CN110086374A - A kind of Inchworm type precision rotation microdrive based on compliant mechanism - Google Patents
A kind of Inchworm type precision rotation microdrive based on compliant mechanism Download PDFInfo
- Publication number
- CN110086374A CN110086374A CN201910376167.0A CN201910376167A CN110086374A CN 110086374 A CN110086374 A CN 110086374A CN 201910376167 A CN201910376167 A CN 201910376167A CN 110086374 A CN110086374 A CN 110086374A
- Authority
- CN
- China
- Prior art keywords
- displacement
- flexible hinge
- clamping
- driving
- mover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 136
- 241000256247 Spodoptera exigua Species 0.000 title claims abstract description 35
- 238000006073 displacement reaction Methods 0.000 claims description 104
- 238000010276 construction Methods 0.000 claims description 50
- 239000000919 ceramic Substances 0.000 claims description 26
- 230000003321 amplification Effects 0.000 claims description 18
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 16
- 210000000080 chela (arthropods) Anatomy 0.000 claims description 8
- 239000011664 nicotinic acid Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- MROJXXOCABQVEF-UHFFFAOYSA-N Actarit Chemical compound CC(=O)NC1=CC=C(CC(O)=O)C=C1 MROJXXOCABQVEF-UHFFFAOYSA-N 0.000 claims 8
- 235000008331 Pinus X rigitaeda Nutrition 0.000 claims 1
- 235000011613 Pinus brutia Nutrition 0.000 claims 1
- 241000018646 Pinus brutia Species 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 10
- 238000013461 design Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 230000008450 motivation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007514 turning Methods 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009763 wire-cut EDM Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
- H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of Inchworm type precision rotation microdrive based on compliant mechanism, including 2 driving mechanisms, 2 clamping institutions, mover and bracket；2 driving mechanism structures are identical, respectively the first driving mechanism and the second driving mechanism；2 clamping institution structures are identical, respectively the first clamping institution and the second clamping institution；2 driving mechanisms are located at two sides, and 2 clamping institutions are located between 2 driving mechanisms；The mover is located on bracket, is placed in the symmetrical centre of the rotation microdrive, is cooperated by delivery outlet and each mechanism；The clamping institution can clamp or discharge mover；When clamping, mover follows clamping institution to rotate together；When release, mover free movement.Microdrive provided by the present invention have many advantages, such as stroke big, high resolution, output loading it is big, can bidirectional-movement.
Description
Technical field
The invention belongs to accurate microoperation technical fields, and in particular to a kind of Inchworm type precision rotation based on compliant mechanism
Microdrive, be mainly used in Ultra-precision Turning, precision engineering, MEMS (MEMS), microelectronic engineering, bioengineering,
The high frontiers of science and technology such as semiconductors manufacture.
Background technique
With micromachined, Ultra-precision Turning and measurement, precision optics engineering, bioengineering, modern medicine, semiconductor
The rapid development in the fields such as manufacture, aerospace, traditional driver are limited by its working principle and mechanical structure, can not be expired
The requirement of sufficient ultraprecise and high accuracy positioning, there is an urgent need to the ultraprecise straight line microdrive of nanoscale, sub-nanometer precision is real
Its existing function.
Inchworm type linear actuator is the characteristics of motion of natural imitation circle biology looper, to be able to achieve micro-displacement cumulative to obtain
The driver of big stroke.But that there is also the speeds of service is low, output loading is small, motion stabilization for Inchworm type linear actuator at present
The problems such as property is poor.
Summary of the invention
For the above-mentioned problems in the prior art, the present invention provides a kind of, and the Inchworm type based on compliant mechanism is accurate
Rotate microdrive, the driver have many advantages, such as stroke big, high resolution, output loading greatly, can bidirectional-movement.
For this purpose, the invention adopts the following technical scheme:
A kind of Inchworm type precision rotation microdrive based on compliant mechanism, including 2 driving mechanisms, 2 clamping institutions,
Mover and bracket；2 driving mechanism structures are identical, respectively the first driving mechanism and the second driving mechanism；2 pincers
Position mechanism structure is identical, respectively the first clamping institution and the second clamping institution；2 driving mechanisms are located at two sides, 2 pincers
Position mechanism is located between 2 driving mechanisms；The mover is located on bracket, is placed in the symmetrical centre of the rotation microdrive,
It is cooperated by delivery outlet and each mechanism；The clamping institution can clamp or discharge mover；When clamping, mover follows pincers
Position mechanism rotates together；When release, mover free movement.
Preferably, the clamping institution is mainly fixed by 2 displacement equations lever constructions, clamping institutions symmetrically arranged on the left and the right
Son and clamp output end composition；2 displacement equations lever constructions are that the first displacement equations lever construction and second displacement are put respectively
Big lever structure；The first displacement equations lever construction is mainly by clamp input terminal, the first straight round flexible hinge, second straight
Directly round flexible hinge and the first rod piece collectively constitute for round flexible hinge, third, wherein the second straight round flexible hinge is the
The fulcrum of one displacement equations structure, third directly round flexible hinge be the first displacement equations structure output end；The second
Amplification lever construction is moved mainly by the 4th straight round flexible hinge, the 5th straight round flexible hinge, perpendicular type flexible hinge and the
Three rod pieces composition, wherein the 4th straight round flexible hinge is the input terminal of second displacement enlarged structure, the 5th straight round flexible hinge
Chain is the output end of second displacement enlarged structure, and perpendicular type flexible hinge is the fulcrum of second displacement enlarged structure；2 displacements are put
Big structure amplifies lever construction using the form being connected in series, the output end and second displacement of the first displacement equations lever construction
Input terminal is connected in series by the second rod piece；The output end of the second displacement enlarged structure is connected directly with clamp output end
It connects.
Preferably, the top of the clamp output end is connected to by the first straight beam flexible hinge, the second straight beam flexible hinge
The parallel four sides row guide frame of composition；The clamping institution stator is mainly by 1 bottom surface baffle for placing piezoelectric ceramics, 1
The side board of piezoelectric ceramics, bolt hole, 4 clamping institutions and the driving mechanism of 4 fixed piezoelectric ceramics upper surface baffles are solid
Surely the bolt hole composition connected.
Preferably, the clamping institution further includes clamp movable part, and the height of clamp movable part upper and lower surface compares pincers
The low 2-3mm in surface of position mechanism stator, the lower surface of the bottom surface baffle lower surface and clamping institution stator of placing piezoelectric ceramics are flat
Together, the side board of piezoelectric ceramics and clamping institution stator are contour.
Preferably, the driving mechanism is mainly made of 1 driving branch and 1 pair of driving mechanism stator positioned opposite；
Bolt hole that the driving branch is mainly fixedly connected with clamping institution by 1 rotating ring, 4 driving mechanism rotating rings, 2
A angular displacement amplification lever construction composition positioned opposite；The angular displacement amplification lever construction is mainly by third displacement equations thick stick
Rod structure and displacement transformational structure composition；The third displacement equations lever construction mainly drives end, the 6th directly by driving mechanism
Round flexible hinge, the 4th rod piece and the 7th straight round flexible hinge collectively constitute, and the described 6th straight round flexible hinge is
The fulcrum of third displacement equations lever construction；The displacement converted mechanism is mainly by the 5th rod piece, the 8th straight round flexible hinge
And the 6th rod piece composition being connected directly with rotating ring；The third displacement equations lever construction and displacement transformational structure
Between by the 5th rod piece connect；The driving mechanism stator is mainly consolidated by driving stator end block, driving mechanism stator and bracket
Surely bolt hole, piezoelectric ceramics bottom surface baffle, the 7th rod piece, the 8th rod piece and the driving mechanism centre bore connected collectively constitutes,
The driving stator end block is directly fixedly connected with bracket.
Preferably, it is straight to be greater than the 6th for the distance between the described 6th straight round flexible hinge and the 7th straight round flexible hinge
Round flexible hinge to driving mechanism driving end apart from when, driving mechanism drive end displacement by third displacement equations lever knot
Structure, which amplifies and passes through the 5th rod piece, passes to the 8th straight round flexible hinge, and the 8th straight round flexible hinge passes through the 6th rod piece again
It converts straight line input displacement to the rotary motion of rotating ring, realizes that the straight-line displacement of amplification is converted into the rotation of rotating ring
Displacement.
Preferably, the mover cooperates with bracket, driving mechanism centre bore respectively and is clamped the clamp piece clamping of mechanism
Or it unclamps.
Preferably, the mover is slim cylindrical construction, and both ends are respectively provided with one section of screw thread, for coupling load.
Preferably, the bracket is mainly collectively constituted by 2 vertical place with 1 horizontal positioned thin plate, vertical to place
Thin sheet surface be equipped with 6 vertical rack centers matched for bolts hole, 1 and the mover of fixed drive mechanism stator
Hole, side are equipped with the bolt hole being fixedly connected with horizontal bracket, and bottom surface is equipped with 3 for the bolt hole fixed with other platforms；
The bolt hole that horizontal positioned thin plate is equipped with horizontal bracket positioning end, is fixedly connected with vertical rack is used for two vertical racks
Horizontal location, so that total is in stable state.
Preferably, the microdrive uses driving mechanism driving clamping institution to make crankmotion, clamping institution logical
It crosses clamp piece and clamps mover with the characteristics of motion for the forms of motion Bionic inchworm for driving mover to make crankmotion.
Compared with prior art, the beneficial effects of the present invention are:
(1) microdrive of the invention is had compared with traditional microdrive using flexible hinge transmitting microbit shifting movement
Feature with high accuracy.
(2) microdrive of the invention, clamping institution are put using 2 be arranged symmetrically with the second level displacement of flexible hinge
Big lever structure transmitting clamping force and 1 pair of clamp piece and bilateral with parallel guide frame realize the folder to mover to pincers mode
Tight effect has the characteristics that big clamping force, clamper firm stable, bearing capacity are strong.
(3) microdrive of the invention, driving mechanism switch to rotating ring swing offset using the straight-line displacement of amplification
Lever construction is amplified in angular displacement, has the characteristics that single step output displacement is big, Motion Resolution rate is high.
(4) microdrive of the invention drives clamping institution using driving mechanism, and clamping institution drives mover movement to realize
The Bionic inchworm characteristics of motion, the mover using elongated cylindrical axis as driver, has the characteristics that movement velocity is fast.
(5) microdrive of the invention, the first clamping institution, the first driving mechanism and the second clamping institution, the second driving
Using being symmetrically arranged, mover has the characteristics that up time or inverse time Double-directional rotary for mechanism.
(6) applied widely, microdrive of the invention can be applied to Ultra-precision Turning, precision engineering, MEMS,
The fields such as microelectronic engineering, bioengineering, semiconductors manufacture.
Detailed description of the invention
Fig. 1 is a kind of structure composition of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Schematic diagram.
Fig. 2 is a kind of cross-section structure of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Schematic diagram.
Fig. 3 is clamping institution in a kind of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Structural schematic diagram.
Fig. 4 is clamping institution in a kind of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Axis side structure schematic diagram.
Fig. 5 is driving mechanism in a kind of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Structural schematic diagram.
Fig. 6 is driving mechanism in a kind of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Axis side structure schematic diagram.
Fig. 7 is the knot of mover in a kind of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Structure schematic diagram.
Fig. 8 is the knot of bracket in a kind of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Structure schematic diagram.
Fig. 9 is a kind of design principle of Inchworm type precision rotation microdrive based on compliant mechanism provided by the present invention
Schematic diagram.
Description of symbols: 1, the first driving unit；2, the first clamp units；3, the second driving unit；4, the second clamp
Unit；5, output unit；6, input terminal is clamped；7, the first straight round flexible hinge；8, the second straight round flexible hinge；9, first
Rod piece；10, third directly round flexible hinge；11, the second rod piece；12, the 4th straight round flexible hinge；13, third rod piece；14,
Perpendicular type flexible hinge；15, the 5th straight round flexible hinge；16, the first straight beam flexible hinge；17, the second straight beam flexible hinge；
18, output end (i.e. clamp piece) is clamped；19, second displacement amplifies lever construction；20, the first displacement equations lever construction；21, it presses
Electroceramics upper surface baffle bolt hole；22, piezoelectric ceramics bottom surface baffle；23 piezoelectric ceramics side boards；24, clamping institution and drive
The bolt hole that motivation structure is fixedly connected；25, movable part is clamped；26, clamping institution stator；27, the 6th straight round flexible hinge；
28, the 4th rod piece；29, the 7th straight round flexible hinge；30, the 5th rod piece；31, the 8th straight round flexible hinge；32, the 6th bar
Part；33, the bolt hole that driving mechanism stator is fixedly connected with bracket；34, stator end block is driven；35, piezoelectric ceramics bottom surface baffle；
36, rotating ring；37, the 7th rod piece；38, driving mechanism drives end；39, driving mechanism rotating ring and the fixed company of clamping institution
The bolt hole connect；40, the 8th rod piece；41, driving mechanism centre bore；42, third displacement equations lever construction；43, displacement conversion
Mechanism；44, lever construction is amplified in angular displacement；45, screw thread；46, the bolt hole that vertical rack is fixedly connected with driving mechanism stator；
47, vertical rack centre bore；48, the positioning end of horizontal bracket；49, the bolt hole that vertical rack is fixedly connected with horizontal bracket；
50, the bolt hole that vertical rack and other platforms are fixed；51, the bolt hole that horizontal bracket is fixedly connected with vertical rack；52,
One driving mechanism；53, the first clamping institution；54, the second clamping institution；55, the second driving mechanism；56, mover；57, bracket.
Specific embodiment
With reference to the accompanying drawing and specific embodiment come the present invention will be described in detail, specific embodiment therein and explanation only
For explaining the present invention, but it is not as a limitation of the invention.
As depicted in figs. 1 and 2, the invention discloses a kind of Inchworm type precision rotation microdrive based on compliant mechanism,
Including 2 driving mechanisms, 2 clamping institutions, mover 56 and bracket 57；2 driving mechanism structures are identical, and respectively first
Driving mechanism 52 and the second driving mechanism 55；2 clamping institution structures are identical, respectively the first clamping institution 53 and second
Clamping institution 54；2 driving mechanisms are located at two sides, and 2 clamping institutions are located between 2 driving mechanisms；The mover 56
On bracket 57, it is placed in the symmetrical centre of the rotation microdrive, is cooperated by delivery outlet and each mechanism；It is described
Clamping institution can clamp or discharge mover 56；When clamping, mover 56 follows clamping institution to rotate together；When release, mover 56
Free movement.
Specifically, as shown in Figure 3 and Figure 4, the clamping institution is mainly by 2 displacement equations levers symmetrically arranged on the left and the right
Structure, clamping institution stator 26 and clamp output end 18 form；2 displacement equations lever constructions are the first displacement equations thick stick respectively
Rod structure 20 and second displacement amplify lever construction 19；The first displacement equations lever construction 20 mainly by clamp input terminal 6,
First straight round flexible hinge 7, second straight round flexible hinge 8, third directly 9 common groups of round flexible hinge 10 and the first rod piece
At, wherein the second straight round flexible hinge 8 is the fulcrum of the first displacement equations structure 20, and directly round flexible hinge 10 is third
The output end of first displacement equations structure 20；The second displacement amplification lever construction 19 is mainly by the 4th straight round flexible hinge
12, the 5th straight round flexible hinge 15, perpendicular type flexible hinge 14 and third rod piece 13 form, wherein the 4th straight round flexibility
Hinge 12 is the input terminal of second displacement enlarged structure 19, and the 5th straight round flexible hinge 15 is second displacement enlarged structure 19
Output end, perpendicular type flexible hinge 14 are the fulcrum of second displacement enlarged structure 19；2 displacement equations structures are using series connection
Form, the input terminal of the output end of the first displacement equations lever construction 20 and second displacement amplification lever construction 19 passes through second
Rod piece 11 is connected in series；The output end of the second displacement enlarged structure 19 is connected directly with clamp output end 18.
Specifically, the top of the clamp output end 18 is connected to flexible by the first straight beam flexible hinge 16, the second straight beam
The parallel four sides row guide frame that hinge 17 forms；The clamping institution stator 26 mainly places the bottom surface of piezoelectric ceramics by 1
21,4 clamp machines of bolt hole of 23,4 fixed piezoelectric ceramics upper surface baffles of side board of 22,1 piezoelectric ceramics of baffle
The bolt hole 24 that structure is fixedly connected with driving mechanism forms.
Specifically, the clamping institution further includes clamp movable part 25, clamps the height of 25 upper and lower surface of movable part
It is 2-3mm lower than the surface of clamping institution stator 26, place 22 lower surface of bottom surface baffle and the clamping institution stator 26 of piezoelectric ceramics
Lower surface it is concordant, the side board 23 and clamping institution stator 26 of piezoelectric ceramics are contour.
Specifically, as shown in Figure 5 and Figure 6, the driving mechanism is mainly by 1 driving branch and 1 pair of drive positioned opposite
Motivation structure stator composition；The driving branch is mainly by 1 rotating ring 36,4 driving mechanism rotating rings and clamping institutions
39,2 angular displacement positioned opposite amplification lever constructions 44 of the bolt hole being fixedly connected form；Lever knot is amplified in the angular displacement
Structure 44 is mainly made of third displacement equations lever construction 42 and displacement transformational structure 43；The third displacement equations lever construction
42 mainly by the straight round flexible hinge 27 in driving mechanism driving end the 38, the 6th, the 4th rod piece 28 and the 7th straight round flexible hinge
Chain 29 collectively constitutes, and the described 6th straight round flexible hinge 27 is the fulcrum of third displacement equations lever construction 42；The displacement
Switching mechanism 43 mainly by the 5th rod piece 30, the 8th straight round flexible hinge 31 and be connected directly with rotating ring 36
Six rod pieces 32 composition；Connected between the third displacement equations lever construction 42 and displacement transformational structure 43 by the 5th rod piece 30
It connects；Bolt hole 33 that the driving mechanism stator is mainly fixedly connected with bracket by driving stator end block 34, driving mechanism stator,
Piezoelectric ceramics bottom surface baffle 35, the 7th rod piece 37, the 8th rod piece 40 and driving mechanism centre bore 41 collectively constitute, the driving
Stator end block 34 is directly fixedly connected with bracket 57.
Specifically, the distance between the described 6th straight round flexible hinge 27 and the 7th straight round flexible hinge 29 are greater than the
Six straight round flexible hinges 27 to driving mechanism driving end 38 apart from when, driving mechanism driving end 38 displacement be displaced by third
Amplification lever construction 42 amplifies and passes to the 8th straight round flexible hinge 31, the 8th straight round flexible hinge by the 5th rod piece 30
Chain 31 again converts straight line input displacement to by the 6th rod piece 32 rotary motion of rotating ring 36, realizes the straight line position of amplification
Transfer turns to the swing offset of rotating ring.
Specifically, the mover 56 cooperates with bracket 57, driving mechanism centre bore 41 respectively and is clamped the clamp of mechanism
Piece clamp or release.
Specifically, as shown in fig. 7, the mover 56 is slim cylindrical construction, both ends are respectively provided with one section of screw thread 45, use
It is loaded in connection.
Specifically, as shown in figure 8, the bracket 57 is mainly by 2 vertical placements and 1 common group of horizontal positioned thin plate
At the thin sheet surface placed vertically is equipped with 6 bolts hole 46,1 and mover 56 for fixed drive mechanism stator and matches
Vertical rack centre bore 47, side is equipped with the bolt hole 49 that is fixedly connected with horizontal bracket, bottom surface be equipped with 3 be used for and other
The fixed bolt hole 50 of platform；The spiral shell that horizontal positioned thin plate is equipped with horizontal bracket positioning end 48, is fixedly connected with vertical rack
Keyhole 51 makes total be in stable state for the horizontal location of two vertical racks.
The microdrive makees crankmotion using driving mechanism driving clamping institution, clamping institution passes through clamp piece
Clamp mover with drive mover make crankmotion forms of motion Bionic inchworm the characteristics of motion.
Embodiment
A kind of design principle of the Inchworm type precision rotation microdrive based on compliant mechanism is as shown in figure 9, driving unit
Including the first driving unit 1 and the second driving unit 3, it is connect respectively by bolt with fixed bracket；Clamp units include the first pincers
Bit location 2 and the second clamp units 4, are bolted are connected to the first driving unit 1 and the second driving unit 3 respectively；Output
Unit 5 and clamp units, driving unit and bracket are cooperated using circular hole.
The course of work that above structure imitates inchworm motion rule is as follows:
Fig. 9 (a) indicates that rotation microdrive is in off position；Fig. 9 (b) indicates that the first clamp units 2 are in work
State, the unit clamp output unit 5；Fig. 9 (c) indicates that the first driving unit 1 is in running order, which rotates counterclockwise
Small angle, while the first clamp units 2, the first clamp units 2 being driven to drive output unit 5 to rotate a small angle again
Degree；Fig. 9 (d) indicates that the second clamp units 4 are in running order, should in order to make output unit 5 be in non-rotating stable state
Clamp units clamp output unit 5；Fig. 9 (e) indicates that the first clamp units 2 are in off position, which unclamps defeated
Unit 5 out, the first driving unit 1 are also at off position, which shrinks, and the first clamp units 1 is driven to return to initial bit
It sets；Fig. 9 (f) indicates that the second clamp units 4 are in off position, discharges output unit 5, and microdrive returns to initial position,
Output unit 5 has rotated a small angle at this time, completes a motion cycle.The circulation is repeated, it can be achieved that output
The continuous counterclockwise rotational movement of unit 5.The first clamping institution 53 and the second clamping institution 54, the first driving mechanism are exchanged respectively
52 with the driving of the second driving mechanism 55 sequence, it can be achieved that mover 56 rotates clockwise.
Microdrive design schematic diagram according to Fig. 9, the key of design are that driving mechanism can drive clamping institution
Realize that crankmotion, clamping institution can clamp and unclamp mover.Clamping institution can drive mover to follow when clamping mover
Clamping institution movement；When unclamping mover, mover can be freely rotated clamping institution.
As shown in figure 3, in order to make clamping institution realize that clamp function, clamping institution press from both sides pincers mode using symmetrical bilateral
Tightly with unclamp mover.Since piezoelectric ceramic actuator has the characteristics that driving force is big, piezoelectricity pottery is can be used in clamping institution driving end
The driving of porcelain driver.When Piezoelectric Ceramic clamps input terminal 6, clamping institution clamps mover；It is clamped when piezoelectric ceramics discharges
When input terminal 6, since the elastic recovery of flexible hinge acts on, clamping institution unclamps mover.In order to realize the position of clamp input terminal 6
It moves to be amplified by the first displacement equations lever construction 20 and pass to second displacement by third perpendicular type flexible hinge 10 and put
Big lever structure 19, directly the distance between round flexible hinge 10 must be suitably big with third for the second straight round flexible hinge 8
In the distance between the second perpendicular type flexible hinge 8 and the first perpendicular type flexible hinge 7.In order to guarantee to clamp the position of output end 18
Shifting is further amplified and its can more firmly clamp mover, the 4th straight round flexible hinge 12 and the 5th straight round flexible hinge 15
The distance between appropriate must be greater than the 4th straight the distance between round flexible hinge 12 and perpendicular type flexible hinge 14.In order to
It effectively reduces the offset of displacement equations lever construction, ensure that clamp output end 18 can make the horizontal linear fortune of relative ideal
It is dynamic, clamp the upper design of output end 18 be made of the first straight beam flexible hinge 16, the second straight beam flexible hinge 17 it is parallel
Four side row guide frames.
As shown in figure 4, in order to avoid clamping institution and driving mechanism generate unnecessary interference in fixed-link, clamp
The height of the upper and lower surface of movable part 25 is 2-3mm lower than the surface of clamping institution stator 26, places the bottom surface gear of piezoelectric ceramics
22 lower surface of plate is concordant with the lower surface of clamping institution stator 26, side board 23 and clamping institution stator 26 of piezoelectric ceramics etc.
It is high.
As shown in figure 5, designed driving branch is to realize to move back and forth by the flexible deformation of flexible hinge, driving branch
Chain is connected to stator using the 6th straight round flexible hinge 27, and branch is driven to make reciprocal microbit shifting movement relative to stator.In order to
Realize that the straight-line displacement of amplification is converted into the angular displacement of annulus, the 6th straight round flexible hinge 27 and the 7th straight round flexible hinge
The distance between 29 have to be larger than the distance that the 6th straight round flexible hinge 27 drives end 38 to driving mechanism；Driving mechanism driving
The displacement at end 38 is amplified by third displacement equations lever construction 42 and passes to the 8th straight round flexible hinge by the 5th rod piece 30
Chain 31, the 8th straight round flexible hinge 31 again convert straight line input displacement to by the 6th rod piece 32 rotation of rotating ring 36
Displacement.It is interfered with each other in order to avoid unnecessary between driving mechanism and clamping institution, driving mechanism and bracket, designed drive
The stator lower surface of motivation structure has more 5-10mm than rotating the lower surface of branch, and lever knot is amplified in the upper surface of stator and angular displacement
Structure 44 is contour.As shown in fig. 6, upper following table of the upper and lower surface of the rotating ring 36 in rotation branch than angular displacement enlarger 44
The all low 1-3mm in face, the 6th straight round flexible hinge 27 and angular displacement amplification lever construction 44 are contour.
As shown in fig. 7, mover 56 and other loads connect for convenience, one section of screw thread 45 is respectively designed at its both ends.In order to
Reduce the frictional force during mover 56 and the mutual cooperation of each centre bore, the finished surface required precision of mover 56 is high, and can
Lubricating oil is added in contact zone as needed.
As shown in figure 8, in order to make entire micro- rotating driver be in relatively steady state, design is placed there are two vertical
Bracket and a horizontal positioned bracket, horizontal positioned bracket and the bracket placed vertically be bolted and fixed, and erects
The frame bottom design directly placed has the bolt hole fixed with other platforms.
Fig. 1 show the overall structure of the microdrive.2 driving mechanisms are located at two sides, 52 He of the first driving mechanism
Vertical rack of the stator of second driving mechanism 55 respectively with both sides is bolted and fixed；2 clamping institutions are located at 2 drives
Between motivation structure, the stator of the first clamping institution 53 and the second clamping institution 54 is fixed by bolts respectively in the first driving mechanism
52 and second driving mechanism 55 rotating ring on；Mover 56 is placed in the symmetrical centre of micro- rotating driver, by delivery outlet with
Each mechanism cooperates.Each mechanism working condition is as follows when microdrive imitates inchworm motion rule: 1. the first clamping institution 53
Clamp piece 18 clamp mover 56；2. the angular displacement amplification lever construction 44 of the first driving mechanism 52 drives 36 inverse time of rotating ring
Needle rotation, while rotating ring 36 drives the first clamping institution 53 being firmly connected with it to rotate counterclockwise, by the first clamp machine
Structure 53 drives mover 56 to rotate counterclockwise；3. the second clamping institution 54 clamps mover 56；4. the first clamping institution 53 unclamps mover
56, while the first driving mechanism 52 drives the first clamping institution 53 to return to original position；5. the second clamping institution 54 unclamps mover
56, micro- rotating driver returns to original state, completes a motion cycle.The circulation is repeated, it can be achieved that the continuous inverse time of mover 56
Needle rotation.The first clamping institution 53 and the second clamping institution 54, the first driving mechanism 52 and the second driving mechanism 55 are exchanged respectively
Driving sequence, it can be achieved that mover 56 rotates clockwise.
The microdrive is suitable for being processed using Wire-cut Electrical Discharge Machining technology, using traditional diamond-making technique plus
Work mover.The material of microdrive determines the movenent performance of microdrive, and material requirements is soft and strong.The quality of flexibility determines
Microdrive autokinesis and movement travel；Since microdrive requires high-frequency drive, it is in the course of work in order to prevent
Middle failure, it is necessary to guarantee that the strength degree of material meets the requirements.Soft and strong material is selected, enables it to meet microdrive
Performance requirement, the making material as microdrive such as spring steel, beryllium-bronze may be selected.
The microdrive that precision is high, high resolution sum movement velocity is fast can be preferably realized by embodiment of above.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to restrict the invention, all in essence of the invention
Made any modification, equivalent replacement and improvement etc., should be included in protection scope of the present invention within mind and spirit
Within.
Claims (10)
1. a kind of Inchworm type precision rotation microdrive based on compliant mechanism, including it is 2 driving mechanisms, 2 clamping institutions, dynamic
Sub (56) and bracket (57), it is characterised in that: 2 driving mechanism structures are identical, respectively the first driving mechanism (52) and
Second driving mechanism (55)；2 clamping institution structures are identical, respectively the first clamping institution (53) and the second clamping institution
(54)；2 driving mechanisms are located at two sides, and 2 clamping institutions are located between 2 driving mechanisms；The mover (56) is located at
On bracket (57), it is placed in the symmetrical centre of the rotation microdrive, is cooperated by delivery outlet and each mechanism；The pincers
Position mechanism can clamp or discharge mover (56)；When clamping, mover (56) follows clamping institution to rotate together；When release, mover
(56) free movement.
2. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 1, it is characterised in that:
The clamping institution is mainly defeated by 2 displacement equations lever constructions symmetrically arranged on the left and the right, clamping institution stator (26) and clamp
Outlet (18) composition；2 displacement equations lever constructions are the first displacement equations lever construction (20) and second displacement amplification respectively
Lever construction (19)；The first displacement equations lever construction (20) is mainly by clamp input terminal (6), the first straight round flexible hinge
Chain (7), directly round flexible hinge (10) and the first rod piece (9) collectively constitute the second straight round flexible hinge (8), third, wherein
Second straight round flexible hinge (8) is the fulcrum of the first displacement equations structure (20), and directly round flexible hinge (10) is the to third
The output end of one displacement equations structure (20)；Second displacement amplification lever construction (19) is mainly by the 4th straight round flexible hinge
Chain (12), the 5th straight round flexible hinge (15), perpendicular type flexible hinge (14) and third rod piece (13) composition, wherein the 4th
Straight round flexible hinge (12) is the input terminal of second displacement enlarged structure (19), and the 5th straight round flexible hinge (15) is second
The output end of displacement equations structure (19), perpendicular type flexible hinge (14) are the fulcrum of second displacement enlarged structure (19)；2 positions
Enlarged structure is moved using the form being connected in series, the output end and second displacement of the first displacement equations lever construction (20) amplify thick stick
The input terminal of rod structure (19) is connected in series by the second rod piece (11)；The output end of the second displacement enlarged structure (19) with
Clamp output end (18) is connected directly.
3. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 2, it is characterised in that:
The top of clamp output end (18) is connected to be made of the first straight beam flexible hinge (16), the second straight beam flexible hinge (17)
Parallel four sides row guide frame；The clamping institution stator (26) mainly by 1 place piezoelectric ceramics bottom surface baffle (22),
The side board (23) of 1 piezoelectric ceramics, the bolt hole (21) of 4 fixed piezoelectric ceramics upper surface baffles, 4 clamping institutions with
Bolt hole (24) composition that driving mechanism is fixedly connected.
4. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 3, it is characterised in that:
The clamping institution further includes clamp movable part (25), and the height for clamping movable part (25) upper and lower surface is more fixed than clamping institution
The low 2-3mm in surface of sub (26), places bottom surface baffle (22) lower surface of piezoelectric ceramics and the following table of clamping institution stator (26)
Face is concordant, and the side board (23) and clamping institution stator (26) of piezoelectric ceramics are contour.
5. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 1, it is characterised in that:
The driving mechanism is mainly made of 1 driving branch and 1 pair of driving mechanism stator positioned opposite；The driving branch is main
Bolt hole (39), the 2 opposite cloth being fixedly connected by 1 rotating ring (36), 4 driving mechanism rotating rings with clamping institution
Angular displacement amplification lever construction (44) composition set；Angular displacement amplification lever construction (44) is mainly by third displacement equations thick stick
Rod structure (42) and displacement transformational structure (43) composition；The third displacement equations lever construction (42) is mainly driven by driving mechanism
Moved end (38), the 6th straight round flexible hinge (27), the 4th rod piece (28) and the 7th straight round common group of flexible hinge (29)
At the described 6th straight round flexible hinge (27) is the fulcrum of third displacement equations lever construction (42)；The displacement interpreter
Structure (43) is mainly connected directly by the 5th rod piece (30), the 8th straight round flexible hinge (31) and with rotating ring (36)
6th rod piece (32) composition；Pass through the 5th bar between the third displacement equations lever construction (42) and displacement transformational structure (43)
Part (30) connection；The driving mechanism stator is mainly fixedly connected by driving stator end block (34), driving mechanism stator with bracket
Bolt hole (33), piezoelectric ceramics bottom surface baffle (35), the 7th rod piece (37), the 8th rod piece (40) and driving mechanism centre bore
(41) it collectively constitutes, the driving stator end block (34) is directly fixedly connected with bracket (57).
6. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 5, it is characterised in that:
It is straight round soft that the distance between described 6th straight round flexible hinge (27) and the 7th straight round flexible hinge (29) are greater than the 6th
Property hinge (27) to driving mechanism driving end (38) apart from when, driving mechanism drive end (38) displacement by third displacement equations
Lever construction (42) amplifies and passes to the 8th straight round flexible hinge (31), the 8th straight round flexibility by the 5th rod piece (30)
Hinge (31) again converts straight line input displacement to by the 6th rod piece (32) rotary motion of rotating ring (36), realizes amplification
Straight-line displacement be converted into the swing offset of rotating ring.
7. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 5, it is characterised in that:
The mover (56) cooperates with bracket (57), driving mechanism centre bore (41) respectively and is clamped the clamping of clamp piece or the pine of mechanism
It opens.
8. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 1, it is characterised in that:
The mover (56) is slim cylindrical construction, and both ends are respectively provided with one section of screw thread (45), for coupling load.
9. a kind of Inchworm type precision rotation microdrive based on compliant mechanism according to claim 1, it is characterised in that:
The bracket (57) is mainly collectively constituted by 2 vertical place with 1 horizontal positioned thin plate, and the thin sheet surface placed vertically is set
There are 6 vertical rack centre bores matched for bolts hole (46), 1 and the mover (56) of fixed drive mechanism stator
(47), side is equipped with the bolt hole (49) being fixedly connected with horizontal bracket, and bottom surface is equipped with 3 for the spiral shell fixed with other platforms
Keyhole (50)；The bolt hole (51) that horizontal positioned thin plate is equipped with horizontal bracket positioning end (48), is fixedly connected with vertical rack,
For the horizontal location of two vertical racks, total is made to be in stable state.
10. a kind of Inchworm type precision rotation micro-move device based on compliant mechanism according to any one of claim 1 to 9
Device, it is characterised in that: clamping institution makees crankmotion to the microdrive, clamping institution passes through using driving mechanism driving
It clamps piece and clamps mover with the characteristics of motion for the forms of motion Bionic inchworm for driving mover to make crankmotion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910376167.0A CN110086374B (en) | 2019-05-07 | 2019-05-07 | Inchworm type precise rotation micro-driver based on compliant mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910376167.0A CN110086374B (en) | 2019-05-07 | 2019-05-07 | Inchworm type precise rotation micro-driver based on compliant mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110086374A true CN110086374A (en) | 2019-08-02 |
| CN110086374B CN110086374B (en) | 2020-04-03 |
Family
ID=67419089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910376167.0A Active CN110086374B (en) | 2019-05-07 | 2019-05-07 | Inchworm type precise rotation micro-driver based on compliant mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110086374B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113131786A (en) * | 2021-04-08 | 2021-07-16 | 合肥工业大学 | Rotary piezoelectric motor |
| CN115059724A (en) * | 2022-06-15 | 2022-09-16 | 湖南大学 | Active grinding plate damper of disc type force amplification mechanism |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103762887A (en) * | 2014-02-14 | 2014-04-30 | 哈尔滨工业大学 | Cylindrical driven clamping type piezoelectric wriggle linear motor |
| CN103973159A (en) * | 2014-04-26 | 2014-08-06 | 合肥工业大学 | Miniature looper type piezoelectric driving rotary joint mechanism |
| CN204316376U (en) * | 2014-12-09 | 2015-05-06 | 燕山大学 | Rotate looper piezoelectric micromotion motor |
| CN107733280A (en) * | 2017-11-15 | 2018-02-23 | 宁波大学 | A kind of structure-integrated formula piezoelectricity looper linear electric motors |
-
2019
- 2019-05-07 CN CN201910376167.0A patent/CN110086374B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103762887A (en) * | 2014-02-14 | 2014-04-30 | 哈尔滨工业大学 | Cylindrical driven clamping type piezoelectric wriggle linear motor |
| CN103973159A (en) * | 2014-04-26 | 2014-08-06 | 合肥工业大学 | Miniature looper type piezoelectric driving rotary joint mechanism |
| CN204316376U (en) * | 2014-12-09 | 2015-05-06 | 燕山大学 | Rotate looper piezoelectric micromotion motor |
| CN107733280A (en) * | 2017-11-15 | 2018-02-23 | 宁波大学 | A kind of structure-integrated formula piezoelectricity looper linear electric motors |
Non-Patent Citations (2)
| Title |
|---|
| 胡俊峰等: "尺蠖式直线微驱动器的设计", 《光学精密工程》 * |
| 邢继春等: "旋转尺蠖压电电机驱动机构自由振动分析", 《中国机械工程》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113131786A (en) * | 2021-04-08 | 2021-07-16 | 合肥工业大学 | Rotary piezoelectric motor |
| CN113131786B (en) * | 2021-04-08 | 2023-02-24 | 合肥工业大学 | Rotary piezoelectric motor |
| CN115059724A (en) * | 2022-06-15 | 2022-09-16 | 湖南大学 | Active grinding plate damper of disc type force amplification mechanism |
| CN115059724B (en) * | 2022-06-15 | 2024-05-24 | 湖南大学 | Driving grinding disc damper of disc type force amplification mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110086374B (en) | 2020-04-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103104793B (en) | Integrated type six degrees of freedom precision positioning platform | |
| CN110086374A (en) | A kind of Inchworm type precision rotation microdrive based on compliant mechanism | |
| CN105033963B (en) | The freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives | |
| CN103225728A (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| US4993673A (en) | Mechanism for moving a table in orthogonal directions | |
| CN103295651A (en) | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle | |
| CN105904443B (en) | A kind of two-freedom compliant parallel mechanism of mobile decoupling | |
| CN1455727A (en) | Electric closing gear | |
| JP5286383B2 (en) | Toggle alignment platform | |
| CN103727364A (en) | Three-freedom-degree precision locating platform | |
| CN101286369A (en) | X-Y-Z three freedom degree tandem type nanometer grade microposition workstation | |
| CN106452165A (en) | Inchworm-type precise linear micro-actuator based on complaint mechanism | |
| CN108858161A (en) | A kind of manipulator and set mould truss robot | |
| CN106426111A (en) | Continuous rotation type four-branched-chain three-translation and one-rotation high-speed parallel manipulator | |
| CN103846911B (en) | A kind of high speed six-degree of freedom parallel manipulator | |
| CN209774584U (en) | Planar three-degree-of-freedom fully-flexible parallel positioning platform | |
| CN103343867A (en) | Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams | |
| CN109039150A (en) | A kind of stick-slip inertia linear actuator based on surface micro-structure friction regulation | |
| CN100558507C (en) | The Z-A two-freedom that linear electric motors drive platform of principal in parallel | |
| CN1586828A (en) | Plane movement mechanism and its device for micro robot | |
| CN101786269A (en) | Micrometer-nanometer transmission platform | |
| CN106736613B (en) | A kind of three translation gantry parallel machines of additional redundancy linear slide | |
| CN1110122C (en) | Miniature monoblock precisive plane moving mechanism and device thereof | |
| CN210547286U (en) | Four-point toggle type high-speed punch press | |
| CN108000459A (en) | A kind of six degree of freedom series-parallel connection curved beam space compliant mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221118 Address after: 230000 b-1018, Woye Garden commercial office building, 81 Ganquan Road, Shushan District, Hefei City, Anhui Province Patentee after: HEFEI WISDOM DRAGON MACHINERY DESIGN Co.,Ltd. Address before: 341000 No. 86 Hongqi Avenue, Jiangxi, Ganzhou Patentee before: Jiangxi University of Science and Technology |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230922 Address after: No. 23 Chuangye Road, Chenji Town, Yizheng City, Yangzhou City, Jiangsu Province, 211400 Patentee after: Jiangsu Kangnaite Precision Machinery Co.,Ltd. Address before: 230000 b-1018, Woye Garden commercial office building, 81 Ganquan Road, Shushan District, Hefei City, Anhui Province Patentee before: HEFEI WISDOM DRAGON MACHINERY DESIGN Co.,Ltd. |