CN1166554C - Miniature manipulate with piezoelectric-type flexible drive and adjustable range - Google Patents

Abstract

The present invention relates to a piezoelectric flexible driving and amplifying micro holding hand with an adjustable range, which belongs to the technical field of a micro-electro-mechanical system. The present invention comprises a micro actuator, a flexible amplifying mechanism, a dimension preset mechanism and a micro holding hand, wherein the flexible amplifying mechanism is fixed on an installing plate, and the dimension preset mechanism is fixed on the upper part of the flexible amplifying mechanism. The micro holding hand is arranged on the upper part of the dimension preset mechanism, and the micro actuator is inlaid between a transverse push rod and a supporting rod of the flexible amplifying mechanism. The micro holding hand designed by the present invention has the advantages of compact spatial structure, high reliability of the transmission of motion and force, small non-linear error and wide application foreground in the fields of micro mechanical precision processing, micro assembly, microrobot, etc.

Description

A kind of piezoelectric-type flexible drives and amplifies the little clamping hand of range-adjustable

Technical field

The present invention relates to a kind of piezoelectric-type flexible and drive the little clamping hand of amplification range-adjustable, belong to MEMS (MEMS) technical field, can be applicable to microoperation technical fields such as microposition, little assembling, microrobot.

Background technology

MEMS is the high-tech area of emerging, a multidisciplinary intersection, it compiles the scientific and technical colony of (comprise intersection, different levels) that newly grow in electronics, machinery, material, manufacturing, measurement and physics, chemistry and the biology small and microscopic fields, is considered to the core technology of 21 century.In this field, the microoperation technology relates to different research directions such as microposition, little processing, little assembling, micro element making and microrobot.Little clamping technology is because its important function at microscopic fields enjoys various countries research worker's attention.At present, done certain experimental study work both at home and abroad in this respect, develop diversified micro-clamp, but it is all not satisfactory, very little as impulse stroke, can not operate the micro element of different size magnitude and shape in the microsize scope, the interchangeability of grasping system and compatible not enough, the scope of application is very narrow.The traditional micro-clamp that drives with piezoelectric element is subjected to the piezoelectric element size restrictions usually, what be difficult to do is very little, and the deflection that the inverse piezoelectric effect of piezoelectric element produces has only several～tens micron usually, can not satisfy the requirement of multiple micro element operation in the microscopic fields, limit its range of application to a certain extent.

Summary of the invention

The objective of the invention is to design a kind of piezoelectric-type flexible and drive the little clamping hand of amplification range-adjustable, overcome the weak point of prior art, adopt Piezoelectric Driving output displacement, utilize flexible hinge novel mechanical amplification mechanism, according to lever principle micrometric displacement is quantitatively amplified, and make clamping range adjustable.

The piezoelectric-type flexible of the present invention's design drives and amplifies the little clamping hand of range-adjustable, comprises micro-actuator, flexible amplification mechanism, size preset mechanism and little clamping hand; Described flexible amplification mechanism is fixed on the installing plate, and the size preset mechanism is fixed on the top of flexible amplification mechanism, and little clamping hand places the top of size preset mechanism; The top of described little clamping hand is chela, and the clamping hand of bottom is hinged by hinge and the fixed bar that is inserted in the screw pair of size preset mechanism; Be positioned at portion of little clamping subordinate, with the hinged pull lever of clamping hand, with an end relative fixed of elastic draw bar in the size preset mechanism, the top relative fixed of the other end of elastic draw bar and the movable hinge-rod in flexible amplification mechanism inside; Described size preset mechanism comprises preset knob, leading screw, screw pair and V-type groove guide rail, and preset knob places an end of leading screw, and leading screw passes two screw pairs, and two screw pairs are slided along V-type groove guide rail; Described flexible amplification mechanism comprises support bar, horizontal push rod, vertical right pull bar, teeter bar, and vertical left lever and Z-shaped connecting rod connect by the Thin Elastic arm between above-mentioned each phase connecting rod; Micro-actuator is embedded between the horizontal push rod and support bar of flexible amplification mechanism.

The piezoelectric-type flexible of the present invention's design drives and amplifies the little clamping hand of range-adjustable, the space structure compactness, and the good reliability that motion and power are transmitted, nonlinearity erron is little; Piezoelectric actuator resolution ratio height wherein, bearing capacity is strong, output accuracy is high, good stability; Flexible amplification mechanism does not wherein have machinery friction, no gap, thereby precision and stability height, is applicable to the transmission and the amplification of micro-displacement in the micro OS; The size preset mechanism is by the relative single closely-pitched leading screw of rotation direction, can adjust the initial distance of little clamping hand vice pawl according to the basic size that is held device, and utilize locking nut to lock, can guarantee simultaneously the microminiaturization of mechanism, therefore action required space less relatively will have wide practical use in fields such as China's micromechanics Precision Machining, little assembling, microrobots.

Description of drawings:

Fig. 1 is that the piezoelectric-type flexible that the present invention designs drives the structural representation that amplifies the little clamping hand of range-adjustable;

Fig. 2 is the plane of flexible amplification mechanism in apparatus of the present invention;

Fig. 3 is the structural representation of size preset mechanism in apparatus of the present invention;

Fig. 4 is the fundamental diagram of apparatus of the present invention;

Fig. 5 is a flexible hinge Mathematical Modeling of the present invention.

Among Fig. 1-Fig. 5,1 is installing plate; 2 is micro-actuator, 21 is that end face, 22 is the bottom surface, 3 is flexible amplification mechanism, 31 is that support bar, 32 is that horizontal push rod, 33 is that vertical right pull bar, 34 is that teeter bar, 35 is that vertical left lever, 36 is Z-shaped connecting rod, and 37,38,39,310,311,312,313 and 314 are the Thin Elastic arm; 4 is the size preset mechanism, and 41 is that screw pair, 42 is that knob, 43 is that leading screw, 44 is that base, 45 is " V " type groove guide rail; 5 is little clamping hand, and 51 is that fixed bar, 52 is that flexible hinge, 53 is that pull lever, 54 is chela; 6 is elastic draw bar.

The specific embodiment

As shown in Figure 1, the piezoelectric-type flexible of the present invention's design drives and amplifies the little clamping hand of range-adjustable, comprises micro-actuator 2, flexible amplification mechanism 3, size preset mechanism 4 and little clamping hand 5.Flexible amplification mechanism is fixed on the installing plate 1, and size preset mechanism 4 is fixed on the top of flexible amplification mechanism 3, and little clamping hand 5 places the top of size preset mechanism 4.The top of little clamping hand is chela 54, and the clamping hand of bottom is hinged by flexible hinge 52 and fixed bar 53 in the screw pair 41 that is inserted in size preset mechanism 4.Be positioned at portion of little clamping subordinate, with the hinged pull lever 53 of clamping hand, with an end relative fixed of elastic draw bar 6 in the size preset mechanism.The other end of elastic draw bar 6 and flexible amplification mechanism 3 relative fixed.Size preset mechanism 4 comprises preset knob 42, leading screw 43, screw pair 41 and V-type groove guide rail 45, and preset knob 42 places an end of leading screw 43, and leading screw passes 41, two screw pairs of two screw pairs and slides along V-type groove guide rail 45.Flexible amplification mechanism 3 comprises support bar 31, horizontal push rod 32, vertical right pull bar 33, teeter bar 34, and vertical left lever 35 and Z-shaped connecting rod 36 connect by the Thin Elastic arm between above-mentioned each bar.Micro-actuator 2 is embedded between the horizontal push rod 32 and support bar 31 of flexible amplification mechanism, by flexible hinge driver is exported micrometric displacement and amplifies, and drives the clamping hand, realizes the clamping to minute sized object; The size preset mechanism can be adjusted clamping hand vice pawl distance by micro element basic size magnitude.

Micro-actuator 2 in the said apparatus be shaped as hexahedron or cylinder, comprise two smooth flat that have flatness to require: 21 is that end face and 22 is the bottom surface, wherein bottom surface 22 contacts with support bar 31 in the flexible amplification mechanism 3, and end face 21 contacts with the horizontal push rod 32 of flexible amplification mechanism.Microdrive 2 can adopt piezoceramic material or electrostriction material to make, and its size is according to flexible amplification mechanism displacement output area and resolution setting.

Flexible amplification mechanism 3 as shown in Figure 2, be made up of six part hinge-rods: support bar 31, horizontal push rod 32, vertical right pull bar 33, teeter bar 34, vertical left lever 35 and Z-shaped connecting rod 36 are connected to one by Thin Elastic arm 37,38,39,310,311,312,313 and 314 respectively between each hinge-rod.The global shape of flexible amplification mechanism 3 is a polyhedron, and each part dimension scale is determined by the displacement multiplication factor of whole flexible amplification mechanism 3.Flexible amplification mechanism 3 can adopt materials such as monocrystalline silicon, polysilicon, steel or high duty alloy, and the output displacement of the different entire mechanism of material and power are all with respective change.Flexible amplification mechanism 3 can be realized by Special Working Technology technology such as line cutting or Laser Processings.In view of present economy and appointed condition, the line cutting has certain actuality.Support bar 31 at flexible amplification mechanism 3 is fixed on the installing plate 1 by through hole.The through hole radius is proportionate relationship with the compliant mechanism size satisfying under the prerequisite of requirement of mechanical strength.

The size preset mechanism partly is made of screw pair 41 (a pair of), knob 42, leading screw 43, base 44 (a pair of) and " V " type groove guide rail 45 etc. as shown in Figure 3.Screw pair 41 bottom surfaces and " V " type groove guide rail 45 matched in clearance, end face is connected with little clamping hand 5 by screw.Knob 42 is used for rotational lead screw 43, drives screw pair 41 along " V " type groove guide rail 45 slide in opposition, thereby realizes the basic size preset of micro element clamping 5, to satisfy clamping requirement in a big way.Screw pair 41 has lock-screw, after the basic size preset, since finish the fixing of little clamping hand vice pawl 54 spacings.

Little clamping hand 5 is made up of fixed bar 51, flexible hinge 52, pull lever 53 and chela 54 etc. as shown in Figure 1, and total is monocrystalline silicon or polycrystalline silicon material, adopts fine process processing.The clamping contact-making surface of chela 54 is a zigzag, shown in local amplification the among Fig. 1, its objective is to overcome or reduce to be held microcosmic surface power between micro element and the chela 54, as the influence of perturbed forces such as Van der Waals for, surface tension and electrostatic force.

The course of work of the present invention is described as follows in conjunction with Fig. 4: during system works, at first determine to be held the basic size of micro element, utilize the primary clearance of the chela 54 in 4 pairs of little clamping hands 5 of size preset mechanism to adjust then.After initialization is finished, then utilize contrary piezoelectricity or electrostriction principle, DC voltage is stablized in 2 inputs to micro-actuator, produces initial micrometric displacement and power, is delivered to the horizontal push rod 32 of flexible amplification mechanism 3.Through flexible hinge displacement multistage amplification, displacement and power are delivered to the fixed bar 51 of little clamping hand 5 by elastic draw bar 6, make it to move along the direction of power.The displacement of fixed bar is delivered to chela 54 by flexible hinge 52 again, and is amplified by secondary, little clamping hand 5 holding actions that final realization meets design requirement: " clamping " and " unclamping ".

Usually the flexible hinge method for designing need be calculated in a large number, and relates to calculus, and computing is very complicated, so precision and the very difficult assurance of the degree of accuracy.Given this, the present invention has set up the flexible hinge Mathematical Modeling voluntarily, and wherein, α is the angle of interior cross section of polar coordinate system and polar axis shaft, θ is the corner of flexible hinge, and R is that flexible hinge arc radius, t are that flexible hinge minimum thickness, b are the width of flexible hinge.According to this model, adopt the Rombers numerical integration method flexible hinge rotation stiffness k respective design theoretical formula of having derived:

$k=1/{\∫}_0^{\mathrm{\π}}\frac{12R\sin \mathrm{\α}}{{\mathrm{Eb}(2R+t-2R\sin \mathrm{\α})}^3}\mathrm{d\α}---\left(1\right)$

The technical indicator of this system is as follows:

The total amplification ratio of whole system: 108;

Maximum output displacement: 1.512mm;

Displacement resolution: 0.1 μ m;

One embodiment of the present of invention appearance and size: length * wide * height=92 * 57 * 14mm ³, microdrive 2 adopts piezoceramic material, length * wide * height=20 * 5 * 5mm ³, maximum output displacement S ₀=14 μ m.Flexible amplification mechanism 3 materials adopt the high-quality steel, machine with two kinds of Special Working Technologies of spark technology by the line cutting.Flexible amplification mechanism 3 horizontal push rod 32 sizes: length * wide=14.5 * 2.5mm ²Vertical right pull bar 33 length * wide=11.5 * 2.5mm ²Teeter bar 34 length * wide=17.5 * 2.5mm ², the Thin Elastic arm 311 that is attached thereto and two ends Thin Elastic arm 310,312 distances are than being 5: 10; Vertical left lever 35 length * wide=4.5 * 2.5mm ²Z-shaped connecting rod 36 length * wide=18 * 2.5mm ²The flexible hinge 52 of little clamping hand 5 is 4mm to the horizontal range of its fixed bar 51.

The elastic modulus E of steel: 2.1 * 10 ⁴Kg/mm ²

Compliant mechanism hinge arc radius R:1.0mm;

Compliant mechanism hinge minimum thickness t:0.5mm;

Compliant mechanism hinge minimum widith b:5mm;

Micro-actuator power supply: 0～300V high voltage stabilizing direct current;

The flexible amplification mechanism amplification ratio:

$R_1=\frac{l_2}{l_1}\&times;\frac{l_4}{{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="C0114045000071.png"\; state="\{\{state\}\}">l</figure-callout>}}_3}\&times;\frac{l_6}{{\mathrm{<figure-callout\; id="5"\; label="l"\; filenames="C0114045000071.png"\; state="\{\{state\}\}">l</figure-callout>}}_5}=\frac{12}{4}\&times;\frac{10}{5}\&times;\frac{21}{7}=18$

Little clamping hand amplification ratio:

$R_2=\frac{l_8}{l_7}=\frac{24}{4}=6$

Maximum output displacement: Smax=S ₀* R=S ₀* R ₁* R ₂=14 * 18 * 6=1.512 * 10 ³μ m

This exemplary application is in the micro element assembly system, and as the operation tool of little assembly ware, practical application effect is good.Above-mentioned example is small-sized compliant mechanism, and according to the principle of the invention, the relative size of each part such as miniature actuator and flexible amplification mechanism can design and produce out the microminiature grasping system with driving, amplification, holding function equally.

Claims (1)

1, a kind of piezoelectric-type flexible drives and amplifies the little clamping hand of range-adjustable, it is characterized in that this clamping hand comprises micro-actuator, flexible amplification mechanism, size preset mechanism and little clamping hand; Described flexible amplification mechanism is fixed on the installing plate, and the size preset mechanism is fixed on the top of flexible amplification mechanism, and little clamping hand places the top of size preset mechanism; The top of described little clamping hand is chela, and the clamping hand of bottom is hinged by hinge and the fixed bar that is inserted in the screw pair of size preset mechanism; Be positioned at portion of little clamping subordinate, with the hinged pull lever of clamping hand, with an end relative fixed of elastic draw bar in the size preset mechanism, the top relative fixed of the other end of elastic draw bar and the movable hinge-rod in flexible amplification mechanism inside; Described size preset mechanism comprises preset knob, leading screw, screw pair and V-type groove guide rail, and preset knob places an end of leading screw, and leading screw passes two screw pairs, and two screw pairs are slided along V-type groove guide rail; Described flexible amplification mechanism comprises support bar, horizontal push rod, vertical right pull bar, teeter bar, and vertical left lever and Z-shaped connecting rod connect by the Thin Elastic arm between above-mentioned each phase connecting rod; Micro-actuator is embedded between the horizontal push rod and support bar of flexible amplification mechanism.

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