CN1235019C - Micro displacement amplifying mechanism - Google Patents
Micro displacement amplifying mechanism Download PDFInfo
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- CN1235019C CN1235019C CN03132498.3A CN03132498A CN1235019C CN 1235019 C CN1235019 C CN 1235019C CN 03132498 A CN03132498 A CN 03132498A CN 1235019 C CN1235019 C CN 1235019C
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- support plate
- micro displacement
- mechanism body
- right support
- piezoelectric ceramics
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- 230000007246 mechanism Effects 0.000 title claims abstract description 60
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 29
- 239000000919 ceramic Substances 0.000 claims abstract description 19
- 238000010276 construction Methods 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000639 Spring steel Inorganic materials 0.000 claims description 3
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention provides a micro displacement amplifying mechanism which relates to a micro displacement amplifying mechanism driven by piezoelectric ceramics. The micro displacement amplifying mechanism is composed of a mechanism body (1), piezoelectric ceramics (2) and a pretension pad (3), wherein both the piezoelectric ceramics (2) and the pretension pad (3) are arranged inside the mechanism body (1); the piezoelectric ceramics (2) and the inner end surface of the pretension pad (3) are in tight contact; the piezoelectric ceramics (2) and the outer end surface of the pretension pad (3) are respectively in tight contact with the inner surfaces of the left side wall and the right side wall (4) of the mechanism body (1); the upper part and the lower part of the mechanism body (1) are respectively and aslant provided with a left supporting plate and a right supporting plate (5); an upper micro motion body and a lower micro motion body (6) are respectively arranged between the left supporting plate and the right supporting plate (5) on the upper part and the lower part of the mechanism body; both ends of the left supporting plate and the right supporting plate (5) are respectively connected with the left side wall and the right side wall (4) and the upper micro motion body and the lower micro motion body (6) into an integral structure. The present invention solves the problems of large volume, poor rigidity and poor frequency response existing in the existing micro displacement amplifying mechanism.
Description
Technical field: the present invention relates to a kind of micro displacement magnifying mechanism with Piezoelectric Ceramic.
Background technology: existing micro displacement magnifying mechanism exists that volume is big, rigidity is poor, the problem of frequency response difference.
Summary of the invention: the volume that existing micro displacement magnifying mechanism exists is big, rigidity is poor, the problem of frequency response difference in order to solve, and the present invention develops a kind of micro displacement magnifying mechanism.Micro displacement magnifying mechanism of the present invention is by mechanism body 1, piezoelectric ceramics 2 and tightening cushion 3 are formed, piezoelectric ceramics 2 and tightening cushion 3 all are arranged in the mechanism body 1, piezoelectric ceramics 2 closely contacts each other with the inner face of tightening cushion 3, the outer face of piezoelectric ceramics 2 and tightening cushion 3 respectively with the left side of mechanism body 1, the inside surface of right side wall 4 closely contacts, on the mechanism body 1, the left side of oblique setting is arranged respectively at the bottom, right support plate 5, on, the left side of below, be respectively equipped with between the right support plate 5, following little moving body 6, a left side, the two ends of right support plate 5 respectively with a left side, right side wall 4 and last, following little moving body 6 structure that fuses.Mechanism body 1 is made by 65Mn, aluminium alloy or spring steel.The arc of mechanism body 1 of the present invention or slab construction form are optimal state, obtain higher amplification ratio, shape is processed by wire cutting machine tool, can guarantee high symmetry, piezoelectric ceramics contacts with the whole faces of micro-displacement mechanism body, and the assurance displacement is not lost, and mechanism body 1 upper and lower little moving body 6 has threaded hole, can install and be combined into the multiple degrees of freedom micromotion mechanism arbitrarily, convenient and swift.Volume of the present invention is little, rigidity is big, frequency response is high, available different materials manufacturing, reach required each parameter request, the enlarger amplification ratio can reach more than four times, thereby realize the user's request of big displacement, big rigidity, high frequency sound, and mechanism form can there be various ways such as arc and flat board, several micro-displacement mechanisms one-tenth multiple degrees of freedom capable of being combined fine motion system, install simple and reliablely, the parameters index all is better than similar multiple degrees of freedom fine motion system.The present invention can realize the big displacement quantity requirement with less overall volume, amplification ratio is generally greater than four times, rigidity is comparable with the displacement micromotion mechanism more than big ten times, load-bearing capacity exceeds three times, and natural frequency is big more than four times, and displacement resolution is lower than 0.2/1000th of travel displacement, repetitive positioning accuracy is lower than the per mille of worktable displacement, change arc and slab construction size form and can increase amplification ratio, reduce, can customize by user's request but rigidity is relative with natural frequency.
Description of drawings: Fig. 1 is the structural representation of embodiment one, and Fig. 2 is the structural representation of embodiment two, and Fig. 3 is the structural representation of embodiment three, and Fig. 4 is the structural representation of embodiment four.
Embodiment one: consult Fig. 1, present embodiment is by mechanism body 1, piezoelectric ceramics 2 and tightening cushion 3 are formed, piezoelectric ceramics 2 and tightening cushion 3 all are arranged in the mechanism body 1, piezoelectric ceramics 2 closely contacts each other with the inner face of tightening cushion 3, the outer face of piezoelectric ceramics 2 and tightening cushion 3 respectively with the left side of mechanism body 1, the inside surface of right side wall 4 closely contacts, on the mechanism body 1, the left side of oblique setting is arranged respectively at the bottom, right support plate 5, on, the left side of below, be respectively equipped with between the right support plate 5, following little moving body 6, a left side, the two ends of right support plate 5 respectively with a left side, right side wall 4 and last, following little moving body 6 structure that fuses.Mechanism body 1 is made by 65Mn, aluminium alloy or spring steel.The left and right support plate 5 of mechanism body 1 upper and lower is that axis of symmetry is symmetrical set with the vertical center line K of mechanism body 1, left and right support plate 5 and inboard fluted 7 of left and right sidewall 4 junctions.The left and right support plate 5 of mechanism body 1 upper and lower and little moving body 6 form the structure to outer lug.On upper and lower little moving body 6, tapped through hole 6-1 is arranged.Left and right support plate 5 is a slab construction.
Embodiment two: consult Fig. 2, what present embodiment and embodiment one were different is that the left and right support plate 5 of mechanism body 1 upper and lower is an arc.Other composition and annexation and concrete
Embodiment one is identical.
Embodiment three: consult Fig. 3, what present embodiment and embodiment one were different is that left and right support plate 5 and little moving body 6 of mechanism body 1 upper and lower form the structure that concaves.Other composition is identical with embodiment one with annexation.
Embodiment four: consult Fig. 4, what present embodiment and embodiment two were different is that left and right support plate 5 and little moving body 6 of mechanism body 1 upper and lower form the structure that concaves.Other composition is identical with embodiment two with annexation.
Claims (9)
1, a kind of micro displacement magnifying mechanism, it is by mechanism body (1), piezoelectric ceramics (2) and tightening cushion (3) are formed, it is characterized in that piezoelectric ceramics (2) and tightening cushion (3) all are arranged in the mechanism body (1), piezoelectric ceramics (2) closely contacts each other with the inner face of tightening cushion (3), the outer face of piezoelectric ceramics (2) and tightening cushion (3) respectively with the left side of mechanism body (1), the inside surface of right side wall (4) closely contacts, on the mechanism body (1), the left side of oblique setting is arranged respectively at the bottom, right support plate (5), on, the left side of below, be respectively equipped with between the right support plate (5), following little moving body (6), a left side, the two ends of right support plate (5) respectively with a left side, right side wall (4) and last, following little moving body (6) structure that fuses.
2, a kind of micro displacement magnifying mechanism according to claim 1, the left and right support plate (5) that it is characterized in that mechanism body (1) upper and lower is that axis of symmetry is symmetrical set with the vertical center line (K) of mechanism body (1).
3, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower and inboard fluted (7) of left and right sidewall (4) junction.
4, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that tapped through hole (6-1) is arranged on upper and lower little moving body (6).
5, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that mechanism body (1) made by 65Mn, aluminium alloy or spring steel.
6, a kind of micro displacement magnifying mechanism according to claim 1 is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower is slab construction.
7, a kind of micro displacement magnifying mechanism according to claim 1, the left and right support plate (5) that it is characterized in that mechanism body (1) upper and lower is an arc.
8,, it is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower and little moving body (6) form the structure to outer lug according to claim 1,6 or 7 described a kind of micro displacement magnifying mechanisms.
9,, it is characterized in that the left and right support plate (5) of mechanism body (1) upper and lower and little moving body (6) form the structure that concaves according to claim 1,6 or 7 described a kind of micro displacement magnifying mechanisms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN03132498.3A CN1235019C (en) | 2003-07-11 | 2003-07-11 | Micro displacement amplifying mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN03132498.3A CN1235019C (en) | 2003-07-11 | 2003-07-11 | Micro displacement amplifying mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1570567A CN1570567A (en) | 2005-01-26 |
| CN1235019C true CN1235019C (en) | 2006-01-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN03132498.3A Expired - Fee Related CN1235019C (en) | 2003-07-11 | 2003-07-11 | Micro displacement amplifying mechanism |
Country Status (1)
| Country | Link |
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| CN (1) | CN1235019C (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100502075C (en) * | 2006-02-14 | 2009-06-17 | 先进自动器材有限公司 | Piezoelectric device with amplifying means |
| CN102446562B (en) * | 2011-08-29 | 2014-02-12 | 华南理工大学 | Micro-displacement amplifying mechanism based on compliant mechanism |
| CN102394270A (en) * | 2011-09-14 | 2012-03-28 | 中国科学院国家天文台南京天文光学技术研究所 | Two-stage micro-displacement amplification mechanism |
| CN104037319B (en) * | 2014-05-30 | 2015-04-15 | 西安交通大学 | Piezoelectric displacement amplification mechanism of half diamond structure |
| CN104362888B (en) * | 2014-10-16 | 2016-07-06 | 中国科学院上海技术物理研究所 | The eight of a kind of Piezoelectric Driving twist coaxial micro displacement magnifying mechanism |
| CN104900573B (en) * | 2015-06-09 | 2018-05-22 | 华侨大学 | A kind of differential lever micro-displacement amplifying device of symmetrical expression |
| CN106838566A (en) * | 2016-11-23 | 2017-06-13 | 南京航空航天大学 | The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives |
| CN110500979A (en) * | 2018-05-17 | 2019-11-26 | 技鼎股份有限公司 | Displacement amplification device and displacement amplifier |
| CN110500980A (en) * | 2018-05-17 | 2019-11-26 | 技鼎股份有限公司 | Displacement amplification device and displacement amplifier |
| CN108726106A (en) * | 2018-06-11 | 2018-11-02 | 广东科学技术职业学院 | A kind of piezoelectric stack driving feeding pedestal |
| CN110957938B (en) * | 2019-12-09 | 2020-09-15 | 西安交通大学 | Positive-negative bidirectional micro-displacement amplification flexible mechanism and method based on shear type piezoelectric ceramics |
-
2003
- 2003-07-11 CN CN03132498.3A patent/CN1235019C/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN1570567A (en) | 2005-01-26 |
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Granted publication date: 20060104 Termination date: 20100711 |