CN110415760A - High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform - Google Patents
High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform Download PDFInfo
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- CN110415760A CN110415760A CN201910674172.XA CN201910674172A CN110415760A CN 110415760 A CN110415760 A CN 110415760A CN 201910674172 A CN201910674172 A CN 201910674172A CN 110415760 A CN110415760 A CN 110415760A
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- Prior art keywords
- hinge
- triangle gridding
- piezoelectric ceramic
- support ring
- ceramic actuator
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
The invention discloses a kind of high-precision Zs based on triangle gridding hinge to single-degree-of-freedom mini positioning platform, including triangle gridding hinge support ring, pedestal and piezoelectric ceramic actuator；The triangle gridding hinge support ring includes outer ring, terminal platform at its center and the triangle gridding hinge between outer ring and terminal platform positioned at its periphery, and the triangle gridding hinge is the triangulation network grating texture being made of equilateral triangle；The outer ring is fixedly connected on the base；The piezoelectric ceramic actuator is fixedly connected in the pedestal, the tip contact of the bottom centre of the terminal platform and the piezoelectric ceramic actuator, generates Z-direction displacement by the piezoelectric ceramic actuator and the terminal platform is driven to generate Z-direction displacement.The present invention uses the triangle gridding hinge of the equilateral triangle composition designed based on geometry principle, has the characteristics that rigidity is high, symmetry is good, compact-sized, can be realized the terminal platform movement and positioning wide in the High-precision high-frequency of Z-direction.
Description
Technical field
The present invention relates to mini positioning platform, in particular to a kind of high-precision Z based on triangle gridding hinge is to single-degree-of-freedom
Mini positioning platform.
Background technique
With development in science and technology, micro & nano technology has obtained wide application.But high-precision mini positioning platform restricts always
The popularization of micro & nano technology.Currently, the Z-direction single-degree-of-freedom mini positioning platform of Low rigidity has obtained important breakthrough, still, high rigidity
High-precision Z also need to further increase to single-degree-of-freedom mini positioning platform.
Summary of the invention
The purpose of the present invention is overcoming deficiency in the prior art, a kind of high-precision Z based on triangle gridding hinge is provided
To single-degree-of-freedom mini positioning platform, which can be realized Z-direction translational degree of freedom, and rigidity is high, precision is high, intrinsic frequency
It is high.
The technical scheme adopted by the invention is that: a kind of high-precision Z based on triangle gridding hinge is micro- fixed to single-degree-of-freedom
Bit platform, comprising:
Triangle gridding hinge support ring, the triangle gridding hinge support ring include being located at the triangle gridding hinge support
The outer ring of ring periphery, positioned at the terminal platform at the triangle gridding hinge support ring center and between the outer ring and the terminal
Triangle gridding hinge between platform, the triangle gridding hinge are the triangulation network grating texture being made of equilateral triangle；
The outer ring of pedestal, the triangle gridding hinge support ring is fixedly connected on the base；And
Piezoelectric ceramic actuator, the piezoelectric ceramic actuator are fixedly connected in the pedestal, the triangle gridding hinge
The tip contact of the bottom centre of the terminal platform of chain support ring and the piezoelectric ceramic actuator, by the Piezoelectric Ceramic
Device generates Z-direction displacement and the terminal platform is driven to generate Z-direction displacement.
Further, the top of the outer ring of the triangle gridding hinge support ring is provided with gasket, the triangle gridding
The outer ring of hinge support ring and the gasket are bolted to be fixed together with the pedestal.
Further, the pedestal includes:
Bottom structure,
Arch brace structure, the arch brace structure are fixedly connected on the bottom structure, the triangle gridding hinge
The outer ring of chain support ring is fixedly connected in the arch brace structure；And
Inner supporting structure, the inner supporting structure are located in the arch brace structure, and are fixedly connected on described
The center of bottom structure, the piezoelectric ceramic actuator are installed in the inner supporting structure.
Further, the piezoelectric ceramic actuator is installed in the inner supporting structure using tools for bolts ' pretension mode.
The beneficial effects of the present invention are:
Using the triangle gridding hinge of the unique equilateral triangle composition designed based on geometry principle, there is rigidity pole
The feature high, symmetry is good, compact-sized, can be realized the terminal platform movement and positioning wide in Z-direction High-precision high-frequency,
It is unique in that triangle gridding hinge has high longitudinal rigidity；
Triangle gridding hinge support ring uses thicker outer ring, keeps its fixation relatively reliable；
Triangle gridding hinge support ring top is equipped with gasket, keeps bolt pretightening distribution more uniform；
Piezoelectric ceramic actuator is mounted in the inner supporting structure of pedestal using tools for bolts ' pretension mode, it is ensured that it is solid
Fixed reliability.
Detailed description of the invention
Fig. 1 is forward sight structure chart of the invention；
Fig. 2 is overlooking structure figure of the invention；
Fig. 3 is three-dimensional structure diagram of the invention；
Fig. 4 is detonation configuration figure of the invention；
Fig. 5 a is the overlooking structure diagram of triangle gridding hinge support ring of the invention；
Fig. 5 b is the A-A the schematic diagram of the section structure in Fig. 5 a；
Fig. 6 a is the forward sight structural schematic diagram of pedestal of the invention；
Fig. 6 b is the overlooking structure diagram of pedestal of the invention；
Fig. 7 a is the overlooking structure diagram of gasket of the invention；
Fig. 7 b is the forward sight structural schematic diagram of gasket of the invention.
Attached drawing mark: 1, triangle gridding hinge support ring, 11, outer ring, 12, terminal platform, 13, triangle gridding hinge, 2,
Pedestal, 21, bottom structure, 22, arch brace structure, 23, inner supporting structure, 3, gasket, 4, piezoelectric ceramic actuator.
Specific embodiment
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and cooperate attached drawing
Detailed description are as follows:
As shown in attached drawing 1 to Fig. 7 b, a kind of high-precision Z based on triangle gridding hinge to single-degree-of-freedom mini positioning platform,
Including triangle gridding hinge support ring 1, pedestal 2, gasket 3 and piezoelectric ceramic actuator 4.
The triangle gridding hinge support ring 1 include the thicker outer ring 11 in periphery, intermediate thicker terminal platform 12, between
Relatively thin triangle gridding hinge 13 between the outer ring 11 and the terminal platform 12.The bottom centre of the terminal platform 12
With the tip contact of the piezoelectric ceramic actuator 4.The outer ring 11 is set there are six circumferentially uniformly distributed through-hole.The triangle gridding
Hinge support ring 1 has the triangulation network grating texture of the unique equilateral triangle composition designed based on geometry principle.
The pedestal 2 includes bottom structure 21, arch brace structure 22 and inner supporting structure 23, the arch brace knot
Structure 22 is fixedly connected on the bottom structure 21, and the inner supporting structure 23 is located in the arch brace structure 22, and
It is fixedly connected on the center of the bottom structure 21.The arch brace structure 22 is set there are six circumferentially uniformly distributed tapped through hole,
21 periphery of bottom structure is set there are four circumferentially uniformly distributed through-hole, and 21 center of bottom structure is equipped with a threaded hole.
The top of the outer ring 11 of the triangle gridding hinge support ring 1 is provided with gasket 3, the triangle gridding hinge branch
The outer ring 11 and the gasket 3 of pushing out ring 1 are bolted to be fixed together with the arch brace structure 22 of the pedestal 2.
The piezoelectric ceramic actuator 4 is installed in the inner supporting structure 23 of the pedestal 2 using tools for bolts ' pretension mode.
The operation principle of the present invention is that:
The pre- making alive of piezoelectric ceramic actuator 4 is given first, and piezoelectric ceramic actuator 4 is made to generate Z-direction displacement.It is pressed by changing
Voltage on electroceramics driver 4 makes piezoelectric ceramic actuator 4 generate Z-direction displacement, when voltage increases, Piezoelectric Ceramic
Device 4 generates Z-direction elongation displacement；When voltage reduces, piezoelectric ceramic actuator 4 generates Z-direction and shrinks displacement.Piezoelectric ceramic actuator 4
The Z-direction of generation is displaced the terminal platform 12 being directly passed on the triangle gridding hinge support ring 1 being in contact with it, triangle gridding hinge
Chain 13 generates Z-direction deformation, so that terminal platform 12 be made to generate Z-direction displacement.
The invention reside in the triangle gridding hinge 13 formed using unique equilateral triangle design based on geometry principle,
Have the characteristics that rigidity is high, symmetry is good, compact-sized, the High-precision high-frequency that can be realized terminal platform in Z-direction is wide
Movement and positioning.
Although the preferred embodiment of the present invention is described above in conjunction with attached drawing, the invention is not limited to upper
The specific embodiment stated, the above mentioned embodiment is only schematical, be not it is restrictive, this field it is common
Technical staff under the inspiration of the present invention, without breaking away from the scope protected by the purposes and claims of the present invention, may be used also
By make it is many in the form of, within these are all belonged to the scope of protection of the present invention.
Claims (4)
1. a kind of high-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform characterized by comprising
Triangle gridding hinge support ring (1), the triangle gridding hinge support ring (1) include being located at the triangle gridding hinge branch
The outer ring (11) of pushing out ring (1) periphery, be located at triangle gridding hinge support ring (1) center terminal platform (12) and between institute
The triangle gridding hinge (13) between outer ring (11) and the terminal platform (12) is stated, the triangle gridding hinge (13) is by just
Triangle sets at triangulation network grating texture；
The outer ring (11) of pedestal (2), the triangle gridding hinge support ring (1) is fixedly connected on the pedestal (2)；And
Piezoelectric ceramic actuator (4), the piezoelectric ceramic actuator (4) are fixedly connected in the pedestal (2), the triangulation network
The bottom centre of the terminal platform (12) of lattice hinge support ring (1) and the tip contact of the piezoelectric ceramic actuator (4), by institute
It states piezoelectric ceramic actuator (4) and generates Z-direction displacement drive terminal platform (12) the generation Z-direction displacement.
2. a kind of high-precision Z based on triangle gridding hinge according to claim 1 is to single-degree-of-freedom mini positioning platform,
It is characterized in that, the top of the outer ring (11) of the triangle gridding hinge support ring (1) is provided with gasket (3), the triangulation network
The outer ring (11) and the gasket (3) of lattice hinge support ring (1) are bolted to be fixed together with the pedestal (2).
3. a kind of high-precision Z based on triangle gridding hinge according to claim 1 is to single-degree-of-freedom mini positioning platform,
It is characterized in that, the pedestal (2) includes:
Bottom structure (21),
Arch brace structure (22), the arch brace structure (22) are fixedly connected on the bottom structure (21), and described three
The outer ring (11) of angle grid hinge support ring (1) is fixedly connected on the arch brace structure (22)；And
Inner supporting structure (23), the inner supporting structure (23) are located in the arch brace structure (22), and fixed company
The center in the bottom structure (21) is connect, the piezoelectric ceramic actuator (4) is installed in the inner supporting structure (23).
4. a kind of high-precision Z based on triangle gridding hinge according to claim 3 is to single-degree-of-freedom mini positioning platform,
It is characterized in that, the piezoelectric ceramic actuator (4) is installed in the inner supporting structure (23) using tools for bolts ' pretension mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910674172.XA CN110415760A (en) | 2019-07-25 | 2019-07-25 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910674172.XA CN110415760A (en) | 2019-07-25 | 2019-07-25 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
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| Publication Number | Publication Date |
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| CN110415760A true CN110415760A (en) | 2019-11-05 |
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| CN201910674172.XA Pending CN110415760A (en) | 2019-07-25 | 2019-07-25 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
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Application publication date: 20191105 |