CN102708930A - Three-dimensional decoupled micro-displacement stage with floating driver - Google Patents
Three-dimensional decoupled micro-displacement stage with floating driver Download PDFInfo
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- CN102708930A CN102708930A CN2012101723013A CN201210172301A CN102708930A CN 102708930 A CN102708930 A CN 102708930A CN 2012101723013 A CN2012101723013 A CN 2012101723013A CN 201210172301 A CN201210172301 A CN 201210172301A CN 102708930 A CN102708930 A CN 102708930A
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Abstract
The invention relates to a three-dimensional decoupled micro-displacement stage with a floating driver. The stage comprises a base plate, a Z-direction lower frame, a Z-direction upper frame, an inner workbench, a workbench, a Z-direction driving unit, support rods, a driving branch chain, a Z-direction support unit and an electrostriction piece. The stage is characterized in that a through hollow cavity is arranged at the middle part of the base plate; the inner workbench is arranged at the middle part of the hollow cavity; and the workbench is arranged just above the inner workbench and strides across the Z-direction upper frame to be connected with the upper surface of the inner workbench through four evenly distributed support rods. By adopting an integrated structure of double layers of symmetrical flexible hinge bars formed by a spatial flexible hinge bar and a plane flexible hinge bar, and by taking the electrostriction piece as the driving element, the micro-displacement stage can totally eliminate the coupled motions and realizes three-dimensional decoupled micro-displacement output with the output displacement and the input displacement linear with each other. The three-dimensional decoupled micro-displacement stage has the advantages of high resolution and compact structure and can be applied to a micro electro mechanical system, a scanning and detecting microscope and the fields of ultraprecision machining, manufacturing of optical elements and biomedical engineering.
Description
Technical field
The invention belongs to micro-electromechanical system field, relate to a kind of flexible hinge work bench that does not have coupled motions, being specifically related to a kind of three-dimensional based on electrostretch device and double-deck flexible hinge symmetrical structure does not have the coupling micro-displacement work table.
Background technology
The micrometric displacement technology is one of gordian technique of precision optical machinery and exact instrument, in recent years along with subject development such as microelectric technique, aerospace, bioengineering and develop by leaps and bounds.Micro-displacement work table is widely used in fields such as MEMS, scanning probe microscope, ultraprecise processing, optical element manufacturing and biomedical engineerings, and the micro-displacement work table with nano-precision is its core component.Design three-dimensional micro-displacement work table, key is to solve motion coupled problem and motion control problem, and promptly the drive movement of both direction can be independent separately and can be accurately located.Present most of three-dimensional micro-displacement work table adopts the vertical stack of motion in one dimension or realizes three-dimensional motion with the series connection nesting type structure; This three-dimensional micro-displacement work table structure adopts the unsymmetric structure design; Not only complex structure, bulky, the microminiaturization that is not easy to worktable; And can produce the precision that cumulative errors influences worktable, can't eliminate the coupling between all directions fully.Therefore, for overcoming above shortcoming, development has high precision, nothing is coupled, locatees the symmetrical structure three-dimensional micro-displacement work table accurate, that driver floats and has bigger meaning for practical application.
Summary of the invention
In order to overcome complex structure that existing three-dimensional micro-displacement work table exists, bulky; Be not easy to the microminiaturization of worktable; Can't eliminate the problem of the coupling between all directions fully, the three-dimensional that the present invention provides a kind of driver to float does not have the coupling micro-displacement work table.
The technical matters that the present invention solved can adopt following technical scheme to realize:
The three-dimensional that driver floats does not have the coupling micro-displacement work table; Comprise substrate, Z to lower frame, Z to upper ledge, interior worktable, worktable, driver element, support bar, driving side chain, Z to support unit, electrostretch device; Its design feature is: said substrate middle part is provided with the cavity of perforation; Said cavity middle part is provided with interior worktable, and said interior worktable is symmetrically distributed with four interior worktable flanges along X, Y direction;
It is shaft-like that said Z is to upper ledge that the cross section is foursquare C shape to lower frame, Z, vertically connecting the upper surface and the lower surface middle part of substrate respectively;
In said worktable is arranged on worktable directly over, and stride across Z worktable upper surface in upper ledge is connecting through four support bars that are uniformly distributed with;
Said driving side chain is used to connecting substrate and interior worktable; Drive side chain one end both sides of the edge symmetric position and be respectively equipped with the driving side plate; The driving side chain is provided with an end that drives side plate and is connected with the worktable flange through two rhizoplane flexible hinge bars; The other end is connected with substrate through two radical space flexible hinge bars, and said driving side chain has two, is arranged at the middle part of substrate cavity X-direction, Y-direction respectively;
Said driver element one end symmetria bilateralis is provided with web joint; And offered the groove that is used to place electrostretch device at the middle part that is provided with web joint one end; Totally three of said driver elements; Lay respectively at middle part and the interior worktable and the Z-direction of Z between lower frame of substrate cavity X+ direction, Y+ direction, wherein the driver element of X+ direction, Y+ direction is connected with the worktable flange through two rhizoplane flexible hinge bars, and the other end is connected with substrate through two radical space flexible hinge bars; Driver element one end of Z-direction is connected to lower frame with Z through two radical space flexible hinge bars, and the other end is connected with the driving bearing through two rhizoplane flexible hinge bars; Said driving bearing is used to connect the driver element and the interior worktable of Z-direction, and interior worktable upper surface symmetric position is provided with another driving bearing and is used to connect Z to support unit and interior worktable; Said Z links to each other with the driving bearing through two rhizoplane flexible hinge bars to support unit one end, and the other end is connected to upper ledge with Z through two radical space flexible hinge bars;
Said electrostretch device places said groove middle part; Wherein: electrostretch device one end of X+ direction, Y+ direction holds out against the sidewall of groove; On the worktable flange, electrostretch device one end of Z-direction held out against the sidewall of groove in the other end withstood on, and the other end withstands on and drives on the bearing.
The three-dimensional that driver of the present invention floats does not have the coupling micro-displacement work table, and its design feature also is:
Worktable is that square is tabular in said, and worktable flange two sides symmetric position is connecting an end of planar flexible hinge-rod respectively in each, and the middle part of upper surface and bottom surface is connected with the driving bearing other end respectively.
Said worktable is that square is tabular and identical with interior worktable size, and worktable is through worktable upper surface in being connected with four vertical square columnar stays bars that are uniformly distributed with of its bottom surface.
The 20 μ m stroke PAS005 that said electrostretch device is produced for Thorlabs company, PAS020 driver or 40 μ m stroke PAS009, PAS040 driver.
Compared with present technology, useful technique effect of the present invention embodies in the following areas:
1, worktable of the present invention adopts spatial flexible hinge-rod and plane flexible hinge bar to form double-deck flexible hinge pole pair to claim integral structure; Rely on no coupled motions characteristic, stiffness characteristics, the worktable symmetrical structure characteristic of planar flexible hinge and spatial flexible hinge-rod; Can eliminate coupled motions fully; Improve precision, realize the three-dimensional coupling micrometric displacement output of not having, have no gap, do not have rub, highly sensitive characteristics.
2, worktable of the present invention with electrostretch device as driving element; And electrostretch device floats with working table movement; Can realize that one dimension, two dimension or three-dimensional do not have the motion of coupling micrometric displacement, it is meticulousr to export displacement simultaneously, and the output displacement is linear with the input displacement.Because the nothing coupling is separate between the motion of three directions, thereby improve the bearing accuracy of worktable, be convenient to control.
3, Working table structure of the present invention is compact, is convenient to microminiaturization.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the explosive view of Fig. 1.
Fig. 3 is that X/Y of the present invention is to structural representation.
Fig. 4 is that Z of the present invention is to structural representation.
Fig. 5 is interior Working table structure synoptic diagram.
Fig. 6 is the structure of driving unit synoptic diagram.
Fig. 7 is for driving the branched structure synoptic diagram.
Fig. 8 is that Z is to the support unit structural representation.
Fig. 9 is that Z is to driving the seat structure synoptic diagram.
Sequence number among the last figure: substrate 1, Z to lower frame 2, Z to upper ledge 3, interior worktable 4, worktable 5, Z to driver element 6, support bar 7, drive side chain 8, Z to support unit 9, electrostretch device 10, spatial flexible hinge-rod 11, planar flexible hinge-rod 12, interior worktable flange 13, web joint 14, groove 15, drive side plate 16, drive bearing 17.
Embodiment
Below in conjunction with accompanying drawing, through embodiment the present invention is elaborated, this instance is being to implement under the prerequisite with technical scheme of the present invention, has provided detailed embodiment and concrete operating process.
Referring to Fig. 1 ~ 9; The three-dimensional that driver floats do not have the coupling micro-displacement work table comprise substrate 1, Z to lower frame 2, Z to upper ledge 3, interior worktable 4, worktable 5, Z to driver element 6, support bar 7, drive side chain 8, Z to support unit 9, electrostretch device 10; Substrate 1 middle part is provided with the cavity of perforation; Worktable 4 in the cavity middle part is provided with, interior worktable 4 are that square is tabular, are symmetrically distributed with four interior worktable flanges 13 along X, Y direction; Worktable flange 13 two sides symmetric positions are connecting an end of planar flexible hinge-rod 12 respectively in each, and the middle part of upper surface and bottom surface is connected with driving bearing 17 other ends respectively; Z is shaft-like for the cross section is foursquare C shape to upper ledge 3 to lower frame 2, Z, is vertically connecting the upper surface and the lower surface middle part of substrate 1 respectively; Worktable 5 is that square is tabular and identical with interior worktable 4 sizes, in being arranged on worktable 4 directly over, and through striding across Z worktable 4 upper surfaces in upper ledge 3 is being connected with four vertical square columnar stays bars 7 that are uniformly distributed with of its bottom surface; Drive side chain 8 and be used to connecting substrate 1 and interior worktable 4; Drive side chain 8 one end both sides of the edge symmetric positions and be respectively equipped with driving side plate 16; Driving side chain 8 is provided with driving side plate one end and is connected with worktable flange 13 through two rhizoplane flexible hinge bars 12; The other end is connected with substrate 1 through two radical space flexible hinge bars 11, drives side chain 8 and has two, is arranged at the middle part of substrate 1 cavity X-direction, Y-direction respectively; Driver element 6 one end symmetria bilateralis positions are respectively equipped with web joint 14; Be provided with web joint one end middle part and offered the groove 15 that is used to place electrostretch device 10; Totally three of driver elements 6; Lay respectively at middle part and the interior worktable 4 and the Z-direction of Z between lower frame 2 of substrate 1 cavity X+ direction, Y+ direction; Wherein the driver element 6 of X+ direction, Y+ direction is connected with worktable flange 13 through two rhizoplane flexible hinge bars 12; The other end is connected with substrate 1 through two radical space flexible hinge bars 11, and driver element 6 one ends of Z-direction are connected to lower frame 2 with Z through two radical space flexible hinge bars 11, and the other end is connected with driving bearing 17 through two rhizoplane flexible hinge bars 12; Said driving bearing 17 is used to connect the driver element 6 and interior worktable 4 of Z-direction, interior worktable 4 upper surface symmetric positions be provided with another drive bearing 17 be used to connect Z to support unit 9 in interior worktable 4; Z links to each other with driving bearing 17 through two rhizoplane flexible hinge bars 12 to support unit 9 one ends, and the other end is connected to upper ledge 3 with Z through two radical space flexible hinge bars 11; The 20 μ m stroke PAS020 drivers that electrostretch device 10 is produced for Thorlabs company (require to select 20 μ m stroke PAS005 drivers according to groove 7 degree of depth and worktable range; Perhaps 40 μ m stroke PAS009 driver or PAS040 drivers); Place groove 15 middle parts; Wherein: electrostretch device 10 1 ends of X+ direction, Y+ direction hold out against the sidewall of groove 5; On the worktable flange 13, electrostretch device 10 1 ends of Z-direction held out against the sidewall of groove 15 in the other end withstood on, and the other end withstands on and drives on the bearing 17.
The present invention can realize one dimension, two dimension or three-dimensional no coupled motions, and present embodiment carries out work in the following manner:
During motion in one dimension: with the motion of output directions X is example, and electrostretch device 10 applies power in the X-direction, and worktable 4 moves to the X-direction in driving; Worktable flange 13 1 ends moved to the X-direction in two groups of planar flexible hinge-rods on the directions X 12 connected at this moment; Planar flexible hinge-rod 12 other ends and substrate 1 are static relatively, and two groups of spatial flexible hinge-rods 11 of Y direction connect an end transfixion of substrate 1 simultaneously, and the other end also moves to the X-direction with interior worktable 4; Two groups of spatial flexible hinge-rods 11 on Z-direction connect Z and keep static to lower frame 2, Z to upper ledge 3 one ends; The other end moves to the X-direction with interior worktable 4 under the effect of X-direction power, and owing to spatial flexible hinge, planar flexible hinge-rod all adopt symmetrical structure, the displacement of Y direction is cancelled out each other; The displacement of Z direction is simultaneously also cancelled out each other; Therefore there are not the coupled motions of Y direction in worktable 4 in to the displacement of X-direction the time, does not have the coupled motions of Z direction yet; Through four support bars that are uniformly distributed with 7 between worktable 4 in being connected and the worktable 5 the no coupled motions of directions X are delivered to worktable 5, thereby the nothing coupling micrometric displacement of having realized directions X is exported.Because the present invention adopts spatial flexible hinge-rod and plane flexible hinge bar to form double-deck flexible hinge pole pair to claim integrated structure design, so the motion in one dimension of Y, Z direction is the same with the motion in one dimension of directions X, does not have coupling phenomenon.
During two dimensional motion, be example with output X-, the motion of Y-direction, the electrostretch device 10 of X+, Y+ position applies power respectively in X-direction and Y-direction, and worktable 4 is simultaneously to X-direction and the motion of Y-direction in driving.Claim integral structure owing to adopt double-deck flexible hinge pole pair; The end that two groups of spatial flexible hinge-rods 11 that the electrostretch device of X+ position makes the Y direction and symmetry are connected the planar flexible hinge-rod 12 of worktable flange 13 two sides in the directions X is to micro-displacement of X-direction translation, and symmetry is connected the planar flexible hinge-rod 12 of worktable flange 13 two sides in the Y direction and keeps motionless; In like manner; The end that two groups of spatial flexible hinge-rods 11 that the electrostretch device of Y+ position makes directions X and symmetry are connected the planar flexible hinge-rod 12 of worktable flange 13 two sides in the Y direction is to micro-displacement of Y-direction translation, and symmetry is connected the planar flexible hinge-rod 12 of worktable flange 13 two sides in the directions X and keeps motionless; Thereby make the driving side chain 8 on the directions X not have relatively moving along the Y direction with interior worktable 4; Driving side chain 8 on the Y direction does not have relatively moving along directions X with interior worktable 4; Through four support bars that are uniformly distributed with 7 between worktable 4 in being connected and the worktable 5 the no coupled motions of directions X are delivered to worktable 5 at last; It is thus clear that the motion of worktable on X, Y both direction is separate, mutually noninterfere has solved the motion coupled problem.The motion of X/Z, Y/Z direction in like manner also is separate, mutually noninterfere, do not have coupling phenomenon.
When three-dimensional dimension is moved; According to above-mentioned two dimensional motion principle, the two dimensional motion of X/Y direction is non-coupling, after the motion of X/Y direction is accomplished; The electrostretch device 10 of Z-position applies power in the Z+ direction; This moment symmetry be connected a end of two groups of planar flexible hinge-rods 12 that the Z direction drives bearing 17 two sides at the external force effect of Z+ direction and interior worktable 4 simultaneously to the motion of Z-direction, owing to the planar flexible hinge-rod 12 here about the Y rotational symmetry, thereby the displacement of directions X is cancelled out each other; Simultaneously; The other end that is uniformly distributed with four groups of spatial flexible hinge-rods 11 that are connected substrate 1 side middle part is also to the motion of Z+ direction, but since these four groups of spatial flexible hinge-rods 12 respectively in twos about X, Y rotational symmetry, thereby the displacement of X, Y direction is cancelled out each other.Can know that by above-mentioned motion principle the motion of Z direction can not influence the motion of X/Y direction; Through four support bars that are uniformly distributed with 7 between worktable 4 in being connected and the worktable 5 the no coupled motions of directions X are delivered to worktable 5 at last; Therefore the motion of worktable on X, Y, three directions of Z is separate; Mutually noninterfere, thus the degree of accuracy of worktable guaranteed, realized that the three-dimensional of worktable does not have the motion of coupling micrometric displacement.
Claims (4)
1. the unsteady three-dimensional of driver does not have the coupling micro-displacement work table; Comprise substrate (1), Z to lower frame (2), Z to upper ledge (3), interior worktable (4), worktable (5), driver element (6), support bar (7), drive side chain (8), Z to support unit (9), electrostretch device (10); It is characterized in that: said substrate (1) middle part is provided with the cavity of perforation; Said cavity middle part is provided with interior worktable (4), and said interior worktable (4) is symmetrically distributed with four interior worktable flanges (13) along X, Y direction;
Said Z is shaft-like for the cross section is foursquare C shape to upper ledge (3) to lower frame (2), Z, is vertically connecting the upper surface and the lower surface middle part of substrate (1) respectively;
Said worktable (5) be arranged on interior worktable (4) directly over, and stride across Z worktable (4) upper surface in upper ledge (3) is connecting through four support bars that are uniformly distributed with (7);
Said driving side chain (8) is used to connecting substrate (1) and interior worktable (4); Drive side chain (8) one end both sides of the edge symmetric positions and be respectively equipped with driving side plate (16); Driving side chain (8) is provided with an end that drives side plate and is connected with worktable flange (13) through two rhizoplane flexible hinge bars (12); The other end is connected with substrate (1) through two radical space flexible hinge bars (11); Said driving side chain (8) has two, is arranged at the middle part of substrate (1) cavity X-direction, Y-direction respectively;
Said driver element (6) one end symmetria bilateralis are provided with web joint (14); And offered the groove (15) that is used to place electrostretch device (10) at the middle part that is provided with web joint one end; Totally three of said driver elements (6); Lay respectively at middle part and the interior worktable (4) and the Z-direction of Z between lower frame (2) of substrate (1) cavity X+ direction, Y+ direction; Wherein the driver element (6) of X+ direction, Y+ direction is connected with worktable flange (13) through two rhizoplane flexible hinge bars (12); The other end is connected with substrate (1) through two radical space flexible hinge bars (11), and driver element (6) one ends of Z-direction are connected to lower frame (2) with Z through two radical space flexible hinge bars (11), and the other end is connected with driving bearing (17) through two rhizoplane flexible hinge bars (12); Said driving bearing (17) is used to connect the driver element (6) and interior worktable (4) of Z-direction, and interior worktable (4) upper surface symmetric position is provided with another driving bearing (17) and is used to connect Z to support unit (9) and interior worktable (4); Said Z links to each other with driving bearing (17) through two rhizoplane flexible hinge bars (12) to support unit (9) one ends, and the other end is connected to upper ledge (3) with Z through two radical space flexible hinge bars (11);
Said electrostretch device (10) places said groove (15) middle part; Wherein: electrostretch device (10) one ends of X+ direction, Y+ direction hold out against the sidewall of groove (15); The other end withstands on the interior worktable flange (13); Electrostretch device (10) one ends of Z-direction hold out against the sidewall of groove (15), and the other end withstands on and drives on the bearing (17).
2. the three-dimensional that driver according to claim 1 floats does not have the coupling micro-displacement work table; It is characterized in that: worktable (4) is tabular for square in said; Worktable flange (13) two sides symmetric position is connecting an end of planar flexible hinge-rod (12) respectively in each, and the middle part of upper surface and bottom surface is connected with driving bearing (17) other end respectively.
3. the three-dimensional that driver according to claim 1 floats does not have the coupling micro-displacement work table; It is characterized in that: said worktable (5) is tabular and identical with interior worktable (4) size for square, and worktable (5) is through worktable (4) upper surface in being connected with four vertical square columnar stays bars (7) that are uniformly distributed with of its bottom surface.
4. the three-dimensional that driver according to claim 1 floats does not have the coupling micro-displacement work table, it is characterized in that: the 20 μ m stroke PAS005 that said electrostretch device (10) is produced for Thorlabs company, PAS020 driver or 40 μ m stroke PAS009, PAS040 driver.
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| CN2012101723013A CN102708930B (en) | 2012-05-29 | 2012-05-29 | Three-dimensional decoupled micro-displacement stage with floating driver |
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| CN2012101723013A CN102708930B (en) | 2012-05-29 | 2012-05-29 | Three-dimensional decoupled micro-displacement stage with floating driver |
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| CN102708930B CN102708930B (en) | 2013-11-27 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103357894A (en) * | 2013-06-26 | 2013-10-23 | 吉林大学 | Long-strake three degree-of-freedom linear type quick cutter servo device |
| CN107058972A (en) * | 2017-04-17 | 2017-08-18 | 哈尔滨工业大学 | The micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment |
| TWI607823B (en) * | 2015-12-10 | 2017-12-11 | 峰安車業股份有限公司 | Floating type machining platform, floating type machining system and floating type machining method |
| CN108581986A (en) * | 2018-04-25 | 2018-09-28 | 北京航空航天大学 | The Grazing condition parallel connection three-dimensional precise displacement platform of integrated configuration |
| CN113909711A (en) * | 2021-10-15 | 2022-01-11 | 湖南大学 | Working platform capable of realizing multi-axis linkage |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103357894A (en) * | 2013-06-26 | 2013-10-23 | 吉林大学 | Long-strake three degree-of-freedom linear type quick cutter servo device |
| TWI607823B (en) * | 2015-12-10 | 2017-12-11 | 峰安車業股份有限公司 | Floating type machining platform, floating type machining system and floating type machining method |
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| CN107058972B (en) * | 2017-04-17 | 2019-01-18 | 哈尔滨工业大学 | The micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment |
| CN108581986A (en) * | 2018-04-25 | 2018-09-28 | 北京航空航天大学 | The Grazing condition parallel connection three-dimensional precise displacement platform of integrated configuration |
| CN113909711A (en) * | 2021-10-15 | 2022-01-11 | 湖南大学 | Working platform capable of realizing multi-axis linkage |
| CN113909711B (en) * | 2021-10-15 | 2023-03-03 | 湖南大学 | Working platform capable of realizing multi-axis linkage |
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Granted publication date: 20131127 Termination date: 20160529 |