CN109756148A - The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement - Google Patents
The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement Download PDFInfo
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- CN109756148A CN109756148A CN201910210626.8A CN201910210626A CN109756148A CN 109756148 A CN109756148 A CN 109756148A CN 201910210626 A CN201910210626 A CN 201910210626A CN 109756148 A CN109756148 A CN 109756148A
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Abstract
The present invention relates to a kind of apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement, belong to precision machinery field.Device includes pedestal, subunit, driving unit, precompression adjustment unit.Subunit is mounted on the boss of pedestal；Precompression adjustment unit is fixed by screws on pedestal；Driving unit is mounted on precompression adjustment unit.This method so that parasitic principle piezoelectric actuator pressure during driving is constant, and then realizes the active suppression for retracting and moving by the synergistic effect of driving piezoelectric stack and promotion piezoelectric stack generation in driving unit.Advantage is: can significantly inhibit rollback movement, realize ideal step motion, and can eliminate the influence of mission nonlinear generation to a certain extent, convenient for subsequent accurate control.It is had broad application prospects in fields such as accurate and Ultra-precision positioning, accurate measurement, Precision Machining assembly, bio-genetics and material surface property detections.
Description
Technical field
The present invention relates to precision machinery field, in particular to a kind of active suppression parasitic motion principle piezoelectric actuator retracts
The apparatus and method of movement.The present invention solves the problems, such as that hunt effect generates rollback from principle, realizes the ideal without rollback
Step motion, convenient for subsequent accurate control.It can be used for precision positioning, accurate measurement, precision optics, precision/Ultra-precision Turning etc.
Realize high-precision straight line positioning in field.
Background technique
With the promotion for the demands such as processing, position, measure to micro-/ nano, the demand of high-precision is increasingly urgent to.
Using piezoelectric stack made of piezoelectric material, apply certain driving voltage to it, under the effect of its inverse piezoelectric effect, can produce
The displacement of micro-nano-scale.So the advantages that piezoelectric driving technology is because of its high-resolution, fast response time, lower energy consumption, obtains
The extensive concern of researcher.Based on inverse piezoelectric effect, occur a variety of different realizing precision positioning using piezoelectric stack
Driver is broadly divided into two major classes: Direct Action Type and step-by-step movement.Direct Action Type piezoelectric actuator is fast with response, output accuracy is high, defeated
The features such as thrust is big out (Mechanical Systems and Signal Processing, 99,747-759,2018), mainly
Being divided into has enlarger and without two kinds of enlarger, but its stroke is limited, even if having amplifying device generally only tens microns,
Limit its application occasion.Step-by-step movement piezoelectric actuator is in such a way that stepping is accumulated, it can be achieved that theoretical unlimited stroke, obtains big
Amount application.According to different driving principles, step-by-step movement piezoelectric actuator specifically includes that ultrasonic Piezoelectric Driving, inertia-type, stick-slip
Formula, Inchworm type, parasitic type piezoelectric actuator etc..Ultrasonic Piezoelectric Driving has many advantages, such as low noise, large torque, without rollback phenomenon
(Sensors and Actuators A:Physical, 285,182-189,2019), but since it is using resonance driving principle,
Lead to that driver service life is shorter, easy to wear, heat dissipation performance is poor, and curve of output is unstable.Inertia-type and stick-slip formula are driven
Dynamic device, which has, controls simple, fast response time, at low cost, advantages of simple structure and simple, but its bearing capacity is small, is also easy to produce power of toppling
Square, and since it is greatly limited with inevitable rollback phenomenon, driveability and application prospect.Inchworm type piezoelectricity
Driver can be realized biggish torque, theoretical unlimited stroke and no rollback phenomenon (Sensors and by clamping mechanism
Actuators A:Physical, 194,269-276,2013), but the driver of the more other principles of its structure wants complexity to be permitted
It is more, cause processing, assembly and control difficult, and there are biggish impacts for the conversion from driving to clamper movement, one
Determine the stability that its output movement is weakened in degree.The characteristics of parasitic type piezoelectric actuator is with stick-slip formula is similar, by reasonable
Structure design, continuous straight line (Review of Scientific can be realized in more compact space
Instruments, 83,055002,2012) or rotation driving (Review of Scientific Instruments, 84,
096105,2013), but hunt effect increases contact pressure while another direction moves, and causes biggish additional
Frictional force, so that its rollback phenomenon is significant, drive efficiency and positioning accuracy are restricted.
In conclusion current piezoelectric actuator, or can realize the step motion of no rollback, but structure, processing, assembly with
Control is complicated or structure, processing, assembly and control are relatively easy, but has apparent rollback phenomenon during step motion.Due to
The presence of rollback phenomenon, the driveability of the piezoelectric actuator of the types such as stick-slip formula, parasitic type and inertia-type receive greatly
Limitation.Therefore, the piezoelectric actuator for developing the types such as stick-slip formula, parasitic type and the inertia-type for being able to suppress the movement that retracts is to work as
The hot and difficult issue of preceding research and scientific circles and industry there is an urgent need to.
Summary of the invention
The purpose of the present invention is to provide a kind of devices of active suppression parasitic motion principle piezoelectric actuator rollback movement
With method, solves the above problem of the existing technology.Active suppression parasitic motion principle piezoelectric actuator of the invention returns
The apparatus structure for moving back movement is simple, and movement travel is big.It is acted synergistically by two piezoelectric stacks of driving unit, is effectively inhibited
The rollback movement that parasitic principle piezoelectric actuator generates, realizes preferably without rollback step motion.It, can be into one by the present invention
Step improves the kinetic characteristic of parasitic principle piezoelectric actuator, expands its application field and range, and expansible suitable for stick-slip formula
Etc. types piezoelectric actuator.
Above-mentioned purpose of the invention is achieved through the following technical solutions:
The device of active suppression parasitic motion principle piezoelectric actuator rollback movement, including pedestal 1, subunit, driving
Unit, precompression adjustment unit, subunit are mounted on the boss of pedestal 1, and precompression adjustment unit is fixed by screws in
On pedestal 1, driving unit is mounted on precompression adjustment unit by screw 8, respectively to realize moving freely for mover, just
Beginning gap and precompression adjustment and active suppression rollback phenomenon cooperative motion generate.
The driving unit includes driving hinge 9, driving piezoelectric stack 7, voussoir a4, promotes piezoelectric stack 3, voussoir
B2, the driving piezoelectric stack 7 and promotion piezoelectric stack 3 are mounted on driving hinge 9 by voussoir a4 and voussoir b2 preload respectively
In；By applying coordinated drive electric signal to driving piezoelectric stack 7 and promotion piezoelectric stack 3, active suppression hunt effect is realized
The function of principle piezoelectric actuator rollback movement.
The subunit is made of guide rail 5, sliding block 6, and guide rail 5 is fixed by screws on pedestal 1, and sliding block 6 is driving
It moves linearly under the driving force effect that moving cell generates along guide rail 5.
The precompression adjustment unit includes that coarse regulation mechanism 10, screw 8 adjust by adjusting precompression adjustment unit
Save the primary clearance and precompression between driving unit and subunit.
Another object of the present invention is to provide a kind of rollback movements of active suppression parasitic motion principle piezoelectric actuator
Method, comprising the following steps:
A) coarse regulation mechanism 10 is adjusted, realizes the adjustment of precompression between driving hinge 9 and sliding block 6；
B) electric signal of proportionate relationship is applied to driving piezoelectric stack 7 and promotion piezoelectric stack 3；In inverse piezoelectric effect
Under effect, driving piezoelectric stack 7 and the first slowly elongation of promotion piezoelectric stack 3, the driving end of driving hinge 9 are moved along y negative direction,
And keep the pressure between sliding block 6 constant, and then sliding block 6 is driven to move a distance along y negative direction；Drive piezoelectric stack 7
Voltage decline rapidly after the holding stage, due to its variation rapidly and solve parasitic motion principle piezoelectric actuator driving
Rollback movement can be effectively suppressed in the problem of pressure increases in the process；
C) it adjusts driving piezoelectric stack 7 and promotes the voltage magnitude and frequency of piezoelectric stack 3, with the movement of adjusting slider 6
Speed.
The beneficial effects of the present invention are: apparatus structure is simple, movement travel is big, can be from original in conjunction with the method for proposition
Active suppression, which retracts, in reason moves, and realizes preferably without rollback step motion, effectively improves the drive of parasitic motion principle piezoelectricity
The kinetic characteristic of dynamic device.Based on cooperative motion driving principle, this driver can ensure to drive pressure process constant, ensure that drive
The linear output character of dynamic device；Driving effect is the two coupling, eliminates influence of the mission nonlinear to output；By adjusting pre-
Primary clearance and precompression can be changed, so as to adjust the bearing capacity of device in pressure adjustment unit；By changing input electrical signal
Amplitude and frequency can adjust single step displacement and driving speed, and then promote driveability.Rollback movement proposed by the present invention
Suppressing method is equally applicable to the piezoelectric actuator of the principles such as stick-slip formula, and wide adaptation range is practical.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair
Bright illustrative example and its explanation is used to explain the present invention, and is not constituted improper limitations of the present invention.
Fig. 1 is that the stereochemical structure of the device of active suppression parasitic motion principle piezoelectric actuator rollback movement of the invention is shown
It is intended to；
Fig. 2 is driving piezoelectric stack independent role schematic diagram of the invention；
Fig. 3 is promotion piezoelectric stack independent role schematic diagram of the invention；
Fig. 4 is the schematic top plan view of driving unit of the invention；
Fig. 5 is driving unit equivalent mechanism schematic diagram of the invention；
Fig. 6 is the timing control figure of active suppression parasitic motion principle piezoelectric actuator rollback movement of the invention；
Fig. 7 is the process schematic of active suppression parasitic motion principle piezoelectric actuator rollback movement of the invention；
Fig. 8 is present invention driving piezoelectric stack independent role process schematic；
Fig. 9 is apparatus of the present invention in 4Hz, drives piezoelectric stack under different driving voltage when independent role, the reality measured
Border is displaced curve of output；
Figure 10 is apparatus of the present invention in 4Hz, drives the driving voltage 52V of piezoelectric stack, difference promotes the drive of piezoelectric stack
The actual displacement curve of output measured under dynamic voltage conditions.
In figure: 1, pedestal；2, voussoir b；3, piezoelectric stack is promoted；4, voussoir a；5, guide rail；6, sliding block；7, piezo stack is driven
Heap；8, screw；9, hinge is driven；10, coarse regulation mechanism.
Specific embodiment
Detailed content and its specific embodiment of the invention are further illustrated with reference to the accompanying drawing.
Referring to the dress that shown in Fig. 1 to Figure 10, active suppression parasitic motion principle piezoelectric actuator rollback of the invention is moved
It sets and method, device includes pedestal, subunit, driving unit, precompression adjustment unit.Subunit is mounted on the convex of pedestal
On platform；Precompression adjustment unit is fixed by screws on pedestal；Driving unit is mounted on precompression adjustment unit.This method
By the synergistic effect of driving piezoelectric stack and promotion piezoelectric stack generation in driving unit, so that parasitic principle Piezoelectric Driving
Device pressure during driving is constant, and then realizes the active suppression for the movement that retracts.The advantage is that: rollback fortune can be significantly inhibited
It is dynamic, ideal step motion is realized, and the influence of mission nonlinear generation can be eliminated to a certain extent, convenient for subsequent accurate control
System.In accurate and Ultra-precision positioning, accurate measurement, Precision Machining assembly, bio-genetics and material surface property detection etc.
Field has broad application prospects.
Referring to shown in Fig. 1, Fig. 2, active suppression parasitic motion principle piezoelectric actuator of the invention retracts the device of movement,
Including pedestal 1, subunit, driving unit, precompression adjustment unit.Subunit is mounted on the boss of pedestal 1；Precompression
Adjustment unit is fixed by screws on pedestal 1；Driving unit is mounted on precompression adjustment unit by screw 8, is used respectively
To realize moving freely for mover, the adjustment of primary clearance and precompression and the cooperative motion of active suppression rollback phenomenon are raw
At.
The driving unit includes: driving hinge 9, driving piezoelectric stack 7, voussoir a4, promotes piezoelectric stack 3, voussoir
b2.The driving piezoelectric stack 7 and promotion piezoelectric stack 3 is pre-tightened by voussoir a4 and voussoir b2 respectively and is mounted on driving hinge
In chain 9.To driving piezoelectric stack 7 and the application coordinated drive electric signal of piezoelectric stack 3 is promoted, and by activation lever and promotes thick stick
Bar amplifies passing movement, final to drive sliding block 6 and inhibit its rollback.
The subunit is made of guide rail 5, sliding block 6.Guide rail 5 is fixed by screws on pedestal 1.Sliding block 6 with
It moves linearly under frictional force effect between driving unit along guide rail 5.
The precompression adjustment unit includes coarse regulation mechanism 10, screw 8.It, can by adjusting precompression adjustment unit
The primary clearance and precompression being conveniently adjusted between driving unit and subunit.
The present invention, can active suppression hunt effect original using the synergistic effect of driving piezoelectric stack 7 and promotion piezoelectric stack 3
Manage piezoelectric actuator rollback movement.
The method of active suppression parasitic motion principle piezoelectric actuator rollback movement of the invention, comprising the following steps:
A) coarse regulation mechanism 10 is adjusted, realizes the adjustment of precompression between driving hinge 9 and sliding block 6.
B) electric signal of proportionate relationship is applied to driving piezoelectric stack 7 and promotion piezoelectric stack 3.In inverse piezoelectric effect
Under effect, driving piezoelectric stack 7 and the first slowly elongation of promotion piezoelectric stack 3, the driving end of driving hinge 9 are moved along y negative direction,
And keep the pressure between sliding block 6 constant, and then sliding block 6 is driven to move a distance along y negative direction.When voltage is kept for one section
Between after, driving piezoelectric stack 7 voltage decline rapidly, due to voltage change rapidly and solve parasitic motion principle piezoelectricity drive
The problem of pressure increases during dynamic device driving, can be effectively suppressed rollback movement.
C) it adjusts driving piezoelectric stack 7 and promotes the voltage magnitude and frequency of piezoelectric stack 3, the movement of sliding block 6 is adjusted
Speed.
Embodiment:
Referring to fig. 2, shown in Fig. 4, when the electric signal individually to the driving application of piezoelectric stack 7 with certain amplitude and frequency
When, driving piezoelectric stack 7 extends S because of its inverse piezoelectric effect1, rotate activation lever around C point, driving piezoelectric stack 7 generated
Displacement S1Amplification, and frictional force f is applied to sliding block 6N1With normal pressure N1, and then generate it and move Δ y along y negative direction.By
There are the presence of the hunt effect along x negative direction, the normal pressure N of A point suffered by sliding block 6 at activation lever A point1With driving thick stick
The rotation of bar and increase.
Referring to shown in Fig. 3, Fig. 4, electric signal of the application of piezoelectric stack 3 with certain amplitude and frequency is promoted when individually giving
When, driving piezoelectric stack 3 extends S because of its inverse piezoelectric effect2, and activation lever is promoted into S along x positive direction via lift lever2。
Referring to shown in Fig. 3, Fig. 4, Fig. 5, activation lever ABC can be equivalent to structure shown in Fig. 5.Due to the promotion of lift lever
Effect, it can be a straight-bar that can be rotated around C point along the movable hinged shoe that x is moved, ABC that C point, which can be considered, and A point connects with subunit
Touching.
Referring to Fig. 6, Fig. 7, Fig. 8, illustrate the detailed process of active suppression parasitic motion principle piezoelectric actuator rollback movement
With method.As shown in Fig. 7, a complete motion cycle mainly includes following 4 processes: 1. as shown in Fig. 7 (a), from 0 to
t1Moment, driving piezoelectric stack 7 are extended with piezoelectric stack 3 is promoted, and B point is driven the effect of piezoelectric stack 3, make to drive thick stick
Bar rotates counterclockwise around C point, while C point moves S to x positive direction under the action of lift lever2, produced between A point and subunit
Raw static pressure N1With stiction fN1Drive subunit along y negative direction to move S, in the process, lift lever promoted away from
From S2Offset the hunt effect of all or part A point x negative direction, static pressure N at this time1Less than process shown in Fig. 2, Fig. 8 (a)
Static pressure N0；2. from t1To t2Moment, driving piezoelectric stack 7 and promotion piezoelectric stack 3 keep t1The length at moment, mover list
Member is remain stationary；3. as shown in Fig. 7 (b), from t2To the T moment, promotes piezoelectric stack 3 and continue to keep t1Occasion length drives piezoelectricity
It stacks 7 and restores former long rapidly.At this point, driving hinge ABC is shown in Fig. 4 " promotion of Z " shape structure restores length next time, around C point
It rotates clockwise, A point is separated with subunit rapidly.In the process, subunit surface generates the f of force of sliding frictionN2, make
Sliding block 6 is along y positive direction rollback S0.Due under identical precompression, pressure N shown in Fig. 7 (b)2Compared to pressure shown in Fig. 8 (b)
N0' very little, corresponding force of sliding friction fN2Less than f shown in Fig. 8 (b)N0', and voltage change process is very rapid, to make to retract
It is inhibited.Test proves, as range of lift S2When sufficiently large, rollback can be completely inhibited；4. the T moment, it is fast to promote piezoelectric stack 3
Quick-recovery original is long, and C-terminal is fallen after rise rapidly along x negative direction, and A point is contacted with subunit again, and driving hinge 9 restPoses,
It prepares for next motion cycle.The driving distance of each motion cycle is Δ S=S-S0, as range of lift S2When sufficiently large,
Δ S=S.1. 4. repetitive process arrives, it can be achieved that theoretical unlimited stroke, the continuous step motion without rollback.
Referring to shown in Fig. 9, Figure 10, Fig. 9 is apparatus of the present invention in 4Hz, and piezoelectric stack 7 is driven to place an order in different driving voltage
Solely when effect, the actual displacement curve of output that measures；Figure 10 is active suppression parasitic motion principle piezoelectric actuator of the invention
The device of rollback movement is 4Hz in frequency, and the driving voltage amplitude of driving piezoelectric stack 7 is 52V, different to promote piezoelectric stack 3
Driving voltage under conditions of the actual displacement curve of output that measures.Fig. 9, can similar to the activation result of conventional parasitic motion principle
To find out, rollback phenomenon is serious, and even if adjustment driving voltage amplitude, still can not achieve rollback and inhibit.Compared to Fig. 9,
Figure 10 result shows that the present invention proposes the effect of apparatus and method, it can be seen that when the driving voltage for promoting piezoelectric stack 3
When gradually being promoted, rollback is gradually reduced；When the driving voltage for promoting piezoelectric stack 3 reaches 100V or more, realize ideal
Without rollback step motion.The above comparison, it is seen that the rollback movement of parasitic motion principle piezoelectric actuator can be effectively suppressed in the present invention.
The foregoing is merely preferred embodiments of the invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All any modification, equivalent substitution, improvement and etc. made for the present invention,
It should all be included in the protection scope of the present invention.
Claims (5)
- The device of movement 1. a kind of active suppression parasitic motion principle piezoelectric actuator retracts, it is characterised in that: including pedestal (1), subunit, driving unit, precompression adjustment unit, subunit are mounted on the boss of pedestal (1), precompression adjustment Unit is fixed by screws on pedestal (1), and driving unit is mounted on precompression adjustment unit by screw (8), is used respectively To realize moving freely for mover, the adjustment of primary clearance and precompression and the cooperative motion of active suppression rollback phenomenon are raw At.
- The device of movement 2. active suppression parasitic motion principle piezoelectric actuator according to claim 1 retracts, feature Be: the driving unit include driving hinge (9), driving piezoelectric stack (7), voussoir a(4), promoted piezoelectric stack (3), Voussoir b(2), the driving piezoelectric stack (7) and promotion piezoelectric stack (3) pass through voussoir a(4 respectively) and voussoir b(2) pre-tighten peace In driving hinge (9)；It is real by applying coordinated drive electric signal to driving piezoelectric stack (7) and promotion piezoelectric stack (3) The function of existing active suppression parasitic motion principle piezoelectric actuator rollback movement.
- The device of movement 3. active suppression parasitic motion principle piezoelectric actuator according to claim 1 retracts, feature Be: the subunit is made of guide rail (5), sliding block (6), and guide rail (5) is fixed by screws on pedestal (1), sliding block (6) it moves linearly under the driving force effect that driving unit generates along guide rail (5).
- The device of movement 4. active suppression parasitic motion principle piezoelectric actuator according to claim 1 retracts, feature Be: the precompression adjustment unit includes that coarse regulation mechanism (10), screw (8) adjust by adjusting precompression adjustment unit Save the primary clearance and precompression between driving unit and subunit.
- 5. a kind of retracted using active suppression parasitic motion principle piezoelectric actuator described in any one of any one of claims 1 to 44 is transported Dynamic device realizes the depressomotor method that retracts, it is characterised in that: the following steps are included:A) coarse regulation mechanism (10) are adjusted, realizes the adjustment of precompression between driving hinge (9) and sliding block (6)；B) electric signal of proportionate relationship is applied to driving piezoelectric stack (7) and promotion piezoelectric stack (3)；In inverse piezoelectric effect Under effect, driving piezoelectric stack (7) and promotion piezoelectric stack (3) first slowly elongation drive the driving end edge of hinge (9)yLosing side It to movement, and keeps the pressure between sliding block (6) constant, and then drives sliding block (6) edgeyNegative direction moves a distance；It drives The voltage of dynamic piezoelectric stack (7) declines rapidly after the holding stage, since its variation is rapid and solves parasitic motion principle Rollback movement can be effectively suppressed in the problem of pressure increases during piezoelectric actuator driving；C) it adjusts driving piezoelectric stack (7) and promotes the voltage magnitude and frequency of piezoelectric stack (3), with the fortune of adjusting slider (6) Dynamic speed.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111193436A (en) * | 2020-01-08 | 2020-05-22 | 浙江师范大学 | Stepping type driving device |
| CN111384873A (en) * | 2020-01-08 | 2020-07-07 | 浙江师范大学 | Bionic inchworm type driving device and excitation method thereof |
| CN111614284A (en) * | 2020-06-19 | 2020-09-01 | 吉林大学 | Force control device and method for inhibiting rollback motion of stick-slip piezoelectric actuator |
| CN112271953A (en) * | 2020-10-30 | 2021-01-26 | 浙江工业职业技术学院 | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process |
| CN111193436B (en) * | 2020-01-08 | 2024-04-23 | 浙江师范大学 | Stepping driving device |
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| CN112271953B (en) * | 2020-10-30 | 2022-09-02 | 浙江工业职业技术学院 | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process |
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