CN210469144U - Novel high-efficient piezoelectricity rotation precision drive platform - Google Patents

Abstract

The utility model relates to a novel rotatory precision driving platform of high-efficient piezoelectricity, including two piezoelectric stacks, two flexible hinge mechanism of asymmetric thin wall formula, rotor, pretension screw, pretension voussoir and base. The two groups of piezoelectric stacks can be stretched and recovered under the drive of voltage signals; the two groups of asymmetric thin-wall flexible hinge mechanisms can realize parasitic inertial motion; the pretightening screw and the pretightening wedge block adjust the initial pretightening force between the asymmetric thin-wall flexible hinge mechanism and the rotor; the base plays a supporting role. The utility model discloses two piezoelectric stacks provide the drive in turn under the time sequence control of voltage, make the flexible hinge mechanism of asymmetric thin wall formula do bionical crawling motion, both increased the output load, eliminated the phenomenon of rolling back of active cell in the motion cycle again, improved the output performance of device, realized the high-efficient rotation of rotor. The platform can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro operation robots, large-scale integrated circuit manufacturing and biotechnology.

Description

Novel high-efficient piezoelectricity rotation precision drive platform

Technical Field

The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a novel efficient piezoelectric rotation precise driving platform.

Background

The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving platform. The traditional driving platform has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving platform. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. In the conventional piezoelectric inertia driving platform, a piezoelectric element and a rotor mass block are generally arranged in the motion direction of the piezoelectric inertia driving platform in parallel, the pretightening force is perpendicular to the main output direction of the piezoelectric element, and the output load of the whole platform mainly depends on the friction force generated by the pretightening force. However, piezoelectric elements, such as piezoelectric stacks, usually employ d₃₃The rigidity of the working mode is smaller on the section perpendicular to the main output direction, the generated pretightening force is smaller, the output load of the whole platform is greatly reduced, and the larger rigidity of the piezoelectric element in the main output direction is not fully utilized; the output load provided by a single piezoelectric stack is small; the rollback phenomenon in motion further degrades output performance. Therefore, it is necessary to design a novel efficient piezoelectric rotary precision driving platform which makes full use of the stiffness of the piezoelectric stack in the main output direction, eliminates the rollback phenomenon, improves the output load, and further improves the output load of the piezoelectric driving platform.

Disclosure of Invention

The invention aims to provide a novel efficient piezoelectric rotation precision driving platform, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the function of high-efficiency rotary motion output.

According to the invention, two groups of piezoelectric driving units are adopted, the main output direction of the piezoelectric stacks and the rotation center of the rotor are arranged on the same straight line, an asymmetric thin-wall flexible hinge mechanism with good rigidity output characteristic is adopted, and under the alternate driving of the two piezoelectric stacks, the asymmetric thin-wall flexible hinge mechanism sequentially realizes parasitic inertia motion according to time sequence, transfers composite load and finally realizes the rotation motion of the rotor.

The above object of the present invention is achieved by the following technical solutions:

the utility model provides a novel rotatory precision driving platform of high-efficient piezoelectricity, mainly includes piezoelectricity drive unit I and piezoelectricity drive unit II, rotor (5), pretension voussoir I, II (2, 8), pretension screw I, II (1, 9), base (10), its characterized in that: the precision driving platform utilizes a parasitic inertia principle and adopts two groups of driving units to realize high-efficiency piezoelectric rotation precision driving.

The piezoelectric driving unit I comprises a piezoelectric stack I (3) and an asymmetric thin-wall flexible hinge mechanism I (4), the piezoelectric driving unit II comprises a piezoelectric stack II (7) and an asymmetric thin-wall flexible hinge mechanism II (6), the piezoelectric stacks I, II (3 and 7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanisms I, II (4 and 6), and the main output direction of the piezoelectric stacks and the rotation center of the rotor (5) are on the same straight line; the piezoelectric stack I (3) can drive the asymmetric thin-wall flexible hinge mechanism I (4) to extend, the piezoelectric stack II (7) can drive the asymmetric thin-wall flexible hinge mechanism II (6) to extend, and the timing sequence between the piezoelectric stacks I, II (3 and 7) is controlled to alternately work, so that parasitic inertia motion between the asymmetric thin-wall flexible hinge mechanism I, II (4 and 6) and the rotor (5) is realized, and further the high-efficiency rotation motion of the rotor (5) is driven;

the rotor (5) comprises a rotating platform, a bearing and a rotating shaft, wherein the rotating platform is in interference fit with an outer ring of the bearing, the rotating shaft is in interference fit with an inner ring of the bearing, and the rotating shaft is in interference fit with the base (10); the structure of the rotor (5) uses a high-precision bearing to reduce the friction loss, and the bearing is connected with the base (10) through a rotating shaft to realize high-precision rotating motion;

the asymmetric thin-wall flexible hinge mechanisms I, II (4, 6) are mounted on the base (10) through screws; the piezoelectric stacks I, II (3, 7) are arranged in asymmetric thin-wall flexible hinge mechanisms I, II (4, 6), and the main output direction of the piezoelectric stacks and the rotation center of the rotor (5) are on the same straight line; the piezoelectric stacks I, II (3, 7) can be pre-tensioned by pre-tensioning wedges I, II (2, 8); the pre-tightening screws I, II (1, 9) are fastened on the base (10) and are contacted with the lower ends of the asymmetric thin-wall hinge mechanisms I, II (4, 6); the pretightening screws I, II (1, 9) can adjust the initial pretightening force between the asymmetric thin-wall flexible hinge mechanism I, II (4, 6) and the rotor (5); the asymmetric thin-wall flexible hinge mechanisms I, II (4, 6) can be made of spring steel or high-strength aluminum alloy and are connected through eight thin-wall flexible hinges to form an asymmetric parallelogram structure, and the upper end arc structure of the asymmetric parallelogram structure is in contact with the rotor (5); the base (10) is used for supporting and installing and fixing other parts. The main output direction of the piezoelectric stacks I, II (3, 7) and the rotation center of the rotor (5) are on the same straight line, and the rigidity of the piezoelectric stacks I, II (3, 7) in the main output direction is fully utilized; the asymmetric thin-wall flexible hinge mechanism I, II (4, 6) has good rigidity output performance, the upper end of the asymmetric thin-wall flexible hinge mechanism can bear larger pretightening force, and the movement is stable and efficient.

The main advantages of the invention are: by utilizing a parasitic inertia motion principle, two groups of piezoelectric driving units work alternately according to a time sequence, and the backspacing phenomenon in the motion process is eliminated; the main output direction of the piezoelectric stack and the rotation center of the rotor are on the same straight line, and the load is transferred by using the parasitic inertia motion of the asymmetric thin-wall flexible hinge mechanism; the invention greatly improves the output load of the driving platform, realizes the rotary motion of the rotor, has the advantages of high driving reliability, good stability, high working efficiency and the like, and can be applied to the important scientific engineering fields of precise and ultra-precise processing, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like. The invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.

Drawings

FIG. 1 is a schematic isometric view of the present invention;

FIG. 2 is a schematic front view of the present invention;

FIG. 3 is a schematic left side view of the present invention;

FIG. 4 is a schematic view of an asymmetric thin wall flexible hinge mechanism of the present invention.

In the figure:

1. pre-tightening the screw I; 2, pre-tightening a wedge block I; 3, piezoelectric stack I;

4. an asymmetric thin-wall flexible hinge mechanism I; 5. a rotor; 6, an asymmetric thin-wall flexible hinge mechanism II;

7. a piezoelectric stack II; 8, pre-tightening a wedge block II; 9. pre-tightening the screw II;

10. a base.

Detailed Description

The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.

Referring to fig. 1 to 4, a novel efficient piezoelectric rotary precision driving platform mainly includes a piezoelectric driving unit I, a piezoelectric driving unit II, a rotor (5), a pre-tightening wedge I, II (2, 8), a pre-tightening screw I, II (1, 9), and a base (10), and is characterized in that: the precision driving platform utilizes a parasitic inertia principle and adopts two groups of driving units to realize high-efficiency piezoelectric rotation precision driving. The piezoelectric driving unit I comprises a piezoelectric stack I (3) and an asymmetric thin-wall flexible hinge mechanism I (4), the piezoelectric driving unit II comprises a piezoelectric stack II (7) and an asymmetric thin-wall flexible hinge mechanism II (6), the piezoelectric stacks I, II (3 and 7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanisms I, II (4 and 6), and the main output direction of the piezoelectric stacks and the rotation center of the rotor (5) are on the same straight line; the piezoelectric stack I (3) can drive the asymmetric thin-wall flexible hinge mechanism I (4) to extend, the piezoelectric stack II (7) can drive the asymmetric thin-wall flexible hinge mechanism II (6) to extend, and the parasitic inertia motion between the asymmetric thin-wall flexible hinge mechanism I, II (4, 6) and the rotor (5) is realized by controlling the time sequence between the piezoelectric stacks I, II (3, 7) and working alternately, so that the high-efficiency rotation motion of the rotor (5) is driven; the rotor (5) comprises a rotating platform, a bearing and a rotating shaft, wherein the rotating platform is in interference fit with an outer ring of the bearing, the rotating shaft is in interference fit with an inner ring of the bearing, and the rotating shaft is in interference fit with the base (10); the structure of the rotor (5) uses a high-precision bearing to reduce the friction loss, and the bearing is connected with the base (10) through a rotating shaft to realize high-precision rotating motion; the asymmetric thin-wall flexible hinge mechanisms I, II (4, 6) are mounted on the base (10) through screws; the piezoelectric stacks I, II (3, 7) are arranged in asymmetric thin-wall flexible hinge mechanisms I, II (4, 6), and the main output direction of the piezoelectric stacks and the rotation center of the rotor (5) are on the same straight line; the piezoelectric stacks I, II (3, 7) can be pre-tensioned by pre-tensioning wedges I, II (2, 8); the pre-tightening screws I, II (1, 9) are fastened on the base (10) and are in contact with the lower ends of the asymmetric thin-wall hinge mechanisms I, II (4, 6), and the pre-tightening screws I, II (1, 9) can adjust the initial pre-tightening force between the asymmetric thin-wall flexible hinge mechanisms I, II (4, 6) and the rotor (5); the asymmetric thin-wall flexible hinge mechanisms I, II (4, 6) can be made of spring steel or high-strength aluminum alloy and are connected through eight thin-wall flexible hinges to form an asymmetric parallelogram structure, and the upper end arc structure of the asymmetric parallelogram structure is in contact with the rotor (5); the base (10) is used for supporting and installing and fixing other parts.

The main output direction of the piezoelectric stacks I, II (3, 7) is in a straight line with the rotation center of the rotor (5).

Referring to fig. 1 to 4, the specific working process of the present invention is as follows:

the realization of rotor step-by-step rotary motion, initial state: the pretightening screws I, II (1, 9) are respectively adjusted to adjust the contact distance between the asymmetric thin-wall flexible hinge mechanisms I, II (4, 6) and the rotor (5), namely the initial pretightening force in the parasitic motion process. The piezoelectric stack I, II (3, 7) is controlled with a piezoelectric signal in the form of a sawtooth or triangular wave. When the piezoelectric stacks I, II (3, 7) are not charged, the system is in a free state; when only the piezoelectric stack I (3) is electrified, the asymmetric thin-wall flexible hinge mechanism I (4) is pushed to deform by stretching through the inverse piezoelectric effect, the rotor (5) is tightly pressed by the asymmetric thin-wall flexible hinge mechanism I (4), and the rotor (5) is driven to rotate by the asymmetric thin-wall flexible hinge mechanism I (4) under the action of static friction force between the rotor (5) and the rotor; when the piezoelectric stack I (3) is about to lose power, the piezoelectric stack II (7) is electrified to extend to push the asymmetric thin-wall flexible hinge mechanism II (6) to deform, the asymmetric thin-wall flexible hinge mechanism II (6) compresses the rotor (5), and the rotor (5) is driven to continue to rotate under the action of static friction force between the rotor and the rotor (5). When the piezoelectric stack II (7) is about to lose power, the piezoelectric stack I (3) is electrically extended again to drive the asymmetric thin-wall flexible hinge mechanism I (4) to do parasitic inertial motion, and the motion cycle of the next period is started. In the process, when the piezoelectric stack I (3) returns to the initial position after power failure, the asymmetric thin-wall flexible hinge mechanism I (4) also returns to the initial state. Similarly, when the piezoelectric stack II (7) is de-energized and rapidly returns to the initial position, the asymmetric thin-wall flexible hinge mechanism II (6) also returns to the initial state. By repeating the process, the driving platform can realize high-efficiency rotary motion and obtain a larger output rotation angle.

The invention relates to a novel efficient piezoelectric rotation precision driving platform, which adopts two groups of piezoelectric stacks as driving sources and an asymmetric thin-wall type flexible hinge mechanism as a power transmission element, has the characteristics of small heat generation, stable driving, reliability and high efficiency, and can realize functions of efficient rotation precision movement and the like.

Claims (3)

1. The utility model provides a novel rotatory accurate drive platform of high-efficient piezoelectricity, includes piezoelectricity drive unit I and piezoelectricity drive unit II, rotor (5), pretension voussoir I, II (2, 8), pretension screw I, II (1, 9), base (10), its characterized in that: the precision driving platform adopts two groups of driving units to realize high-efficiency piezoelectric rotation precision driving by utilizing a parasitic inertia principle; the piezoelectric driving unit I comprises a piezoelectric stack I (3) and an asymmetric thin-wall flexible hinge mechanism I (4), the piezoelectric driving unit II comprises a piezoelectric stack II (7) and an asymmetric thin-wall flexible hinge mechanism II (6), the piezoelectric stacks I, II (3 and 7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanisms I, II (4 and 6), the piezoelectric stack I (3) can drive the asymmetric thin-wall flexible hinge mechanism I (4) to extend, the piezoelectric stack II (7) can drive the asymmetric thin-wall flexible hinge mechanism II (6) to extend, and the piezoelectric stacks I, II (3 and 7) are controlled to work alternately to realize parasitic inertia motion between the asymmetric thin-wall flexible hinge mechanisms I, II (4 and 6) and the rotor (5) so as to drive the rotor (5) to rotate efficiently; the rotor (5) comprises a rotating platform, a bearing and a rotating shaft, wherein the rotating platform is in interference fit with an outer ring of the bearing, the rotating shaft is in interference fit with an inner ring of the bearing, and the rotating shaft is in interference fit with the base (10); the structure of the rotor (5) uses a high-precision bearing to reduce the friction loss, and the bearing is connected with the base (10) through a rotating shaft to realize high-precision rotating motion; the asymmetric thin-wall flexible hinge mechanisms I, II (4, 6) are mounted on the base (10) through screws; the piezoelectric stacks I, II (3, 7) can be pre-tensioned by pre-tensioning wedges I, II (2, 8); the pretension screw I, II (1, 9) can adjust the initial pretension between the asymmetric thin-walled flexible hinge mechanism I, II (4, 6) and the rotor (5).

2. The novel efficient piezoelectric rotary precision driving platform as claimed in claim 1, wherein the designed asymmetric thin-walled flexible hinge mechanism I, II (4, 6) can be made of spring steel or high-strength aluminum alloy, and is connected by eight thin-walled flexible hinges to form an asymmetric parallelogram structure.

3. A novel efficient piezoelectric rotary precision drive platform as claimed in claim 1, wherein the main output direction of piezoelectric stack I, II (3, 7) is aligned with the rotation center of rotor (5).

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