CN206051540U - Micro-nano technology equipment and its positioner - Google Patents
Micro-nano technology equipment and its positioner Download PDFInfo
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- CN206051540U CN206051540U CN201620935363.9U CN201620935363U CN206051540U CN 206051540 U CN206051540 U CN 206051540U CN 201620935363 U CN201620935363 U CN 201620935363U CN 206051540 U CN206051540 U CN 206051540U
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Abstract
The utility model discloses a kind of positioner of micro-nano technology equipment, the fixed seat is installed on including fixed seat, the moving platform for installing processing unit (plant) and two and the driving means for driving the moving platform movement, and two driving means drive the moving platform to move in orthogonal both direction, the driving means include piezoelectric ceramic actuator and bridge-type displacement amplifier, and the bridge-type displacement amplifier connects the piezoelectric ceramic actuator and the moving platform respectively.Compact overall structure is easy to process, and displacement equations multiple is larger, and the input and output of displacement have good linear relationship, and stability is strong, and the rigidity of bridge-type enlarger is relatively strong, and application is more extensively more commonly.The invention also discloses a kind of micro-nano technology equipment including above-mentioned positioner.
Description
Technical field
This utility model is related to micro-nano technology field, more particularly to a kind of positioner of micro-nano technology equipment.Additionally,
This utility model further relates to a kind of micro-nano technology equipment including above-mentioned positioner.
Background technology
Micro-nano technology technology increasingly receives concern both domestic and external, with the continuous development of micro ＆ nano technology, many application necks
Domain proposes more requirements to micro/nano level micro-nano technology technology.Existing micro-nano technology equipment is typically tied using lever amplification
Structure or structure for amplifying of buckling, lever amplification simple structure, but size are big, and leverage poor rigidity, motion input and output are non-linear,
And in mechanism, there is displacement loss so that actual displacement equations are less than theoretical displacement equations, and the multiple of amplification is often received
It is limited to mechanism size, amplification of buckling is initial song of its amplification with thin plate being amplified with the deformation of thin plate or thin slice
Rate is relevant, therefore amplification is smaller, and rigging error affects big to its amplification performance, is not easy to platform intergration.
Therefore, how to provide a kind of rigid stronger and constitutionally stable positioner is that those skilled in the art need at present
The technical problem of solution.
Utility model content
The purpose of this utility model is to provide a kind of positioner of micro-nano technology equipment, rigidity relatively strong and Stability Analysis of Structures.
Another object of the present utility model is to provide a kind of micro-nano technology equipment including above-mentioned positioner, and rigidity is compared with strong and structure is steady
It is fixed.
To solve above-mentioned technical problem, this utility model provides a kind of positioner of micro-nano technology equipment, including fixation
Seat, the moving platform for installing processing unit (plant) and two are installed on the fixed seat the drive for driving the moving platform movement
Dynamic device, and two driving means drive the moving platform to move in orthogonal both direction, it is described to drive dress
Put including piezoelectric ceramic actuator and bridge-type displacement amplifier, the bridge-type displacement amplifier connects the piezoelectric ceramics respectively and drives
Dynamic device and the moving platform.
Preferably, the bridge-type displacement amplifier includes fixed platform, the first output stage, the second output stage and two
Symmetrically arranged input platform；The two ends of the piezoelectric ceramic actuator connect the middle part of two input platforms, institute respectively
State input platform away from the center of the positioner one end by flexible hinge connection first connecting rod one end, described first
The other end of connecting rod connects one end of the fixed platform by flexible hinge；The one end of the input platform near the center
One end of second connecting rod is connected by flexible hinge, it is defeated that the other end of the second connecting rod connects described first by flexible hinge
Go out one end of platform, the fixed platform and first output stage are respectively positioned at the both sides of the piezoelectric ceramic actuator；
The two ends of first output stage also connect the fixed seat by flexible hinge, pass through in the middle part of first output stage
Flexible hinge connects second output stage, and second output stage is fixedly connected the moving platform.
Preferably, the bridge-type displacement amplifier also includes that the first auxiliary being oppositely arranged with second output stage is flat
Platform and the second assistance platform, the two ends of first assistance platform connect the fixed seat by flexible hinge, and described first is auxiliary
The middle part of platform is helped to connect second assistance platform by flexible hinge, second assistance platform and second output are flat
Platform is respectively fixedly connected with the relative two ends of the moving platform.
Preferably, the two ends of first output stage connect the fixed seat by two flexible hinges, and described the
The two ends of one assistance platform connect the fixed seat by two flexible hinges；The both sides of second output stage pass through
Two flexible hinges connect first output stage, and the both sides of second assistance platform are by two flexible hinge connections
First assistance platform.
Preferably, it is provided with the screwed hole for fixed position in the fixed seat and the fixed platform, described second
It is provided with output stage and second assistance platform for connecting the screwed hole of the moving platform.
Preferably, it is provided with the middle part of the moving platform for installing the installing hole of processing unit (plant).
Preferably, the flexible hinge is specially straight beam type flexible hinge.
This utility model provides a kind of micro-nano technology equipment, including lathe and is installed on the positioner of the lathe,
The positioner is specially the positioner described in above-mentioned any one.
Preferably, the micro-nano technology equipment is specially micro-structure surface micro-nano cutting machine tool.
The positioner that this utility model is provided, including fixed seat, the moving platform for installing processing unit (plant) and two peaces
Loaded on fixed seat and for driving the driving means of moving platform movement, and two driving means drive moving platforms orthogonal
Move in both direction, driving means include piezoelectric ceramic actuator and bridge-type displacement amplifier, bridge-type displacement amplifier difference
Connection piezoelectric ceramic actuator and moving platform.By using bridge-type displacement amplifier, replace lever amplification machine of the prior art
Structure or Pressing and bending amplifying mechanism, compact overall structure are easy to process, and displacement equations multiple is larger, and the input and output of displacement have good
Linear relationship, stability are strong, and the rigidity of bridge-type enlarger is relatively strong, and application is more extensively more commonly.
This utility model also provides a kind of micro-nano technology equipment including above-mentioned positioner, as above-mentioned positioner has
There is above-mentioned technique effect, above-mentioned micro-nano technology equipment should also have same technique effect, and here is no longer discussed in detail.
Description of the drawings
Fig. 1 is a kind of structural representation of specific embodiment of positioner provided by the utility model；
Fig. 2 is a kind of schematic top plan view of specific embodiment of positioner provided by the utility model.
Specific embodiment
Core of the present utility model is to provide a kind of positioner of micro-nano technology equipment, rigidity relatively strong and Stability Analysis of Structures.
Another core of the present utility model is to provide a kind of micro-nano technology equipment including above-mentioned positioner, and rigidity is compared with strong and structure is steady
It is fixed.
In order that those skilled in the art more fully understand this utility model scheme, below in conjunction with the accompanying drawings and it is embodied as
The utility model is described in further detail for mode.
Refer to the knot of Fig. 1 and a kind of specific embodiment that Fig. 2, Fig. 1 are positioner provided by the utility model
Structure schematic diagram；Fig. 2 is a kind of schematic top plan view of specific embodiment of positioner provided by the utility model.
The positioner that this utility model specific embodiment is provided, including fixed seat 1, moving platform 2 and two driving dresses
Put, fixed seat 1 is used for stationary positioned device, be typically fixedly installed in pedestal platform, moving platform 2 is used to install processing unit (plant), typically
For cutter, installation of the installing hole in order to processing unit (plant) can be set in the middle part of moving platform 2.Two driving means are installed on fixed seat
1 and for driving moving platform 2 to move, and two driving means drive moving platforms 2 to move in orthogonal both direction, i.e.,
The xy directions movement in the same plane of moving platform 2.Driving means include piezoelectric ceramic actuator 3 and bridge-type displacement amplifier,
Bridge-type displacement amplifier connects piezoelectric ceramic actuator 3 and moving platform 2 respectively.
Specifically, bridge-type displacement amplifier includes fixed platform 4, the first output stage 8, the second output stage 9 and two
Symmetrically arranged input platform 5.The two ends of piezoelectric ceramic actuator 3 connect the middle part of two input platforms 5 respectively, are input into platform
The one end at the center of 5 remotely located devices connects one end of first connecting rod 6 by flexible hinge, and the other end of first connecting rod 6 leads to
Cross flexible hinge to be connected one end of platform 4；Input platform 5 connects second connecting rod by flexible hinge by paracentral one end
7 one end, the other end of second connecting rod 7 connect one end of the first output stage 8, fixed platform 4 and first by flexible hinge
Output stage 8 is respectively positioned at the both sides of piezoelectric ceramic actuator 3；The two ends of the first output stage 8 are also connected by flexible hinge
Fixed seat 1, the middle part of the first output stage 8 connect the second output stage 9 by flexible hinge, and the second output stage 9 is fixed and connected
Connect moving platform 2.Two input platforms 5 are symmetrical arranged at the two ends of piezoelectric ceramic actuator 3.
During work, piezoelectric ceramic actuator 3 switches on power and extends under power supply effect, increases between two input platforms 5
Distance, by the effect of first connecting rod 6, second connecting rod 7 and flexible hinge, reduce the first output stage 8 and fixed platform 4
Distance, is maintained static with fixed seat 1 as 4 position of fixed platform is relative, and the first output stage 8 will be moved to fixed platform 4, be led to
Crossing flexible hinge drives the second output stage 9 also to move to fixed platform 4, i.e., can make moving platform 2 to the direction of fixed platform 4
It is mobile, that is, the direction of the movement of moving platform 2 is driven perpendicular to the telescopic direction of piezoelectric ceramic actuator 3.Each part motion after power-off
It is in opposite direction, realize that moving platform 2 is return.The piezoelectric ceramic actuator 3 of two driving means is vertically arranged, and then makes moving platform 2
Can move in orthogonal both direction.
By using bridge-type displacement amplifier, replace lever amplifying mechanism of the prior art or Pressing and bending amplifying mechanism, it is whole
Body compact conformation is easy to process, and displacement equations multiple is larger, and the input and output of displacement have good linear relationship, and stability is strong,
And the rigidity of bridge-type enlarger is relatively strong, application is more extensively more commonly.
In the positioner that this utility model specific embodiment is provided, in order to improve stablizing when moving platform 2 is moved
Property, the first assistance platform 10 and the second assistance platform 11 being oppositely arranged with the second output stage 9, the first assistance platform can be set
10 two ends are aided in by flexible hinge connection second by flexible hinge connection fixing base 1, the middle part of the first assistance platform 10
Platform 11, the second assistance platform 11 and the second output stage 9 are respectively fixedly connected with the relative two ends of moving platform 2.That is output stage
It is oppositely arranged with assistance platform, connects the two ends of moving platform 2 respectively, is moved by output stage driving moving platform 2 is not affected
In the case of, increase junction point, improve stability and intensity.
In order to further increase intensity, the two ends of the first output stage 8 can be made to be connected by two flexible hinges
Seat 1, the two ends of the first assistance platform 10 pass through two flexible hinge connection fixing bases 1；The both sides of the second output stage 9 lead to
Cross two flexible hinges and connect the first output stages 8, the both sides of the second assistance platform 11 are by two flexible hinges connections the
One assistance platform 10.The intensity of equipment is improved by the quantity for increasing flexible hinge, flexible hinge is adjusted also dependent on situation
Quantity, within protection domain of the present utility model.
In the positioner that this utility model specific embodiment is provided, in fixed seat 1 and fixed platform 4, use is provided with
It is provided with the screwed hole of fixed position, the second output stage 9 and the second assistance platform 11 for connecting the screw thread of moving platform 2
Hole.The part that is fixedly connected of needs is bolted, replacing easy to disassemble, may also be employed other connected modes, such as clamping or
Welding etc., within protection domain of the present utility model.
On the basis of the positioner that above-mentioned each specific embodiment is provided, it is flexible that flexible hinge can be specially straight beam type
Hinge, there is provided larger slewing area, may also be employed other kinds of flexible hinge, such as rounding angle-style flexible hinge etc., exist
Within protection domain of the present utility model.
Except above-mentioned positioner, specific embodiment of the present utility model also provides a kind of including above-mentioned positioner
Micro-nano technology equipment, the structure of the micro-nano technology equipment other each several parts refer to prior art, repeat no more herein.
Specifically, above-mentioned micro-nano technology equipment can be micro-structure surface micro-nano cutting machine tool.
Above micro-nano technology equipment provided by the utility model and its positioner are described in detail.Herein
Apply specific case to be set forth principle of the present utility model and embodiment, the explanation of above example is only intended to
Help understands method of the present utility model and its core concept.It should be pointed out that for those skilled in the art come
Say, on the premise of without departing from this utility model principle, can also carry out some improvement and modification to this utility model, these change
Enter and modification is also fallen in this utility model scope of the claims.
Claims (9)
1. a kind of positioner of micro-nano technology equipment, including fixed seat (1), the moving platform (2) for installing processing unit (plant) and
Two are installed on the fixed seat (1) the driving means for driving the moving platform (2) mobile, and two described drivings fill
Put the driving moving platform (2) to move in orthogonal both direction, it is characterised in that the driving means include piezoelectricity
Ceramic driver (3) and bridge-type displacement amplifier, the bridge-type displacement amplifier connect the piezoelectric ceramic actuator (3) respectively
With the moving platform (2).
2. positioner according to claim 1, it is characterised in that the bridge-type displacement amplifier includes fixed platform
(4), the first output stage (8), the second output stage (9) and two symmetrically arranged inputs platform (5)；The piezoelectric ceramics drives
The two ends of dynamic device (3) connect the middle part of two inputs platform (5) respectively, and the input platform (5) is away from the positioning dress
The one end at the center put connects one end of first connecting rod (6) by flexible hinge, and the other end of the first connecting rod (6) is by soft
One end of property fixed platform (4) described in chain connection；Input platform (5) passes through flexible hinge near the one end at the center
One end of connection second connecting rod (7), the other end of the second connecting rod (7) connect first output stage by flexible hinge
(8) one end, the fixed platform (4) and first output stage (8) are respectively positioned at the piezoelectric ceramic actuator (3)
Both sides；The two ends of first output stage (8) also connect the fixed seat (1) by flexible hinge, and first output is flat
The middle part of platform (8) connects second output stage (9) by flexible hinge, and second output stage (9) is fixedly connected institute
State moving platform (2).
3. positioner according to claim 2, it is characterised in that the bridge-type displacement amplifier also includes and described
The first assistance platform (10) and the second assistance platform (11) that two output stages (9) are oppositely arranged, first assistance platform
(10) two ends connect the fixed seat (1) by flexible hinge, and the middle part of first assistance platform (10) passes through flexible hinge
Chain connects second assistance platform (11), and second assistance platform (11) and second output stage (9) are fixed respectively
Connect the relative two ends of the moving platform (2).
4. positioner according to claim 3, it is characterised in that the two ends of first output stage (8) pass through
Two flexible hinges connect the fixed seat (1), and the two ends of first assistance platform (10) are connected by two flexible hinges
Connect the fixed seat (1)；It is flat that the both sides of second output stage (9) connect first output by two flexible hinges
Platform (8), the both sides of second assistance platform (11) connect first assistance platform (10) by two flexible hinges.
5. positioner according to claim 4, it is characterised in that on the fixed seat (1) and the fixed platform (4)
The screwed hole for fixed position is provided with, is provided with second output stage (9) and second assistance platform (11)
For connecting the screwed hole of the moving platform (2).
6. positioner according to claim 5, it is characterised in that be provided with for installing in the middle part of the moving platform (2)
The installing hole of processing unit (plant).
7. the positioner according to claim 2 to 6 any one, it is characterised in that the flexible hinge is specially straight
Beam type flexible hinge.
8. a kind of micro-nano technology equipment, including lathe and the positioner of the lathe is installed on, it is characterised in that described fixed
Position device is specially the positioner described in claim 1 to 7 any one.
9. micro-nano technology equipment according to claim 8, it is characterised in that the micro-nano technology equipment is specially micro structure
Surface micro-nano cutting machine tool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620935363.9U CN206051540U (en) | 2016-08-24 | 2016-08-24 | Micro-nano technology equipment and its positioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620935363.9U CN206051540U (en) | 2016-08-24 | 2016-08-24 | Micro-nano technology equipment and its positioner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206051540U true CN206051540U (en) | 2017-03-29 |
Family
ID=58385241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620935363.9U Expired - Fee Related CN206051540U (en) | 2016-08-24 | 2016-08-24 | Micro-nano technology equipment and its positioner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206051540U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107378527A (en) * | 2017-08-18 | 2017-11-24 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN109879245A (en) * | 2019-01-30 | 2019-06-14 | 宁波大学 | Two translations, the one big stroke of rotation is without coupling parallel piezoelectric micromotion platform |
-
2016
- 2016-08-24 CN CN201620935363.9U patent/CN206051540U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107378527A (en) * | 2017-08-18 | 2017-11-24 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN107378527B (en) * | 2017-08-18 | 2019-06-11 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN109879245A (en) * | 2019-01-30 | 2019-06-14 | 宁波大学 | Two translations, the one big stroke of rotation is without coupling parallel piezoelectric micromotion platform |
| CN109879245B (en) * | 2019-01-30 | 2021-05-07 | 宁波大学 | Two-translation one-rotation large-stroke coupling-free parallel piezoelectric micromotion platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170329 Termination date: 20180824 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |