CN1570567A - Micro displacement amplifying mechanism - Google Patents

Micro displacement amplifying mechanism Download PDF

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Publication number
CN1570567A
CN1570567A CN 03132498 CN03132498A CN1570567A CN 1570567 A CN1570567 A CN 1570567A CN 03132498 CN03132498 CN 03132498 CN 03132498 A CN03132498 A CN 03132498A CN 1570567 A CN1570567 A CN 1570567A
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CN
China
Prior art keywords
support plate
right support
micro displacement
mechanism body
displacement magnifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 03132498
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Chinese (zh)
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CN1235019C (en
Inventor
孙立宁
荣伟彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boshi Accurate Test Control Co Ltd Harbin Pllytechnical Univ
Harbin Institute of Technology
Original Assignee
Boshi Accurate Test Control Co Ltd Harbin Pllytechnical Univ
Harbin Institute of Technology
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Publication date
Application filed by Boshi Accurate Test Control Co Ltd Harbin Pllytechnical Univ, Harbin Institute of Technology filed Critical Boshi Accurate Test Control Co Ltd Harbin Pllytechnical Univ
Priority to CN 03132498 priority Critical patent/CN1235019C/en
Publication of CN1570567A publication Critical patent/CN1570567A/en
Application granted granted Critical
Publication of CN1235019C publication Critical patent/CN1235019C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

An apparatus for enlarging micro displacement driven by piezoelectric ceramics, which comprises body (1), piezoelectric ceramic (2) and pretightening pad (3). The piezoelectric ceramic (2) and pretightening pad (3) are located in the body and their inner surfaces contact with each other tightly while outer surfaces separately tightly connected with the left and right side walls of the inner body surface. There installed a inclined left and right supporting boards in the upper and down part of the body, and between the two boards, there locates a micro-displacement object. Both edges of the left and right supporting boards are tightly connected with the body side walls and micro-displacement object.

Description

A kind of micro displacement magnifying mechanism
Technical field: the present invention relates to a kind of micro displacement magnifying mechanism with Piezoelectric Ceramic.
Background technology: existing micro displacement magnifying mechanism exists that volume is big, rigidity is poor, the problem of frequency response difference.
Summary of the invention: the volume that existing micro displacement magnifying mechanism exists is big, rigidity is poor, the problem of frequency response difference in order to solve, and the present invention develops a kind of micro displacement magnifying mechanism.Micro displacement magnifying mechanism of the present invention is by mechanism body 1, piezoelectric ceramics 2 and tightening cushion 3 are formed, piezoelectric ceramics 2 and tightening cushion 3 all are arranged in the mechanism body 1, piezoelectric ceramics 2 closely contacts each other with the inner face of tightening cushion 3, the outer face of piezoelectric ceramics 2 and tightening cushion 3 respectively with the left side of mechanism body 1, the inside surface of right side wall 4 closely contacts, on the mechanism body 1, the left side of oblique setting is arranged respectively at the bottom, right support plate 5, on, the left side of below, be respectively equipped with between the right support plate 5, following little moving body 6, a left side, the two ends of right support plate 5 respectively with a left side, right side wall 4 and last, following little moving body 6 structure that fuses.Mechanism body 1 is made by 65Mn, aluminium alloy or spring steel.The arc of mechanism body 1 of the present invention or slab construction form are optimal state, obtain higher amplification ratio, shape is processed by wire cutting machine tool, can guarantee high symmetry, piezoelectric ceramics contacts with the whole faces of micro-displacement mechanism body, and the assurance displacement is not lost, and mechanism body 1 upper and lower little moving body 6 has threaded hole, can install and be combined into the multiple degrees of freedom micromotion mechanism arbitrarily, convenient and swift.Volume of the present invention is little, rigidity is big, frequency response is high, available different materials manufacturing, reach required each parameter request, the enlarger amplification ratio can reach more than four times, thereby realize the user's request of big displacement, big rigidity, high frequency sound, and mechanism form can there be various ways such as arc and flat board, several micro-displacement mechanisms one-tenth multiple degrees of freedom capable of being combined fine motion system, install simple and reliablely, the parameters index all is better than similar multiple degrees of freedom fine motion system.The present invention can realize the big displacement quantity requirement with less overall volume, amplification ratio is generally greater than four times, rigidity is comparable with the displacement micromotion mechanism more than big ten times, load-bearing capacity exceeds three times, and natural frequency is big more than four times, and displacement resolution is lower than 0.2/1000th of travel displacement, repetitive positioning accuracy is lower than the per mille of worktable displacement, change arc and slab construction size form and can increase amplification ratio, reduce, can customize by user's request but rigidity is relative with natural frequency.
Description of drawings: Fig. 1 is the structural representation of embodiment one, and Fig. 2 is the structural representation of embodiment two, and Fig. 3 is the structural representation of embodiment three, and Fig. 4 is the structural representation of embodiment four.
Embodiment one: consult Fig. 1, present embodiment is by mechanism body 1, piezoelectric ceramics 2 and tightening cushion 3 are formed, piezoelectric ceramics 2 and tightening cushion 3 all are arranged in the mechanism body 1, piezoelectric ceramics 2 closely contacts each other with the inner face of tightening cushion 3, the outer face of piezoelectric ceramics 2 and tightening cushion 3 respectively with the left side of mechanism body 1, the inside surface of right side wall 4 closely contacts, on the mechanism body 1, the left side of oblique setting is arranged respectively at the bottom, right support plate 5, on, the left side of below, be respectively equipped with between the right support plate 5, following little moving body 6, a left side, the two ends of right support plate 5 respectively with a left side, right side wall 4 and last, following little moving body 6 structure that fuses.Mechanism body 1 is made by 65Mn, aluminium alloy or spring steel.The left and right support plate 5 of mechanism body 1 upper and lower is that axis of symmetry is symmetrical set with the vertical center line K of mechanism body 1, left and right support plate 5 and inboard fluted 7 of left and right sidewall 4 junctions.The left and right support plate 5 of mechanism body 1 upper and lower and little moving body 6 form the structure to outer lug.On upper and lower little moving body 6, tapped through hole 6-1 is arranged.Left and right support plate 5 is a slab construction.
Embodiment two: consult Fig. 2, what present embodiment and embodiment one were different is that the left and right support plate 5 of mechanism body 1 upper and lower is an arc.Other composition and annexation and concrete
Embodiment one is identical.
Embodiment three: consult Fig. 3, what present embodiment and embodiment one were different is that left and right support plate 5 and little moving body 6 of mechanism body 1 upper and lower form the structure that concaves.Other composition is identical with embodiment one with annexation.
Embodiment four: consult Fig. 4, what present embodiment and embodiment two were different is that left and right support plate 5 and little moving body 6 of mechanism body 1 upper and lower form the structure that concaves.Other composition is identical with embodiment two with annexation.

Claims (9)

1, a kind of micro displacement magnifying mechanism, it is by mechanism body (1), piezoelectric ceramics (2) and tightening cushion (3) are formed, it is characterized in that piezoelectric ceramics (2) and tightening cushion (3) all are arranged in the mechanism body (1), piezoelectric ceramics (2) closely contacts each other with the inner face of tightening cushion (3), the outer face of piezoelectric ceramics (2) and tightening cushion (3) respectively with the left side of mechanism body (1), the inside surface of right side wall (4) closely contacts, on the mechanism body (1), the left side of oblique setting is arranged respectively at the bottom, right support plate (5), on, the left side of below, be respectively equipped with between the right support plate (5), following little moving body (6), a left side, the two ends of right support plate (5) respectively with a left side, right side wall (4) and last, following little moving body (6) structure that fuses.
2, a kind of micro displacement magnifying mechanism according to claim 1, the left and right support plate (5) that it is characterized in that mechanism body (1) upper and lower is that axis of symmetry is symmetrical set with the vertical center line (K) of mechanism body (1).
3, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower and inboard fluted (7) of left and right sidewall (4) junction.
4, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that tapped through hole (6-1) is arranged on upper and lower little moving body (6).
5, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that mechanism body (1) made by 65Mn, aluminium alloy or spring steel.
6, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower is slab construction.
7, a kind of micro displacement magnifying mechanism according to claim 1, the left and right support plate (5) that it is characterized in that mechanism body (1) upper and lower is an arc.
8,, it is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower and little moving body (6) form the structure to outer lug according to claim 1,6 or 7 described a kind of micro displacement magnifying mechanisms.
9,, it is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower and little moving body (6) form the structure that concaves according to claim 1,6 or 7 described a kind of micro displacement magnifying mechanisms.
CN 03132498 2003-07-11 2003-07-11 Micro displacement amplifying mechanism Expired - Fee Related CN1235019C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 03132498 CN1235019C (en) 2003-07-11 2003-07-11 Micro displacement amplifying mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 03132498 CN1235019C (en) 2003-07-11 2003-07-11 Micro displacement amplifying mechanism

Publications (2)

Publication Number Publication Date
CN1570567A true CN1570567A (en) 2005-01-26
CN1235019C CN1235019C (en) 2006-01-04

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 03132498 Expired - Fee Related CN1235019C (en) 2003-07-11 2003-07-11 Micro displacement amplifying mechanism

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CN (1) CN1235019C (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100502075C (en) * 2006-02-14 2009-06-17 先进自动器材有限公司 Piezoelectric device with amplifying means
CN102394270A (en) * 2011-09-14 2012-03-28 中国科学院国家天文台南京天文光学技术研究所 Two-stage micro-displacement amplification mechanism
CN102446562A (en) * 2011-08-29 2012-05-09 华南理工大学 Micro-displacement amplifying mechanism based on compliant mechanism
CN104037319A (en) * 2014-05-30 2014-09-10 西安交通大学 Piezoelectric displacement amplification mechanism of half diamond structure
CN104362888A (en) * 2014-10-16 2015-02-18 中国科学院上海技术物理研究所 Piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism
CN104900573A (en) * 2015-06-09 2015-09-09 华侨大学 Symmetric differential-lever micro displacement amplification apparatus
CN106838566A (en) * 2016-11-23 2017-06-13 南京航空航天大学 The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives
CN108726106A (en) * 2018-06-11 2018-11-02 广东科学技术职业学院 A kind of piezoelectric stack driving feeding pedestal
CN110500979A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
CN110500980A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
CN110957938A (en) * 2019-12-09 2020-04-03 西安交通大学 Positive-negative bidirectional micro-displacement amplification flexible mechanism and method based on shear type piezoelectric ceramics

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100502075C (en) * 2006-02-14 2009-06-17 先进自动器材有限公司 Piezoelectric device with amplifying means
CN102446562A (en) * 2011-08-29 2012-05-09 华南理工大学 Micro-displacement amplifying mechanism based on compliant mechanism
CN102394270A (en) * 2011-09-14 2012-03-28 中国科学院国家天文台南京天文光学技术研究所 Two-stage micro-displacement amplification mechanism
CN104037319A (en) * 2014-05-30 2014-09-10 西安交通大学 Piezoelectric displacement amplification mechanism of half diamond structure
CN104037319B (en) * 2014-05-30 2015-04-15 西安交通大学 Piezoelectric displacement amplification mechanism of half diamond structure
CN104362888A (en) * 2014-10-16 2015-02-18 中国科学院上海技术物理研究所 Piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism
CN104900573A (en) * 2015-06-09 2015-09-09 华侨大学 Symmetric differential-lever micro displacement amplification apparatus
CN104900573B (en) * 2015-06-09 2018-05-22 华侨大学 A kind of differential lever micro-displacement amplifying device of symmetrical expression
CN106838566A (en) * 2016-11-23 2017-06-13 南京航空航天大学 The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives
CN110500979A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
CN110500980A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
CN108726106A (en) * 2018-06-11 2018-11-02 广东科学技术职业学院 A kind of piezoelectric stack driving feeding pedestal
CN110957938A (en) * 2019-12-09 2020-04-03 西安交通大学 Positive-negative bidirectional micro-displacement amplification flexible mechanism and method based on shear type piezoelectric ceramics

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Granted publication date: 20060104

Termination date: 20100711