CN202601217U - Macro-micro positioning apparatus - Google Patents
Macro-micro positioning apparatus Download PDFInfo
- Publication number
- CN202601217U CN202601217U CN 201220055219 CN201220055219U CN202601217U CN 202601217 U CN202601217 U CN 202601217U CN 201220055219 CN201220055219 CN 201220055219 CN 201220055219 U CN201220055219 U CN 201220055219U CN 202601217 U CN202601217 U CN 202601217U
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Abstract
The utility model relates to a macro-micro positioning apparatus especially used for precision manufacture industry, in particular to a precision positioning objective table, wherein a macro moving part employs a servo motor as a driving member, employs a C0-grade large lead ball screw pair and a polish rod as a transmission part, and is characterized in that the macro moving servo motor is mounted on a macro moving servo motor supporting base, the macro moving servo motor is connected with the screw pair through a macro moving shaft coupling, a macro moving bearing, a bearing seat, the polish rod and a polish rod supporting seat are mounted on a base, and the macro moving work table is connected by bolts through a macro moving screw nut and a macro moving screw slide block, and a micro moving part employs a minitype servo motor as a driving member, employs a C0-grade small lead ball screw pair and a polish rod as a transmission part, and is characterized in that the micro moving servo motor is connected with the screw pair through a micro moving shaft coupling and bolts, and a micro moving bearing, a polish rod and a polish rod supporting seat are mounted on the macro moving work table. The macro-micro positioning apparatus ingeniously enables micro moving positioning to be superposed on macro moving positioning, thereby realizing large-stroke high-speed accuracy positioning.
Description
Technical field
The utility model relates to a kind of grand little two-stage locating device, especially is useful for sophisticated manufacturing, specifically a kind of precision positioning objective table.
Background technology
The range of application of precision positioning technology is extremely broad; Require more and more; The notion of precision positioning has different understanding and quantity to define at different times; Actual conditions with regard to present see that the submicron order bearing accuracy is the bottom line of precision positioning, and nanometer positioning is being represented the highest level of precision positioning.
The application of precision positioning technology is very extensive; Along with development of science and technology; Precision positioning technology is widely used in micromachine, miniature assembling field, simultaneously, and in fields such as microelectronics information industry, genetically modified organism engineering, semiconductor lithography, precision measurement, ultraprecise processing, biological cell manipulation and nanometer technologies; Also all need very accurately location and very fine moving; Therefore high performance ultraprecise positioning table becomes the technical support in these fields, and this Study on Technology is in the forward position of precision engineering technology in the world, has great scientific meaning and using value.
From present domestic and international research situation to Precision Position Location System; In order to realize big stroke, generally all be to adopt grand little two-stage locator meams, that is be on the basis of grand moving positioning control; Stack fine motion positioning control realizes the big stroke motion and the nanoscale precision positioning technology of objective table at last.Numerous positioning systems in order to improve bearing accuracy, adopt the drive unit as system such as linear electric motors, fluid pressure leading screw or friction gearing mostly, but have so not only increased manufacturing cost, and the difficulty that has increased adjustment and safeguarded.Therefore, can under traditional ball-screw transmission, the total system bearing accuracy be improved, have Practical significance.Study and design a kind of precision positioning device and have high realistic meaning.
Summary of the invention
The purpose of the utility model exactly in order to solve the above-mentioned technical matters that exists on the prior art, provides a kind of grand little two-stage locating device.
In order to solve the problems of the technologies described above, the utility model solves the technical scheme that its technical matters adopted and is: a kind of grand little two-stage locating device is provided, and grand moving part adopts servomotor to do driving link, C
0Level great lead ball lead screw pair and polished rod are done running part.It is characterized in that: grand moving servomotor is installed on the grand moving servomotor bearing; Grand moving servomotor is connected through grand moving shaft coupling with leading screw; Grand dynamic bearing and bearing seat, polished rod and polished rod bearing are installed on the base, and grand moving worktable connects with bolt through grand movable wire thick stick nut, grand movable wire thick stick slide block; Fine motion partly adopts small-sized servomotor to do driving link, C
0Little lead ball lead screw pair of level and polished rod are done running part.It is characterized in that: the fine motion servomotor is installed to the fine motion bearing; The fine motion servomotor is connected through fine motion shaft coupling, bolt with leading screw; Fine motion bearing, polished rod and polished rod bearing are assembled on the grand moving worktable, and micro displacement workbench connects with bolt through fine motion slide block, fine motion feed screw nut.
The beneficial effect of the utility model is: owing to adopt servomotor VFC mode to realize speed governing, have the advantage that the moment inertia ratio is big, mechanical time constant is little, realized efficient, the accurate driving; Convert accurate axial linear movement into owing to adopt the ball-screw transmission to rotatablely move, between the raceway of leading screw and nut, placed ball, realize high precision, high-level efficiency and low friction gearing with respect to the sliding friction ball-screw; Because grand moving part two ends are all adorned thrust bearing and are applied pretightning force and realize high transmission accuracy; Because fine motion is partly carried little employing one end thrust bearing, one a solid trip support and is utilized non-linear friction characteristic and fine motion characteristic in the ball-screw auxiliary driving micron location to realize accurately location; Because general structure is simple, has not only reduced manufacturing cost and adjustment and safeguarded also simple relatively; Because micro displacement workbench is only the final operating part of this device, displacement detector directly is contained in whole errors of eliminating on the micro displacement workbench in the grand motion work.In a word, adopt grand little two-stage location, can realize that big stroke can realize accurate location again; And can reach the requirement of operating part high-speed motion.
Description of drawings
Accompanying drawing has provided the practical implementation example of the utility model, is used for explaining the principle of the utility model in the lump with instructions.Through the detailed description of doing below in conjunction with accompanying drawing, can more be expressly understood purpose, advantage and the characteristic of the utility model, wherein identical characteristic is used identical label.
Fig. 1 is the 2D assembling relationship figure of the utility model.
Fig. 2 is the 3D assembling relationship figure of the utility model.
Embodiment
Therefore the preferred example of the grand little two-stage locating device of following the utility model does not limit the protection domain of the utility model.
The grand motion parts of Fig. 1: grand moving servomotor (8) is assembled on the grand moving servomotor bearing (11) through bolt and nut (9) (10); Grand moving servomotor (8) is connected with bolt (7) through grand moving shaft coupling (12) with leading screw (13); Grand dynamic bearing (6) and bearing seat (2), polished rod (3) and polished rod bearing (4) are installed on the base (1) through bolt (5) (26), and grand moving worktable (14) connects with bolt through grand movable wire thick stick nut, grand movable wire thick stick slide block (27).
Like Fig. 1 micromotion part; Fine motion servomotor (25) is assembled to grand moving worktable (14) after connecting fine motion bearing (22) with bolt (15); Fine motion servomotor (25) is connected through fine motion shaft coupling (16), bolt (17) with leading screw (19); To grand moving worktable (14), micro displacement workbench (21) connects with bolt through fine motion slide block, fine motion feed screw nut (18) through bolts assemblies for fine motion bearing (20), polished rod (23) and polished rod bearing (24).
Be assemblied on the grand moving worktable (14) like Fig. 1 micro displacement workbench (21), be independent of each other each other and realized the stack of motion.
Like Fig. 1 micro displacement workbench (21) is the operating part of this device, and displacement detector directly is contained on the micro displacement workbench, obtains the physical location of worktable, eliminates the whole errors in the grand motion work.
Rotating drive ball-screw (13) like the grand moving servomotor of Fig. 1 (8) rotates.Ball-screw (13) converts curvilinear motion the rectilinear motion of grand moving nut to, drives grand moving worktable (14) motion, after fine motion servomotor (25) rotates, drives fine motion ball-screw (19) again and rotates.Fine motion ball-screw (19) converts curvilinear motion the rectilinear motion of fine motion nut to, drives micro displacement workbench (21) motion.
Claims (1)
1. grand little two-stage locating device, grand moving part adopts servomotor to do driving link, C
0Level great lead ball lead screw pair and polished rod are done running part; It is characterized in that: grand moving servomotor is installed on the grand moving servomotor bearing; Grand moving servomotor is connected through grand moving shaft coupling with leading screw; Grand dynamic bearing and bearing seat, polished rod and polished rod bearing are installed on the base, and grand moving worktable connects with bolt through grand movable wire thick stick nut, grand movable wire thick stick slide block; Fine motion partly adopts small-sized servomotor to do driving link, C
0Little lead ball lead screw pair of level and polished rod are done running part; It is characterized in that: the fine motion servomotor is installed to the fine motion bearing; The fine motion servomotor is connected through fine motion shaft coupling, bolt with leading screw; Fine motion bearing, polished rod and polished rod bearing are assembled on the grand moving worktable, and micro displacement workbench connects with bolt through fine motion slide block, fine motion feed screw nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220055219 CN202601217U (en) | 2012-02-21 | 2012-02-21 | Macro-micro positioning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220055219 CN202601217U (en) | 2012-02-21 | 2012-02-21 | Macro-micro positioning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202601217U true CN202601217U (en) | 2012-12-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220055219 Expired - Fee Related CN202601217U (en) | 2012-02-21 | 2012-02-21 | Macro-micro positioning apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN202601217U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN105071589A (en) * | 2015-08-14 | 2015-11-18 | 苏州玖典智能科技有限公司 | Rapid and accurate linear movement device |
| CN107457573A (en) * | 2017-09-19 | 2017-12-12 | 苏州迈客荣自动化技术有限公司 | A kind of precise positioning work table |
| CN107644668A (en) * | 2017-10-30 | 2018-01-30 | 苏州迈客荣自动化技术有限公司 | A kind of grand micro- workbench |
| CN113579823A (en) * | 2021-08-13 | 2021-11-02 | 珠海格力电器股份有限公司 | Machine tool feeding system and numerical control machine tool |
-
2012
- 2012-02-21 CN CN 201220055219 patent/CN202601217U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN104656682B (en) * | 2014-12-30 | 2017-07-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of grand micro- two-stage drive precision positioning mechanism |
| CN105071589A (en) * | 2015-08-14 | 2015-11-18 | 苏州玖典智能科技有限公司 | Rapid and accurate linear movement device |
| CN107457573A (en) * | 2017-09-19 | 2017-12-12 | 苏州迈客荣自动化技术有限公司 | A kind of precise positioning work table |
| CN107644668A (en) * | 2017-10-30 | 2018-01-30 | 苏州迈客荣自动化技术有限公司 | A kind of grand micro- workbench |
| CN113579823A (en) * | 2021-08-13 | 2021-11-02 | 珠海格力电器股份有限公司 | Machine tool feeding system and numerical control machine tool |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121212 Termination date: 20140221 |