CN107834895B - Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method - Google Patents
Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method Download PDFInfo
- Publication number
- CN107834895B CN107834895B CN201711086589.1A CN201711086589A CN107834895B CN 107834895 B CN107834895 B CN 107834895B CN 201711086589 A CN201711086589 A CN 201711086589A CN 107834895 B CN107834895 B CN 107834895B
- Authority
- CN
- China
- Prior art keywords
- voice coil
- coil motor
- flexible hinge
- degree
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000006073 displacement reaction Methods 0.000 claims abstract description 54
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 37
- NBGBEUITCPENLJ-UHFFFAOYSA-N Bunazosin hydrochloride Chemical compound Cl.C1CN(C(=O)CCC)CCCN1C1=NC(N)=C(C=C(OC)C(OC)=C2)C2=N1 NBGBEUITCPENLJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000013461 design Methods 0.000 claims abstract description 9
- 230000000694 effects Effects 0.000 claims description 6
- 230000010354 integration Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 230000002457 bidirectional effect Effects 0.000 claims description 2
- 238000013519 translation Methods 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000005265 energy consumption Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
A kind of XY θ of piezoelectricity-electromagnetism combination drive of the present inventionZThree-degree of freedom flexible actuator and method, the actuator include upper mounting plate, pedestal, voice coil motor and piezoelectric pile；The upper mounting plate include U-shaped movable block, respectively with the inside and outside moving platform being connect by H-shaped flexible hinge and double flat andante flexible hinge of movable block, set up non-uniform beam in the fixed body of four corners and with moving platform Nested design separately；The non-uniform beam includes the deflection beam that intermediate output mass block is connected with both ends therewith；Moving platform is driven by voice coil motor, non-uniform beam Piezoelectric Ceramic, to can realize that mass block carries out the XY translation of larger stroke at low voltage and a certain range of deflects about the z axis；The design of the elastic element of double flat andante flexible hinge and H-shaped flexible hinge provides the prismatic pair of corresponding freedom degree, so that mobile decoupling；Therefore actuator displacement resolution of the present invention is high, fast, the low in energy consumption and drive member of response integrated can process the XY θ, it can be achieved that objectZThree Degree Of Freedom high-precision is separately adjustable.
Description
Technical field
The present invention relates to XY θzA kind of Three Degree Of Freedom actuation technical field, and in particular to XY θ of piezoelectricity-electromagnetism combination driveZ
Three-degree of freedom flexible actuator and its actuation method.
Background technique
In recent years, with high-new skills such as micro-nano location technology, micro electro mechanical system (MEMS) technology (MEMS) and space flight mechanicss of communication
The rapid development of art, multiple degrees of freedom micro-displacement locating platform is in sides such as astronomical telescope, image stabilization control and satellite imageries
Face becomes an indispensable part.Under present circumstances, existing XY θZThree Degree Of Freedom piezo-electric type driving mechanism is although light-weight, rings
Answer fast and actuation precision high, but since displacement of the lines actuating travel is small, driving voltage is high, limits its scope of application.And due to it
The particularity of application environment requires actuation mechanism to have biggish translation displacements and a certain range under low driving voltage toward contact
Angular displacement.
There is voice coil motor simple structure, small in size, high-precision, power to control accurate, rapidly response, service life length and driving
The excellent properties such as stroke is big.Therefore voice coil motor is also widely used in accurate actuation field.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the purpose of the present invention is to provide a kind of piezoelectricity-electromagnetism combination drives
XY θZThree-degree of freedom flexible actuator and method, the actuator are based on piezoelectricity and electromagnetism combination drive, combine piezoelectricity and sound
The advantage of motor respectively is enclosed, while having the characteristics that displacement resolution small in size, that response is fast, high, moreover it is possible in low-voltage
The lower angular displacement about the z axis realized biggish XY translation displacements and meet application demand；And drive member can integration processing and
At avoiding multiple drive members installation bring uncompensable errors, it can be achieved that XY θZThree Degree Of Freedom high-precision is separately adjustable.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of XY θ of piezoelectricity-electromagnetism combination driveZThree-degree of freedom flexible actuator, including upper mounting plate 1 and pedestal 2；It is described
Upper mounting plate 1 passes through H-shaped flexible hinge 12 including four U-shaped movable blocks 3 for being open two-by-two opposite, with the inside of U-shaped movable block 3 and connects
The moving platform 4 that connects, the non-uniform beam 5 being centrally located being connect between moving platform 4 by flexible hinge and with U-shaped movable block
3 outside passes through the fixed body 11 set up separately in four corners that double flat andante flexible hinge 13 connects, and is located at 5 both ends of non-uniform beam
It is provided with groove on the moving platform 4 of heteropleural, the first piezoelectric pile 9 and the second piezoelectric pile 10 with precompression are provided in groove；It is described
There are four supporter 2-1, adjacent edge is provided with fixed pedestal 2-2 for the quadrangle setting of pedestal 2；The non-uniform beam 5 includes being located at
The output mass block 5-1 at center and the first deflection being connect respectively with the output both ends mass block 5-1 by right circular flexure hinge
Beam 5-2 and the second deflection beam 5-3；It further include the fixation base for being arranged in the link block 7 and pedestal 2 of 1 adjacent side of upper mounting plate
The first voice coil motor 6 and the second voice coil motor 8 between seat 2-2；First voice coil motor 6 includes the first magnetic cylinder 6-2 and sets
First coil 6-1 in the first magnetic cylinder 6-2；Second voice coil motor 8 is formed with the first voice coil motor 6 and specification is homogeneous
Together；The upper surface bonding control target of the output mass block 5-1, for realizing the XY θ of objectZThree Degree Of Freedom actuation tune
Section.
The coil displacements output end of first voice coil motor 6 and the second voice coil motor 8 and magnetic cylinder bottom portion pass through spiral shell
The fixed pedestal 2-2 respectively with link block 7 and on pedestal 2 is followed closely to be fixedly connected；9 He of the first piezoelectric pile with precompression
Second piezoelectric pile (10) is mounted in upper mounting plate 1, and one end is embedded in the groove of moving platform 4, and the other end is separately mounted to by soft
In the groove that property hinge is connect with the first deflection beam 5-2 and the second deflection beam 5-3；It is described to set up separately in 1 four corners of upper mounting plate
Four supporter 2-1 that fixed body 11 is arranged with pedestal 2 respectively are fixedly connected by screw.
Accurate low-speed WEDM process integration processing is respectively adopted in the upper mounting plate 1 and pedestal 2.
A kind of piezoelectricity-electromagnetism combination drive XY θ described aboveZThe actuation method of three-degree of freedom flexible actuator:
When to 6 input control electric signal of the first voice coil motor, the first coil 6-1 in the first voice coil motor 6 along X-axis just
Direction movement, while a thrust is generated to U-shaped movable block 3；By overcoming corresponding double flat andante flexible hinge 13 and H-shaped flexible
The elastic force of hinge 12 realizes moving platform 4 along X-axis positive direction output displacement；To drive output mass block 5-1 along X-axis pros
To one displacement of the lines of generation；Conversely, when inputting opposite control electric signal to the first voice coil motor 6, in the first voice coil motor 6
First coil 6-1 moved along X-axis negative direction, while to U-shaped movable block 3 generate a pulling force；To realize output mass block
5-1 generates a displacement of the lines along X-axis negative direction；
Based on actuation method identical with X-direction, output mass block 5-1 can be realized along Y by the second voice coil motor 8
Axis direction generates bidirectional output displacement；
When the first piezoelectric pile 9 with precompression and the second piezoelectric pile 10 being mounted in upper mounting plate 1 are a pair of equal in magnitude
Under the identical voltage effect of direction, the inverse piezoelectric effect based on piezoelectric material, piezoelectric pile generates equal in magnitude contrary one
To power output and displacement, push connected the first deflection beam 5-2 and the second deflection beam 5-3 along elongation side by flexible hinge respectively
It is deflected to generating, and then output mass block 5-1 is located in the middle by flexible hinge driving and is generated around Z axis angular displacement.
Displacement of the lines actuation in the X-axis and Y direction is adjusted, and the angular displacement actuation on direction is adjusted about the z axis
For independent driving；The design of double flat andante flexible hinge 13 and H-shaped flexible hinge 12 serves not only as elastic restraint element and provides
The prismatic pair of corresponding freedom degree, but also mobile decoupling of the moving platform 4 in X-axis and Y direction, avoids the production of additional displacement
It is raw；And due to the Nested design of moving platform 4 and non-uniform beam 5 so that output mass block 5-1 along X, the output of Y-axis displacement of the lines with
Angular displacement output is independent about the z axis；Entire actuator can be realized the XY θ of object without mechanical frictionZThree Degree Of Freedom high-precision is only
It is vertical to adjust.
The present invention compared with prior art, has the advantages that
1) present invention uses piezoelectricity and electromagnetism mixing actuation, has the characteristics that displacement resolution small in size, that response is fast, high
While, moreover it is possible to biggish XY translation displacements are realized at low voltage and meet the angular displacement about the z axis of application demand, to have
The features such as small power consumption, big stroke.
2) upper mounting plate drive member of the invention can integration be process, avoid multiple drive members installation brings
Uncompensable errors are, it can be achieved that XY θZThree Degree Of Freedom high-precision is separately adjustable.
3) flexible hinge that the present invention uses eliminates transmission using elastic material micro-strain and its from the characteristic replied
Idle running and mechanical friction in the process；And the design of double flat andante flexible hinge and H-shaped flexible hinge serves not only as elastic restraint
Element provides the prismatic pair of corresponding freedom degree, but also mobile decoupling, makes mechanism have the spies such as high displacement resolution, high-precision
Point.
Detailed description of the invention
Fig. 1 is schematic diagram of the three-dimensional structure.
Fig. 2 is upper mounting plate structure top view.
Fig. 3 is part-structure component schematic diagram, and wherein Fig. 3 A is schematic diagram of base structure, and Fig. 3 B shows for variable-section beam structure
It is intended to, Fig. 3 C is voice coil motor structural schematic diagram.
Fig. 4 is the present invention along X-axis straight-line displacement driving principle schematic diagram.
Fig. 5 is present invention angular displacement driving principle schematic diagram about the z axis.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, invention is further described in detail.
As shown in Fig. 1, Fig. 2 and Fig. 3, a kind of XY θ of piezoelectricity-electromagnetism combination drive of the present inventionZThree-degree of freedom flexible actuation
Device, including upper mounting plate 1, pedestal 2, the first voice coil motor 6 between the link block 7 and pedestal 2 of 1 adjacent side of upper mounting plate and
Second voice coil motor 8 and the first piezoelectric pile 9 and the second piezoelectric pile 10 with precompression in 1 interior grooves of upper mounting plate；
The upper mounting plate 1 include U-shaped movable block 3, the moving platform 4 being connect with the inside of U-shaped movable block 3 by H-shaped flexible hinge 12 and
The non-uniform beam 5 being centrally located that is connected between moving platform 4 by flexible hinge and pass through with the outside of U-shaped movable block 3 double
The fixed body 11 set up separately in four corners that parallel-plate flexible hinge 13 connects, positioned at the moving platform 4 of 5 both ends heteropleural of non-uniform beam
On be provided with groove, the first piezoelectric pile 9 and the second piezoelectric pile 10 with precompression are provided in groove；The quadrangle of the pedestal 2 is set
It sets there are four supporter 2-1, adjacent edge is provided with fixed pedestal 2-2；The non-uniform beam 5 includes centrally located output quality
Block 5-1 and the deflection of the first deflection beam 5-2 and second being connect respectively with the output both ends mass block 5-1 by right circular flexure hinge
Beam 5-3；First voice coil motor 6 includes the first magnetic cylinder 6-2 and the first coil 6-1 being placed in the first magnetic cylinder 6-2；Described
Two voice coil motors 8 are formed with the first voice coil motor 6 and specification is all the same.The upper surface of the output mass block 5-1 can be bonded
Target is controlled, for realizing the XY θ of objectZThree Degree Of Freedom actuation is adjusted.
As the preferred embodiment of the present invention, the coil displacements of first voice coil motor 6 and the second voice coil motor 8
Output end and magnetic cylinder bottom portion pass through fixed pedestal 2-2 of the screw respectively with link block 7 and on pedestal 2 and are fixedly connected；Institute
It states the first piezoelectric pile 9 and the second piezoelectric pile (10) with precompression to be mounted in upper mounting plate 1, one end is embedded in the groove of moving platform 4
Interior, the other end is separately mounted in the groove being connect by flexible hinge with the first deflection beam 5-2 and the second deflection beam 5-3；Institute
It states and sets up four supporter 2-1 that the fixed body 11 in 1 four corners of upper mounting plate is arranged with pedestal 2 respectively separately and pass through the fixed company of screw
It connects.
As the preferred embodiment of the present invention, the upper mounting plate 1 and pedestal 2 can be respectively adopted precision and be careful silk thread
Cutting technique integration is process.
A kind of piezoelectricity-electromagnetism combination drive XY θ described aboveZThe actuation method of three-degree of freedom flexible actuator:
When to 6 input control electric signal of the first voice coil motor, the first coil 6-1 in the first voice coil motor 6 along X-axis just
Direction movement, while a thrust is generated to U-shaped movable block 3；By overcoming corresponding double flat andante flexible hinge 13 and H-shaped flexible
The elastic force of hinge 12 realizes moving platform 4 along X-axis positive direction output displacement；To drive output mass block 5-1 along X-axis pros
To one displacement of the lines of generation；Conversely, when inputting opposite control electric signal to the first voice coil motor 6, in the first voice coil motor 6
First coil 6-1 moved along X-axis negative direction, while to U-shaped movable block 3 generate a pulling force；To realize output quality
Block 5-1 generates a displacement of the lines along X-axis negative direction；
Y direction displacement of the lines actuation adjusting method and identical as X-direction actuation actuation adjusting；
When the first piezoelectric pile 9 with precompression and the second piezoelectric pile 10 being mounted in upper mounting plate 1 are a pair of equal in magnitude
Under the identical voltage effect of direction, the inverse piezoelectric effect based on piezoelectric material, piezoelectric pile generates equal in magnitude contrary one
To power output and displacement, push connected the first deflection beam 5-2 and the second deflection beam 5-3 along elongation side by flexible hinge respectively
It is deflected to generating, and then output mass block 5-1 is located in the middle by flexible hinge driving and generates angular displacement about the z axis.
Fig. 4 show X-axis straight-line displacement actuation schematic illustration, when the first voice coil motor 6 generates one to U-shaped movable block 3
When a thrust F, by the flexible deformation of corresponding double flat andante flexible hinge 13 and H-shaped flexible hinge 12, moving platform 4 will drive defeated
Pledge gauge block 5-1 generates a displacement of the lines Δ x along X-axis positive direction；Y direction straight-line displacement actuation principle and with X-direction make
Dynamic principle is identical.
Fig. 5 show angular displacement actuation schematic illustration about the z axis, LaFor flexible hinge center on the outside of deflection beam far from inside with
Export the distance at mass block connects hinge center, LOTo export cross-sectional width of the mass block in XOY plane, if rigid deflection beam
In piezoelectric pile driving force F1The lower deflection angle for generating α, then angular displacement is approximately: intermediate output mass block about the z axis
Displacement of the lines actuation in the X-axis and Y direction is adjusted, and angular displacement actuation adjusting about the z axis is independence
Driving；The design of double flat andante flexible hinge 13 and H-shaped flexible hinge 12 serve not only as elastic restraint element provide it is corresponding from
By the prismatic pair spent, but also mobile decoupling of the moving platform 4 in X-axis and Y direction, avoids the generation of additional displacement；And
Due to the Nested design of moving platform 4 and non-uniform beam 5, so that output mass block 5-1 is along the displacement of the lines output of X, Y-axis and around Z
Axis angular displacement output is independent；Entire actuator is without mechanical friction, so as to realize the XY θ of object under low-power consumptionZThree certainly
It is separately adjustable by degree high-precision.
Claims (5)
1. a kind of piezoelectricity-electromagnetism combination drive XY θZThree-degree of freedom flexible actuator, it is characterised in that: including pedestal (2) and set
Set the upper mounting plate (1) on pedestal (2)；It is characterized by: the upper mounting plate (1) includes that four U-shapeds for being open two-by-two opposite move
Motion block (3), the moving platform (4) connect with the inside of U-shaped movable block (3) by H-shaped flexible hinge (12) and moving platform (4) it
Between the non-uniform beam (5) being centrally located that connects by flexible hinge and pass through double flat andante with the outside of U-shaped movable block (3)
The fixed body (11) of flexible hinge (13) connection set up separately in four corners, is located at the moving platform of non-uniform beam (5) both ends heteropleural
(4) it is provided with groove on, the first piezoelectric pile (9) and the second piezoelectric pile (10) with precompression are provided in groove；The pedestal (2)
Quadrangle setting there are four supporter (2-1), adjacent edge is provided with fixed pedestal (2-2)；The non-uniform beam (5) includes being located at
The output mass block (5-1) at center and respectively with output the mass block both ends (5-1) connect by right circular flexure hinge first
Deflection beam (5-2) and the second deflection beam (5-3)；It is arranged in the link block (7) and pedestal (2) of upper mounting plate (1) adjacent side
Fixed pedestal (2-2) between the first voice coil motor (6) and the second voice coil motor (8)；First voice coil motor (6) includes
First magnetic cylinder (6-2) and the first coil (6-1) being placed in the first magnetic cylinder (6-2)；Second voice coil motor (8) and the first sound
It encloses motor (6) composition and specification is all the same；The upper surface bonding control target of the output mass block (5-1), for realizing
The XY θ of objectZThree Degree Of Freedom actuation is adjusted.
2. a kind of XY θ of piezoelectricity-electromagnetism combination drive according to claim 1ZThree-degree of freedom flexible actuator, feature
Be: the coil displacements output end of first voice coil motor (6) and the second voice coil motor (8) and magnetic cylinder bottom portion pass through spiral shell
Nail is fixedly connected with link block (7) and the fixed pedestal (2-2) being located on pedestal (2) respectively；First pressure with precompression
Pile (9) and the second piezoelectric pile (10) are mounted in upper mounting plate (1), and one end is embedded in the groove of moving platform (4), other end difference
It is mounted in the groove being connect by flexible hinge with the first deflection beam (5-2) and the second deflection beam (5-3)；It is described to set up separately upper
The fixed body (11) of platform (1) four corners connects with four supporters (2-1) of pedestal (2) setting by the way that screw is fixed respectively
It connects.
3. a kind of XY θ of piezoelectricity-electromagnetism combination drive according to claim 1ZThree-degree of freedom flexible actuator, feature
Be: the upper mounting plate (1) and pedestal (2) is respectively adopted accurate low-speed WEDM process integration and is process.
4. a kind of XY θ of piezoelectricity-electromagnetism combination drive according to any one of claims 1 to 3ZThree-degree of freedom flexible actuation
The actuation method of device, it is characterised in that:
When to the first voice coil motor (6) input control electric signal, the first coil (6-1) in the first voice coil motor (6) is along X-axis
Positive direction movement, while a thrust is generated to U-shaped movable block (3)；By overcoming corresponding double flat andante flexible hinge (13) and H
The elastic force of shape flexible hinge (12) realizes moving platform (4) along X-axis positive direction output displacement；To drive output mass block (5-
1) displacement of the lines is generated along X-axis positive direction；Conversely, when inputting opposite control electric signal to the first voice coil motor (6), the
First coil (6-1) in one voice coil motor (6) is moved along X-axis negative direction, while generating a pulling force to U-shaped movable block (3)；
To realize that output mass block (5-1) generates a displacement of the lines along X-axis negative direction；
Based on actuation method identical with X-direction, output mass block (5-1) can be realized along Y by the second voice coil motor (8)
Axis direction generates bidirectional output displacement；
When the first piezoelectric pile (9) with precompression and the second piezoelectric pile (10) being mounted in upper mounting plate (1) are in a pair of of size phase
It waits under the identical voltage effect in directions, the inverse piezoelectric effect based on piezoelectric material, piezoelectric pile generates equal in magnitude contrary
A pair of of power output and displacement push connected the first deflection beam (5-2) and the edge the second deflection beam (5-3) by flexible hinge respectively
Prolonging direction generates deflection, and then is located in the middle output mass block (5-1) by flexible hinge driving and generates angle position about the z axis
It moves.
5. a kind of XY θ of piezoelectricity-electromagnetism combination drive according to claim 4ZThe actuation side of three-degree of freedom flexible actuator
Method, it is characterised in that: the displacement of the lines actuation in the X-axis and Y direction is adjusted, and the angular displacement actuation on direction about the z axis
Adjusting is independent driving；The design of double flat andante flexible hinge (13) and H-shaped flexible hinge (12) serves not only as elastic restraint
Element provides the prismatic pair of corresponding freedom degree, but also mobile decoupling of the moving platform (4) in X-axis and Y direction, avoids
The generation of additional displacement；And due to the Nested design of moving platform (4) and non-uniform beam (5), so that output edge mass block (5-1)
X, the output of Y-axis displacement of the lines and the output of angular displacement about the z axis are independent；Entire actuator can be realized the XY of object without mechanical friction
θZThree Degree Of Freedom high-precision is separately adjustable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711086589.1A CN107834895B (en) | 2017-11-07 | 2017-11-07 | Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711086589.1A CN107834895B (en) | 2017-11-07 | 2017-11-07 | Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107834895A CN107834895A (en) | 2018-03-23 |
| CN107834895B true CN107834895B (en) | 2019-04-09 |
Family
ID=61653884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711086589.1A Active CN107834895B (en) | 2017-11-07 | 2017-11-07 | Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107834895B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389603B (en) * | 2018-04-03 | 2023-09-01 | 中国科学院宁波材料技术与工程研究所 | Double-composite flexible parallel four-bar mechanism |
| CN109176420B (en) * | 2018-07-10 | 2021-08-06 | 天津大学 | Middle-mounted movable joint type flexible decoupling precision positioning structure |
| CN109768733B (en) * | 2019-01-30 | 2023-12-22 | 吉林大学 | Twice-rotation piezoelectric rotary driver |
| CN110095860B (en) * | 2019-04-29 | 2021-05-25 | 汕头大学 | Two-stage composite large-stroke high-precision quick reflector |
| CN113464780B (en) * | 2021-05-25 | 2022-12-09 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2304691A1 (en) * | 1972-02-14 | 1973-08-23 | Xerox Corp | DIVE PULSE SYSTEM |
| WO1999014842A1 (en) * | 1997-09-17 | 1999-03-25 | Houston John S | Actuator with opposing repulsive magnetic forces |
| JP2001057037A (en) * | 1999-08-11 | 2001-02-27 | Internatl Business Mach Corp <Ibm> | Stator magnet, actuator and disk device |
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
-
2017
- 2017-11-07 CN CN201711086589.1A patent/CN107834895B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2304691A1 (en) * | 1972-02-14 | 1973-08-23 | Xerox Corp | DIVE PULSE SYSTEM |
| WO1999014842A1 (en) * | 1997-09-17 | 1999-03-25 | Houston John S | Actuator with opposing repulsive magnetic forces |
| JP2001057037A (en) * | 1999-08-11 | 2001-02-27 | Internatl Business Mach Corp <Ibm> | Stator magnet, actuator and disk device |
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
Non-Patent Citations (1)
| Title |
|---|
| "新型大推动直线压电作动器的研究";朱鹏举，时运来，赵淳生;《微电机》;20150331;第48卷(第3期);第79-84页 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107834895A (en) | 2018-03-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107834895B (en) | Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method | |
| US11342864B2 (en) | Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof | |
| CN106737646B (en) | The Three Degree Of Freedom Piezoelectric Driving regulating device and method of translation and rotation can be achieved | |
| CN108803008B (en) | Displacement amplification mechanism, optical fiber scanning device and projector | |
| CN104467525A (en) | Pretightening force adjustable inertial stick-slip drive trans-dimension precision locating platform | |
| CN107393599B (en) | Integrate the quick deflection platform of two dimension and method of sensing unit and confinement element | |
| CN109861580B (en) | Six-degree-of-freedom piezoelectric motion platform and excitation method thereof | |
| CN201188587Y (en) | Piezoelectric motor for implementing spherical motion and spherical motion system | |
| CN107863901B (en) | A kind of six-degree of freedom micro-displacement Piezoelectric Driving regulating device and adjusting method | |
| US11159103B2 (en) | Six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform | |
| CN107907992B (en) | The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive | |
| CN110065926B (en) | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform | |
| CN110010190B (en) | Three-dimensional constant force parallel flexible micro-positioning platform | |
| CN104934075A (en) | Large-stroke three-dimensional nano flexible moving platform | |
| CN204835980U (en) | Little displacement driving ware of two dimension piezoelectricity | |
| CN205666773U (en) | Variable damping piezo -actuator | |
| CN108398061A (en) | A kind of hybrid binary channels steering engine of piezoelectric hydraulic and start method | |
| CN101860256B (en) | High-precision adjustable-speed linear micro-displacement work table | |
| KR101705154B1 (en) | Flexure hinge-based fine stage for vertical planar 3-DOF motion with high load capacity | |
| CN105071689A (en) | Two-dimensional piezoelectric micro displacement driver | |
| CN210201746U (en) | Piezoelectric displacement amplifying mechanism | |
| JP2017217736A (en) | Flexible mechanism and gantry device using the same | |
| CN102930904B (en) | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam | |
| CN109879245B (en) | Two-translation one-rotation large-stroke coupling-free parallel piezoelectric micromotion platform | |
| CN114442303B (en) | Micro-displacement actuator based on piezoelectric ceramic stack |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |