CN101862966A - Two-degree of freedom translation parallel decoupling micromotion platform - Google Patents

Two-degree of freedom translation parallel decoupling micromotion platform Download PDF

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CN101862966A
CN101862966A CN 201010216326 CN201010216326A CN101862966A CN 101862966 A CN101862966 A CN 101862966A CN 201010216326 CN201010216326 CN 201010216326 CN 201010216326 A CN201010216326 A CN 201010216326A CN 101862966 A CN101862966 A CN 101862966A
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platform
hinge
intermediate
branched
drive
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CN 201010216326
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CN101862966B (en )
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朱利民
李朋志
谷国迎
赖磊捷
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上海交通大学
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Abstract

The invention relates to a two-degree of freedom translation parallel decoupling micromotion platform in the technical field of micro electro mechanical systems. The micromotion platform comprises a piezoelectric ceramic driver, two driving branch chains and corresponding auxiliary branch chains thereof, a working platform and a fixed stand, wherein the two driving branch chains and the corresponding auxiliary branch chains thereof are respectively symmetrically distributed in the X direction and the Y direction of the working platform pairwise. The invention achieves the functions of eliminating coupling and parasitic displacement and realizes the two-dimension movement of the motion platform by the decoupling function and the rigidity characteristic of a compound double-parallel straight panel hinge and the symmetrical characteristic of the whole structure of the platform.

Description

二自由度平动并联解耦微动平台 Two degrees of freedom parallel translational jog internet Decoupled

技术领域 FIELD

[0001] 本发明涉及的是一种微机电系统技术领域的装置,具体是一种基于压电陶瓷驱动器和柔性铰链的二自由度平动并联解耦微动平台。 [0001] The present invention relates to a device in the field of micro-electromechanical systems technology, in particular based on two translational DOF parallel Decoupled micro piezoelectric actuator platform and a flexible hinge.

背景技术 Background technique

[0002] 在微机电系统、扫描探测显微镜、超精密加工、光学元件制造以及生物医学工程等领域中,具有纳米精度的微动平台是核心部件。 [0002] In the micro-electromechanical system, the scanning probe microscope, ultra-precision machining, the optical element manufacturing and biomedical engineering field, with nanometer precision micro platform is the core component. 目前,大多数采用具有压电陶瓷驱动器的柔性铰链运动工作台。 Currently, in most cases, the table having a flexible hinge motion of the piezoelectric actuator. 而目前,商业上常用的二自由度微动平台大多采用两个一维的运动平台垂直叠加在一起或者以串联的方式将某一方向的运动平台嵌套在另外一个方向平台内, 实现二维运动。 At present, the commonly used commercial two-DOF micro platform they use a two-dimensional movement of the platform or vertically stacked together in series to the direction of movement of a platform nested within the other direction platform, the two-dimensional motion. 但是采用这种连接方式的二维微动平台会因为叠加而产生累积误差、寄生位移、固有频率降低、两个运动方向动态特性不同并且体积庞大等缺点。 With this connection, however a two-dimensional micro internet because superposition cumulative error, the parasitic displacement, the natural frequency is lowered, the dynamic characteristics of the two different direction of movement and bulky disadvantages. 因此,为克服以上缺点,发明具有高精度、低惯量、高固有频率、二自由度结构对称、输入输出解耦和小体积的二维微动平台对于实际应用具有较大的意义。 Therefore, to overcome the above disadvantages, the invention has a high precision, low inertia, high natural frequency, two degree of freedom symmetrical structure, input and output decoupling small two-dimensional fine movement table has a large significance for practical use.

[0003] 经过对现有技术文献的检索发现,中国专利申请号200510023219. 4,公开号CN1644329A,名称为“微型二维解耦工作台”的专利申请,公开了一种微型二维解耦工作台。 [0003] After retrieval of the prior art documents found Chinese Patent Application No. 200510023219.4, Publication No. CN1644329A, entitled "Micro-dimensional decoupling stage" patent application, discloses a miniature two-dimensional work decoupled station. 但该技术中,构型比较复杂,加工成本比较高。 However, this technique, the configuration is complex, relatively high processing costs. 中国专利申请号200810636287. 2,公开号CN101413902A,名称为“一种扫描电镜原位观察的全柔性三平移混联微动装置”的专利申请,其中的二自由度部分给出了一种二自由度全柔性平面并联机构。 Chinese Patent Application No. 200810636287.2, Publication No. CN101413902A, entitled "Flexible three full translational A scanning electron microscope observation situ hybrid micro device" patent application, wherein the two degree of freedom presents a section consisting of two full of flexible planar parallel mechanism. 但该技术中,如果当只驱动某一个自由度上的驱动器时,另外一个自由度上的驱动器需要承受较大的弯矩和侧向力,容易造成驱动器的损坏,即不能很好的实现压电驱动器的输入解耦。 However, this technique, if only when driving on a certain degree of freedom, the other degrees of freedom needed on the drive to withstand large bending moments and lateral forces likely to cause damage to the drive, i.e., pressure can not achieve good decoupling the input electric drive. 中国专利申请号200710114743. 1,公开号CN101176995A,名称为“一种具有冗余支链的二平动微动平台”的专利申请,提供了一种具有冗余支链的二平动微动平台。 Chinese Patent Application No. 200710114743.1, Publication No. CN101176995A, patent application entitled "having two translational jog redundant branched internet", there is provided two flat jog redundancy platform having a branched chain. 但该技术中采用的单平行四杆机构运动时具有耦合位移,不能实现二维运动的完全解耦。 However, coupled with complete decoupling displacement can not be achieved when the two-dimensional motion of a single parallelogram linkage mechanism motion employed in the art.

发明内容 SUMMARY

[0004] 本发明针对现有技术存在的上述不足,提供一种二自由度平动并联解耦微动平台,依靠复合双平行直板铰链的解耦功能、刚度特性以及平台整体结构的对称性,从而达到消除耦合和寄生位移的功能,实现运动平台的二维运动。 [0004] The present invention addresses the above shortcomings of the prior art, provides a translational DOF two parallel Decoupled micro platform, relying functional complex decoupling of two parallel straight hinge, as well as the symmetry of the stiffness characteristics of the overall structure of the platform, so as to eliminate the parasitic coupling and displacement functions to achieve the two-dimensional movement of the moving platform.

[0005] 本发明是通过以下技术方案实现的,本发明包括:压电陶瓷驱动器、两个驱动支链及其对应的辅助支链、工作平台以及固定机架,其中:两个驱动支链及其对应的辅助支链分别两两对称分布在工作平台的X方向和Y方向。 [0005] The present invention is achieved by the following technical solution, the present invention comprises: a piezoelectric ceramic actuator, and the corresponding branched chain driving two auxiliary branch, the working platform and the fixed frame, wherein: two drive branches and corresponding auxiliary chains are branched symmetrically twenty-two X direction and the Y direction of the working platform.

[0006] 所述的驱动支链包括:输入解耦平台、驱动支链中间平台、一级驱动铰链中间平台、二级驱动铰链中间平台和柔性铰链,其中:输入解耦平台与驱动支链中间平台通过柔性铰链活动连接,一级驱动铰链中间平台分别与驱动支链中间平台和固定机架通过柔性铰链活动连接,二级驱动铰链中间平台分别与工作平台和驱动支链中间平台通过柔性铰链活动连接。 [0006] The branched chain drive comprising: an input decoupling platform, an intermediate platform branched chain drive, a hinge intermediate the drive platform, the secondary drive platform and a hinge intermediate flexible hinge, wherein: the driving input decoupling internet branched intermediate internet by a flexible living hinge connection, a driving hinge intermediate platforms are flexible hinge movably connected with the driving branched intermediate platform and the fixed frame by two driving hinge intermediate platform respectively working platforms and driven branched intermediate platform by a flexible living hinge connection. [0007] 所述的辅助支链包括:辅助支链中间平台、一级辅助铰链中间平台、二级辅助铰链中间平台和柔性铰链,其中:一级辅助铰链中间平台分别与辅助支链中间平台和固定机架通过柔性铰链活动连接,二级辅助铰链中间平台分别与工作平台和辅助支链中间平台通过柔性铰链活动连接。 Auxiliary branched [0007] comprises: an auxiliary branched intermediary platform, an auxiliary hinge intermediary platform, two auxiliary hinge intermediate the platform and the flexible hinges, wherein: an auxiliary hinge intermediate platform respective subsidiary branched intermediate platform and fixed frame by a flexible living hinge connection, two auxiliary hinges are connected to the intermediate platform and the work platform branched auxiliary intermediary platform by a flexible living hinge.

[0008] 所述的压电陶瓷驱动器的头部与驱动支链内的输入解耦平台相接触并施加力于输入解耦平台,压电陶瓷驱动器的底部与固定机架固定连接。 [0008] The piezoelectric ceramic actuator head in contact with the platform in the drive input decoupling branched and decoupling a force is applied to the input platform, the bottom of the piezoelectric actuator is fixedly connected to the stationary gantry.

[0009] 所述的驱动支链及其对应的辅助支链、工作平台以及固定机架等都是采用一体式结构,即在一块金属材料板上,采用先进加工工艺加工而成,无需装配,结构紧凑,体积小, 有效避免了装配误差的产生,满足了高精度的要求。 [0009] The drive and the corresponding branched-chain branched auxiliary working platform and the fixed frame are all one-piece structure, i.e. a metal plate material, the use of advanced processing technology processing, without assembly, compact structure, small volume, to effectively prevent the generation of assembly error, to meet the requirements of high accuracy.

[0010] 本发明通过以下方式进行工作:以Y方向运动为例,压电陶瓷驱动器施加力于Y方向驱动支链内的输入解耦平台以使驱动支链中间平台朝Y方向运动,通过柔性铰链的协调变形,并且由于柔性铰链轴向刚度较大,从而带动工作平台和Y方向辅助支链整体朝Y方向运动。 [0010] The present invention operates in the following manner: the Y-direction, for example, piezoelectric actuators apply a force in the drive input decoupling internet branched in the Y direction to the Y direction driving branched intermediary platform, through a flexible coordination of the hinge is deformed and due to the flexibility of the hinge greater axial stiffness, thereby driving the working platform and the Y direction of the auxiliary branched integrally in the Y direction. 同时也带动了X方向的驱动支链内的二级驱动铰链中间平台和辅助支链内的的二级辅助铰链中间平台朝Y方向运动。 Also led to the X direction drive two hinges and two intermediate platforms auxiliary hinges in the middle of the platform in the driving assist branched-chain branched in the Y direction. 由于柔性铰链轴向刚度较大,故工作平台的位移基本上与压电陶瓷驱动器的输出位移即驱动支链中间平台得位移基本相同。 Since the flexible hinge greater axial stiffness, so that the displacement of the working platform substantially output displacement of the piezoelectric ceramic actuator, i.e. branched chain drives have substantially the same intermediate platform displacement.

[0011] 本发明与现有的技术相比,具有以下有益效果: [0011] Compared with the prior art, it has the following advantages:

[0012] (1)本发明采用复合双平行直板铰链相比于单平行和双平行铰链具有大位移,低应力集中以及无耦合位移等优点,并且当某一方向驱动器运动时,由于该铰链具有较大的轴向刚度,另一个方向的驱动器承受较小的弯矩和侧向载荷。 [0012] (1) the present invention uses a composite of two parallel straight hinge compared to a single parallel and double-parallel hinge has a large displacement, the low stress concentration and no displacement, etc., and when a certain direction of the drive motion, since the hinge having greater axial stiffness, the drive in the other direction is subjected to less bending moments and lateral loads. 而且采用的直板铰链相对于直角圆铰链具有结构形状简单,便于加工,加工成本低等优点。 Straight and hinges used to hinge at right angles to the circular shape having a simple structure, ease of processing, low processing costs.

[0013] (2)本发明采用对称约束结构,从而有效消除了轴间输出耦合的位移,累积误差以及工作平台旋转等寄生位移的产生,保证了运动平台的二自由度平动,同时也增加了结构的刚度、承载能力和固有频率。 [0013] (2) The present invention employs a symmetric constraint structure, thereby effectively eliminating the coupling of the output shaft displacement between the cumulative parasitic displacement error and work platform rotation, to ensure the two degree of freedom translational movement of the platform, while also increasing stiffness of the structure, and the carrying capacity of the natural frequency.

[0014] (3)本发明采用的并联机构相比于简单叠加的串联机构具有高刚度,低惯量,高承载能力,精度高,无累积误差,两个方向的动力学特性相同以及结构对称紧凑,体积小等优 [0014] (3) parallel mechanism employed in the present invention as compared to the simple sum of the series mechanism has high rigidity, low inertia, high load capacity, high precision, accumulated error, the same dynamics as well as two symmetrical directions compact , small size and excellent

点ο Point ο

附图说明 BRIEF DESCRIPTION

[0015] 图1为本发明的系统结构框图。 [0015] FIG. 1 is a block diagram of the system of the present invention.

[0016] 图2为Y方向机构变形原理简图。 [0016] FIG. 2 is a principle diagram of the Y-direction deformation mechanism.

[0017] 图3为工作平台X方向位移与两轴所施加的力的关系图。 [0017] FIG. 3 is a graph of the X-direction displacement and axial force applied to the two working platform.

[0018] 图4为工作平台旋转角度与两轴所施加的力的关系图。 [0018] FIG. 4 is a diagram of the working platform and the angle of rotation of the two axial force applied.

具体实施方式 Detailed ways

[0019] 下面对本发明的实施例作详细说明,本实施例在以本发明技术方案为前提下进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。 [0019] Hereinafter, embodiments of the present invention will be described in detail, the present embodiments In order aspect of the present invention is a premise is given and the specific operation detailed embodiments, but the scope of the present invention is not limited to the Example embodiments described below.

[0020] 如图1和图2所示,本实施例包括:压电陶瓷驱动器1、两个相同的驱动支链8和11及其对应的两个相同的辅助支链9和10、工作平台7以及固定机架2,其中:辅助支链9、10与驱动支链8、11两两对称分布在工作平台7的x+、x-、Y+、Y-四个平面坐标轴方向上。 [0020] FIGS. 1 and 2, the present embodiment includes: 1, two identical drives and branched chain 8 and 11 corresponding to two identical auxiliary branches 9 and 10, the working platform piezoelectric actuator 7 and the stationary gantry 2, wherein: the drive assist branched 9,10 8,11 twenty-two branched symmetrically working platform of x 7 +, x-, Y +, Y- four plane on the coordinate axes.

[0021] 所述的驱动支链11包括:输入解耦平台14、驱动支链中间平台12、一级驱动铰链中间平台3、二级驱动铰链中间平台5和柔性铰链4、6和13,其中:输入解耦平台14与驱动支链中间平台12通过柔性铰链13活动连接,一级驱动铰链中间平台3分别与驱动支链中间平台5和固定机架2通过柔性铰链4活动连接,二级驱动铰链中间12平台分别与工作平台7和驱动支链中间平台5通过柔性铰链6活动连接。 [0021] The branched chain drive 11 comprises: an input decoupling stage 14, intermediate platform 12 branched chain drive, a driving hinge intermediate platform 3, two intermediate driving internet hinge 5 and the flexible hinges 4, 6 and 13, wherein : decoupling platform 14 drives the input branch connected to the intermediate platform 12 by a flexible hinge 13 activity, a driving hinge intermediate platform 3 are connected to drive a branched intermediate platform 5 and the fixed frame 2 by a flexible hinge 4 activities, the secondary drive the hinge intermediate platform 12 are flexible hinge 6 is connected to the active working platform 7 and branched chain drive 5 via the intermediate platform.

[0022] 所述的辅助支链9包括:辅助支链中间平台25、一级辅助铰链中间平台22、二级辅助铰链中间平台24和柔性铰链21和23,其中:一级辅助铰链中间平台22分别与辅助支链中间平台25和固定机架2通过柔性铰链2 1活动连接,二级辅助铰链中间平台24分别与工作平台7和辅助支链中间平台25通过柔性铰链23活动连接。 Auxiliary branched chain [0022] of claim 9 comprising: an auxiliary branched intermediate platform 25, an auxiliary hinge intermediate platform 22, two auxiliary hinge intermediate platform 24 and the flexible hinges 21 and 23, wherein: an auxiliary hinge intermediate platform 22 respectively branched secondary intermediate platform 25 and the stationary gantry 2 is connected by a flexible hinge 21 activity, two auxiliary hinges are connected to the intermediate platform 24 and the auxiliary working platform 7 branched intermediate platform 25 by a flexible hinge 23 activity.

[0023] 所述的工作平台7通过四个方向上的柔性铰链6、15、23和30分别活动连接到XY 两个方向的驱动支链11和8上的二级驱动铰链中间平台12和16以及对应辅助支链9和10上的二级辅助铰链中间平台24和27上。 [0023] The work platform 7 is connected to the two XY directions by a flexible hinge 6,15,23 and 30 are active in four directions, and the drive 11 branched secondary drive hinges on the intermediate platform 16 and 812 and on a corresponding auxiliary branch two auxiliary hinge on an intermediate platform 9 and 10, 24 and 27.

[0024] 所述的固定机架2通过柔性铰链4、20、21和28与XY两个方向的驱动支链11和8上的一级驱动铰链中间平台3和18以及对应辅助支链9和10上的一级辅助铰链中间平台22和29活动连接。 Fixed frame [0024] 2 by the flexible hinge 4,20,21 and 28 with the driving directions of the two branched XY drive 11 and a platform on the intermediate hinge 83 and 18 and the corresponding secondary and branched chain 9 an auxiliary hinges 22 and the intermediate platform 10 connected to the 29 active.

[0025] 所述的驱动支链8和11及其对应的辅助支链9和10、工作平台7以及固定机架2都是采用一体式结构,即在一块金属材料板上,采用先进加工工艺加工而成,无需装配,结构紧凑,体积小,有效避免了装配误差的产生,满足了高精度的要求。 [0025] The drive chain 8 and 11 branched secondary branches and their corresponding 9 and 10, the work platform 7 and the stationary gantry 2 are one-piece structure, i.e. a metal plate material, the use of advanced processing technology processing, without assembly, compact structure, small volume, to effectively prevent the generation of assembly error, to meet the requirements of high accuracy.

[0026] 本实例通过以下方式进行工作:以Y方向运动为例,压电陶瓷驱动器1施加力于Y 方向驱动支链11内输入解耦平台14以使驱动支链中间平台5朝Y方向运动,通过柔性铰链4、15、21和30的协调变形,并且由于柔性铰链6和23轴向刚度较大,从而带动工作平台7和Y方向辅助支链9整体朝Y方向运动。 [0026] The present example operates in the following way: the Y-direction, for example, a piezoelectric actuator applies a force driving input decoupling branched internet 14 11 5 Y direction so that movement of the drive chain branching in the Y direction intermediate platform , coordinated by deformation of the flexible hinges 4,15,21 and 30, and due to the flexibility of the hinge 6 and 23 greater axial stiffness, so as to drive the work platform 7 and the Y-direction of the auxiliary branch 9 integrally in the Y direction. 同时也带动了X方向的驱动支链8内的二级驱动铰链中间平台16和辅助支链10内的的二级辅助铰链中间平台27朝Y方向运动。 Two auxiliary hinge intermediate platform 10 inside the two intermediate hinge drive platform 16 and the auxiliary branch 8 in the X-direction but also led branched chain drive 27 in the Y direction. 由于柔性铰链6刚度较大,故工作平台7的位移基本上与压电陶瓷驱动器1的输出位移即驱动支链中间平台5得位移基本相同。 Since the flexible hinge 6 large rigidity so that the displacement of the work platform 7 is substantially the piezoelectric actuators 1, i.e. drive the output displacement branched intermediate platform 5 to be substantially the same displacement.

[0027] 由于柔性铰链4和21采用复合双平行结构,Y方向驱动支链11上的一级驱动铰链中间平台3在Y方向上的位移为驱动支链中间平台5的一半,Y方向辅助支链9的一级辅助铰链中间平台22在Y方向上的位移为辅助支链中间平台25的一半,故柔性铰链4和21 内的单个直板铰链的末端扰度为驱动支链中间平台12和辅助支链中间平台25在Y方向上位移的一半,同时由于柔性铰链15和30也采用复合双平行结构,二级驱动铰链中间平台16 和二级辅助铰链中间平台27的位移为工作平台7位移的一半,故柔性铰链15和30内的单个直板铰链末端扰度也为工作平台7的一半,故系统采用的复合双平行结构能较好的降低柔性铰链的最大应力。 [0027] Since the flexible hinges 4 and 21 composite dual parallel structure, Y direction driving displacement a driving hinge intermediate platform 11 on branch 3 in the Y direction is driven branched intermediary platform half 5, Y direction of the auxiliary support chain one auxiliary hinge intermediate platform 9 22 displaced in the Y-direction is an auxiliary branched intermediary platform half 25, so that the flexible hinge 4 and the tip deflections single straight hinge within 21 to drive a branched intermediate platform 12 and the auxiliary branched intermediate platform 25 in the Y-direction displacement of the half, and because of the flexible hinges 15 and 30 are also composite dual parallel structure, displacement of the two drive hinge intermediate platform 16 and two auxiliary hinge intermediate platform 27 of the work platform 7 displacement half, so that a single flexible hinge 15 and the hinge end of the straight degree of disturbance in the working platform 30 is also half 7, so that a composite structure of two parallel systems can be better used to reduce the maximum stress of the flexible hinge.

[0028] 当只有Y方向的压电陶瓷驱动器1产生位移时,由于系统采用复合双平行四杆机构,以及整体结构的对称性,所以工作平台7在X方向无输出耦合位移,并且由于柔性铰链20和28轴向刚度较大,故X方向的驱动支链8上的驱动支链中间平台19在Y方向产生的位移很小,同时在Y方向压电驱动器1的输入端加入了输入解耦平台14,从而有效减少了Y 方向压电驱动器1所承受的弯矩和侧向力,避免了压电陶瓷驱动器1的损坏。 [0028] When only the piezoelectric actuator in the Y direction 1 is displaced, because the system uses a composite double parallelogram linkage, and the symmetry of the overall structure, the work platform 7 in the X direction, no output coupled to the displacement, and due to the flexible hinge 20 and 28 greater axial stiffness, so that the displacement drive drives branched-chain branched intermediate platform 19 in the 8 X direction produced in the Y direction is very small, while the input of the Y-direction of the piezoelectric actuator 1 is added to the input decoupling platform 14, thus effectively reducing the Y direction piezoelectric actuators a bending moment and lateral force, avoiding damage to a piezoelectric actuator. [0029] 如图3所示,工作平台7的X方向位移与X方向输入力呈线性关系,而与Y方向的输入力基本无关,从而消除了因为Y方向上输入力的变化所引起的X方向的耦合位移,同时也消除了运动过程中所引起的累积误差。 [0029] As shown in FIG. 3, the working platform displacement in the X direction to the X direction of the input force 7 is linear, and the Y direction substantially independent of the input force, thereby eliminating variation in the input force X as in the Y direction caused by coupling displacement direction, but also eliminates cumulative error caused during the movement.

[0030] 如图4所示,由于采用对称性结构和复合双平行四杆机构,工作平台7在运动过程中的所产生的旋转角度趋于零,相比于X和Y方向上的位移可以忽略不计,从而有效消除了工作平台7的转动角度。 [0030] As shown, thanks to the symmetry of the composite structure and the double parallelogram linkage mechanism, the rotation angle of the work platform 7 during the movement of the generated 4 tends to zero, compared to a displacement in the X and Y directions can be It is negligible, thus effectively eliminating the rotation angle of the working platform 7.

[0031] 本装置与现有的技术相比,具有以下有益效果: [0031] The present apparatus in comparison with the prior art, has the following advantages:

[0032] (1)本装置采用复合双平行直板铰链4,6,15,20,21,23,28,30相比于单平行和双平行铰链具有大位移,低应力集中以及无耦合位移等优点,并且当某一方向驱动器运动时, 由于该铰链具有较大的轴向刚度,另一个方向的驱动器承受较小的弯矩和侧向载荷。 [0032] (1) This device uses a composite of two parallel straight parallel hinge 4,6,15,20,21,23,28,30 single and dual parallel hinge has a large displacement and stress concentration is low compared to the other with no displacement advantages and in one direction when the drive movement, since the hinge has a greater axial stiffness, the drive in the other direction is subjected to less bending moments and lateral loads. 而且采用的直板铰链相对于直角圆铰链具有结构形状简单,便于加工,加工成本低等优点。 Straight and hinges used to hinge at right angles to the circular shape having a simple structure, ease of processing, low processing costs.

[0033] (2)本装置采用对称约束结构,从而有效消除了轴间输出耦合的位移,累积误差以及工作平台旋转等寄生位移的产生,保证了运动平台的二自由度平动,同时也增加了结构的刚度、承载能力和固有频率。 [0033] (2) This device uses a symmetric constraint structure, thereby effectively eliminating the coupling of the output shaft displacement between the cumulative parasitic displacement error and work platform rotation, to ensure the two degree of freedom translational movement of the platform, while also increasing stiffness of the structure, and the carrying capacity of the natural frequency.

[0034] (3)本装置采用的并联机构相比于简单叠加的串联机构具有高刚度,低惯量,高承载能力,精度高,无累积误差,两个方向的动力学特性相同以及结构对称紧凑,体积小等优 [0034] (3) The device uses parallel mechanism compared to the simple sum of the series mechanism has high rigidity, low inertia, high load capacity, high precision, accumulated error, the same dynamics as well as two symmetrical directions compact , small size and excellent

点ο Point ο

Claims (4)

  1. 一种二自由度平动并联解耦微动平台,压电陶瓷驱动器、工作平台以及固定机架,其特征在于,还包括:两个驱动支链及其对应的辅助支链,其中:两个驱动支链及其对应的辅助支链分别两两对称分布在工作平台的X方向和Y方向。 A two translational DOF parallel Decoupled micro platform, piezoelectric actuators, the working platform and a fixed rack, characterized in that, further comprising: two drive chains and the corresponding branched-chain branched auxiliary, wherein: two and their corresponding branched chain drive auxiliary chains are branched symmetrically twenty-two X direction and the Y direction of the working platform.
  2. 2.根据权利要求1所述的二自由度平动并联解耦微动平台,其特征是,所述的驱动支链包括:输入解耦平台、驱动支链中间平台、一级驱动铰链中间平台、二级驱动铰链中间平台和柔性铰链,其中:输入解耦平台与驱动支链中间平台通过柔性铰链活动连接,一级驱动铰链中间平台分别与驱动支链中间平台和固定机架通过柔性铰链活动连接,二级驱动铰链中间平台分别与工作平台和驱动支链中间平台通过柔性铰链活动连接。 The two degrees of freedom translation of the platform parallel decoupling jog 1, wherein said drive branch comprises: decoupling an input platform, an intermediate platform branched chain drive, a drive platform intermediate hinge , two drive hinge intermediate the platform and a flexible hinge, wherein: the input decoupling platform and drive the branched intermediate platform by a flexible living hinge connection, a driving hinge intermediate platform respectively driving branched intermediate platform and the fixed frame by a flexible living hinge connection, two driving hinge are connected to the intermediate platform and the work platform driven by a flexible internet branched intermediate living hinge.
  3. 3.根据权利要求1所述的二自由度平动并联解耦微动平台,其特征是,所述的辅助支链包括:辅助支链中间平台、一级辅助铰链中间平台、二级辅助铰链中间平台和柔性铰链, 其中:一级辅助铰链中间平台分别与辅助支链中间平台和固定机架通过柔性铰链活动连接,二级辅助铰链中间平台分别与工作平台和辅助支链中间平台通过柔性铰链活动连接。 The two degrees of freedom translation of the platform parallel decoupling jog 1, characterized in that said auxiliary branch comprises: an auxiliary intermediary platform branched chain, an auxiliary intermediary platform hinge, two auxiliary hinge the intermediate platform and the flexible hinge, wherein: an auxiliary hinge intermediate platform respective subsidiary branched intermediate platform and the fixed frame of the flexible living hinge connection, two auxiliary hinge intermediate platform respectively working platforms and secondary branched chain intermediate platform by a flexible hinge active connections.
  4. 4.根据权利要求1所述的二自由度平动并联解耦微动平台,其特征是,所述的压电陶瓷驱动器的头部与驱动支链内的输入解耦平台相接触并施加力于输入解耦平台,压电陶瓷驱动器的底部与固定机架固定连接。 The two degrees of freedom according to a translational movement parallel Decoupled micro platform, wherein said piezoelectric actuator head and drive the input decoupling branched internet contact and apply a force to claim decoupling the input platform, the bottom of the piezoelectric actuator is fixedly connected to the stationary gantry.
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CN102581828A (en) * 2012-02-10 2012-07-18 合肥工业大学 Two-dimensional micro-displacement worktable without coupled motion
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CN103030103B (en) * 2012-12-10 2015-04-29 山东理工大学 3-PRR micro-displacement platform based on symmetrical variable cross-section compliant mechanism
CN103056868A (en) * 2012-12-24 2013-04-24 苏州大学 Two-dimensional micro positioner based on displacement sensor
CN103143732A (en) * 2013-03-01 2013-06-12 天津大学 Displacement sensor type piezoceramic driver based on flexible mechanism
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CN104196952A (en) * 2014-07-14 2014-12-10 西安电子科技大学 Two-freedom-degree micro type flexible hinge vibration attenuation platform and vibration attenuation method
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