CN110829880B - T-shaped crawling piezoelectric driving platform - Google Patents
T-shaped crawling piezoelectric driving platform Download PDFInfo
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- CN110829880B CN110829880B CN201910719469.3A CN201910719469A CN110829880B CN 110829880 B CN110829880 B CN 110829880B CN 201910719469 A CN201910719469 A CN 201910719469A CN 110829880 B CN110829880 B CN 110829880B
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- 230000009193 crawling Effects 0.000 title claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 230000033001 locomotion Effects 0.000 claims abstract description 17
- 230000005611 electricity Effects 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000639 Spring steel Inorganic materials 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/065—Large signal circuits, e.g. final stages
Abstract
The invention relates to a T-shaped crawling piezoelectric driving platform which comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a screw micrometer head. The piezoelectric stack can be stretched and restored under the drive of a voltage signal, and the T-shaped flexible hinge mechanism is driven to deform so as to realize pre-tightening and driving; the pre-tightening screw and the screw micrometer head can adjust the initial pre-tightening force between the T-shaped flexible hinge mechanism and the rotor; the base supports other parts. The two groups of piezoelectric driving units work alternately to drive the rotor to realize crawling motion. The platform can be applied to the fields of precise ultra-precise machining, micro-electromechanical systems, micro-operation robots, large-scale integrated circuit manufacturing and biotechnology.
Description
Technical Field
The invention relates to the fields of precise ultra-precise machining, micro-nano operation robots and micro-electromechanical system processes, in particular to a T-shaped crawling piezoelectric driving platform.
Background
The precise driving technology with micro/nano positioning precision is a key technology in the fields of high-tip science and technology such as ultra-precise machining and measurement, optical engineering, modern medical treatment, aerospace science and technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precise driving technology puts higher requirements on the precision of a driving platform. The traditional driving platform has low output precision and large overall size, and cannot meet the requirements of a precision system in modern advanced technology on micro/nano-level high precision and micro size of the driving platform. The piezoelectric driving platform has the advantages of small size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-level output precision, has been increasingly applied to micro positioning and precise ultra-precise machining, but has very limited working stroke due to the fact that the working stroke is limited by the inverse piezoelectric effect of a single piezoelectric element, and greatly limits the application of the piezoelectric driving platform. Therefore, it is necessary to design a piezoelectric precision driving platform capable of achieving micro/nano positioning accuracy and achieving a larger working stroke.
Disclosure of Invention
The invention aims to provide a T-shaped crawling piezoelectric driving platform which solves the problems existing in the prior art. The invention has the characteristics of simple and compact structure, high output precision, large output rigidity and output load and high output frequency, and can realize the large-stroke crawling linear motion output function.
According to the invention, two groups of piezoelectric driving units alternately work, the piezoelectric stacks are electrified to push the T-shaped flexible hinge mechanism to move, driving force and pretightening force are provided, and finally linear movement of the mover is realized.
The above object of the present invention is achieved by the following technical solutions:
a T-shaped crawling piezoelectric driving platform mainly comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head, and the driving platform alternately works through two groups of piezoelectric driving units to drive the active cell to realize micro-nano crawling type linear motion. The mover adopts a high-precision linear guide rail with a sliding block, and the guide rail is fixed on the base through a screw, so that high-precision reciprocating linear motion can be realized; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism and can be pre-tightened through the pre-tightening wedge block; the pre-tightening screw and the screw micrometer head can adjust the initial pre-tightening force between the T-shaped flexible hinge mechanism and the rotor.
The piezoelectric stack is electrified to push the T-shaped flexible hinge mechanism to move, driving force and pretightening force are provided, the driving force pushes the mover to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism to push against the mover.
The piezoelectric stack adopts a shape-controllable surface type piezoelectric ceramic stack PZT.
The T-shaped flexible hinge mechanism can be made of spring steel, high-strength aluminum alloy and other materials, and is connected into a T shape through a thin-wall flexible hinge.
The upper end of the T-shaped flexible hinge mechanism and the contact part of the rotor are of arc-shaped structures.
The mover can adopt a mechanism which can realize reciprocating linear motion, such as a ball linear guide, a roller linear guide, a V-shaped groove linear guide, a dovetail groove linear guide and the like.
The invention has the main advantages that: the two groups of piezoelectric driving units alternately work, and the T-shaped flexible hinge mechanism is utilized to move to provide driving force and pretightening force to push the mover to perform crawling linear motion. The platform has the advantages of high driving reliability, good stability, high working efficiency and the like. The micro-motion precision control method can be applied to important scientific engineering fields such as precise ultra-precise machining, micro-operation robots, micro-electromechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like, greatly improves micro-motion precision of the micro-electromechanical systems, and simultaneously improves the disadvantages of large structural complexity, unreliable performance and the like of the traditional driver, and has wide application prospect.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this application, and are included to illustrate and explain the invention.
FIG. 1 is an isometric view of the present invention;
FIG. 2 is a schematic front view of the present invention;
fig. 3 is a schematic view of a T-shaped flexible hinge mechanism of the present invention.
In the figure:
1. a mover; second, pre-tightening the wedge block I; thirdly, piezoelectric stacks I;
4. piezoelectric stack II; fifthly, pre-tightening the wedge II; t-shaped flexible hinge mechanisms;
7. pre-tightening a screw; eighth, piezoelectric stack III; seventhly, pre-tightening the wedge block III;
10. a screw micrometer head; 11, a base; 12, piezoelectric stack IV;
13. a piezoelectric stack V; 14, piezoelectric stacks VI; 15, a piezoelectric driving unit II;
16. a piezoelectric driving unit I.
Detailed Description
The details of the present invention and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a T-type crawling piezoelectric driving platform mainly comprises a piezoelectric driving unit I (16), a piezoelectric driving unit II (15), a mover (1) and a base (11). The piezoelectric driving unit I (16) comprises a pre-tightening wedge I (2), a piezoelectric stack I (3), a piezoelectric stack II (4), a pre-tightening wedge II (5), a T-shaped flexible hinge mechanism (6), a pre-tightening screw (7), a piezoelectric stack III (8), a pre-tightening wedge III (9) and a screw micrometer head (10), and the piezoelectric driving unit II (15) and the piezoelectric driving unit I (16) are identical in composition structure. The rotor (1) adopts a high-precision linear guide rail with a sliding block, and the guide rail is fixed on the base (11) through a screw; the T-shaped flexible hinge mechanism (6) is arranged on the base (11) through a screw; the piezoelectric stack I (3), the piezoelectric stack III (8) and the piezoelectric stack II (4) are arranged in the T-shaped flexible hinge mechanism (6); the pre-tightening wedge blocks (2), the pre-tightening wedge blocks (5) and the pre-tightening wedge blocks (9) respectively pre-tighten the piezoelectric stack I (3), the piezoelectric stack II (4) and the piezoelectric stack III (8); the pre-tightening screw (7) is fastened on the base (11), and the initial pre-tightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1) can be adjusted through the pre-tightening screw (7) and the screw micrometer head (10); the arc-shaped structure at the upper end of the T-shaped flexible hinge mechanism (6) is contacted with the rotor (1); the base (11) plays roles in supporting, installing and fixing other parts, and the rotor (1) and the T-shaped flexible hinge mechanism (6) are installed on the base (11) through screws.
The piezoelectric stacks I (3) and III (8) are electrified to push the T-shaped flexible hinge mechanism (6) to move, driving force and pretightening force are respectively provided, the driving force pushes the rotor (1) to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism (6) to push against the rotor (1).
The piezoelectric stacks I (3), III (8) and II (4) adopt a shape-controllable surface type piezoelectric ceramic stack PZT.
The T-shaped flexible hinge mechanism (6) can be made of spring steel, high-strength aluminum alloy and other materials, and is connected into a T shape through a thin-wall flexible hinge.
The contact part of the upper end of the T-shaped flexible hinge mechanism (6) and the rotor (1) is of an arc-shaped structure.
Referring to fig. 1 to 3, the specific working procedure of the present invention is as follows:
realizing crawling motion of the rotor (1), and in an initial state: the pre-tightening screw (7) and the screw micrometer head (10) are adjusted to control the initial pre-tightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1). The piezoelectric signals in the form of four groups of square waves are adopted to respectively control the piezoelectric stacks I (3), III (8), V (13) and IV (12) in the piezoelectric driving unit I (16) and the piezoelectric driving unit II (15). The piezoelectric stack I (3) and the piezoelectric stack III (8) are not electrified, and the system is in a free state; when the piezoelectric stack I (3) and the piezoelectric stack III (8) are electrified, the T-shaped flexible hinge mechanism (6) is driven to deform to generate driving force and pretightening force through stretching by inverse piezoelectric effect, the piezoelectric stack III (8) drives the T-shaped flexible hinge mechanism (6) to press the rotor (1), and the piezoelectric stack I (3) drives the T-shaped flexible hinge mechanism (6) to drive the rotor (1) to move; when piezoelectric stack I (3) and piezoelectric stack III (8) begin to lose electricity, piezoelectric stack V (13) and piezoelectric stack IV (12) are energized. The piezoelectric stack I (3) and the piezoelectric stack III (8) recover to a free state after losing electricity, the T-shaped flexible hinge mechanism (6) recovers to an initial state, and the mover (1) is still kept at a moved position under the action of inertia force; after the piezoelectric stack V (13) and the piezoelectric stack IV (12) are energized, the piezoelectric driving unit II (15) repeats the operation of the piezoelectric driving unit I (16). When the piezoelectric stacks V (13) and IV (12) start to lose electricity, the piezoelectric stacks I (3) and III (8) are electrified, and the next cycle is started. The steps are repeated, the piezoelectric driving unit I (16) and the piezoelectric driving unit II (15) are alternately electrified to work, and the driving platform can realize crawling type movement to obtain larger output displacement. The piezoelectric stacks II (4) and III (8), VI (14) and IV (12) in the piezoelectric driving units I (16) and II (15) are respectively loaded with the same voltage, and the steps are repeated, so that the crawling type large-stroke linear motion along the opposite directions can be realized.
The T-shaped crawling piezoelectric driving platform adopts the piezoelectric stack as a driving source and the T-shaped flexible hinge mechanism as a power transmission element, has the characteristics of small heating, stable driving, reliability and high efficiency, and can realize crawling type large-stroke round-trip straight line precise driving.
Claims (3)
1. The utility model provides a T type piezoelectric drive platform that crawls, includes two sets of the same piezoelectric drive units, active cell and base, and every piezoelectric unit of group includes piezoelectric stack, T type flexible hinge mechanism, pretension screw, pretension voussoir, spiral micrometer head, its characterized in that: the driving platform drives the mover to realize micro-nano crawling motion through alternate work of two groups of piezoelectric driving units, the T-shaped flexible hinge mechanism is connected into a T shape through a thin-wall flexible hinge, and the piezoelectric stack comprises a piezoelectric stack I, a piezoelectric stack II, a piezoelectric stack V, a piezoelectric stack VI which are arranged in parallel with the moving direction of the mover, and a piezoelectric stack III and a piezoelectric stack IV which are arranged perpendicular to the moving direction of the mover;
the mover adopts a high-precision linear guide rail with a sliding block, and the guide rail is fixed on the base through a screw, so that high-precision reciprocating linear motion can be realized; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism and is pre-tightened through the pre-tightening wedge block;
initial state: the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor is adjusted by adjusting the pretightening screw and the spiral micrometer head;
the piezoelectric signals in four groups of square waves are adopted to respectively control a piezoelectric stack I (3), a piezoelectric stack III (8), a piezoelectric stack V (13) and a piezoelectric stack IV (12) in a piezoelectric driving unit I (16) and a piezoelectric driving unit II (15); the piezoelectric stack I (3) and the piezoelectric stack III (8) are not electrified, and the system is in a free state; when the piezoelectric stack I (3) and the piezoelectric stack III (8) are electrified, the T-shaped flexible hinge mechanism (6) is driven to deform to generate driving force and pretightening force through stretching by inverse piezoelectric effect, the piezoelectric stack III (8) drives the T-shaped flexible hinge mechanism (6) to press the rotor (1), and the piezoelectric stack I (3) drives the T-shaped flexible hinge mechanism (6) to drive the rotor (1) to move; when the piezoelectric stack I (3) and the piezoelectric stack III (8) start to lose electricity, the piezoelectric stack V (13) and the piezoelectric stack IV (12) are electrified, the piezoelectric stack I (3) and the piezoelectric stack III (8) recover to a free state after losing electricity, the T-shaped flexible hinge mechanism (6) returns to an initial state, and the mover (1) is still kept at a moved position under the action of inertia force; after the piezoelectric stack V (13) and the piezoelectric stack IV (12) are electrified, the piezoelectric driving unit II (15) repeats the action of the piezoelectric driving unit I (16); when the piezoelectric stacks V (13) and IV (12) start to lose electricity, the piezoelectric stacks I (3) and III (8) are electrified, and the next cycle is started; repeating the steps, the piezoelectric driving unit I (16) and the piezoelectric driving unit II (15) alternately obtain electricity to work, and the driving platform can realize crawling type movement to obtain larger output displacement;
the piezoelectric stacks II (4) and III (8), VI (14) and IV (12) in the piezoelectric driving units I (16) and II (15) are respectively loaded with the same voltage, and the steps are repeated, so that the crawling type large-stroke linear motion along the opposite directions can be realized.
2. The T-crawling piezoelectric drive platform of claim 1, wherein: the two groups of T-shaped flexible hinge mechanisms can be made of spring steel and high-strength aluminum alloy materials.
3. The T-crawling piezoelectric drive platform of claim 1, wherein: the mover can adopt a mechanism which can realize reciprocating linear motion by adopting a ball linear guide rail, a roller linear guide rail, a V-shaped groove linear guide rail and a dovetail groove linear guide rail.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910719469.3A CN110829880B (en) | 2019-07-25 | 2019-07-25 | T-shaped crawling piezoelectric driving platform |
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| CN201910719469.3A CN110829880B (en) | 2019-07-25 | 2019-07-25 | T-shaped crawling piezoelectric driving platform |
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| CN110829880A CN110829880A (en) | 2020-02-21 |
| CN110829880B true CN110829880B (en) | 2024-02-20 |
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| CN104167953A (en) * | 2014-08-26 | 2014-11-26 | 哈尔滨工业大学 | Inner driving type passive clamping piezoelectric actuator |
| CN107040163A (en) * | 2017-06-08 | 2017-08-11 | 盐城工学院 | A kind of step-by-step movement miniature piezoelectric motors and its method of work |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | The device of the pre- parasitic principle piezoelectric actuator output performance of frictional force regulation and control |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
-
2019
- 2019-07-25 CN CN201910719469.3A patent/CN110829880B/en active Active
Patent Citations (7)
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|---|---|---|---|---|
| KR20050107056A (en) * | 2004-05-07 | 2005-11-11 | 학교법인 포항공과대학교 | High speed, ultraprecision and long displacement stage |
| CN104167953A (en) * | 2014-08-26 | 2014-11-26 | 哈尔滨工业大学 | Inner driving type passive clamping piezoelectric actuator |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| CN107040163A (en) * | 2017-06-08 | 2017-08-11 | 盐城工学院 | A kind of step-by-step movement miniature piezoelectric motors and its method of work |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | The device of the pre- parasitic principle piezoelectric actuator output performance of frictional force regulation and control |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
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