The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive
Technical field
The present invention relates to light beam orientation angles to adjust control technology field, and in particular to a kind of direct stress electromagnetic drive it is fast
Fast deflection mirror actuation mechanism and actuation method.
Background technique
With the development of FreeSpace Laser Communications Technique, application of the light beam orientation angle regulating mechanism in laser space communication
More and more extensive, most of light beam is directed toward regulating mechanism and is broadly divided into Piezoelectric Driving and sound according to the difference of driving method at present
The characteristics of circle motor driven, Piezoelectric Driving is to make dynamic frequency height, and bandwidth range is big, but angle of regulation range is small, needs to be displaced
Enlarger expands angle of regulation range, and power consumption is higher;Voice coil motor driving is to push mirror surface structure using Ampere force,
Its main feature is that driving force is big, small power consumption, angle of regulation range is big, but is limited by structural support rigidity, and frequency range is small, and
Control electric current increases with the increase for adjusting angular range, and fever is serious, influences overall system performance.
Summary of the invention
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of direct stress electromagnetic drives
Fast steering mirror actuation mechanism and actuation method, the mechanism structure is compact, frequency range with higher, it is biggish partially
Gyration adjustable range.
To achieve the above objectives, the present invention adopts the following technical scheme:
A kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive, including mirror support structure 6, pedestal 7 with
And the hinged support 16 of Universal flexible of connection mirror support structure 6 and pedestal 7, it further include being fixed on mirror support structure 6 and pedestal 7
Between about the hinged 16 four direct stress electromagnetic actuators being symmetric of support of Universal flexible and be fixed on mirror support knot
For detecting the capacitive displacement transducer 5 of 6 deflection angle of mirror support structure, four direct stress electromagnetism between structure 6 and pedestal 7
Actuator is respectively the first direct stress electromagnetic actuator 1, the second direct stress electromagnetic actuator 2, third direct stress electromagnetic actuator 3
With the 4th direct stress electromagnetic actuator 4, four direct stress electromagnetic actuator bottoms are bolted on pedestal 7, and four just
It is connect by operating bar 10 with rod-type displacement amplifying mechanism 9 at the top of stress electromagnetic actuator, rod-type displacement amplifying mechanism 9 and mirror surface
Support construction 6 is connected by straight beam type flexible hinge 8.
The first direct stress electromagnetic actuator 1 includes C-shaped secured core 11, permanent magnet 12, magnet exciting coil 13 and movement
Iron core 14;Magnet exciting coil 13 is wrapped in the two sides up and down of C-shaped secured core 11, and permanent magnet 12 is connected in C-shaped secured core 11
Portion, movement iron core 14 and permanent magnet 12 are consolidated by being located at the opening of C-shaped secured core 11 after silica gel pad adhesion with C-shaped
11 opening both ends of fixed core constitute air gap 15;The second direct stress electromagnetic actuator 2, third direct stress electromagnetic actuator 3
It is identical as the first direct stress electromagnetic actuator 1 with the structure size of the 4th direct stress electromagnetic actuator 4, the first direct stress electricity
Magnetic actuator 1 and third direct stress electromagnetic actuator 3 rotate axial symmetry about Y and turn about the X axis, the second direct stress electromagnetic activation
Device 2 and the 4th direct stress electromagnetic actuator 4 rotate axial symmetry about X and rotate around Y-axis, and the X rotation axis and Y rotation axis are mutual
Vertically and in the same plane;Operating bar 10 is connect with movement iron core 14 by rubber cushion blocks (17), 10 top of operating bar and bar
Formula displacement amplifying mechanism 9 connects.
The movement iron core 14 uses soft magnetic materials.
The mirror support structure 6, straight beam type flexible hinge 8, rod-type displacement amplifying mechanism 9 and operating bar 10 use duralumin
Alloy material.
The C-shaped secured core 11 is embedded in hollow, rectangular interior of shell.
A kind of actuation method of the fast steering mirror actuation mechanism of direct stress electromagnetic drive, is just being answered to first
The magnet exciting coil 13 of 1 input current signal of power electromagnetic actuator, energization can generate excitation field, and the excitation field direction is with electric current
Direction change;Magnet exciting coil 13 generate excitation field be added to permanent magnet 12 generation DC bias magnetic field, fixed by C-shaped
Air gap 15 between iron core 11 and movement iron core 14 is applied on movement iron core 14;When the side of excitation field and DC bias magnetic field
To it is identical when, movement iron core 14 just will receive with the consistent electromagnetism direct stress in excitation field direction, and along 15 normal orientation of air gap
Movement generates actuation displacement;Actuation displacement is output to rod-type displacement amplifying mechanism 9 along operating bar 10, with rod-type displacement equations
Mechanism 9 can generate deflection by the mirror support structure 6 that straight beam type flexible hinge 8 is connected;Capacitive displacement transducer 5 is real-time
The deflection angle of mirror support structure 6 is monitored, and feeds back to direct stress electromagnetic actuator, realizes closed-loop control, improves mirror surface branch
The deflection angle degree of regulation of support structure 6;Since the actuation displacement that direct stress electromagnetic actuator generates is micron dimension, this
The angular adjustment resolution ratio of invention can achieve microradian grade;Two groups of direct stress electromagnetic actuators being diagonally distributed are simultaneously along opposite
Micro- angular deflection control in reflecting mirror two-dimensional quadrature direction is realized in direction actuation.
Compared to the prior art the present invention, has the advantages that
1) in the present invention, using direct stress electromagnetic drive mode, voice coil motor driving method is compared, using magnetic field superposition,
Moving component is set to generate axial movement, driving force is big, and calorific value is few, and frequency range is big.
2) in the present invention, using direct stress electromagnetic drive mode, piezoelectric actuator ultra-precision driving mode is compared, power consumption is lower, rings
Answer speed fast.
Detailed description of the invention
Fig. 1 is fast steering mirror actuation mechanism schematic diagram of the present invention.
Fig. 2 is direct stress electromagnetic actuator structural schematic diagram of the present invention.
Fig. 3 is fast steering mirror actuation mechanism cross-sectional view of the present invention.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1, a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive of the present invention, including mirror surface branch
The hinged support 16 of the Universal flexible of support structure 6, pedestal 7 and connection mirror support structure 6 and pedestal 7, further includes being fixed on mirror surface
Between support construction 6 and pedestal 7 about the hinged 16 four direct stress electromagnetic actuators being symmetric of support of Universal flexible and
It is fixed between mirror support structure 6 and pedestal 7 for detecting the capacitive displacement transducer of 6 deflection angle of mirror support structure
5, four direct stress electromagnetic actuators are respectively the first direct stress electromagnetic actuator 1, the second direct stress electromagnetic actuator 2, third
Direct stress electromagnetic actuator 3 and the 4th direct stress electromagnetic actuator 4, four direct stress electromagnetic actuator bottoms are bolted
On pedestal 7, it is connect by operating bar 10 with rod-type displacement amplifying mechanism 9 at the top of four direct stress electromagnetic actuators, rod-type position
It moves enlarger 9 and is connect with mirror support structure 6 by straight beam type flexible hinge 8.
As the preferred embodiment of the present invention, the first direct stress electromagnetic actuator 1 include C-shaped secured core 11,
Permanent magnet 12, magnet exciting coil 13 and movement iron core 14;Magnet exciting coil 13 is wrapped in the two sides up and down of C-shaped secured core 11, permanent magnetism
Iron 12 is connected to 11 middle part of C-shaped secured core, moves iron core 14 with permanent magnet 12 by fixing after silica gel pad adhesion positioned at C-shaped
The opening of iron core 11, and air gap 15 is constituted with 11 opening both ends of C-shaped secured core;The second direct stress electromagnetic actuator
2, the structure size of third direct stress electromagnetic actuator 3 and the 4th direct stress electromagnetic actuator 4 and the first direct stress electromagnetic activation
Device 1 is identical, and the first direct stress electromagnetic actuator 1 and third direct stress electromagnetic actuator 3 are about Y rotation axial symmetry and around X
Axis rotation, the second direct stress electromagnetic actuator 2 and the 4th direct stress electromagnetic actuator 4 rotate axial symmetry about X and turn around Y-axis
Dynamic, the X rotation axis and Y rotation axis are mutually perpendicular to simultaneously in the same plane;Operating bar 10 and movement iron core 14 pass through rubber pad
Block 17 connects, and 10 top of operating bar is connect with rod-type displacement amplifying mechanism 9.
Mirror support structure 6 is connect with pedestal 7 by the hinged support 16 of Universal flexible, four direct stress electromagnetic actuator installations
On pedestal 2, and symmetrical about the hinged support 16 of Universal flexible, in being diagonally distributed two-by-two.Two direct stress electricity being diagonally distributed
The magnetic actuator driving force opposite along the axial outbound course of operating bar 10, so that moment of flexure is generated, so that 6 edge of mirror support structure
Another axis deflects certain angle.Capacitive displacement transducer 5, capacitor are installed between pedestal 7 and mirror support structure 6
Formula displacement sensor 5 is bolted on pedestal 7, for detecting the deflection angle of mirror support structure 6, and feeds back to work
Dynamic device improves the angular adjustment precision of fast steering mirror to constitute displacement closed loop feedback control.
As shown in Fig. 2, the first direct stress electromagnetic actuator 1 includes that C-shaped secured core 11 is embedded in hollow, rectangular shell
Inside, permanent magnet 12 are mounted on the middle part of C-shaped secured core 11.The top and bottom of C-shaped secured core 11 are wound with excitation wire
Circle 13, movement iron core 14 are connect with permanent magnet 12, move the top and bottom of iron core 14 respectively at 11 extension end of C-shaped secured core
Lower part and top it is corresponding, constitute air gap 15.Permanent magnet 12 generates DC bias magnetic field, and the magnetic field is along permanent magnet 12, movement
Iron core 14, air gap 15, C-shaped secured core 11 constitute direct current biasing magnetic circuit.It is powered to magnet exciting coil 13, generates excitation field, it should
Magnetic field along magnet exciting coil 13, C-shaped secured core 11, air gap 15, move iron core 14, permanent magnet 12, C-shaped secured core 11 composition encourage
Magnetic magnetic circuit.Excitation field and the bigoted magnetic field of direct current are superimposed, generate electromagnetism direct stress, the direct stress direction and magnetic circuit direction one
It causes, driving movement iron core 14 generates actuation displacement along 15 normal direction of air gap, changes the direction of 13 electrical current of magnet exciting coil, electromagnetism is just
Stress also changes correspondingly direction, and the operating bar 10 being connected with movement iron core 14 can move up and down along the vertical direction, the movement meeting
It is transmitted to mirror support structure 6, when the collaboration actuation of diagonal two direct stress electromagnetic actuators, 6 edge of mirror support structure can be pushed
Another diagonal direction deflection.
As the preferred embodiment of the present invention, the mirror support structure 6, straight beam type flexible hinge 8, operating bar 10 and bar
Formula displacement amplifying mechanism 9 is all made of duralumin, hard alumin ium alloy material.
As the preferred embodiment of the present invention, the movement iron core 14 uses soft magnetic materials.
As the preferred embodiment of the present invention, bolt uses non-magnetic bolt.
The operation principle of the present invention is that: give 1 input current signal of the first direct stress electromagnetic actuator, the magnet exciting coil of energization
13 can generate excitation field, which changes with current direction;The excitation field that magnet exciting coil 13 generates is added to
The DC bias magnetic field that permanent magnet 12 generates is applied to fortune by the air gap 15 between C-shaped secured core 11 and movement iron core 14
In dynamic iron core 14;When excitation field is identical as the direction of DC bias magnetic field, movement iron core 14 just will receive and excitation field
The consistent electromagnetism direct stress in direction, and moved along 15 normal orientation of air gap, generate actuation displacement;The actuation is displaced along operating bar 10
It is output to rod-type displacement amplifying mechanism 9, passes through the mirror surface branch that straight beam type flexible hinge 8 is connected with rod-type displacement amplifying mechanism 9
Support structure 6 can generate deflection;The deflection angle of 5 real-time monitoring mirror support structure 6 of capacitive displacement transducer, and feed back to just
Stress electromagnetic actuator realizes closed-loop control, improves the deflection angle degree of regulation of mirror support structure 6;Due to direct stress electricity
The actuation displacement that magnetic actuator generates is micron dimension, therefore angular adjustment resolution ratio of the invention can achieve microradian grade;
Micro- angle in reflecting mirror two-dimensional quadrature direction is realized in two groups of direct stress electromagnetic actuator actuations simultaneously in opposite directions being diagonally distributed
Degree deflection control.