CN108873741A - A kind of active control system for the vibration of aerostatic guide way thrust bearing - Google Patents
A kind of active control system for the vibration of aerostatic guide way thrust bearing Download PDFInfo
- Publication number
- CN108873741A CN108873741A CN201810423436.XA CN201810423436A CN108873741A CN 108873741 A CN108873741 A CN 108873741A CN 201810423436 A CN201810423436 A CN 201810423436A CN 108873741 A CN108873741 A CN 108873741A
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- CN
- China
- Prior art keywords
- slide carriage
- thrust bearing
- vibration
- bearing
- piezoelectric actuator
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/04—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
- G01B7/042—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length
Abstract
The invention discloses a kind of active control systems for the vibration of aerostatic guide way thrust bearing.The system is equipped with an aerostatic guide way system, four displacement sensors, eight piezoelectric actuators, a data collector, a driver and a computer；Four capacitance sensors are fixed at slide carriage bottom surface with retainer, eight piezoelectric actuators are mounted in slide carriage main body, it is directly contacted with thrust bearing dynamic bearing, displacement sensor is connect with data collector, the parameter signal that displacement sensor acquires is input to computer by data collector, it is worked by the software control driver of computer, piezoelectric actuator is driven, to control dynamic bearing movement.Current vortex sensor vibration signal dynamic for high frequency has superior response characteristic, can be in the working condition precise measurement of guide rail.Piezoelectric actuator output displacement has high resolution ratio, and piezoelectric actuator is equipped with precision positioning Fuzzy control system, improves the reaction time of control system.
Description
Technical field
The present invention relates to a kind of active control systems for aerostatic guide way vibration, more particularly, to one kind for sky
The active control system of gas hydrostatic slideway thrust bearing vertical vibration.
Background technique
During precise and ultraprecise machining, the operating status of aerostatic guide way system middle slide carriage is largely
Affect its machining accuracy, strong vibration leads to the serious reduction of feed accuracy to thrust bearing during the work time, to processing
Workpiece quality adversely affects.Therefore, guide rail slide carriage thrust bearing vibration displacement is detected, and then controls the vibration of thrust bearing
Kinetic energy fundamentally compensates guide rail vertical vibration, has great meaning to aerostatic guide way system stability and processing quality is improved
Justice.
In hydrostatic slideway control method, due to piezoelectric actuator high resolution, High power output, fast response time, in essence
Close positioning, microfabrication etc. are widely used, also relatively broad for the research of piezoelectric actuator, such as feedforward control
System, the control based on PID, the control of neural network.But the research for being applied to the control of hydrostatic slideway vertical vibration is not perfect enough.
Therefore, the control compensation control of hydrostatic slideway thrust dynamic bearing is most important for improving guide track system machining accuracy.
Summary of the invention
The purpose of the present invention provides a kind of pair of hydrostatic slideway thrust for guide rail vertical vibration in hydrostatic slideway process
Dynamic bearing on-line real-time measuremen and control system realize the accurate detection of the vertical super amplitude vibrations in the hydrostatic slideway course of work
And control, while reaching and improving processing quality and provide reference frame for hydrostatic slideway working performance.
The technical solution adopted by the present invention is a kind of active control system for the vibration of aerostatic guide way thrust bearing,
The system be equipped with an aerostatic guide way system, four displacement sensors, eight piezoelectric actuators, a data collector,
One driver and a computer；Four capacitance sensors are fixed at slide carriage bottom surface with retainer, and eight piezoelectricity cause
Dynamic device is mounted in slide carriage main body, is directly contacted with thrust bearing dynamic bearing, and displacement sensor is connect with data collector, data
The parameter signal that displacement sensor acquires is input to computer by collector, is worked by the software control driver of computer, right
Piezoelectric actuator driving, to control dynamic bearing movement.
Displacement sensor of the present invention is that wide a kind of good reliability, measurement range, high sensitivity, high resolution are suitable for
The eddy current displacement sensor of high frequency dynamic measurement, can be displaced with real-time detection guide rail vertical vibration.
Piezoelectric actuator of the present invention and driving use Fuzzy control system, and steady-state error controls in sub-micron, has
Smaller regulating time and overshoot.It can be more accurately controlled the flexible deformation of dynamic bearing, to change the vibration position of thrust plate
It moves, it can be with the vertical deviation of real-time control thrust plate.
The computer and software have fast offset identification and accurate control function.
The present invention has the advantages that following prominent：
1) structure is simple.Control system uses simple closed-loop control system, avoids and designs for hydrostatic guide rail system
The drawbacks of complicated machinery drive mechanism.
2) versatility is good.This system is applicable not only to hydrostatic slideway, for universal numerical control machine slide rail and need to compensate
Device has very high general value.
3) real-time online detection and control function.Current vortex sensor vibration signal dynamic for high frequency has superior
Response characteristic, can be in the working condition precise measurement of guide rail, and piezoelectric actuator and drive control are to the real-time of guide rail dynamic bearing
Control function is the vital link of control system.
4) precision is high, and stability is good.Piezoelectric actuator output displacement has high resolution ratio, and piezoelectric actuator is equipped with essence
Close location ambiguity control system, improves the reaction time of control system, has superior overshoot time and overshoot, makes whole
A system has more stable reliability.
Detailed description of the invention
Fig. 1 is hydrostatic slideway control system overall structure diagram in the embodiment of the present invention.
Fig. 2 is hydrostatic slideway overall structure left view in the embodiment of the present invention.
Fig. 3 is that hydrostatic slideway thrust bearing deforms partial enlarged view.
In figure：1 stepper motor, 2 side plates, 3 slide carriages, 4 nuts, 5 piezoelectric actuators, 6 throttle orifices and air cavity, 7 air films, 8 rollings
Ballscrew, 9 guide rails, 10 current vortex sensors, 11 bottom plates, 12 air flues, 13 thrust bearing dynamic bearing initial positions, 14 taper gas
Film, 15 thrust bearing dynamic bearing deformation positions.
Specific embodiment
A step affected to technical solution of the present invention illustrates with reference to the accompanying drawing.
Referring to Fig. 1, the embodiment of the present invention is equipped with hydrostatic slideway thrust bearing control system.One kind being directed to aerostatic guide way
Thrust bearing vibration active control system, the system include stepper motor 1, side plate 2, slide carriage 3, nut 4, piezoelectric actuator 5,
Throttle orifice and air cavity 6, air film 7, ball-screw 8, guide rail 9 and current vortex sensor 10, stepper motor 1 are mounted on side plate by bolt
On 2, ball-screw 8 is driven to rotate, ball-screw 8 is connect by screw thread pair with nut 4, and nut 4 and slide carriage 3 are connected by positioning bolt
It connects, the twist motion of stepper motor 1 is converted to slide carriage 3 along the straight reciprocating motion of guide rail 9, and has between slide carriage 3 and guide rail 9
The air film 7 of a layer thickness in the micron-scale, which is that throttle orifice and air cavity 6 are compressed to by air compressor, and formation has
The air film 7 of the support airflow layer of certain pressure, thrust bearing does " zero friction " movement to bearing guide rail 8, is placed in 3 bottom end of slide carriage
Current vortex sensor 10 installed by retainer, the displacement of 3 vertical direction of slide carriage is measured in real time, is adopted by data collector
Collect displacement signal, by the software calculation process in computer, piezo controller 5 is driven, piezo controller 5 is deformed, pushes away
Dynamic dynamic bearing deformation, compensates the vertical vibration of slide carriage 3.
Referring to fig. 2, hydrostatic slideway overall structure left view.It is dispersed with air flue 12 in 3 main body of slide carriage, gas is entered by air flue
The surface of throttle orifice and air cavity 6, slide carriage and guide rail is supported by air film 7.
Referring to Fig. 3, partial enlarged view is deformed for thrust bearing.Specific step is as follows for its course of work：Slide carriage 3 and air stop
Thrust bearing dynamic bearing initial position 13, stepper motor 1 is in driving 8 rotation process of ball-screw, due to the excitation of external applied load, meeting
Make slide carriage 3 that vertical vibration occur, it is assumed that downward vertical play occurs for slide carriage 3, and slide carriage 3 and thrust bearing dynamic bearing are deformed to
Position 15, current vortex sensor 10 detect that 3 vertical deviation of slide carriage changes, and signal picker recognizes signal, is computed
Machine processing issues driving signal, deforms piezoelectric actuator 5, pushes the deformation of thrust bearing dynamic bearing, squeezes taper air film 14 and becomes
It is thin, change 7 bearing capacity of air film, slide carriage 3 and thrust bearing dynamic bearing is pushed to return to original position, to realize to slide carriage 3
Compensation control, reduce the vertical play of slide carriage 3 displacement, keep its operation more steady.
Claims (3)
1. a kind of active control system for the vibration of aerostatic guide way thrust bearing, it is characterised in that：The system includes step
Into motor (1), side plate (2), slide carriage (3), nut (4), piezoelectric actuator (5), throttle orifice and air cavity (6), air film (7), ball
Lead screw (8), guide rail (9) and current vortex sensor (10), stepper motor (1) are mounted on side plate (2) by bolt, drive ball wire
Thick stick (8) rotation, ball-screw (8) are connect by screw thread pair with nut (4), and nut (4) is connected with slide carriage (3) by positioning bolt,
The twist motion of stepper motor (1) is converted to slide carriage (3) along the straight reciprocating motion of guide rail (9), and slide carriage (3) and guide rail
(9) there is the air film (7) of a layer thickness in the micron-scale between, which is to be compressed to throttle orifice and air cavity by air compressor
(6), the support airflow layer with certain pressure is formed, the air film (7) of thrust bearing does " zero friction " fortune to bearing guide rail (9)
Dynamic, the current vortex sensor (10) for being placed in slide carriage (3) bottom end is installed by retainer, is carried out to the displacement of slide carriage (3) vertical direction
Real-time detection acquires displacement signal by data collector, by the software calculation process in computer, to piezoelectric actuator (5)
Driving deforms piezoelectric actuator (5), pushes dynamic bearing deformation, compensates the vertical vibration of slide carriage (3).
2. a kind of active control system for the vibration of aerostatic guide way thrust bearing according to claim 1, special
Sign is：In hydrostatic slideway overall structure；In slide carriage (3), main body is dispersed with air flue (12), gas by air flue enter throttle orifice and
The surface of air cavity (6), slide carriage and guide rail is supported by air film (7).
3. a kind of active control system for the vibration of aerostatic guide way thrust bearing according to claim 1, special
Sign is：Specific step is as follows for thrust bearing deformation operation process：Slide carriage (3) and air thrust bearing dynamic bearing initial position
(13), stepper motor (1), due to the excitation of external applied load, can be such that slide carriage (3) occur in driving ball-screw (8) rotation process
Vertical vibration, it is assumed that downward vertical play occurs for slide carriage (3), and slide carriage (3) and thrust bearing dynamic bearing are deformed to position
(15), current vortex sensor (10) detects that slide carriage (3) vertical deviation changes, and signal picker recognizes signal, through counting
The processing of calculation machine issues driving signal, deforms piezoelectric actuator (5), pushes the deformation of thrust bearing dynamic bearing, squeezes taper air film
(14) thinning, change air film (7) bearing capacity, slide carriage (3) and thrust bearing dynamic bearing is pushed to return to original position, thus real
Now the compensation of slide carriage (3) is controlled, reduces slide carriage (3) vertical play displacement, keeps its operation more steady.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810423436.XA CN108873741A (en) | 2018-05-06 | 2018-05-06 | A kind of active control system for the vibration of aerostatic guide way thrust bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810423436.XA CN108873741A (en) | 2018-05-06 | 2018-05-06 | A kind of active control system for the vibration of aerostatic guide way thrust bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108873741A true CN108873741A (en) | 2018-11-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810423436.XA Pending CN108873741A (en) | 2018-05-06 | 2018-05-06 | A kind of active control system for the vibration of aerostatic guide way thrust bearing |
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| CN (1) | CN108873741A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112727926A (en) * | 2020-12-19 | 2021-04-30 | 北京工业大学 | Controllable aerostatic radial bearing system |
| CN115156972A (en) * | 2022-07-18 | 2022-10-11 | 青岛科技大学 | Static pressure support macro-micro dual-drive feeding system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5238308A (en) * | 1992-05-04 | 1993-08-24 | Rockwell International Corporation | Adjustable gap hydrostatic element |
| CN101157181A (en) * | 2007-11-16 | 2008-04-09 | 哈尔滨工业大学 | Ultraprecise drive mechanism |
| JP2009063032A (en) * | 2007-09-05 | 2009-03-26 | Yokogawa Electric Corp | Slider |
| JP2009225640A (en) * | 2008-03-18 | 2009-10-01 | Yaskawa Electric Corp | Cylindrical linear motor |
| CN103836070A (en) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | Active air-floatation support device |
| CN105666225A (en) * | 2016-04-22 | 2016-06-15 | 清华大学 | Ultra-precise low-speed ball screw linear feeding device |
| CN107206557A (en) * | 2014-10-22 | 2017-09-26 | 机械工业技术中心 | Improved vibration machining set-up |
-
2018
- 2018-05-06 CN CN201810423436.XA patent/CN108873741A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5238308A (en) * | 1992-05-04 | 1993-08-24 | Rockwell International Corporation | Adjustable gap hydrostatic element |
| JP2009063032A (en) * | 2007-09-05 | 2009-03-26 | Yokogawa Electric Corp | Slider |
| CN101157181A (en) * | 2007-11-16 | 2008-04-09 | 哈尔滨工业大学 | Ultraprecise drive mechanism |
| JP2009225640A (en) * | 2008-03-18 | 2009-10-01 | Yaskawa Electric Corp | Cylindrical linear motor |
| CN103836070A (en) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | Active air-floatation support device |
| CN107206557A (en) * | 2014-10-22 | 2017-09-26 | 机械工业技术中心 | Improved vibration machining set-up |
| CN105666225A (en) * | 2016-04-22 | 2016-06-15 | 清华大学 | Ultra-precise low-speed ball screw linear feeding device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112727926A (en) * | 2020-12-19 | 2021-04-30 | 北京工业大学 | Controllable aerostatic radial bearing system |
| CN115156972A (en) * | 2022-07-18 | 2022-10-11 | 青岛科技大学 | Static pressure support macro-micro dual-drive feeding system |
| CN115156972B (en) * | 2022-07-18 | 2024-01-26 | 青岛科技大学 | Hydrostatic support macro-micro double-drive feeding system |
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Application publication date: 20181123 |