CN101862966A - Two-degree of freedom translation parallel decoupling micromotion platform - Google Patents
Two-degree of freedom translation parallel decoupling micromotion platform Download PDFInfo
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Abstract
The invention relates to a two-degree of freedom translation parallel decoupling micromotion platform in the technical field of micro electro mechanical systems. The micromotion platform comprises a piezoelectric ceramic driver, two driving branch chains and corresponding auxiliary branch chains thereof, a working platform and a fixed stand, wherein the two driving branch chains and the corresponding auxiliary branch chains thereof are respectively symmetrically distributed in the X direction and the Y direction of the working platform pairwise. The invention achieves the functions of eliminating coupling and parasitic displacement and realizes the two-dimension movement of the motion platform by the decoupling function and the rigidity characteristic of a compound double-parallel straight panel hinge and the symmetrical characteristic of the whole structure of the platform.
Description
Technical field
What the present invention relates to is a kind of device of micro-electromechanical system field, specifically is a kind of two-degree of freedom translation parallel decoupling micromotion platform based on piezoelectric ceramic actuator and flexible hinge.
Background technology
In fields such as MEMS, scanning probe microscope, ultraprecise processing, optical element manufacturing and biomedical engineering, the micromotion platform with nano-precision is a core component.At present, great majority adopt the flexible hinge motion workbench with piezoelectric ceramic actuator.And at present, commercial two degrees of freedom micromotion platform commonly used adopts the motion platform of two one dimensions vertically to be superimposed mostly or is nested in the another one direction platform with the mode of the series connection motion platform with a certain direction, realizes two dimensional motion.Shortcomings such as but the two-dimensional micromotion stage that adopts this connected mode can produce because of stack accumulated error, parasitic displacement, intrinsic frequency reduce, two direction of motion dynamic characteristics are different and bulky.Therefore, for overcoming above shortcoming, the two-dimensional micromotion stage that invention has high accuracy, low inertia, high natural frequency, two degrees of freedom symmetrical configuration, input and output decoupling zero and small size has bigger meaning for practical application.
Through the retrieval of prior art document is found, Chinese patent application numbers 200510023219.4, publication number CN1644329A, name is called the patent application of " small two-dimensional de-coupling platforms ", discloses a kind of small two-dimensional de-coupling platforms.But in this technology, the configuration more complicated, processing cost is than higher.Chinese patent application numbers 200810636287.2, publication number CN101413902A, name is called the patent application of " a kind of full flexible three-translational series-parallel connection fine motion device of scanning electron microscope home position observation ", and two degrees of freedom has wherein partly provided the full flexible flat parallel institution of a kind of two degrees of freedom.But in this technology, if during the driver on only driving some frees degree, the driver on the another one free degree need bear bigger moment of flexure and side force, causes the damage of driver easily, promptly can not well realize the input decoupling of piezoelectric actuator.Chinese patent application numbers 200710114743.1, publication number CN101176995A, name is called the patent application of " a kind of two translationa movement and jogging platform with redundancy branched chain ", and a kind of two translationa movement and jogging platform with redundancy branched chain is provided.But the single parallelogram lindage that adopts in this technology has the coupling displacement when moving, and can not realize the full decoupled of two dimensional motion.
Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of two-degree of freedom translation parallel decoupling micromotion platform is provided, rely on the symmetry of decoupling zero function, stiffness characteristics and the platform and integrally structure of Composite Double straight parallel plate hinge, thereby reach the function of eliminating coupling and parasitic displacement, realize the two dimensional motion of motion platform.
The present invention is achieved by the following technical solutions, the present invention includes: piezoelectric ceramic actuator, two auxiliary side chain, workbench and fixed frames that drive side chain and correspondence thereof, wherein: two driving side chains and corresponding auxiliary side chain thereof are symmetrically distributed in the directions X and the Y direction of workbench respectively in twos.
Described driving side chain comprises: input decoupling platform, driving side chain halfpace, one-level drive hinge halfpace, secondary drive hinge halfpace and flexible hinge, wherein: the input decoupling platform flexibly connects by flexible hinge with driving side chain halfpace, one-level drives the hinge halfpace and flexibly connects by flexible hinge with driving side chain halfpace and fixed frame respectively, and secondary drive hinge halfpace flexibly connects by flexible hinge with workbench and driving side chain halfpace respectively.
Described auxiliary side chain comprises: auxiliary side chain halfpace, one-level secondary hinge halfpace, secondary secondary hinge halfpace and flexible hinge, wherein: one-level secondary hinge halfpace flexibly connects by flexible hinge with auxiliary side chain halfpace and fixed frame respectively, and secondary secondary hinge halfpace flexibly connects by flexible hinge with workbench and auxiliary side chain halfpace respectively.
The head of described piezoelectric ceramic actuator contact with input decoupling platform in driving side chain and the power that applies in the input decoupling platform, fixedly connected with fixed frame in the bottom of piezoelectric ceramic actuator.
Described driving side chain and corresponding auxiliary side chain, workbench and fixed frame etc. thereof all are to adopt integral structure, promptly on a sheet of metallic material, adopt advanced processing technology to process, need not assembling, compact conformation, volume is little, has effectively avoided the generation of rigging error, has satisfied high-precision requirement.
The present invention carries out work in the following manner: with the motion of Y direction is example, piezoelectric ceramic actuator applies the input decoupling platform of power in the Y direction drives side chain so that drive the side chain halfpace and move towards the Y direction, compatible deformation by flexible hinge, and because the flexible hinge axial rigidity is bigger, thereby the auxiliary side chain integral body of drive workbench and Y direction is moved towards the Y direction.Also driven simultaneously in secondary drive hinge halfpace in the driving side chain of directions X and the auxiliary side chain secondary secondary hinge halfpace move towards the Y direction.Because the flexible hinge axial rigidity is bigger, to get displacement basic identical so the displacement of workbench promptly drives the side chain halfpace with the output displacement of piezoelectric ceramic actuator basically.
The present invention has following beneficial effect compared with prior art:
(1) the present invention adopts Composite Double straight parallel plate hinge to have big displacement than single parallel and two parallel hinges, stress concentration and do not have advantage such as coupling displacement etc., and when a certain direction driver moves, because this hinge has bigger axial rigidity, the driver of another direction bears less moment of flexure and lateral load.And the straight plate hinge that adopts to have planform with respect to the round hinge in right angle simple, be convenient to process advantage such as processing cost is low.
(2) the present invention adopts the symmetry constraint structure, thereby effectively eliminated the displacement of between centers output coupling, the generation of parasitic displacements such as accumulated error and workbench rotation has guaranteed the two-degree of freedom translation of motion platform, has also increased rigidity, bearing capacity and the intrinsic frequency of structure simultaneously.
(3) parallel institution that adopts of the present invention has high rigidity than the serial mechanism of simple superposition, low inertia, high bearing capacity, precision height, no accumulated error, advantage such as the dynamics of both direction is identical and symmetrical configuration is compact, and volume is little.
Description of drawings
Fig. 1 is a system architecture diagram of the present invention.
Fig. 2 is a Y direction deformation principle sketch.
Fig. 3 is the graph of a relation of displacement of workbench directions X and diaxon applied force.
Fig. 4 is the graph of a relation of the workbench anglec of rotation and diaxon applied force.
The specific embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As depicted in figs. 1 and 2, present embodiment comprises: piezoelectric ceramic actuator 1, two identical driving side chains 8 and 11 and two corresponding identical auxiliary side chains 9 and 10, workbench 7 and fixed frames 2, wherein: auxiliary side chain 9,10 is symmetrically distributed on four plane coordinates direction of principal axis of X+, X-, Y+, Y-of workbench 7 in twos with driving side chain 8,11.
Described driving side chain 11 comprises: input decoupling platform 14, driving side chain halfpace 12, one-level drive hinge halfpace 3, secondary drive hinge halfpace 5 and flexible hinge 4,6 and 13, wherein: input decoupling platform 14 flexibly connects by flexible hinge 13 with driving side chain halfpace 12, one-level drives hinge halfpace 3 and flexibly connects by flexible hinge 4 with driving side chain halfpace 5 and fixed frame 2 respectively, and 12 platforms flexibly connect by flexible hinge 6 with workbench 7 and driving side chain halfpace 5 respectively in the middle of the secondary drive hinge.
Described auxiliary side chain 9 comprises: auxiliary side chain halfpace 25, one-level secondary hinge halfpace 22, secondary secondary hinge halfpace 24 and flexible hinge 21 and 23, wherein: one-level secondary hinge halfpace 22 flexibly connects by flexible hinge 21 with auxiliary side chain halfpace 25 and fixed frame 2 respectively, and secondary secondary hinge halfpace 24 flexibly connects by flexible hinge 23 with workbench 7 and auxiliary side chain halfpace 25 respectively.
Described workbench 7 be movably attached to respectively by the flexible hinge on the four direction 6,15,23 and 30 on the driving side chain 11 and 8 of XY both direction secondary drive hinge halfpace 12 and 16 and corresponding auxiliary side chain 9 and 10 on secondary secondary hinge halfpace 24 and 27 on.
Described fixed frame 2 by flexible hinge 4,20,21 and 28 with the driving side chain 11 and 8 of XY both direction on one-level drive hinge halfpace 3 and 18 and corresponding one-level secondary hinge halfpace 22 and 29 flexible connections of assisting on the side chain 9 and 10.
Described driving side chain 8 and 11 and corresponding auxiliary side chain 9 and 10, workbench 7 and fixed frame 2 all be to adopt integral structure, promptly on a sheet of metallic material, adopt advanced processing technology to process, need not assembling, compact conformation, volume is little, has effectively avoided the generation of rigging error, has satisfied high-precision requirement.
This example carries out work in the following manner: with the motion of Y direction is example, piezoelectric ceramic actuator 1 apply power in the Y direction drives side chain 11 input decoupling platform 14 so that driving side chain halfpace 5 move towards the Y direction, compatible deformation by flexible hinge 4,15,21 and 30, and because flexible hinge 6 and 23 axial rigidities are bigger, thereby auxiliary side chain 9 integral body of drive workbench 7 and Y direction are moved towards the Y direction.Also driven simultaneously in secondary drive hinge halfpace 16 in the driving side chain 8 of directions X and the auxiliary side chain 10 secondary secondary hinge halfpace 27 move towards the Y direction.Because flexible hinge 6 rigidity are bigger, promptly to drive side chain halfpace 5 must displacement basic identical so the displacement of workbench 7 is basically with the output displacement of piezoelectric ceramic actuator 1.
Because flexible hinge 4 and 21 adopts the Composite Double parallel construction, the displacement of one-level driving hinge halfpace 3 on the Y direction on the Y direction driving side chain 11 is half of driving side chain halfpace 5, the displacement of one-level secondary hinge halfpace 22 on the Y direction of the auxiliary side chain 9 of Y direction is half of auxiliary side chain halfpace 25, so the end degree of disturbing of the single straight plate hinge in flexible hinge 4 and 21 is for driving side chain halfpace 12 and auxiliary side chain halfpace 25 in half of Y direction top offset, simultaneously because flexible hinge 15 and 30 also adopts the Composite Double parallel construction, the displacement of secondary drive hinge halfpace 16 and secondary secondary hinge halfpace 27 is half of workbench 7 displacements, so half that the single straight plate hinge end degree of disturbing in flexible hinge 15 and 30 also is a workbench 7, so the Composite Double parallel construction that system adopts can reduce the maximum stress of flexible hinge preferably.
When the piezoelectric ceramic actuator 1 that has only the Y direction produces displacement, because system adopts the Composite Double parallelogram lindage, and integrally-built symmetry, so workbench 7 is in directions X no-output coupling displacement, and because flexible hinge 20 and 28 axial rigidities are bigger, so the driving side chain halfpace 19 on the driving side chain 8 of directions X is very little in the displacement that the Y direction produces, input at Y direction piezoelectric actuator 1 has added input decoupling platform 14 simultaneously, thereby effectively reduced moment of flexure and side force that Y direction piezoelectric actuator 1 is born, avoided the damage of piezoelectric ceramic actuator 1.
As shown in Figure 3, the directions X displacement of workbench 7 and directions X input power are linear, and irrelevant substantially, thereby eliminated because caused accumulated error in the motion process has also been eliminated in the coupling displacement of the caused directions X of variation of input power on the Y direction simultaneously with the input power of Y direction.
As shown in Figure 4, owing to adopt symmetry structure and Composite Double parallelogram lindage, the anglec of rotation that produced of workbench 7 in motion process goes to zero, and the displacement on X and Y direction can be ignored, thereby effectively eliminated the rotational angle of workbench 7.
This device has following beneficial effect compared with prior art:
(1) this device adopts Composite Double straight parallel plate hinge 4,6,15,20,21,23,28,30 have big displacement than single parallel and two parallel hinges, stress concentration and do not have advantage such as coupling displacement etc., and when one party was moved to driver, because this hinge has bigger axial rigidity, the driver of another direction bore littler moment of flexure and lateral load. And the straight plate hinge that adopts to have planform with respect to the round hinge in right angle simple, be convenient to process the advantage such as processing cost is low.
(2) this device adopts the symmetry constraint structure, thereby effectively eliminated the displacement of between centers output coupling, the generation of the parasitic displacements such as accumulated error and workbench rotation has guaranteed the two-degree of freedom translation of motion platform, has also increased rigidity, bearing capacity and the intrinsic frequency of structure simultaneously.
(3) parallel institution that adopts of this device has high rigidity than the serial mechanism of simple superposition, low inertia, high bearing capacity, precision height, no accumulated error, the advantage such as the dynamics of both direction is identical and symmetrical configuration is compact, and volume is little.
Claims (4)
1. two-degree of freedom translation parallel decoupling micromotion platform, piezoelectric ceramic actuator, workbench and fixed frame, it is characterized in that, also comprise: two drive side chain and corresponding auxiliary side chain thereof, and wherein: two driving side chains and corresponding auxiliary side chain thereof are symmetrically distributed in the directions X and the Y direction of workbench respectively in twos.
2. two-degree of freedom translation parallel decoupling micromotion platform according to claim 1, it is characterized in that, described driving side chain comprises: the input decoupling platform, drive the side chain halfpace, one-level drives the hinge halfpace, secondary drive hinge halfpace and flexible hinge, wherein: the input decoupling platform flexibly connects by flexible hinge with driving side chain halfpace, one-level drives the hinge halfpace and flexibly connects by flexible hinge with driving side chain halfpace and fixed frame respectively, and secondary drive hinge halfpace flexibly connects by flexible hinge with workbench and driving side chain halfpace respectively.
3. two-degree of freedom translation parallel decoupling micromotion platform according to claim 1, it is characterized in that, described auxiliary side chain comprises: auxiliary side chain halfpace, one-level secondary hinge halfpace, secondary secondary hinge halfpace and flexible hinge, wherein: one-level secondary hinge halfpace flexibly connects by flexible hinge with auxiliary side chain halfpace and fixed frame respectively, and secondary secondary hinge halfpace flexibly connects by flexible hinge with workbench and auxiliary side chain halfpace respectively.
4. two-degree of freedom translation parallel decoupling micromotion platform according to claim 1, it is characterized in that, the head of described piezoelectric ceramic actuator contact with input decoupling platform in driving side chain and the power that applies in the input decoupling platform, fixedly connected with fixed frame in the bottom of piezoelectric ceramic actuator.
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| CN110355988A (en) * | 2018-04-11 | 2019-10-22 | 长春工业大学 | A kind of roller of two-dimension vibration auxiliary is to plane hot stamping device and method |
| CN109176420A (en) * | 2018-07-10 | 2019-01-11 | 天津大学 | Linear joint formula flexibility decoupling precision positioning structure is set in one kind |
| CN109176420B (en) * | 2018-07-10 | 2021-08-06 | 天津大学 | Middle-mounted movable joint type flexible decoupling precision positioning structure |
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