CN112383241A - Bidirectional inertia linear piezoelectric motor - Google Patents

Bidirectional inertia linear piezoelectric motor Download PDF

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Publication number
CN112383241A
CN112383241A CN202011369569.7A CN202011369569A CN112383241A CN 112383241 A CN112383241 A CN 112383241A CN 202011369569 A CN202011369569 A CN 202011369569A CN 112383241 A CN112383241 A CN 112383241A
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plate
guide rail
pair
mounting plate
piezoelectric
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CN112383241B (en
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贺良国
楚宇恒
徐磊
张勇
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Yangzhou Guoao Intelligent Machinery Co ltd
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Yangzhou Guoao Intelligent Machinery Co ltd
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025Inertial sliding motors

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Abstract

The invention discloses a bidirectional inertia linear piezoelectric motor, and belongs to the technical field of precision driving and positioning. Comprises a guide rail, a slide block, a mounting plate and a driving mechanism; the driving mechanism comprises a bottom plate, a displacement amplifying piece, a pair of mass blocks and a piezoelectric stack. The deformation of the piezoelectric stack along the direction vertical to the guide rail is converted into the movement of the motor parallel to the guide rail by using the inertia of the displacement amplification piece and the pair of mass blocks, and the movement is converted into the unidirectional movement by using the self-clamping mechanism. Applying a 1430Hz first-order frequency signal to the piezoelectric stack, and exciting the motor to generate a first-order resonance mode under the excitation of the first-order frequency signal, wherein the motor moves leftwards; a 2451Hz second-order frequency signal is applied to the piezo stack 5, and the second-order frequency signal excites the motor to generate a second-order resonance mode, and the motor moves to the right. The maximum speed of the invention is 16.35mm/s, the maximum output force is 8.64N, the efficiency is 21.43%, the friction and the abrasion are small, and the invention realizes the work in the environment needing long-term continuous operation.

Description

Bidirectional inertia linear piezoelectric motor
Technical Field
The invention belongs to the technical field of precision driving and positioning, and particularly relates to a bidirectional inertia linear piezoelectric motor.
Background
The piezoelectric motor is applied to the fields of medical treatment, aviation, precision positioning and the like due to the advantages of simple structure, high response speed, high power density and the like. The traditional inertial motor can be divided into an asymmetric signal type and an asymmetric structural type; the asymmetric structure type inertia piezoelectric motor is driven by inertia impact generated in the reciprocating motion process by using the structural difference of the motor, and mostly can only realize unidirectional motion. Referring to fig. 7, in the conventional inertia piezoelectric motor with an asymmetric structure, the maximum speed of the motor is 3.178mm/s, the maximum output force is 4.25N, and the efficiency is 6.2%, and the motor adopts a piezoelectric bimorph as a driving element of the motor, so that the output performances of the motor, such as speed, output force, efficiency and the like, are low; the motor cannot realize bidirectional movement, and the application range of the motor is limited.
Disclosure of Invention
The invention provides a bidirectional inertia linear piezoelectric motor by improving the structure in order to realize bidirectional movement and improve the speed, output force and efficiency of the motor.
A bidirectional inertia linear piezoelectric motor comprises a guide rail 7, a slide block 6, a mounting plate 2 and a driving mechanism, wherein the mounting plate 2 is an L-shaped plate, one side of the mounting plate 2 is a long-side plate, and the other side of the mounting plate 2 is a short-side plate; the long side plate of the mounting plate 2 is fixed on a sliding block 6, the sliding block 6 is in sliding fit with a guide rail 7, and the driving mechanism is arranged on the short side plate of the mounting plate 2;
a first flexible hinge is arranged between the long side plate and the short side plate of the mounting plate 2;
the driving mechanism comprises a bottom plate 1, a displacement amplifying piece 3, a piezoelectric stack 5 and a pair of mass blocks 4;
the bottom plate 1 comprises a horizontal front end plate 11, a horizontal connecting plate 14 and an upright side plate 15 which are connected in sequence; the horizontal front end plate 11 is parallel to the guide rail 7, and the bottom plate 1 is fixed on the short side plate of the mounting plate 2 through a connecting plate; the displacement amplification piece 3 is a hollow quadrangle, and four corners of the displacement amplification piece 3 are respectively provided with a second flexible hinge; the outer part of one side of the displacement amplification piece 3 is fixedly connected with the upright side plate 15 through a connecting and mounting plate 31; the piezoelectric stack 5 is fixedly arranged in a cavity of the displacement amplifying part 3, and the pair of mass blocks 4 are symmetrically arranged outside the displacement amplifying part 3 through the mass block mounting plate 35;
setting the direction parallel to the guide rail 7 as an x-axis and the direction vertical to the guide rail 7 as a y-axis; the piezoelectric stack 5 is positioned in the y-axis direction, and the pair of mass blocks 4 is positioned in the y-axis direction;
when a 1430Hz first-order frequency signal is input to the piezoelectric stack 5, the motor generates a first-order resonance mode, and the slide block 6 drives the driving mechanism to move leftwards along the guide rail 7; when a 2451Hz second-order frequency signal is input into the piezoelectric stack 5, the motor generates a second-order resonance mode, and the slide block 6 drives the driving mechanism to move rightwards along the guide rail 7; under the action of the second flexible hinge, the deformation of the piezoelectric stack 5 along the direction vertical to the guide rail is converted into the contraction or expansion of the displacement amplification part 3 in the direction parallel to the guide rail 7; the mass block 5 is used for increasing the inertia of the displacement amplification part 3, so that the contraction or expansion of the displacement amplification part 3 in a direction parallel to the guide rail 7 is converted into the movement of the sliding block 6 on the guide rail 7; the bottom plate 1 is driven to rotate around the flexible hinge on the mounting plate 2 under the vibration mode, and the function of tightly clamping or loosening the guide rail 7 on the bottom plate 1 is realized.
The technical scheme for further limiting is as follows:
the bottom plate 1 comprises a horizontal front end plate 11, a vertical connecting plate 12, a horizontal connecting plate 14 and an upright side plate 15, one end of the horizontal front end plate 11 is fixedly connected with the lower end of one side surface of the vertical connecting plate 12, and one end of the horizontal connecting plate 14 is fixedly connected with the upper end of the other side surface of the vertical connecting plate 12; the other end of the horizontal connecting plate 14 is fixedly connected with the middle part of one side surface of the vertical side plate 15; a pair of waist-shaped holes 13 are formed in the vertical connecting plate 12, and the bottom plate 1 is fixed on the mounting plate 2 through bolts and the pair of waist-shaped holes 13; the horizontal connecting plate 14 is connected with the end part of the short side plate of the mounting plate 2 in a matched mode through a pre-tightening bolt, and pre-tightening force between the horizontal front end plate 11 of the bottom plate and the guide rail 7 is adjusted.
The long side plate 24 and the short side plate 21 of the mounting plate 2 are connected by a first flexible hinge 23; four through holes are formed in the long side plates 24; in operation, the short side plate 21 swings under the action of the first flexible hinge 23, and the horizontal front end plate 11 is contacted with or separated from the surface of the guide rail 7.
The displacement amplification member 3 includes a pair of piezoelectric stack mounting plates 33 and a pair of transition plates 34; two inner sides of one piezoelectric stack mounting plate 33 are respectively connected with one end of a pair of transition plates 34 through second flexible hinges, and two inner sides of the other piezoelectric stack mounting plate 33 are respectively connected with the other end of the pair of transition plates 34 through second flexible hinges to form a hollow quadrangle; the middle part of the transition plate 34 at one side is fixedly connected with the middle part of the connecting and mounting plate 31 through a pair of second flexible hinges, and the displacement amplification part 3 is fixed on the bottom plate 1 through the fixed connection of the connecting and mounting plate 31 and the upright side plate 15; the middle part of the transition plate 34 at the other side is fixedly connected with one end of the mass block mounting plate 35 through a pair of second flexible hinges, and the pair of mass blocks 4 are symmetrically fixed at two side surfaces of the mass block mounting plate 35.
The piezoelectric stack 5 is formed by stacking a plurality of piezoelectric sheets, and the piezoelectric sheets are made of piezoelectric ceramics.
The material of the pair of masses 4 is copper.
The beneficial technical effects of the invention are embodied in the following aspects:
1. the inertial piezoelectric motor can realize bidirectional motion by switching the frequency of a driving signal;
2. the inertia piezoelectric motor works in a resonance state, has high working frequency, and the driving element is a piezoelectric stack, so the performances of the inertia piezoelectric motor such as speed, output force, efficiency and the like are higher than those of the prior inertia piezoelectric motor; the maximum speed of the inertia piezoelectric motor is 16.35mm/s, the maximum output force is 8.64N, and the efficiency is 21.43%.
3. The inertia piezoelectric motor has a simple structure, adopts a self-clamping mechanism, has small friction and wear, and can work in an environment needing long-term continuous operation.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is an exploded view of the assembly.
Fig. 3 is a schematic structural diagram of the base plate and the mounting plate.
Fig. 4 is a schematic top view of the displacement enlarger.
Fig. 5 is an exploded view of the assembly of the displacement amplifying member.
Fig. 6 is a schematic diagram of the leftward movement of the motor.
Fig. 7 is a schematic diagram of the rightward movement of the motor.
Fig. 8 is a schematic structural diagram of a conventional inertial piezoelectric motor.
Sequence numbers in the upper figure: the device comprises a bottom plate 1, a mounting plate 2, a displacement amplification piece 3, a mass block 4, a piezoelectric stack 5, a sliding block 6, a guide rail 7, a horizontal front end plate 11, a vertical connecting plate 12, a kidney-shaped hole 13, a horizontal connecting plate 14, an upright side plate 15, a short side plate 21, a side surface 22 of the short side plate, a first flexible hinge 23, a long side plate 24, a connecting mounting plate 31, a second flexible hinge 32, a piezoelectric stack mounting plate 33, a transition plate 34 and a mass block mounting plate 35.
Detailed Description
The invention will be further described by way of example with reference to the accompanying drawings.
Examples
Referring to fig. 1, a bidirectional inertial linear piezoelectric motor includes a guide rail 7, a slider 6, a mounting plate 2, and a driving mechanism.
Referring to fig. 3, the mounting plate 2 is an L-shaped plate, one side of the mounting plate 2 is a long side plate 24, and the other side is a short side plate 21; a first flexible hinge 23 is provided between the long side panel 24 and the short side panel 21. Referring to fig. 2, four through holes are formed in the long side plate 24 of the mounting plate 2, and the long side plate 24 is fixed on the sliding block 6 through the four through holes and four bolts. The slide block 6 is in sliding fit with the guide rail 7, and the driving mechanism is fixedly arranged on the short side plate of the mounting plate 2.
Four through holes are formed in the long side plates 24; in operation, the short side plate 21 swings under the action of the first flexible hinge 23, and the horizontal front end plate 11 is contacted with or separated from the surface of the guide rail 7.
Defining: in the plane of the guide rail 7, the direction parallel to the guide rail 7 is the x-axis, and the direction perpendicular to the guide rail 7 is the y-axis.
Referring to fig. 1, the driving mechanism includes a base plate 1, a displacement amplifier 3, a piezoelectric stack 5, and a pair of masses 4.
Referring to fig. 3, the bottom plate 1 includes a horizontal front end plate 11, a horizontal connecting plate 14, and an upright side plate 15, which are connected in sequence. One end of the horizontal front end plate 11 is fixedly connected with the lower end of one side surface of the vertical connecting plate 12, and one end of the horizontal connecting plate 14 is fixedly connected with the upper end of the other side surface of the vertical connecting plate 12; the other end of the horizontal connecting plate 14 is fixedly connected with the middle part of one side surface of the vertical side plate 15; a pair of waist-shaped holes 13 are formed in the vertical connecting plate 12, and the bottom plate 1 is fixed on the mounting plate 2 through bolts and the pair of waist-shaped holes 13; the horizontal front end plate 11 is parallel to the guide rail 7, the horizontal connecting plate 14 is connected with the end part of the short side plate 21 of the mounting plate 2 in a matched mode through a pre-tightening bolt, and pre-tightening force between the horizontal front end plate 11 of the bottom plate and the guide rail 7 is adjusted. Referring to fig. 5, the displacement amplification member 3 is a hollow quadrilateral, and four corners of the displacement amplification member 3 are respectively provided with a second flexible hinge 23; the displacement-amplifying member 3 is fixedly attached at one side outer portion thereof to the upright side plate 15 by a coupling mounting plate 31.
Referring to fig. 4 and 5, the displacement amplification member 3 includes a pair of piezoelectric stack mounting plates 33 and a pair of transition plates 34; two sides of one piezoelectric stack mounting plate 33 are respectively connected with one end of a pair of transition plates 34 through second flexible hinges, and two sides of the other piezoelectric stack mounting plate 33 are respectively connected with the other end of the pair of transition plates 34 through second flexible hinges to form a hollow quadrangle; the middle part of the transition plate 34 at one side is fixedly connected with the middle part of the connecting and mounting plate 31 through a pair of second flexible hinges, and the displacement amplification part 3 is fixed on the bottom plate 1 through the fixed connection of the connecting and mounting plate 31 and the upright side plate 15; the middle part of the transition plate 34 at the other side is fixedly connected with one end of the mass block mounting plate 35 through a pair of second flexible hinges, and the pair of mass blocks 4 are symmetrically fixed at two side surfaces of the mass block mounting plate 35. The piezo-electric stack 5 is fixedly installed in the cavity of the displacement amplifier 3, and both ends of the piezo-electric stack are respectively and fixedly connected with a pair of piezo-electric stack installation plates 33. The piezoelectric stack 5 is located in the y-axis direction, and when the piezoelectric stack is operated, the piezoelectric stack is extended or shortened in the y-axis direction, and due to the existence of the second flexible hinge 32, the deformation of the piezoelectric stack 5 in the y-axis direction can be converted into the contraction or expansion of the displacement amplification part 3 in the x-axis direction. The pair of mass blocks 4 is located in the y-axis direction, and the pair of mass blocks 4 is used for increasing inertia in operation.
The piezoelectric stack 5 is formed by stacking a plurality of piezoelectric sheets, and the piezoelectric sheets are made of piezoelectric ceramics. The pair of masses 4 is made of copper and has a mass of 50 g. The material of the base plate 1, the mounting plate 2 and the displacement amplifying member 3 is 65Mn steel.
When the bidirectional inertia linear piezoelectric motor works, the first-order frequency of leftward movement work is 1430Hz, and the second-order frequency of rightward movement work is 2451 Hz; the driving voltage was 220V.
Referring to fig. 6 and 7, the principle of the bidirectional inertial linear piezoelectric motor is explained as follows:
referring to fig. 1 and fig. 6 (1), initially, the front end of the bottom plate 1 is in contact with the guide rail 7, the contact point is A, a 1430Hz first-order frequency signal is applied to the piezoelectric stack 5, and the motor generates a first-order resonance mode under the excitation of the first-order frequency signal; the motor action process is as follows:
the method comprises the following steps: referring to fig. 6 (2), when the piezoelectric stack 5 extends in the y-axis direction, the displacement amplifying part 3 contracts in the x-axis direction to drive the mass block 4 to move leftward, and the base plate 1 rotates clockwise around the first flexible hinge 23, so that the front end of the base plate 1 is no longer in contact with the guide rail 7, and the slider moves leftward;
step two: referring to fig. 6 (3), when the piezoelectric stack 5 contracts in the y-axis direction, the displacement amplification piece 3 expands in the X-axis direction to drive the mass block 4 to move rightwards, the bottom plate 1 rotates anticlockwise around the first flexible hinge 23 to cause the front end of the bottom plate 1 to be in contact with the guide rail 7, the slide block stops moving under the action of friction force, at the moment, the contact point of the bottom plate 1 and the guide rail 7 is a point B, and the motor moves leftwards by a step distance delta X from the point a to the point B in a period1
Repeating the steps, and realizing the macroscopically continuous leftward movement of the bidirectional inertia linear piezoelectric motor.
Referring to fig. 1 and fig. 7 (1), initially, the front end of the base plate 1 is in contact with the guide rail 7, the contact point is C, a 2451Hz second-order frequency signal is applied to the piezoelectric stack 5, and the motor generates a second-order resonance mode under excitation of the second-order frequency signal, and the motor acts as follows:
the method comprises the following steps: referring to fig. 7 (2), when the piezoelectric stack 5 contracts in the y-axis direction, the displacement amplification piece 3 expands in the x-axis direction to drive the mass block 4 to move rightwards, the base plate 1 rotates clockwise around the first flexible hinge 23, so that the front end of the base plate 1 is not in contact with the guide rail 7 any more, and the slide block moves rightwards;
step two: referring to fig. 7 (3), when the piezoelectric stack 5 extends in the y-axis direction, the displacement amplification part 3 contracts in the x-axis direction, so as to drive the mass block 4 to move leftwards, the base plate 1 rotates anticlockwise around the first flexible hinge 23,the front end of the bottom plate 1 is contacted with the guide rail 7, the slide block stops moving under the action of friction force, the contact point of the bottom plate 1 and the guide rail 7 is a point D, and the motor moves rightwards by a step delta X from the point C to the point D in a period2
Repeating the steps, and realizing the macroscopically continuous rightward movement of the bidirectional inertia linear piezoelectric motor.

Claims (6)

1. A bidirectional inertia linear piezoelectric motor comprises a guide rail (7), a sliding block (6), a mounting plate (2) and a driving mechanism, wherein the mounting plate (2) is an L-shaped plate, one side of the mounting plate (2) is a long-side plate, and the other side of the mounting plate is a short-side plate; the long side plate of mounting panel (2) is fixed on slider (6), slider (6) and guide rail (7) sliding fit, actuating mechanism locates on the short side plate of mounting panel (2), its characterized in that:
a first flexible hinge is arranged between the long side plate and the short side plate of the mounting plate (2);
the driving mechanism comprises a bottom plate (1), a displacement amplifying piece (3), a piezoelectric stack (5) and a pair of mass blocks (4);
the bottom plate (1) comprises a horizontal front end plate (11), a horizontal connecting plate (14) and an upright side plate (15) which are connected in sequence; the horizontal front end plate (11) is parallel to the guide rail (7), and the bottom plate (1) is fixed on the short side plate of the mounting plate (2) through a connecting plate; the displacement amplification piece (3) is a hollow quadrangle, and four corners of the displacement amplification piece (3) are respectively provided with a second flexible hinge; the outer part of one side of the displacement amplification piece (3) is fixedly connected with the upright side plate (15) through a connecting and mounting plate (31); the piezoelectric stack (5) is fixedly arranged in a cavity of the displacement amplifying piece (3), and the pair of mass blocks (4) are symmetrically arranged outside the displacement amplifying piece (3) through the mass block mounting plates (35);
setting the direction parallel to the guide rail (7) as an x-axis and the direction vertical to the guide rail (7) as a y-axis; the piezoelectric stack (5) is positioned in the y-axis direction, and the pair of mass blocks (4) is positioned in the y-axis direction;
when a 1430Hz first-order frequency signal is input to the piezoelectric stack (5), the motor generates a first-order resonance mode, and the sliding block (6) drives the driving mechanism to move leftwards along the guide rail (7); when a 2451Hz second-order frequency signal is input into the piezoelectric stack (5), the motor generates a second-order resonance mode, and the sliding block (6) drives the driving mechanism to move rightwards along the guide rail (7); under the action of the second flexible hinge, the deformation of the piezoelectric stack (5) along the direction vertical to the guide rail is converted into the contraction or expansion of the displacement amplification piece (3) in the direction parallel to the guide rail (7); the mass block (5) is used for increasing the inertia of the displacement amplification piece (3) so that the contraction or expansion of the displacement amplification piece (3) in the direction parallel to the guide rail (7) is converted into the movement of the sliding block (6) on the guide rail (7); the bottom plate (1) is driven to rotate around the flexible hinge on the mounting plate (2) under the vibration mode, and the function of tightly clamping or loosening the guide rail (7) on the bottom plate (1) is realized.
2. A bi-directional inertial linear piezoelectric motor according to claim 1, wherein: the bottom plate (1) comprises a horizontal front end plate (11), a vertical connecting plate (12), a horizontal connecting plate (14) and an upright side plate (15), one end of the horizontal front end plate (11) is fixedly connected with the lower end of one side surface of the vertical connecting plate (12), and one end of the horizontal connecting plate (14) is fixedly connected with the upper end of the other side surface of the vertical connecting plate (12); the other end of the horizontal connecting plate (14) is fixedly connected with the middle part of one side surface of the vertical side plate (15); a pair of waist-shaped holes (13) is formed in the vertical connecting plate (12), and the bottom plate (1) is fixed on the mounting plate (2) through bolts and the pair of waist-shaped holes (13); the horizontal connecting plate (14) is connected with the end part of the short side plate of the mounting plate (2) in a matched mode through a pre-tightening bolt, and pre-tightening force between the horizontal front end plate (11) of the bottom plate and the guide rail (7) is adjusted.
3. A bi-directional inertial linear piezoelectric motor according to claim 1, wherein: the long side plate (24) and the short side plate (21) of the mounting plate (2) are connected by a first flexible hinge (23); four through holes are formed in each long side plate (24); when the horizontal front end plate swinging mechanism works, the short side plate (21) swings under the action of the first flexible hinge (23), and the action that the horizontal front end plate (11) is contacted with or separated from the surface of the guide rail (7) is realized.
4. A bi-directional inertial linear piezoelectric motor according to claim 1, wherein: the displacement amplification piece (3) comprises a pair of piezoelectric stack mounting plates (33) and a pair of transition plates (34); two sides of the inner side of one piezoelectric stack mounting plate (33) are respectively connected with one end of a pair of transition plates (34) through second flexible hinges, and two sides of the inner side of the other piezoelectric stack mounting plate (33) are respectively connected with the other end of the pair of transition plates (34) through second flexible hinges to form a hollow quadrangle; the middle part of the transition plate (34) at one side is fixedly connected with the middle part of the connecting mounting plate (31) through a pair of second flexible hinges, and the displacement amplification piece (3) is fixed on the bottom plate (1) through the fixed connection of the connecting mounting plate (31) and the upright side plate (15); the middle part of the transition plate (34) at the other side is fixedly connected with one end of the mass block mounting plate (35) through a pair of second flexible hinges, and the pair of mass blocks (4) are symmetrically fixed on two side surfaces of the mass block mounting plate (35).
5. A bi-directional inertial linear piezoelectric motor according to claim 1, wherein: the piezoelectric stack (5) is formed by stacking a plurality of piezoelectric sheets, and the piezoelectric sheets are made of piezoelectric ceramics.
6. A bi-directional inertial linear piezoelectric motor according to claim 1, wherein: the pair of masses (4) is made of copper.
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Cited By (5)

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CN112865596A (en) * 2021-03-30 2021-05-28 吉林大学 Large-stroke piezoelectric inertia driving platform
CN113078844A (en) * 2021-04-21 2021-07-06 吉林大学 Device and method for expanding inertia force to improve performance of piezoelectric actuator
CN113206616A (en) * 2021-05-31 2021-08-03 苏州大学 Cross-scale precision motion platform
CN113220166A (en) * 2021-05-31 2021-08-06 北京京东方技术开发有限公司 Touch reproduction substrate, driving method thereof and electronic equipment
CN113220166B (en) * 2021-05-31 2024-05-17 北京京东方技术开发有限公司 Touch reproduction substrate, driving method thereof and electronic equipment

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112865596A (en) * 2021-03-30 2021-05-28 吉林大学 Large-stroke piezoelectric inertia driving platform
CN112865596B (en) * 2021-03-30 2024-04-12 吉林大学 Large-stroke piezoelectric inertia driving platform
CN113078844A (en) * 2021-04-21 2021-07-06 吉林大学 Device and method for expanding inertia force to improve performance of piezoelectric actuator
CN113206616A (en) * 2021-05-31 2021-08-03 苏州大学 Cross-scale precision motion platform
CN113220166A (en) * 2021-05-31 2021-08-06 北京京东方技术开发有限公司 Touch reproduction substrate, driving method thereof and electronic equipment
CN113220166B (en) * 2021-05-31 2024-05-17 北京京东方技术开发有限公司 Touch reproduction substrate, driving method thereof and electronic equipment

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