CN101207344B - Creeping motion type piezoelectricity straight line driver - Google Patents
Creeping motion type piezoelectricity straight line driver Download PDFInfo
- Publication number
- CN101207344B CN101207344B CN2007101244412A CN200710124441A CN101207344B CN 101207344 B CN101207344 B CN 101207344B CN 2007101244412 A CN2007101244412 A CN 2007101244412A CN 200710124441 A CN200710124441 A CN 200710124441A CN 101207344 B CN101207344 B CN 101207344B
- Authority
- CN
- China
- Prior art keywords
- output shaft
- adjustable
- clamp
- base
- supporting bracket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses large-stroke squirmy piezoelectric linear actuator with nano-class precision, and mainly comprises a base, a guide mechanism, an adjustable clamping mechanism, an adjustable intermediate driving mechanism, an output shaft with a flange disc, and a clamping fixed supporting bracket. The base is used for fixing the clamping fixed supporting bracket, the clamping fixed supporting bracket is used for fixing a dual-parallel straight-line guide rod to form a guide plane; the adjustable intermediate driving mechanism is firmly integrated with the output shaft with the flange disc into a whole and can freely move on the guide mechanism, and the output shaft is matched with the clamping fixed supporting bracket in a small gap; the adjustable clamping mechanism adjusts the gap between the clamping mechanism and the output shaft through an adjusting bolt under the base so as to reach the zero gap. The guiding structure of the dual-parallel straight-line guide rod not only can guarantee the high linear degree, but also can prevent the decrease of the performance after the actuator is operated for a long period of time. The actuator has simple and compact structure, is easy to be mounted, is adjustable, is convenient to be controlled and is applicable to the precise processing and the application of the precise movement platform.
Description
Technical field
The present invention relates to a kind of big stroke creeping motion type piezoelectricity straight line driver with nano-precision.Belong to the precision instrument and equipment technical field.
Background technology
Linear actuator with nano-precision is the power section of nanometer technology, is called the heart of nanosecond science and technology by people.Both at home and abroad many famous research institutions all this little drive system as main research direction.The traditional electrical magnet-type rotational electrical machine must just can convert rectilinear motion to through particular organization, makes it be difficult to realize the rectilinear motion of nano-precision.Therefore, when the Motion Resolution rate reached submicron order or nanoscale, solid actuator particularly piezo-activator embodied advantage in little driving location technology.Piezoelectric ceramic actuator is compared with the electromagnetism linear electric motors, has characteristics such as inertia is little, response is fast, control characteristic is good, not affected by magnetic fields, itself also do not produce magnetic field, motion is accurate.But directly utilize the driving navigation system of piezoelectric deforming that its significant disadvantages is arranged, the journey of dividing a word with a hyphen at the end of a line of ascending the throne is little, maximum tens of microns.
The mode of creeping of worm in creeping motion type piezoelectricity straight line driver natural imitation circle, by adding up to piezoelectric ceramic micro-strain, can realize big stroke, high accuracy, high-speed bidirectional-movement, be applicable to the application in precision optics engineering, semiconductor manufacturing, ultraprecise microfabrication and many hard-core technologies fields such as measuring technique, Micro Electro Mechanical System, aeronautical and space technology, modern medicine and bio-genetics.
Up to now, the creeping motion type piezoelectricity straight line driver of realizing all is by guiding mechanism, as closed slide or guide rod, contact to provide driving needed frictional force with the direct of clamping institution, step motion and output loading all are to rely on the frictional force of clamping institution and guiding mechanism clamping clamp to realize that the clamp chucking power of clamping institution has determined the output loading of system.Because the existence of wearing and tearing after operation a period of time, descends because output loading greatly generally appears in the gap change, the unsettled phenomenon of linearity, and finally influence useful life.
Summary of the invention
Technical problem to be solved by this invention is the creeping motion type piezoelectricity straight line driver of a novel structure of design, this driver can avoid after long-play because the performance decline problem that fretting wear brings, and system cost is cheap, easily adorns adjustable have higher power output and speed.
A kind of creeping motion type piezoelectricity straight line driver of the present invention's design comprises base, guiding mechanism, adjustable clamping institution, adjustable middle driving mechanism, flanged dish output shaft, clamp fixing support rack; Base is used for fixedly clamp fixing support rack, and clamp is used for fixed guide mechanism with fixing support rack; Guiding mechanism is two parallel lines guide rods; Described adjustable in the middle of driving mechanism and flanged dish output shaft be fixed as one and also can move freely at guiding mechanism, output shaft and clamp are with the little matched in clearance of fixing support rack; Described adjustable clamping institution is regulated the gap between clamping institution and the output shaft and is reached the zero clearance by the adjusting bolt under the base.
Compare with existing same principle driver, the present invention has following technique effect: (one) can obtain higher linearity, and not be subjected to the influence of fretting wear owing to adopt two parallel lines guide rods as guiding mechanism.(2) adjustable mechanism is all adopted in the pretension of piezoelectric ceramic and rubbing surface gap, has guaranteed the high reliability of the present invention's design, greatly reduces processing cost.(3) project organization compactness of the present invention is applicable to Precision Machining and assembling, after the rigidity of increase guide rod, can also be used for the precision movement platform of big bearing capacity.
Description of drawings
Fig. 1 is assembling schematic diagram of the present invention.
Fig. 2 is motion principle figure of the present invention.
Fig. 3 is the assembling schematic diagram of parallel guide rod slipper of the present invention.
Fig. 4 is the assembling schematic diagram of middle driving mechanism of the present invention.
Fig. 5 is the middle pretension schematic diagram that drives compliant mechanism of the present invention.
Fig. 6 is the assembling schematic diagram of clamping institution of the present invention.
Fig. 7 is the end view of Fig. 6.
Fig. 8 drives the compliant mechanism schematic diagram in the middle of being.
Fig. 9 is clamp compliant mechanism schematic diagram.
Among the figure: 1. base, 2. adjustable clamp supporting bracket, 3. clamp compliant mechanism, 4. clamp piezoelectric stack, 5. clamp fixing support rack, 6. flanged dish output shaft, 7. linear guide, 8. linear bushings, 9. sliding shoe drives compliant mechanism in the middle of 10., 11. spring steel wire, use piezoelectric stack 12. drive, 13. drive the pretension screw with piezoelectric stack, and 14. drive the cushion block with piezoelectric stack, 15. clamping institution is regulated bolt, 16. the clamp pretension bolt of piezoelectric stack, the 17. clamps cushion block of piezoelectric stack, 18. flexible hinges.
Embodiment
Below in conjunction with accompanying drawing, introduce content of the present invention in detail.
The technical solution adopted in the present invention is: the present invention designs and mainly comprises base 1, guiding mechanism 7,8, adjustable clamping institution 2,3,4,15,16,17, adjustable middle driving mechanism 9,10,11,12,13,14, flanged dish output shaft 6, clamp fixing support rack 5.Two clamps are fixed on the base 1 with fixing support rack 5, and being used for fixing two parallel linear guides 7 provides guide surface, and with about two flanged dish output shaft 6 little matched in clearance the clamp contact-making surface is provided.Flanged dish output shaft 6 is fixedly connected with sliding shoe 9, and sliding shoe 9 drives compliant mechanism 10 by rivet and bolt with the centre, and two sliding shoes 9 can move freely at linear guide 7 by four linear bushings 8.Clamp compliant mechanism 3 is placed on and passes through two following adjustable bolts 15 on the adjustable clamp supporting bracket 2, guarantees that the arc surfaces above the clamp compliant mechanism 3 cooperate with the no gap of output shaft 6.Clamping institution and middle driving mechanism all are made up of piezoelectric stack, compliant mechanism, cushion block and adjustable bolt, and middle driving mechanism also is furnished with four returning spring steel wires 11.
As shown in Figure 2, the motion mode of the creeping motion type piezoelectricity straight line driver imitation worm of the present invention's design, by to two clamps with piezoelectric stacks 4 with drive with piezoelectric stack 12 sequence power on compactings as shown in the figure single step displacement now, so circulation can realize big displacement stroke, changes the logical order that powers up and can realize two-way motion.Can change the speed of driver by the amplitude of adjusting voltage and the frequency of importing waveform.Structure shown in motion principle figure, clamping institution is fixed, and the configuration of middle driving mechanism motion belongs to the creeping motion type piezoelectricity straight line driver of stepping-repulsive-type maglev, and this configuration motion parts quality minimum is conducive to the quick response of system.
The present invention directly adopts high-precision linear guide 7 as guiding, and in order to guarantee two linear guides 7 in a horizontal plane, left and right sides clamp all adopts integrated processing with fixing support rack 5 and two sliding shoes 9, cuts from the centre then.As shown in Figure 3, adjustable middle driving mechanism 9,10,11,12,13,14 can move freely at guide rod 7 by the linear bushings 8 that is embedded in the sliding shoe 9.This structure has been avoided directly providing driving required frictional force by guiding mechanism, realize easily driving using the friction surface adjustable gaps, reduce quality of fit, be beneficial to the useful life of raising system, also avoided using simultaneously big the stroke necessary high linearity of guiding mechanism and the processing request of flatness.
The present invention adopts piezoelectric stack directly to drive the mode of clamp and the arc surface of increase contact area cooperates to guarantee the big power output of trying one's best.Although the distortion that flexible amplification mechanism can amplification piezoelectric stacks reduces the requirement of machining tolerance, it is too little to export rigidity, can not really improve output rigidity and power output effectively, and flexible amplification mechanism must reduce the response speed of system.By careful grinding output shaft 6 and the contact arc surface of clamp with fixing support rack 5, guarantee the little matched in clearance of the friction clamp face of upper end.Shown in Fig. 6,7, clamp compliant mechanism 3 is placed on the clamp supporting bracket 2, guarantee the friction clamp face of lower end by two following adjusting bolts 15, it is the zero clearance between compliant mechanism 3 and the output shaft 6, the gap more clamp power of small loss is just more few, overcome direct driving to the technical problem that machining accuracy relies on, improved the reliability of system simply and effectively.
Piezoelectric stack effective exercise more under the pretension situation; and in order to protect piezoelectric stack 4,12; avoid bearing failure by shear; compliant mechanism 3,10 cooperates cushion block 17,14 pairs of piezoelectric stacks to carry out pretension with pretension bolt 16 and pretension screw 13; interference fit with respect to direct use compliant mechanism applies pretension, can reduce the required precision of processing.As Fig. 8 and 9, be respectively to drive the compliant mechanism 10 and 3 of using piezoelectric stack 4 with piezoelectric stack 12 and clamp, the both is based on the flexible eight-linkage mechanism of flexible hinge 18, pass through optimal design, both are under the prerequisite that satisfies rigidity and stress, have high as far as possible natural frequency, make system have good static state and dynamic property.For the further dynamic property of increase system, as shown in Figure 4, increase by 4 spring steel wires 11,4 the little rigid springs that have been equivalent to the mass conservation parallel connection can significantly improve the natural frequency of system, are applicable to the pretension of the precision movement platform of big bearing capacity.
The present invention is guaranteeing to have under the prerequisite of higher power output and speed, and is simple and compact for structure, with low cost and easily adorn the adjustable marketing of being convenient to, and is applicable to the application of Precision Machining feed arrangement, particularly is applicable to the application of the precision movement platform of big carrying.
Claims (2)
1. a creeping motion type piezoelectricity straight line driver comprises base, guiding mechanism, adjustable clamping institution, adjustable middle driving mechanism, flanged dish output shaft, clamp fixing support rack; It is characterized in that base is used for fixedly clamp fixing support rack, and clamp is used for fixed guide mechanism with fixing support rack; Described adjustable in the middle of driving mechanism and flanged dish output shaft be fixed as one and also can move freely at guiding mechanism, output shaft and clamp are with the little matched in clearance of fixing support rack; Described adjustable clamping institution is regulated the gap between described clamping institution and the described output shaft and is reached the zero clearance by the adjusting bolt under the base.
2. a kind of creeping motion type piezoelectricity straight line driver according to claim 1 is characterized in that, described guiding mechanism is two parallel lines guide rods.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101244412A CN101207344B (en) | 2007-11-13 | 2007-11-13 | Creeping motion type piezoelectricity straight line driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101244412A CN101207344B (en) | 2007-11-13 | 2007-11-13 | Creeping motion type piezoelectricity straight line driver |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101207344A CN101207344A (en) | 2008-06-25 |
| CN101207344B true CN101207344B (en) | 2013-07-03 |
Family
ID=39567292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101244412A Expired - Fee Related CN101207344B (en) | 2007-11-13 | 2007-11-13 | Creeping motion type piezoelectricity straight line driver |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101207344B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361411B (en) * | 2011-10-25 | 2014-07-02 | 哈尔滨工业大学深圳研究生院 | Piezoelectric linear driver |
| CN103516252A (en) * | 2012-06-27 | 2014-01-15 | 森泉(上海)光电科技有限公司 | Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force |
| CN102751899B (en) * | 2012-07-03 | 2014-10-22 | 吉林大学 | Micro nano bionic multi-degree of freedom driving device |
| CN103762887B (en) * | 2014-02-14 | 2015-09-16 | 哈尔滨工业大学 | A kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1206865A (en) * | 1998-07-10 | 1999-02-03 | 清华大学 | Creeping type piezoelectric/electrostrictive microfeed positioner |
| EP1035594A2 (en) * | 1999-03-05 | 2000-09-13 | Ngk Insulators, Ltd. | Displacement control device and actuator |
| US6188161B1 (en) * | 1997-06-02 | 2001-02-13 | Minolta Co., Ltd. | Driving apparatus using transducer |
| CN1544208A (en) * | 2003-11-20 | 2004-11-10 | 上海交通大学 | Minitype multi-articulation electromagnetic and piezoelectric creeping motion robot system |
-
2007
- 2007-11-13 CN CN2007101244412A patent/CN101207344B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6188161B1 (en) * | 1997-06-02 | 2001-02-13 | Minolta Co., Ltd. | Driving apparatus using transducer |
| CN1206865A (en) * | 1998-07-10 | 1999-02-03 | 清华大学 | Creeping type piezoelectric/electrostrictive microfeed positioner |
| EP1035594A2 (en) * | 1999-03-05 | 2000-09-13 | Ngk Insulators, Ltd. | Displacement control device and actuator |
| CN1544208A (en) * | 2003-11-20 | 2004-11-10 | 上海交通大学 | Minitype multi-articulation electromagnetic and piezoelectric creeping motion robot system |
Non-Patent Citations (2)
| Title |
|---|
| JP特开平7-314356A 1995.12.05 |
| JP特开平9-121574A 1997.05.06 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101207344A (en) | 2008-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102543217B (en) | Macro-micro driven bidimensional integrated micro positioning platform | |
| JP2706534B2 (en) | Piezoelectric drive and method | |
| CN103780142B (en) | A kind of large load high accuracy looper type piezoelectricity straight line driver based on skewback clamp | |
| CN102647107B (en) | Big stroke micro nanoscale linear actuator based on parasitic motion principle | |
| CN101207344B (en) | Creeping motion type piezoelectricity straight line driver | |
| CN109787505B (en) | Linear piezoelectric motor and driving method thereof | |
| CN103557412A (en) | Bipolar two-dimensional fully flexible high-precision servo platform | |
| CN102361411B (en) | Piezoelectric linear driver | |
| CN205883083U (en) | Accurate piezoelectricity that adopts inclined ladder shape conversion of motion glues smooth orthoscopic drive arrangement | |
| CN103580532A (en) | Bottom pre-tensioning type stick-slip driving cross-scale precision motion platform | |
| CN108199614A (en) | Two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor and its driving method | |
| CN107733280A (en) | A kind of structure-integrated formula piezoelectricity looper linear electric motors | |
| CN103762887A (en) | Cylindrical driven clamping type piezoelectric wriggle linear motor | |
| CN108199613A (en) | The fixed accurate piezoelectricity stick-slip line motor of bimorph transducer and its driving method | |
| CN109756148A (en) | The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement | |
| CN108322089A (en) | The big stroke inertial piezoelectric drive motor of double rod loaded type and its motivational techniques | |
| CN209389958U (en) | The device of active suppression parasitic motion principle piezoelectric actuator rollback movement | |
| CN107786120B (en) | Piezoelectric rotary positioning platform with macro-micro hybrid motion characteristics and control method | |
| CN108062968B (en) | Long-stroke high-precision piezoelectric displacement table and driving method thereof | |
| CN100413202C (en) | Ultra magnetostrictive high precision linear driver using piezozelectric effect clamping | |
| CN108092549B (en) | Compact precise piezoelectric stick-slip lifting platform and driving method thereof | |
| CN107834896B (en) | Device and method for regulating output performance of parasitic principle piezoelectric driver by pre-friction force | |
| CN100587850C (en) | Incorporated ultra-precision workbench moving mechanism | |
| CN111761397A (en) | Magnetic servo ball screw supporting device of gantry machining center | |
| CN203632575U (en) | Bottom pretightening stick-slip driving cross-scale precise movement platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130703 Termination date: 20131113 |