CN111384873A - Bionic inchworm type driving device and excitation method thereof - Google Patents

Bionic inchworm type driving device and excitation method thereof Download PDF

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Publication number
CN111384873A
CN111384873A CN202010050003.1A CN202010050003A CN111384873A CN 111384873 A CN111384873 A CN 111384873A CN 202010050003 A CN202010050003 A CN 202010050003A CN 111384873 A CN111384873 A CN 111384873A
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rotor
hinge mechanism
unit
flexible hinge
clamping
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CN202010050003.1A
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CN111384873B (en
Inventor
万嫩
李建平
温建明
张昱
马继杰
胡意立
程光明
阚君武
蔡俊杰
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Zhejiang Normal University CJNU
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Zhejiang Normal University CJNU
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023Inchworm motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • H02N2/123Mechanical transmission means, e.g. for gearing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

Abstract

The invention belongs to the field of precision driving, and particularly relates to a bionic inchworm type driving device and an excitation method thereof. The inchworm type piezoelectric driving device solves the technical problems of complex structure and difficult control of the inchworm type piezoelectric driving device. The device comprises a driving unit, a clamping unit, a rotor, a screw and a base; the driving unit and the clamping unit are installed on the base through screws; the device adopts an excitation method of voltage signal time sequence control, so that the driving unit and the clamping unit alternately and cooperatively work, can realize large-stroke high-precision rotary motion, and can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro-operation robots, biotechnology, aerospace and the like.

Description

Bionic inchworm type driving device and excitation method thereof
Technical Field
The invention relates to a micro-nano precise driving device, in particular to a bionic inchworm type driving device and an excitation method thereof.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, intelligent robots, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving device. The traditional driving device has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving device. The piezoelectric driving device has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. The inchworm piezoelectric driving device can ensure higher output precision and bearing capacity while obtaining larger output stroke, and is widely concerned by researchers. The inchworm-type driving device usually needs two clamping units and one driving unit, and is controlled in multiple ways, so that the problems of complex structure and difficult control exist, and the inchworm-type piezoelectric driving device is not beneficial to practical application of inchworm-type piezoelectric driving. Therefore, there is a need for an inchworm-type piezoelectric actuator that is simplified in structure and control.
Disclosure of Invention
The invention aims to provide a bionic inchworm type driving device and an excitation method thereof, and solves the problems in the prior art. According to the invention, through the time sequence control of the voltage signal, the group of driving units and the group of clamping units are used for alternately and cooperatively working, so that the large-stroke high-precision rotary driving can be realized, and the structure and the control of the device can be effectively simplified.
The above object of the present invention is achieved by the following technical solutions:
a bionic inchworm type driving device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the device enables the driving unit and the clamping unit to work alternately and cooperatively through controlling the time sequence of the voltage signal, and drives the rotor to rotate.
The driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is obliquely arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through the screws, the arc-shaped bulge part is in contact with the rotor, and the piezoelectric stack can push the arc-shaped bulge part to tightly jack the rotor and drive the rotor to rotate after being electrically extended.
The clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped bulge part is in contact with the rotor, and the arc-shaped bulge part can be pushed to prop against the rotor to realize clamping by the electric extension of the piezoelectric stack.
An excitation method of a bionic inchworm type driving device comprises the following steps:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
⑥, repeating the above steps, and alternately operating the driving unit and the clamping unit, wherein the driving device can realize large-stroke high-precision rotary motion.
The main advantages of the invention are: through the sequential control of voltage signals, a group of driving units and a group of clamping units are adopted to alternately and cooperatively work, the micro-nano large-stroke rotary motion can be realized, and the structure and the control of the device can be effectively simplified. The device can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic view of the flexible hinge mechanism of the drive unit of the present invention;
FIG. 3 is a schematic view of the clamping unit flexible hinge mechanism of the present invention;
fig. 4 is a voltage signal applied to the piezoelectric stacks of the driving unit and the clamping unit.
In the figure:
1. a drive unit; 2, a rotor; 3, a base;
4. a clamping unit; 5, a screw; 1-1, piezoelectric stack I;
1-2, pre-tightening a wedge block I; 1-3, a flexible hinge mechanism I; 4-1, piezoelectric stack II;
4-2, pre-tightening the wedge block II; 4-3, flexible hinge mechanism II.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a bionic inchworm-type driving device mainly comprises a driving unit (1), a clamping unit (4), a rotor (2), a screw (5) and a base (3), wherein the driving unit (1) and the clamping unit (4) are installed on the base (3) through the screw (5); the device enables the driving unit (1) and the clamping unit (4) to work alternately and cooperatively through controlling the time sequence of the voltage signal, and drives the rotor (2) to rotate.
The driving unit (1) comprises a flexible hinge mechanism I (1-3), a pre-tightening wedge I (1-2) and a piezoelectric stack I (1-1); the piezoelectric stack I (1-1) is arranged in the flexible hinge mechanism I (1-3) and is pre-tightened through a pre-tightening wedge block I (1-2); the flexible hinge mechanism I (1-3) comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism I (1-3) and the rotor (2) can be adjusted through the screws (5), the arc-shaped convex part is in contact with the rotor (2), and the piezoelectric stack I (1-1) can be stretched by electricity to push the arc-shaped convex part to jack the rotor (2) and drive the rotor (2) to rotate.
The clamping unit (4) comprises a piezoelectric stack II (4-1), a pre-tightening wedge II (4-2) and a flexible hinge mechanism II (4-3); the piezoelectric stack II (4-1) is arranged in the flexible hinge mechanism II (4-3) and is pre-tightened through a pre-tightening wedge block II (4-2); the flexible hinge mechanism II (4-3) comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism II (4-3) and the rotor (2) can be adjusted through the screws (5), the arc-shaped convex part is in contact with the rotor (2), and the piezoelectric stack II (4-1) can be electrically extended to push the arc-shaped convex part to prop against the rotor (2) to realize clamping.
An excitation method of a bionic inchworm type driving device comprises the following steps:
①, in an initial state, adjusting a screw (5) to control initial pretightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2), and respectively controlling the driving unit (1) and the clamping unit (4) by adopting two groups of voltage signals, wherein piezoelectric stacks of the driving unit (1) and the clamping unit (4) are not electrified;
②, the driving unit (1) pushes the rotor (2) to rotate;
③, clamping the rotor (2) by a clamping unit (4);
④, the driving unit (1) is recovered to the initial state;
⑤, the clamping unit (4) is restored to the initial state, and one movement cycle is finished;
⑥, repeating the above steps, and alternately operating the driving unit (1) and the clamping unit (4), wherein the driving device can realize large-stroke high-precision rotary motion.
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
①, in the initial state, adjusting the screw (5) to control the initial pre-tightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2) and adopting two groups of voltage signals U1、U2The piezoelectric stacks I (1-1) in the driving unit (1) and the piezoelectric stacks II (4-1) in the clamping unit (4) are respectively controlled. The piezoelectric stack I (1-1) and the piezoelectric stack II (4-1) are not electrified;
step ②, U1The rising signal, the drive unit (1) acts: when the piezoelectric stack I (1-1) is electrified, the piezoelectric stack I (1-1) extends through the inverse piezoelectric effect to drive the flexible hinge mechanism I (1-3) to deform, so that the arc-shaped bulge of the flexible hinge mechanism I (1-3) tightly pushes the rotor (2) and drives the rotor (2) to rotate;
step ③, U2The rising signal, the clamping unit (4) acts: before the piezoelectric stack I (1-1) loses power and returns, the piezoelectric stack II (4-1) of the clamping unit (4) is electrified, and the arc-shaped bulge of the flexible hinge mechanism II (4-3) is pushed to tightly push the rotor (2) to clamp through the extension of the inverse piezoelectric effect;
step ④, U1The drive unit (1) recovers: the piezoelectric stack I (1-1) loses power and restores to the initial state, the flexible hinge mechanism I (1-3) also restores to the initial state, and the rotor (2) is still kept at the position after rotating for an angle;
step ⑤, U2The falling signal, the clamping unit (4) recovers: the piezoelectric stack II (4-1) loses power and restores to the initial state, the flexible hinge mechanism II (4-3) also restores to the initial state, and one motion cycle is finished;
the steps are repeated, the driving unit (1) and the clamping unit (4) work alternately, and the driving device can realize large-stroke high-precision rotary motion.
According to the bionic inchworm type driving device and the excitation method thereof, the large-stroke precise rotation driving can be realized by controlling the time sequence of a voltage signal and adopting a group of driving units and a group of clamping units to alternately and cooperatively work, and the bionic inchworm type driving device has the characteristics of small heat, stable driving, reliability and high efficiency.

Claims (4)

1. The utility model provides a bionical inchworm formula drive arrangement which characterized in that: the clamping device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the device adopts an excitation method of voltage signal time sequence control, so that the driving unit and the clamping unit alternately work in a cooperative mode, and the rotary motion can be realized.
2. The biomimetic inchworm-type drive device according to claim 1, wherein: the driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is obliquely arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through the screws, the arc-shaped bulge part is in contact with the rotor, and the piezoelectric stack can push the arc-shaped bulge part to tightly jack the rotor and drive the rotor to rotate after being electrically extended.
3. The biomimetic inchworm-type drive device according to claim 1, wherein: the clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped bulge part is in contact with the rotor, and the arc-shaped bulge part can be pushed to prop against the rotor to realize clamping by the electric extension of the piezoelectric stack.
4. A method of actuating a biomimetic inchworm-type actuator according to claim 1, wherein: the method comprises the following steps:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
and repeating the steps, and alternately working the driving unit and the clamping unit, wherein the driving device can realize rotary motion.
CN202010050003.1A 2020-01-08 2020-01-08 Bionic inchworm type driving device and excitation method thereof Active CN111384873B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113162465A (en) * 2021-04-22 2021-07-23 燕山大学 Piezoelectric stack driving stepping type rotating motor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110109197A1 (en) * 2009-11-12 2011-05-12 Casio Computer Co., Ltd. Drive device
CN102723893A (en) * 2012-07-03 2012-10-10 吉林大学 Micro-nano simulation rotating drive device
CN108322090A (en) * 2018-03-04 2018-07-24 长春工业大学 External stirs type rotary piezoelectric stick-slip driver and its driving method
CN109217717A (en) * 2018-09-26 2019-01-15 吉林大学 Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement
CN109713936A (en) * 2019-03-20 2019-05-03 杨晓峰 Elliptical vibration piezoelectric actuator and its driving method
CN109756148A (en) * 2019-03-20 2019-05-14 唐金岩 The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement
CN110048636A (en) * 2019-04-19 2019-07-23 西安科技大学 Piezoelectric supersonic driver and its application method based on longitudinal-shaking sandwich formula energy converter

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110109197A1 (en) * 2009-11-12 2011-05-12 Casio Computer Co., Ltd. Drive device
CN102723893A (en) * 2012-07-03 2012-10-10 吉林大学 Micro-nano simulation rotating drive device
CN108322090A (en) * 2018-03-04 2018-07-24 长春工业大学 External stirs type rotary piezoelectric stick-slip driver and its driving method
CN109217717A (en) * 2018-09-26 2019-01-15 吉林大学 Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement
CN109713936A (en) * 2019-03-20 2019-05-03 杨晓峰 Elliptical vibration piezoelectric actuator and its driving method
CN109756148A (en) * 2019-03-20 2019-05-14 唐金岩 The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement
CN110048636A (en) * 2019-04-19 2019-07-23 西安科技大学 Piezoelectric supersonic driver and its application method based on longitudinal-shaking sandwich formula energy converter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113162465A (en) * 2021-04-22 2021-07-23 燕山大学 Piezoelectric stack driving stepping type rotating motor

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