CN100587850C - Incorporated ultra-precision workbench moving mechanism - Google Patents
Incorporated ultra-precision workbench moving mechanism Download PDFInfo
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- CN100587850C CN100587850C CN200710037393A CN200710037393A CN100587850C CN 100587850 C CN100587850 C CN 100587850C CN 200710037393 A CN200710037393 A CN 200710037393A CN 200710037393 A CN200710037393 A CN 200710037393A CN 100587850 C CN100587850 C CN 100587850C
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Abstract
The invention involves an integrated Ultra-Precision workstation structure, which includes a base, a hinge fixed in the base plane with bolts and the piezoelectric actuator to driver the hinge. Its characteristic is that the hinge consists of three double parallel multi-link flexible institutions. Two of the institutions are parallel to each other and perpendicular to the middle of the third one of the hinge. The two parallel double parallel multi-link flexible institutions connect with the piezoelectric actuator, while the middle of the third double multi-link flexible institutions is fixed in the workstation. The invention has larger deceleration rate and can improve the resolution of workstation. Its structure is simple and it can work in a vacuum, the circumstance with high temperature, radiation or other harsh working environment.
Description
Technical field
The present invention relates to a kind of incorporated ultra-sophisticated table moving mechanism, particularly a kind of incorporated ultra-sophisticated table moving mechanism.
Background technology
Present precision stage is many to be realized by grand mode moving and the two-layer driving of fine motion.The way of realization of fine motion part has planar spring, flexible hinge, rail plate, air-flotation type guide rail and fluid pressure type guide rail etc.That flexible hinge has is simple in structure, compact, need not to lubricate, do not have advantages such as friction, no backlash, and piezoelectric actuator has advantages such as displacement resolution height, middle drive disk assembly is few, efficient is high, rigidity is big, response is fast, therefore the micro displacement workbench that adopts piezoelectric actuator to drive flexible hinge has compact conformation, advantage such as simple, reliable, use at most, the widest.
The precision stage that adopts flexible hinge the to realize forms that adopt two parallelogram lindages more, as shown in Figure 1.Though two parallelogram lindages also have a lot of different forms, its principle of work is consistent, as shown in Figure 2.By being installed in the piezoelectric actuator at mechanism middle part, produce expulsive force, realize that precision stage produces a micrometric displacement.The resolving accuracy of this micromotion mechanism directly depends on the piezoelectric actuator resolution.Because the hinge number is few, rigidity is not enough, easily produces drift; The mismachining tolerance of hinge influences one-way.In addition, the magnetic hysteresis of piezoelectric actuator, the defective of creep also can have a direct impact the precision of worktable.
Summary of the invention
The object of the present invention is to provide a kind of improved incorporated ultra-sophisticated table moving mechanism, have bigger subtracting and state ratio, improve the resolution of worktable.
For achieving the above object, design of the present invention is: adopt the secondary kind of drive, by the flexible hinge combined mechanism, form bigger reduction gear ratio; Adopt symmetrical structure, can eliminate bigoted power, guarantee the one-way of motion; Adopt the two parallel eight bar flexure hinge mechanisms that are symmetrically distributed, form redundant constraint, can improve the rigidity of system, and the hinge error is had certain compensating action, adopt integrated structure design, can cut the time processing moulding by line.
According to above-mentioned inventive concept, the present invention adopts following technical proposals:
A kind of incorporated ultra-sophisticated table moving mechanism, comprise pedestal, by being bolted to the linkage that is plane distribution on the pedestal and driving the piezoelectric actuator of linkage, it is characterized in that described linkage is three two parallel many bars compliant mechanisms, wherein two two parallel many bars compliant mechanisms are parallel to each other and the stage casing of the parallel many bars compliant mechanism of another pair of vertical hinge; Connect described piezoelectric actuator between described two two parallel many bars compliant mechanisms that are parallel to each other; And the stage casing of the parallel many bars compliant mechanism of another pair is connected with stationary table.
Three above-mentioned two parallel many bars compliant mechanisms all are two parallel four-bars or eight compliant mechanisms, its structure is: a medium film section sheet is arranged, the two ends of described stage casing sheet respectively connect an end of two or four parallel strip bars respectively with slice, the other end of described strip bar is connected with two dististyles by slice respectively.
The dististyle of the outer end of above-mentioned two two parallel four-bars that are parallel to each other or eight bar compliant mechanisms join together and by described bolt on pedestal, and the dististyle of their the inner is crossed into a slice with the stage casing of another pair parallel four-bar or eight bar compliant mechanisms, the dististyle at this pair parallel four-bar or eight bar compliant mechanism two ends by described bolt on pedestal.
Fixedly connected with the stage casing of two two parallel four-bars that are parallel to each other or eight bar compliant mechanisms respectively in the two ends of above-mentioned piezoelectric actuator.
The present invention compared with prior art, have following conspicuous substantive distinguishing features and remarkable advantage: adopt the secondary kind of drive among the present invention, form bigger reduction gear ratio, improve the resolution of worktable, its resolution can reach 1/tens of the rate of distinguishing that presses.Adopt the two parallel many bars flexure hinge mechanism that is symmetrically distributed, form redundant constraint, improve the rigidity of system, and the hinge error is had certain compensating action.Adopt the many places symmetrical structure, eliminate bigoted power, guarantee the one-way of motion.Adopt integrated design, can cut the time processing moulding by line.Simple in structure, can under severe rugged environments such as vacuum, high temperature, radiation, work.
Description of drawings
Fig. 1 is the structural representation of two parallel four-bar compliant mechanisms of prior art.
Fig. 2 is the mechanical schematic diagram of mechanism shown in Figure 1.
Fig. 3 is the structural representation of one embodiment of the invention.
Fig. 4 is the mechanical schematic diagram of structure shown in Figure 3.
Embodiment
A preferred embodiment of the present invention is: referring to Fig. 3, this incorporated ultra-sophisticated table moving mechanism comprises pedestal 1, is fixed on linkage 2 that is plane distribution on the pedestal 1 and the piezoelectric actuator 3 that drives linkage 2 by bolt 4, described linkage 2 is three two parallel many bars compliant mechanism A, B, C, and wherein two two parallel many bars compliant mechanism A, B are parallel to each other and the stage casing of the parallel many bars compliant mechanism of another pair of vertical hinge C; Connect described piezoelectric actuator 3 between described two two parallel many bars compliant mechanism A, B that are parallel to each other; And the stage casing of the parallel many bars compliant mechanism of another pair C is connected with stationary table.
Above-mentioned three two parallel many bars compliant mechanism A, B, C all are two parallel four-bars or eight compliant mechanisms, its structure is: a medium film section sheet is arranged, the two ends of described stage casing sheet respectively connect an end of two or four parallel strip bars respectively with slice, the other end of described strip bar is connected with two dististyles by slice respectively.
The dististyle of the outer end of above-mentioned two two parallel four-bars that are parallel to each other or eight bar compliant mechanism A, B joins together and is fixed on the pedestal 1 by described bolt 4, and the stage casing sheet of the dististyle of their the inner and another pair parallel four-bar or eight bar compliant mechanism C joins together, and the dististyle at this pair parallel four-bar or eight bar compliant mechanism C two ends is fixed on the pedestal 1 by described bolt 4.
Fixedly connected with the stage casing of two two parallel four-bars that are parallel to each other or eight bar compliant mechanism A, B respectively in the two ends of above-mentioned piezoelectric actuator 3.
Its principle of work is as follows:
Referring to Fig. 3 and Fig. 4, piezoelectric actuator 3 produces an elongation strain, make two rightabout moving of two parallel many bars flexure hinge mechanism A, B generations in the linkage 2, and then spur micrometric displacement of the parallel many bars flexure hinge mechanism of another pair C generation, thereby make worktable produce a micrometric displacement.
Fig. 1 and Fig. 2 illustrate the structural representation and the mechanism principle figure of the two parallel four-bar compliant mechanisms in the prior art.Compare for your guidance.
Claims (4)
1. incorporated ultra-sophisticated table moving mechanism, comprise pedestal (1), be fixed on linkage (2) that is plane distribution on the pedestal (1) and the piezoelectric actuator (3) that drives linkage (2) by bolt (4), it is characterized in that described linkage (2) is three two parallel many bars compliant mechanisms (A, B, C), wherein two two parallel many bars compliant mechanisms (A, B) are parallel to each other and the stage casing of the parallel many bars compliant mechanism of another pair of vertical hinge (C); Connect described piezoelectric actuator (3) between described two two parallel many bars compliant mechanisms (A, B) that are parallel to each other; And the stage casing of the parallel many bars compliant mechanism of another pair (C) is connected with stationary table.
2. incorporated ultra-sophisticated table moving mechanism according to claim 1, it is characterized in that described three two parallel many bars compliant mechanisms (A, B, C) all are two parallel four-bars or eight bar compliant mechanisms, its structure is: a medium film section sheet is arranged, the two ends of described stage casing sheet respectively connect an end of two or four parallel strip bars respectively with slice, the other end of described strip bar is connected with two dististyles by slice respectively.
3. incorporated ultra-sophisticated table moving mechanism according to claim 2, the dististyle that it is characterized in that the outer end of described two two parallel four-bars that are parallel to each other or eight bar compliant mechanisms (A, B) joins together and is fixed on the pedestal (1) by described bolt (4), and the stage casing sheet of the dististyle of their the inner and another pair parallel four-bar or eight bar compliant mechanisms (C) joins together, and the dististyle at this pair parallel four-bar or eight bar compliant mechanism (C) two ends is fixed on the pedestal (1) by described bolt (4).
4. incorporated ultra-sophisticated table moving mechanism according to claim 1 and 2 is characterized in that fixedlying connected with the stage casing of two two parallel four-bars that are parallel to each other or eight bar compliant mechanisms (A, B) respectively in the two ends of described piezoelectric actuator (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710037393A CN100587850C (en) | 2007-02-09 | 2007-02-09 | Incorporated ultra-precision workbench moving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710037393A CN100587850C (en) | 2007-02-09 | 2007-02-09 | Incorporated ultra-precision workbench moving mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101013603A CN101013603A (en) | 2007-08-08 |
| CN100587850C true CN100587850C (en) | 2010-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710037393A Expired - Fee Related CN100587850C (en) | 2007-02-09 | 2007-02-09 | Incorporated ultra-precision workbench moving mechanism |
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| Country | Link |
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| CN (1) | CN100587850C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103111990A (en) * | 2011-11-17 | 2013-05-22 | 上海航天测控通信研究所 | Movement mechanism of one-dimensional micro-positioning platform |
| CN103143732A (en) * | 2013-03-01 | 2013-06-12 | 天津大学 | Displacement sensor type piezoceramic driver based on flexible mechanism |
| CN103295651B (en) * | 2013-05-10 | 2016-01-20 | 上海大学 | Based on the Piezoelectric Driving Inchworm type positioning table of flexible amplification principle |
| CN107492398A (en) * | 2017-09-12 | 2017-12-19 | 苏州迈客荣自动化技术有限公司 | A kind of one-dimensional micro-displacement platform |
| CN109491078A (en) * | 2019-01-07 | 2019-03-19 | 南京理工大学 | A kind of high-precision micro scanning device |
-
2007
- 2007-02-09 CN CN200710037393A patent/CN100587850C/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| 基于柔性铰链结构的二维微动工作台的设计分析. 张健雄.压电与声光，第28卷第5期. 2006 |
| 基于柔性铰链结构的二维微动工作台的设计分析. 张健雄.压电与声光，第28卷第5期. 2006 * |
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|---|---|
| CN101013603A (en) | 2007-08-08 |
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