CN104900573B - A kind of differential lever micro-displacement amplifying device of symmetrical expression - Google Patents

A kind of differential lever micro-displacement amplifying device of symmetrical expression Download PDF

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Publication number
CN104900573B
CN104900573B CN201510311979.9A CN201510311979A CN104900573B CN 104900573 B CN104900573 B CN 104900573B CN 201510311979 A CN201510311979 A CN 201510311979A CN 104900573 B CN104900573 B CN 104900573B
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hinged
top splenium
rod
connecting rod
flexible
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CN104900573A (en
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范伟
占炜
李钟慎
杨建红
陈梅
江芳彬
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Huaqiao University
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Huaqiao University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Condensed Matter Physics & Semiconductors (AREA)
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The present invention provides a kind of differential lever micro-displacement amplifying device of symmetrical expression, including pedestal, the substrate and the piezoelectric blocks in the same plane with the substrate being fixed on the pedestal, the piezoelectric blocks tool is there are one top splenium and two respectively positioned at the top splenium both ends and symmetrically placed driving section centered on the perpendicular bisector of the top splenium, two driving sections are connected to one group of lever assembly in the same plane with the substrate, and lever assembly is symmetrically placed centered on the perpendicular bisector of the top splenium described in two groups, the piezoelectric ceramic actuator supported in the top splenium is placed between two driving sections;By setting lever assembly, using the principle of differential lever amplification, larger displacement equations multiple is realized, with larger stroke, simultaneously because the mode for employing flexible, hinged is attached, the gap and frictional force between each rod piece are smaller, error can be reduced, precision is higher.

Description

A kind of differential lever micro-displacement amplifying device of symmetrical expression
Technical field
The present invention relates to a kind of amplifying device, especially a kind of differential lever micro-displacement amplifying device of symmetrical expression.
Background technology
In recent years, with the development of microelectric technique, piezoelectric ceramics with its superior precision actuation and positioning performance and by Micro-displacement Driving and precision positioning field are widely used in, but since its micron-sized displacement output tends not to meet in fact The demand of border application generally requires design displacement amplification device and carries out displacement equations to it.Existing displacement amplification device or Precision is higher or stroke is larger, is difficult in high precision often to get both with big stroke.
Chinese invention patent application ZL03132498.3 discloses a kind of micro displacement magnifying mechanism, by mechanism body, piezoelectricity Ceramics and tightening cushion composition, piezoelectric ceramics and tightening cushion be arranged in mechanism body, piezoelectric ceramics and tightening cushion Inner face is in close contact between each other, the outer end face of piezoelectric ceramics and tightening cushion respectively with the left and right side walls of mechanism body Inner surface is in close contact, and there are angularly disposed left and right support plate, the left and right branch of upper and lower in the upper and lower part of mechanism body respectively Upper and lower micro-shifting kinetoplast is respectively equipped between board, the both ends of left and right support plate are moved respectively with left and right side walls and upper and lower micro-shifting Body is connected structure.The enlarger stroke is relatively small, while in the case of load gravity center bias, easily to piezoelectric bar Cause failure by shear.
In view of this, the present inventor conducts in-depth research micro-displacement amplifying device, there is this case generation then.
The content of the invention
A kind of differential lever micro-displacement amplification of the symmetrical expression larger and higher precision it is an object of the invention to provide stroke Device.
To achieve these goals, the present invention adopts the following technical scheme that:
A kind of differential lever micro-displacement amplifying device of symmetrical expression, including pedestal, the substrate being fixed on the pedestal and with Substrate piezoelectric blocks in the same plane, the piezoelectric blocks tool is there are one top splenium and two respectively positioned at the top pressure Portion both ends and symmetrically placed driving section centered on the perpendicular bisector of the top splenium, two driving sections are connected to one The group lever assembly in the same plane with the substrate, and lever assembly described in two groups using the perpendicular bisector of the top splenium as Central symmetry is placed, and the piezoelectric ceramic actuator supported in the top splenium is placed between two driving sections;
Each driving section is respectively provided with the pull rod that one end is connected with the top splenium and one end is fixed with the pull rod Connection and parallel with the top splenium respectively the first push rod and the second push rod, between first push rod and the top splenium Distance is less than the distance between second push rod and the top splenium;
Each lever assembly respectively include first connecting rod, respectively and one end perpendicular with the top splenium respectively with it is described The first strut and the second strut of first connecting rod flexible, hinged, one end and the second of the other end flexible, hinged of first strut Connecting rod, one end and the third connecting rod of the other end flexible, hinged of second strut and soft with the other end of the second connecting rod Property the hinged and fixed block that is fixed on the pedestal, one end flexible hinge of the first connecting rod is connected to output rod, and described the The distance between flexible, hinged position and first strut between one connecting rod and the output rod are less than and described second The distance between bar, the shaft of the second connecting rod and one end flexible, hinged of first push rod away from the pull rod, it is described The other end of third connecting rod and one end flexible, hinged of second push rod away from the pull rod, and the shaft of the third connecting rod With the substrate flexible, hinged.
As a modification of the present invention, the first connecting rod of lever assembly described in two groups and the same output rod are soft Property is hinged.
As a modification of the present invention, above-mentioned each flexible, hinged is hinged by flexible hinge.
As a modification of the present invention, it is provided with to pre-tighten the piezoelectric ceramic actuator in institute on the substrate State the adjusting screw in top splenium.
As a modification of the present invention, panel is further included, the panel is fixedly connected with the output rod.
Above-mentioned technical proposal is used, the invention has the advantages that:
1st, by setting lever assembly, using the principle of differential lever amplification, realize larger displacement equations multiple, have Larger stroke, simultaneously because the mode for employing flexible, hinged is attached, the gap and frictional force between each rod piece are smaller, Error can be reduced, precision is higher.
2nd, as a result of symmetrical structure, horizontal additional displacement is eliminated from principle, avoids generating shearing force, effectively Improve displacement accuracy.
3rd, between by the way that piezoelectric ceramic actuator is arranged in two driving sections, body that is compact-sized and causing whole device Product is relatively small.
Description of the drawings
Fig. 1 is the structure diagram of the symmetrical differential lever micro-displacement amplifying device of the present invention, clipped part in figure;
Fig. 2 is the decomposition diagram of the symmetrical differential lever micro-displacement amplifying device of the present invention.
It is as follows that correspondence is indicated in figure:
10- pedestals;20- substrates;
21- adjusting screws;30- piezoelectric blocks;
31- top spleniums;32- driving sections;
32a- pull rods;The first push rods of 32b-;
The second push rods of 32c-;40- lever assemblies;
41- first connecting rods;The first struts of 42-;
The second struts of 43-;44- second connecting rods;
45- third connecting rods;46- fixed blocks;
47- output rods;50- panels.
Specific embodiment
The present invention is described further in the following with reference to the drawings and specific embodiments.
As depicted in figs. 1 and 2, the differential lever micro-displacement amplifying device of symmetrical expression provided in this embodiment, including pedestal 10, The substrate 20 and the piezoelectric blocks 30 in the same plane with substrate 20 being fixed on pedestal 10, substrate 20 and 30 place of piezoelectric blocks Plane it is parallel with pedestal 10, the fixed form of substrate 20 and pedestal 10 can be conventional mode, as using screw fastening Mode is no longer described in detail herein.
The tool of piezoelectric blocks 30 is located at 31 both ends of top splenium and to hang down in top splenium 31 respectively there are one top splenium 31 and two Symmetrically placed driving section 32 centered on line.The concrete shape of top splenium 31 can determine according to actual needs, in the present embodiment In, top splenium 31 is in direct rod shape.Piezoelectric blocks 30 are preferably integrally formed part.
Two driving sections 32 are connected to one group of lever assembly in the same plane with substrate 20 and piezoelectric blocks 30 40, and two groups of lever assemblies 40 are also symmetrically placed centered on the perpendicular bisector of top splenium 31.Horizontal stroke can be so eliminated from principle To additional displacement, avoid generating shearing force during work, effectively increase displacement accuracy.
The piezoelectric ceramic actuator (not depending on going out in figure) supported in top splenium 31, piezoelectricity are placed between two driving sections 32 Ceramic driver is conventional parts, and the displacement input perpendicular to top splenium 31 can be provided to top splenium 31.
Each driving section 32, which is respectively provided with the pull rod 32a that one end is connected with top splenium 31 and one end and is fixed with pull rod 32a, to be connected It connects and the first parallel with top splenium 31 respectively push rod 32b and the second push rod 32c, between the first push rod 32b and top splenium 31 Distance be less than the distance between the second push rod 32b and top splenium 31, specific distance can according to required for device displacement enlargement Multiple be determined.In the present embodiment, arranged between the first push rod 32b, the second push rod 32c and pull rod 32a in " F " type.
Each lever assembly 40 includes first connecting rod 41 respectively, and one end perpendicular with top splenium 31 connects respectively with first respectively The first strut 42 and the second strut 43 of 41 flexible, hinged of bar, one end connect with the second of the other end flexible, hinged of the first strut 42 The other end flexibility of bar 44, one end with the third connecting rod 45 of the other end flexible, hinged of the second strut 43 and with second connecting rod 44 Fixed block 46 that is hinged and being fixed on pedestal 10.One end flexible hinge of first connecting rod 41 is connected to output rod 47, and first connecting rod The distance between flexible, hinged position and the first strut 42 between 41 and output rod 47 are less than it between the second strut 43 Distance.One end flexible, hinged of the shaft of second connecting rod 44 and the first push rod 32b away from pull rod 32a, third connecting rod 45 it is another End and one end flexible, hingeds of the second push rod 32c away from pull rod 32a, and the shaft of third connecting rod 45 and 20 flexible, hinged of substrate.
It should be noted that one end of each rod piece signified in above description or the other end are general to one kind of relative position Description is included, not merely refers to the end position of rod piece, is further included on corresponding rod piece close to the shaft part of the end position.
In addition, above-mentioned each flexible, hinged is all hinged preferably by flexible hinge.
Preferably, in the present embodiment, the first connecting rod 41 of two groups of lever assemblies 40 and same 47 flexible, hinged of output rod, Avoid generating the precision of shearing force influence amplifying device.
Preferably, in the present embodiment, it is provided with to pre-tighten piezoelectric ceramic actuator in top splenium 31 on substrate 20 On adjusting screw 21.So it is conveniently adjusted position and the pretightning force of piezoelectric ceramic actuator.
Preferably, in the present embodiment, panel 50 is further included, panel 50 is fixedly connected with output rod 47, it can be achieved that displacement The output diversity of amplification.
Preferably, in the present embodiment, substrate 20, piezoelectric blocks 30, lever assembly 40 and output rod 47 are processed for integral type The parts of acquisition, substrate 20, piezoelectric blocks 30, lever assembly 40 and output rod 47 after so processing need not be assembled, Rigging error is reduced, improves amplification precision.
In use, piezoelectric ceramic actuator input displacement, by the top splenium 31 of piezoelectric blocks 30 toward away from Piezoelectric Ceramic The direction of device promotes, and top splenium 31 drives driving section 32 to move together, then respectively by flexible, hinged the of driving section 32 One push rod 32b and the second connecting rod 44 on the second push rod 32c and the generation leverage of third connecting rod 45 so that the first strut 42 produces The raw movement identical with 31 direction of motion of top splenium, the second strut 42 generate the movement opposite with 31 direction of motion of top splenium, put Big displacement, finally by the leverage of first connecting rod 41, again displacement enlargement, and being exported displacement by output rod 47 Onto panel 50.
The present invention is described in detail above in conjunction with attached drawing, but embodiments of the present invention be not limited in it is above-mentioned Embodiment, those skilled in the art can make the present invention various modifications according to the prior art, such as will be in above-described embodiment Output rod 47 and panel 50 integrated parts etc. are set, these belong to protection scope of the present invention.

Claims (5)

1. a kind of differential lever micro-displacement amplifying device of symmetrical expression, which is characterized in that including pedestal, be fixed on the pedestal Substrate and the piezoelectric blocks in the same plane with the substrate, there are one top spleniums and two to be located at respectively for piezoelectric blocks tool The top splenium both ends and symmetrically placed driving section centered on the perpendicular bisector of the top splenium, two driving section difference One group of lever assembly in the same plane with the substrate is connected with, and lever assembly described in two groups is with the top splenium It is symmetrically placed centered on perpendicular bisector, it is placed with the Piezoelectric Ceramic supported in the top splenium between two driving sections Device;
Each driving section is respectively provided with the pull rod that one end is connected with the top splenium and one end is fixedly connected with the pull rod And first push rod and second push rod parallel with the top splenium respectively, the distance between first push rod and the top splenium Less than the distance between second push rod and the top splenium;
Each lever assembly includes first connecting rod respectively, and one end perpendicular with the top splenium be respectively with described first respectively The first hinged strut of flexibility of linking rod and the second strut, one end connect with the second of the other end flexible, hinged of first strut The other end flexibility of bar, one end with the third connecting rod of the other end flexible, hinged of second strut and with the second connecting rod Fixed block that is hinged and being fixed on the pedestal, the fixed block are located at the corresponding first connecting rod and the second connecting rod Between, for the second connecting rod between the corresponding fixed block and first push rod, one end of the first connecting rod is soft Property is hinged with output rod, and between flexible, hinged position between the first connecting rod and the output rod and first strut Distance the distance between be less than with described second strut, the shaft of the second connecting rod is with first push rod away from the drawing One end flexible, hinged of bar, the other end of the third connecting rod and one end flexible hinge of second push rod away from the pull rod It connects, and the shaft of the third connecting rod and the substrate flexible, hinged.
2. symmetrical differential lever micro-displacement amplifying device as described in claim 1, which is characterized in that lever group described in two groups The first connecting rod of part and the same output rod flexible, hinged.
3. symmetrical differential lever micro-displacement amplifying device as claimed in claim 2, which is characterized in that above-mentioned each flexible, hinged All it is to be hinged by flexible hinge.
4. the differential lever micro-displacement amplifying device of symmetrical expression as described in any claim in claim 1-3, feature exist In being provided with the piezoelectric ceramic actuator pre-tightening adjusting screw in the top splenium on the substrate.
5. the differential lever micro-displacement amplifying device of symmetrical expression as described in any claim in claim 1-3, feature exist In further including panel, the panel is fixedly connected with the output rod.
CN201510311979.9A 2015-06-09 2015-06-09 A kind of differential lever micro-displacement amplifying device of symmetrical expression Active CN104900573B (en)

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CN106782674B (en) * 2017-02-07 2022-10-25 广东工业大学 Micro-displacement amplifier and nano positioning device
CN106975961A (en) * 2017-05-19 2017-07-25 广东工业大学 A kind of long stroke fast tool servo
CN107414477B (en) * 2017-08-18 2019-03-15 天津大学 A kind of driving type piezoelectric actuator Two-degree-of-freedohigh-precision high-precision microoperation clamper
CN108406738B (en) * 2018-02-27 2020-11-20 天津大学 Two-degree-of-freedom micro-gripper
CN110739256A (en) * 2019-10-28 2020-01-31 华侨大学 micro-displacement amplifying devices
CN113941899B (en) * 2021-05-18 2022-12-16 齐鲁工业大学 Fast cutter servo device and application thereof in high-speed high-precision curved surface machining

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Inventor after: Fan Wei

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