CN108761772A - A kind of frame-type electricity tune mirror of class frame installation - Google Patents

A kind of frame-type electricity tune mirror of class frame installation Download PDF

Info

Publication number
CN108761772A
CN108761772A CN201810534993.9A CN201810534993A CN108761772A CN 108761772 A CN108761772 A CN 108761772A CN 201810534993 A CN201810534993 A CN 201810534993A CN 108761772 A CN108761772 A CN 108761772A
Authority
CN
China
Prior art keywords
frame
outer framework
pedestal
drive component
inner frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810534993.9A
Other languages
Chinese (zh)
Inventor
孙小响
王继红
彭起
刘顺发
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Optics and Electronics of CAS
Original Assignee
Institute of Optics and Electronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Optics and Electronics of CAS filed Critical Institute of Optics and Electronics of CAS
Priority to CN201810534993.9A priority Critical patent/CN108761772A/en
Publication of CN108761772A publication Critical patent/CN108761772A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

Abstract

The invention discloses a kind of frame-type electricity tune mirrors of class frame installation.It includes speculum, inner frame, outer framework, column, pedestal, stepper motor, worm drive component and flexible hinge.Speculum is installed in inner frame, and inner frame is connected with outer framework, and outer framework is connected with column, and column is fixedly connected on pedestal, and pedestal is the reference for installation that electricity adjusts mirror.Inner frame can be rotated relative to outer framework, outer framework relative to column around rotary shaft, and two rotating shaft direct cross.Stepper motor, worm drive component and flexible hinge constitute one group of drive component, drive the rotation of inter and outer gimbal.Drive component and the pedestal of mirror reference for installation is adjusted to be entirely located in the back direction of the speculum plane of incidence as electricity, electricity adjusts the similar traditional frame of mirror integral installation form.It can be used for substituting the traditional frame manually adjusted, meet the electronic adjustment demand of speculum two-dimensional deflection.

Description

A kind of frame-type electricity tune mirror of class frame installation
Technical field
The present invention relates to Beam Control technical fields, and in particular to a kind of class frame peace for the adjustment of light beam two-dimensional deflection The frame-type electricity tune mirror of dress.
Background technology
In optical system, in order to accurately adjust the direction of propagation of light beam, need to the two-dimensional deflection angle of speculum into Row adjustment.When these speculums are applied in certain specific occasions, example is as shown in Figure 1, need speculum can be as traditional frame again Formula is installed.Quick, the dynamic that light beam may be implemented in bidimensional fast mirror adjust, and can also realize traditional picture frame type installation.But It is, on the one hand, using voice coil motor or piezoelectric ceramics as the fast mirror of driving element, cannot achieve the self-locking of position;It is another Aspect is also a kind of waste of resource in the application of the occasion without quick high frequency correction beam direction, fast mirror.It is open Number be " CN106773022A " Chinese patent, disclose it is a kind of two dimension electricity adjust lens device, it using stepper motor as driving Device, and auxiliary connection, driver etc. are arranged in back of reflecting mirror direction, are non-rapid, dynamic under traditional frame mounting location A kind of effective solution of light beam two dimension adjust automatically.But select oscillating bearing as the auxiliary connection of rotation, and drive Spring compression is relied between dynamic component and reflection mirror component, the rigidity of structure entirety will not be very good.
Invention content
In order to overcome the shortcomings of fast mirror can not position self-locking and manufacturing cost it is high, and it is anti-to meet two-dimentional adjust automatically Penetrating mirror can be as the demand that traditional picture frame type is installed, and the present invention provides a kind of electricity of frame-type to adjust mirror, simple in structure and whole rigid Degree is higher.
The technical solution adopted in the present invention is:A kind of frame-type electricity tune mirror of class frame installation, it includes speculum, interior Frame, outer framework, column, pedestal, electric rotating machine, worm drive component and flexible hinge;Speculum is installed in inner frame, interior Frame is connected with outer framework, and outer framework is connected with column, and column is fixedly connected on pedestal, and pedestal is the installation base that electricity adjusts mirror It is accurate.Inner frame can be rotated relative to outer framework, outer framework relative to column around rotary shaft, and two rotating shaft direct cross.Electric rotating Machine, worm drive component and flexible hinge constitute one group of drive component, between inner frame and pedestal, outer framework and pedestal, point There is not drive component to be connected, realizes the driving that inner frame, outer framework rotate.The worm drive component is by driving screw thread pair will The convert rotational motion of electric rotating machine is linear motion, and fixed part and electric rotating machine are connected with pedestal, and motion parts are logical It crosses flexible hinge with inner frame or outer framework to be connected, the lead angle of screw thread pair is driven to meet condition of self-locking.Drive component and work The back direction of mirror reflection surface is entirely located in for the pedestal of electricity tune mirror reference for installation.
Wherein, electric rotating machine is generally stepper motor.
Wherein, the driving of inner frame, outer framework can realize activation point closed loop by angle or displacement measurement component.
Wherein, the drive component between inner frame and pedestal, outer framework and pedestal can be arranged only at the side of rotary shaft, The both sides of rotary shaft can be arranged in.
Wherein, column and pedestal can be integral pieces.
The beneficial effects of the invention are as follows:
1, meet two-dimentional adjust automatically speculum can as traditional picture frame type the needs of installing, and position self-locking may be implemented, Application particularly suitable for specific mounting location in the optical system without quick high frequency correction beam direction.
2, whole to use tower structure, and rotating part and fixed part are connected by drive component, running accuracy It is higher with overall stiffness, there is good processing and assembly process process.
Description of the drawings
Fig. 1 is the speculum of traditional picture frame type installation.
Fig. 2 is the three-dimensional axonometric drawing of frame-type electricity tune mirror one embodiment of class frame installation.
Fig. 3 is the two-dimentional profilograph in part of frame-type electricity tune mirror one embodiment of class frame installation.
Fig. 4 is I-I sectional view of Fig. 3.
Fig. 5 is II-II sectional view of Fig. 3.
Fig. 6 is the three-dimensional axonometric drawing of frame-type electricity tune second embodiment of mirror of class frame installation.
Fig. 7 is the two-dimentional profilograph in part of frame-type electricity tune second embodiment of mirror of class frame installation.
Fig. 8 is III-III sectional view of Fig. 7.
Fig. 9 is the three-dimensional axonometric drawing of the frame-type electricity tune mirror third embodiment of class frame installation.
Figure 10 is the two-dimentional profilograph in part of the frame-type electricity tune mirror third embodiment of class frame installation.
Figure 11 is IV-IV sectional view of Figure 10.
1. speculum in figure, 2. inner frames, 3. outer frameworks, 4. columns, 5. flexible hinges, 6. worm drive components, 7. bases Seat, 8. stepper motors, 9. speculum briquettings, 10. outer framework copper bushes, 11. outer framework connecting shafts, 12. inner frame copper bushes, 13. inner frame connecting shaft, 14. displacement measurement components, 15. reading head mounting bases, 16. reading heads, 17. grating scales, 18. grating scales Mounting blocks.
Specific implementation mode
Below in conjunction with the accompanying drawings and specific embodiment the present invention is further described.
As shown in Figures 2 to 5, the present embodiment is by speculum 1, inner frame 2, outer framework 3, column 4, flexible hinge 5, spiral Transmission component 6, the composition such as pedestal 7 and stepper motor 8.Speculum 1 is fixed on by frame briquetting 9 in inner frame 2, inner frame 2 Both ends are machined with the circular hole of coaxial line, this axis is the rotary shaft of inner frame 2, and circular hole passes through inner frame copper bush 12 respectively at two It is connected with inner frame rotary shaft 13 with outer framework 3.Wherein, inner frame copper bush 12 is fixedly connected with inner frame 2, inner frame rotation Axis 13 is fixedly connected with outer framework 3.3 same both ends of outer framework are machined with the circular hole of coaxial line, this axis is the rotation of outer framework 3 Axis, circular hole is connected by outer framework copper bush 10 and outer framework rotary shaft 11 with column 4 respectively at two.Wherein, outer framework copper axis Set 10 is fixedly connected with outer framework 3, and outer framework rotary shaft 11 is fixedly connected with column 4.The rotation axis of inner frame 2, outer framework 3 It is orthogonal.Column 4 is fixed on pedestal 7 at two.Stepper motor 8, worm drive component 6 and with two-dimensional deflection and translation it is flexible Flexible hinge 5 constitutes one group of drive component.Between inner frame 2 and pedestal 7, outer framework 3 and pedestal 7, there is one group of driving respectively Component connects.The stepper motor 8 of two groups of drive components is by control umber of pulse rotation, and worm drive component 6 is by the rotation of stepper motor Transhipment turn is changed to the straight line push-and-pull action to inner frame 2 or outer framework 3, to realize the two-dimensional deflection adjustment of speculum.It is soft Property hinge 5 have bidimensional deflection and translation flexibility, greatly reduce to assemble symmetry requirement.Drive component and as electricity It adjusts the pedestal 7 of mirror reference for installation to be entirely located in the back direction of 1 reflecting surface of speculum, is reflected in reference for installation plane and speculum Plane is parallel and is located at traditional frame mounting location at plane of reflection rear, has preferable alternative.
In Fig. 6 to embodiment 2 shown in Fig. 8, on the basis of embodiment 1, each group of drive component increases displacement survey Measure component 14.Institute's displacement measurement component 14 includes reading head mounting base 15, reading head 16, grating scale 17 and grating scale mounting blocks 18.Wherein, grating scale mounting blocks 18 are fixedly connected on by screw on the straight-line movement portion of worm drive component 6, grating scale 17 are bonded on grating scale mounting blocks 18, and reading head mounting base 15 is fixedly connected on pedestal 7, and reading head 16 is mounted on reading head In mounting base 15.
In embodiment 3 shown in Fig. 9 to Figure 11, on the basis of embodiment 2 by inner frame 2, outer framework 3 one at drive Component is extended to a pair, and each pair of drive component is arranged symmetrically about symmetrical centre, and the stepper motor 8 of each pair of drive component is same Step control, using feedback of the displacement measurement component 14 as activation point closed loop at one, another place's displacement measurement component 14 is spare, It can also be used for the monitoring of synchronous control accuracy.
Present invention is not limited to the embodiments described above, using identical as the above embodiment of the present invention or approximate structure, and Obtained other structures design, within protection scope of the present invention.

Claims (5)

1. a kind of frame-type electricity tune mirror of class frame installation, it is characterised in that:It includes speculum (1), inner frame (2), outline border Frame (3), column (4), pedestal (7), electric rotating machine (8), worm drive component (6) and flexible hinge (5);Speculum (1) is installed In inner frame (2), inner frame (2) is connected with outer framework (3), and outer framework (3) is connected with column (4), and column (4) is fixedly connected On pedestal (7);Inner frame (2) can be rotated relative to outer framework (3), outer framework (3) relative to column (4) around rotary shaft, And two rotating shaft direct cross;Stepper motor (8), worm drive component (6) and flexible hinge (5) are one group of drive component, in inside casing Between frame (2) and pedestal (7), outer framework (3) and pedestal (7), there is drive component to be connected respectively;Worm drive component (6) passes through It by the convert rotational motion of stepper motor (8) is linear motion to drive screw thread pair, and fixed part and stepper motor (8) are and base Seat (7) is connected, and motion parts are connected by flexible hinge (5) with inner frame (2) or outer framework (3), and the screw thread of screw thread pair is driven Lift angle meets condition of self-locking;Drive component and as electricity adjust mirror reference for installation pedestal (7) be entirely located in speculum (1) reflecting surface Back direction.
2. the frame-type electricity tune mirror of class frame installation according to claim 1, it is characterised in that:Stepper motor (8) is general For stepper motor.
3. the frame-type electricity tune mirror of class frame installation according to claim 1, it is characterised in that:Inner frame (2), outer framework (3) driving can realize activation point closed loop by angle or displacement measurement component (14).
4. the frame-type electricity tune mirror of class frame installation according to claim 1, it is characterised in that:Inner frame (2) and pedestal (7), the drive component between outer framework (3) and pedestal (7) can be arranged only at the side of rotary shaft, can also be arranged in rotary shaft Both sides.
5. the frame-type electricity tune mirror of class frame installation according to claim 1, it is characterised in that:Column (4) and pedestal (7) It can be integral piece.
CN201810534993.9A 2018-05-30 2018-05-30 A kind of frame-type electricity tune mirror of class frame installation Pending CN108761772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810534993.9A CN108761772A (en) 2018-05-30 2018-05-30 A kind of frame-type electricity tune mirror of class frame installation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810534993.9A CN108761772A (en) 2018-05-30 2018-05-30 A kind of frame-type electricity tune mirror of class frame installation

Publications (1)

Publication Number Publication Date
CN108761772A true CN108761772A (en) 2018-11-06

Family

ID=64003782

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810534993.9A Pending CN108761772A (en) 2018-05-30 2018-05-30 A kind of frame-type electricity tune mirror of class frame installation

Country Status (1)

Country Link
CN (1) CN108761772A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109491042A (en) * 2018-12-14 2019-03-19 中国科学院光电技术研究所 A kind of electricity tune mirror based on rotating electric machine and flexible hinge
CN112162401A (en) * 2020-11-11 2021-01-01 黄鹄科学技术有限公司 Quick reflection mirror device
CN113946030A (en) * 2021-10-18 2022-01-18 中国科学院长春光学精密机械与物理研究所 Driving mechanism for swinging and sweeping of reflecting mirror

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283682A (en) * 1992-10-06 1994-02-01 Ball Corporation Reactionless scanning and positioning system
EP2030069A2 (en) * 2006-06-22 2009-03-04 Orbotech Ltd. Tilting device
CN101498829A (en) * 2008-01-30 2009-08-05 德昌电机(深圳)有限公司 Lens driving device
CN103576283A (en) * 2013-12-04 2014-02-12 中国工程物理研究院总体工程研究所 Rapid reflective mirror system based on flexible supports
CN104459937A (en) * 2013-09-12 2015-03-25 上海微电子装备有限公司 Precise adjusting apparatus of reflector
CN106226899A (en) * 2016-09-12 2016-12-14 苏州迈客荣自动化技术有限公司 A kind of micro-vibration platen of deflecting mirror
CN106773022A (en) * 2016-12-28 2017-05-31 中国科学院长春光学精密机械与物理研究所 A kind of two dimension electricity adjusts lens device
CN107907992A (en) * 2017-12-01 2018-04-13 西安交通大学 The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283682A (en) * 1992-10-06 1994-02-01 Ball Corporation Reactionless scanning and positioning system
EP2030069A2 (en) * 2006-06-22 2009-03-04 Orbotech Ltd. Tilting device
CN101498829A (en) * 2008-01-30 2009-08-05 德昌电机(深圳)有限公司 Lens driving device
CN104459937A (en) * 2013-09-12 2015-03-25 上海微电子装备有限公司 Precise adjusting apparatus of reflector
CN103576283A (en) * 2013-12-04 2014-02-12 中国工程物理研究院总体工程研究所 Rapid reflective mirror system based on flexible supports
CN106226899A (en) * 2016-09-12 2016-12-14 苏州迈客荣自动化技术有限公司 A kind of micro-vibration platen of deflecting mirror
CN106773022A (en) * 2016-12-28 2017-05-31 中国科学院长春光学精密机械与物理研究所 A kind of two dimension electricity adjusts lens device
CN107907992A (en) * 2017-12-01 2018-04-13 西安交通大学 The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109491042A (en) * 2018-12-14 2019-03-19 中国科学院光电技术研究所 A kind of electricity tune mirror based on rotating electric machine and flexible hinge
CN112162401A (en) * 2020-11-11 2021-01-01 黄鹄科学技术有限公司 Quick reflection mirror device
CN113946030A (en) * 2021-10-18 2022-01-18 中国科学院长春光学精密机械与物理研究所 Driving mechanism for swinging and sweeping of reflecting mirror

Similar Documents

Publication Publication Date Title
CN108761772A (en) A kind of frame-type electricity tune mirror of class frame installation
DE112013006119B4 (en) Optical scanner and projector
CN103969788B (en) A kind of side flexible support structure of space optical remote sensor circular reflector
CN101840052B (en) Two-dimensional rapid control reflector
CN111212215B (en) Camera assembly
CN108582035B (en) Three-degree-of-freedom flexible parallel motion platform applied to photoelectron packaging
CN108663770B (en) Rapid control reflector large-angle rotating mechanism based on cross spring bearing
KR101156843B1 (en) Galvanometer scanner
CN109375338A (en) A kind of reflecting mirror two dimension angular adjustment device
CN109491042A (en) A kind of electricity tune mirror based on rotating electric machine and flexible hinge
CN103646231A (en) Two-dimension ray-machine scanner
CN107526159B (en) A kind of heavy caliber beat mirror
CN112444796B (en) Vibrating mirror and laser radar
CN109283654A (en) A kind of one-dimensional quick reflex lens device
CN103630237A (en) Electric precision adjustable slit device with feedback function
CN208953763U (en) A kind of one-dimensional quick reflex lens device
US6757985B2 (en) Precise positioning of an object
CN111474661A (en) Uniform force focusing mechanism driven by inclined guide rail
CN217133525U (en) Reflective adjustable multi-view device
CN110726984A (en) Galvanometer and laser radar
CN109060131B (en) Supporting device for movable mirror of infrared spectrometer and movable mirror scanning structure
CN2407369Y (en) Two dimension angular trimming regulator for large diameter reflective mirror
CN202836759U (en) Electric precise adjustable slit device possessing feedback function
US5243404A (en) Fourier transform spectrophotometer
CN111596457A (en) Small reflector steering mechanism with high pointing accuracy

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20181106