CN203171265U - Two-dimensional decoupling motion platform - Google Patents
Two-dimensional decoupling motion platform Download PDFInfo
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- CN203171265U CN203171265U CN 201320110568 CN201320110568U CN203171265U CN 203171265 U CN203171265 U CN 203171265U CN 201320110568 CN201320110568 CN 201320110568 CN 201320110568 U CN201320110568 U CN 201320110568U CN 203171265 U CN203171265 U CN 203171265U
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Abstract
The utility model discloses a two-dimensional decoupling motion platform which comprises a fixed platform base and a movable platform which is arranged on the fixed platform base. The movable platform comprises a transverse movable platform and a longitudinal movable platform. The transverse movable platform comprises four transverse flexible rods, a transverse elastic element and a transverse piezoelectric ceramics actuator. The transverse flexible rods are arranged around the transverse movable platform, the transverse elastic element is arranged on one side of the transverse movable platform, and the transverse piezoelectric ceramics actuator and the transverse elastic element are arranged symmetrically. The longitudinal movable platform comprises four longitudinal flexible rods, a longitudinal elastic element and a longitudinal piezoelectric ceramics actuator. The longitudinal flexible rods are arranged around the longitudinal movable platform, the longitudinal elastic element is arranged on one side of the longitudinal movable platform and the longitudinal piezoelectric ceramics actuator and the longitudinal elastic element are arranged symmetrically. The piezoelectric ceramics actuators are used for direct driving to obtain Nanoscale displacement output, the elastic elements improve rigidity of the motion platform, a flexible mechanism is used for transmitting motion and high-rigidity two-dimensional decoupling positioning motion is achieved.
Description
Technical field
The utility model relates to a kind of platform, relates in particular to a kind of two-dimentional decoupling zero motion platform.
Background technology
The precision positioning of motion platform is the general character requirement of numerous electronics manufacturing equipments and other precision machine tool with high speed, the high acceleration, and the performance of motion platform has determined quality, efficient and the production capacity of product.Traditional motion platform utilizes mechanical movement auxiliary structure transmission campaigns such as leading screw, and in the motion transmittance process, because kinematic pair exists inherent friction and gap, so precision can only reach micron order.But along with development of science and technology, the especially development of microelectronic product technology, small product size reaches submicron order even nanoscale, therefore motion platform has been proposed nano level positioning requirements, therefore very is necessary to manufacture and design the motion platform of nanoscale location.
Nano level setting movement platform generally adopts the novel intelligent material as actuator, as piezoelectric ceramics and memorial alloy etc., with compliant mechanism as the platform carrier, because intellectual material can be exported nano level displacement, compliant mechanism transmits kinergety and power by strain, do not have friction and gap, the two is in conjunction with obtaining nanoscale setting movement platform.But common two degree-of-freedom motion platform adopts serial or parallel connection in the market, realize the two freedom decoupling motion, but owing to adopt flexible structure, rigidity is very low, the non-constant of opposing external interference ability.Therefore, demand developing a kind of high rigidity two dimension decoupling zero nanoscale motion platform urgently.
The utility model content
At the problems referred to above, the purpose of this utility model is to provide a kind of two-dimentional decoupling zero motion platform, and this two dimension decoupling zero motion platform has solved prior art can't realize high rigidity, high-precision problem simultaneously.
The technical solution of the utility model is achieved in that
A kind of two-dimentional decoupling zero motion platform, comprise the fixed platform seat, be arranged at the mobile platform on the described fixed platform seat, it is characterized in that: described mobile platform comprises horizontal mobile platform and vertically moves platform, described horizontal mobile platform comprises four lateral flexibility bars, the transverse elasticity part, horizontal piezoelectric actuator, described lateral flexibility bar is arranged at around the described horizontal mobile platform, described lateral flexibility bar is connected with the described platform that vertically moves, described transverse elasticity part is arranged at described horizontal mobile platform one side, described horizontal piezoelectric actuator and described transverse elasticity part are symmetrical arranged, and described horizontal piezoelectric actuator outer setting has the lateral resistance foil gauge; The described platform that vertically moves comprises four longitudinal flexible bars, longitudinal elasticity part, vertical piezoelectric actuator, described longitudinal flexible bar is arranged at described vertically moving around the platform, described longitudinal flexible bar is connected with described horizontal mobile platform, described longitudinal elasticity part is arranged at described platform one side that vertically moves, described vertical piezoelectric actuator and described longitudinal elasticity element are symmetrical arranged, and described vertical piezoelectric actuator outer setting has the longitudinal electrical resistance foil gauge.
Preferably, described horizontal piezoelectric actuator is for laterally stacking the type piezoelectric actuator, and described vertical piezoelectric actuator is for vertically stacking the type piezoelectric actuator.
Preferably, described fixed platform seat is provided with vertical fixing hole, the described platform that vertically moves is provided with the crosswise fixed hole, and described crosswise fixed hole is arranged at described transverse piezoelectric actuation device mounting groove one end, and described vertical fixing hole is arranged at described vertical piezo-activator mounting groove one end.
Further, the described platform that vertically moves is provided with the lateral flexibility pad, and the crosswise fixed part passes described crosswise fixed hole and is connected with described lateral flexibility pad conflict.
Further, described fixed platform seat is provided with the longitudinal flexible pad, and vertical fixture passes described vertical fixing hole and is connected with described longitudinal flexible pad conflict.
Preferably, described horizontal mobile platform is embedded at described vertically moving in the platform.
Preferably, described lateral flexibility bar is connected with the described platform that vertically moves by the lateral flexibility hinge, and described longitudinal flexible bar is connected with described horizontal mobile platform by the longitudinal flexible hinge.
Preferably, described fixed platform seat, described mobile platform are on same plane.
Preferably, described fixed platform seat is provided with fixed platform seat installing hole.
Further, described fixed platform seat installing hole is shoulder hole, and its quantity is 8.
The beneficial effect that the utility model produces is:
1, horizontal mobile platform and vertically move platform and directly drive by the type piezoelectric actuator of stacking in the utility model, simple in structure, compact, processing cost is low;
2, the symmetric design by the double-flexibility parallel four-bar in the utility model, and the nested series design of horizontal longitudinal direction motion structure realized the mobile decoupling on two directions of motion, and compliant mechanism does not have friction, gap, the kinematic accuracy height;
3, the fixture pretension stacks the type piezoelectric actuator in the utility model, elastic compression effect in conjunction with elastic component, make motion platform that higher rigidity be arranged, but and can have the function of shaking, when being subjected to extraneous big active force, can protect flexibility platform not to be destroyed, avoid when being subjected to big active force, stacking the type piezoelectric actuator and break away from flexibility platform;
4, stick on the resistance strain gage on piezoelectric ceramics surface in the utility model, can gather displacement information, be applied in the closed-loop control, can obtain higher kinematic accuracy.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of an embodiment mobile platform of a kind of two-dimentional decoupling zero motion platform of the utility model;
Fig. 2 is the structural representation of an embodiment of a kind of two-dimentional decoupling zero motion platform of the utility model;
Fig. 3 be among Fig. 2 A-A to the sectional structure schematic diagram;
Fig. 4 is the local structure for amplifying schematic diagram in B place among Fig. 2;
Among the figure: 100 fixed platform seats; 110 crosswise fixed holes; 120 vertical fixing holes; 130 fixed platform seat installing holes; 200 mobile platforms; 210 horizontal mobile platforms; 211 lateral flexibility bars; 212 transverse elasticity part mounting grooves; 213 transverse piezoelectric actuation device mounting grooves; 214 transverse elasticity parts; 215 horizontal piezoelectric actuators; 216 lateral resistance foil gauges; 217 lateral flexibility pads; 218 horizontal holding screws; 219 lateral flexibility hinges; 220 vertically move platform; 221 longitudinal flexible bars; 222 longitudinal elasticity part mounting grooves; 223 vertical piezo-activator mounting grooves; 224 longitudinal elasticity parts; 225 vertical piezoelectric actuators; 226 longitudinal electrical resistance foil gauges; 227 longitudinal flexible pads; 228 vertical holding screws; 229 longitudinal flexible hinges.
The specific embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
According to Fig. 1～preferred embodiment shown in Figure 4, a kind of two-dimentional decoupling zero motion platform, comprise fixed platform seat 100, be arranged at the mobile platform 200 on the fixed platform seat 100, mobile platform 200 comprises horizontal mobile platform 210 and vertically moves platform 220 that fixed platform seat 100 and mobile platform 200 are on same plane.In the present embodiment, the cutting of fixed platform seat 100 and mobile platform 200 one lines or laser formation, cutting processing forms and vertically moves platform 220 on mobile platform 200, and cutting processing forms horizontal mobile platform 210 on the platform 220 vertically moving.
Vertically move platform 220 and comprise four longitudinal flexible bars 221, longitudinal elasticity part 224, vertical piezoelectric actuator 225, longitudinal flexible bar 221 is arranged at and vertically moves around the platform 220, longitudinal elasticity part mounting groove 222 is arranged at and vertically moves platform 220 1 sides, vertically move platform 220 in the present embodiment and be square, longitudinal flexible bar 221 evenly is arranged at and vertically moves on 220 4 angles of platform, and longitudinal flexible bar 221 is connected with horizontal mobile platform 210 by longitudinal flexible hinge 229.
Fixed platform seat 100 is provided with vertical fixing hole 120, fixed platform seat 100 is provided with longitudinal flexible pad 227, vertical fixture passes vertical fixing hole 120 and is connected with 227 conflicts of longitudinal flexible pad, in the present embodiment, vertically fixing hole 120 is screwed hole, vertically fixture is vertical holding screw 228, by the vertical holding screw 228 of precession, vertically holding screw 228 is conflicted with longitudinal flexible pad 227 and is connected, make and vertical piezoelectric actuator 225 is pressed in vertical piezoelectric ceramics mounting groove 223 227 distortion of longitudinal flexible pad.
Be provided with longitudinal elasticity part 224 in the longitudinal elasticity part mounting groove 222; longitudinal elasticity part mounting groove 222 is arranged at the middle part that vertically moves platform 220 1 sides in the present embodiment; longitudinal elasticity part 224 is bonded in the longitudinal elasticity part mounting groove 222; longitudinal elasticity part 224 preferred thermoplastic polyurethane; it has excellent rebound performance;, do not do at this and to give unnecessary details within protection domain of the present utility model yet for other the material with excellent rebound performance.
Vertically piezo-activator mounting groove 223 is symmetrical arranged with longitudinal elasticity element mounting groove 222, vertically be provided with vertical piezoelectric actuator 225 in the piezo-activator mounting groove 223, vertically piezoelectric actuator 225 outer setting have longitudinal electrical resistance foil gauge 226, vertically piezoelectric actuator 225 preferably stacks the type piezoelectric actuator in the present embodiment, and longitudinal electrical resistance foil gauge 226 sticks on and vertically stacks the type piezoelectric actuator outside.
In the present embodiment, longitudinal flexible bar 221 by longitudinal flexible hinge 229 and horizontal mobile platform 210 with vertically move platform 220 and be connected, the longitudinal flexible bar of four symmetries constitutes double-flexibility parallel four-bar structure, can realize vertically moving 220 on platform in vertically straight line translation, eliminate horizontal coupling displacement.The operation principle of longitudinal flexible bar is in the present embodiment: after vertical piezoelectric actuator 225 is applied voltage, because inverse piezoelectric effect, vertically piezoelectric actuator 225 produces displacement output, thereby promotes 220 motions of lengthwise movement platform, realizes its straight line translation in the vertical.
Laterally mobile platform 210 comprises four lateral flexibility bars 211, transverse elasticity part 214, horizontal piezoelectric actuator 215, lateral flexibility bar 211 is arranged at around the horizontal mobile platform 210, laterally mobile platform 210 is rectangle in the present embodiment, lateral flexibility bar 211 evenly is arranged on four angles of horizontal mobile platform 210, lateral flexibility bar 211 by lateral flexibility hinge 219 with vertically move platform 220 and be connected, in the utility model lateral flexibility bar 211 by lateral flexibility hinge 219 and horizontal mobile platform 210 with vertically move the design that platform 220 is connected and make it constitute flexible parallel four-bar structure, can realize 210 of horizontal mobile platforms at horizontal rectilinear motion, eliminate the displacement that is coupled longitudinally.The operation principle of lateral flexibility bar is in the present embodiment: after horizontal piezoelectric actuator 215 is applied voltage, because inverse piezoelectric effect, laterally piezoelectric actuator 215 produces displacement output, thereby promotes 210 motions of transverse movement platform, realizes its straight line translation in the horizontal.
Vertically move platform 220 and be provided with crosswise fixed hole 110, crosswise fixed hole 110 is arranged at transverse piezoelectric actuation device mounting groove 213 1 ends, vertically move platform 220 and be provided with lateral flexibility pad 217, crosswise fixed part 218 passes crosswise fixed hole 110 and is connected with 217 conflicts of lateral flexibility pad, in the present embodiment, crosswise fixed hole 110 is screwed hole, the crosswise fixed part is horizontal holding screw 218, by the horizontal holding screw 218 of precession, laterally holding screw 218 is conflicted with lateral flexibility pad 217 and is connected, make and horizontal piezoelectric actuator 215 is pressed in the horizontal piezoelectric ceramics mounting groove 213 217 distortion of lateral flexibility pad.
Transverse elasticity part mounting groove 212 is arranged at horizontal mobile platform 210 1 sides; be provided with transverse elasticity part 214 in the transverse elasticity part mounting groove 212; transverse elasticity part mounting groove 212 is arranged at the middle part of horizontal mobile platform 210 1 sides in the present embodiment; transverse elasticity part 214 is bonded in the transverse elasticity part mounting groove 212; transverse elasticity part 214 preferred thermoplastic polyurethane; it has excellent rebound performance;, do not do at this and to give unnecessary details within protection domain of the present utility model yet for other the material with excellent rebound performance.
Transverse piezoelectric actuation device mounting groove 213 is symmetrical arranged with transverse elasticity part mounting groove 212, be provided with horizontal piezoelectric actuator 215 in the transverse piezoelectric actuation device mounting groove 213, laterally piezoelectric actuator 215 outer setting have lateral resistance foil gauge 216, laterally piezoelectric actuator 215 preferably stacks the type piezoelectric actuator in the present embodiment, and lateral resistance foil gauge 226 sticks on and laterally stacks the type piezoelectric actuator outside.
In the utility model, laterally mobile platform 210 utilizes horizontal holding screw 218 to promote lateral flexibility pad 217, vertically moving platform 220 utilizes vertical holding screw 228 to promote longitudinal flexible pad 227, safe fixed lateral piezoelectric ceramic actuator 215 applies pretightning force with vertical piezoelectric ceramic actuator 225 and to mobile platform, while is in conjunction with the elastic reaction of transverse elasticity part 214 and longitudinal elasticity part 224, make whole flexibility platform obtain higher rigidity, but the ability of shaking and antijamming capability avoid occurring the phenomenon that horizontal piezoelectric actuator and vertical piezoelectric actuator and flexibility platform break away from.
In the utility model, by double-flexibility parallel four-bar structure, realize the mobile decoupling on the different directions, thereby reach the function of eliminating coupling and parasitic displacement, laterally mobile platform 210 is embedded at and vertically moves in the platform 220, by the series connection of the structure on the horizontal and vertical direction of motion, realize horizontal and vertical motion respectively.
Fixed platform seat 100 is provided with fixed platform seat installing hole 130, the utility model output displacement is Nano grade, therefore, motion platform of the present utility model is also referred to as micromotion platform, fixed platform seat installing hole 130 is used for making motion platform of the present utility model to be connected with macro-moving stage, fixed platform seat installing hole 130 is shoulder hole in the present embodiment, and its quantity is 8, is symmetrically distributed in the two ends of fixed platform seat 100.Laterally evenly be provided with the platform installing hole on the mobile platform, the platform installing hole is screwed hole in the present embodiment, and its quantity is 4, and it is used for being connected with parts to be positioned, realizes the accurate location of parts to be positioned.
The course of work of the present utility model is: fixed platform seat 100 is fixed on the macro-moving stage, macro-moving stage is realized the micron order motion, the motion platform of the present utility model realization nano-grade displacement that further moves, apply voltage to laterally stacking the type piezoelectric actuator, because inverse piezoelectric effect output nano-grade displacement, move thereby drive horizontal mobile platform 210, vertically move platform 220 in like manner, thereby realize motion and location in the motion platform plane.
Operation principle of the present utility model is: piezoelectric actuator has the displacement output of nanometer resolution, stick on the resistance strain gage of piezoelectric actuator side as Displacement Feedback, realize high-precision location, flexibility platform relies on strict axisymmetric double-flexibility parallelogram lindage based on flexible hinge, realize that the folk prescription of decoupling zero is to translation, by the series connection of the structure on two directions of motion, realize the motion on the different directions, thereby realize nano level accurate location simultaneously.Utilize holding screw to promote flexible pad, safety is piezoelectric actuator and motion platform applied pretightning force fixedly, while is in conjunction with the elastic reaction of elastic component, but make platform obtain higher rigidity shake ability and antijamming capability, avoid occurring the phenomenon of piezoelectric actuator and flexibility platform disengaging.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. two-dimentional decoupling zero motion platform, comprise the fixed platform seat, be arranged at the mobile platform on the described fixed platform seat, it is characterized in that: described mobile platform comprises horizontal mobile platform and vertically moves platform, described horizontal mobile platform comprises four lateral flexibility bars, the transverse elasticity part, horizontal piezoelectric actuator, described lateral flexibility bar is arranged at around the described horizontal mobile platform, described lateral flexibility bar is connected with the described platform that vertically moves, described transverse elasticity part is arranged at described horizontal mobile platform one side, described horizontal piezoelectric actuator and described transverse elasticity part are symmetrical arranged, and described horizontal piezoelectric actuator outer setting has the lateral resistance foil gauge; The described platform that vertically moves comprises four longitudinal flexible bars, longitudinal elasticity part, vertical piezoelectric actuator, described longitudinal flexible bar is arranged at described vertically moving around the platform, described longitudinal flexible bar is connected with described horizontal mobile platform, described longitudinal elasticity part is arranged at described platform one side that vertically moves, described vertical piezoelectric actuator and described longitudinal elasticity element are symmetrical arranged, and described vertical piezoelectric actuator outer setting has the longitudinal electrical resistance foil gauge.
2. two-dimentional decoupling zero motion platform as claimed in claim 1, it is characterized in that: described horizontal piezoelectric actuator is for laterally stacking the type piezoelectric actuator, and described vertical piezoelectric actuator is for vertically stacking the type piezoelectric actuator.
3. two-dimentional decoupling zero motion platform as claimed in claim 1, it is characterized in that: described fixed platform seat is provided with vertical fixing hole, the described platform that vertically moves is provided with the crosswise fixed hole, described crosswise fixed hole is arranged at described transverse piezoelectric actuation device mounting groove one end, and described vertical fixing hole is arranged at described vertical piezo-activator mounting groove one end.
4. two-dimentional decoupling zero motion platform as claimed in claim 3, it is characterized in that: the described platform that vertically moves is provided with the lateral flexibility pad, and the crosswise fixed part passes described crosswise fixed hole and conflicts with described lateral flexibility pad and be connected.
5. two-dimentional decoupling zero motion platform as claimed in claim 3, it is characterized in that: described fixed platform seat is provided with the longitudinal flexible pad, and vertically fixture passes described vertical fixing hole and is connected with described longitudinal flexible pad conflict.
6. two-dimentional decoupling zero motion platform as claimed in claim 1, it is characterized in that: described horizontal mobile platform is embedded at described vertically moving in the platform.
7. two-dimentional decoupling zero motion platform as claimed in claim 1, it is characterized in that: described lateral flexibility bar is connected with the described platform that vertically moves by the lateral flexibility hinge, and described longitudinal flexible bar is connected with described horizontal mobile platform by the longitudinal flexible hinge.
8. two-dimentional decoupling zero motion platform as claimed in claim 1, it is characterized in that: described fixed platform seat, described mobile platform are on same plane.
9. two-dimentional decoupling zero motion platform as claimed in claim 1, it is characterized in that: described fixed platform seat is provided with fixed platform seat installing hole.
10. two-dimentional decoupling zero motion platform as claimed in claim 9, it is characterized in that: described fixed platform seat installing hole is shoulder hole, and its quantity is 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320110568 CN203171265U (en) | 2013-03-11 | 2013-03-11 | Two-dimensional decoupling motion platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320110568 CN203171265U (en) | 2013-03-11 | 2013-03-11 | Two-dimensional decoupling motion platform |
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| CN203171265U true CN203171265U (en) | 2013-09-04 |
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| CN 201320110568 Expired - Fee Related CN203171265U (en) | 2013-03-11 | 2013-03-11 | Two-dimensional decoupling motion platform |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103192279A (en) * | 2013-03-11 | 2013-07-10 | 东莞华中科技大学制造工程研究院 | Two-dimension decoupling motion platform |
| CN107378527A (en) * | 2017-08-18 | 2017-11-24 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN109099830A (en) * | 2018-08-18 | 2018-12-28 | 重庆巅慧科技有限公司 | A kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension |
| CN114986461A (en) * | 2022-06-09 | 2022-09-02 | 华北水利水电大学 | Two-dimensional large-stroke decoupling micro-nano platform with force sense perception |
-
2013
- 2013-03-11 CN CN 201320110568 patent/CN203171265U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103192279A (en) * | 2013-03-11 | 2013-07-10 | 东莞华中科技大学制造工程研究院 | Two-dimension decoupling motion platform |
| CN107378527A (en) * | 2017-08-18 | 2017-11-24 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN107378527B (en) * | 2017-08-18 | 2019-06-11 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN109099830A (en) * | 2018-08-18 | 2018-12-28 | 重庆巅慧科技有限公司 | A kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension |
| CN109099830B (en) * | 2018-08-18 | 2020-07-10 | 重庆巅慧科技有限公司 | Direct-push type two-dimensional rapid micro-displacement scanning positioning workbench |
| CN114986461A (en) * | 2022-06-09 | 2022-09-02 | 华北水利水电大学 | Two-dimensional large-stroke decoupling micro-nano platform with force sense perception |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 523000 No. 1 science and technology nine road, high tech Industrial Development Zone, Songshan Lake, Dongguan, Guangdong Patentee after: GUANGDONG HUST INDUSTRIAL TECHNOLOGY Research Institute Address before: 523808 No. 1 science and technology nine road, Songshan Lake Science and Technology Industrial Park, Dongguan, Guangdong Patentee before: DG-HUST Manufacturing Engineering Institute |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130904 |