensioning wedge block II (4-2); the flexible hinge mechanism II (4-3) comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism II (4-3) and the rotor (2) can be adjusted through the screw (5), the arc-shaped bulge II (4-3-1) is in contact with the rotor (2), and the piezoelectric stack II (4-1) can stretch electrically to push the arc-shaped bulge II (4-3-1) to push against the rotor (2) to clamp.
A control method of a piezoelectric driving device, comprising the steps of:
step (1), initial state: the adjusting screw (5) is used for controlling the initial pretightening force among the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2); two groups of voltage signals are adopted to respectively control the driving unit (1) and the clamping unit (4); the piezoelectric stacks of the driving unit (1) and the clamping unit (4) are not electrified;
step (2), the driving unit (1) pushes the rotor (2) to rotate;
step (3), the clamping unit (4) clamps the rotor (2);
step (4), the driving unit (1) is restored to an initial state;
step (5), the clamping unit (4) is restored to an initial state, and one movement period is ended;
and (6) repeating the steps, wherein the driving unit (1) and the clamping unit (4) work alternately, and the device can realize large-stroke high-precision rotary motion.
Referring to fig. 1 to 4, the specific working procedure of the present application is as follows:
step (1), initial state: the adjusting screw (5) is used for controlling the initial pretightening force among the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2). Using two sets of voltage signals U 1 、U 2 The piezoelectric stack I (1-1) in the driving unit (1) and the piezoelectric stack II (4-1) in the clamping unit (4) are respectively controlled. Neither the piezoelectric stack I (1-1) nor the piezoelectric stack II (4-1) is charged;
step (2), U 1 The signal is raised up and the signal is then turned off,the driving unit (1) operates: when the piezoelectric stack I (1-1) is electrified, the flexible hinge mechanism I (1-3) is driven to deform through extension of the inverse piezoelectric effect, so that the arc-shaped bulge I (1-3-1) of the flexible hinge mechanism I (1-3) is pressed against the rotor (2) and simultaneously drives the rotor (2) to rotate;
step (3), U 2 Rising signal, clamp unit (4) acts: before the piezoelectric stack I (1-1) loses electricity and retreats, the piezoelectric stack II (4-1) of the clamping unit (4) is electrified to push the arc-shaped bulge II (4-3-1) of the flexible hinge mechanism II (4-3) to tightly press the rotor (2) for clamping;
step (4), U 1 The falling signal, the driving unit (1) resumes: the piezoelectric stack I (1-1) is powered off and returns to an initial state, the flexible hinge mechanism I (1-3) also returns to the initial state, and the rotor (2) is still kept at a position rotated by an angle;
step (5), U 2 A falling signal, the clamp unit (4) resumes: the piezoelectric stack II (4-1) is powered off, returns to an initial state, and the flexible hinge mechanism II (4-3) also returns to the initial state, so that one movement period is ended;
and (6) repeating the steps, wherein the driving unit (1) and the clamping unit (4) work alternately, and the driving device can realize large-stroke high-precision rotary motion.
The piezoelectric driving device and the control method thereof enable a group of driving units and a group of clamping units to alternately and cooperatively work through time sequence control of voltage signals, can realize large-stroke precise rotary driving, and have the characteristics of small heating, stable driving, reliability and high efficiency.
Claims (2)
1. A piezoelectric driving device, characterized in that: the device comprises a group of driving units, a group of clamping units, a rotor, screws and a base, wherein the driving units and the clamping units are arranged on the base through the screws, and the driving units and the clamping units are oppositely arranged on two sides of the rotor; the piezoelectric driving device controls the time sequence of signals to enable the driving unit and the clamping unit to alternately and cooperatively work, so that rotary motion can be realized; the driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block, wherein the piezoelectric stack is arranged in the flexible hinge mechanism, pre-tightening is carried out through the pre-tightening wedge block, the flexible hinge mechanism is in an isosceles trapezoid shape and comprises four semicircular arc thin-wall flexible hinges, the semicircular arc thin-wall flexible hinges on the same side are identical in wall thickness, the semicircular arc thin-wall flexible hinges on the left side and the right side are different in wall thickness, the arc-shaped protrusions on the top are in contact with the rotor, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, and the piezoelectric stack can electrically extend to push the arc-shaped protrusions to push the rotor and drive the rotor to rotate; the clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block, wherein the piezoelectric stack is arranged in the flexible hinge mechanism, pre-tightening is carried out through the pre-tightening wedge block, the flexible hinge mechanism is in a similar line shape and comprises four thin-wall flexible hinges, initial pre-tightening force between the flexible hinge mechanism and a rotor can be adjusted through screws, an arc-shaped bulge is in contact with the rotor, and the piezoelectric stack can stretch electrically to push the arc-shaped bulge to prop against the rotor to clamp.
2. A control method of the piezoelectric driving device according to claim 1, characterized in that: the method comprises the following steps:
step (1), initial state: the adjusting screw is used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor; two groups of voltage signals are adopted to respectively control the driving unit and the clamping unit; the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
step (2), the driving unit pushes the rotor to rotate;
step (3), the clamping unit clamps the rotor;
step (4), the driving unit is restored to an initial state;
step (5), the clamping unit is restored to an initial state, and one movement period is ended;
and (6) repeating the steps, wherein the driving unit and the clamping unit work alternately, and the driving device can realize rotary motion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010049865.2A CN111162690B (en) | 2020-01-08 | 2020-01-08 | Piezoelectric driving device and control method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010049865.2A CN111162690B (en) | 2020-01-08 | 2020-01-08 | Piezoelectric driving device and control method thereof |
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| CN111162690B true CN111162690B (en) | 2023-08-25 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
| CN108233764A (en) * | 2017-12-05 | 2018-06-29 | 吉林大学 | Using the piezoelectric driven precision rotation driving device of special-shaped hinge transmission mechanism |
| CN109818527A (en) * | 2019-04-02 | 2019-05-28 | 吉林大学 | Isosceles trapezoid stick-slip piezoelectric linear actuator |
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2020
- 2020-01-08 CN CN202010049865.2A patent/CN111162690B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
| CN108233764A (en) * | 2017-12-05 | 2018-06-29 | 吉林大学 | Using the piezoelectric driven precision rotation driving device of special-shaped hinge transmission mechanism |
| CN109818527A (en) * | 2019-04-02 | 2019-05-28 | 吉林大学 | Isosceles trapezoid stick-slip piezoelectric linear actuator |
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