CN201022181Y - Piezoelectricity inertia stepping driving device - Google Patents
Piezoelectricity inertia stepping driving device Download PDFInfo
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- CN201022181Y CN201022181Y CNU2007200933288U CN200720093328U CN201022181Y CN 201022181 Y CN201022181 Y CN 201022181Y CN U2007200933288 U CNU2007200933288 U CN U2007200933288U CN 200720093328 U CN200720093328 U CN 200720093328U CN 201022181 Y CN201022181 Y CN 201022181Y
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Abstract
The utility model relates to a piezoelectric inertia stepping driving device, which belongs to a mechanical and electrical combination field. Two ends of a driving piezoelectric stack 1 are separately and adhesively connected with a move-block 1 and a move-block 2, which are glidingly connected with a base. The move-block 1 is adhesively connected with a clamping piezoelectric stack vibrator 1 or is fixed with a compound piezoelectric wafer vibrator 1, while the move-block 2 is adhesively connected with a clamping piezoelectric stack vibrator 2 or is fixed with a compound piezo-crystal vibrator 2. The inertia force generated by the piezoelectric component is used for clamping. The utility model has the advantages of simple clamping structure, even step movement of a driving mechanism and easy controlling, which realizes the precision displacement of the driving mechanism and is applicable for the robotic and micro-displacement driving field or the like.
Description
Technical field
It is dynamo-electric in conjunction with the field that the utility model belongs to, and is single-degree-of-freedom, multivariant linear and rotation precision driver.
Background technology
In recent years, because the fast development of technology such as microelectronics, optics, biomedical engineering, IC and superconduction, storage, ultraprecise processing and accurate measurement, people have increasing demand to the precision positioning and the Driving technique of micro/nano level.Therefore the research and development based on the precision driver of different principle and structure are subjected to people's common attention.
Present piezoelectric inertia driving mechanism mainly is an inverse piezoelectric effect of utilizing piezoelectric element, the excitation of employing asymmetric waveform, form two-way asymmetrical inertial impact force, with the friction fit of fixing and the combination of suitable mechanical structure, ordered control by Circuits System forms driving action, and then forms continuous directed movement.Wherein utilize the driving mechanism of the quick distortion generation inertial impact force of piezoelectric element, it is design by Circuits System, output Asymmetric Electric signal, make piezoelectric element can produce quick elongation, slowly withdrawal, or the slow forms of motion of elongation, fast retractile, under the effect of alternating electric signal, driving mechanism produces the one-way movement on the macroscopic view.
Piezoelectricity stepping driving mechanism also is an inverse piezoelectric effect of utilizing piezoelectric element, can realize big stroke, high-resolution accurate displacement, adopt the mode of " clamp-driving-clamp " to move during motion, the creeping motion type so this motion mode is otherwise known as, but motion process has the clamp requirement, need the different drive signal of multichannel, control system is required high.
Because piezoelectricity stepping clamp constructional device and piezoelectric inertia drive the asymmetrical wave circuit more complicated that produces signal of telecommunication control, can not satisfy the needs in the fields such as accurate displacement, robot, micrometric displacement driving of realization driving mechanism at present fully.
Summary of the invention
The utility model proposes a kind of novel piezoelectric inertia step driving device, because driving, piezoelectricity stepping clamp device structure and piezoelectric inertia produce the asymmetrical wave circuit more complicated that the signal of telecommunication is controlled to solve, for further satisfying the demand in fields such as the accurate displacement of realizing driving mechanism at present, robot, micrometric displacement driving, develop a kind of novel drive unit.The technical scheme that the utility model is taked is: it is bonding with movable block 1, movable block 24 respectively to drive piezoelectric stack one 5 two ends, this movable block 1 and movable block 24 are slidingly connected with base (6), movable block 1 and clamp piezoelectric stack oscillator 1 bonding or with composite piezoelectric wafer oscillator 1 ' fixedly connected, movable block 24 and clamp piezoelectric stack oscillator 23 bonding or with composite piezoelectric wafer oscillator 23 ' fixedly connected.
The another kind of execution mode of the utility model is: the structure of clamp piezoelectric stack oscillator one is that clamp piezoelectric stack 1 is bonding with inertial mass 1, and the structure of clamp piezoelectric stack oscillator two is that clamp piezoelectric stack 2 301 is bonding with inertial mass 2 302.
The another kind of execution mode of the utility model is: composite piezoelectric wafer oscillator 1 ' structure be as substrate by elastic sheet metal 201 ', one-sided or each sticking piezoelectric chip 202 ' of bilateral at this sheet metal, the two ends symmetry quality of connection piece group 1 of this sheet metal ' and mass group 2 204 ', pressing plate 205 ' is fixedlyed connected with elastic sheet metal 201 '.Composite piezoelectric wafer oscillator 23 ' structure with composite piezoelectric wafer oscillator one.
The another kind of execution mode of the utility model is: movable block 38 is connected with movable block 1 with movable block 24 with driving piezoelectric stack 3 10 by driving piezoelectric stack 29 respectively, clamp piezoelectric stack oscillator 37 is fixedlyed connected with movable block 38, and movable block three is slidingly connected with base 6.
The another kind of execution mode of the utility model is: movable block 38 is connected with movable block 24 by driving piezoelectric stack 29, movable block 4 11 is connected with movable block 38 by driving piezoelectric stack 3 10, movable block 4 11 is connected with movable block 1 by driving piezoelectric stack 4 13, clamp piezoelectric stack oscillator 4 12 is fixedlyed connected with movable block 4 11, movable block 4 11 is slidingly connected with base 6, clamp piezoelectric stack oscillator 37 is fixedlyed connected with movable block 38, clamp piezoelectric stack oscillator 4 12 is fixedlyed connected with movable block 4 11, and these four movable blocks and four driving piezoelectric stacks are connected to form square.
The excitation signal of telecommunication of piezoelectric element is a symmetrical wave in the utility model.
The utility model is to utilize under the excitation of the symmetrical wave signal of telecommunication, the inertial impact force that produces by the quick distortion of vertical direction piezoelectric element, realization changes the normal pressure between driving mechanism and the supporting surface, reach clamp, unclamp control mechanism, cooperate the quick distortion of horizontal direction piezoelectric element, make Piexoelectric actuator according to predetermined direction step motion.Obviously this is the piezoelectric inertia step driving device that a kind of inertial impact force that utilizes piezoelectric element to be out of shape generation fast changes frictional force promptly to utilize the frictional force difference and step motion carries out work, be that inverse piezoelectric effect and frictional force control are organically combined the drive unit that forms, the utility model of this drive unit is to strong the replenishing in piezoelectric inertia Driving technique field.
The utility model is to utilize the conventional symmetrical signal of telecommunication, realize the directed movement of drive unit as signals such as sine wave, square wave, triangular waves, this drive unit is to adopt symmetry to drive the signal of telecommunication with the main distinction of the driving mechanism of studying at present, the control mode of asymmetric frictional force, and utilize the stepper drive principle, form directed movement.
Therefore, the utility model proposes and utilize balancing waveform signal of telecommunication drive pressure electric device to be out of shape fast, produce two-way identical inertial impact force, clamp device is controlled, and in conjunction with the variation of the frictional force between accessory drive and the supporting surface, form microminiature piezoelectricity step motion drive unit, this drive unit has been concentrated the advantage of piezoelectric inertia driving and piezoelectricity stepper drive, with the main distinction of the piezoelectric inertia impact driving mechanism of present research be to utilize the pumping signal of the balancing waveform signal of telecommunication for piezoelectric element, control the variation of frictional force mechanically; Compare with the piezoelectricity step drive mechanism of present research, its main feature is to have disdained complicated clamp device, and the inertial impact force that utilizes piezoelectric element to produce carries out clamp.The characteristics of this piezoelectric inertia step driving device are that clamp is simple in structure, driving mechanism motion step pitch even, control is simple, have realized the accurate displacement of driving mechanism, are applicable to fields such as robot, micrometric displacement driving.
Description of drawings
Fig. 1 is the utility model one dimension piezoelectric inertia step driving device embodiment 1 schematic diagram;
Fig. 2 is the utility model one dimension piezoelectric inertia step driving device embodiment 2 schematic diagrames;
Fig. 3 is the utility model piezoelectric bimorph oscillator structure cutaway view;
Fig. 4 is the three-dimensional piezoelectric inertia step driving device embodiment of the utility model 3 schematic diagrames;
Fig. 5 is the three-dimensional piezoelectric inertia step driving device embodiment of the utility model 4 schematic diagrames.
Embodiment:
As shown in Figure 1.It is bonding with movable block 1, movable block 24 respectively to drive piezoelectric stack one 5 two ends, and this movable block 1 and movable block 24 are slidingly connected with base 6, and movable block 1 is bonding with clamp piezoelectric stack oscillator 1, and movable block 24 is bonding with clamp piezoelectric stack oscillator 23; Wherein the structure of clamp piezoelectric stack oscillator one is that clamp piezoelectric stack 1 is bonding with inertial mass 1, and the structure of clamp piezoelectric stack oscillator two is that clamp piezoelectric stack 2 301 is bonding with inertial mass 2 302.The course of work is as follows: at first under the signal of telecommunication encourages simultaneously, and the one 201 quick elongation strains of clamp piezoelectric stack, the distortion of clamp piezoelectric stack 2 301 fast contraction, and drive piezoelectric stack one 5 quick elongation strains.Clamp piezoelectric stack 1 drives masses 1 and moves on fast, according to mechanical knowledge, will produce downward inertial impact force, has increased the normal pressure of 1 pair of base plate of movable block.Clamp piezoelectric stack 2 301 drives mass 302 and moves down fast, produces inertial impact force upwards, has reduced the normal pressure of 24 pairs of bases of movable block.When driving the quick elongation strain of piezoelectric stack 5, movable block 1 and movable block 24 are subjected to equal and opposite in direction, thrust that direction is opposite simultaneously, owing to the normal pressure of movable block 1 normal pressure greater than movable block 24, so movable block 24 will move a small step to the right; Clamp piezoelectric stack one 201 fast contraction distortion then, the 2 301 quick elongation strains of clamp piezoelectric stack, and when driving the distortion of piezoelectric stack 5 fast contraction, in like manner, movable block one 1 normal pressures reduce, movable block 24 normal pressures increase, then movable block 1 under the drive that drives the distortion of piezoelectric stack one 5 fast contraction, the small step of following up to the right.Piexoelectric actuator is finished moving of a period of motion, and the next cycle Piexoelectric actuator will repeat above-mentioned motion process.Along with the continuous pump of drive source signal, Piexoelectric actuator will produce macroeconomic stability motion to the right.As change clamp piezoelectric stack 1, clamp piezoelectric stack 2 301 and drive the pumping signal sequential of piezoelectric stack 1, then Piexoelectric actuator will produce the motion on the left of Fig. 1.
As Fig. 2, shown in Figure 3.It is bonding with movable block 1, movable block 24 respectively to drive piezoelectric stack one 5 two ends, this movable block 1 and movable block 24 are slidingly connected with base 6, movable block 1 and composite piezoelectric wafer oscillator 1 ' fixedly connected movable block 24 and composite piezoelectric wafer oscillator 23 ' fixedly connected; Composite piezoelectric wafer oscillator 1 wherein ' structure be as substrate by elastic sheet metal 201 ', one-sided or each sticking piezoelectric chip 202 ' of bilateral at this sheet metal, the two ends of this sheet metal symmetry quality of connection piece group 1 ' and mass group 2 204 ', pressing plate 205 ' and elastic sheet metal 201 ' are fixedly connected and be connected with movable block one; Composite piezoelectric wafer oscillator 23 ' structure with composite piezoelectric wafer oscillator one, be as substrate by elastic sheet metal, one-sided or each sticking piezoelectric chip of bilateral at this sheet metal, the two ends of this sheet metal symmetry quality of connection piece group three and mass group four, pressing plate and elastic sheet metal ' fixedly connected and be connected with movable block two.The course of work is as follows: at first under the symmetrical wave signal of telecommunication encourages simultaneously, piezoelectric bimorph oscillator 1 ' quick recessed bent distortion, mass 1 ', mass 2 204 ' produce downward inertia force, make the normal pressure increase between movable block 1 and the base 6; Piezoelectric bimorph oscillator 23 ' quick protruding bent distortion, mass three, mass four produce inertia force upwards, normal pressure between movable block 24 and the base 6 is reduced, with embodiment 1 in like manner, drive elongating or shortening fast when being out of shape of piezoelectric stack 1, drive unit produces step motion to the right, changes the pumping signal sequential of piezoelectric element, and this device is step motion left.
The Piexoelectric actuator of embodiment 3. a kind of three-dimensional motions of the present utility model
As shown in Figure 4, it is bonding with movable block 1, movable block 24 respectively to drive piezoelectric stack one 5 two ends, this movable block 1 and movable block 24 are slidingly connected with base 6, and movable block 1 is bonding with clamp piezoelectric stack oscillator 1, and movable block 24 is bonding with clamp piezoelectric stack oscillator 23; Movable block 38 is connected with movable block one with movable block two with driving piezoelectric stack 3 10 by driving piezoelectric stack 29 respectively, and clamp piezoelectric stack oscillator 37 is fixedlyed connected with movable block 38, and movable block three is slidingly connected with base 6.Its basic principle that produces plane motion is as follows: when the clamp piezoelectric stack 1 of three vertical direction layouts, clamp piezoelectric stack 2 301, during the distortion of clamp piezoelectric stack 3 701 quick-expansions, drive mass 1, mass 2 302, mass 3 702 accelerated motions, can change movable block 1, movable block 24, normal pressure between movable block 38 and the base plate 6, three driving piezoelectric stacks 1 that the controlling level direction is arranged, drive piezoelectric stack 29, drive piezo stack 3 10 dilatation clocklike, can make this drive mechanism produce the plane and move or rotate.
The Piexoelectric actuator of embodiment 4 a kind of three-dimensional motions of the present utility model
As shown in Figure 5, it is bonding with movable block 1, movable block 24 respectively to drive piezoelectric stack one 5 two ends, this movable block 1 and movable block 24 are slidingly connected with base 6, and movable block 1 is bonding with clamp piezoelectric stack oscillator 1, and movable block 24 is bonding with clamp piezoelectric stack oscillator 23; Movable block 38 is connected with movable block 24 by driving piezoelectric stack 29, movable block 4 11 is connected with movable block three by driving piezoelectric stack 3 10, the movable block four-way piezoelectric stack 4 13 of overdriving is connected with movable block one, clamp piezoelectric stack oscillator 4 12 is fixedlyed connected with movable block 4 11, movable block four is slidingly connected with base 6, clamp piezoelectric stack oscillator 37 is fixedlyed connected with movable block 38, clamp piezoelectric stack oscillator 4 12 is fixedlyed connected with movable block 4 11, and these four movable blocks and four driving piezoelectric stacks are connected to form square.Its basic principle that produces plane motion is as follows: when the clamp piezoelectric stack 1 of 4 vertical direction layouts, clamp piezoelectric stack 2 301, clamp piezoelectric stack 3 701, during the distortion of clamp piezoelectric stack 4 1201 quick-expansions, drive mass 1, mass 2 302, mass 3 702, mass 4 1202 accelerated motions, can change movable block 1, movable block 24, movable block 38, normal pressure between movable block 4 11 and the base 6,4 driving piezoelectric stacks 1 that the controlling level direction is arranged, drive piezoelectric stack 29, drive piezoelectric stack 3 10, drive piezoelectric stack 4 13 dilatation clocklike, can make this drive mechanism produce the plane moves or rotates, this installs identical with the Piexoelectric actuator motion principle of three-dimensional motion shown in Figure 4, but drive controlling is simpler.
The utility model is to utilize balancing waveform signal of telecommunication drive pressure electric device to be out of shape fast, produce two-way identical inertial impact force, the variation that forms frictional force between drive unit and the supporting surface is carried out clamped, and produce step motion in conjunction with the distortion of driving element, realized new-type microminiature inertial step drive device.
Claims (6)
1. piezoelectric inertia step driving device, it is characterized in that: it is bonding with movable block one (1), movable block two (4) respectively to drive piezoelectric stack one (5) two ends, this movable block one (1) and movable block two (4) are slidingly connected with base (6), movable block one (1) and clamp piezoelectric stack oscillator one (2) are bonding or fixedly connected with one (2 ') of composite piezoelectric wafer oscillator, and movable block two (4) and clamp piezoelectric stack oscillator two (3) are bonding or fixedly connected with two (3 ') of composite piezoelectric wafer oscillator.
2. piezoelectric inertia step driving device according to claim 1, it is characterized in that: the structure of clamp piezoelectric stack oscillator one is that clamp piezoelectric stack one (201) is bonding with inertial mass one (202), and the structure of clamp piezoelectric stack oscillator two is that clamp piezoelectric stack two (301) is bonding with inertial mass two (302).
3. piezoelectric inertia step driving device according to claim 1, it is characterized in that: the structure of one (2 ') of composite piezoelectric wafer oscillator is as substrate by elastic sheet metal (201 '), one-sided or each sticking piezoelectric chip (202 ') of bilateral at this sheet metal, two ends symmetry quality of connection piece one (203 ') of group and the mass group two (204 ') of this sheet metal, pressing plate (205 ') is fixedlyed connected with elastic sheet metal (201 ').
4. piezoelectric inertia step driving device according to claim 1, it is characterized in that: movable block three (8) is connected with movable block one (1) with movable block two (4) with driving piezoelectric stack three (10) by driving piezoelectric stack two (9) respectively, clamp piezoelectric stack oscillator three (7) is fixedlyed connected with movable block three (8), and movable block three (8) is slidingly connected with base (6).
5. piezoelectric inertia step driving device according to claim 1, it is characterized in that: movable block three (8) is connected with movable block two (4) by driving piezoelectric stack two (9), movable block four (11) is connected with movable block three by driving piezoelectric stack three (10), the movable block four-way piezoelectric stack four (13) of overdriving is connected with movable block one (1), movable block four (11) is slidingly connected with base (6), clamp piezoelectric stack oscillator three (7) is fixedlyed connected with movable block three (8), clamp piezoelectric stack oscillator four (12) is fixedlyed connected with movable block four (11), and these four movable blocks and four driving piezoelectric stacks are connected to form square.
6. according to claim 1 or 2 or 3 or 4 or 5 described piezoelectric inertia step driving devices, it is characterized in that: the excitation signal of telecommunication of piezoelectric element is a symmetrical wave.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200933288U CN201022181Y (en) | 2007-02-16 | 2007-02-16 | Piezoelectricity inertia stepping driving device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200933288U CN201022181Y (en) | 2007-02-16 | 2007-02-16 | Piezoelectricity inertia stepping driving device |
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| CN201022181Y true CN201022181Y (en) | 2008-02-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNU2007200933288U Expired - Fee Related CN201022181Y (en) | 2007-02-16 | 2007-02-16 | Piezoelectricity inertia stepping driving device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102195516A (en) * | 2011-05-20 | 2011-09-21 | 南京航空航天大学 | S-shaped multi-pin clamped piezoelectric motor and operating mode thereof |
| CN104362888A (en) * | 2014-10-16 | 2015-02-18 | 中国科学院上海技术物理研究所 | Piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism |
-
2007
- 2007-02-16 CN CNU2007200933288U patent/CN201022181Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102195516A (en) * | 2011-05-20 | 2011-09-21 | 南京航空航天大学 | S-shaped multi-pin clamped piezoelectric motor and operating mode thereof |
| CN102195516B (en) * | 2011-05-20 | 2013-05-29 | 南京航空航天大学 | S-shaped multi-pin clamped piezoelectric motor and operating mode thereof |
| CN104362888A (en) * | 2014-10-16 | 2015-02-18 | 中国科学院上海技术物理研究所 | Piezoelectric-drive eight-strand coaxial micro displacement amplification mechanism |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080213 |