CN113131783B - Clamp-controlled inertia linear piezoelectric motor - Google Patents
Clamp-controlled inertia linear piezoelectric motor Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Abstract
The invention relates to a clamp-controlled inertia linear piezoelectric motor, and belongs to the technical field of precision driving and positioning. The piezoelectric vibrator comprises a piezoelectric vibrator mechanism, an L-shaped bottom plate, a sliding block, a linear sliding rail and a clamping mechanism; the piezoelectric vibrator mechanism comprises a T-shaped plate, two pairs of piezoelectric bimorphs and two pairs of mass blocks; the piezoelectric vibrator mechanism is arranged on one side of the sliding block through an L-shaped bottom plate; the slide block is arranged on the linear slide rail in a sliding manner; the clamping mechanism is arranged on the sliding block. Sine signals are input to the two pairs of driving piezoelectric bimorphs, the mass block is driven to move left and right in one period, and the slide block is driven to move on the linear guide rail; inputting sine signals or cosine signals to the clamping piezoelectric sheets, and realizing clamping and loosening with the linear slide rail in a period to realize a clamping control process; sine signals and sine or residual wave signals with the same frequency are respectively input to the two pairs of driving piezoelectric plates, so that the driving action and the clamping action are synchronously carried out, and the unidirectional linear motion or the bidirectional reciprocating motion of the linear motor is realized.
Description
Technical Field
The invention belongs to the technical field of precision driving and positioning, and particularly relates to an inertia linear piezoelectric motor.
Background
With the development of a micro special motor, the inertia linear piezoelectric motor has more and more unique advantages in the technical field of precise driving and positioning, and has multiple points of simple structure, easy miniaturization, easy control, high positioning precision and the like. The traditional inertia impact piezoelectric motor is generally driven by a piezoelectric stack to obtain larger displacement, but the piezoelectric stack has poor tensile capability, cannot be connected with a larger mass block and has higher cost. Most of inertia impact piezoelectric motors are driven by sawtooth waves to obtain the asymmetry of acceleration in the process of reciprocating of a rotor or a stator, so that the motor obtains the relative speed in a certain direction. And the piezoelectric motor driven by the sawtooth wave can not work in a resonance state, so that the efficiency of inertia impact piezoelectric motor is very low, and is only about 3%. Often, the linear motor can only do linear unidirectional motion, and the state is single and can not do reciprocating motion.
Disclosure of Invention
The invention provides a clamp-controlled inertia linear piezoelectric motor, aiming at solving the problems of the traditional piezoelectric motor.
A clamp-controlled inertia linear piezoelectric motor comprises a piezoelectric vibrator mechanism 2, an L-shaped bottom plate 15, a sliding block 4, a linear sliding rail 5, a pre-tightening mechanism 1 and a clamping mechanism 3;
the piezoelectric vibrator mechanism 2 comprises a T-shaped plate 16, two pairs of piezoelectric bimorphs 22 and two pairs of mass blocks 21; a pair of horizontal arm base plates 162 are arranged on two sides of the upper part of the T-shaped plate 16, the upper end surface of the vertical plate of the T-shaped plate 16 is an inclined surface, and the lower end of the vertical plate of the T-shaped plate 16 is a tip 163; the two pairs of piezoelectric bimorphs 22 are symmetrically and fixedly arranged on two sides of the pair of horizontal arm substrates 162 respectively, and the two pairs of mass blocks 21 are symmetrically and fixedly arranged on two sides of the end parts of the pair of horizontal arm substrates 162 respectively;
the piezoelectric vibrator mechanism 2 is fixedly arranged on one side of the sliding block 4 through an upright plate of the L-shaped bottom plate 15;
the slide block 4 is arranged on the linear slide rail 5 in a sliding manner;
the pre-tightening mechanism 1 comprises a wedge block 12, a pre-tightening screw 13 and a pre-tightening spring 14; the bottom surface of the wedge block 12 is an inclined surface, and the bottom surface of the wedge block 12 is contacted with the upper end surface of the vertical plate of the T-shaped plate 16; a threaded hole 121 is formed in the wedge-shaped block 12, a pre-tightening spring 14 is sleeved on the pre-tightening screw 13, and the pre-tightening screw 13 penetrates through the upper part of the vertical plate of the L-shaped bottom plate 15 and is connected with the wedge-shaped block 12 in a matching mode through the threaded hole;
the clamping mechanism 3 comprises a clamping piezoelectric sheet 32; the clamping piezoelectric sheet 32 is fixedly arranged on the side surface of the vertical plate of the L-shaped bottom plate 15;
when the piezoelectric motor works, the piezoelectric bimorph 22 drives the mass block 21 to swing left and right, and bidirectional linear motion of the piezoelectric motor in the horizontal direction is realized; the concrete conditions are as follows: when the mass block 21 swings leftwards and returns to the original point, the clamping mechanism 3 and the piezoelectric vibrator mechanism 2 cooperatively work to move leftwards for a certain distance so as to complete a step pitch; the leftward linear motion can be realized by repeating the process; when the mass block 21 swings rightwards and returns to the original point, the clamping mechanism 3 and the piezoelectric vibrator mechanism 2 work cooperatively, and the mass block moves rightwards for a distance so as to complete a step pitch; repeating the process can realize right linear motion.
The technical scheme for further limiting is as follows:
a pair of through holes 151 are formed in the vertical plate of the L-shaped bottom plate 15, a pair of waist-shaped holes 161 are formed in the vertical plate of the T-shaped plate 16 corresponding to the pair of through holes 151, the L-shaped bottom plate 15 and the T-shaped plate 16 are fixedly connected through a threaded connection piece, and the position adjustment of the T-shaped plate 16 in the vertical direction is realized through the pair of waist-shaped holes 161.
The vertical plate and the horizontal plate of the L-shaped bottom plate 15 are connected through a flexible hinge 152; an inner groove 154 is formed between the adjacent side surfaces of the vertical plate and the horizontal plate, and the cross section of the inner groove 154 is a three-quarter circular arc; an outer groove 155 is formed between the non-adjacent side surfaces of the vertical plate and the horizontal plate, the cross section of the outer groove 155 is a half circular arc, and the inner groove 154 and the outer groove 155 correspond to each other up and down to form the flexible hinge 152.
The cross section of the tip 163 of the vertical plate of the T-shaped plate 16 is an isosceles triangle.
A cover plate 11 is sleeved on a pre-tightening screw 13 on the outer side of the wedge block 12; the cross section of the cover plate 11 is L-shaped, the horizontal side plate of the cover plate 11 is a top plate, wing plates are respectively arranged on two sides of the vertical side plate of the cover plate 11, the top plate of the cover plate 11 is positioned on the top of the wedge block 12 and the top of the vertical plate of the L-shaped bottom plate 15 and used for limiting displacement of the wedge block 12 in the vertical direction, and the wing plates on two sides of the cover plate 11 are used for limiting displacement of the wedge block 12 in the horizontal direction.
The piezoelectric bimorph 22 is made of piezoelectric ceramic PZT-4.
The clamping piezoelectric sheet 32 is made of piezoelectric ceramic PZT-4.
The beneficial technical effects of the invention are embodied in the following aspects:
1. the inertia linear piezoelectric motor provided by the invention is driven by the piezoelectric bimorph, has higher tensile strength compared with the traditional piezoelectric stack, can be connected with a larger mass block, has the advantage of low cost compared with the piezoelectric stack, and can save 80% of cost theoretically.
2. The novel inertia linear piezoelectric motor provided by the invention adopts harmonic signals, the driving piezoelectric bimorph provides driving for the motor, the clamping piezoelectric sheet realizes motion control, and the driving and the control are separated, so that the control of the motor is better realized, the accuracy of the system is improved, in addition, in the motion, the clamping-loosening state of the tip end of the T-shaped plate avoids 90 percent of harmful friction, and the efficiency of the motor is improved.
3. The piezoelectric motor provided by the invention has a simple structure, parts of each part can be obtained by simple machine tool machining and milling, and are connected through bolts and nuts, so that the piezoelectric motor is easy to assemble and disassemble; the method is easy to realize and can be applied to a conventional daily operating voltage (220 v).
4. The novel piezoelectric motor provided by the invention adopts the clamping mechanism, can change the working condition of the motor through clamping control, realizes bidirectional free motion of the motor on the guide rail, and has wider practicability compared with the condition that the traditional unidirectional linear motor cannot reciprocate.
5. The novel piezoelectric motor provided by the invention has the advantages of small structure, integral size not more than 10cm, strong practicability and high controllability, can actively realize leftward or rightward movement by adopting harmonic drive control, the length of the guide rail can be freely changed, and the piezoelectric motor can be installed on different devices by changing the installation position of the guide rail.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a schematic view of the pretensioning mechanism.
Fig. 3 is a schematic diagram of the exploded structure of fig. 2.
Fig. 4 is a schematic view of the piezoelectric vibrator structure.
Fig. 5 is a schematic structural diagram of a clamping mechanism.
FIG. 6 is a schematic diagram of the states of the left linear motion working conditions of the present invention.
Fig. 7 is a schematic diagram of the state of the leftward linear motion piezoelectric vibrator according to the present invention.
FIG. 8 is a diagram illustrating the states of various working conditions of the present invention moving in a straight line to the right.
Fig. 9 is a schematic diagram of the state of the rightward linear motion piezoelectric vibrator according to the present invention.
FIG. 10 is a schematic diagram of the potential of the present invention.
Fig. 11 is a schematic diagram of clamp control motion according to the present invention.
Fig. 12 is a schematic view showing the movement of the piezoelectric vibrator according to the present invention.
Numbers in fig. 1 to 5: the piezoelectric vibrator comprises a pre-tightening mechanism 1, a cover plate 11, a wedge-shaped block 12, a threaded hole 121, a pre-tightening screw 13, a pre-tightening spring 14, an L-shaped bottom plate 15, a through hole 151, a flexible hinge 152, a through hole 153, an inner groove 154, an outer groove 155, a T-shaped plate 16, a kidney-shaped hole 161, a horizontal arm substrate 162, a tip 163, a piezoelectric vibrator mechanism 2, a mass block 21, a piezoelectric bimorph 22, a clamping mechanism 3, a bolt 31, a clamping piezoelectric piece 32, a sliding block 4 and a linear sliding rail 5.
Detailed Description
The invention will now be further described by way of example with reference to the accompanying drawings.
Referring to fig. 1, the clamp-controlled inertial linear piezoelectric motor includes a piezoelectric vibrator mechanism 2, an L-shaped bottom plate 15, a slider 4, a linear slide rail 5, a pre-tightening mechanism 1, and a clamping mechanism 3.
Referring to fig. 4, the piezoelectric vibrator mechanism 2 includes a T-shaped plate 16, two pairs of piezoelectric bimorphs 22, and two pairs of mass blocks 21. The material of the piezoelectric bimorph 22 is piezoelectric ceramic PZT-4.
Referring to fig. 3, two sides of the upper portion of the T-shaped plate 16 are a pair of horizontal arm base plates 162, the upper end surface of the vertical plate of the T-shaped plate 16 is an inclined surface, the lower end of the vertical plate of the T-shaped plate 16 is a tip 163, and the cross section of the tip 163 is an isosceles triangle. Referring to fig. 4, two pairs of piezoelectric bimorphs 22 are symmetrically and fixedly mounted on two sides of the pair of horizontal arm substrates 162, respectively, and two pairs of proof masses 21 are symmetrically and fixedly mounted on two sides of the end portions of the pair of horizontal arm substrates 162, respectively.
Referring to fig. 1 and 2, the piezoelectric vibrator mechanism 2 is fixedly mounted on one side of the slider 4 through an upright plate of the L-shaped bottom plate 15; the slide block 4 is slidably mounted on a linear slide rail 5.
Referring to fig. 3, the upright and horizontal plates of the l-shaped base plate 15 are connected by a flexible hinge 152. An inner groove 154 is formed between adjacent side faces of the vertical plate and the horizontal plate, and the cross section of the inner groove 154 is three quarters of a circle; an outer groove 155 is formed between the non-adjacent side surfaces of the vertical plate and the horizontal plate, the cross section of the outer groove 155 is a half circle, and the inner groove 154 and the outer groove 155 form the flexible hinge 152 in an up-and-down corresponding mode.
Referring to fig. 3, a pair of through holes 151 are formed in the vertical plate of the l-shaped bottom plate 15, and a pair of waist-shaped holes 161 are formed in the vertical plate of the T-shaped plate 16 corresponding to the pair of through holes 151; referring to fig. 5, the L-shaped bottom plate 15 and the T-shaped plate 16 are fixedly connected by a pair of bolts 31 passing through a pair of through holes 151 and a pair of kidney-shaped holes 161, and the position adjustment of the T-shaped plate 16 in the standing direction is achieved by a pair of kidney-shaped holes 161.
Referring to fig. 3, the pretensioning mechanism 1 includes a wedge block 12, a pretensioning screw 13 and a pretensioning spring 14. Referring to fig. 2, the bottom surface of the wedge block 12 is an inclined surface, and the bottom surface of the wedge block 12 is in contact with the upper end surface of the vertical plate of the T-shaped plate 16. Referring to fig. 3, a threaded hole 121 is formed in the wedge-shaped block 12, the pre-tightening spring 14 is sleeved on the pre-tightening screw 13, and the pre-tightening screw 13 penetrates through the upper portion of the vertical plate of the L-shaped bottom plate 15 and is connected with the wedge-shaped block 12 through the threaded hole in a matching manner, see fig. 2.
Referring to fig. 2, a cover plate 11 is sleeved on a pre-tightening screw 13 on the outer side of the wedge block 12; the cross section of the cover plate 11 is L-shaped, the horizontal side plate of the cover plate 11 is a top plate, wing plates are respectively arranged on two sides of the vertical side plate of the cover plate 11, the top plate of the cover plate 11 is positioned on the top of the wedge block 12 and the top of the vertical plate of the L-shaped bottom plate 15 and used for limiting displacement of the wedge block 12 in the vertical direction, and the wing plates on two sides of the cover plate 11 are used for limiting displacement of the wedge block 12 in the horizontal direction.
Referring to fig. 5, the clamping mechanism 3 includes a clamping piezoelectric sheet 32, and the material of the clamping piezoelectric sheet 32 is piezoelectric ceramic PZT-4. The clamping piezoelectric plate 32 is fixedly mounted on the inner side surface of the upright plate of the L-shaped base plate 15.
Referring to fig. 6, when the tip 163 of the horizontal arm substrate 162 of the clamping mechanism 3 is acted by the clamping piezoelectric sheet, there are two states of clamping and lifting; referring to fig. 6 (a), when clamping, the tip 163 is tightly attached to the linear guideway 5, and the mechanism cannot move, see fig. 11 (c); referring to fig. 6 (b), when lifted, the tip 163 is inclined to be separated from the upper end surface of the linear guide 5, and the entire mechanism is moved by the inertial force generated by the piezoelectric vibrator mechanism 2 at this time, see fig. 11 (b).
When the piezoelectric motor works, the piezoelectric bimorph 22 drives the mass block 21 to swing left and right, and bidirectional linear motion of the piezoelectric motor in the horizontal direction is realized; the concrete conditions are as follows: when the mass block 21 swings leftwards and returns to the original point, the clamping mechanism 3 and the piezoelectric vibrator mechanism 2 cooperatively work to move leftwards for a certain distance so as to complete a step pitch; the leftward linear motion can be realized by repeating the steps; when the mass block 21 swings rightwards and returns to the original point, the clamping mechanism 3 and the piezoelectric vibrator mechanism 2 work cooperatively, and move rightwards for a certain distance to complete a step pitch; repeating the process can realize right linear motion.
The working principle of the invention is explained in detail as follows:
referring to fig. 6, when the motor moves to the left, fig. 6 (a) is in the initial working state, the piezoelectric bimorph 22 deforms under the action of the sinusoidal signal in the harmonic signal diagram 10, and drives the mass block 21 to swing left and right. As shown in fig. 7 (b), during the process of swinging the mass 21 to the left and returning to the origin, see fig. 7 (c), since the clamping piezoelectric sheet 32 of the clamping mechanism 3 is excited by the sinusoidal voltage of the first half period of fig. 10 (a), as shown in fig. 11 (c)b) As shown, the tip 163 of the T-shaped plate 16 is lifted from the guide surface of the linear guideway 5, and the momentum mv of the mass 21 is obtained by the conservation of system momentum 1 Is transmitted to the slider 4 to cause leftward displacement DeltaX of the slider 4 1 Thereby completing one step see (b) in fig. 6; then, under the sinusoidal voltage signal shown in fig. 10 (b), the piezoelectric bimorph 22 deforms, and drives the mass 21 to swing to the right as shown in fig. 7 (d), and in the process of returning to the original point again, the clamping piezoelectric sheet 32 of the L-shaped bottom plate 15 in the clamping mechanism 3 is excited by the second half-cycle sinusoidal voltage shown in fig. 10 (b), so that the tip 163 of the T-shaped plate 16 is pressed against the guide surface of the linear slide 5 as shown in fig. 11 (c), and the momentum mv of the mass 21 2 Because the tip 163 and the linear guideway 5 are clamped, the slider 4 cannot move, the displacement is zero, and the initial equilibrium state (a) in fig. 6 is returned; repeated motion can realize leftward linear motion.
Referring to fig. 8, which is a schematic diagram of leftward movement of the motor, fig. 8 (a) is an initial working state, the piezoelectric bimorph 22 deforms under the action of the sinusoidal signal in the harmonic signal fig. 10, and drives the mass block 21 to swing left and right; during the process of swinging the mass 21 to the left and returning to (c) in the original point diagram 9 as shown in (b) in fig. 9, since the clamping piezoelectric sheet 32 of the clamping mechanism 3 is subjected to the cosine voltage excitation of the first half cycle of (c) in fig. 10, the tip 163 of the T-shaped plate 16 is pressed against the guide surface of the linear slide 5 as shown in (c) in fig. 11, and the momentum mv of the mass 21 1 Because the tip 163 and the linear slide 5 are clamped, the slider 4 cannot move, and the displacement is zero; then, under the excitation of the cosine voltage signal of the second half period shown in (d) of fig. 10, the piezoelectric bimorph 22 is deformed to swing the mass block 21 to the right as shown in (d) of fig. 9, and in the process of returning to the original point again, the clamping piezoelectric sheet 32 of the L-shaped bottom plate 15 in the clamping mechanism 3 is excited by the voltage signal shown in (d) of fig. 9, the clamping mechanism 3 lifts the tip 163 of the T-shaped plate 16 up on the guide surface of the linear slide rail 5 as shown in (b) of fig. 11, at this time, the system momentum is conserved, and the momentum mv of the mass block 21 is conserved 2 The slide 4 is moved to the right by a distance DeltaX 2 As shown in (d) of FIG. 8Thereby completing a step back to the equilibrium position (a) in fig. 8; repeating the process can realize the straight-line motion towards the right.
No matter the piezoelectric vibrator mechanism 2 moves leftwards and rightwards, the repeated unidirectional linear motion or reciprocating combined linear motion can be realized by controlling and switching sine voltage and cosine voltage input through controlling input signals of clamping piezoelectric sheets 32 in the clamping mechanism 3 under the condition of not changing input signals of two pairs of piezoelectric bimorphs 22 in the piezoelectric vibrator mechanism 2.
The above description is not intended to limit the present invention in any way as to its structure and shape. Under the same principle, the motor can also be made into a rotating motor. Any simple modification, equivalent change and modification of the above embodiments according to the technical essence of the present invention are still within the scope of the technical solution of the present invention.
Claims (7)
1. A clamp-controlled inertial linear piezoelectric motor, comprising: the piezoelectric vibrator comprises a piezoelectric vibrator mechanism (2), an L-shaped bottom plate (15), a sliding block (4), a linear sliding rail (5), a pre-tightening mechanism (1) and a clamping mechanism (3);
the piezoelectric vibrator mechanism (2) comprises a T-shaped plate (16), two pairs of piezoelectric bimorphs (22) and two pairs of mass blocks (21); a pair of horizontal arm base plates (162) are arranged on two sides of the upper part of the T-shaped plate (16), the upper end surface of a vertical plate of the T-shaped plate (16) is an inclined surface, and the lower end of the vertical plate of the T-shaped plate (16) is a tip (163); the two pairs of piezoelectric bimorphs (22) are respectively and symmetrically fixed on two sides of the pair of horizontal arm substrates (162), and the two pairs of mass blocks (21) are respectively and symmetrically fixed on two sides of the end parts of the pair of horizontal arm substrates (162);
the piezoelectric vibrator mechanism (2) is fixedly arranged on one side of the sliding block (4) through an upright plate of the L-shaped bottom plate (15);
the sliding block (4) is arranged on the linear sliding rail (5) in a sliding manner;
the pre-tightening mechanism (1) comprises a wedge-shaped block (12), a pre-tightening screw (13) and a pre-tightening spring (14); the bottom surface of the wedge-shaped block (12) is an inclined surface, and the bottom surface of the wedge-shaped block (12) is contacted with the upper end surface of the vertical plate of the T-shaped plate (16); a threaded hole (121) is formed in the wedge-shaped block (12), a pre-tightening spring (14) is sleeved on the pre-tightening screw (13), and the pre-tightening screw (13) penetrates through the upper part of the vertical plate of the L-shaped bottom plate (15) and is connected with the wedge-shaped block (12) in a matched mode through the threaded hole;
the clamping mechanism (3) comprises a clamping piezoelectric sheet (32); the clamping piezoelectric sheet (32) is fixedly arranged on the side surface of the vertical plate of the L-shaped bottom plate (15);
when the piezoelectric motor works, the piezoelectric bimorph (22) drives the mass block (21) to swing left and right, and bidirectional linear motion of the piezoelectric motor in the horizontal direction is realized; the concrete conditions are as follows: when the mass block (21) swings leftwards and returns to the original point, the clamping mechanism (3) and the piezoelectric vibrator mechanism (2) cooperatively work to move leftwards for a certain distance so as to complete a step pitch; the leftward linear motion can be realized by repeating the steps; when the mass block (21) swings rightwards and returns to the original point, the clamping mechanism (3) and the piezoelectric vibrator mechanism (2) cooperatively work to move rightwards for a certain distance so as to complete a step pitch; repeating the process can realize the straight-line motion towards the right.
2. A clamp controlled inertial linear piezoelectric motor according to claim 1, wherein: a pair of through holes (151) are formed in the vertical plate of the L-shaped bottom plate (15), a pair of waist-shaped holes (161) are formed in the vertical plate of the T-shaped plate (16) corresponding to the pair of through holes (151), the L-shaped bottom plate (15) is fixedly connected with the T-shaped plate (16) through a threaded connecting piece, and the position of the T-shaped plate (16) in the vertical direction is adjusted through the pair of waist-shaped holes (161).
3. A clamp controlled inertial linear piezoelectric motor according to claim 1, wherein: the vertical plate and the horizontal plate of the L-shaped bottom plate (15) are connected through a flexible hinge (152); an inner groove (154) is formed between adjacent side faces of the vertical plate and the horizontal plate, and the cross section of the inner groove (154) is a three-quarter circular arc; an outer groove (155) is formed between the non-adjacent side faces of the vertical plate and the horizontal plate, the cross section of the outer groove (155) is a half arc, and the inner groove (154) and the outer groove (155) are vertically corresponding to each other to form a flexible hinge (152).
4. A clamp controlled inertial linear piezoelectric motor according to claim 1, wherein: the cross section of the tip (163) of the vertical plate of the T-shaped plate (16) is an isosceles triangle.
5. A clamp controlled inertial linear piezoelectric motor according to claim 1, wherein: a cover plate (11) is sleeved on a pre-tightening screw (13) on the outer side of the wedge-shaped block (12); the cross section of the cover plate (11) is L-shaped, the horizontal side plate of the cover plate (11) is a top plate, wing plates are arranged on two sides of the vertical side plate of the cover plate (11) respectively, the top plate of the cover plate (11) is located at the top of the wedge-shaped block (12) and the top of the vertical plate of the L-shaped bottom plate (15) and used for limiting displacement of the wedge-shaped block (12) in the vertical direction, and the wing plates on two sides of the cover plate (11) are used for limiting displacement of the wedge-shaped block (12) in the horizontal direction.
6. A clamp controlled inertial linear piezoelectric motor according to claim 1, wherein: the piezoelectric bimorph (22) is made of piezoelectric ceramics PZT-4.
7. A clamp controlled inertial linear piezoelectric motor according to claim 1, wherein: the clamping piezoelectric sheet (32) is made of piezoelectric ceramic PZT-4.
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| US5180941A (en) * | 1989-11-10 | 1993-01-19 | Canon Kabushiki Kaisha | Vibration driven motor apparatus |
| CN106602927A (en) * | 2017-02-27 | 2017-04-26 | 合肥工业大学 | Resonant square-wave synchronous clamping piezoelectric linear motor |
| CN107659202A (en) * | 2017-11-08 | 2018-02-02 | 合肥工业大学 | A kind of piezo-electric motor |
| CN208782740U (en) * | 2018-07-17 | 2019-04-23 | 浙江师范大学 | A kind of asymmetric piezoelectricity straight line driver of plow-shape structure |
| CN212572421U (en) * | 2020-06-19 | 2021-02-19 | 吉林大学 | Force control device for restraining rollback motion of stick-slip piezoelectric actuator |
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- 2021-04-08 CN CN202110377072.8A patent/CN113131783B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5180941A (en) * | 1989-11-10 | 1993-01-19 | Canon Kabushiki Kaisha | Vibration driven motor apparatus |
| CN106602927A (en) * | 2017-02-27 | 2017-04-26 | 合肥工业大学 | Resonant square-wave synchronous clamping piezoelectric linear motor |
| CN107659202A (en) * | 2017-11-08 | 2018-02-02 | 合肥工业大学 | A kind of piezo-electric motor |
| CN208782740U (en) * | 2018-07-17 | 2019-04-23 | 浙江师范大学 | A kind of asymmetric piezoelectricity straight line driver of plow-shape structure |
| CN212572421U (en) * | 2020-06-19 | 2021-02-19 | 吉林大学 | Force control device for restraining rollback motion of stick-slip piezoelectric actuator |
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