CN107622786B - Two-stage piezoelectric driving micro-nano positioning platform - Google Patents
Two-stage piezoelectric driving micro-nano positioning platform Download PDFInfo
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Abstract
The invention discloses a two-stage piezoelectric driving micro-nano positioning platform, which comprises a base, a primary motion platform compliant mechanism, a secondary motion platform motion guide mechanism and a piezoelectric ceramic driver, wherein the base is provided with a base; the primary motion platform is assembled in the base through the primary motion platform compliant mechanism, and the primary motion platform compliant mechanism comprises a primary motion platform displacement amplification mechanism and a primary motion platform motion guide mechanism; the secondary motion platform is assembled in the primary motion platform through the secondary motion platform motion guide mechanism; the piezoelectric ceramic driver comprises a primary motion platform piezoelectric ceramic driver and a secondary motion platform piezoelectric ceramic driver, and the primary motion platform piezoelectric ceramic driver and the secondary motion platform piezoelectric ceramic driver respectively drive the primary motion platform and the secondary motion platform.
Description
Technical Field
The invention relates to the field of micro-nano precision positioning, in particular to a two-stage piezoelectric-driven large-stroke micro-nano positioning platform.
Background
With the rapid development of microelectronic engineering, precision machining and ultra-precision machining technologies, biomedical engineering, precision optical engineering and other scientific technologies, a micron-scale or even sub-nanometer-scale displacement resolution precision positioning system is urgently needed in various fields. The micro/nano positioning platform is a positioning device with micro/nano positioning resolution and precision, is an important component of precision technology, and has wide application prospect and important research value.
The piezoelectric ceramic driver has the advantages of high resolution, quick frequency response, no friction, no magnetic field interference, no need of lubrication and the like, and is widely applied to the micro-nano positioning technology. However, some disadvantages of the piezo-ceramic actuator also limit its further development and application. If the output displacement of the piezoelectric ceramic driver is small, a displacement amplification mechanism is required to be designed to amplify the output displacement of the piezoelectric ceramic driver so as to meet the application occasion requiring a larger positioning stroke, and the positioning stroke, the positioning precision and the positioning speed of the positioning table are mutually related and restricted. Some application occasions need the positioning system to have the ability of quick positioning or high-precision positioning and the like while having large positioning stroke, and some application occasions simultaneously have certain limitation on the space size of the positioning platform.
The continuous development of modern science and technology and industry also puts higher and higher requirements on the positioning stroke, the positioning precision and the positioning speed of the micro-nano positioning system. Therefore, the contradiction between the large stroke, the high precision and the high positioning speed of the positioning platform is solved, the positioning platform with the novel mechanism form, the large stroke, the high precision and the high positioning speed and the compact structure is developed, and the positioning platform has important theoretical significance and practical value.
SUMMERY OF THE UTILITY MODEL
The invention provides a single-degree-of-freedom large-stroke micro-nano positioning platform which is provided with a two-stage positioning structure, is driven by a piezoelectric ceramic driver and is compact in structure, and solves the problems that the conventional large-stroke micro-nano positioning platform is low in positioning speed, cannot meet the positioning precision requirement, is large in size and the like.
In order to solve the technical problem, the utility model discloses a following technical scheme: the two-stage piezoelectric driving micro-nano positioning platform comprises a base, a primary motion platform compliant mechanism, a secondary motion platform motion guide mechanism and a piezoelectric ceramic driver;
the primary motion platform is assembled in the base through the primary motion platform compliant mechanism, and the primary motion platform compliant mechanism comprises a primary motion platform displacement amplification mechanism and a primary motion platform motion guide mechanism;
the secondary motion platform is assembled in the primary motion platform through the secondary motion platform motion guide mechanism;
the piezoelectric ceramic driver comprises a primary motion platform piezoelectric ceramic driver and a secondary motion platform piezoelectric ceramic driver, and the primary motion platform piezoelectric ceramic driver and the secondary motion platform piezoelectric ceramic driver respectively drive the primary motion platform and the secondary motion platform.
Furthermore, the primary motion platform displacement amplification mechanism is a flexible eight-rod amplification mechanism, and the flexible eight-rod amplification mechanism comprises two input end arms and two output end arms; the first-stage motion platform piezoelectric ceramic driver is arranged between the two input end arms; one output end arm is connected with the base, and the other output end arm is connected with the primary motion platform.
Furthermore, the motion guide mechanism of the first-stage motion platform is a composite parallel four-bar mechanism formed by semicircular flexible hinges, is symmetrically distributed along the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform and is connected between the base and the first-stage motion platform.
Furthermore, the motion guide mechanism of the secondary motion platform consists of a plurality of groups of flexible plate springs, the flexible plate springs are symmetrically distributed along the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform, one end of each plate spring is connected with the secondary motion platform, and the other end of each plate spring is connected with the primary motion platform; the second-stage motion platform piezoelectric ceramic driver is arranged between the first-stage motion platform and the second-stage motion platform along the motion axis of the two-stage piezoelectric driving micro-nano positioning platform.
Furthermore, the first-stage motion platform piezoelectric ceramic driver arranged between the two input end arms of the first-stage motion platform displacement amplification mechanism is pre-tightened by the elastic restoring force of the hinge in the first-stage motion platform displacement amplification mechanism and the first-stage motion platform motion guide mechanism.
Furthermore, a piezoelectric ceramic driver of the secondary motion platform, which is arranged between the primary motion platform and the secondary motion platform, is pre-tightened by the elastic restoring force of a hinge in the motion guide mechanism of the secondary motion platform.
Furthermore, a through hole penetrates through the base and one side of the first-stage motion platform along the direction of the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform and is used for installing and detecting the displacement sensor of the second-stage motion platform.
Furthermore, a screw hole is processed at the upper end of the through hole in the base and used for installing a screw fixing sensor.
Furthermore, a plurality of threaded through holes are uniformly distributed on the secondary motion platform and used for fixing objects needing precise positioning.
Furthermore, a plurality of through holes are formed in the connecting part of an output end arm of the displacement amplification mechanism of the primary motion platform and the primary motion platform.
The invention has the beneficial effects that:
(1) the two-stage positioning structure enables the positioning platform to have higher positioning speed and positioning accuracy under the condition of large positioning stroke.
(2) The size of the positioning platform is effectively reduced by using the composite parallel four-bar guide mechanism formed by the flexible eight-bar amplification mechanism and the semicircular flexible hinge, and the composite parallel four-bar guide mechanism provides a larger movement stroke of the first-stage movement platform and has smaller concentrated stress.
(3) A plurality of threaded through holes are uniformly distributed on the second-stage motion platform, and a plurality of through holes of a connecting part of an output end arm of the first-stage motion platform displacement amplification mechanism and the first-stage motion platform can reduce the quality of a motion part of the two-stage piezoelectric driving micro-nano positioning platform and improve the positioning speed of the positioning platform.
(4) The first-stage motion platform piezoelectric ceramic driver and the second-stage motion platform piezoelectric ceramic driver are pre-tightened through elastic restoring force of corresponding flexible hinges in the positioning platform, an additional pre-tightening mechanism is not required to be designed and manufactured, and the structure is simple and reliable.
(5) The positioning platform can be integrally machined by linear cutting, and has the advantages of no need of assembly, no friction, no need of lubrication and the like.
(6) The whole motion platform adopts the symmetrical design, can balance structure internal stress, reduces the deformation error, reduces the influence of machining error temperature variation to the precision.
Drawings
Fig. 1 is a schematic diagram of the overall structure of an embodiment of the present invention.
Fig. 2 is a top view of fig. 1.
FIG. 3 is a cut-away view of an embodiment of the present invention after assembly of a sensor.
In the figure: 1. a base, 2, a first-level motion platform, 3, a second-level motion platform, 4, a piezoelectric ceramic driver, 41, a second-level motion platform piezoelectric ceramic driver, 42, a first-level motion platform piezoelectric ceramic driver, 5, a first-level motion platform compliant mechanism, 51, a first-level motion platform displacement amplification mechanism, 511, an input end arm of a flexible eight-rod amplification mechanism, 512, and two output end arms, 52, a first-level motion platform motion guide mechanism, 6 a second-level motion platform motion guide mechanism, 7, a positioning platform fixing hole, 8, a sensor fixing screw hole, 9, a thread through hole, 10, a quality lightening hole, 11, a capacitive sensor, 12 and a fastening screw.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1 and 2, a two-stage piezoelectric driving micro-nano positioning platform comprises a base 1, a first-stage motion platform 2, a first-stage motion platform compliant mechanism 5, a second-stage motion platform 3, a second-stage motion platform motion guide mechanism 6 and a piezoelectric ceramic driver 4;
the base 1 is provided with a plurality of positioning platform fixing holes 7 for fixing the positioning platform on a shock insulation platform;
the primary motion platform 2 is assembled in the base 1 through a primary motion platform compliant mechanism 5, and the primary motion platform compliant mechanism 5 comprises a primary motion platform displacement amplification mechanism 51 and a primary motion platform motion guide mechanism 52.
In this embodiment, the primary motion platform displacement amplification mechanism 51 is a flexible eight-rod amplification mechanism, which includes two input end arms 511 and two output end arms 512. The first-stage motion platform piezoelectric ceramic driver 42 is arranged between the two input end arms 511; one output end arm is connected with the base 1, and the other output end arm is connected with the primary motion platform 2. The primary motion platform displacement amplification mechanism 51 is used for amplifying the displacement output by the primary motion platform piezoelectric ceramic driver 42. The first-stage motion platform piezoceramic driver 42 is pre-tensioned by the elastic restoring force of the hinge in the first-stage motion platform displacement amplification mechanism 51 and the first-stage motion platform motion guide mechanism 52.
In this embodiment, the first-stage motion platform motion guide mechanism 52 is a compound parallel four-bar mechanism composed of semicircular flexible hinges, symmetrically distributed along the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform, and connected between the base and the first-stage motion platform. The primary motion platform motion guide mechanism 52 is used to provide support and guidance for the primary motion platform 2.
The connection part of one output end arm of the primary motion platform displacement amplification mechanism 51 and the primary motion platform 2 is provided with a plurality of mass lightening holes 10 which are used for lightening the mass of the motion assembly of the positioning platform and improving the positioning speed.
The secondary motion platform 3 is assembled in the primary motion platform 2 through a secondary motion platform motion guide mechanism 6.
In this embodiment, the motion guide mechanism 6 of the second-stage motion platform is composed of a plurality of groups of flexible plate springs, the flexible plate springs are symmetrically distributed along the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform, one end of each plate spring is connected with the second-stage motion platform 3, and the other end of each plate spring is connected with the first-stage motion platform 2. The secondary motion platform motion guide mechanism 6 is used for providing support and guide for the secondary motion platform 3. The second-stage motion platform piezoelectric ceramic driver 41 is arranged between the first-stage motion platform 2 and the second-stage motion platform 3 along the motion axis of the two-stage piezoelectric driving micro-nano positioning platform, and the second-stage motion platform piezoelectric ceramic driver 41 is pre-tightened through the elastic restoring force of the hinge in the second-stage motion platform motion guide mechanism 6.
A plurality of threaded through holes 9 are uniformly distributed on the secondary motion platform 3 and used for fixing objects needing precise positioning, the mass of the motion platform can be reduced, and the positioning speed is increased.
As shown in fig. 3, along the direction of the central axis of motion of the two-stage piezoelectric driving micro-nano positioning platform, a through hole passes through one side of the base 1 and one side of the first-stage motion platform 2, and is used for installing a sensor for detecting the displacement of the second-stage motion platform, which is a capacitive sensor 11 in this embodiment. A sensor fixing screw hole 8 is formed at the upper end of the through hole in the base 1, and a set screw 12 is additionally provided to fix the capacitive sensor 11 in this embodiment.
The whole motion platform adopts the symmetrical design, can balance structure internal stress, reduces the deformation error, reduces the influence of machining error temperature variation to the precision.
The output displacement of the first stage motion platform piezoceramic driver 42 is amplified by the first stage motion platform displacement amplification mechanism 51 and output through an output end arm, and the output end arm is connected with the first stage motion platform 2 to push the first stage motion platform 2 to move. The primary motion platform motion guide mechanism 52 supports and guides the motion of the primary motion platform 2. The flexible eight-rod amplification mechanism is matched with the composite parallel four-rod mechanism to realize the large-stroke linear motion of the primary motion platform 2, namely the large-stroke motion of the secondary motion platform 3 assembled in the primary motion platform 2. The second-stage motion platform piezoelectric ceramic driver 41 directly drives the second-stage motion platform 3, and the second-stage motion platform 3 can realize short-range high-speed motion under the support and the guide of the second-stage motion platform motion guide mechanism 6. The first-stage motion platform 2 and the second-stage motion platform 3 are matched in motion by using a certain control strategy, and the two-stage piezoelectric driving micro-nano positioning platform can still have higher positioning speed and positioning precision under the condition of large-stroke positioning.
The invention has the beneficial effects that:
(1) the two-stage positioning structure enables the positioning platform to have higher positioning speed and positioning accuracy under the condition of large positioning stroke.
(2) The size of the positioning platform is effectively reduced by using the composite parallel four-bar guide mechanism formed by the flexible eight-bar amplification mechanism and the semicircular flexible hinge, and the composite parallel four-bar guide mechanism provides a larger movement stroke of the first-stage movement platform and has smaller concentrated stress.
(3) A plurality of threaded through holes are uniformly distributed on the second-stage motion platform, and a plurality of through holes of a connecting part of an output end arm of the first-stage motion platform displacement amplification mechanism and the first-stage motion platform can reduce the quality of a motion part of the two-stage piezoelectric driving micro-nano positioning platform and improve the positioning speed of the positioning platform.
(4) The first-stage motion platform piezoelectric ceramic driver and the second-stage motion platform piezoelectric ceramic driver are pre-tightened through elastic restoring force of corresponding flexible hinges in the positioning platform, an additional pre-tightening mechanism is not required to be designed and manufactured, and the structure is simple and reliable.
(5) The positioning platform can be integrally machined by linear cutting, and has the advantages of no need of assembly, no friction, no need of lubrication and the like.
(6) The whole motion platform adopts the symmetrical design, can balance structure internal stress, reduces the deformation error, reduces the influence of machining error temperature variation to the precision.
Claims (8)
1. Two-stage piezoelectric driving micro-nano positioning platform is characterized in that: the device comprises a base, a primary motion platform compliant mechanism, a secondary motion platform motion guide mechanism and a piezoelectric ceramic driver;
the primary motion platform is assembled in the base through the primary motion platform compliant mechanism, and the primary motion platform compliant mechanism comprises a primary motion platform displacement amplification mechanism and a primary motion platform motion guide mechanism;
the secondary motion platform is assembled in the primary motion platform through the secondary motion platform motion guide mechanism;
the piezoelectric ceramic driver comprises a primary motion platform piezoelectric ceramic driver and a secondary motion platform piezoelectric ceramic driver, and the primary motion platform piezoelectric ceramic driver and the secondary motion platform piezoelectric ceramic driver respectively drive the primary motion platform and the secondary motion platform;
the primary motion platform displacement amplification mechanism is a flexible eight-rod amplification mechanism, and the flexible eight-rod amplification mechanism comprises two input end arms and two output end arms; the first-stage motion platform piezoelectric ceramic driver is arranged between the two input end arms; one output end arm is connected with the base, and the other output end arm is connected with the primary motion platform;
the primary motion platform motion guide mechanism is a composite parallel four-bar mechanism formed by semicircular flexible hinges, is symmetrically distributed along the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform and is connected between the base and the primary motion platform; the primary motion platform guide mechanism is used for providing support and guide for the primary motion platform.
2. The two-stage piezoelectric driving micro-nano positioning platform according to claim 1, which is characterized in that: the motion guide mechanism of the two-stage motion platform consists of a plurality of groups of flexible plate springs, the flexible plate springs are symmetrically distributed along the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform, one end of each plate spring is connected with the two-stage motion platform, and the other end of each plate spring is connected with the one-stage motion platform; the second-stage motion platform piezoelectric ceramic driver is arranged between the first-stage motion platform and the second-stage motion platform along the motion axis of the two-stage piezoelectric driving micro-nano positioning platform.
3. The two-stage piezoelectric driving micro-nano positioning platform according to claim 1, which is characterized in that: the first-stage motion platform piezoelectric ceramic driver arranged between the two input end arms of the first-stage motion platform displacement amplification mechanism is pre-tightened by the elastic restoring force of the hinge in the first-stage motion platform displacement amplification mechanism and the first-stage motion platform motion guide mechanism.
4. The two-stage piezoelectric driving micro-nano positioning platform according to claim 2, which is characterized in that: the piezoelectric ceramic driver of the secondary motion platform is installed between the primary motion platform and the secondary motion platform and is pre-tightened through the elastic restoring force of the hinge in the motion guide mechanism of the secondary motion platform.
5. The two-stage piezoelectric driving micro-nano positioning platform according to claim 1, which is characterized in that: and a through hole penetrates through the base and one side of the first-stage motion platform along the direction of the motion central axis of the two-stage piezoelectric driving micro-nano positioning platform and is used for installing and detecting the displacement sensor of the second-stage motion platform.
6. The two-stage piezoelectric driving micro-nano positioning platform according to claim 1, which is characterized in that: and a screw hole is processed at the upper end of the through hole in the base and used for installing a screw fixing sensor.
7. The two-stage piezoelectric driving micro-nano positioning platform according to claim 1, which is characterized in that: and a plurality of threaded through holes are uniformly distributed on the secondary motion platform and used for fixing objects needing precise positioning.
8. The two-stage piezoelectric driving micro-nano positioning platform according to claim 1, which is characterized in that: and a connecting part of an output end arm of the primary motion platform displacement amplification mechanism and the primary motion platform is provided with a plurality of through holes.
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| CN109140148B (en) * | 2018-09-05 | 2020-11-10 | 三英精控（天津）仪器设备有限公司 | Series piezoelectric driving nanometer positioning platform |
| CN109857062B (en) * | 2019-03-25 | 2020-04-10 | 浙江大学 | Dual-drive electro-hydraulic control type precision machining system and control method thereof |
| CN110058404A (en) * | 2019-04-26 | 2019-07-26 | 广东工业大学 | A kind of big stroke micro-nano beat platform of piezoelectric driven integral type |
| CN110189791B (en) * | 2019-05-31 | 2024-01-30 | 中国工程物理研究院机械制造工艺研究所 | Initial corner error adjustable micro-nano platform based on bidirectional pre-tightening |
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
| CN111193436B (en) * | 2020-01-08 | 2024-04-23 | 浙江师范大学 | Stepping driving device |
| CN111600505B (en) * | 2020-05-27 | 2021-11-12 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
| CN117348230A (en) * | 2023-10-25 | 2024-01-05 | 深圳市汉诺精密科技有限公司 | Multi-freedom-degree nanoscale precise positioning platform |
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| CN100376361C (en) * | 2005-01-11 | 2008-03-26 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN1716456A (en) * | 2005-04-28 | 2006-01-04 | 武汉理工大学 | Nano grade positioning precision one dimension displacement work table |
| JP5064955B2 (en) * | 2007-09-28 | 2012-10-31 | 株式会社日立ハイテクノロジーズ | Fine movement stage, fine movement actuator device, and magnetic head inspection device |
| CN101860256B (en) * | 2010-04-02 | 2012-07-04 | 大连理工大学 | High-precision adjustable-speed linear micro-displacement work table |
| CN103225728B (en) * | 2013-04-24 | 2014-12-24 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN203813694U (en) * | 2014-04-22 | 2014-09-03 | 长安大学 | Stepping type precise piezoelectric linear actuator |
| CN106847346A (en) * | 2017-03-31 | 2017-06-13 | 西安交通大学 | The big distance high frequency sound precisely locating platform of XY θ Three Degree Of Freedoms |
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