CN102682857A - Device for changing route range of jogged positioning platform - Google Patents
Device for changing route range of jogged positioning platform Download PDFInfo
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- CN102682857A CN102682857A CN2012101475812A CN201210147581A CN102682857A CN 102682857 A CN102682857 A CN 102682857A CN 2012101475812 A CN2012101475812 A CN 2012101475812A CN 201210147581 A CN201210147581 A CN 201210147581A CN 102682857 A CN102682857 A CN 102682857A
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Abstract
The invention discloses a device for changing a route range of a jogged positioning platform. The device is composed of a base, a variable magnification time lever, a composite parallel four-rod guiding mechanism and a movable platform. Two parallel grooves are arranged below the base and two piezoelectric ceramic drivers are respectively placed in the respective grooves; the variable magnification time lever is downwards arranged in the middle of the base; and output hinges arranged at the upper part of the variable magnification time lever are hinged with the middle parts of two parallel flexible hinge parts and respectively enable two input hinges of the lower part of the variable magnification time lever to be contacted with the two piezoelectric ceramic drivers through a pre-fastening screw. The variable magnification time lever is provided with a fixed hinge to be connected with the base; and the two input hinges can independently receive input displacements of the piezoelectric ceramic drivers to transmit the amplified displacements to the movable platform, and an output displacement of the platform has two route ranges, so that a composite route range function with a small route and a high precision or low precision requirements and greater route requirements are realized.
Description
Technical field
The present invention relates to positioning device for microscopic motion, particularly a kind of micro-positioning platform changes the device of travel range.
Background technology
Along with development of science and technology, all press for submicron order even nano level precision positioning technology in fields such as ultraprecise processing, microelectronic engineering, bioengineering, nanometer technologies.Existing micro-positioning platform all only has a kind of displacement output area of stroke, when stroke is big, is difficult to obtain higher output displacement accuracy; In order to obtain higher micro-positioning platform output displacement accuracy, the output displacement stroke of locating platform is often less.
Summary of the invention
The purpose of this invention is to provide the device that a kind of micro-positioning platform changes travel range.
The technical solution adopted for the present invention to solve the technical problems is:
The present invention includes pedestal, become enlargement factor lever, compound parallel four-bar guiding mechanism and motion platform; Motion platform is installed in the pedestal middle part; Second group of two parallel flexible hinge of compound parallel four-bar guiding mechanism; The 4th group of two parallel flexible hinges, the 5th group two parallel flexibility hinges and the 8th group of two parallel flexible hinge be distributed in motion platform around; Wherein:
1) end of first group of two flexible hinge is hinged with the two ends on pedestal first limit respectively; The other end of first group of two flexible hinge is hinged with an end of second group of two parallel flexible hinge respectively, and the other end of second group of two parallel flexible hinge is hinged with first limit of motion platform respectively;
2) end of the 3rd group of two flexible hinges is hinged with the two ends on pedestal second limit respectively; The other end of the 3rd group of two flexible hinges is hinged with an end of second group of two parallel flexible hinge respectively, and the other end of second group of two parallel flexible hinge is hinged with second limit of motion platform respectively;
3) end of the 6th group of two flexible hinges is hinged with the two ends on pedestal the 3rd limit respectively; The other end of the 6th group of two flexible hinges is hinged with an end of the 5th group of two parallel flexible hinges respectively, and the other end of the 5th group of two parallel flexible hinges is hinged with the 3rd limit of motion platform respectively;
4) end of the 7th group of two flexible hinges is hinged with the two ends on pedestal the 4th limit respectively; The other end of the 7th group of two flexible hinges is hinged with an end of the 8th group of two parallel flexible hinges respectively, and the other end of the 8th group of two parallel flexible hinges is hinged with the 4th limit of motion platform respectively;
Pedestal the 3rd limit one side-lower also has and the 6th group of two grooves that two flexible hinges are parallel; II piezoelectric ceramic actuator and I piezoelectric ceramic actuator place groove separately respectively; Change enlargement factor lever is set downwards at middle part, pedestal second limit; The output hinge flexible hinge middle part parallel with second group two that becomes enlargement factor lever top is hinged, and the spring pretension screw of tightening through the side contacts one group two input hinges that become enlargement factor lever bottom respectively with II piezoelectric ceramic actuator and I piezoelectric ceramic actuator respectively.
The input hinge place that described I drives piezoelectric ceramic actuator produces displacement Y1; The output hinge place that becomes the enlargement factor lever produces displacement Y; This moment lever enlargement factor K=Y/Y1=L/L1; In the formula: L is for exporting the distance that is hinged to fixed hinge, and L1 is hinged to the distance of fixed hinge for input; When the input hinge place that only drives the II piezoelectric ceramic actuator produces displacement Y2; The output hinge place that becomes the enlargement factor lever produces displacement Y; This moment lever enlargement factor K=Y/Y2=L/L2, in the formula: L is hinged to the distance of fixed hinge for output, L2 is hinged to the distance of fixed hinge for input; Through driving the enlargement factor that two piezoelectric ceramic actuators change lever, make micro-positioning platform have different displacement delivery strokes thus.
The fixed hinge of described change enlargement factor lever, one group two the input hinges and output hinge be circular-arc flexible hinge; First group of two flexible hinge of compound parallel four-bar guiding mechanism; Second group of two flexible hinge; The 3rd group of two flexible hinges, the 4th group of two flexible hinges, the 5th group of two flexible hinges; The 6th group of two flexible hinges, the 7th group of two flexible hinges and the 8th group of two flexible hinges are lobate flexible hinge.
The beneficial effect that the present invention has is:
Comprise two input hinges owing to become the enlargement factor lever, drive near lever fixed hinge piezoelectric ceramic actuator that this moment, lever had bigger enlargement factor, the output displacement at output hinge place is bigger, and micro-positioning platform has bigger output displacement stroke; Driving is near lever output hinge piezoelectric ceramic actuator, and this moment, lever had less enlargement factor, and the output displacement at output hinge place is less.Through driving the purpose that different piezoelectric ceramic actuators reaches the enlargement factor that changes lever, make micro-positioning platform have different output displacement stroke.When requiring micro-positioning platform to have bigger output displacement, and when not high, can select big displacement delivery stroke to accuracy requirement; When requiring micromotion platform to have higher displacement output accuracy, and the output displacement can be selected less displacement delivery stroke when less.
Description of drawings
Fig. 1 is a whole mechanism principle figure of the present invention.
Fig. 2 becomes enlargement factor leverage schematic diagram.
Among the figure: 1-1, first group of two flexible hinge of 1-2-, 2-1, second group of two parallel flexible hinge of 2-2-, 3-1, the 3rd group of two flexible hinges of 3-2-; The 9-pedestal, 4-1, the 4th group of two parallel flexible hinges of 4-2-, 10-exports hinge, and 11-becomes the enlargement factor lever; 5-1, the 5th group of two parallel flexible hinges of 5-2-, 12-1, one group of input of 12-2-hinge, 13-fixed hinge; I, the II-piezoelectric ceramic actuator, 14-1,14-2-spring pretension screw, 6-1, the 6th group of two flexible hinges of 6-2-; 7-1, the 7th group of two flexible hinges of 7-2-, 8-1, the 8th group of two parallel flexible hinges of 8-2-, 15-motion platform.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is further specified:
As shown in Figure 1, the present invention includes pedestal 9, become enlargement factor lever 11, compound parallel four-bar guiding mechanism and motion platform 15; Motion platform 15 is installed in pedestal 9 middle parts; Second group two parallel flexible hinge 2-1,2-2 of compound parallel four-bar guiding mechanism; The 4th group two parallel flexible hinge 4-1,4-2, the 5th group two parallel flexibility hinge 5-1,5-2 and the 8th group two parallel flexible hinge 8-1,8-2 be distributed in motion platform around; Wherein:
1) end of first group of two flexible hinge 1-1,1-2 is hinged with the two ends on pedestal 9 first limits respectively; The other end of first group of two flexible hinge 1-1,1-2 is hinged with the end of second group two parallel flexible hinge 2-1,2-2 respectively, and the other end of second group two parallel flexible hinge 2-1,2-2 is hinged with first limit of motion platform (15) respectively;
2) end of the 3rd group of two flexible hinge 3-1,3-2 is hinged with the two ends on pedestal 9 second limits respectively; The other end of the 3rd group of two flexible hinge 3-1,3-2 is hinged with the end of second group two parallel flexible hinge 4-1,4-2 respectively, and the other end of second group two parallel flexible hinge 4-1,4-2 is hinged with second limit of motion platform 15 respectively;
3) end of the 6th group of two flexible hinge 6-1,6-2 is hinged with the two ends on pedestal 9 the 3rd limit respectively; The other end of the 6th group of two flexible hinge 6-1,6-2 is hinged with the end of the 5th group two parallel flexible hinge 5-1,5-2 respectively, and the other end of the 5th group two parallel flexible hinge 5-1,5-2 is hinged with the 3rd limit of motion platform (15) respectively;
4) end of the 7th group of two flexible hinge 7-1,7-2 is hinged with the two ends on pedestal 9 the 4th limit respectively; The other end of the 7th group of two flexible hinge 7-1,7-2 is hinged with the end of the 8th group two parallel flexible hinge 8-1,8-2 respectively, and the other end of the 8th group two parallel flexible hinge 8-1,8-2 is hinged with the 4th limit of motion platform 15 respectively;
The fixed hinge 13 of described change enlargement factor lever, one group two input hinge 12-1,12-2 and output hinges 10 are circular-arc flexible hinge; First group of two flexible hinge 1-1 of compound parallel four-bar guiding mechanism, 1-2; Second group of two flexible hinge 2-1,2-2; The 3rd group of two flexible hinge 3-1,3-2, the 4th group of two flexible hinge 4-1,4-2, the 5th group of two flexible hinge 5-1,5-2; The 6th group of two flexible hinge 6-1,6-2, the 7th group of two flexible hinge 7-1,7-2 and the 8th group of two flexible hinge 8-1,8-2 are lobate flexible hinge.
Like Fig. 1, shown in Figure 2, the I piezoelectric ceramic actuator is positioned in the groove of pedestal, makes the I piezoelectric ceramic actuator abut against amplification lever input hinge 12-2 place through tightening spring pretension screw 14-1.The II piezoelectric ceramic actuator is parallel in another groove that the I piezoelectric ceramic actuator is positioned over pedestal, the II piezoelectric ceramic actuator is abutted against amplify lever input hinge 12-1 place through tightening spring pretension screw 14-2.The input hinge 12-2 place that described I drives piezoelectric ceramic actuator produces displacement Y1; Output hinge 10 places that become the enlargement factor lever produce displacement Y; This moment lever enlargement factor K=Y/Y1=L/L1; In the formula: L is the distance of output hinge 10 to fixed hinge 13, and L1 is the distance of input hinge 12-2 to fixed hinge 13; Drive the input hinge 12-1 place generation displacement Y2 of piezoelectric ceramic actuator when II only; Output hinge 10 places that become the enlargement factor lever produce displacement Y; This moment lever enlargement factor K=Y/Y2=L/L2; In the formula: L is the distance of output hinge 10 to fixed hinge 13, and L2 is the distance of input hinge 12-1 to fixed hinge 13; Through driving the enlargement factor that two piezoelectric ceramic actuators change lever, make micro-positioning platform have different displacement delivery strokes thus.
Claims (3)
1. the device of a micro-positioning platform change travel range comprises pedestal (9), becomes enlargement factor lever (11), compound parallel four-bar guiding mechanism and motion platform (15); Motion platform (15) is installed in pedestal (9) middle part; Second group of two parallel flexible hinge (2-1,2-2) of compound parallel four-bar guiding mechanism; The 4th group of two parallel flexible hinges (4-1,4-2), the 5th group two parallel flexibility hinges (5-1,5-2) and the 8th group of two parallel flexible hinges (8-1,8-2) be distributed in motion platform around; Wherein:
1) end of first group of two flexible hinge (1-1,1-2) is hinged with the two ends on pedestal (9) first limits respectively; The other end of first group of two flexible hinge (1-1,1-2) is hinged with an end of second group of two parallel flexible hinge (2-1,2-2) respectively, and the other end of second group of two parallel flexible hinge (2-1,2-2) is hinged with first limit of motion platform (15) respectively;
2) end of the 3rd group of two flexible hinges (3-1,3-2) is hinged with the two ends on pedestal (9) second limits respectively; The other end of the 3rd group of two flexible hinges (3-1,3-2) is hinged with an end of second group of two parallel flexible hinge (4-1,4-2) respectively, and the other end of second group of two parallel flexible hinge (4-1,4-2) is hinged with second limit of motion platform (15) respectively;
3) end of the 6th group of two flexible hinges (6-1,6-2) is hinged with the two ends on pedestal (9) the 3rd limit respectively; The other end of the 6th group of two flexible hinges (6-1,6-2) is hinged with an end of the 5th group of two parallel flexible hinges (5-1,5-2) respectively, and the other end of the 5th group of two parallel flexible hinges (5-1,5-2) is hinged with the 3rd limit of motion platform (15) respectively;
4) end of the 7th group of two flexible hinges (7-1,7-2) is hinged with the two ends on pedestal (9) the 4th limit respectively; The other end of the 7th group of two flexible hinges (7-1,7-2) is hinged with an end of the 8th group of two parallel flexible hinges (8-1,8-2) respectively, and the other end of the 8th group of two parallel flexible hinges (8-1,8-2) is hinged with the 4th limit of motion platform (15) respectively; It is characterized in that:
Pedestal (9) the 3rd limit one side-lower also has two grooves parallel with the 6th group of two flexible hinges (6-1,6-2); II piezoelectric ceramic actuator and I piezoelectric ceramic actuator place groove separately respectively; At middle part, pedestal (9) second limits change enlargement factor lever (11) is set downwards; The output hinge (13) that becomes enlargement factor lever (11) top is hinged with second group of two parallel flexible hinge (4-1,4-2) middle part, and the spring pretension screw (14-1,14-2) of tightening through the side contacts one group two the input hinges (12-1,12-2) that become enlargement factor lever (11) bottom respectively with II piezoelectric ceramic actuator and I piezoelectric ceramic actuator respectively.
2. a kind of micro-positioning platform according to claim 1 changes the device of travel range; It is characterized in that: described I drives piezoelectric ceramic actuator; Input hinge (12-2) locates to produce displacement Y1, and the output hinge (10) that becomes the enlargement factor lever locates to produce displacement Y, at this moment the enlargement factor K=Y/Y1=L/L1 of lever; In the formula: L is the distance of output hinge (10) to fixed hinge (13), and L1 is the distance of input hinge (12-2) to fixed hinge (13); Described II piezoelectric ceramic actuator; Input hinge 12-1 place produces displacement Y2; The output hinge (10) that becomes the enlargement factor lever locates to produce displacement Y; This moment lever enlargement factor K=Y/Y2=L/L2, in the formula: L is output hinge (10) to the distance of fixed hinge (13), L2 is the distance of input hinge (12-1) to fixed hinge (13); Through driving the enlargement factor that two piezoelectric ceramic actuators change lever, make micro-positioning platform have different displacement delivery strokes thus.
3. a kind of micro-positioning platform according to claim 1 changes the device of travel range, it is characterized in that: the fixed hinge (13) of described change enlargement factor lever, one group two input hinges (12-1,12-2) and export hinge (10) and be circular-arc flexible hinge; First group of two flexible hinge (1-1,1-2) of compound parallel four-bar guiding mechanism; Second group of two flexible hinge (2-1,2-2); The 3rd group of two flexible hinges (3-1,3-2), the 4th group of two flexible hinges (4-1,4-2), the 5th group of two flexible hinges (5-1,5-2); The 6th group of two flexible hinges (6-1,6-2), the 7th group of two flexible hinges (7-1,7-2) and the 8th group of two flexible hinges (8-1,8-2) are lobate flexible hinge.
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| CN 201210147581 CN102682857B (en) | 2012-05-14 | 2012-05-14 | Device for changing route range of jogged positioning platform |
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| CN 201210147581 CN102682857B (en) | 2012-05-14 | 2012-05-14 | Device for changing route range of jogged positioning platform |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103137216A (en) * | 2013-01-30 | 2013-06-05 | 西安交通大学 | Double-axis flexible binding structure for micro-angle displacement platform |
| CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
| CN103912573A (en) * | 2014-03-27 | 2014-07-09 | 广东工业大学 | Replaceable inlaid-type flexible hinge fixing structure |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN105666225A (en) * | 2016-04-22 | 2016-06-15 | 清华大学 | Ultra-precise low-speed ball screw linear feeding device |
| CN106251910A (en) * | 2016-08-24 | 2016-12-21 | 广东工业大学 | One receives mini positioning platform |
| CN107621222A (en) * | 2017-09-26 | 2018-01-23 | 上海市计量测试技术研究院 | Vibrating string extensometer calibrating installation |
| CN109650327A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of plate type three-dimensional large-stroke nanometer operating platform |
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
| CN112959298A (en) * | 2021-02-03 | 2021-06-15 | 宁波大学 | Large-stroke five-degree-of-freedom nanometer manipulator |
| CN113659867A (en) * | 2021-08-17 | 2021-11-16 | 中国民航大学 | Probe micro-feeding platform comprising three-stage displacement amplification mechanism and working method |
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| US20050184623A1 (en) * | 2004-02-20 | 2005-08-25 | Zyvex Corporation | Positioning device for microscopic motion |
| CN101887761A (en) * | 2010-06-29 | 2010-11-17 | 浙江大学 | Two-degree-of-freedom micro-positioning platform |
| CN202662295U (en) * | 2012-05-14 | 2013-01-09 | 浙江大学 | Device for changing route range of micro-positioning stage |
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Patent Citations (3)
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| US20050184623A1 (en) * | 2004-02-20 | 2005-08-25 | Zyvex Corporation | Positioning device for microscopic motion |
| CN101887761A (en) * | 2010-06-29 | 2010-11-17 | 浙江大学 | Two-degree-of-freedom micro-positioning platform |
| CN202662295U (en) * | 2012-05-14 | 2013-01-09 | 浙江大学 | Device for changing route range of micro-positioning stage |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103137216B (en) * | 2013-01-30 | 2014-07-02 | 西安交通大学 | Double-axis flexible binding structure for micro-angle displacement platform |
| CN103137216A (en) * | 2013-01-30 | 2013-06-05 | 西安交通大学 | Double-axis flexible binding structure for micro-angle displacement platform |
| CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
| CN103295651B (en) * | 2013-05-10 | 2016-01-20 | 上海大学 | Based on the Piezoelectric Driving Inchworm type positioning table of flexible amplification principle |
| CN103912573A (en) * | 2014-03-27 | 2014-07-09 | 广东工业大学 | Replaceable inlaid-type flexible hinge fixing structure |
| CN103912573B (en) * | 2014-03-27 | 2016-03-23 | 广东工业大学 | Removable inserted flexible hinge fixed structure |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN103990998B (en) * | 2014-05-20 | 2017-01-25 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN105666225B (en) * | 2016-04-22 | 2018-02-16 | 清华大学 | A kind of ultraprecise low speed ball-screw straight-line feed device |
| CN105666225A (en) * | 2016-04-22 | 2016-06-15 | 清华大学 | Ultra-precise low-speed ball screw linear feeding device |
| CN106251910A (en) * | 2016-08-24 | 2016-12-21 | 广东工业大学 | One receives mini positioning platform |
| CN106251910B (en) * | 2016-08-24 | 2019-11-08 | 广东工业大学 | One kind receives mini positioning platform |
| CN107621222A (en) * | 2017-09-26 | 2018-01-23 | 上海市计量测试技术研究院 | Vibrating string extensometer calibrating installation |
| CN107621222B (en) * | 2017-09-26 | 2023-11-03 | 上海市计量测试技术研究院 | Vibrating wire type strain gauge calibrating device |
| CN109650327A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of plate type three-dimensional large-stroke nanometer operating platform |
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
| CN112959298A (en) * | 2021-02-03 | 2021-06-15 | 宁波大学 | Large-stroke five-degree-of-freedom nanometer manipulator |
| CN112959298B (en) * | 2021-02-03 | 2022-04-26 | 宁波大学 | Large-stroke five-degree-of-freedom nanometer manipulator |
| CN113659867A (en) * | 2021-08-17 | 2021-11-16 | 中国民航大学 | Probe micro-feeding platform comprising three-stage displacement amplification mechanism and working method |
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