CN115224977B - Resonant rotary piezoelectric motor - Google Patents

Resonant rotary piezoelectric motor Download PDF

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Publication number
CN115224977B
CN115224977B CN202210986325.6A CN202210986325A CN115224977B CN 115224977 B CN115224977 B CN 115224977B CN 202210986325 A CN202210986325 A CN 202210986325A CN 115224977 B CN115224977 B CN 115224977B
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clamping
block
rotating wheel
tightening
driving
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CN115224977A (en
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贺良国
万志凯
王勇
李新宇
李锟
窦浩天
单增祥
岳旭康
钱安
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Hefei University of Technology
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Hefei University of Technology
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/105Cycloid or wobble motors; Harmonic traction motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention belongs to the technical field of precise driving and positioning, and particularly relates to a resonant rotary piezoelectric motor, which comprises a square base, a stator mechanism and a rotating wheel mechanism; the stator mechanism comprises a driving elastic vibrator, a pair of clamping blocks, a central connecting block, a pre-tightening block and a clamping elastic vibrator, wherein the driving elastic vibrator is arranged above the square base and sequentially connected along the X-axis direction of the square base; the supporting shaft penetrates through the central axial direction of the rotating wheel through the deep groove ball bearing, the clamping foot is fixedly arranged at the lower end of the pre-tightening block, so that the lower end of the clamping foot corresponds to the upper end face of the rotating wheel, the driving and clamping integration of the resonance type rotary piezoelectric motor is realized, single harmonic driving is adopted to work in a resonance state, the energy conversion efficiency is good, compared with other motors of the same type, the contact and separation of the clamping foot and the rotating wheel are abrupt, the rotating wheel is driven by static friction force, sliding friction does not exist between the clamping foot and the rotating wheel, and the motor is stable in operation.

Description

Resonant rotary piezoelectric motor
Technical Field
The invention belongs to the technical field of precise driving and positioning, and particularly relates to a resonant rotary piezoelectric motor.
Background
Piezoelectric motors have evolved rapidly over the last decades as the demand for actuators in engineering applications has increased. The piezoelectric motor converts input electric energy into output mechanical energy by utilizing the inverse piezoelectric effect of the piezoelectric material, and compared with the traditional electromagnetic motor, the piezoelectric motor has the advantages of small volume, quick response, no electromagnetic interference and the like. At present, the piezoelectric motor has wide application in the fields of micro robots, aerospace equipment, biomedical and optical measurement and the like.
The piezoelectric motor has a plurality of structural types and can be mainly divided into an ultrasonic motor, an inchworm motor and an inertial impact motor according to the working principle. The ultrasonic motor has the advantages of high frequency, high torque, low noise and the like. However, since the ultrasonic motor generates a motion by using friction between the stator and the mover, the motor is accompanied with a problem of frictional wear at the time of operation, and thus this type of motor is not suitable for long-time operation. The inchworm motor works under quasi-static state and does not generate sliding friction in the working process, so that the inchworm motor has the characteristics of large output force, high efficiency and precision and the like. However, inchworm motors have a lower operating frequency than other types of motors, resulting in lower output speeds, and in 2017, wang et al designed an inchworm motor having a maximum no-load speed of about 0.0377 rad/s.
The inertial impact motor has the advantages of large stroke, simple structure, high resolution, small volume, microminiaturization and the like. However, the motor of the type uses the inertia impact of the stator to make the rotor generate micro displacement difference to perform linear or rotary motion, so that the backspacing step of each period is different, and the running stability of the motor of the type is affected.
Therefore, the resonant rotary piezoelectric motor needs to be designed, the clamping is integrated, the structure is simple, single harmonic drive is adopted to work in a resonant state, the energy conversion efficiency is better, compared with other motors of the same type, the resonant rotary piezoelectric motor has the characteristics of large output torque, convenience in power control and the like, the contact and separation of clamping feet and the rotating wheel are abrupt, the rotating wheel is driven by static friction force, and sliding friction does not exist, so that the service life of the motor can be prolonged.
Disclosure of Invention
The invention provides a resonant rotary piezoelectric motor, which aims to solve the defects of serious friction and abrasion of an ultrasonic motor, low frequency, low speed of an inchworm motor, unstable work of an inertial impact motor and the like.
The technical scheme of the invention is as follows: a resonant type rotary piezoelectric motor,
comprises a square base 1, a stator mechanism 2 and a rotating wheel mechanism 3;
the stator mechanism 2 comprises a driving elastic vibrator 21, a pair of clamping blocks 22, a central connecting block 23, a pre-tightening block 24 and a clamping elastic vibrator 25 which are arranged above the square base 1 and are sequentially connected along the X-axis direction of the square base 1;
the driving elastic vibrator 21 is in a horizontally arranged rectangle, two side surfaces of the rectangle are vertically arranged, a pair of driving piezoelectric sheets 26 are attached to the two side surfaces, and a first mass block 27 is fixedly connected to the extending end of the driving elastic vibrator 21;
the clamping elastic vibrator 25 is in a horizontally arranged rectangle, two side surfaces of the rectangle are horizontally arranged, a pair of clamping piezoelectric sheets 28 are attached to the two side surfaces, and a second mass block 29 is fixedly connected to the extending end of the clamping elastic vibrator 25;
the rotating wheel mechanism 3 comprises a rotating wheel 31, a supporting shaft 32 and a clamping foot 34, wherein the supporting shaft 32 penetrates through the central axial direction of the rotating wheel 31 through a deep groove ball bearing 33 and penetrates through a central connecting block 23, a pre-tightening block 24 is arranged on the central connecting block 23 in a floating mode, the clamping foot 34 is fixedly arranged at the lower end of the pre-tightening block 24, and the lower end of the clamping foot 34 corresponds to the upper end face of the rotating wheel 31;
during operation, harmonic signals are input to the pair of driving piezoelectric plates 26, and the elastic vibrator 21 is driven to drive the central connecting block 23 to swing reciprocally around the supporting shaft 32 in a vibration period, so that the clamping foot 34 can stir the rotating wheel 31 to rotate; the other pair of clamping piezoelectric plates 28 is input with a harmonic signal, and the clamping elastic vibrator 25 swings up and down around the rotating wheel 31 in one vibration period, so that the clamping foot 34 clamps and releases the rotating wheel 31.
Further, the central connecting block 23 is a horizontally arranged convex block, the large end of the convex block is fixedly connected with the pair of clamping blocks 22, and the small end of the convex block is horizontally provided with a pair of threaded holes;
the pre-tightening block 24 comprises a rectangular cavity with an open bottom, so that the pre-tightening block 24 covers the small end of the male block,
a pair of vertical waist-shaped holes are correspondingly formed on the opposite side walls of the pre-tightening block 24 respectively, and the pre-tightening block 24 is fixed on the small end of the convex block by sequentially penetrating through the vertical waist-shaped holes and the threaded holes of the small end of the convex block through fastening screws 241;
the pre-tightening screw 242 penetrates through the upper end of the pre-tightening block 24 and connects the pre-tightening block 24 with the small end of the convex block, the pre-tightening screw 242 is sleeved with a pre-tightening spring 243, and the pre-tightening screw 242 and the tightening screw 241 are adjusted to enable the pre-tightening block 24 to be mounted on the central connecting block 23 in a floating mode.
Further, a horizontal clamping foot connecting block 374 is arranged on one side of the central connecting block 23 corresponding to the clamping elastic vibrator 25, and flexible hinge connection is arranged between the central connecting block 23 and the clamping foot connecting block 374; the clamping foot 34 is in a short cylindrical shape, the lower end of the clamping foot is in a spherical cambered surface, and the upper end of the clamping foot is fixedly connected with the clamping foot connecting block 341.
Further, an inverted U-shaped bracket 2 is fixedly arranged above the square base 1, the upper end of the support shaft 32 is fixedly connected with the upper bottom plate of the U-shaped bracket 2, and the lower end of the support shaft 32 is fixedly connected with the square base 1.
Further, each of the driving piezoelectric plate and the clamping piezoelectric plate is a lead zirconate titanate piezoelectric ceramic plate.
Further, the support shaft 32 is a three-section support shaft, and the upper section and the middle section are connected by a flexible hinge, and the middle section and the lower section are connected by a flexible hinge.
The invention has the beneficial effects that:
(1) According to the resonant rotary piezoelectric motor, a pair of driving piezoelectric sheets inputs harmonic signals, and the driving elastic vibrator drives the stator mechanism to realize reciprocating swing relative to the supporting shaft in a vibration period so as to realize the action of clamping feet to finish the rotation of the rotating wheel; inputting harmonic signals to the other pair of clamping piezoelectric sheets, and enabling the clamping elastic vibrator to swing up and down relative to the rotating wheel in a vibration period so as to clamp and loosen the rotating wheel by clamping feet; simultaneously, harmonic signals with equal frequency and different phases are respectively input to the driving piezoelectric sheet and the clamping piezoelectric sheet, and bending vibration in the vertical staggered direction of the driving elastic vibrator and the clamping elastic vibrator is coordinated and matched, so that the clamping foot moves in an elliptical track, the rotating wheel realizes unidirectional continuous rotation, and simultaneously, the input phase difference is changed to adjust the motor rotating speed and realize motor reverse rotation;
therefore, the invention realizes the integration of driving and clamping of the resonance type rotary piezoelectric motor, has simple structure, adopts single harmonic driving to work in a resonance state, has better energy conversion efficiency, and compared with other motors of the same type, the contact and separation of the clamping foot and the rotating wheel are abrupt, the rotating wheel is driven by static friction force, and sliding friction does not exist between the clamping foot and the rotating wheel, so that the motor is stable in operation, and the service life of the motor is prolonged.
(2) The working state of the invention is a resonance state, when two paths of electric signals are cooperatively excited, the rotating wheel can realize unidirectional rotation, the rotating wheel can rotate reversely by changing the initial phase of the input electric signals, and when the working frequency of a motor prototype is 360Hz and the driving voltage is 280V, the idle rotation speed and the maximum output torque of the motor are 19.7 r/min and 93.6N mm.
Therefore, the power supply has the advantages of large output torque and convenient power supply control.
Drawings
Fig. 1 is a schematic structural diagram of a resonant rotary piezoelectric motor according to the present invention.
Fig. 2 is a schematic view of a structure of the stator mechanism contacting with a rotating wheel.
Fig. 3 is a schematic structural view of the stator mechanism of the present invention.
FIG. 4 is a schematic view of the installation and use of the pretensioning block of the present invention.
Fig. 5 is an exploded view of fig. 4.
FIG. 6 is a schematic view of the structure of the rotor of the present invention.
Fig. 7 is a schematic structural view of the support shaft of the present invention.
Fig. 8 is a simplified schematic diagram of a stator mechanism in contact with a rotor wheel according to the present invention in a front view.
FIG. 9 is a simplified schematic top view of a stator mechanism in contact with a rotor wheel in accordance with the present invention.
FIG. 10 is a graph of the driving voltage versus the input signal to the clamping piezo-electric pad of the present invention.
FIG. 11 is t in FIG. 10 for the motor of the present invention 0 -t 1 A working principle diagram of the device.
FIG. 12 is t in FIG. 10 for the motor of the present invention 1 -t 2 A working principle diagram of the device.
FIG. 13 is t in FIG. 10 for the motor of the present invention 2 -t 3 A working principle diagram of the device.
FIG. 14 is t in FIG. 10 for the motor of the present invention 3 -t 4 A working principle diagram of the device.
Wherein: square base 1, stator mechanism 2, runner mechanism 3, U-shaped bracket 4, driving elastic vibrator 21, a pair of clamping blocks 22, center connection block 23, pre-tightening block 24, fastening screw 241, pre-tightening screw 242, pre-tightening spring 243, clamping elastic vibrator 25, a pair of driving piezoelectric plates 26, first mass 27, a pair of clamping piezoelectric plates 28, second mass 29, runner 31, support shaft 32, deep groove ball bearing 33, clamping foot 34, clamping foot connection block 341.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the detailed description is presented by way of example only and is not intended to limit the invention.
Examples
Referring to fig. 1 and 2, a resonant rotary piezoelectric motor includes a square base 1, a stator mechanism 2, and a wheel mechanism 3;
referring to fig. 3, the stator mechanism 2 includes a driving elastic vibrator 21, a pair of clamping blocks 22, a central connecting block 23, a pre-tightening block 24 and a clamping elastic vibrator 25, which are disposed above the square base 1 and are sequentially connected along the X-axis direction of the square base 1;
the driving elastic vibrator 21 is in a horizontally arranged rectangle, two side surfaces of the rectangle are vertically arranged, a pair of driving piezoelectric sheets 26 are attached to the two side surfaces, and a first mass block 27 is fixedly connected to the extending end of the driving elastic vibrator 21;
the clamping elastic vibrator 25 is a rectangle which is horizontally arranged, two side surfaces of the rectangle are horizontally arranged, a pair of clamping piezoelectric sheets 28 are attached to the two side surfaces, and a second mass block 29 is fixedly connected to the extending end of the clamping elastic vibrator 25.
Referring to fig. 6 and 7, the wheel mechanism 3 includes a wheel 31, a support shaft 32 and a clamping foot 34, the support shaft 32 penetrates through the central axial direction of the wheel 31 and penetrates through the central connection block 23 through a deep groove ball bearing 33, the pre-tightening block 24 is floatingly mounted on the central connection block 23, and the clamping foot 34 is fixedly and vertically arranged at the lower end of the pre-tightening block 24, so that the lower end of the clamping foot 34 corresponds to the upper end surface of the wheel 31;
during operation, harmonic signals are input to the pair of driving piezoelectric plates 26, and the elastic vibrator 21 is driven to drive the central connecting block 23 to swing reciprocally around the supporting shaft 32 in a vibration period, so that the clamping foot 34 can stir the rotating wheel 31 to rotate; the other pair of clamping piezoelectric plates 28 is input with a harmonic signal, and the clamping elastic vibrator 25 swings up and down around the rotating wheel 31 in one vibration period, so that the clamping foot 34 clamps and releases the rotating wheel 31.
Referring to fig. 4 and 5, the central connecting block 23 is a horizontally arranged convex block, the large end of the convex block is fixedly connected with the pair of clamping blocks 22, and the small end of the convex block is horizontally provided with a pair of threaded holes;
the pre-tightening block 24 comprises a rectangular cavity with an open bottom, so that the pre-tightening block 24 covers the small end of the male block,
a pair of vertical waist-shaped holes are formed in opposite side walls of the pre-tightening block 24 in a penetrating manner, and the pre-tightening block 24 is fixed on the small end of the convex block through the vertical waist-shaped holes and the threaded holes sequentially by fastening screws 241;
the pre-tightening screw 242 penetrates through the upper end of the pre-tightening block 24 and connects the pre-tightening block 24 with the small end of the convex block, and the pre-tightening spring 243 is sleeved on the pre-tightening screw 242.
One side of the pre-tightening block 24 corresponding to the clamping elastic vibrator 25 is provided with a horizontal clamping foot connecting block 341, and flexible hinge connection is arranged between the pre-tightening block 24 and the clamping foot connecting block 341.
The upper part of the square base 1 is fixedly provided with an inverted U-shaped support 4, the upper end of the support shaft 32 is fixedly connected with the upper bottom plate of the U-shaped support 4, and the lower end of the support shaft 32 is fixedly connected with the square base 1.
Each of the driving piezoelectric plate and the clamping piezoelectric plate is a lead zirconate titanate piezoelectric ceramic plate.
The support shaft 32 is a three-section support shaft, and the upper section and the middle section are in flexible hinge connection, and the middle section and the lower section are in flexible hinge connection.
Fig. 8 is a simplified schematic diagram of the stator mechanism 2 of the present invention in contact with the rotating wheel 31 in a front view; fig. 9 is a simplified schematic top view of the stator mechanism 2 of the present invention in contact with the rotor wheel 31.
During operation, harmonic signals are input to the pair of driving piezoelectric plates 26, and the elastic vibrator 21 is driven to drive the stator mechanism 2 to swing reciprocally relative to the support shaft 32 in a vibration period so as to realize that the clamping foot 34 finishes the action of poking the rotation wheel 31 to rotate; inputting harmonic signals to the other pair of clamping piezoelectric plates 28, and enabling the clamping elastic vibrator 25 to swing up and down relative to the rotating wheel 31 in one vibration period so as to enable the clamping foot 34 to clamp and loosen the rotating wheel 31; if harmonic signals with equal frequency and different phases are simultaneously input to the pair of driving piezoelectric plates 26 and the pair of clamping piezoelectric plates 28, the bending vibration of the driving elastic vibrator 21 and the clamping elastic vibrator 25 in the vertical staggered direction is coordinated and matched, so that the clamping foot 34 moves in an elliptical track, the rotating wheel 31 realizes unidirectional continuous rotation, and meanwhile, the input phase difference is changed to adjust the motor rotating speed and realize motor reverse rotation.
See fig. 10-14, at t 0 The time clamp elastic vibrator 25 is at the initial position, and the driving elastic vibrator 21 is at the counterclockwise maximum position.
From t 0 To t 1 During the period, the clamping elastic vibrator 25 starts to swing upwards from the initial position to the uppermost position, the elastic vibrator 21 is driven to swing clockwise from the anticlockwise maximum position to the initial position, the stator mechanism swings around the supporting shaft 32 in the process, but the clamping foot 34 is far away from the rotating wheel 31, and the rotating wheel 31 is kept motionless;
at t 1 To t 2 In a time period, the clamping elastic vibrator 25 swings downwards from the uppermost position to the initial position, the clamping foot 34 approaches the rotating wheel 31, the driving elastic vibrator 21 continues swinging from the initial position to the maximum clockwise position, and the rotating wheel 31 still keeps still in the process;
at t 2 To t 3 In a period of time, the clamp elastic vibrator 25 continues to swing down to the lowermost position, driving the elastic vibrator 21 to swing counterclockwise from the clockwise maximum position to the initial position. In the process, the clamping foot 34 clamps the rotating wheel 31, and the clamping foot 34 swings around the shaft under the action of the driving elastic vibrator 21, so that the rotating wheel 31 is driven to rotate anticlockwise for an angle alpha; at t 3 To t 4 In a period of time, the clamp elastic vibrator 25 swings upward from the lowermost position to the initial position, and the drive elastic vibrator 21 continues to swing from the initial position to the counterclockwise maximum position. In this process, the clamping foot 34 and the rotating wheel 31 still maintain a clamping state, and the rotating wheel 31 continues to rotate counterclockwise by an angle β under the action of the driving elastic vibrator 21.
The four steps are that the motor rotates by an alpha+beta angle in one rotation period, so that continuous rotation of the motor can be realized by continuously adopting harmonic signal excitation, and reverse rotation of the motor can be realized by changing the phase difference of input signals.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (6)

1. A resonant rotary piezoelectric motor, characterized by:
comprises a square base (1), a stator mechanism (2) and a rotating wheel mechanism (3);
the stator mechanism (2) comprises a driving elastic vibrator (21), a pair of clamping blocks (22), a central connecting block (23), a pre-tightening block (24) and a clamping elastic vibrator (25), wherein the driving elastic vibrator is arranged above the square base (1) and sequentially connected along the X-axis direction of the square base (1);
the driving elastic vibrator (21) is in a horizontally arranged rectangle, two side surfaces of the rectangle are vertically arranged, a pair of driving piezoelectric sheets (26) are attached to the two side surfaces, and a first mass block (27) is fixedly connected to the extending end of the driving elastic vibrator (21);
the clamping elastic vibrator (25) is in a horizontally arranged rectangle, two side surfaces of the rectangle are horizontally arranged, a pair of clamping piezoelectric sheets (28) are attached to the two side surfaces, and a second mass block (29) is fixedly connected to the extending end of the clamping elastic vibrator (25);
the rotating wheel mechanism (3) comprises a rotating wheel (31), a supporting shaft (32) and clamping feet (34), wherein the supporting shaft (32) penetrates through the central axial direction of the rotating wheel (31) through a deep groove ball bearing (33) and penetrates through a central connecting block (23), a pre-tightening block (24) is arranged on the central connecting block (23) in a floating mode, the clamping feet (34) are fixedly arranged at the lower ends of the pre-tightening block (24), and the lower ends of the clamping feet (34) correspond to the upper end faces of the rotating wheel (31);
when the device works, harmonic signals are input to a pair of driving piezoelectric plates (26), the elastic vibrator (21) is driven to drive the center connecting block (23) to swing reciprocally around the supporting shaft (32) in a vibration period, and the clamping foot (34) can drive the rotating wheel (31) to rotate; and a harmonic signal is input to the other pair of clamping piezoelectric sheets (28), and the clamping elastic vibrator (25) swings up and down around the rotating wheel (31) in a vibration period, so that the clamping foot (34) clamps and releases the rotating wheel (31).
2. A resonant rotary piezoelectric motor according to claim 1, wherein: the center connecting block (23) is a horizontally arranged convex block, the large end of the convex block is fixedly connected with the pair of clamping blocks (22), and the small end of the convex block is horizontally provided with a pair of threaded holes;
the pre-tightening block (24) comprises a rectangular cavity with an open bottom, the pre-tightening block (24) is covered on the small end of the convex block, a pair of vertical waist-shaped holes are correspondingly formed in the opposite side walls of the pre-tightening block (24), and the pre-tightening block (24) is fixed on the small end of the convex block through fastening screws (241) sequentially penetrating through the vertical waist-shaped holes and threaded holes in the small end of the convex block;
the pre-tightening screw (242) penetrates through the upper end of the pre-tightening block (24) and connects the pre-tightening block (24) with the small end of the convex block, the pre-tightening spring (243) is sleeved on the pre-tightening screw (242), and the pre-tightening screw (242) and the fastening screw (241) are adjusted to enable the pre-tightening block (24) to be arranged on the central connecting block (23) in a floating mode.
3. A resonant rotary piezoelectric motor according to claim 1, wherein: a horizontal clamping foot connecting block (341) is arranged on one side of the pre-tightening block (24) corresponding to the clamping elastic vibrator (25), flexible hinge connection is arranged between the pre-tightening block (24) and the clamping foot connecting block (341),
the clamping foot (34) is of a short cylindrical shape, the lower end of the clamping foot is of a spherical cambered surface, and the upper end of the clamping foot is fixedly connected with the clamping foot connecting block (341).
4. A resonant rotary piezoelectric motor according to claim 1, wherein: the upper part of the square base (1) is fixedly provided with an inverted U-shaped support (4), the upper end of the supporting shaft (32) is fixedly connected with the upper bottom plate of the U-shaped support (4), and the lower end of the supporting shaft (32) is fixedly connected with the square base (1).
5. A resonant rotary piezoelectric motor according to claim 1, wherein: each of the driving piezoelectric plate and the clamping piezoelectric plate is a lead zirconate titanate piezoelectric ceramic plate.
6. A resonant rotary piezoelectric motor according to claim 1, wherein: the support shaft (32) is a three-section support shaft, the upper section and the middle section are in flexible hinge connection, and the middle section and the lower section are in flexible hinge connection.
CN202210986325.6A 2022-03-04 2022-08-17 Resonant rotary piezoelectric motor Active CN115224977B (en)

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CN2022102119560 2022-03-04
CN202210211956 2022-03-04

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CN113131785A (en) * 2021-04-08 2021-07-16 合肥工业大学 Inertia rotation piezoelectric motor
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Publication number Priority date Publication date Assignee Title
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WO2014008394A1 (en) * 2012-07-03 2014-01-09 Discovery Technology International, Inc. Piezoelectric linear motor
CN106602927A (en) * 2017-02-27 2017-04-26 合肥工业大学 Resonant square-wave synchronous clamping piezoelectric linear motor
CN113131785A (en) * 2021-04-08 2021-07-16 合肥工业大学 Inertia rotation piezoelectric motor
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