CN104362888A - Piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism - Google Patents
Piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism Download PDFInfo
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Abstract
The invention discloses a piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism which comprises a support rod, a support base, a double-hinge fixing cover, a piezoelectric rod, a piezoelectric rod connecting rack, a support lateral seat connecting rod, a support lateral seat, a flexible hinge and a unilateral hinge mounting cover. The piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism mainly has the advantages that flexible hinges are used, and the whole mechanism is free of friction and needs no lubrication; the mechanism uses piezoelectric ceramic as an actuator, the motion precision of the mechanism can be submicron dimension, the motion range of the mechanism can reach dozens of micrometers, and large push force can be provided; an eight-strand coaxial mechanism can eliminate the shearing force which the piezoelectric ceramic cannot bear; micro displacement amplification proportion can be adjusted by changing the position relations among hinge axes.
Description
Technical field:
The coaxial micro displacement magnifying mechanism of eight strands of Piezoelectric Driving, to be applied in space precise optical-mechanical system micro-actuates field in mechanism, can provide the micrometric displacement of high accuracy, high thrust.
Background technology:
In recent years, along with microelectric technique, aerospace, developing rapidly of the subjects such as bioengineering, formally enters " sub-micron-nanometer " epoch.In numerous technical fields such as electronics, optics, machine-building, in the urgent need to high accuracy, high-resolution, the micro-displacement mechanism of high reliability, in order to on-line operation or coordinate other instrument and equipments to complete high-precision research and use.In astronomical observation, telescope primary mirror bore plays most important effect to target imaging quality.From Galileo, Kepler telescope so far, primary mirror aperture from tens millimeters to tens meters and still development.The increase of bore, the geometry thereupon bringing overall volume and quality doubly increases, the external bore manufactured in recent years is at the primary mirror of more than 8m, mostly have employed assembled mirror technology, in order to compensate the error of segmented mirror shape, each little mirror body back all have employed micro-displacement mechanism and immediately revises, for meeting actual needs, work mirror shape correction magnitude is nanometer scale, as VLT, SOAR, SUBARU have employed this splicing mirror Micro-displacement Technique.
Several micro-displacement mechanisms conventional in Practical Project mainly contain:
(1), mechanical transmission-type micro-displacement mechanism;
Mechanical transmission-type micro-displacement mechanism is a kind of form of initial micro-displacement mechanism, and its Technical comparing is ripe, and version is more, mainly contains screw mechanism, leverage, voussoir cam mechanism, elastic mechanism and their combined mechanism.The feature of mechanical transmission-type micro-displacement mechanism: there is good resolution; Stroke is larger; The shortcoming such as there is mechanical clearance, fretting wear and creep, so autokinesis and kinematic accuracy are all difficult to reach high accuracy, therefore is only adapted to medium accuracy.
(2), linear motor type micro-displacement mechanism;
Linear electric motors flow through the size of the electric current of coil, frequency and circulating direction and produce by regulating the push-and-pull action power determined, this motor have formed large, without delayed, without advantages such as drive gap and good frequency responses.
(3), driving type piezoelectric actuator micro-displacement mechanism
Piezoelectric micro-displacement actuator utilizes dielectric inverse piezoelectric effect in the electric field to carry out work.Dielectric crystal is placed in external electric field, and the deformation that due to electric field action, crystal can extend (or shortening), deformation size and external electronic field size are directly proportional, and the direction of deformation is relevant with direction of an electric field, and this phenomenon is inverse piezoelectric effect.The stacked structure that piezoelectric element is conventional.It is superposed by many identical piezoelectric ceramic pieces, adopt circuit in parallel mode by every sheet ceramic joining together, adjacent potsherd polarised direction is contrary, the polarised direction of every sheet is consistent with direction of an electric field, larger displacement can be produced at lower voltages, the size changing input voltage can obtain different micrometric displacements, avoids the error that mechanical structure causes.It is little that piezoelectric ceramic has volume, the advantage such as displacement resolution is high, active force is large, response is fast, noiseless, heating are little, but its range is smaller.
As far back as the sixties in last century, in the exploration evolution of aerospace field, to the supporting construction realizing intrinsic deflection among a small circle, not only propose high-resolution requirement, go back requirement claimed structure with microminaturization.People, after to all types of resiliency supported experimental exploring, progressively develop that volume is little, mechanical friction, gapless, move flexible hinge flexibly.Flexure hinge mechanism make use of elastomeric material micro-strain and from the characteristic of replying, eliminates the idle running in transmission process and mechanical friction, can obtain the displacement resolution of superelevation.Subsequently, flexible hinge is widely used in the instrument and meters such as gyroscope, accelerometer, precision balance, STT missile, and obtains unprecedented high accuracy and stability.Flexible hinge is used for the finite angular displacements doing compound movement around axle, and its feature is: mechanical friction, gapless, autokinesis are high.
The patent No. is in CN03132498.3, and disclosed a kind of micro displacement magnifying mechanism, have employed Piezoelectric Ceramic, and its supporting bracket can be considered flexible member, and this patent, when load gravity center bias, easily causes failure by shear to piezoelectric bar.And the flexibility of supporting bracket and rigidity can not get both, and will certainly reduce the frequency response of system.
Current China is in the research also backwardness relatively of microposition technical field, therefore, carrying out the correlative study of Micro-displacement Technique, for the gap reduced with going together, promoting that the defence and military of China and the fast development of national economy have important and far-reaching meaning both at home and abroad.
Summary of the invention:
Need Micro-displacement Technique to improve the application background of device resolution for space precise optical-mechanical system, the invention discloses a kind of coaxial micro displacement magnifying mechanism of eight strands of Piezoelectric Driving.
The coaxial micro displacement magnifying mechanism of eight strands mainly comprises: support bar, base for supporting, double-strand chain fixed cap, piezoelectric bar, piezoelectric bar link, support-side seat link, support-side seat, flexible hinge, monolateral hinge mounting cover nine parts.
The support bar material that mechanism adopts is titanium alloy, body shape is one piece of rectangular block, rectangular block width is the entire length of flexible hinge, a trapezoidal groove is had at the front surface of rectangular block, two minor arc grooves, dovetail groove is gone to the bottom and to be overlapped with front surface bottom, and it is symmetrical about front surface vertical axis, minor arc slot is on front surface the right and left line, the center of circle is positioned in the horizontal symmetry axis of frontal plane, arc radius size equals the radius of flexible hinge, and precision is H7, and the center of circle is at a distance of each 0.25mm in sideline, left and right; At rectangular block upper surface, two ends, left and right respectively have a symmetrical U-type groove, after Width fluting, the length in residue two sidelines is equal to the width at flexible hinge two ends, U-shaped for assembling hinge time prevent from interfering, center has a rectangular through slot and carries out lightweight; About rectangular block, surface respectively has four screwed holes.
The base for supporting structural material that mechanism adopts is titanium alloy, structure lower end is the installation base frame having four screwed holes, for improving the surface figure accuracy of base frame bottom surface, the thick U-type groove of a 2mm that Open Side Down is opened in bottom surface center, upper end is two protruding rectangular blocks, two rectangular block centre distance 2mms larger than the width of whole flexible hinge, a minor arc groove is opened in each rectangular block upper end, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge, precision is H7, the center of circle exceeds upper sideline 0.25mm, each rectangular block upper surface two ends respectively have two screwed holes.
The double-strand chain fixed cap that mechanism adopts is titanium alloy material, the upper end of structure is the rectangular slab of one piece of hollow, both sides, lower end are two trapezoid blocks protruded, two trapezoid block centre distance 2mms larger than the width of whole flexible hinge, each trapezoid block bottom has a minor arc groove, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge, precision is H7, the center of circle is lower than the sideline 0.25mm that goes to the bottom, chamfered is carried out at trapezoid block two lower base angles, and the two ends of each arc groove respectively have two reverse counter sinks.
The piezoelectric bar that mechanism adopts determines type selecting according to the size of operating load and size scale, and select PI Corp. P ?845 product, its structure one end is the threaded rod protruded, and the other end is screwed hole.
The piezoelectric bar link that mechanism adopts and support-side seat link are titanium alloy material, structure are the threaded rod with chassis, chassis have four waist holes.
The support-side seat that mechanism adopts is titanium alloy material, the rectangular slab of a screwed hole is had centered by the lower end of structure, upper end is two trapezoid blocks protruded, upper base is long limit, two trapezoid block centre distance 2mms larger than the width of whole flexible hinge, on each trapezoid block, base has a minor arc groove, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge, precision is H7, the center of circle is higher than upper hemline 0.25mm, and chamfered is carried out at the upper base angle of trapezoid block two, and each trapezoid block upper surface arc groove two ends respectively have two screwed holes.
According to integrally-built rigidity requirement, we select 6000 of riverhawk company serial hinges, this flexible hinge is cylindrical hinge, flexible hinge external cylindrical surface is divided into three sections, two end portions inside is connected to a moving whole, occur mutually to move by reed is bending with mid portion, and the width of each side is about the half of interlude.
The monolateral hinge mounting cover that mechanism adopts is titanium alloy material, overall structure is a trapezoid block, chamfered is carried out at trapezoid block two lower base angles, and have minor arc groove in bottom, arc radius size equals the radius of flexible hinge, and precision is H7, and the center of circle is lower than bottom surface 0.25mm, minor arc well width equals the width at flexible hinge two ends, and the two ends of minor arc groove respectively have a counter sink.
Mechanism uses four support bars, and support bar two ends minor arc groove home position is placed in flexible hinge axis projections point position respectively.
Mechanism uses eight flexible hinges, and coaxial line is arranged and kept the safe distance of 2mm between two, four summits of the subpoint composition rhombus of four axis.
The structure that mechanism adopts is symmetrical, upper and lower symmetric configuration.
Mechanism employing is considered as connected mode and is: base for supporting is fixed by screws on base plate, double-strand chain fixed cap is connected with base for supporting or support-side seat by screw, for fixing the stage casing of two flexible hinges, support bar two ends respectively hinge mounting cover monolateral with two are threaded, for the two ends of fixing flexible hinge, piezoelectric bar one end is connected with support-side seat by the threaded rod of self, being connected with piezoelectric bar link by internal thread of the other end, support-side seat link is threaded with the support-side seat of the other end, the chassis of two links is bolted, thus the support-side seat at whole piezoelectric bar and two ends is coupled together.Note smearing locking glue in the process that screw thread is installed.
The operation principle of mechanism is: whole mechanism is diamond-shaped configuration, and in motion process, remain that configuration is constant, when piezoelectric bar carries out stretching or compressing according to control overflow, there is corresponding stretching or compression in the whole diagonal at piezoelectric bar place, then another diagonal then accordingly compression or stretch, produce destination party to motion.Piezoelectric bar is in whole motion process, and the diagonal symmetric motion of two relative point of intersection of strut at each axis projections point place, direction is contrary, therefore the torque direction that flexible hinge produces is contrary, and the resultant moment of generation is zero.The resultant moment of two support-side seats is zero moment of torsion that can ensure can not produce harm piezoelectric bar in piezoelectric bar motion process; The resultant moment of two base for supporting is zero can ensure that in motion process, destination party is to remaining constant.
Advantage of the present invention is: 1, use flexible hinge, whole device does not rub, without the need to lubrication; 2, it uses piezoelectric ceramic to be actuator, and kinematic accuracy can be sub-micrometer scale, and range of movement can reach tens microns, and can provide larger thrust; 3, eight strand axial mechanisms can eliminate the shearing force that piezoelectric ceramic can not bear; 4, micrometric displacement magnification ratio can regulate, and regulates micrometric displacement magnification ratio by the position relationship changed between hinge axes.
Accompanying drawing illustrates:
Fig. 1 is the coaxial micro displacement magnifying mechanism front view of eight hinges, and shown by reference numeral is expressed as: 1, support bar 2, base for supporting 3, double-strand chain fixed cap 4, piezoelectric bar 5, piezoelectric bar link 6, support-side seat link 7, support-side seat 8, flexible hinge 9, monolateral hinge mounting cover;
Fig. 2 is the coaxial micro displacement magnifying mechanism axonometric drawing of eight hinges;
Tu3Shi mechanism geometrical relationship schematic diagram;
Fig. 4 is supporting bar structure figure;
Fig. 5 is base for supporting structure chart;
Fig. 6 is double-strand chain fixed cap structure chart;
Fig. 7 is support-side holder structure figure;
Fig. 8 is syllogic cylindricality flexible hinge structure figure;
Fig. 9 is monolateral hinge mounting cover structure chart.
Embodiment:
The coaxial micro displacement magnifying mechanism of eight strands of Piezoelectric Driving, mechanism comprises: support bar, base for supporting, double-strand chain fixed cap, piezoelectric bar, piezoelectric bar link, support-side seat link, support-side seat, flexible hinge, monolateral hinge mounting cover.
The coaxial micro displacement magnifying mechanism of eight strands mainly comprises: support bar, base for supporting, double-strand chain fixed cap, piezoelectric bar, piezoelectric bar link, support-side seat link, support-side seat, flexible hinge, monolateral hinge mounting cover nine parts.
The support bar material that mechanism adopts is titanium alloy, body shape is one piece of rectangular block, rectangular block width is the entire length of flexible hinge, a trapezoidal groove is had at the front surface of rectangular block, two minor arc grooves, dovetail groove is gone to the bottom and to be overlapped with front surface bottom, and it is symmetrical about front surface vertical axis, minor arc slot is on front surface the right and left line, the center of circle is positioned in the horizontal symmetry axis of frontal plane, arc radius size equals the radius of flexible hinge, and precision is H7, and the center of circle is at a distance of each 0.25mm in sideline, left and right; At rectangular block upper surface, two ends, left and right respectively have a symmetrical U-type groove, after Width fluting, the length in residue two sidelines is equal to the width at flexible hinge two ends, U-shaped for assembling hinge time prevent from interfering, center has a rectangular through slot and carries out lightweight; About rectangular block, surface respectively has four screwed holes;
The base for supporting structural material that mechanism adopts is titanium alloy, structure lower end is the installation base frame having four screwed holes, for improving the surface figure accuracy of base frame bottom surface, the thick U-type groove of a 2mm that Open Side Down is opened in bottom surface center, upper end is two protruding rectangular blocks, two rectangular block centre distance 2mms larger than the width of whole flexible hinge, a minor arc groove is opened in each rectangular block upper end, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge, precision is H7, the center of circle exceeds upper sideline 0.25mm, each rectangular block upper surface two ends respectively have two screwed holes,
The double-strand chain fixed cap that mechanism adopts is titanium alloy material, the upper end of structure is the rectangular slab of one piece of hollow, both sides, lower end are two trapezoid blocks protruded, two trapezoid block centre distance 2mms larger than the width of whole flexible hinge, each trapezoid block bottom has a minor arc groove, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge, precision is H7, the center of circle is lower than the sideline 0.25mm that goes to the bottom, chamfered is carried out at trapezoid block two lower base angles, and the two ends of each arc groove respectively have two reverse counter sinks.
The piezoelectric bar that mechanism adopts determines type selecting according to the size of operating load and size scale, and select PI Corp. P ?845 product, its structure one end is the threaded rod protruded, and the other end is screwed hole.
The piezoelectric bar link that mechanism adopts and support-side seat link are titanium alloy material, structure are the threaded rod with chassis, chassis have four waist holes;
The support-side seat that mechanism adopts is titanium alloy material, the rectangular slab of a screwed hole is had centered by the lower end of structure, upper end is two trapezoid blocks protruded, upper base is long limit, two trapezoid block centre distance 2mms larger than the width of whole flexible hinge, on each trapezoid block, base has a minor arc groove, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge, precision is H7, the center of circle is higher than upper hemline 0.25mm, and chamfered is carried out at the upper base angle of trapezoid block two, and each trapezoid block upper surface arc groove two ends respectively have two screwed holes;
According to integrally-built rigidity requirement, we select 6000 of riverhawk company serial hinges, this flexible hinge is cylindrical hinge, flexible hinge external cylindrical surface is divided into three sections, two end portions inside is connected to a moving whole, occur mutually to move by reed is bending with mid portion, and the width of each side is about the half of interlude.
The monolateral hinge mounting cover that mechanism adopts is titanium alloy material, overall structure is a trapezoid block, chamfered is carried out at trapezoid block two lower base angles, and have minor arc groove in bottom, arc radius size equals the radius of flexible hinge, and precision is H7, and the center of circle is lower than bottom surface 0.25mm, minor arc well width equals the width at flexible hinge two ends, and the two ends of minor arc groove respectively have a counter sink.
Whole mechanism needs 4 support bars, 2 base for supporting, 4 bilateral hinge fixed caps, 1 piezoelectric bar, 1 piezoelectric bar link, 1 support-side seat link, 2 support-side seats, 8 flexible hinges, 16 monolateral hinge mounting covers.
A flexible hinge is assembled at each support bar two ends in mechanism respectively, any one end flexible hinge of assemble two struts is fixed on base for supporting, the flexible hinge of two struts adopts coaxially arranged, and position base horizontal positioned, strut positions and vertical angle are
two struts are symmetrical, and angle is θ, are assembled into base assembling.
The base for supporting assembling assembled two is arranged symmetrically with, be respectively base for supporting assembling and the assembling of lower support base, the flexible hinge of adjacent two support bars is cemented on support-side seat between two, forms the structural framing of rhombus, under now noting guarantee two support-side seat nature, keep level.
Piezoelectric bar one end is threaded connection at support-side seat, the other end is connected on opposite side support-side seat link by piezoelectric bar link, piezoelectric bar link and support-side seat link two parts screw thread are respectively left-handed and dextrorotation, during assembling, just can regulate the centre-to-centre spacing between two central side seats among a small circle by rotating Vortex piezoelectric bar link and support-side seat link.
In assembling process, ensure that the depth of parallelism of upper and lower base for supporting is better than 2.
Whole support bar geometrical relationship as shown in Figure 3, determines rational object height y according to designing requirement, and whole micrometric displacement range Δ y, and the micrometric displacement range for the piezoelectric bar selected is Δ x, according to formula:
x
2+y
2＝(2l)
2
Roughly determine support-side seat centre-to-centre spacing x thus, and then can go out press stay length l by formulae discovery above.The piezoelectric bar length that type selecting is good is x
piezoelectric bar, then piezoelectricity Connection Block length x
connection Block=x-x
piezoelectric bar
So far, all physical dimensions of whole mechanism are determined all, then the final motion size of object height y also accurately can be provided by following formula:
According to the change requirement of object height y, also instead can push away the size of the stroke of place piezoelectric bar x, and then drive according to the piezoelectricity curve demarcated in advance.
Because mechanism is applied in space precise optical-mechanical system, the matching requirements of mechanism should meet following cooperation and require:
Coaxially go up the axiality IT7 requirement of two flexible hinges;
Upper and lower base for supporting depth of parallelism IT7 requirement;
Left and right sides seat depth of parallelism IT7 requirement;
The perpendicularity IT7 requirement of side seat and work bottom surface;
All hinges installs the requirement of contact-making surface working cylindricity IT7;
Two support bar opposed vertical axial symmetry degree IT7 requirement adjacent on base for supporting;
Two support bar relative level axial symmetry degree IT7 requirement adjacent on support-side seat.
Claims (1)
1. the coaxial micro displacement magnifying mechanism of eight strands of Piezoelectric Driving, mechanism comprises: support bar (1), base for supporting (2), double-strand chain fixed cap (3), piezoelectric bar (4), piezoelectric bar link (5), support-side seat link (6), support-side seat (7), flexible hinge (8), monolateral hinge mounting cover (9); It is characterized in that:
Described support bar (1) is titanium alloy material, body shape is one piece of rectangle alloy block, the width of rectangular block is the entire length of flexible hinge (8), a trapezoidal groove is had at the front surface of rectangular block, two minor arc grooves, dovetail groove is gone to the bottom and to be overlapped with front surface bottom, and it is symmetrical about front surface vertical axis, minor arc slot is on front surface the right and left line, the center of circle is positioned in the horizontal symmetry axis of frontal plane, arc radius size equals the radius of flexible hinge (8), arc radius dimensional accuracy is H7, the center of circle is at a distance of each 0.25mm in sideline, left and right, at rectangular block upper surface, two ends, left and right respectively have a symmetrical U-type groove, after Width fluting, the length in residue two sidelines is equal to the width at flexible hinge (8) two ends, U-shaped for assembling hinge time prevent from interfering, center has a rectangular through slot and carries out lightweight, about rectangular block, surface respectively has four screwed holes,
Described base for supporting (2) is titanium alloy material, structure lower end is the installation base frame having four screwed holes, for improving the surface figure accuracy of base frame bottom surface, the thick U-type groove of a 2mm that Open Side Down is opened in bottom surface center, upper end is two protruding rectangular blocks, two rectangular block centre distance 2mms larger than the width of whole flexible hinge (8), a minor arc groove is opened in each rectangular block upper end, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge (8), arc radius dimensional accuracy is H7, the center of circle exceeds upper sideline 0.25mm, each rectangular block upper surface two ends respectively have two screwed holes,
Described mechanism's double-strand chain fixed cap (3) is titanium alloy material, the upper end of structure is the rectangular slab of one piece of hollow, both sides, lower end are two trapezoid blocks protruded, two trapezoid block centre distance 2mms larger than the width of whole flexible hinge (8), each trapezoid block bottom has a minor arc groove, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge (8), arc radius dimensional accuracy is H7, the center of circle is lower than the sideline 0.25mm that goes to the bottom, chamfered is carried out at trapezoid block two lower base angles, the two ends of each arc groove respectively have two reverse counter sinks,
Described piezoelectric bar link (5) and support-side seat link (6) titanium alloy material, structure is the threaded rod with chassis, chassis has four waist holes;
Described support-side seat (7) is titanium alloy material, the rectangular slab of a screwed hole is had centered by the lower end of structure, upper end is two trapezoid blocks protruded, upper base is long limit, two trapezoid block centre distance 2mms larger than the width of whole flexible hinge (8), on each trapezoid block, base has a minor arc groove, two grooves are coaxially arranged, arc radius size equals the radius of flexible hinge (8), arc radius dimensional accuracy is H7, the center of circle is higher than upper hemline 0.25mm, chamfered is carried out at the upper base angle of trapezoid block two, each trapezoid block upper surface arc groove two ends respectively have two screwed holes,
Described monolateral hinge mounting cover (9) is titanium alloy material, overall structure is a trapezoid block, chamfered is carried out at trapezoid block two lower base angles, and have minor arc groove in bottom, arc radius size equals the radius of flexible hinge (8), and arc radius dimensional accuracy is H7, and the center of circle is lower than bottom surface 0.25mm, minor arc well width equals the width at flexible hinge (8) two ends, and the two ends of minor arc groove respectively have a counter sink;
Base for supporting (2) is fixed by screws on base plate, double-strand chain fixed cap (3) is connected with base for supporting (2) or support-side seat (7) by screw, for fixing the stage casing of two flexible hinges (8), support bar (1) two ends respectively hinge mounting cover (9) monolateral with two are threaded, for the two ends of fixing flexible hinge (8), piezoelectric bar (4) one end is connected with support-side seat (7) by the threaded rod of self, being connected with piezoelectric bar link (5) by internal thread of the other end, support-side seat link (6) is threaded with the support-side seat (7) of the other end, the chassis of two links is bolted, thus the support-side seat (7) of whole piezoelectric bar (4) with two ends is coupled together, in mechanism, four support bars (1), support bar two ends minor arc groove home position is placed in flexible hinge (8) axis projections point position respectively, eight flexible hinges (8), coaxial line is arranged and is kept the safe distance of 2mm between two, four summits of the subpoint composition rhombus of four axis.
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| TWI660158B (en) * | 2018-05-09 | 2019-05-21 | 技鼎股份有限公司 | Displacement magnification device and displacement amplifier |
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| CN110296144A (en) * | 2019-04-26 | 2019-10-01 | 北京航空航天大学 | A kind of zero stiffness flexible hinge |
| CN110441149A (en) * | 2019-09-11 | 2019-11-12 | 长沙理工大学 | A kind of vertical load turns the experimental rig of horizontal addload |
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| CN110296144A (en) * | 2019-04-26 | 2019-10-01 | 北京航空航天大学 | A kind of zero stiffness flexible hinge |
| CN110441149A (en) * | 2019-09-11 | 2019-11-12 | 长沙理工大学 | A kind of vertical load turns the experimental rig of horizontal addload |
| CN112165274A (en) * | 2020-09-24 | 2021-01-01 | 南京工程学院 | Longitudinal-bending coupling type linear ultrasonic motor based on homodromous eccentric stator |
| CN114967115A (en) * | 2022-04-27 | 2022-08-30 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
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