JPH06123787A - Moving device and its producing method and positioning device and table device using them - Google Patents

Abstract

PURPOSE:To provide a moving device capable of improving response characteristic for a small displacement and simultaneously constituting a compact small displacement mechanism and its producing method and positioning device and a table device using them. CONSTITUTION:A table device is constituted of a moving device 2 of which fixed part 15 for holding a substrate holder 3 via a support mechanism 11 provided for elastically holding a substrate holder 3 holding a substrate 5 in the state free of displacement, is formed into one body with a single member, and positioning devices 4a, 4b provided for slightly displacing the sample holder 3 in the direction of the light axis 9 of an optical system 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a movable device composed of a movable part which can be displaced in a predetermined direction and a fixed part supporting the movable part, a method of manufacturing the same, and a movable part of the movable device driven in a predetermined direction. The present invention relates to a positioning device for performing the above, an inspection device for a mask or a reticle used for manufacturing a semiconductor device, an exposure device, or a table device used for a microscope or various machine tools that require fine positioning.

[0002]

2. Description of the Related Art Here, a well-known technique of a table device used mainly for an inspection apparatus for a mask or a reticle used for manufacturing a semiconductor device and an exposure apparatus will be described.

Manufacturing of a semiconductor device such as an LSI is generally performed by transferring a pattern drawn on a mask, a reticle or the like onto a silicon wafer or the like, and forming a pattern by using a process such as etching.

At this time, the number of masks, reticles, substrates such as wafers (hereinafter simply referred to as “substrates”) used is 5
There are several sizes such as inch, 6 inch, 7 inch,
Further, the shape is also circular or rectangular. Therefore, there is a holding method suitable for holding each type of substrate, and it is difficult to realize a holding unit common to all types of substrates.

Therefore, in many exposure apparatuses and the like, the shape and size of the corresponding substrate are limited to deal with the problem. On the other hand, in an apparatus for inspecting board defects and the like, the number of boards to be inspected is large and small, so considering the utilization efficiency of the inspection apparatus, limiting the corresponding board will reduce the productivity. Is not preferable. Therefore, it is desirable for the inspection apparatus to have a table that can hold a plurality of types of substrates in common on the stage.

However, if a common table is constructed on the stage, its structure becomes complicated and the size of the entire apparatus becomes large. Further, if the structure becomes complicated, it becomes difficult to maintain the accuracy, so that there is a problem that a large cost increase is required to maintain the accuracy.

Therefore, it is possible to prepare a plurality of types of tables suitable for each shape for a plurality of types of substrates and replace the types of substrates with dedicated tables to respond to changes in the types of substrates. I started to be seen. This makes it possible to handle a plurality of types of substrates without complicating the table on the stage, and it is easy to maintain the positional accuracy of the substrates.

On the other hand, in a substrate inspection device or the like, it is necessary that the focus position of the optical system is substantially aligned with the inspection surface of the substrate to be inspected. However, because the inspection capacity of a board inspection device is high, the depth of focus is shallow, and the distance between the board and the optical system must be measured in order to keep it in focus because of the deflection of the board and the dimensional accuracy. It is necessary to perform so-called autofocus in which the substrate side or the optical system side is displaced so that the distance is constant.

Therefore, specifically, the entire objective lens system, which is an optical system, is driven by using an actuator such as a piezoelectric element, and is displaced in the optical axis direction according to the output of the substrate position detection device or the focus signal of the optical system. And a method of performing autofocus, or a method of fixing the optical system and displacing the stage on which the table is mounted in the optical axis direction using a piezoelectric element etc., and performing autofocus according to the focus signal. Can be considered. However, under the present circumstances, due to the complexity of the mechanism and the like, it is common to perform auto-focusing by the optical system when supporting a plurality of substrate types.

However, in recent years, as the degree of integration of LSI has greatly increased, the pattern on the substrate has been miniaturized, and higher inspection resolution has been required. In order to improve the inspection resolution, it is conceivable to increase the numerical aperture of the lens of the optical system or shorten the wavelength of the light used. However, shortening the wavelength of light has many problems in terms of the material of glass and the like, and in general, the resolution is often improved by increasing the numerical aperture. However, if the numerical aperture is increased, the depth of focus becomes shallower. Therefore, it becomes sensitive to the deflection on the substrate and the minute displacement of the stage, and it is necessary to improve the displacement resolution and response characteristics of the autofocus mechanism.
However, when the entire objective lens system of the optical system is displaced as in the conventional case, the weight of the movable portion is large and it is difficult to improve the response characteristics. Furthermore, since the lens weight increases as the numerical aperture increases, further improvement in response characteristics cannot be expected.

Therefore, it is necessary to provide a minute displacement mechanism on the substrate side that enables automatic focusing. When displacing the substrate side, it is conceivable to incorporate a displacement mechanism into the stage carrying the table to displace the entire table. However, even with this, it is still difficult to reduce the weight of the movable portion, there is a problem that the response characteristic of the autofocus mechanism cannot be improved, and the stage becomes larger.

From the above demands, it is desired to provide an apparatus in which the table itself is provided with a minute displacement mechanism.

The above-mentioned problem can be similarly applied to the field of microscopes, various machine tools and the like, which require minute displacement of samples having different sizes or shapes in a predetermined direction.

[0014]

As described above,
In a table device that supports multiple types of samples, when performing small displacement such as autofocus on the sample side,
Since the weight of the movable part cannot be reduced by displacing the stage carrying the sample holding table, it is difficult to improve the response characteristics of displacement.
Furthermore, there was a problem that the entire stage became larger.

Therefore, according to the present invention, it is possible to improve the response characteristic of displacement in autofocus by reducing the movable weight at the time of minute displacement, and at the same time, the movable device having a compact minute displacement mechanism and the same. An object of the present invention is to provide a manufacturing method, a positioning device for driving a movable device thereof, and a table device using these.

[0016]

In order to achieve the above object, the present invention provides the following means.

First, a movable part which can be displaced in a predetermined direction,
In order to elastically support the movable portion, a support mechanism composed of thin-walled portions that are provided so as to face each other in a direction substantially corresponding to the displacement direction of the movable portion, and a fixed portion that supports the movable portion via the support mechanism. And a movable device characterized in that the movable part, the support mechanism and the fixed part are integrally molded from a single member, and a solid fine particle in a gap where the movable part and the fixed part face each other. The above-mentioned movable device having a damping member formed by filling and hardening a gel-like material in which particles are dispersed.

Secondly, the thin-walled portion forming step of forming a recess so as to form the thin-walled portion facing each other in the single member, and the single member can be displaced in a direction substantially coincident with the facing direction of the thin-walled portion. And a separation step of separating the movable portion into a fixed portion elastically supported by the thin portion.

Thirdly, in order to elastically support the sample holding portion which is capable of displacing in a predetermined direction while holding the sample, the sample holding portion faces in a direction substantially coincident with the displacement direction of the sample holding portion. And a fixing unit that supports the sample holding unit via the supporting mechanism, and a driving unit for displacing the sample holding unit in a predetermined direction. A table device and a damping member formed by filling and hardening a gel-like material in which solid fine particles are dispersed in a gap where the sample holding unit and the fixing unit supporting the sample holding unit face each other. The above table device.

Fourth, a movable member that can be displaced in a predetermined direction, at least a pair of displacement generating members that can be displaced in a direction substantially perpendicular to the displacement direction of the movable member, and the displacement of the displacement generating member can be moved by the movable member. A positioning device comprising at least a pair of lever members that are transmitted to a member and a fixed member that holds the displaceable member and integrally supports the movable member and the lever member, and the lever. The member enlarges or reduces the displacement amount of the displacement generating means and transmits the displacement amount to the movable member.

Fifth, from a sample holder for holding a sample, a movable portion for holding the sample holder so that it can be displaced in a predetermined direction, and a fixed portion for elastically supporting the movable portion via a support mechanism. And a movable member of the positioning device according to claim 6 connected to the movable portion of the movable device, and the fixed member of the positioning device connected to the fixed portion of the movable device. From a table device that is a feature, a sample holder that holds a sample, a movable portion that holds the sample holder so that it can be displaced in a predetermined direction, and a fixed portion that elastically supports the movable portion through a support mechanism. A plurality of movable means, and for each of the plurality of movable means, the movable member of the positioning device according to claim 6 is connected to the movable portion, and the fixed portion of the positioning device is connected to each of the fixed portions. A table apparatus formed by connecting the members, the table apparatus characterized by having an adjustable control means the amount of displacement of the movable member independently of the positioning device.

[0022]

According to the movable device of the present invention, the movable portion that can be displaced in the predetermined direction, the support mechanism that elastically supports the movable portion, and the fixed portion that supports the movable portion via the support mechanism. Since and are integrally molded from a single member, it is possible to configure a movable device that does not require assembly by mechanical fastening and that can easily maintain a minute displacement of the movable portion with high accuracy. In addition, since the mechanical system has very few resonance points, hysteresis, rattling, and the like derived from the mechanically fastened portions such as the support mechanism, there is almost no nonlinearity of the mechanical system, and the response characteristic of displacement of the movable part is improved.

Further, by using the movable device according to the present invention, a table device having a minute displacement mechanism can be constructed, and the weight of the movable portion including the sample can be significantly reduced as compared with the case where the displacement mechanism is provided on the stage. , The response characteristic of the displacement of the sample is remarkably improved. Further, since the size of the displacement mechanism can be made smaller than that when the displacement mechanism is provided on the stage, a compact table device can be obtained.

Further, in the movable device according to the present invention, a gel-like material in which solid fine particles are dispersed is filled in a gap where the movable portion and the fixed portion are opposed to each other and hardened so that the gel is generated when the movable portion is displaced. The shape body is deformed, and the solid fine particles contained therein come into contact with each other and rub against each other, whereby the vibration energy of the movable portion is attenuated, and as a result, sufficient damping is given to the movement of the movable portion. Since energy is absorbed by the friction of solids, the amount of energy absorbed increases as the speed during friction increases. That is, the higher the frequency of motion, the greater the damping effect, and thus the damping effect becomes less effective for low-frequency motion with a large displacement amount. Therefore, it is possible to significantly reduce the peak of the mechanical resonance point in the high frequency range while suppressing the reduction of the entire stroke.

Further, in the table device constituted by the movable device in which the gel-like material in which the solid fine particles are dispersed is filled and hardened, the resonance occurs even when the position of the movable part is controlled by the closed loop. Since the peak of the frequency is small, the time constant of the integrator inserted in the control system can be made small, and the decrease in the gain in the high frequency range is small. Therefore, the response frequency of the displacement in the autofocus etc. can be increased.

On the other hand, according to the positioning device of the present invention, since the displacement direction of the displacement generating means and the predetermined displacement direction of the movable member are different, when the length of the displacement generating means is increased in order to realize a large displacement. However, the dimension of the positioning device in the predetermined displacement direction does not become large. Therefore, the positioning device can be made compact in the predetermined displacement direction of the movable member.

By providing at least one pair of the displacement generating means and the lever member, it is possible to increase or decrease the displacement amount of the displacement generating means when transmitting the displacement force of the displacement generating means to the movable member. ,push·
Pull drive can be performed. This makes it possible to improve the response of the displacement and at the same time improve the nonlinearity of the displacement.

Further, by using the positioning device according to the present invention, it is possible to construct a table device capable of high-speed response and having improved non-linearity of displacement. Further, in a table device using a plurality of positioning devices, by adopting a control method in which the amount of displacement of the movable portion of each positioning device is changed independently, not only the displacement in the predetermined direction of the displaced portion of the table device, The posture can be controlled.

[0029]

Embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows an embodiment in which the movable device and the table device according to the present invention are applied to an optical device for inspecting a substrate such as a mask or a reticle used when manufacturing a semiconductor device such as an LSI. It is a disassembled perspective view which shows an outline.

In this embodiment, the substrate 5 is placed on the optical axis 9 of the optical system 10.
Substrate holding portion 3 that holds the substrate holding portion 3 so as to be displaceable in the direction 17 (Z direction), a support mechanism 11 that is provided to elastically support the substrate holding portion 3 so that the substrate holding portion 3 can be displaced, and the support mechanism 11. Fixing part 1 for supporting the substrate holding part 3 via
A table device in which positioning devices 4a and 4b for displacing the substrate holding portion 3 in the Z direction are connected to a movable device 2 composed of 5 is mounted on the stage 1 in a detachable and replaceable state via a vacuum chuck 6. It is installed in. Here, while mounting the table device on the stage 1, the optical system 10
Direction (X direction) 18 and direction 19 (Y
A guide and drive system (not shown) are configured so as to be two-dimensionally movable in any direction) so that the inspection surface of the substrate 5 can be inspected all over. When a transmission type optical system 10 is used, the stage 1 is provided with a hollow hole 7. The table device and stage 1
In addition to the vacuum chuck 6, a mechanical clamp mechanism, an electromagnet, or the like may be used for connection with. As the position detecting device, in addition to the optical focus sensors 13a and 13b,
A capacitance type gap sensor or the like may be used.

The positioning of the substrate 5 in the Z direction is performed via the controller 51 based on the signals of the optical focus sensors 13a and 13b for observing the focus state of the optical system 10 with respect to the substrate 5 and detecting the position. Positioning devices 4a, 4
This is performed by controlling the drive of b. That is, the focus sensor 13a, 13b detects the position of the observing surface of the substrate 5, and based on the output signal 52 of the output signal 52, a drive command value that causes the observing surface of the substrate 5 to substantially coincide with the focus position of the optical system 10 is output to the controller 51. Then, the actuators 12a and 12b of the positioning devices 4a and 4b are driven via the conducting wires 53a and 53b to displace the substrate holding portion 3 of the movable device 2 in the Z direction. Here, a positioning device 4 for displacing the substrate holding part 3
a and 4b are attached to both side surfaces of the movable device 2.
The actuators 12a of the positioning devices 4a and 4b,
12 b is connected to the substrate holding part 3 which is a movable part of the movable device 2. Therefore, the two actuators 12a and 12b are displaced in synchronization with the drive command of the control device 51, respectively, so that the substrate 5 held on the substrate holding portion 3 is kept substantially vertical to the optical axis 9. Is displaced in the Z direction.

The movable device 2 described above is provided with a plurality of types of substrates 5.
In order to cope with the above, a plurality of dedicated types are prepared for each substrate 5, and when the type of the substrate 5 to be inspected is changed, the movable device 2 may be replaced with an appropriate one. good.

The above description has been given mainly by taking an example of a substrate inspection device as an optical device, but a microscope, an exposure device,
The same applies to a drawing device and the like. Further, here, the optical system is premised on a general optical system using a glass lens or the like, but it is also applicable to an electron optical system using an electronic lens or the like. X that does not require imaging
The same can be applied to the linear optical system. The same applies to the following description, and it should be clearly stated that the table device of the present invention is not limited by the type of its optical system.

FIG. 2 is a perspective view showing details of the movable device according to the present invention shown in FIG. Here, FIG. 2 shows a state in which the movable device 2 is fixed to the stage 1.
The substrate 5 is fixed to the substrate holding portion 3 (hatched portion) by a plurality of substrate fixing devices 16 such as a vacuum chuck. The substrate holding part 3 is elastically supported by the fixed part 15 of the movable device 2 by the support mechanism 11. The fixed portion 15 is fixed on the stage 1 at a connection portion (not shown) provided on the stage 1. The support mechanism 11 has a parallel link structure in which the substrate holder 3 is displaced in the specific direction 17 without changing its posture. With such a structure, the substrate 5 can be displaced in the direction 17 with respect to the stage 1, and the observation surface of the substrate 5 can be held within the depth of focus of the optical system (not shown). There is. Here, the movable device 2
The fixing portion 15, the substrate holding portion 3, and the support mechanism 11 are integrally formed from a single member.

The support mechanism 11 is constituted by a parallel link mechanism including links 21, 22 and elastic hinges 23, 24, 25, 26 by providing a recess 20 on the side surface of the movable device 2. Since this parallel link mechanism is connected to the substrate holding part 3 and the fixing part 15 without using mechanical fastening means, hysteresis caused by the mechanical fastening means does not occur. Further, since the movable device 2 and the like are composed of a single member, it is not necessary to assemble. Therefore,
Since the accuracy during manufacturing is maintained without being lowered, the manufacturing accuracy and the positioning accuracy of the movable device 2 and the like can be easily kept high.

FIG. 3 is a perspective view showing details of a modification of the support mechanism of the movable device according to the present invention shown in FIG. The support mechanism 30 is a parallel leaf spring mechanism including thin leaf springs 31 and 32. Also in this case, the support mechanism 3
Reference numeral 0 has an integral structure with the substrate holding portion 3 and the fixed portion 15 of the movable device. Other structures, operations, characteristics, etc. are the same as those of the movable device shown in FIG. 2 described above.

FIG. 4 is a plan view showing the movable device shown in FIGS. 2 and 3. Here, a method for manufacturing the movable device 2 will be described. First, the hole 14 for mounting the substrate 5 is processed by wire cut electric discharge machining. In addition,
In this embodiment, the substrate 5 is assumed to be rectangular, but even if the substrate 5 is circular, it can be easily dealt with by making the inner hole 14 of the substrate holding portion 3 circular. In addition, when the sample is not a substrate-like one and only needs to be placed on the substrate holding part 3, it is not necessary to provide the inner hole 14, and the substrate holding part 3 can be used as a sample holding table. good. Next, in order to form a thin portion that constitutes the support mechanism 41 such as the parallel link mechanism or the leaf spring mechanism, the recesses 20 and 33 as shown in FIGS. 2 and 3 are processed by cutting. Finally, the substrate holding part 3 and the fixing part 15
The movable device 2 is manufactured by processing the groove 45 for separating the electric field by wire-cut electric discharge machining. By the method as described above, the movable device 2 including the substrate holding part 3, the support mechanism 41, and the fixed part 15 is integrally molded from a single member.

FIG. 5 is an exploded perspective view showing details of the table device according to the present invention shown in FIG. The positioning device 4a includes a connecting portion 83a near both ends thereof and a movable device 2
It is attached to the movable device 2 by connecting to the side surface 82a of the one fixed portion 15. The other positioning device 4b similarly positions the positioning device 4 of the fixed portion 15 of the movable device 2.
The side surface 82b opposite to a and the connecting portion 8 of the positioning device 4b
It is attached by connecting with 3b.

The positioning devices 4a and 4b are provided with actuators 12a and 12b at their central portions, respectively. The details of the actuators 12a and 12b will be described later. Here, the actuator 12a of the positioning device 4a
Is connected to one side surface 81a of the substrate holder 3.
Similarly, the actuator 12b of the positioning device 4b is connected to the other side surface 81b of the substrate holder 3.
With such a configuration, the positioning device 4a,
Since 4b is attached to the side surface of the movable device 2, it is possible to provide a compact table device in which the height of the movable device 2 does not increase, and the drive characteristics of the substrate holding unit 3 are set for each movable device 2. Can be adjusted to Therefore, if the drive characteristics of the substrate holding portions 3 of the respective movable devices 2 are adjusted in the same manner, even if the movable device 2 is replaced, it can be driven by the common driving method. This makes it possible to easily control different types of movable devices 2 by switching only the lead wires in common with the drive circuit, the control device, and the like.

Next, the operation of the positioning device will be described. For simplification, the subscripts of the reference numerals indicating the respective parts of the device are omitted. Actuator 1 of positioning device 4
2 is driven by conductors 85, 86 by a control device (not shown) and is displaced in the direction 17 with respect to the connecting portion 83 of the positioning device 4. At this time, since the actuator 12 is connected to the substrate holding portion 3 and the connecting portion 83 is connected to the fixed portion 15 of the movable device 2, the substrate holding portion 3 ends up in the direction 17 with respect to the fixed portion 15 of the movable device 2. Is displaced to. Here, by synchronizing the displacements of the actuators 12a and 12b, the substrate holding part 3 on which the substrate 5 is mounted can be displaced in the direction 17 without changing the posture.

FIG. 6 is a diagram showing details of the actuator of the positioning device of the table device shown in FIG. The movable part 93 is integrally formed in the middle part of the positioning device, and is connected to the fixed part 92 of the positioning device by a leaf spring 97. At the same time, one end of the piezoelectric element 91 is moved to the movable portion 93,
The other end is connected to the fixing portion 92 of the positioning device. By driving the piezoelectric element 91 via the conductive wires 95 and 96, the movable portion 93 is displaced in the direction 99 with respect to the fixed portion 92. The movable part 93 is connected to a substrate holding part (not shown) by a connecting part 98. Since this actuator is integrally molded without using any mechanical fastening means, it is possible to perform highly accurate displacement with little hysteresis in operation.

In this example, it is assumed that a laminated piezoelectric element is used, but a bulk piezoelectric element may be used as long as the displacement amount can be satisfied. Further, instead of the piezoelectric element, another solid deformation element such as a magnetostrictive element may be used. This also applies to the following description.

FIG. 7 is a perspective view showing a table device provided with another positioning device. Mobile device 2 shown in FIG.
Is configured such that the positioning device 50a, 50b for driving the substrate holding part 3 is attached to a thin part of the movable device 2 shown in FIG. It is to be noted that a part of the movable device 2 is made thin because the positioning devices 50a and 50b.
This is for avoiding an increase in the thickness of the movable device 2 due to the attachment of the. In such a configuration, by synchronously driving the positioning devices 50a and 50b,
The substrate holding portion 3 can be displaced in the direction 17 without changing the posture. Other features are similar to those of the movable device shown in FIG.

FIG. 8 is a diagram showing the details of the positioning device of the table device shown in FIG. A piezoelectric element 61 is used in the positioning device 60, and the piezoelectric element 61 expands and contracts in the longitudinal direction by applying a voltage to the conductive wires 65 and 66. One end of the piezoelectric element 61 is connected to the fixed portion 62 connected to the fixed portion 15 of the movable device 2, and the other end is connected to the movable lever portion 64. The movable lever 64 has an elastic hinge 6.
3 is used as a fulcrum to displace the connecting portion 67 connected to the substrate holding portion 3 to drive the substrate holding portion 3 in the direction 69. By using such a lever mechanism, even when the displacement amount of the piezoelectric element 61 is small, the displacement can be enlarged and transmitted so as to secure a desired displacement amount.

Further, since the positioning device 60 is composed of a single member without using any mechanical fastening means, it is possible to perform highly accurate displacement without causing rattling or hysteresis.

FIG. 9 is a diagram showing details of another example of the positioning device of the table device shown in FIG. In this positioning device 70, the displacement direction of the piezoelectric element 71 and the displacement direction 79 of the substrate holding portion 3 are the same. Further, with such a configuration, it is easy to embed the positioning device 70 in the fixed portion 15 of the movable device 2.
The increase in thickness due to the mounting of the driving means 70 can be reduced. The operation and characteristics of the drive means 70 are almost the same as those of the positioning device shown in FIG. 8 except the matters described here.

FIG. 10 is a perspective view showing a table device provided with a positioning device on the stage.

The movable device 2 is fixed on the stage 1 by a vacuum chuck 6 which is a connecting portion provided on the stage 1 by itself. Displacement transmission parts 102a and 102b are attached to the side surface of the substrate holding part 3 of the movable device 2, and positioning devices 101a and 101b are provided on the stage 1 at positions connectable to the displacement transmission parts 102a and 102b. There is. The displacement transmitters 102a and 102b are used for the positioning device 101 when the movable device 2 is set on the stage 1.
The displacement of the positioning device is transmitted to the substrate holding portion 3 by contacting the supporting portions (not shown) of a and 101b. Here, by driving the positioning devices 101a and 101b in the direction 109 in synchronization with each other, the substrate holding unit 3 can be displaced in the direction 109 without changing the posture.

FIG. 11 is a diagram showing the details of the positioning device shown in FIG. In the positioning device 110 (structure other than the hatched portion), the fixed portion 111 is connected to the stage 1. Moreover, one end of the piezoelectric element 113 is connected to the fixed portion 111, and the other end is connected to the movable lever portion 114. A support portion 115 is provided at the tip of the movable lever portion 114, and clamps the displacement transmission portion 112 provided on the side surface of the substrate holding portion 3 when the movable device 2 is connected to the stage 1. It should be noted that the displacement transmitter 112 of the substrate holder is 11
It is set by a route such as 8. The movable lever portion 114 operates by using the elastic hinge 116 as a fulcrum by driving the piezoelectric element 113 via the conductive wires 117 and 118, and expands the displacement of the piezoelectric element 113 to move the support portion 115 of the movable lever portion 114 in the direction 119. Shift to. And the displacement transmission section 1
The substrate holding part 3 is displaced in the direction 119 via 12.

FIG. 12 is a perspective view showing a table device driven by a non-contact type positioning device. Mobile device 2
Is fixed on the stage 1 by a vacuum chuck 6 which is a connecting portion provided on the stage 1 without the positioning device. Electromagnets 121a and 121b are installed on the stage 1 at positions such that the magnetic pole surface faces the bottom surface of the substrate holder 3. At this time, if the substrate holder 3 is made of a ferromagnetic material, the substrate holder 3 can be driven in a non-contact manner by changing the exciting current of the electromagnets 121a and 121b. In this case, since there is no part in contact with the movable part, there is almost no dust generation and an operation with less rattling is possible.

FIG. 13 is a diagram showing details of the positioning device of the table device shown in FIG. An electromagnet including a yoke 131 and a winding 135 is embedded in the stage 1 so that the magnetic pole surface 133 faces the bottom surface 132 of the substrate holding portion 3. In the set state, the substrate holding portion 3 of the movable device has a gap 134 between the bottom surface 132 and the magnetic pole surface 133, and is supported by the leaf spring 136. Here, the lead wires 137 and 138 are energized to excite the winding 135, so that the board holding portion 3 and the yoke 13 are excited.
1, the magnetic flux 130 is formed, and the bottom surface 132 of the substrate holder 3 is
A magnetic attraction force is generated between the magnetic pole surface 133 and the magnetic pole surface 133. Then, the substrate holding unit 3 is displaced in the direction 129 to a position where the bias force of the leaf spring 137 and the attraction force of the electromagnet are balanced. Therefore, the amount of displacement of the substrate holder 3 can be controlled by changing the exciting current.

The movable device according to the present invention, the manufacturing method thereof, and the table device to which the movable device is applied have been described above.

Next, the positioning device for the table device according to the present invention will be examined in more detail.

The table device according to the present invention mainly employs a positioning device having an actuator using an elastic support mechanism such as a piezoelectric element and a leaf spring as described with reference to FIG. However, there are problems that the piezoelectric element has a non-linear displacement characteristic and that the piezoelectric element itself must always be preloaded because the direction of the force that can be generated is single. Further, the displacement amount of the substrate holding unit, which is the movable unit, is limited by the length of the piezoelectric element. Therefore, when a relatively large displacement amount is required, the longitudinal dimension of the piezoelectric element must be increased. In addition, the device may become large. Therefore, the present invention provides a compact positioning device that can be improved further to improve the high-speed response and the linearity of displacement, increase the displacement amount, and further be suitable for downsizing of the device.

FIG. 14 is a plan view showing a first embodiment of the positioning device of the present invention.

In this positioning device 141, the groove portion 1 is formed on the plate-shaped fixing portion 142 by wire-cut electric discharge machining or the like.
By processing 40a and 140b, the movable part 14
3, a set of lever portions 144a and 144b, and a set of piezoelectric element portions (portions where the piezoelectric elements 145a and 145b are arranged in FIG. 1) are formed.

The two lever portions 144a and 144b are fixed to the fixed portion 14 by elastic hinges 147a and 147b, respectively.
Connected to 2. In addition, the lever portions 144a and 144b
Elastic hinges 146a, 1
Piezoelectric element connecting portions 149a and 149b are formed via 46b. In addition, the piezoelectric element connecting portions 149a, 1
Reference numeral 49b is provided in order to prevent a shearing force or a bending moment from being applied to the piezoelectric elements 145a, 145b during operation. The same effect can be obtained even with a configuration in which the lever portion is driven.

On the other hand, the lever portions 144a and 144b each have an elastic hinge 148 at the other end (point of action).
is connected to the movable portion 143 via a and 148b,
The movable portion 143 is connected to a driven body (for example, a substrate holding portion) not shown, and positions the driven body.

Further, the lever portions 144a and 144b have an L-shaped structure which is bent by 90 ° at the elastic hinges 147a and 147b which are fulcrums. As a result, the displacement directions of the piezoelectric elements 145a and 145b are converted by 90 °. In addition, in FIG. 14, the lever portions 144a and 144b are L-shaped.
Although it is V-shaped, the lever portion may have any shape as long as it is functionally the same.

The piezoelectric elements 145a and 145b are presumed to be laminated type piezoelectric elements (electrostrictive elements), but similar effects can be obtained with other solid deformation elements such as bulk piezoelectric elements or magnetostrictive elements.

Next, the operation of this positioning device will be described in detail with reference to schematic diagrams. FIG. 15 is a diagram schematically showing the mechanism of the positioning device shown in FIG. In the figure, parts having the same functions as those shown in FIG. 14 are designated by the same reference numerals to omit redundant description. FIG. 16 is an enlarged view showing the displacement of each member when a minute displacement occurs in the schematic diagram shown in FIG.

In FIG. 15, 146a, 146b, 147
Reference numerals a, 147b, 148a and 148b represent rotary bearings each using an elastic hinge, and in this portion, rotation is possible around an axis perpendicular to the paper surface.

Displacement of the piezoelectric element 145a (direction 152)
Is transmitted to the lever portion 144a via the elastic hinge 146a. In this case, the elastic hinge 146a causes the lever portion 144 to move.
It becomes the focus point of a. The lever portion 144a has an elastic hinge 147a.
The elastic hinge 14 is connected to the fixed portion 142 via
7a serves as a fulcrum of the lever portion 144a. The lever part 144a is connected to the movable part 143 via an elastic hinge 148a, and this elastic hinge 148a serves as a point of action to displace the movable part 143 in the direction 153.

Here, the displacement magnification rate of the lever portion 144a is
It is expressed as l2 / l1 using the force point-fulcrum distance l1 and the action point-fulcrum distance l2 of the lever portion. By changing l2, the movable part can be moved without changing the dimension of the positioning device 141 in the direction 153. The maximum displacement amount of 143 in the 21 direction can be changed. That is, by appropriately selecting l1 and l2, even if the length of the piezoelectric element 145a to be used is fixed, the movable portion 14 of the positioning device 141 is fixed.
Since it is possible to generate a displacement amount exceeding the maximum displacement amount of the piezoelectric element 145a in the movable portion 143 without increasing the dimension of the piezoelectric element 145 in the predetermined displacement direction, it is possible to realize a very compact positioning device.

The other piezoelectric element 145b is placed at a position symmetrical with respect to the center 151 of the movable portion 143 with respect to the piezoelectric element 145a. The lever part 144b connected to the piezoelectric element 145b is also formed at a position symmetrical with respect to the center 151 of the movable part 143 with respect to the lever part 144a, and is an elastic hinge 148a which is a connection part of the movable part 143 with the lever part 144a. Is connected to the movable portion 143 by an elastic hinge 148b located at a position symmetrical with respect to the center 151 of the movable portion. With such a configuration, the driving force applied to the movable portion 143 is surely the center 15 of the movable portion 143.
1, the rotation moment acts on the movable portion 143, and the rotation of the movable portion 143 can be minimized.

The pair of piezoelectric elements 145a and 145b are shown in FIG.
In the initial state shown in FIG. 5, the voltages are applied so that both of them are displaced by about half the maximum displacement amount, and they are in a state of pressing each other.

Next, the actual operation will be described with reference to FIG. Here, the case where the movable portion 143 is displaced in the direction 162 will be described.

First, the piezoelectric element 145b extends in the direction 161 by a certain amount. This is done by increasing the applied voltage from the initial state shown in FIG. This displacement is transmitted to the lever portion 144b via the elastic hinge 146b. As a result, the lever portion 144b rotates about the elastic hinge 147b as a fulcrum, and the position of the elastic hinge 148b is changed to the piezoelectric element 14b.
Direction 162 by lever ratio (l2 / l1) times displacement of 5b
To move the movable portion 143 in the direction 162. At the same time, the piezoelectric element 145a contracts by the same amount as the expansion of the piezoelectric element 145b. This is done by lowering the applied voltage from the initial state shown in FIG. This allows
The elastic hinge 146a is displaced in the direction 160 to move the lever 144
The displacement is transmitted to a. Then, the lever portion 144a rotates about the elastic hinge 147a as a fulcrum, and the elastic hinge 148a is rotated.
a is displaced in the direction 162 by a lever ratio (l2 / l1) times the displacement amount of the piezoelectric element 145a, and the displacement of the movable portion 143 is substantially the same as the displacement by the piezoelectric element 145b.

By driving in this way, the movable part 1
When 43 is displaced in the direction 162, the piezoelectric element 145
b is extended to generate a driving force, and the movable portion 143 moves in the direction 162.
When the displacement is in the opposite direction, the piezoelectric element 145a expands to generate a driving force, which is a push-pull drive, and even if the displacement frequency of the movable portion 143 is high, it is not possible to follow the movement, and at the same time, Since the pair of piezoelectric elements cancel the non-linearity of the mutual displacement to some extent, the non-linearity of the displacement characteristic of the movable portion 143 is improved.

In the above embodiments, the piezoelectric element 145
Although a and 145b are directly fixed to the fixed portion 142, a preload adjusting means is used to drive the piezoelectric elements 145a and 145b in a state in which a compressive force is applied and a preload is applied.
It may be configured to be provided between the piezoelectric element 145a and the piezoelectric element 145b. At this time, it is possible to finely adjust the position of the movable portion 3 in the initial state by making each preload adjusting means independently adjustable. Although not shown here as the preload adjusting means, a means for adjusting the distance between the piezoelectric element and the fixed portion using an eccentric shaft, a means for adjusting the distance between the piezoelectric element and the fixed portion using a push screw, and the like can be considered. .

FIG. 17 is a schematic diagram showing the state of displacement of each member when the displacement of the movable part is close to the maximum in the positioning device shown in FIG.

In this state, the lever portions 144a, 144b
Is large, the displacement in the direction 152 of the elastic hinges 148a and 148b, which are the connecting portions with the movable portion 143, becomes so large that it cannot be ignored, and the movable portion 143 is displaced in the rotational direction 170. In order to prevent this as much as possible, in the second embodiment of the positioning apparatus of the present invention shown in FIG. 18, the movable portion 143 is provided with the parallel leaf springs 180a, 180.
By supporting with b, 181a, 181b, the rotation of the movable part 143 is suppressed to the minimum. The leaf springs 180a, 180b, 181a, 181b can be easily formed by forming a groove portion in the fixing portion 142 like other members. The operation of the positioning device 141 shown in FIG. 18 is exactly the same as that of the first embodiment shown in FIG.

FIG. 19 is an exploded perspective view showing a third embodiment of the positioning device of the present invention.

This positioning device is a positioning device constructed by connecting two positioning devices 141 shown in FIG. As described above, in the positioning device shown in FIG. 14, when a large displacement is performed, the rotational displacement of the movable portion 143 is not negligible. Therefore, another positioning device 191 having the same structure is used, and the two positioning devices 141 and 191 are connected so that the rotational displacement directions of the movable portions 143 and 193 of each positioning device are opposite.

The positioning device 191 is the positioning device 14
Although the structure is exactly the same as the No. 1, the positioning device 141 is set to be just turned over. Here, the fixed part 1
42 and the fixed portion 192 are connected to each other, and the movable portion 143 and the movable portion 1 are connected.
By connecting 93 and displacing the movable portions 143 and 193 by the same amount in the same direction, the movable portions 143 and 193 are displaced in a predetermined displacement direction.

When the positioning device is largely displaced in the direction 199, the movable portion 143 of the positioning device 141 is rotationally displaced in the direction 197, but at the same time, the positioning device 191 is moved.
The movable portion 193 of is rotated and displaced in the direction 198. Therefore, the rotational displacements of the movable portion 143 and the movable portion 193 cancel each other out, and the rotational displacement of the movable portion after connection hardly occurs.

In FIG. 19, the positioning device 191 also incorporates the piezoelectric elements 195a and 195b.
If the purpose of offsetting the rotational displacement of the movable part is emphasized, the lever part 144 is not incorporated without incorporating the piezoelectric elements 145a and 145b.
The same effect can be obtained with only a and 144b and the movable portion 143.

Hereinafter, a table device using the positioning device according to the present invention described above will be described. The table device described here is mainly used for an autofocus table of a device used for manufacturing and inspecting a semiconductor device such as an LSI.

FIG. 20 is an exploded perspective view showing a first embodiment of the table device using the positioning device according to the present invention. This table device includes a positioning device 141, a movable device 201, and a sample table 205. Mobile device 2
01 is a parallel link mechanism 204 using an elastic hinge.
a and 204b are integrally formed, and the fixed portions 202a and 202b and the displacement portion 203 are connected via these. The fixed portions 202a and 202b are fixed to a base portion (not shown), and the displacement portion 203 is guided by parallel link mechanisms 204a and 204b and is movable in parallel with the base portion in a direction 209. Sample table 20
5 is fixed to the displacement portion 203 and displaces a sample (not shown) in the direction 209.

The positioning device 141 is the same as that shown in FIG.
This is an application of the positioning device shown in FIG. In this positioning device 141, the fixed portion 142 is attached to the movable device 201.
The movable portion 143 is fixed to the side surfaces of the fixed portions 202a and 202b, and the movable portion 143 is fixed to the displacement portion 203 of the movable device 201. In the figure, the same parts as those of the positioning device shown in FIG. 14 are designated by the same reference numerals, and a duplicate description will be omitted.

With this structure, the displacement of the movable portion 143 of the positioning device 141 is transmitted to the displacement portion 203 of the movable device 201, and the sample table 205 is moved in the direction 209.
It enables highly accurate and high-speed response and can be displaced with good linearity. Further, the positioning device 141 is fixed to the side surface of the movable device 201, and the positioning device 141 moves in the predetermined displacement direction 20.
9 is very compact, the size of the table device in the predetermined displacement direction 209 is small, and it is possible to construct a compact table device. Therefore, by using this table device as a table device such as an autofocus mechanism, it is very compact and highly accurate.
It is possible to build an autofocus mechanism that can respond at high speed.

FIG. 21 is an exploded perspective view showing a second embodiment of the table device using the positioning device according to the present invention.

This table device is the first one shown in FIG.
The table device of the embodiment is combined with two table devices.

The movable devices 210 and 211 have the same structure as the movable device 201 shown in FIG. 19, and the respective fixing portions 212a, 212b, 215a and 215b are fixed on a stage (not shown), and the side surfaces thereof Positioning devices 141 are fixed to each. Each positioning device 141 is set such that each member is in the same state as the other positioning device. Then, the sample stage 219 and the movable portion 14 of the positioning device are arranged on the displaced portion 213 of the movable device 210 and the displaced portion 218 of the movable device 211.
3 is fixed.

According to this structure, the sample base 219 can be moved in the direction 209 by making the displacement amounts of the movable parts 143 of the two positioning devices 141 the same.

In such a table device, it is easier to keep the posture of the sample table 219 constant compared to the table device shown in FIG. 20, and a sample having a larger area can be displaced with high accuracy. Other effects and operations are exactly the same as those of the table device shown in FIG.

FIG. 22 is an exploded perspective view showing a third embodiment of the table device using the positioning device according to the present invention.

This table device is the first one shown in FIG.
The table device of the embodiment is combined with three tables.

The movable devices 221, 226 and 231 have the same structure as the movable device 201 shown in FIG. 20, and the fixed parts 222a, 222b, 227a, 227b,
232a and 232b are fixed on a stage (not shown), and a positioning device 141 is fixed to each side surface thereof. The sample stage 160 and the movable portion 143 of each positioning device 141 are fixed to the displacement portion 223 of the movable device 221, the displacement portion 228 of the movable device 226, and the displacement portion 233 of the movable device 231.

In such a structure, by making the displacement amounts of the movable parts 143 of the three positioning devices 141 the same, the sample stage 220 can be moved in the direction 209.

In such a table device, as compared with the table device shown in FIGS. 20 and 21, since the sample table is supported at three points, it is easier to keep the sample table in a constant posture. And, it can be stably supported. Therefore, a sample having a larger area can be displaced with high accuracy. For other effects and operations, see FIG.
It is exactly the same as the table device shown in FIG.

FIG. 23 is an exploded perspective view showing an embodiment of the table device to which the movable device according to the present invention and the positioning device according to the present invention are applied.

Two positioning devices 141 are fixed to the side surface of the fixed portion 15a of the movable device 2, and the movable portion 143 of each positioning device 141 is fixed to the side surface of the substrate holding portion 3 which is the displaced portion of the movable device 2. .

By using the movable device 2 according to the present invention, the number of parts of the table device is reduced, and since there is no mechanical part to be assembled, it is easy to control the accuracy of the movable device, and further, the rigidity due to the fastening of members and the like. Can be prevented and the occurrence of hysteresis can be prevented. Further, since the movable device has an integral structure, the table device can be easily attached and detached on the stage. Other effects and operations are similar to those of the table device shown in FIG.

FIG. 24 is an exploded perspective view showing a modified example of the table device shown in FIG.

In this table device, the movable device 2 is shown in FIG.
The structure is exactly the same as that of the table device shown in FIG. 3, but the mounting states of the positioning devices 141 and 241 are different.

Positioning device 141 and positioning device 241
Has the same basic structure as the piezoelectric element 145.
a, 145b and 245a, 245b, lever portion 144
a, 144b and 244a, 244b, and the movable part 14
Positioning device 141 having two mounting states with 3, 243
And 241 are different. In short, the positioning device 241 is arranged so that the positioning device 141 is turned over and attached. Even in this case, the operation of the table device is almost the same as that of the table device shown in FIG.
Movable parts 143, 2 of the two positioning devices 141, 241
A voltage may be applied to the four piezoelectric elements 145a, 145b, 245a, 245b so that the 43 is displaced in the same direction by the same amount.

With such a configuration, FIG.
As described in the description of the positioning device shown in FIG. 3, the slight rotational motion generated in the movable part is defined as the directions of the rotational motions of the movable parts 143 and 243 of the two positioning devices in the directions 248 and 249, which are opposite to each other. Offset by setting the direction
It is possible to minimize the rotational displacement of the substrate holding portion 3 which is the displacement portion.

In the embodiment of the table device using the positioning device according to the present invention described above, the positioning device shown in FIG. 14 is used.
It goes without saying that the same effect can be obtained by using the positioning device shown in FIG.

Next, the control method of the positioning device and the table device described above will be described mainly for the table device shown in FIG.

FIG. 25 is a block diagram showing the configuration of the control system of the table device of the present invention.

Portions 141 and 24 shown by broken lines in FIG.
1 shows two positioning devices 141 and 241 of the table device shown in FIG. Similarly, the piezoelectric elements correspond to the piezoelectric elements having the same numbers in FIG.

In this control device, the displacement command 250 is first input to the push-pull signal generating means 251. The push-pull signal generating means 251 generates a voltage command 255 having the same phase as the input signal 254 and a voltage command 256 having the opposite phase to the input signal 254. These two voltage commands 255, 25
6 are input to the voltage amplifying means 252, and the voltage is independently amplified. At this time, in order to generate a displacement of about half the maximum displacement of the piezoelectric element in the initial state, the bias generating unit 253 causes the voltage amplifying unit 2 to operate.
52 with the same bias voltage 25
Add 9 in advance. Then, after applying the bias voltage 259, the amplified piezoelectric element drive voltages 257 and 258 are output to output two sets of piezoelectric elements 145a, 145b and 245.
a, 245b are driven. In this case, the displacement amounts of the piezoelectric elements in the two positioning devices 141 and 241 become substantially the same, and the sample table of the table device moves in parallel. Even if the bias generating means 253 is included in the voltage amplifying means 252, the same effect can be obtained.

FIG. 26 is a block diagram showing the configuration of a different control system of the table device of the present invention.

In this control system, two positioning devices 14
The displacement amounts of the movable parts 1 and 241 can take different values. In this case, not only the positioning of the sample stage of the table device in the predetermined displacement direction but also the inclination of the sample stage in a specific direction can be controlled.

As a command input of this control system, a predetermined direction displacement amount (parallel displacement amount) 254 and sample stage tilt information 261 are input to the command distribution determining means 260. The command distribution determining means 260 determines the distribution of the displacement amounts of the two positioning devices 1 and 91 based on the predetermined direction displacement amount 254 and the tilt information 261 and the displacement commands 262a and 26 of the respective positioning devices.
2b is push-pull signal generating means 251a, 251b
Output to. The subsequent steps are the same as in the case of the control system shown in FIG.

Incidentally, here, as shown in FIG.
Although it is premised on a table device using three positioning devices, a table device using three positioning devices as shown in FIG. 22 can be used not only in the predetermined displacement direction of the sample table if the control system is similarly configured. The tilt around the two axes can also be controlled.

The positioning device according to the present invention and the table device using the same have been described above.

Next, means for solving the problem of vibration occurring in the table device according to the present invention will be described.

For example, in the table device using the movable device 2 according to the present invention shown in FIG. 2, the substrate holding part 3 and the fixed part 15 are connected only by an elastic body such as an elastic hinge. Becomes a simple spring-mass system, and there are almost no elements that dampen the movement of the substrate holder 3. Therefore, the frequency response when the substrate holder 3 is driven has a large peak 27 as indicated by the solid line 270 in FIG.
1 occurs. The peak 271 shows the resonance frequency determined by the mass of the substrate holding part 3 and the spring constant of the displacement mechanism 11, and this magnitude represents the degree of damping. In such a system with little attenuation, the peak 271 of the resonance frequency becomes very large, and the vibration of the resonance frequency easily occurs in the movement of the substrate holding unit 3. Further, when the position of the substrate 5 is detected by using the substrate position detecting means and the closed loop control for adjusting the drive amount of the substrate holding portion 3 is performed based on the information, the system oscillates and the error occurs. Easy to be stable. Therefore, in order to drive stably, an integrator having a large time constant is inserted in the control system so that the characteristics shown by the solid line 280 in FIG. 28 are obtained and the gain of the peak 281 is lowered. However, with such characteristics, the system response may be significantly impaired because the gain decreases from a considerably low frequency. In order to avoid this, measures such as putting various control compensation elements into the control system have been taken, but the effect is limited and it is not easy to design an optimum control system. Therefore, the structure of the mechanical system is devised to improve the peak of the resonance point.

FIG. 29 is a schematic diagram showing main vibration modes of the movable device according to the present invention shown in FIG. In this figure, the movable part 290 corresponding to the substrate holding part 3 is shown as the fixed part 29.
1 and springs 292a, 292b, 292c, which can be expanded and contracted only in the Z direction 295 and have substantially the same spring constant,
It is supported by 292d. This spring 292a,
292b, 292c and 292d correspond to the support mechanism 11 of the movable device 2 in FIG.

Here, the springs 292a, 292b, 292.
Since c and 292d can be expanded and contracted only in the Z direction 295, the movable portion 290 cannot perform translational movement in a direction other than the Z direction 295 which is the predetermined displacement direction. However, X-axis 29
3. It is possible to rotate around the Y axis 294. The vibration modes generated when the movable portion 290 is driven are mainly the three modes shown in FIG. Of these, the mode in which the vibration amplitude is the largest is in the mode shown in FIG. This mode has 4 springs 292
In this mode, a, 292b, 292c and 292d are all displaced in the same direction by substantially the same amount, and the movable portion 290 is translated in the Z direction 295. In FIG. 29B, two springs 292a and 292d of the four springs are displaced by substantially the same amount,
This is a mode in which the remaining springs 292b and 292c are also displaced by the same amount to rotate about the X-axis 293. FIG. 29C shows 292a and 292 of the four springs.
This is a mode in which b is displaced by the same amount, and 292c and 292d are also displaced by the same amount, and rotational movement is performed around the Y axis 294.

When the movable part 290 is displaced, a vibration in which these three modes are superposed occurs. At this time,
The amplitudes of the vibration modes of 9 (b) and 29 (c) are shown in FIG.
It is often smaller than the mode of (a), but this vibration causes a part of the movable part 290 to be displaced other than in the Z direction 295. In that case, an error may occur. Therefore, not only the vibration in the predetermined displacement direction,
It is necessary to reduce other rotational vibrations by some method. As a countermeasure against this, it is conceivable to increase the damping of the movable part in the predetermined displacement direction and thereby reduce the vibration in the rotation direction at the same time. There is also a problem that the stroke of the movable portion in the predetermined displacement direction is unnecessarily reduced.

FIG. 30 is a plan view showing an embodiment in which the movable device according to the present invention is improved. Here, in the gap 45 between the substrate holding part 3 and the fixing part 15, a gel-like material 300 in which solid fine particles are dispersed is poured and cured.
The range in which the gel-like material 300 in which the solid fine particles are dispersed is poured is not particularly limited, but considering the vibration suppressing effect, it may be filled in the groove portion where the relative displacement amount of the substrate holding portion 3 and the fixing portion 15 is large. preferable. However, for example, with respect to the target axis of the substrate holding unit 3 parallel to the Y axis 294 in the drawing,
If the filling range is asymmetrical, the damping amount is unbalanced, and the movement of the substrate holding unit 3 may deviate from the pure translational movement to generate a rotational movement component around the Y axis 294. In that case, a portion that partially displaces in the Y-axis 294 direction is formed on the substrate holding unit 3, and the movement accuracy of the substrate holding unit 3 is reduced. Therefore, it is desirable that the filling range exists symmetrically with respect to the target axis in the direction parallel to the Y axis 294 of the substrate holding unit 3.

The filling amount is determined in consideration of the degree of vibration suppression and the reduction amount of the total displacement amount. This is because the gel-like material 300 in which the solid fine particles are dispersed has a low damping ability in the low frequency range, but the entire displacement amount is slightly reduced even in the low frequency range. Therefore, the gel-like material 300 in which the solid fine particles are dispersed is filled while the total amount of displacement is controlled within the specification value.
Further, in the case of filling a plurality of places as in the case of FIG. 30, basically, the amounts filled in the respective places are made substantially the same. This makes it possible to prevent the amount of damping at each place from being the same and prevent the displacement of the substrate holder 3 from causing a rotational motion about the X-axis 293 in the drawing. However, if there is variation in the characteristics of the elastic hinge portion of the support mechanism 11 and an error occurs in the movement accuracy of the substrate holding portion 3 without filling the gel-like body 300 in which solid fine particles are dispersed, the filling amount It is also possible to correct the error in the motion accuracy by changing the.

FIG. 31 is a sectional view of the movable device AA shown in FIG.
It is sectional drawing which showed the cross section. This figure shows in detail how the gel-like material 300 in which the fine solid particles are dispersed is filled in the gap between the substrate holding part 3 and the fixing part 15.
Here, the fixed portion 15 of the movable device 2 is fixed on the stage 1. The substrate holder 3 is displaced in the Z direction 310 by a displacement mechanism (not shown). At this time, the gel-like body 300 of solid fine particles is filled in the gap between the fixed portion 15 and the substrate holding portion 3, and they are in close contact with both. As a result, when the substrate holder 3 is displaced, the gelled body 300 in which the solid fine particles are dispersed is wholly deformed, and the energy loss at that time attenuates the vibration component in the damping frequency range. It Therefore, the peak can be reduced if the resonance frequency is in the damping frequency range.

The damping effect of the movement of the substrate holder 3 in the predetermined displacement direction (Z direction 310) is mainly described here, but the energy absorption effect of the gel-like material in which the solid fine particles are dispersed is It is obtained by the entire deformation regardless of the displacement direction. Therefore, since the effect of damping the minute vibrations of the substrate holding part 3 other than the predetermined displacement direction is simultaneously produced, the components other than the Z direction 310 of the vibration generated when the substrate holding part 3 is displaced in the Z direction 310 are generated. Although its amplitude is small, the amplitude is reduced, which is useful for improving the motion accuracy of the substrate holder 3.

Next, the principle of energy loss will be described with reference to the drawings. FIG. 32 is a diagram schematically showing the internal structure of a gel-like material in which solid fine particles are dispersed. The gel-like body 300 in which solid fine particles are dispersed is a state in which fine solid particles 321 are contained in a gel state in a medium 320 having a low viscosity. In the figure, the existence density of solid particles is shown small, but in reality, the size of the particles is very small, and the existence density is also very high. Generally, about 80% of the volume of gel
The above is occupied by solid fine particles. With such a structure, when the gel-like body 300 in which the solid fine particles are dispersed is deformed, the solid fine particles 32 contained therein are contained.
1 moves in contact with each other and friction occurs on the particle surface.
Therefore, the kinetic energy is converted into heat energy and the like due to friction and reduced, and a damping effect occurs. Therefore, the solid fine particles 321 mainly contribute to the damping effect, and the damping effect of the viscous body itself of the medium 320 is small.

Here, as the medium 320, a medium having fluidity and having a certain degree of viscosity even after being hardened is used.
Further, it is preferable that the adhesiveness is provided in consideration of the adhesiveness after filling. However, if the viscosity or hardness after curing is large, the stroke is greatly reduced. Therefore, it is preferable that the viscosity or hardness after curing is low. Silicon rubber or urethane rubber is mainly used as a specific material, but other materials can be used as long as they have the same characteristics as these.

On the other hand, the solid fine particles 321 may be of any type as long as they are solid and have a small particle diameter to the extent that they can be made into a gel. In practice, ceramics and resin powders are mainly used.

Besides, it is also possible to use powder of an iron-based metal ferromagnetic material as the solid fine particles 321. In this case, since the degree of contact between the fine particles can be changed by applying a magnetic field from the outside, the damping amount can be changed. In addition, solid fine particles 321
It is also conceivable that an ion exchange resin is used as the medium and an oil or fat having a high insulating property is used as the medium 320, and an electric field is applied to the gel-like material to change the viscosity of the gel-like material by the Winslo effect to adjust the damping amount.

Next, the effect of increasing damping by the gel-like material 300 in which the solid fine particles are dispersed will be described.

The figure showing the frequency characteristic when the substrate holding portion 3 of the movable device 2 according to the present invention shown in FIG. 27 is driven to open loop will be explained again. The solid line 270 is the characteristic when nothing is filled, and a large peak 271 is generated at the resonance frequency. On the other hand, first, a viscoelastic material such as silicon rubber is used for the substrate holding portion 3 and the fixing portion 1.
When filled in the gap 45 with respect to No. 5, the characteristics shown by the broken line 272 are obtained. In this characteristic, the gain is reduced over the entire area and the resonance frequency is slightly increased. That is,
In a viscoelastic body such as silicone rubber, the spring constant is equivalently increased due to its elasticity, the gain is reduced even in the low frequency range, and the overall stroke is greatly reduced. On the other hand, when the gap 45 is filled with the gel-like material 300 in which the solid fine particles are dispersed according to the present invention, the gain characteristic as shown by the chain line 274 in FIG. 27 is obtained. With this characteristic, there is little decrease in the gain in the low frequency range, and the gain is greatly decreased in the high frequency range, and the damping effect is also significantly greater than when the viscous material such as silicone rubber is filled. Therefore, a very large damping effect can be obtained while suppressing the overall stroke reduction. At the same time, the frequency of the resonance point 275 is significantly increased. In this case, however, this is not due to the increase of the spring constant, so that the decrease in gain in the steady state is small.

Further, the figure showing the frequency characteristic when the substrate holding portion 3 of the movable apparatus 2 according to the present invention shown in FIG. 28 is open-loop driven by using the integral element will be rediscovered. In the case of performing closed loop control of a movable part having a frequency characteristic such as the solid line 270 in FIG. 27, oscillation occurs if it is driven without using a compensation element, so an integrator with a large time constant is used to control By reducing the gain,
It is necessary to drive with the characteristics as indicated by the solid line 280 in FIG. In this case, if there is a peak 281 having a large resonance frequency, the gain decreases from a considerably low frequency as shown in the figure, so that the response frequency of the substrate holding unit 3 decreases and the high-speed response is significantly deteriorated. However, according to the present invention,
The gain of the noise is significantly reduced and the frequency is also increased (peak 283). Therefore, the time constant of the integrator can be significantly reduced, and the gain can be maintained up to a considerably high frequency as indicated by the broken line 282 in the figure. Therefore, the response frequency of the substrate holder 3 is increased,
High-speed response is possible.

Next, an embodiment in which the above vibration preventing means is applied to a table device having another movable device will be described.

FIG. 33 is a perspective view showing an embodiment of the table device using the vibration preventing means according to the present invention. In this table device 330, two movable devices 332 are fixed on the upper surface of a stage 331, and a substrate holding part 334 is connected to the movable parts 333 of the two movable devices 332.

On the stage 331, the substrate holder 33 is placed.
Two connecting members 335 each having a surface facing the side surface of No. 4 are fixed so as to maintain a constant gap with both side surfaces of the substrate holding portion 334, and a surface facing the substrate holding portion 334 and a side surface of the connecting member 335. In between, a gel-like body 300 in which solid fine particles are dispersed is filled.

The damping action and its effect in this embodiment are the same as those in the above-mentioned embodiment, but the filling method of the gel-like material 300 in which the fine solid particles are dispersed is different.

In the movable device 2 according to the present invention shown in FIG. 30, the gap 45 has already been set at the end of the assembly, and after the assembly, the gel-like material 300 in which the solid fine particles having high fluidity are dispersed is poured and cured. There is a way to
If the gap 45 to be filled is small, filling may not be easy or the filled state may not be uniform.

On the other hand, in the table device 330 shown in FIG. 33, the movable device 332 is fixed on the stage 331, and the substrate holding part 334 is connected to the movable part 333 of the movable device 332. Gel-like body 300 in which solid fine particles are dispersed on the surfaces opposite to both side surfaces of 334.
The connection member 335 coated with is placed on the stage 331 so that a predetermined gap is maintained between the both sides of the substrate holding unit 334 and the gel-like body 300 in which solid fine particles are dispersed is filled. Position and fix.

By doing so, it becomes easy to fill the gel-like material 300 in which the solid fine particles are dispersed, and it is easy to make the filled state uniform. Further, since the connecting member 335 can be removed, the filling state can be easily corrected.

Next, the adjustment of the gap between the connecting portion 335 and the substrate holding portion 334 will be described.

Gel-like body 300 in which fine solid particles are dispersed
Since the predetermined gap is set before curing, the connection member 335 is displaced in the filled state to adjust the gap, but the gap can be adjusted even after curing. Since the gel-like body 300 in which the solid fine particles are dispersed has a certain degree of viscosity even after curing, the position of the connecting member 335 can be slightly changed even after curing.

Gel-like body 300 in which fine solid particles are dispersed
The damping effect of is influenced by the size of the gap. When the gap is small, the damping effect is high, and when the gap is large, the damping effect is low. Therefore, the connecting member 3
By allowing 35 to be displaced with respect to the stage 331, the gel-like body 3 in which the solid fine particles after curing are dispersed
The damping effect of 00 can be adjusted. That is, according to such a configuration, the damping effect of the substrate holding portion 334 of the table device 330 can be adjusted after the assembly is completed without changing the filling amount.

FIG. 34 is a perspective view showing another embodiment of the table device provided with the vibration preventing means according to the present invention.

In this table device 340, the stage 34
Three movable devices 342 are fixed on the surface of the movable member 1, and a movable portion 343 is provided on each of them. A sample holder 344 is connected to these movable parts 343. Further, three connection members 345 are installed on the stage 341 so as to face the side surfaces of the sample holder 344 of each movable device 342. Each connection member 345 and sample holder 344
Gel-like body 3 in which solid fine particles are dispersed in the gap on the side surface of
00 is filled.

Also in this table device 340, the filling method, the adjusting method, the damping action and the effect of the gel material 300 in which the solid fine particles are dispersed are the same as those described in the above-mentioned embodiment.

However, in this table device 340, since the sample holder 344 is supported by the three movable devices 342, translational motion in the Z-axis 348 direction, rotational motion around the X-axis 346, and Y-axis 347 in the figure. The table device is capable of controlling the three degrees of freedom of the rotational movement of the. That is, by attaching a positioning device (not shown) to each movable device 332, the table device that can control the three degrees of freedom described above with reference to FIG. 22 can be obtained.

In this case, by filling the gap between the three connecting members 345 and the sample holder 344 with the gel-like material 300 in which solid fine particles are dispersed, damping of translational motion in the Z-axis 348 direction can be increased. Not the X axis 34
Since the damping of the rotary motion around 6 and the rotary motion around the Y-axis 347 can be increased at the same time, it is possible to provide a table device capable of stable and highly accurate rotary motion as well as translational motion.

The filling place of the gel-like material in which the solid fine particles are dispersed will be described below with reference to the embodiment of the table device using the movable device according to the present invention shown in FIG. The following effects are similarly applied to the embodiment shown in FIG. 33, and the same can be said in the embodiment shown in FIG. 34, although the vibration mode is slightly changed.

FIG. 35 is a plan view showing an embodiment of the table device using the movable device according to the present invention. Here, the gel-like material 350 in which the solid fine particles are dispersed is the substrate holder 3
And the fixed portion 15 are divided and filled in four places in the gap 45 facing each other. This place is near the maximum amplitude portion 351 of the vibration mode having the maximum vibration amplitude other than the vibration mode in the predetermined displacement direction (direction perpendicular to the paper surface) of the substrate holding unit 3. In this case, as the vibration modes other than the vibration mode in the predetermined displacement direction, the rotary vibration around the X axis 293 and the rotary vibration around the Y axis 294 are mainly. The vibration amplitude varies depending on the shape of the substrate holder 3, the position of the support mechanism 11, and the like, and therefore cannot be determined unconditionally, but in the case of the movable device 2 shown in FIG.
The four amplitudes of the four corners are the maximum amplitude parts in both rotational vibration modes. Therefore, by filling the gap in the vicinity thereof with the gel-like material 350 in which the solid fine particles are dispersed,
When the rotational vibration around the X axis 293 or the rotational vibration around the Y axis 294 occurs, the deformation amount of the gel-like body 350 in which the solid fine particles are dispersed is the gel-like body 350 in which the solid fine particles are dispersed in another portion. Since the size is larger than that in the case of filling, the damping of the gelled material 350 in which the solid fine particles are dispersed can be more effectively reduced in rotational vibration. That is, the gel-like body 350 in which the fine solid particles are dispersed
Even if the total filling amount is the same, the rotational vibration effect can be increased as compared with the case where the filling is performed in another place.

The amount of the gel-like material 350 in which the solid fine particles are filled is set to an appropriate value in consideration of the damping amount and the stroke reduction amount of the substrate holder 3 in the predetermined displacement direction. At this time, a gel-like body 35 in which solid fine particles are dispersed
After grasping the state of the rotational vibration in the state where 0 is not filled in advance, by adjusting the filling amount at the four places so that the movement accuracy of the substrate holding unit 3 is the best, the substrate holding unit 3 is It is possible to prevent the movement accuracy of the substrate holding part 3 from being lowered due to the rotational movement component when the movement is performed in the predetermined displacement direction.

The means for solving the problem of vibration occurring in the table device according to the present invention has been described above.

Next, in the table device having the movable device according to the present invention shown in FIG. 2, a method of supplying a vacuum to the vacuum chuck 16 for fixing the substrate 5 will be examined. When the substrate holder is not movable as in the past, by providing a hole for passing a vacuum inside the fixed part and guiding it to the vacuum chuck,
The vacuum could be guided to the vacuum chuck without exposing the vacuum system piping to the outside of the table device. However, in the table device having the movable device 2 as shown in FIG. Since it is separated, the fixed part 15
In order to transfer the vacuum to the substrate holder 3, the substrate holder 3
It is not easy to use the holes provided inside. Therefore,
As shown in FIG. 36, a flexible pipe 360 is provided outside the movable device 2.
Is installed, one of them is fixed to the fixing part 15, the other is fixed to the substrate holding part 3 and connected to a vacuum hole in the substrate holding part 3 to the vacuum chuck 16, and a vacuum is applied to the vacuum chuck 16. A method of leading can be considered. By doing so, the vacuum system of the substrate holding unit 3 and the vacuum system of the fixing unit 15 are connected by the flexible pipe, so that the vacuum can be guided to the substrate holding unit 3 without impairing the operation of the substrate holding unit 3. .
However, in this case, as is clear from FIG. 36, it becomes necessary to install the flexible pipe 90 and the pipe fixing portions 361 and 362 thereof outside the movable device 2, and the movable device 2
The height of the table becomes large, and the compactness of the table device is impaired. In particular, when this table device is used as a table device of a substrate inspection device, an optical system exists close to the upper part of the table device. Further, since there is a work of loading a substrate to be inspected or the like by utilizing the gap between the optical system and the table device, it is preferable that the height of the table device is as low as possible.

As a method of suppressing the height, it is conceivable that the fixing portion 15 and the substrate holding portion 3 are processed from the outside to embed a flexible pipe for vacuum and a pipe fixing portion. From the fixing portion 15 and the substrate holding portion 3
Therefore, there is a problem in that the rigidity of the fixing portion 15 and the substrate holding portion 3 is significantly reduced, which adversely affects the inspection accuracy. Also, in order to suppress the increase in the height direction,
Although a method of using the side surface of the movable device 2 to install a similar pipe and a pipe fixing portion is also conceivable, as shown in FIG. 5, a positioning for displacing the substrate holding portion 3 is provided on this side surface. Since the device is mounted, it is not easy to arrange vacuum system piping on this surface. Further, when the side surface is used, there is a problem that it becomes difficult to process the hole leading to the vacuum chuck 16 after connecting the vacuum to the substrate holding unit 3.

Therefore, the means for supplying a vacuum to the vacuum chuck for fixing the substrate will be described below.

FIG. 37 is a plan view showing an embodiment of the movable device of the present invention shown in FIG. First, the hole 370 for guiding the vacuum to the vacuum chuck 16 is processed in the substrate holding unit 3. This processing is performed by forming a hole from the side surface direction of the substrate holding portion 3 and then closing one end (hatched portion 371 in the figure) of the hole. The vacuum chuck 16 is the substrate holder 3
Is attached to the bottom surface of the substrate, a hole 372 connected to the hole 370 of the substrate holding unit 3 described above is formed therein, and an opening 373 is provided on the chuck surface. . The substrate 5 is placed on the vacuum chuck 16, and the substrate 5 is fixed to the substrate holding portion 3 by suction from the opening 373 of the vacuum chuck 16. The fixing portion 15 has a hole 374 for vacuum which is opened from the side surface,
This hole portion 374 is opened through the gap 45 to the substrate holding portion 3 at the time of processing, and is connected to the hole portion 370 of the substrate holding portion which has been processed previously. After that, a rod-shaped body that fits exactly into this hole 374 is inserted and inserted into the hole 340 of the substrate holding unit 3. After that, a gel-like material in which solid fine particles are dispersed as shown in FIG. 30 is poured into the gap 45 in the vicinity of the rod-like object and cured to form the connecting portion 375. At that time, the rod-shaped body prevents the gel-like body in which the solid fine particles are dispersed from flowing into the hole portion 374 and blocking the hole portion 374, and the connection portion 375 has the hole portion 376.
Is ensured. Further, by doing so, it is possible to prevent the substrate holding portion 3 from being displaced and the initial position of the substrate holding portion 3 being deviated when the gel-like body in which the solid fine particles are dispersed is poured into the gap 45. Then, after the connecting portion 375 is cured, the rod-shaped body is pulled out to connect the hole portion 374 of the fixing portion 15 and the hole portion 370 of the substrate holding portion. A vacuum system connecting portion 377 is provided at one end of the fixing portion 15 facing the outside of the hole 374, and is connected to a vacuum source by the vacuum system connecting means 378 provided on the stage 1. Therefore, by operating the vacuum source, the vacuum is introduced to the opening 27 of the vacuum chuck 16 of the substrate holder 3.

FIG. 38 shows the movable device A- shown in FIG.
It is sectional drawing which shows A cross section. This cross section shows a state of the gap 45 between the substrate holding part 3 and the fixing part 15, and a connecting part 375 made of a gel-like material in which solid fine particles are dispersed is formed, and the fixing part 15 is provided inside thereof. A hole 376 is formed to connect the hole 374 with the hole 370 of the substrate holder 3.

FIG. 39 shows the movable device B- of FIG.
It is sectional drawing which shows B cross section. The fixed portion 15 is fixed on the stage 1, and the substrate holding portion 3 is movably connected to the fixed portion 15 by a connecting portion 375. Fixed part 15
The hole portion 374 of is connected to the hole portion 370 of the substrate holding portion 3 through the hole portion 376 of the connecting portion 375, and the vacuum can be transmitted to the opening portion 373 through the hole portion 372 inside the vacuum chuck 16. . The vacuum source is connected to the vacuum system connecting means 378 on the stage 1 and the vacuum system connecting portion 377.

FIG. 40 is a plan view showing a modified example of the movable device shown in FIG. In this case, there is only one vacuum system supplied to the substrate holder 3. Therefore, there is only one hole 374 in the fixing unit 15, and the vacuum supply in the substrate holding unit 3 is performed by the hole 370 inside the substrate holding unit 3 and the external pipe 400. At this time, the pipe 400 is installed outside the movable device, but since it is near the end of the substrate holding part 3, the compactness is less likely to be impaired. As a result, the vacuum system connecting portion 377 and the vacuum system connecting means 378 are set to 1
The vacuum system device can be simplified because it may be provided only at the location.

The method of supplying the vacuum to the vacuum chuck for fixing the substrate in the table device having the movable device according to the present invention has been described above.

[0153]

As described above, according to the present invention,
By reducing the movable weight at the time of minute displacement, it is possible to improve the response characteristics of displacement in autofocus and the like, and at the same time, a movable device capable of realizing a compact minute displacement mechanism, its manufacturing method, and a positioning device,
A table device using these can be provided.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing an embodiment of the present invention.

FIG. 2 is a perspective view showing details of the movable device of the present invention shown in FIG.

FIG. 3 is a perspective view showing a modified example of the movable device of the present invention shown in FIG.

4 is a plan view showing the movable device shown in FIGS. 2 and 3. FIG.

5 is a perspective view showing details of a positioning device of the movable device of the present invention shown in FIG.

6 is a diagram showing details of a positioning device of the movable device shown in FIG.

FIG. 7 is a perspective view showing a movable device provided with a positioning device.

FIG. 8 is a diagram showing details of the positioning device shown in FIG.

9 is a diagram showing details of a modified example of the positioning device shown in FIG.

FIG. 10 is a perspective view showing a movable device provided with a positioning device on a stage.

11 is a diagram showing details of the positioning device shown in FIG.

FIG. 12 is a perspective view showing a movable device driven by a non-contact type positioning device.

13 is a diagram showing details of the positioning device shown in FIG.

FIG. 14 is a plan view showing the first embodiment of the positioning device of the present invention.

15 is a diagram schematically showing the mechanism of the positioning device shown in FIG.

16 is an enlarged view showing the displacement of each member when a minute displacement occurs in the schematic diagram shown in FIG.

FIG. 17 is a schematic diagram showing a state of displacement of each member when the displacement of the movable portion is close to the maximum in the positioning device shown in FIG.

FIG. 18 is a plan view showing a second embodiment of the positioning device of the invention.

FIG. 19 is an exploded perspective view showing a third embodiment of the positioning device of the invention.

FIG. 20 is an exploded perspective view showing a first embodiment of a table device using the positioning device according to the present invention.

FIG. 21 is an exploded perspective view showing a second embodiment of the table device using the positioning device according to the present invention.

FIG. 22 is an exploded perspective view showing a third embodiment of the table device using the positioning device according to the present invention.

FIG. 23 is an exploded perspective view showing an embodiment of a movable device according to the present invention and a table device to which the positioning device according to the present invention is applied.

FIG. 24 is an exploded perspective view showing a modification of the table device shown in FIG. 23.

FIG. 25 is a block diagram showing the configuration of a control system of the table device of the present invention.

FIG. 26 is a block diagram showing the configuration of a different control system of the table device of the present invention.

FIG. 27 is a diagram showing an opening of a substrate holding portion of the movable device according to the present invention.
The figure which showed the frequency characteristic at the time of drive-up.

FIG. 28 is a diagram showing frequency characteristics when the substrate holding part of the movable device according to the present invention is open-loop driven by using an integrating element.

FIG. 29 is a schematic diagram showing main vibration modes of the movable device according to the present invention.

FIG. 30 is a plan view showing an embodiment in which the movable device according to the present invention is improved.

31 is a sectional view showing an AA section of the movable device shown in FIG.

FIG. 32 is a diagram schematically showing the internal structure of a gel-like body in which solid fine particles are dispersed.

FIG. 33 is a perspective view showing an embodiment of a table device using the vibration prevention means according to the present invention.

FIG. 34 is a perspective view showing another embodiment of the table device provided with the vibration preventing means according to the present invention.

FIG. 35 is a plan view showing an embodiment of a table device using the movable device according to the present invention.

FIG. 36 is a perspective view showing an embodiment of the movable device of the present invention.

FIG. 37 is a plan view showing an embodiment of the movable device of the present invention.

38 is a sectional view showing an AA section of the movable device shown in FIG. 37.

39 is a cross-sectional view showing a B-B cross section of the movable device shown in FIG. 36.

40 is a plan view showing a modification of the movable device shown in FIG.

[Explanation of symbols]

 1 Stage 2 Movable Device 3 Substrate Holding Units 4a, 4b Positioning Device 5 Substrate 10 Optical System 11 Support Mechanisms 12a, 12b Actuators 13a, 13b Position Detection Device 15 Fixing Unit 16 Vacuum Chuck 300, 350 Gel-like with dispersed solid fine particles body

Claims (9)

[Claims] 1. A movable part displaceable in a predetermined direction, and a support mechanism composed of thin-walled parts facing each other in a direction substantially corresponding to the displacement direction of the movable part for elastically supporting the movable part. A movable device comprising a fixed portion that supports the movable portion via the support mechanism, and the movable portion, the support mechanism, and the fixed portion are integrally molded from a single member. 2. The damping member according to claim 1, further comprising: a gelling member in which solid fine particles are dispersed is filled in a gap in which the movable portion and the fixed portion are opposed to each other and is cured. Mobile device. 3. A thin wall portion forming step of forming a recess so as to form a thin wall portion facing each other in a single member, and a movable member capable of displacing the single member in a direction substantially coincident with a facing direction of the thin wall portion. 2. The method for manufacturing a movable device according to claim 1, further comprising a separation step of separating the movable portion and the movable portion into a fixed portion elastically supported by the thin portion. 4. A sample holding part capable of displacing in a predetermined direction while holding a sample, and for elastically supporting the sample holding part, the sample holding part is provided so as to face in a direction substantially coincident with the displacement direction of the sample holding part. A table device comprising: a supporting mechanism formed of a thin wall portion, a fixing portion that supports the sample holding portion via the supporting mechanism, and a driving unit that displaces the sample holding portion in a predetermined direction. . 5. A damping member formed by filling and hardening a gel-like material in which solid fine particles are dispersed in a gap where the sample holding portion and the fixing portion supporting the sample holding portion face each other. The table device according to claim 4, wherein the table device is a table device. 6. A movable member displaceable in a predetermined direction, at least a pair of displacement generation members displaceable in a direction substantially perpendicular to the displacement direction of the movable member, and displacement of the displacement generation member to the movable member. A positioning device comprising at least a pair of lever members that transmit the force, and a fixed member that holds the displaceable member and integrally supports the movable member and the lever member. 7. The positioning device according to claim 4, wherein the lever member enlarges or reduces the displacement amount of the displacement generating means and transmits the displacement amount to the movable member. 8. A movable member comprising a sample holder for holding a sample, a movable portion for holding the sample holder so as to be displaceable in a predetermined direction, and a fixed portion for elastically supporting the movable portion through a support mechanism. Means for connecting the movable member of the positioning device according to claim 6 to the movable portion of the movable means, and connecting the fixed member of the positioning device to the fixed portion of the movable means. Table equipment to do. 9. A plurality of a sample holding part for holding a sample, a movable part for holding the sample holding part so as to be displaceable in a predetermined direction, and a fixed part for elastically supporting the movable part via a support mechanism. And the movable member of the positioning device according to claim 6 is connected to the movable portion, and the fixed member of the positioning device is connected to each of the fixed portions. A table device comprising control means capable of independently adjusting a displacement amount of the movable member of the positioning device.