CN103225728B - Two-dimensional parallel micromotion platform driven by piezoceramic - Google Patents
Two-dimensional parallel micromotion platform driven by piezoceramic Download PDFInfo
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Abstract
本发明公开了一种压电陶瓷驱动的二维并联微动平台，由基座、运动平台、压电陶瓷驱动器、位移放大机构及导向机构等部分组成。第一、第二压电陶瓷驱动器相互垂直地放置在基座上各自的圆柱形槽内，驱动器的输出端紧靠在位移放大机构的输入铰链上，经位移放大机构和导向机构将运动传递给运动平台。本发明采用二级放大机构和复合平行四杆导向机构，使得微动平台结构紧凑，能在实现大行程运动的同时保证高的固有频率，X轴方向和Y轴方向能够有效解耦，压电陶瓷驱动器和柔性铰链平台的组合保证了运动传递的无摩擦，无间隙、高精度、高稳定性和快速响应。运动平台在X轴、Y轴方向上均设有位移传感器，便于实现微动平台的全闭环控制。
The invention discloses a two-dimensional parallel micro-motion platform driven by piezoelectric ceramics, which is composed of a base, a motion platform, a piezoelectric ceramic driver, a displacement amplification mechanism, a guiding mechanism and the like. The first and second piezoelectric ceramic drivers are vertically placed in respective cylindrical grooves on the base, and the output end of the driver is close to the input hinge of the displacement amplification mechanism, and the motion is transmitted to the sports platform. The invention adopts a two-stage amplification mechanism and a composite parallel four-bar guiding mechanism, so that the structure of the micro-movement platform is compact, and a high natural frequency can be ensured while realizing a large-stroke movement. The X-axis direction and the Y-axis direction can be effectively decoupled, and the piezoelectric The combination of ceramic driver and flexible hinge platform ensures frictionless motion transmission, no backlash, high precision, high stability and fast response. The motion platform is equipped with displacement sensors in the X-axis and Y-axis directions, which facilitates the full closed-loop control of the micro-motion platform.
Description
Technical field
The present invention relates to a kind of two-dimensional parallel micromotion platform, particularly relate to a kind of two-dimensional parallel micromotion platform of Piezoelectric Ceramic.
Background technology
In recent years, along with continuous progress that is scientific and technical and industrial technology, the field develop rapidlys such as micro-electronic manufacturing, ultraprecise machine-building, Micro-Robot operation, precision measurement optical instrument and biomedical operation, in the urgent need to the system that can position on nano-precision and operate and equipment.In these areas, the micromotion platform with nano-precision is its core component, and it studies the favor of extremely Chinese scholars.Traditional physical construction, if motor, gear, hinge etc. are owing to being assembled and the impact of the factor such as movement clearance, friction, damping, nano-precision cannot be reached, and using piezoelectric ceramics as driver, using flexible hinge as the micro-displacement platform of elastic guide, owing to having without friction, without backlass, ultrahigh resolution, being easy to the advantages such as control and compact conformation, be widely used in the micromotion platform with nano-precision.
At present, commercial conventional two degrees of freedom micromotion platform adopts the motion platform longitudinal stack of two one dimensions to be nested in the platform of another one direction by the motion platform of a direction mostly together or in the mode of series connection, realizes two dimensional motion.But the shortcoming such as adopt the two-dimensional micromotion stage of this connected mode because of superposition and produce cumulative errors, parasitic displacement, natural frequency to reduce and the different and volume of both direction dynamic perfromance is larger.More existing two-dimensional parallel platforms, generally have less range of movement (being generally less than 100um), and but ubiquity first natural frequency lower (generally at 250Hz) is below for the larger mini positioning platform of stroke.
Chinese patent CN102324253B proposes a kind of mini positioning platform in parallel based on piezoelectric ceramic actuator driving and mini positioning platform system, this mini positioning platform adopts parallel-connection structure, driven by three piezoelectric ceramic actuators, and the secondary bar group adopting four to be made up of flexible hinge is as decoupling mechanism, make platform can effectively improve output linearity, eliminate displacement coupling, improve positioning precision, decoupling zero is convenient, is easy to control.But owing to being subject to the restriction of volume, the stroke of piezoelectric ceramic actuator is less, non-displacement enlarger in this platform structure, therefore the range of movement of micromotion platform is very little, cannot meet the precision positioning requirement of Long Distances.
Chinese patent CN101887761A proposes a kind of two-degree-of-freedom micro-positioning platform, this platform adopts lever amplifying mechanism and compound parallel four-bar guiding mechanism, make the effective decoupling zero of the motion of platform X-direction and Y-direction, compact conformation, small volume, the combination of piezoelectric ceramic actuator and flexible hinge platform ensure that Movement transmit without friction, gapless, high precision, high stability and respond fast.But the maximum output displacement of this platform is 120um × 120um, and Platform movement scope is less, and four sides being hinged on Platform movement part of compound parallel four-bar guiding mechanism symmetry, limit the installation of displacement transducer.
Chinese patent CN101738855A proposes a kind of flexible micro-positioning stage with two degrees of freedom, this worktable adopts flexible parallel connection structure, adopt but degree of freedom flexible hinge as gear train, make Working table structure compact, rigidity is high, mechanical rubs, and without movement clearance, is beneficial to and realizes micro/nano level hi-Fix.But this Working table structure is asymmetric, when only driving the driver on certain single-degree-of-freedom, working table movement part easily produces deflection due to discontinuity, produces parasitic displacement, affect working table movement precision, and the range of movement of worktable is less.
Chinese patent CN101862966A proposes a kind of two-degree of freedom translation parallel decoupling micromotion platform, this platform adopts Composite Double straight parallel plate hinge arrangement and symmetry constraint structure, thus make platform have larger displacement, effectively eliminate the generation of the parasitic displacement such as the displacement of between centers output coupling, cumulative errors and workbench rotation, ensure that the two-degree of freedom translation of motion platform, too increase the rigidity of structure, load-bearing capacity simultaneously.But this platform adopts straight plate hinge, although be easy to processing and increase impulse stroke, reduce precision and the natural frequency of motion, and platform and integrally size is comparatively large, structure is compact not, limits the installation of displacement transducer.
In view of some problems that the micromotion platform proposed in above-mentioned market and in previous patent exists, therefore be necessary to design a kind of high-accuracy micromotion platform newly, in advantages such as maintenance platform location and performance accuracy is high, fast response time, high natural frequencies and while not increasing locating platform control algolithm difficulty, increase working platform stroke, and from electromechanical integration angle, creation and optimization is carried out to micromotion platform.
Summary of the invention
Object of the present invention is exactly to solve the problem, a kind of two-dimensional parallel micromotion platform of Piezoelectric Ceramic is provided, it has rational in infrastructure, superior performance, can not only test the precision positioning of larger row journey, and coupling and parasitic displacement can be eliminated, ensure that this micromotion platform has higher natural frequency, and compact conformation, volume is little, precision is high, the advantage of fast response time.
To achieve these goals, the present invention adopts following technical scheme:
A two-dimensional parallel micromotion platform for Piezoelectric Ceramic, it comprises pedestal, motion platform, and pedestal is provided with guiding mechanism and displacement amplifying mechanism, and four angles of described motion platform are hinged with guiding mechanism respectively, contactless with pedestal; The Y of described motion platform, X-direction are respectively equipped with the first piezoelectric ceramic actuator and the second piezoelectric ceramic actuator, first piezoelectric ceramic actuator and the second piezoelectric ceramic actuator are vertical to be respectively placed in cylindrical groove respective on pedestal, one end of first piezoelectric ceramic actuator and the second piezoelectric ceramic actuator is fixed with dog screw respectively, the other end acts on the input hinge of displacement amplifying mechanism as output terminal respectively, displacement amplifying mechanism is all hinged with guiding mechanism, and the X-axis of described motion platform, Y direction are respectively equipped with displacement transducer.
Described guiding mechanism is the compound parallel four-bar guiding mechanism be made up of eight bars, symmetrical structure is formed by double connecting rod, wherein, guiding mechanism first bar is all connected by flexible hinge with motion platform with one end of guiding mechanism second bar, the other end is all connected with the displacement amplifying mechanism in Y-direction by flexible hinge, guiding mechanism the 3rd bar is all connected by flexible hinge with motion platform with one end of guiding mechanism the 4th bar, the other end is all connected with the displacement amplifying mechanism in X-direction by flexible hinge, guiding mechanism the 5th bar, guiding mechanism six roots of sensation bar, guiding mechanism the 7th bar, one end of guiding mechanism the 8th bar is all connected with motion platform by flexible hinge, the other end by flexible hinge respectively with hinged first connecting rod on pedestal, second connecting rod, third connecting rod, double leval jib connects.
Described displacement amplifying mechanism comprises X-direction enlarger and the Y-direction enlarger of structural symmetry, X-direction enlarger comprises structural symmetry and the 3rd enlarger of parallel connection and the 4th enlarger, Y-direction enlarger comprises structural symmetry and the first enlarger of parallel connection and the second enlarger, first enlarger, second enlarger, the output hinge of the 3rd enlarger and the 4th enlarger is all hinged with guiding mechanism, the input hinge of described first enlarger and the second enlarger all interacts with the output terminal of the first piezoelectric ceramic actuator, the input hinge of described 3rd enlarger and the 4th enlarger all interacts with the output terminal of the second piezoelectric ceramic actuator.
Institute's displacement sensors is linear grating, comprise linear grating chi, linear grating read head and read head fixed support, described linear grating chi is posted in two adjacent side of motion platform respectively, the linear grating chi of X-direction is the second linear grating chi, the linear grating chi of Y-direction is the first linear grating chi, first linear grating read head of described first linear grating and the second linear grating read head of the second linear grating are arranged on the first read head fixed support and the second read head fixed support respectively, the signal cable of the first linear grating and the second linear grating picks out from the first linear grating read head and the second linear grating read head respectively, described each signal cable is drawn by corresponding linear grating cable duct.
Described first enlarger comprises the first enlarger first order and amplifies lever, lever is amplified in first enlarger connecting rod and the first enlarger second level, input hinge and first piezoelectric ceramic actuator of the first enlarger first order amplification lever interact, the fulcrum that first enlarger first amplifies lever by flexible hinge and pedestal hinged, the output terminal that the first enlarger first order amplifies lever is connected by flexible hinge one end with the first enlarger connecting rod, the input end that the other end of the first enlarger connecting rod amplifies lever by flexible hinge and the first enlarger second level is hinged, first the enlarger second level amplify lever fulcrum by flexible hinge and pedestal hinged, the output terminal that lever is amplified in the first enlarger second level is connected with guiding mechanism by flexible hinge.
Described second enlarger comprises the second enlarger first order and amplifies lever, lever is amplified in second enlarger connecting rod and the second enlarger second level, input hinge and first piezoelectric ceramic actuator of the second enlarger first order amplification lever interact, the fulcrum that second enlarger first amplifies lever by flexible hinge and pedestal hinged, the output terminal that the second enlarger first order amplifies lever is connected by flexible hinge one end with the second enlarger connecting rod, the input end that the other end of the second enlarger connecting rod amplifies lever by flexible hinge and the second enlarger second level is hinged, second the enlarger second level amplify lever fulcrum by flexible hinge and pedestal hinged, the output terminal that lever is amplified in the second enlarger second level is connected with guiding mechanism by flexible hinge.
Described 3rd enlarger comprises the 3rd enlarger first order and amplifies lever, lever is amplified in 3rd enlarger connecting rod and the 3rd enlarger second level, input hinge and second piezoelectric ceramic actuator of the 3rd enlarger first order amplification lever interact, the fulcrum that 3rd enlarger first amplifies lever by flexible hinge and pedestal hinged, the output terminal that the 3rd enlarger first order amplifies lever is connected by flexible hinge one end with the 3rd enlarger connecting rod, the input end that the other end of the 3rd enlarger connecting rod amplifies lever by flexible hinge and the 3rd enlarger second level is hinged, 3rd the enlarger second level amplify lever fulcrum by flexible hinge and pedestal hinged, the output terminal that lever is amplified in the 3rd enlarger second level is connected with guiding mechanism by flexible hinge.
Described 4th enlarger comprises the 4th enlarger first order and amplifies lever, lever is amplified in 4th enlarger connecting rod and the 4th enlarger second level, input hinge and second piezoelectric ceramic actuator of the 4th enlarger first order amplification lever interact, the fulcrum that 4th enlarger first amplifies lever by flexible hinge and pedestal hinged, the output terminal that the 4th enlarger first order amplifies lever is connected by flexible hinge one end with the 4th enlarger connecting rod, the input end that the other end of the 4th enlarger connecting rod amplifies lever by flexible hinge and the 4th enlarger second level is hinged, 4th the enlarger second level amplify lever fulcrum by flexible hinge and pedestal hinged, the output terminal that lever is amplified in the 4th enlarger second level is connected with guiding mechanism by flexible hinge.
The two ends of described first piezoelectric ceramic actuator and the second piezoelectric ceramic actuator are all fixed with thrust hemisphere.
Described pedestal is also provided with the outlet of piezoelectric ceramics signal wire.
Described pedestal upper end is provided with micromotion platform end cap, and micromotion platform end cap is connected with pedestal by bolt.
Beneficial effect of the present invention:
1, the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention adopts parallel-connection structure and structural symmetry on XY direction, ensure that dynamics is identical in both direction, have that rigidity is high, inertia is low, load-bearing capacity is high, precision is high, without advantages such as cumulative errors, compact conformation, volume are little.
2, the enlarger of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention adopts two-stage to amplify, and achieve the Long Distances precision positioning of motion platform, the maximum displacement of motion platform is 200um.
3, the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention adopts compound parallel four-bar guiding mechanism, by double connecting rod stroke symmetrical structure, thus effectively eliminate the generation that between centers exports the parasitic displacement such as displacement, cumulative errors and motion platform rotation of coupling, ensure that motion platform two-degree of freedom translation, add the rigidity of structure, load-bearing capacity and first natural frequency simultaneously.
4, the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention, its compliant mechanism can utilize Linear cut integration process technology overall processing to form, rely on the elastic deformation drive motion of flexible hinge, do not need assembling, gapless, without friction, do not need lubrication, be easy to realize nano high-precision location.
In the two-dimensional parallel micromotion platform of 5, Piezoelectric Ceramic provided by the invention, all flexible hinges have identical structure and size, make micromotion platform structure simple, are easy to processing.
Accompanying drawing explanation
Fig. 1 is the inner structure schematic diagram of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention;
Fig. 2 is the inner structure three-dimensional structure diagram of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention;
Fig. 3 is the shape assumption diagram of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention;
Fig. 4 is the mechanism principle figure of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention;
Fig. 5 is the circular arc flexible hinge structure figure of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention.
In figure: 1 pedestal, 2 motion platforms, 3 guiding mechanism first bars, lever is amplified in the 4 first enlarger second level, 5 first enlarger connecting rods, the 6 first enlarger first order amplify lever, 7 first piezoelectric ceramic actuators, 8 first thrust hemisphere, 9 first dog screws, 10 first displacement input levers, the 11 second enlarger first order amplify lever, 12 second enlarger connecting rods, lever is amplified in the 13 second enlarger second level, 14 guiding mechanism second bars, 15 piezoelectric ceramics signal wire slots, 16 guiding mechanisms the 3rd bar, lever is amplified in 17 the 3rd enlarger second level, 18 the 3rd enlarger connecting rods, 19 the 3rd enlarger first order amplify lever, 20 second piezoelectric ceramic actuators, 21 second thrust hemisphere, 22 second dog screws, 23 second displacement input levers, 24 the 4th enlarger first order amplify lever, 25 the 4th enlarger connecting rods, lever is amplified in 26 the 4th enlarger second level, 27 guiding mechanisms the 4th bar, 28 guiding mechanisms the 5th bar, 29 first connecting rods, 30 first linear grating read heads, 31 first read head fixed supports, 32 first linear grating chis, 33 second connecting rods, 34 guiding mechanism six roots of sensation bars, 35 guiding mechanisms the 7th bar, 36 third connecting rods, 37 second linear grating read heads, 38 second read head fixed supports, 39 second linear grating chis, 40 linear grating cable ducts, 41 double leval jib, 42 guiding mechanisms the 8th bar, 43 micromotion platform fixed orifices, 44 piezoelectric ceramics signal wire outlets, 45 micromotion platform end caps.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the invention will be further described.
The inner structure schematic diagram of the two-dimensional parallel micromotion platform of Fig. 1 Piezoelectric Ceramic.The present invention adopts parallel-connection structure, is made up of pedestal 1, motion platform 2, first piezoelectric ceramic actuator 7, second piezoelectric ceramic actuator 20, displacement amplifying mechanism, guiding mechanism and displacement transducer.First piezoelectric ceramic actuator 7 and the second piezoelectric ceramic actuator 20 are placed in cylindrical groove respective on pedestal mutual vertically, first piezoelectric ceramic actuator 7, the two ends of the second piezoelectric ceramic actuator 20 are respectively by spherical the first thrust hemisphere 8 of semicircle, second thrust hemisphere 21 is connected with miscellaneous part, first piezoelectric ceramic actuator 7, one end of second piezoelectric ceramic actuator 20 is respectively by the first dog screw 9, second dog screw 22 is fixed, the other end is as output terminal, respectively by displacement amplifying mechanism and guiding mechanism by the Movement transmit of piezoelectric ceramics to motion platform 2.The output terminal of the first piezoelectric ceramic actuator 7 abuts against in the first displacement input lever 10 by the first thrust hemisphere 8, and the first displacement input lever 10 is amplified lever 6, second enlarger first order amplification lever 11 by flexible hinge with the first enlarger first order and connected.Y-direction enlarger is made up of the first symmetrical enlarger and second enlarger two parts, first enlarger amplifies lever 6 by the first enlarger first order, first enlarger connecting rod 5, the first enlarger second level is amplified lever 4 and is formed, wherein first the enlarger first order amplify lever 6 fulcrum by flexible hinge and pedestal 1 hinged, its output terminal is connected by flexible hinge one end with the first enlarger connecting rod 5, the other end of the first enlarger connecting rod 5 amplifies lever 4 by flexible hinge with the first enlarger second level and is connected, first the enlarger second level amplify lever 4 fulcrum by flexible hinge and pedestal 1 hinged, its output terminal is connected by flexible hinge and guiding mechanism first bar 3.Second enlarger is identical with the first enlarger structure, amplify lever 13 by the second enlarger first order amplification lever 11, second enlarger connecting rod 12 and the second enlarger second level to be hinged by flexible hinge, and the second enlarger first order amplifies lever 11 and the second enlarger second level, and to amplify the fulcrum of lever 13 all hinged by flexible hinge and pedestal 1, and the output terminal of the second enlarger second level amplification lever 13 is connected by flexible hinge and guiding mechanism second bar 14.Guiding mechanism first bar 3 and guiding mechanism second bar 14 is all connected with motion platform 2 by flexible hinge, thus promotes the motion that motion platform 2 completes Y-direction.The output terminal of the second piezoelectric ceramic actuator 20 abuts against in the second displacement input lever 23 by the second thrust hemisphere 21, and the second displacement input lever 21 amplifies lever 19 by flexible hinge with the 3rd enlarger first order, the 4th enlarger first order is amplified lever 24 and connected.X-direction displacement amplifying mechanism and Y-direction displacement amplifying mechanism symmetrically, are made up of the 3rd symmetrical enlarger and the 4th enlarger two parts.3rd enlarger is amplified lever 17 formed by flexible hinge is hinged by the 3rd enlarger first order amplification lever 19, the 3rd enlarger connecting rod 18, the 3rd enlarger second level, the fulcrum that wherein the 3rd enlarger first order amplifies lever 19, lever 17 is amplified in the 3rd enlarger second level is hinged by flexible hinge and pedestal 1, and the 3rd enlarger second level amplification lever 17 output terminal is connected by flexible hinge with guiding mechanism the 3rd bar 16.4th enlarger is amplified lever 26 formed by flexible hinge is hinged by the 4th enlarger first order amplification lever 24, the 4th enlarger connecting rod 25, the 4th enlarger second level, the fulcrum that wherein the 4th enlarger first order amplifies lever 24, lever 26 is amplified in the 4th enlarger second level is hinged by flexible hinge and pedestal 1, and the 4th enlarger second level amplification lever 26 output terminal is connected by flexible hinge and guiding mechanism the 4th bar 27.Guiding mechanism the 3rd bar 16 and guiding mechanism the 4th bar 27 all by flexible hinge and motion platform 2 hinged, thus promote motion platform 2 and complete the motion of X-direction.Guiding mechanism is compound parallel four-bar guiding mechanism, be made up of guiding mechanism first bar 3, guiding mechanism second bar 14, guiding mechanism the 3rd bar 16, guiding mechanism the 4th bar 27, guiding mechanism the 5th bar 28, guiding mechanism six roots of sensation bar 34, guiding mechanism the 7th bar 35, guiding mechanism the 8th bar 42 8 bars, be distributed in symmetrically on four angles of motion platform 2, and be connected with motion platform 2 by flexible hinge.Wherein, guiding mechanism first bar 3, guiding mechanism second bar 14, guiding mechanism the 3rd bar 16, guiding mechanism the 4th bar 27 amplifies lever 4 respectively by flexible hinge and the first enlarger second level, lever 13 is amplified in the second enlarger second level, lever 17 is amplified in the 3rd enlarger second level, the 4th enlarger second level is amplified lever 26 and is connected, guiding mechanism the 5th bar 28, guiding mechanism six roots of sensation bar 34, guiding mechanism the 7th bar 35, guiding mechanism the 8th bar 42 respectively by flexible hinge with the hinged first connecting rod 29 of pedestal 1, second connecting rod 33, third connecting rod 36, double leval jib 41 connects.The guiding mechanism of full symmetric, had both avoided the generation of hunt effect, achieved again XY both direction is moved full decoupled.X-direction displacement transducer and Y-direction displacement transducer all adopt linear grating, are made up of linear grating chi, read head and read head fixed support three part.First linear grating chi 32 and the second linear grating chi 39 are attached on two sides of motion platform 2 respectively, first linear grating read head 30 and the second linear grating read head 37 are fixed on pedestal respectively by the first read head fixed support 31 and the second read head fixed support 38, and the signal cable outputed signal by being connected with read head feeds back to computing machine.
Fig. 2 is the inner structure three-dimensional structure diagram of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention, be can clearly be seen that the inner structure of micromotion platform of the present invention by figure.First piezoelectric ceramic actuator 7 and the second piezoelectric ceramic actuator 20 are placed in base interior cylindrical groove separately mutual vertically, its one end is fixed by the first dog screw 9, second dog screw 22 be fixed on pedestal 1, its other end is as output terminal, pass motion to motion platform 2 by the enlarger of X, Y-direction and guiding mechanism, thus actuation movement platform 2 completes the motion in XY plane.The signal wire of X-direction piezoelectric ceramic actuator 7 and Y-direction piezoelectric ceramic actuator 20 exports 44 by piezoelectric ceramics signal wire slots 15 by piezoelectric ceramics signal wire and draws.The signal cable of X, Y-direction displacement transducer is drawn by linear grating cable duct 40, and the displacement signal of motion platform 2 is fed back to computing machine, realizes the full closed loop control of micromotion platform.
Fig. 3 is the shape assumption diagram of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention, micromotion platform end cap 45 is connected with pedestal 1 by bolt, have the square hole slightly larger than motion platform 2 in the middle of micromotion platform end cap 45, and gap is greater than the maximum displacement of micromotion platform.Motion platform 2 is positioned at the middle part of whole micromotion platform, and micromotion platform is fixed on a certain platform or on other devices by micromotion platform fixed orifice 43, easy to use.
Fig. 4 is the mechanism principle figure of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention, clearly can find out the motion principle of platform from figure.When the first piezoelectric ceramic actuator 7 is energized work, the displacement of the first piezoelectric ceramic actuator 7 is passed to the first enlarger of Y-direction by the first displacement input lever 10, second enlarger, and amplify lever 6 through the first enlarger first order, the second enlarger first order amplifies lever 11 and lever 4 is amplified in the first enlarger second level, the two-stage that lever 13 is amplified in the second enlarger second level is amplified, displacement is passed to guiding mechanism first bar 3 and guiding mechanism second bar 14, brought into motion platform 2 is interior motion in the Y direction, full symmetric and the first enlarger of parallel connection, second enlarger and guiding mechanism, avoid the generation of the hunt effects such as motion platform 2 rotation, ensure the precision that motion platform 2 moves in the Y direction.When the second piezoelectric ceramic actuator 20 is energized work, the displacement of the second piezoelectric ceramic actuator 20 is passed to the second enlarger of X-direction by the second displacement input lever 23, 3rd enlarger, and amplify lever 19 through the 3rd enlarger first order, the 4th enlarger first order amplifies lever 24 and lever 17 is amplified in the 3rd enlarger second level, the two-stage that lever 25 is amplified in the 4th enlarger second level is amplified, displacement is passed to guiding mechanism the 3rd bar 16 and guiding mechanism the 4th bar 27, brought into motion platform 2 moves in X-direction, the X-direction enlarger of its parallel connection of full symmetric and guiding mechanism, avoid the generation of the hunt effects such as motion platform 2 rotation, ensure the precision that motion platform 2 moves in the X direction.And when motion platform 2 in the Y direction in motion time, drive guiding mechanism the 3rd bar 16, guiding mechanism the 4th bar 27, guiding mechanism the 7th bar 35 and guiding mechanism the 8th bar 42 around its fulcrum Small-angle Rotation, when motion platform 2 moves in X-direction, drive guiding mechanism first bar 3, guiding mechanism second bar 14, guiding mechanism the 5th bar 28 and guiding mechanism six roots of sensation bar 34 around its fulcrum Small-angle Rotation, therefore the motion of motion platform 2 in X, Y both direction is full decoupled, can not produce and influence each other.Select single piezoelectric ceramic actuator work or two piezoelectric ceramic actuators to work as required simultaneously, the arbitrary motion of motion platform 2 in XY plane can be realized.
Fig. 5 is the circular arc flexible hinge structure figure of the two-dimensional parallel micromotion platform of Piezoelectric Ceramic provided by the invention, because circular arc flexible hinge has higher kinematic accuracy, therefore in the two-dimensional parallel micromotion platform of Piezoelectric Ceramic of the present invention, all flexible hinges all adopt circular arc flexible hinge, and all circular arc flexible hinge structure and measure-alike, flexible hinge arc radius r is 1.2mm, hinge width t is 0.6mm, and hinge thickness w is 20mm.
The two-dimensional parallel micromotion platform of Piezoelectric Ceramic of the present invention is as follows in the specific works process of XY plane: when only the first piezoelectric ceramic actuator 7 works, and motion platform 2 completes the motion of Y-direction under the effect of the first enlarger, the second enlarger and guiding mechanism; When only the second piezoelectric ceramic actuator 20 works, motion platform 2 completes the motion of X-direction under the effect of the 3rd enlarger, the 4th enlarger and guiding mechanism; When the first piezoelectric ceramic actuator 7 and the second piezoelectric ceramic actuator 20 work simultaneously, motion platform 2 does plane motion in XY plane.The linear grating of motion platform 2 two sides is measured the displacement of platform in XY both direction respectively and is fed back to computing machine, thus realizes the closed-loop precise hard_drawn tuhes of micromotion platform.
By reference to the accompanying drawings the specific embodiment of the present invention is described although above-mentioned; but not limiting the scope of the invention; one of ordinary skill in the art should be understood that; on the basis of technical scheme of the present invention, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection scope of the present invention.
Claims (9)
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