CN100566928C - Ultraprecise drive mechanism - Google Patents
Ultraprecise drive mechanism Download PDFInfo
- Publication number
- CN100566928C CN100566928C CNB2007101446170A CN200710144617A CN100566928C CN 100566928 C CN100566928 C CN 100566928C CN B2007101446170 A CNB2007101446170 A CN B2007101446170A CN 200710144617 A CN200710144617 A CN 200710144617A CN 100566928 C CN100566928 C CN 100566928C
- Authority
- CN
- China
- Prior art keywords
- slurcam
- guide rail
- conversion block
- screw
- air supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
Ultraprecise drive mechanism, it relates to a kind of driving mechanism.The objective of the invention is for the shortcoming that solves existing straight-line ultra precise workbench be quiet, dynamic rate is lower, the relatively poor problem of ability of opposing external interference.The top of slurcam is arranged between preceding slurcam and the back slurcam in the middle of the present invention, the lower end of middle slurcam is connected with the upper end of air supporting conversion block, be provided with the first throttle aperture in the preceding slurcam, be provided with second throttling pore in the back slurcam, form the first gas-static air film chamber between middle slurcam and the preceding slurcam, form the second gas-static air film chamber between middle slurcam and the back slurcam, be provided with the static pressure throttling pore in the air supporting conversion block.Advantage of the present invention is: simple in structure, reliable operation, and thoroughly eliminated the power of the both direction outside the leading screw driving direction and disturbed.The precision height, the linearity of big stroke ultra precise workbench has reached 0.17 μ m/600mm.The bearing capacity height, applied range can be applicable to the driving of the ultra precise workbench of various ways.
Description
Technical field
The present invention relates to a kind of driving mechanism.
Background technology
Along with science and technology development, more and more higher to the requirement of the product parts accuracy of manufacture, press for critical process and correlation technique, especially super-precision machine tools that ultraprecise is processed, the core that realizes the processing of part ultraprecise especially is with crucial.In super-precision machine tools, widely used is fluid pressure and pneumato-static slideway, and their great advantage is the precision of rectilinear motion height of lathe, can reach sub-micron even nanometer scale, that but their shortcoming is it is quiet, dynamic rate is lower, and the ability of opposing external interference is relatively poor.Therefore the interference that guide rail or slide carriage are made its power of time spent of the drive system of guide rail will bring very big influence to its linearity, this is fatal for super-precision machine tools, thereby in the design of superfinisher guide rail and slide carriage, must want emphasis to consider how to eliminate in the process that drives slide carriage, driving force only is added in its travel direction, and reduces or elimination at the perturbed force of other directions as far as possible.With regard to the leading screw drive system, should be that it is axial fully to the driving force of slide carriage, this need design a special mechanism between leading screw and slide carriage, can transmit the axial force of leading screw, eliminates the influence of the perturbed force of other directions to the slide carriage linearity again.
Summary of the invention
The objective of the invention is for the shortcoming that solves existing straight-line ultra precise workbench be quiet, dynamic rate is lower, the relatively poor problem of ability of opposing external interference provides a kind of Ultraprecise drive mechanism.The present invention is by slide carriage 1, connecting plate 2, preceding slurcam 3, back slurcam 4, middle slurcam 5, ball-screw 9, ball screw 10, air supporting conversion block 11, guide rail 13, fore-stock 16, after-poppet 17, motor 18 and backboard 19 are formed, backboard 19 is fixed on the rear end face of guide rail 13, motor 18 is fixed on the backboard 19, slide carriage 1 is arranged on the upside of guide rail 13, air supporting conversion block 11 is arranged in the chute 14 of guide rail 13, fore-stock 16 is arranged on the front portion in the guide rail 13, after-poppet 17 is arranged on the rear portion in the guide rail 13, the two ends of ball screw 10 are connected with after-poppet 17 with fore-stock 16 respectively, the stage casing of ball screw 10 is arranged in the air supporting conversion block 11, form screw pair between ball-screw 9 and the ball screw 10, one end of ball-screw 9 is connected with the output of motor 18, fixedly connected with the rear side of slide carriage 1 upper end in the front side of connecting plate 2 lower ends, fixedly connected with the rear side of connecting plate 2 lower ends in the upper end of back slurcam 4, before the upper end of slurcam 3 with close slide carriage 1 rear end and protrude in connecting plate 2 and fixedly connected the lower end of the connecting plate 2 of overlap mutually with slide carriage 1, the top of middle slurcam 5 is arranged between preceding slurcam 3 and the back slurcam 4, the lower end of middle slurcam 5 is connected with the upper end of air supporting conversion block 11, be provided with first throttle aperture 6 in the preceding slurcam 3, be provided with second throttling pore 7 in the back slurcam 4, form the first gas-static air film chamber 8 between middle slurcam 5 and the preceding slurcam 3, form the second gas-static air film chamber 15 between middle slurcam 5 and the back slurcam 4, be provided with static pressure throttling pore 12 in the air supporting conversion block 11.
The invention has the advantages that: one, simple in structure, reliable operation can be according to user's needs flexible design.Two, the power of thoroughly having eliminated the both direction outside the leading screw driving direction is disturbed.Three, precision height, experimental result show, use mechanism of the present invention, make the linearity of big stroke ultra precise workbench reach 0.17 μ m/600mm.Four, bearing capacity height; Its bearing capacity can increase by increasing air pressure and enlarging the static pressure area.Five, applied range can be applicable to the drive of the ultra precise workbench of various ways.
Description of drawings
Fig. 1 is an overall structure schematic diagram of the present invention, and Fig. 2 is the A-A cutaway view of Fig. 1.
The specific embodiment
The specific embodiment: (referring to Fig. 1, Fig. 2) present embodiment is by slide carriage 1, connecting plate 2, preceding slurcam 3, back slurcam 4, middle slurcam 5, ball-screw 9, ball screw 10, air supporting conversion block 11, guide rail 13, fore-stock 16, after-poppet 17, motor 18 and backboard 19 are formed, backboard 19 is fixed on the rear end face of guide rail 13, motor 18 is fixed on the backboard 19, slide carriage 1 is arranged on the upside of guide rail 13, air supporting conversion block 11 is arranged in the chute 14 of guide rail 13, fore-stock 16 is arranged on the front portion in the guide rail 13, after-poppet 17 is arranged on the rear portion in the guide rail 13, the two ends of ball screw 10 are connected with after-poppet 17 with fore-stock 16 respectively, the stage casing of ball screw 10 is arranged in the air supporting conversion block 11, form screw pair between ball-screw 9 and the ball screw 10, one end of ball-screw 9 is connected with the output of motor 18, fixedly connected with the rear side of slide carriage 1 upper end in the front side of connecting plate 2 lower ends, fixedly connected with the rear side of connecting plate 2 lower ends in the upper end of back slurcam 4, before the upper end of slurcam 3 with close slide carriage 1 rear end and protrude in connecting plate 2 and fixedly connected the lower end of the connecting plate 2 of overlap mutually with slide carriage 1, the top of middle slurcam 5 is arranged between preceding slurcam 3 and the back slurcam 4, the lower end of middle slurcam 5 is connected with the upper end of air supporting conversion block 11, be provided with first throttle aperture 6 in the preceding slurcam 3, be provided with second throttling pore 7 in the back slurcam 4, form the first gas-static air film chamber 8 between middle slurcam 5 and the preceding slurcam 3, form the second gas-static air film chamber 15 between middle slurcam 5 and the back slurcam 4, be provided with static pressure throttling pore 12 in the air supporting conversion block 11.
Theory analysis: when design and use are of the present invention, at first to calculate its bearing capacity and rigidity, because the theory of rigidity and bearing capacity is derived and calculating is very complicated, for syndeton as shown in Figure 1, bearing capacity can adopt following simple formula to calculate:
W=CS (P
S-P
A); Wherein, W is a bearing capacity; C is a correction factor, generally is selected between the 0.25-0.35; S is the area of air film, P
SBe supply gas pressure; P
AAir pressure for environment for use.
Static rigidity can adopt following simple formula to calculate:
K=2.88 (W/h0); Wherein, K is a rigidity, and W is a bearing capacity; h
0Be air-film thickness, i.e. gap.
Operation principle: in super-precision machine tools, the linearity of slide carriage is a very important technical indicator, owing in ultra-precision machine tool, use air-float guide rail widely, must eliminate the influence that alignment error, geometric error and the kinematic error of driving elements such as leading screw are brought to ultra precise workbench.In the present invention, as shown in Figure 1, the rotation of motor 18 drives the rotation of ball-screw 9, by the screw pair between ball-screw 9 and the ball screw 10, rotatablely moving of ball-screw 9 changed into the rectilinear motion of leading screw, after 12 throttlings of compressed air process static pressure throttling pore, form the static pressure air film of 11 of guide rail 13 and air supporting conversion blocks, eliminate the friction between guide rail 13 and the air supporting conversion block 11, air supporting conversion block 11 links together with ball screw 10, middle slurcam 5 is fixed together with air supporting conversion block 11, the selection rotation of restriction ball screw 10, so middle slurcam 5 travels forward with ball screw 10, after compressed air process first throttle aperture 6 and 7 throttlings of second throttling pore, form the first gas-static air film 8 and the second gas-static air film chamber 15, the motion of middle slurcam 5 and power (axial force) are by the first gas-static air film 8 and the second gas-static air film chamber 15 and preceding slurcam 3, back slurcam 4 is delivered to driving force on the slide carriage 1, drive slide carriage 1 motion, realize table feed motion.The present invention since the driving force of leading screw be delivered to ultra precise workbench by the gas-static air film and get on, because the shearing friction power between the air is very little, even negligible degree, so leading screw alignment error, geometric error and kinematic error just pass to get on less than ultra precise workbench, only the axial driving force of leading screw is passed to ultra precise workbench and get on.And then the ultraprecise of having realized workbench drives.
Claims (1)
1, a kind of Ultraprecise drive mechanism, it is by slide carriage (1), connecting plate (2), preceding slurcam (3), back slurcam (4), middle slurcam (5), ball-screw (9), ball screw (10), air supporting conversion block (11), guide rail (13), fore-stock (16), after-poppet (17), motor (18) and backboard (19) are formed, backboard (19) is fixed on the rear end face of guide rail (13), motor (18) is fixed on the backboard (19), slide carriage (1) is arranged on the upside of guide rail (13), air supporting conversion block (11) is arranged in the chute (14) of guide rail (13), fore-stock (16) is arranged on the front portion in the guide rail (13), after-poppet (17) is arranged on the rear portion in the guide rail (13), the two ends of ball screw (10) are connected with after-poppet (17) with fore-stock (16) respectively, the stage casing of ball screw (10) is arranged in the air supporting conversion block (11), form screw pair between ball-screw (9) and the ball screw (10), one end of ball-screw (9) is connected with the output of motor (18), fixedly connected with the rear side of slide carriage (1) upper end in the front side that it is characterized in that connecting plate (2) lower end, fixedly connected with the rear side of connecting plate (2) lower end in the upper end of back slurcam (4), before the upper end of slurcam (3) with close slide carriage (1) rear end and protrude in connecting plate (2) and fixedly connected the lower end of the connecting plate of overlap (2) mutually with slide carriage (1), the top of middle slurcam (5) is arranged between preceding slurcam (3) and the back slurcam (4), the lower end of middle slurcam (5) is connected with the upper end of air supporting conversion block (11), be provided with first throttle aperture (6) in the preceding slurcam (3), be provided with second throttling pore (7) in the back slurcam (4), form the first gas-static air film chamber (8) between middle slurcam (5) and the preceding slurcam (3), form the second gas-static air film chamber (15) between middle slurcam (5) and the back slurcam (4), be provided with static pressure throttling pore (12) in the air supporting conversion block (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101446170A CN100566928C (en) | 2007-11-16 | 2007-11-16 | Ultraprecise drive mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101446170A CN100566928C (en) | 2007-11-16 | 2007-11-16 | Ultraprecise drive mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101157181A CN101157181A (en) | 2008-04-09 |
| CN100566928C true CN100566928C (en) | 2009-12-09 |
Family
ID=39305481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101446170A Expired - Fee Related CN100566928C (en) | 2007-11-16 | 2007-11-16 | Ultraprecise drive mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100566928C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103021475B (en) * | 2012-12-19 | 2015-02-04 | 哈尔滨工业大学 | Top-pulling linear micro driving mechanism for rotary motion |
| CN103801944B (en) * | 2014-03-10 | 2016-03-30 | 北京微纳精密机械有限公司 | A kind of heavy caliber gas-static turntable structure |
| CN106272275A (en) * | 2015-05-11 | 2017-01-04 | 河北科技大学 | A kind of combination type ultraprecise linear motion workbench |
| CN108127455A (en) * | 2016-12-01 | 2018-06-08 | 维嘉数控科技（苏州）有限公司 | Multi-axial arrangements and numerically-controlled machine tool |
| CN108873741A (en) * | 2018-05-06 | 2018-11-23 | 北京工业大学 | A kind of active control system for the vibration of aerostatic guide way thrust bearing |
-
2007
- 2007-11-16 CN CNB2007101446170A patent/CN100566928C/en not_active Expired - Fee Related
Non-Patent Citations (8)
| Title |
|---|
| 改普通电机为气浮电机的研究. 张景和等.机械设计与制造，第3期. 2005 |
| 改普通电机为气浮电机的研究. 张景和等.机械设计与制造，第3期. 2005 * |
| 超精密光学非球曲面磨削系统的研制. 陈明君等.中国机械工程，第11卷第8期. 2000 |
| 超精密光学非球曲面磨削系统的研制. 陈明君等.中国机械工程，第11卷第8期. 2000 * |
| 超精密加工机床的关键部件技术. 盖玉先等.制造技术与机床，第1期. 2000 |
| 超精密加工机床的关键部件技术. 盖玉先等.制造技术与机床，第1期. 2000 * |
| 超精密驱动机构比较. 田军委等.西安工业学院学报，第22卷第1期. 2002 |
| 超精密驱动机构比较. 田军委等.西安工业学院学报，第22卷第1期. 2002 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101157181A (en) | 2008-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105666225B (en) | A kind of ultraprecise low speed ball-screw straight-line feed device | |
| CN100566928C (en) | Ultraprecise drive mechanism | |
| CN103225728B (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN201168876Y (en) | Three-freedom degree precision positioning worktable | |
| CN112092008B (en) | Compact modular variable-stiffness joint | |
| CN102152133A (en) | Five-coordinate locating mechanism | |
| CN101567223A (en) | Pneumatic semi-suspension two-freedom co-baseplane motion workbench with high speed and large stroke | |
| CN107387959B (en) | Integrated high-speed ultra-precise positioning two-dimensional platform | |
| CN103240614B (en) | A kind of redundant drive five-axle linkage series-parallel machine tool | |
| CN202601217U (en) | Macro-micro positioning apparatus | |
| CN104325345A (en) | Ball screw support device | |
| CN101871549B (en) | Three-degree-of-freedom precision-positioning workbench | |
| CN102059576B (en) | Biaxial linear moving micro driving device | |
| CN202155740U (en) | Numerically controlled quick precision feeder | |
| TWI472397B (en) | Two - legged mobile platform structure | |
| CN100587850C (en) | Incorporated ultra-precision workbench moving mechanism | |
| CN106272275A (en) | A kind of combination type ultraprecise linear motion workbench | |
| US11143529B2 (en) | Cantilever linear motion reference device employing two-layer air suspension | |
| CN103170661B (en) | Medium scale part minuteness milling lathe | |
| CN212863107U (en) | Container transfer cantilever device used in sealed box | |
| CN104400374B (en) | Two frames coplanar guide type aligning method and apparatus of stator alignment measurement is turned for aero-engine | |
| CN109465651B (en) | Friction type rigidity switching device, rigid-flexible coupling motion platform using same and method | |
| CN210476180U (en) | Machine tool and five-axis head assembly thereof | |
| CN103212799B (en) | A kind of two-dimension moving platform device being applicable to thin-wall pipes Laser Micro-Machining | |
| CN101956762B (en) | II-type gas static pressure guide rail for horizontal use |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091209 Termination date: 20201116 |