CN113131786A - Rotary piezoelectric motor - Google Patents
Rotary piezoelectric motor Download PDFInfo
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- CN113131786A CN113131786A CN202110377238.6A CN202110377238A CN113131786A CN 113131786 A CN113131786 A CN 113131786A CN 202110377238 A CN202110377238 A CN 202110377238A CN 113131786 A CN113131786 A CN 113131786A
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- 230000007246 mechanism Effects 0.000 claims abstract description 33
- 230000009471 action Effects 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910001018 Cast iron Inorganic materials 0.000 claims description 3
- 229910000639 Spring steel Inorganic materials 0.000 claims description 3
- 229910000746 Structural steel Inorganic materials 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000007248 cellular mechanism Effects 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 2
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 230000003068 static effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 241000256247 Spodoptera exigua Species 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
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- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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Abstract
The invention relates to a rotary piezoelectric motor, and belongs to the technical field of precision driving and positioning. Comprises a base, a stator mechanism and a rotor mechanism. The base is an L-shaped base, and the vertical plate of the base is a square frame; the stator mechanism comprises a cross-shaped frame, two pairs of rotating piezoelectric sheets and two pairs of clamping piezoelectric sheets, wherein the two pairs of rotating piezoelectric sheets are arranged on a pair of vertical arms to form a driving unit; the two pairs of tension-clamping piezoelectric pieces are arranged on the pair of horizontal arms to form a clamping unit; the stator mechanism is fixedly arranged in the square frame of the base; the rotor mechanism comprises an output shaft and a supporting slide block; the output shaft passes through the upper portion of locating the support slider through the bearing, and the lower part of support slider is located on the base through the cooperation of T type groove. The invention controls the driving and clamping actions of the stator by utilizing the sine signal, realizes that the contact of the stator and the output shaft is abrupt change, the stator and the rotor are driven by static friction force, sliding friction force does not exist, the stator and the rotor are not abraded, and the service life of the motor is prolonged.
Description
Technical Field
The invention belongs to the technical field of precision driving and positioning, and particularly relates to a rotary piezoelectric motor.
Background
The piezoelectric motor, also called an ultrasonic motor, utilizes mechanical vibration of a vibrator by an inverse piezoelectric effect. The motion and torque of the motor are obtained by friction between the vibrator and the slider (rotor). Until now, they have been widely used in robots, high precision instruments, and researchers prefer piezoelectric motors because they have superior advantages over electromagnetic motors, including compact and simple structure, no coil, rapid response, minimal weight and power consumption, self-locking in a power-off state, no electromagnetic interference, and the like.
Piezoelectric motors can be divided into ultrasonic motors and quasi-static motors. The ultrasonic motor drives the rotor to move by means of the friction force between the stator and the rotor, works in a resonance state, and is high in frequency and high in speed. Because the stator is driven by single harmonic, the process of driving the rotor by the stator is gradual, sliding friction force exists between the stator and the rotor, the abrasion is serious, and the service life is short. In 2016, Yang et al created a longitudinally curved compound drive motor with an idle speed of 342 rpm and a frequency of 57.47 kHz. Nevertheless, the maximum torque is only 6.26N mm, high frequency brings high speed, but due to the driving principle of the friction coupling, the efficiency and the service life of the motor are limited. Quasi-static motors, such as inchworm motors, have relatively low frequencies. The inchworm motor realizes unidirectional motion through the matching of the clamping unit and the driving vibrator. Theoretically, the inchworm motor has no sliding friction and friction wear in the running process, high efficiency and long service life. Meanwhile, the piezoelectric motor of the type needs two tank position units and one driving unit to synchronously and alternately act, is difficult to control, and needs a complex circuit to realize effective control.
Disclosure of Invention
The invention provides a rotary piezoelectric motor, aiming at solving the defects of serious friction and abrasion of an ultrasonic motor and low frequency and speed of a quasi-static motor.
A rotary piezoelectric motor includes a base 4, a stator mechanism 3, and a mover mechanism.
The base 4 is an L-shaped base; an inverted T-shaped groove 41 is formed in a horizontal bottom plate of the base 4, and a vertical plate of the base 4 is a square frame;
the stator mechanism 3 comprises a cross-shaped frame 31, two pairs of rotating piezoelectric sheets 34 and two pairs of tension-clamping piezoelectric sheets 35; a blind hole is formed in the middle of the cross-shaped frame, and the blind hole is a circular truncated cone hole 32; two pairs of rotary piezoelectric sheets 34 are respectively fixed on two side surfaces of a pair of vertical arms 38 of the cross-shaped frame to form a driving unit; the two pairs of clamping and pulling piezoelectric pieces 35 are respectively fixed on two side surfaces of a pair of horizontal arms 33 of the cross-shaped frame to form clamping units; the cross-shaped frame 31 is fixedly connected and fixed in the square frame of the base 4 through the cantilever ends of the pair of horizontal arms 33 and the inner wall of the square frame of the base 4, and the cantilever ends of the pair of vertical arms 38 are not in contact with the inner wall of the square frame of the base 4;
the rotor mechanism comprises an output shaft 1 and a supporting slide block 2; the output shaft 1 penetrates through the upper part of the support sliding block 2 through a bearing, one end of the output shaft 1 is a circular truncated cone tip 11, and the circular truncated cone tip 11 of the output shaft 1 is positioned in a circular truncated cone hole 32 of the cross-shaped frame; the lower part of the supporting slide block 2 is matched with the inverted T-shaped groove 41 and arranged on the base 4;
a pre-tightening mechanism is arranged between the vertical plate of the base 4 and the supporting slide block 2 of the rotor mechanism;
when the piezoelectric vibrator works, sine signals are input into the two pairs of rotary piezoelectric patches 34, and the elastic vibrators of the pair of vertical arms 38 drive the stator mechanism 3 to rotate forwards or backwards alternately in one period; square wave signals are input into the two pairs of clamping piezoelectric sheets 35, the elastic vibrators of the pair of horizontal arms 33 realize that the stator mechanism 3 moves back and forth in a direction vertical to a rotating surface in one period, the orifice of the circular table hole 32 in the stator mechanism 3 is in contact with the circular table tip 11 of the output shaft 1, and the clamping process is realized; simultaneously, sinusoidal signals or square wave signals with equal frequency are respectively input to the two pairs of rotating piezoelectric sheets 34 and the two pairs of clamping piezoelectric sheets 35, so that the rotation driving action and the clamping action are synchronously performed, and the continuous rotation of the motor is realized.
The technical scheme for further limiting is as follows:
the cantilever ends of a pair of horizontal arms of the cross-shaped frame 31 are fixedly connected with the inner walls of the frames at two sides of the square frame of the base 4 through fixing blocks 37 and bolts respectively; a flexible hinge 36 is provided between the cantilevered end of the horizontal arm and a fixed block 37.
The pre-tightening mechanism comprises a screw 7, a nut 6 and a spring 5, and the spring 5 is sleeved on the screw 7; the screw 7 penetrates through a through hole 43 at the lower part of the base 4 and a through hole 21 at the lower part of the supporting slide block 2, and the spring 5 is sleeved on the extending end of the screw 7 at the inner side of the nut 6; the adjusting nut 6 is used for adjusting the pretightening force, and the contact or non-contact between the circular truncated cone apex 11 of the output shaft 1 and the inner wall of the circular truncated cone notch 32 of the stator 3 during the adjusting operation is realized.
A pair of elliptical holes 42 are respectively formed in horizontal bottom plates on two sides of the inverted T-shaped groove 41 of the base 4, and positioning threaded holes 22 are respectively formed in two sides of the lower portion of the supporting slide block 2 corresponding to the pair of elliptical holes 42; the supporting sliding block 2 is fixed on the base 4 through the threaded connection and the matching of the bolt and the positioning threaded hole 22, and the position of the supporting sliding block 2 on the base 4 is adjusted through the pair of elliptical holes 42.
The material of the rotary piezoelectric plate 34 and the material of the clamping piezoelectric plate 35 are both PZT-4 type piezoelectric ceramic plates.
The base 4, the fixed block 37 and the supporting slide block 2 are made of cast iron.
The flexible hinge 36 is made of spring steel.
The cross-shaped frame 31 and the output shaft 1 are made of carbon structural steel.
The beneficial technical effects of the invention are embodied in the following aspects:
1. the invention controls the driving and clamping actions of the stator by utilizing the sine signal, realizes that the contact of the stator and the output shaft is abrupt change, the stator and the rotor are driven by static friction force, sliding friction force does not exist, the stator and the rotor are not abraded, and the service life of the motor is prolonged.
2. The working state of the invention is a resonance state, when two electric signals work cooperatively, the output shaft realizes unidirectional rotation, and the rotation direction of the output shaft can also realize reversal by changing the initial phase of a sinusoidal signal. When the operating frequency of the rotary piezoelectric motor is 652Hz and the driving voltage is 180V, the no-load rotation speed and the maximum output torque of the rotary piezoelectric motor are 15.6r/min and 83.6 N.mm.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a rear view of fig. 1.
Fig. 3 is a schematic view of a stator structure.
Fig. 4 is a schematic view of a mover structure.
Fig. 5 is a schematic view of the contact position between the stator and the output shaft.
Fig. 6 is a schematic view of a base structure.
Fig. 7 is a schematic diagram of the contact and non-contact state of the orifice of the truncated cone hole on the stator mechanism and the truncated cone apex of the output shaft.
Fig. 8 is a diagram of an input signal of a rotationally driven piezoelectric patch.
Fig. 9 is a schematic diagram of the rotation operation of the stator.
Fig. 10 is a diagram of clamp driving piezoelectric plate input signals.
Fig. 11 is a schematic diagram of the stator clamping operation.
Sequence numbers in the upper figure: the device comprises an output shaft 1, a supporting slide block 2, a stator mechanism 3, a base 4, a spring 5, a nut 6, a screw 7, a through hole 21, a positioning threaded hole 22, a cross-shaped frame 31, a blind hole 32, a horizontal arm 33, a rotation driving piezoelectric plate 34, a clamping driving piezoelectric plate 35, a flexible hinge 36, a fixed block 37, a vertical arm 38, an output shaft circular truncated cone tip 11, an inverted T-shaped groove 41, an elliptical hole 42, a threaded hole 44 and a through hole 45.
Detailed Description
The invention will be further described by way of example with reference to the accompanying drawings.
Referring to fig. 1, a rotary piezoelectric motor includes a base 4, a stator mechanism 3, and a mover mechanism.
Referring to fig. 6, the base 4 is an L-shaped base; an inverted T-shaped groove 41 is formed in the horizontal bottom plate of the base 4, and the vertical plate of the base 4 is a square frame. A pair of elliptical holes 42 are respectively formed in the horizontal bottom plates on the two sides of the inverted T-shaped groove 41; referring to fig. 4, two sides of the lower portion of the support slider 2 corresponding to the pair of elliptical holes 42 are respectively provided with a positioning threaded hole 22; the supporting slide block 2 is fixed on the base 4 through the threaded connection and matching of the bolt and the positioning threaded hole 22, and a pair of elliptical holes 42 realize the position adjustment of the supporting slide block 2 on the base 4, as shown in fig. 1.
Referring to fig. 3, the stator mechanism 3 includes a cross frame 31, two pairs of rotating piezoelectric plates 34, and two pairs of clamping piezoelectric plates 35; a blind hole is formed in the middle of the cross-shaped frame, and the blind hole is a circular platform hole 32 with a small inside and a large outside; two pairs of rotary piezoelectric sheets 34 are respectively fixed on two side surfaces of a pair of vertical arms 38 of the cross-shaped frame to form a driving unit; two pairs of clamping and pulling piezoelectric pieces 35 are respectively fixed on two side surfaces of a pair of horizontal arms 33 of the cross-shaped frame to form clamping units. The cantilever ends of a pair of horizontal arms 33 of the cross-shaped frame 31 are fixedly connected with the inner walls of two side frames of the square frame of the base 4 through fixing blocks 37 and bolts respectively; a flexible hinge 36 is provided between the cantilevered end of the horizontal arm 33 and a fixed block 37. The cantilevered ends of the pair of vertical arms 38 are not in contact with the inner wall of the square frame of the base 4.
Referring to fig. 4, the mover mechanism includes an output shaft 1 and a support slider 2; the output shaft 1 penetrates through the upper part of the support sliding block 2 through a bearing, one end of the output shaft 1 is a circular truncated cone tip 11, and the circular truncated cone tip 11 of the output shaft 1 is positioned in a circular truncated cone hole 32 of the cross-shaped frame; the lower part of the supporting slide block 2 is matched with the inverted T-shaped groove 41 and arranged on the base 4;
referring to fig. 1, a pre-tightening mechanism is arranged between the vertical plate of the base 4 and the support slider 2 of the mover mechanism. The pre-tightening mechanism comprises a screw 7, a nut 6 and a spring 5. The screw 7 passes through the through hole 43 at the lower part of the base 4 and the through hole 21 at the lower part of the supporting slide block 2, and the spring 5 is sleeved on the extending end of the screw 7 at the inner side of the nut 6; the adjusting nut 6 is used for adjusting the pretightening force, so that the contact or non-contact between the circular truncated cone apex 11 of the output shaft 1 and the inner wall of the circular truncated cone hole 32 of the stator 3 during the adjusting operation is realized, when the circular truncated cone apex 11 is in contact with the inner wall of the circular truncated cone hole 32, see a in fig. 7, and when the circular truncated cone apex 11 is in non-contact with the inner wall of the circular truncated cone hole 32, see b in fig. 7.
The material of the rotary piezoelectric plate 34 and the material of the clamping piezoelectric plate 35 are both PZT-4 type piezoelectric ceramic plates. The base 4, the fixed block 37 and the supporting slide block 2 are made of cast iron. The material of the flexible hinge 36 is spring steel. The cross frame 31 and the output shaft 1 are made of carbon structural steel.
The working principle of the invention is explained in detail as follows:
referring to fig. 8, a sinusoidal signal is input to the rotation driving piezoelectric plate 34.
Referring to fig. 9, a voltage signal is absent as shown in fig. 9 a; from time t0 to time t1, vertical arm 38 swings counterclockwise through a small angle, see b in fig. 9, cross frame 31 rotates clockwise through an angle; from time t1 to time t2, vertical arm 38 returns to the initial position, see c in fig. 9, and cross frame 31 returns to the initial position; from time t2 to time t3, vertical arm 38 swings clockwise through a small angle, see d in fig. 9, cross frame 31 rotates counterclockwise through an angle; from time t3 to time t4, vertical arm 38 returns to the initial position, shown as e in fig. 9, and cross frame 31 returns to the initial position.
Referring to fig. 10, a sinusoidal signal is input to the clamp driving piezoelectric sheet 35.
Referring to fig. 11, the state of the cross-shaped frame 31 in the absence of a signal is shown as f in fig. 11; from time t0 to time t1, the horizontal arm 33 swings in a direction approaching the output shaft 1, see g in fig. 11, while the cross-shaped frame 31 approaches the output shaft 1; from time t1 to time t2, the horizontal arm 33 returns to the initial position, see h in fig. 11, while the cross frame 31 moves away from the output shaft 1; when the time is from t2 to t3, the horizontal arm 33 swings away from the output shaft 1, see i in fig. 11, while the cross-shaped frame 31 moves away from the output shaft 1 again; from time t3 to time t4, the horizontal arm 33 swings in a direction approaching the output shaft 1, see j in fig. 11, while the cross-shaped frame 31 approaches the output shaft 1. One cycle is complete.
In a period, the vertical arm 38 rotates anticlockwise, the cross-shaped frame 31 rotates clockwise, an input signal of the clamping driving piezoelectric plate 35 enables the cross-shaped frame 31 to approach the output shaft 1, and the circular truncated cone notch 32 on the stator 3 is contacted with the circular truncated cone apex 11 of the output shaft 1, so that the output shaft 1 is driven to rotate clockwise; when the vertical arm 38 vibrates reversely, the cross frame 31 is moved away from the output shaft 1 by clamping the input signal of the driving piezoelectric plate 35; when the vertical arm 38 continues to rotate anticlockwise, the cross-shaped frame 31 continues to approach the output shaft 1, so that the circular truncated cone notch 32 on the stator 3 is in contact with the circular truncated cone apex 11 of the output shaft 1, and the piezoelectric motor can continuously rotate clockwise in a reciprocating mode. The phase angle of the driving and clamping voltage signals is reversed, and the piezoelectric motor can rotate reversely. Different rotating speeds and torques can be realized by adjusting the phase angle and the duty ratio of the driving and clamping voltage signals.
Claims (8)
1. The utility model provides a rotatory piezoelectric motor, includes base (4), stator mechanism (3) and active cell mechanism, its characterized in that:
the base (4) is an L-shaped base; an inverted T-shaped groove (41) is formed in a horizontal bottom plate of the base (4), and a vertical plate of the base (4) is a square frame;
the stator mechanism (3) comprises a cross-shaped frame (31), two pairs of rotating piezoelectric sheets (34) and two pairs of clamping piezoelectric sheets (35); the middle part of the cross-shaped frame is provided with a blind hole which is a circular truncated cone hole (32); two pairs of rotary piezoelectric sheets (34) are respectively fixed on two side surfaces of a pair of vertical arms (38) of the cross-shaped frame to form a driving unit; two pairs of clamping and pulling piezoelectric pieces (35) are respectively fixed on two side surfaces of a pair of horizontal arms (33) of the cross-shaped frame to form clamping units; the cross-shaped frame (31) is fixedly connected and fixed in the square frame of the base (4) through the cantilever ends of the pair of horizontal arms (33) and the inner wall of the square frame of the base (4), and the cantilever ends of the pair of vertical arms (38) are not in contact with the inner wall of the square frame of the base (4);
the rotor mechanism comprises an output shaft (1) and a supporting slide block (2); the output shaft (1) penetrates through the upper part of the support sliding block (2) through a bearing, one end of the output shaft (1) is a circular truncated cone tip (11), and the circular truncated cone tip (11) of the output shaft (1) is positioned in a circular truncated cone hole (32) of the cross-shaped frame; the lower part of the supporting slide block (2) is matched with the inverted T-shaped groove (41) and arranged on the base (4);
a pre-tightening mechanism is arranged between the vertical plate of the base (4) and the supporting slide block (2) of the rotor mechanism;
when the piezoelectric vibrator works, sine signals are input into the two pairs of rotary piezoelectric sheets (34), and the elastic vibrators of the pair of vertical arms (38) drive the stator mechanism (3) to rotate forwards or backwards alternately in one period; square wave signals are input into the two pairs of clamping piezoelectric sheets (35), the elastic vibrators of the pair of horizontal arms (33) realize that the stator mechanism (3) moves back and forth in a direction vertical to the rotating surface in one period, the orifice of the circular table hole (32) in the stator mechanism (3) is contacted with the circular table top (11) of the output shaft (1), and the clamping process is realized; simultaneously, sinusoidal signals or square wave signals with equal frequency are respectively input to the two pairs of rotating piezoelectric sheets (34) and the two pairs of clamping piezoelectric sheets (35), so that the rotation driving action and the clamping action are synchronously carried out, and the continuous rotation of the motor is realized.
2. A rotary piezoelectric motor according to claim 1, wherein: cantilever ends of a pair of horizontal arms of the cross-shaped frame (31) are fixedly connected with the inner walls of the frames at two sides of the square frame of the base (4) through fixing blocks (37) and bolts respectively; and a flexible hinge (36) is arranged between the cantilever end of the horizontal arm and the fixed block (37).
3. A rotary piezoelectric motor according to claim 1, wherein: the pre-tightening mechanism comprises a screw rod (7), a nut (6) and a spring (5), and the spring (5) is sleeved on the screw rod (7); the screw rod (7) penetrates through a through hole (43) in the lower portion of the base (4) and a through hole (21) in the lower portion of the supporting sliding block (2), and the spring (5) is sleeved on the extending end of the screw rod (7) on the inner side of the nut (6); the adjusting nut (6) is used for adjusting the pretightening force, and the contact or non-contact between the circular truncated cone apex (11) of the output shaft (1) and the inner wall of the circular truncated cone notch (32) of the stator (3) during adjusting is realized.
4. A rotary piezoelectric motor according to claim 1, wherein: a pair of elliptical holes (42) are respectively formed in horizontal bottom plates on two sides of the inverted T-shaped groove (41) of the base (4), and positioning threaded holes (22) are respectively formed in two sides of the lower portion of the supporting slide block (2) corresponding to the pair of elliptical holes (42); the supporting sliding block (2) is fixed on the base (4) through the threaded connection and the matching of a bolt and the positioning threaded hole (22), and the position of the supporting sliding block (2) on the base (4) is adjusted through the pair of elliptical holes (42).
5. A rotary piezoelectric motor according to claim 1, wherein: the material of the rotary piezoelectric sheet (34) and the material of the clamping piezoelectric sheet (35) are both PZT-4 type piezoelectric ceramic sheets.
6. A rotary piezoelectric motor according to claim 1, wherein: the base (4), the fixed block (37) and the supporting sliding block (2) are all made of cast iron.
7. A rotary piezoelectric motor according to claim 1, wherein: the flexible hinge (36) is made of spring steel.
8. A rotary piezoelectric motor according to claim 1, wherein: the cross-shaped frame (31) and the output shaft (1) are made of carbon structural steel.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110377238.6A CN113131786B (en) | 2021-04-08 | 2021-04-08 | Rotary piezoelectric motor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110377238.6A CN113131786B (en) | 2021-04-08 | 2021-04-08 | Rotary piezoelectric motor |
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| CN113131786A true CN113131786A (en) | 2021-07-16 |
| CN113131786B CN113131786B (en) | 2023-02-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114785186A (en) * | 2022-05-11 | 2022-07-22 | 合肥工业大学 | Linear piezoelectric motor |
| CN115224977A (en) * | 2022-03-04 | 2022-10-21 | 合肥工业大学 | Resonant type rotary piezoelectric motor |
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| EP3691110A1 (en) * | 2019-02-04 | 2020-08-05 | Cedrat Technologies | Mechanism for nanometric movement with screw |
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| WO2006000118A1 (en) * | 2004-06-24 | 2006-01-05 | Miniswys Sa | Drive unit |
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| CN114785186B (en) * | 2022-05-11 | 2024-03-15 | 合肥工业大学 | Linear piezoelectric motor |
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| CN113131786B (en) | 2023-02-24 |
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