CN107907992B - The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive - Google Patents

The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive Download PDF

Info

Publication number
CN107907992B
CN107907992B CN201711258186.0A CN201711258186A CN107907992B CN 107907992 B CN107907992 B CN 107907992B CN 201711258186 A CN201711258186 A CN 201711258186A CN 107907992 B CN107907992 B CN 107907992B
Authority
CN
China
Prior art keywords
direct stress
stress electromagnetic
electromagnetic actuator
support structure
mirror support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201711258186.0A
Other languages
Chinese (zh)
Other versions
CN107907992A (en
Inventor
张丰
徐明龙
田征
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xi'an Langwei Technology Co ltd
Original Assignee
Xian Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xian Jiaotong University filed Critical Xian Jiaotong University
Priority to CN201711258186.0A priority Critical patent/CN107907992B/en
Publication of CN107907992A publication Critical patent/CN107907992A/en
Application granted granted Critical
Publication of CN107907992B publication Critical patent/CN107907992B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

Abstract

A kind of the fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive, the actuation mechanism includes mirror support structure, pedestal and the hinged support of Universal flexible for connecting mirror support structure and pedestal, it further include being fixed on four direct stress electromagnetic actuators being symmetric between mirror support structure and pedestal about the hinged support of Universal flexible, four direct stress electromagnetic actuator bottoms are fixed on the base, top is connect by operating bar with rod-type displacement amplifying mechanism, and rod-type displacement amplifying mechanism is connect with mirror support structure by straight beam type flexible hinge;The four direct stress electromagnetic actuator structure size is identical, including secured core, permanent magnet, magnet exciting coil, moves iron core;Four direct stress electromagnetic actuators are passed through its rod-type displacement amplifying mechanism respectively and are connect with mirror support structure using straight beam type flexible hinge;The present invention also provides the actuation method of the fast steering mirror, the characteristics of actuation mechanism resolution ratio with higher, and there are also compact-sized, fast response time.

Description

The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive
Technical field
The present invention relates to light beam orientation angles to adjust control technology field, and in particular to a kind of direct stress electromagnetic drive it is fast Fast deflection mirror actuation mechanism and actuation method.
Background technique
With the development of FreeSpace Laser Communications Technique, application of the light beam orientation angle regulating mechanism in laser space communication More and more extensive, most of light beam is directed toward regulating mechanism and is broadly divided into Piezoelectric Driving and sound according to the difference of driving method at present The characteristics of circle motor driven, Piezoelectric Driving is to make dynamic frequency height, and bandwidth range is big, but angle of regulation range is small, needs to be displaced Enlarger expands angle of regulation range, and power consumption is higher;Voice coil motor driving is to push mirror surface structure using Ampere force, Its main feature is that driving force is big, small power consumption, angle of regulation range is big, but is limited by structural support rigidity, and frequency range is small, and Control electric current increases with the increase for adjusting angular range, and fever is serious, influences overall system performance.
Summary of the invention
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of direct stress electromagnetic drives Fast steering mirror actuation mechanism and actuation method, the mechanism structure is compact, frequency range with higher, it is biggish partially Gyration adjustable range.
To achieve the above objectives, the present invention adopts the following technical scheme:
A kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive, including mirror support structure 6, pedestal 7 with And the hinged support 16 of Universal flexible of connection mirror support structure 6 and pedestal 7, it further include being fixed on mirror support structure 6 and pedestal 7 Between about the hinged 16 four direct stress electromagnetic actuators being symmetric of support of Universal flexible and be fixed on mirror support knot For detecting the capacitive displacement transducer 5 of 6 deflection angle of mirror support structure, four direct stress electromagnetism between structure 6 and pedestal 7 Actuator is respectively the first direct stress electromagnetic actuator 1, the second direct stress electromagnetic actuator 2, third direct stress electromagnetic actuator 3 With the 4th direct stress electromagnetic actuator 4, four direct stress electromagnetic actuator bottoms are bolted on pedestal 7, and four just It is connect by operating bar 10 with rod-type displacement amplifying mechanism 9 at the top of stress electromagnetic actuator, rod-type displacement amplifying mechanism 9 and mirror surface Support construction 6 is connected by straight beam type flexible hinge 8.
The first direct stress electromagnetic actuator 1 includes C-shaped secured core 11, permanent magnet 12, magnet exciting coil 13 and movement Iron core 14;Magnet exciting coil 13 is wrapped in the two sides up and down of C-shaped secured core 11, and permanent magnet 12 is connected in C-shaped secured core 11 Portion, movement iron core 14 and permanent magnet 12 are consolidated by being located at the opening of C-shaped secured core 11 after silica gel pad adhesion with C-shaped 11 opening both ends of fixed core constitute air gap 15;The second direct stress electromagnetic actuator 2, third direct stress electromagnetic actuator 3 It is identical as the first direct stress electromagnetic actuator 1 with the structure size of the 4th direct stress electromagnetic actuator 4, the first direct stress electricity Magnetic actuator 1 and third direct stress electromagnetic actuator 3 rotate axial symmetry about Y and turn about the X axis, the second direct stress electromagnetic activation Device 2 and the 4th direct stress electromagnetic actuator 4 rotate axial symmetry about X and rotate around Y-axis, and the X rotation axis and Y rotation axis are mutual Vertically and in the same plane;Operating bar 10 is connect with movement iron core 14 by rubber cushion blocks (17), 10 top of operating bar and bar Formula displacement amplifying mechanism 9 connects.
The movement iron core 14 uses soft magnetic materials.
The mirror support structure 6, straight beam type flexible hinge 8, rod-type displacement amplifying mechanism 9 and operating bar 10 use duralumin Alloy material.
The C-shaped secured core 11 is embedded in hollow, rectangular interior of shell.
A kind of actuation method of the fast steering mirror actuation mechanism of direct stress electromagnetic drive, is just being answered to first The magnet exciting coil 13 of 1 input current signal of power electromagnetic actuator, energization can generate excitation field, and the excitation field direction is with electric current Direction change;Magnet exciting coil 13 generate excitation field be added to permanent magnet 12 generation DC bias magnetic field, fixed by C-shaped Air gap 15 between iron core 11 and movement iron core 14 is applied on movement iron core 14;When the side of excitation field and DC bias magnetic field To it is identical when, movement iron core 14 just will receive with the consistent electromagnetism direct stress in excitation field direction, and along 15 normal orientation of air gap Movement generates actuation displacement;Actuation displacement is output to rod-type displacement amplifying mechanism 9 along operating bar 10, with rod-type displacement equations Mechanism 9 can generate deflection by the mirror support structure 6 that straight beam type flexible hinge 8 is connected;Capacitive displacement transducer 5 is real-time The deflection angle of mirror support structure 6 is monitored, and feeds back to direct stress electromagnetic actuator, realizes closed-loop control, improves mirror surface branch The deflection angle degree of regulation of support structure 6;Since the actuation displacement that direct stress electromagnetic actuator generates is micron dimension, this The angular adjustment resolution ratio of invention can achieve microradian grade;Two groups of direct stress electromagnetic actuators being diagonally distributed are simultaneously along opposite Micro- angular deflection control in reflecting mirror two-dimensional quadrature direction is realized in direction actuation.
Compared to the prior art the present invention, has the advantages that
1) in the present invention, using direct stress electromagnetic drive mode, voice coil motor driving method is compared, using magnetic field superposition, Moving component is set to generate axial movement, driving force is big, and calorific value is few, and frequency range is big.
2) in the present invention, using direct stress electromagnetic drive mode, piezoelectric actuator ultra-precision driving mode is compared, power consumption is lower, rings Answer speed fast.
Detailed description of the invention
Fig. 1 is fast steering mirror actuation mechanism schematic diagram of the present invention.
Fig. 2 is direct stress electromagnetic actuator structural schematic diagram of the present invention.
Fig. 3 is fast steering mirror actuation mechanism cross-sectional view of the present invention.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1, a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive of the present invention, including mirror surface branch The hinged support 16 of the Universal flexible of support structure 6, pedestal 7 and connection mirror support structure 6 and pedestal 7, further includes being fixed on mirror surface Between support construction 6 and pedestal 7 about the hinged 16 four direct stress electromagnetic actuators being symmetric of support of Universal flexible and It is fixed between mirror support structure 6 and pedestal 7 for detecting the capacitive displacement transducer of 6 deflection angle of mirror support structure 5, four direct stress electromagnetic actuators are respectively the first direct stress electromagnetic actuator 1, the second direct stress electromagnetic actuator 2, third Direct stress electromagnetic actuator 3 and the 4th direct stress electromagnetic actuator 4, four direct stress electromagnetic actuator bottoms are bolted On pedestal 7, it is connect by operating bar 10 with rod-type displacement amplifying mechanism 9 at the top of four direct stress electromagnetic actuators, rod-type position It moves enlarger 9 and is connect with mirror support structure 6 by straight beam type flexible hinge 8.
As the preferred embodiment of the present invention, the first direct stress electromagnetic actuator 1 include C-shaped secured core 11, Permanent magnet 12, magnet exciting coil 13 and movement iron core 14;Magnet exciting coil 13 is wrapped in the two sides up and down of C-shaped secured core 11, permanent magnetism Iron 12 is connected to 11 middle part of C-shaped secured core, moves iron core 14 with permanent magnet 12 by fixing after silica gel pad adhesion positioned at C-shaped The opening of iron core 11, and air gap 15 is constituted with 11 opening both ends of C-shaped secured core;The second direct stress electromagnetic actuator 2, the structure size of third direct stress electromagnetic actuator 3 and the 4th direct stress electromagnetic actuator 4 and the first direct stress electromagnetic activation Device 1 is identical, and the first direct stress electromagnetic actuator 1 and third direct stress electromagnetic actuator 3 are about Y rotation axial symmetry and around X Axis rotation, the second direct stress electromagnetic actuator 2 and the 4th direct stress electromagnetic actuator 4 rotate axial symmetry about X and turn around Y-axis Dynamic, the X rotation axis and Y rotation axis are mutually perpendicular to simultaneously in the same plane;Operating bar 10 and movement iron core 14 pass through rubber pad Block 17 connects, and 10 top of operating bar is connect with rod-type displacement amplifying mechanism 9.
Mirror support structure 6 is connect with pedestal 7 by the hinged support 16 of Universal flexible, four direct stress electromagnetic actuator installations On pedestal 2, and symmetrical about the hinged support 16 of Universal flexible, in being diagonally distributed two-by-two.Two direct stress electricity being diagonally distributed The magnetic actuator driving force opposite along the axial outbound course of operating bar 10, so that moment of flexure is generated, so that 6 edge of mirror support structure Another axis deflects certain angle.Capacitive displacement transducer 5, capacitor are installed between pedestal 7 and mirror support structure 6 Formula displacement sensor 5 is bolted on pedestal 7, for detecting the deflection angle of mirror support structure 6, and feeds back to work Dynamic device improves the angular adjustment precision of fast steering mirror to constitute displacement closed loop feedback control.
As shown in Fig. 2, the first direct stress electromagnetic actuator 1 includes that C-shaped secured core 11 is embedded in hollow, rectangular shell Inside, permanent magnet 12 are mounted on the middle part of C-shaped secured core 11.The top and bottom of C-shaped secured core 11 are wound with excitation wire Circle 13, movement iron core 14 are connect with permanent magnet 12, move the top and bottom of iron core 14 respectively at 11 extension end of C-shaped secured core Lower part and top it is corresponding, constitute air gap 15.Permanent magnet 12 generates DC bias magnetic field, and the magnetic field is along permanent magnet 12, movement Iron core 14, air gap 15, C-shaped secured core 11 constitute direct current biasing magnetic circuit.It is powered to magnet exciting coil 13, generates excitation field, it should Magnetic field along magnet exciting coil 13, C-shaped secured core 11, air gap 15, move iron core 14, permanent magnet 12, C-shaped secured core 11 composition encourage Magnetic magnetic circuit.Excitation field and the bigoted magnetic field of direct current are superimposed, generate electromagnetism direct stress, the direct stress direction and magnetic circuit direction one It causes, driving movement iron core 14 generates actuation displacement along 15 normal direction of air gap, changes the direction of 13 electrical current of magnet exciting coil, electromagnetism is just Stress also changes correspondingly direction, and the operating bar 10 being connected with movement iron core 14 can move up and down along the vertical direction, the movement meeting It is transmitted to mirror support structure 6, when the collaboration actuation of diagonal two direct stress electromagnetic actuators, 6 edge of mirror support structure can be pushed Another diagonal direction deflection.
As the preferred embodiment of the present invention, the mirror support structure 6, straight beam type flexible hinge 8, operating bar 10 and bar Formula displacement amplifying mechanism 9 is all made of duralumin, hard alumin ium alloy material.
As the preferred embodiment of the present invention, the movement iron core 14 uses soft magnetic materials.
As the preferred embodiment of the present invention, bolt uses non-magnetic bolt.
The operation principle of the present invention is that: give 1 input current signal of the first direct stress electromagnetic actuator, the magnet exciting coil of energization 13 can generate excitation field, which changes with current direction;The excitation field that magnet exciting coil 13 generates is added to The DC bias magnetic field that permanent magnet 12 generates is applied to fortune by the air gap 15 between C-shaped secured core 11 and movement iron core 14 In dynamic iron core 14;When excitation field is identical as the direction of DC bias magnetic field, movement iron core 14 just will receive and excitation field The consistent electromagnetism direct stress in direction, and moved along 15 normal orientation of air gap, generate actuation displacement;The actuation is displaced along operating bar 10 It is output to rod-type displacement amplifying mechanism 9, passes through the mirror surface branch that straight beam type flexible hinge 8 is connected with rod-type displacement amplifying mechanism 9 Support structure 6 can generate deflection;The deflection angle of 5 real-time monitoring mirror support structure 6 of capacitive displacement transducer, and feed back to just Stress electromagnetic actuator realizes closed-loop control, improves the deflection angle degree of regulation of mirror support structure 6;Due to direct stress electricity The actuation displacement that magnetic actuator generates is micron dimension, therefore angular adjustment resolution ratio of the invention can achieve microradian grade; Micro- angle in reflecting mirror two-dimensional quadrature direction is realized in two groups of direct stress electromagnetic actuator actuations simultaneously in opposite directions being diagonally distributed Degree deflection control.

Claims (5)

1. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive, it is characterised in that: including mirror support structure (6), the hinged support (16) of Universal flexible of pedestal (7) and connection mirror support structure (6) and pedestal (7), further includes being fixed on Four direct stress electromagnetism being symmetric between mirror support structure (6) and pedestal (7) about the hinged support (16) of Universal flexible It actuator and is fixed between mirror support structure (6) and pedestal (7) for detecting mirror support structure (6) deflection angle Capacitive displacement transducer (5), four direct stress electromagnetic actuators be respectively the first direct stress electromagnetic actuator (1), second just Stress electromagnetic actuator (2), third direct stress electromagnetic actuator (3) and the 4th direct stress electromagnetic actuator (4), four direct stress Electromagnetic actuator bottom is bolted on pedestal (7), passes through operating bar (10) at the top of four direct stress electromagnetic actuators It is connect with rod-type displacement amplifying mechanism (9), rod-type displacement amplifying mechanism (9) and mirror support structure (6) are flexible by straight beam type Hinge (8) connection;
The first direct stress electromagnetic actuator (1) include C-shaped secured core (11), permanent magnet (12), magnet exciting coil (13) and It moves iron core (14);Magnet exciting coil (13) is wrapped in the two sides up and down of C-shaped secured core (11), and permanent magnet (12) is connected to C-shaped In the middle part of secured core (11), movement iron core (14) and permanent magnet (12) are by being located at C-shaped secured core after silica gel pad adhesion (11) opening, and air gap (15) are constituted with C-shaped secured core (11) opening both ends;The second direct stress electromagnetic activation The structure size and the first direct stress of device (2), third direct stress electromagnetic actuator (3) and the 4th direct stress electromagnetic actuator (4) Electromagnetic actuator (1) is identical, and the first direct stress electromagnetic actuator (1) and third direct stress electromagnetic actuator (3) turn about Y Moving axis is symmetrical and turns about the X axis, and the second direct stress electromagnetic actuator (2) and the 4th direct stress electromagnetic actuator (4) are rotated about X Axial symmetry is simultaneously rotated around Y-axis, and the X rotation axis and Y rotation axis are mutually perpendicular to simultaneously in the same plane;Operating bar (10) and movement Iron core (14) is connected by rubber cushion blocks (17), is connect at the top of operating bar (10) with rod-type displacement amplifying mechanism (9).
2. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive according to claim 1, feature exist In: the movement iron core (14) uses soft magnetic materials.
3. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive according to claim 1, feature exist In: the mirror support structure (6), straight beam type flexible hinge (8), rod-type displacement amplifying mechanism (9) and operating bar (10) use Duralumin, hard alumin ium alloy material.
4. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive according to claim 1, feature exist In: the C-shaped secured core (11) is embedded in hollow, rectangular interior of shell.
5. a kind of described in any item works of the fast steering mirror actuation mechanism of direct stress electromagnetic drive of Claims 1-4 Dynamic method, it is characterised in that: give first direct stress electromagnetic actuator (1) input current signal, magnet exciting coil (13) meeting of energization Excitation field is generated, which changes with current direction;The excitation field that magnet exciting coil (13) generates is added to forever The DC bias magnetic field that magnet (12) generates is made by the air gap (15) between C-shaped secured core (11) and movement iron core (14) It uses in movement iron core (14);When excitation field is identical as the direction of DC bias magnetic field, movement iron core (14) just be will receive With the consistent electromagnetism direct stress in excitation field direction, and along air gap (15) normal orientation move, generate actuation displacement;The actuation position It moves and is output to rod-type displacement amplifying mechanism (9) along operating bar (10), pass through straight beam type flexible hinge with rod-type displacement amplifying mechanism (9) The mirror support structure (6) that chain (8) is connected can generate deflection;Capacitive displacement transducer (5) real-time monitoring mirror support knot The deflection angle of structure (6), and direct stress electromagnetic actuator is fed back to, it realizes closed-loop control, improves the inclined of mirror support structure (6) Gyration degree of regulation;Since the actuation displacement that direct stress electromagnetic actuator generates is micron dimension, angle of the invention Adjusting resolution ratio can achieve microradian grade;Two groups of direct stress electromagnetic actuator actuations simultaneously in opposite directions being diagonally distributed, Realize micro- angular deflection control in reflecting mirror two-dimensional quadrature direction.
CN201711258186.0A 2017-12-01 2017-12-01 The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive Active CN107907992B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711258186.0A CN107907992B (en) 2017-12-01 2017-12-01 The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711258186.0A CN107907992B (en) 2017-12-01 2017-12-01 The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive

Publications (2)

Publication Number Publication Date
CN107907992A CN107907992A (en) 2018-04-13
CN107907992B true CN107907992B (en) 2019-06-04

Family

ID=61853947

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711258186.0A Active CN107907992B (en) 2017-12-01 2017-12-01 The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive

Country Status (1)

Country Link
CN (1) CN107907992B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108761772A (en) * 2018-05-30 2018-11-06 中国科学院光电技术研究所 A kind of frame-type electricity tune mirror of class frame installation
CN111427148B (en) * 2020-04-01 2022-02-22 北京航空航天大学 Maxwell force driven quick deflection mirror
CN116719145B (en) * 2023-08-09 2023-12-29 北京瑞控信科技股份有限公司 Two-dimensional non-frame large-angle quick reflector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2359554A1 (en) * 2000-11-03 2002-05-03 Ramaswamy Mahadevan Microelectromechanical optical switches including optical paths having optical loss equalization therebetween
CN100350280C (en) * 2006-02-09 2007-11-21 北京航空航天大学 Fast steering reflection mirror with giant magnetostrictive driver
CN102981244B (en) * 2012-12-25 2014-10-15 中国科学院长春光学精密机械与物理研究所 Two-dimensional large-diameter transmission-type quick reflecting mirror
CN103913838B (en) * 2014-02-21 2015-01-21 西安交通大学 Two-dimensional quick-deflection reflector actuating mechanism and actuating method thereof

Also Published As

Publication number Publication date
CN107907992A (en) 2018-04-13

Similar Documents

Publication Publication Date Title
US8599361B2 (en) Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
CN107907992B (en) The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive
KR100872031B1 (en) Noncontact scanner using a magnetic actuator
US7616084B2 (en) Variable reluctance fast positioning system and methods
CN108144829B (en) A kind of direct stress electromagnetic vibration platform that rigidity is controllable and control method
JPS6162369A (en) Actuator using piezoelectric element
KR100965433B1 (en) Omni-directional linear piezoelectric ultrasonic motor
CN103023374A (en) Inertia type piezoelectric linear motor
CN107834895B (en) Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method
CN107659208B (en) Two-dimensional linear moving-iron type micro-angular displacement electromagnetic activation device and its actuation method
WO2022199130A1 (en) Galvanometer and projector
EP1512888B1 (en) Lever-arm displacement-increasing device
CN101267171B (en) Electromagnetic voltage adjusting multi freedom degree spherical ultrasonic electromotor
JP2005297109A (en) Slow motion stage
CN113212801B (en) Positive stress electromagnetic two-dimensional deflection adjusting device and method with embedded strain sensing
CN112886860B (en) Rotary ultrasonic motor based on three-phase piezoelectric stack driving mode
CN107966995B (en) Angle adjusting platform driven by normal electromagnetic stress and adjusting method
Tan et al. Large stroke and high precision positioning using iron–gallium alloy (Galfenol) based multi-DOF impact drive mechanism
JPH03500112A (en) linear drive motor
US7518268B2 (en) Linear stage including an integrated actuator and associated methods
EP3963701A1 (en) Linear motor and systems therewith
JP5305380B2 (en) Actuator, positioning device
CN210629376U (en) Three-freedom-degree miniature electromagnetic digital actuator
CN115208124B (en) Precise motion platform integrated with active damping and control framework thereof
JPH1080121A (en) Linear actuator

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20240313

Address after: 1st Floor, Northwest Building of Eleven Science and Technology, No. 532 Shenzhousan Road, National Civil Aerospace Industry Base, Xi'an City, Shaanxi Province, 710100

Patentee after: XI'AN LANGWEI TECHNOLOGY Co.,Ltd.

Country or region after: China

Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28

Patentee before: XI'AN JIAOTONG University

Country or region before: China