CN109060131B - Supporting device for movable mirror of infrared spectrometer and movable mirror scanning structure - Google Patents
Supporting device for movable mirror of infrared spectrometer and movable mirror scanning structure Download PDFInfo
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- CN109060131B CN109060131B CN201810880167.XA CN201810880167A CN109060131B CN 109060131 B CN109060131 B CN 109060131B CN 201810880167 A CN201810880167 A CN 201810880167A CN 109060131 B CN109060131 B CN 109060131B
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- 230000035939 shock Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
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- 238000000034 method Methods 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
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- 230000003595 spectral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
Abstract
The invention discloses a supporting device of a movable mirror of an infrared spectrometer and a movable mirror scanning structure. The supporting device of the movable mirror comprises a fixed plate, a first swinging plate, a second swinging plate, a third swinging plate, a first elastic sheet group and a second elastic sheet group, wherein the first swinging plate and the fixed plate are oppositely arranged, one end of the first elastic sheet group is connected with the fixed plate, and the other end of the first elastic sheet group is connected with the first swinging plate; the second swinging plate and the third swinging plate are respectively positioned at the left side and the right side of the fixed plate, one end of the second elastic sheet group is connected with the second swinging plate, and the other end of the second elastic sheet group is connected with the third swinging plate. The supporting device of the movable mirror of the infrared spectrometer, disclosed by the invention, has the characteristics of no friction, good stability, high precision and good shock resistance by utilizing the swinging mechanism formed by crossing the plurality of groups of elastic sheets.
Description
Technical Field
The invention belongs to the field of precision detection equipment, and particularly relates to a novel supporting device for a movable mirror of an infrared spectrometer and a movable mirror scanning structure.
Background
The Fourier infrared spectrometer obtains a spectrogram by continuously scanning back and forth by using a movable mirror system in an interferometer, and the stroke, the stability and the like of the movable mirror scanning system can directly determine the parameters of the spectrogram, such as resolution, signal-to-noise ratio, repeatability and the like.
Classical interferometer systems use air-cushion rails to drive the moving mirror mechanism. The earliest civilian-type Fourier transform infrared spectrometer FTS-14 adopted a moving mirror scanning mechanism with a high-precision air-cushion guide rail, the movement of the moving mirror is almost frictionless, and the instrument can be ensured to have extremely high stability, but the air-cushion guide rail is expensive, inconvenient to use, easy to break down and complicated.
The existing moving mirror mechanism adopts a ball/roller linear guide rail or a guide rail formed by a glass sleeve and graphite, and is matched with a voice coil motor to generate linear scanning of a moving mirror. Especially, the guide rail formed by the glass sleeve and the graphite has wide application due to the excellent self-lubricating property. However, the guide rail type moving mirror mechanism has the defects of uneven friction distribution, poor shock resistance and the like.
At present, more and more moving mirror mechanisms adopt mechanisms formed by spring pieces, although the stroke of the mechanisms can be limited by the spring pieces, the resolution ratio of the spectrometer is lower, the moving mirror mechanisms formed by the spring pieces cannot have friction, and the spring force is always limited in the motion process, so that the moving mirror mechanisms are more stable and are not easily influenced by vibration. In a small Fourier infrared spectrometer, the requirement on spectral resolution is low, and the requirement can be met by a short stroke.
Fig. 1 is an equivalent structural diagram of a conventional moving mirror scanning device. The four sides of the parallelogram are rigid connecting rods and the four vertices A, B, C, D are flexible joints. When certain acting force F is applied, the flexible joint deforms to enable the whole mechanism to generate an angular displacement, and the quadrangle generates guide displacement S and coupling displacement d in two directions.
The existing moving mirror scanning device is similar to the structure of an arm beam, and the generated elastic force is one-dimensional, so that the existing moving mirror scanning device has defects in the aspects of shock resistance and stability.
Disclosure of Invention
In order to solve the problems, the invention provides a novel supporting device for a movable mirror of an infrared spectrometer and a movable mirror scanning structure. The multiple groups of elastic sheets form a crossed swinging structure, so that the stability is good, the precision is high, and the shock resistance is good.
The invention aims to provide a supporting device of a movable mirror of an infrared spectrometer, which is characterized by comprising a fixed plate, a first swinging plate, a second swinging plate, a third swinging plate, a first elastic sheet group and a second elastic sheet group,
the first swinging plate is arranged opposite to the fixed plate, one end of the first elastic sheet group is connected with the fixed plate, and the other end of the first elastic sheet group is connected with the first swinging plate;
the second swinging plate and the third swinging plate are respectively positioned at the left side and the right side of the fixed plate, one end of the second elastic sheet group is connected with the second swinging plate, and the other end of the second elastic sheet group is connected with the third swinging plate;
the first elastic sheet set comprises a left elastic sheet and a right elastic sheet, the middle part of the left elastic sheet is fixedly connected with the second swinging plate, and the middle part of the right elastic sheet is fixedly connected with the third swinging plate;
the second elastic sheet set comprises a front elastic sheet and a rear elastic sheet, the middle part of the front elastic sheet is fixedly connected with the first swinging plate, and the middle part of the rear elastic sheet is fixedly connected with the fixed plate.
As an alternative scheme of the present invention, the side walls of the fixed plate and the first swing plate are respectively fixedly connected to the first elastic sheet group through a plurality of first pressing plates.
As an optional scheme of the present invention, the side walls of the second swinging plate and the third swinging plate are respectively fixedly connected to the second elastic sheet group through a plurality of second pressing plates.
As an optional scheme of the present invention, the upper end and the lower end of the fixing plate are respectively provided with a first connecting portion, the first connecting portions at the upper end and the lower end are respectively and fixedly connected with one rear elastic sheet, and the middle portion of the rear elastic sheet is fixedly connected with the first connecting portion through a third pressing plate.
As an optional scheme of the present invention, the upper end and the lower end of the first swing plate are respectively provided with a second connecting portion, the second connecting portions at the upper end and the lower end are respectively and fixedly connected with a front elastic sheet, and the middle portion of the front elastic sheet is fixedly connected with the second connecting portion through a fourth pressing plate.
As an optional scheme of the present invention, a third connecting portion is disposed in the middle of the second swing plate, and the third connecting portion is fixedly connected to the middle of the two left spring pieces through a fifth pressing plate.
As an optional scheme of the present invention, a fourth connecting portion is disposed in the middle of the third swinging plate, and the fourth connecting portion is fixedly connected to the middle of the two right spring pieces through a sixth pressing plate.
As an optional scheme of the present invention, the first elastic sheet set and the second elastic sheet set are perpendicular to each other.
The supporting device of the moving mirror of the infrared spectrometer further comprises a voice coil motor, wherein a stator of the voice coil motor is fixedly connected with the fixed plate, and a rotor of the voice coil motor is fixedly connected with the first swinging plate;
or the rotor of the voice coil motor is fixedly connected with the second swinging plate;
or the rotor of the voice coil motor is fixedly connected with the third swinging plate.
The invention also aims to provide a moving mirror scanning structure of an infrared spectrometer, which comprises a hollow angle mirror and a moving mirror supporting device, wherein the moving mirror supporting device is the moving mirror supporting device of the infrared spectrometer, and the hollow angle mirror is arranged on the first swinging plate;
or the hollow corner mirror is installed on the second swinging plate;
or, the hollow corner mirror is mounted on the third swinging plate.
According to the supporting device of the movable mirror and the scanning structure of the movable mirror, the freedom degree of the supporting device of the movable mirror is limited in all directions through the crossed arrangement of the plurality of groups of elastic sheets, and each direction is limited powerfully, so that the supporting device is more stable; the fixed plate, the three swinging plates and the elastic sheet form a crossed flexible elastic sheet pivot, all the parts are organically and synchronously combined together, the rotation is mutually limited and matched, and the rotation is not simply connected in series, so that the supporting device has higher precision; the scanning device can be used in a vibrating environment, realizes stable and anti-interference scanning, and has the advantages of no friction, good stability, high precision, good shock resistance, low cost and the like.
Drawings
Fig. 1 is an equivalent structural view of a prior art moving mirror scanning device of the present invention.
Fig. 2 is a perspective view of a support device for a movable mirror according to an embodiment of the present invention.
Fig. 3 is an internal structural view of a support device for a movable mirror according to an embodiment of the present invention.
Fig. 4 is a first schematic diagram of a supporting device of a movable mirror according to an embodiment of the present invention.
Fig. 5 is a schematic diagram of a supporting device of a movable mirror according to an embodiment of the present invention.
Fig. 6 is a schematic view illustrating a connection between a fixing plate and a spring plate according to an embodiment of the invention.
Fig. 7 is a schematic view of the connection between the second swing plate and the elastic piece according to the embodiment of the invention.
Fig. 8 is a schematic view of the third and fourth swing plates and the elastic sheet according to the embodiment of the present invention.
Fig. 9 is a schematic diagram of a voice coil motor according to an embodiment of the present invention.
Fig. 10 is a schematic diagram of a moving mirror scanning structure according to an embodiment of the present invention.
Detailed Description
The following detailed description of the present invention, taken in conjunction with the accompanying drawings and examples, is provided to enable the invention and its various aspects and advantages to be better understood. However, the specific embodiments and examples described below are for illustrative purposes only and are not limiting of the invention.
The term "connected", as used herein, unless otherwise expressly specified or limited, is to be construed broadly, as meaning either directly or through an intermediate connection. In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", and the like are based on the directions or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.
As shown in fig. 2 and 3, the present embodiment provides a supporting device for a movable mirror of an infrared spectrometer, the supporting device includes a fixed plate 1, a first swing plate 2, a second swing plate 3, a third swing plate 4, a first elastic sheet group 5, and a second elastic sheet group 6. The fixed plate 1, the first swinging plate 2, the second swinging plate 3 and the third swinging plate 4 are connected through a plurality of elastic sheets to form a stable supporting device, and the device is high in precision and good in anti-seismic performance.
Wherein, the fixing plate 1 is provided with a through hole 12, and a screw can pass through the through hole 12 to fix the fixing plate 1 at a position required by the infrared spectrometer. The first swing plate 2 is disposed opposite to the fixed plate 1, and as shown in fig. 2, the first swing plate 2 is located in front of the fixed plate 1. One end of the first elastic sheet group 5 is connected with the fixed plate 1, and the other end is connected with the first swinging plate 2. The first elastic sheet group 5 comprises a plurality of elastic sheets, and the plurality of elastic sheets of the first elastic sheet group 5 are parallel to each other.
The second swing plate 3 is located on the left side of the fixed plate 1 and the third swing plate 4 is located on the right side of the fixed plate 1. One end of the second spring sheet group 6 is connected with the second swinging plate 3, and the other end is connected with the third swinging plate 4. The second elastic sheet group 6 comprises a plurality of elastic sheets, and the plurality of elastic sheets of the second elastic sheet group 6 are parallel to each other. The elastic sheets of the first elastic sheet group 5 and the elastic sheets of the second elastic sheet group 6 are arranged in a crossed mode. The first swinging plate 2, the second swinging plate 3, the third swinging plate 4 and the fixed plate 1 are equal in height, the four plates enclose an unclosed cavity, and the first elastic sheet group 5 and the second elastic sheet group 6 are located in the cavity.
The first elastic sheet set 5 includes a left elastic sheet 51 and a right elastic sheet 52, in this embodiment, the left elastic sheet 51 includes two elastic sheets, and the right elastic sheet 52 includes two elastic sheets. The left spring plate 51 is positioned on the left side of the fixed plate 1, and the middle part of the left spring plate 51 is fixedly connected with the second swinging plate 3. The right spring piece 52 is positioned at the right side of the fixed plate 1, and the middle part of the right spring piece 52 is fixedly connected with the third swinging plate 4.
The second elastic sheet set 6 includes a front elastic sheet 61 and a rear elastic sheet 62, in this embodiment, the front elastic sheet 61 includes two elastic sheets, and the rear elastic sheet 62 includes two elastic sheets. The middle part of the front elastic sheet 61 is fixedly connected with the first swinging plate 2, and the middle part of the rear elastic sheet 62 is fixedly connected with the fixed plate 1.
The supporting device of the movable mirror of the infrared spectrometer utilizes the plurality of groups of spring leaf groups to be arranged in a crossed manner to form the swing mechanism, and has the advantages of no friction, good stability, high precision, good shock resistance, low cost and the like. The interferometer and the Fourier infrared spectrometer built by the support device of the movable mirror can realize stable and anti-interference scanning, and can also realize stable scanning in a vibrating environment.
Fig. 4 is a first schematic diagram of a supporting device of a movable mirror according to an embodiment of the present invention. The two crossed spring plates form a crossed flexible spring plate pivot, and are different from the parallel distribution of the parallel two-rod mechanism. Meanwhile, the relative fixed block and the relative swinging block are also distributed in a diagonal manner instead of being parallel to each other. By the design, the mechanism is more stable. When one swinging block of the crossed flexible elastic sheet pivot is fixed and acting force F is applied to the other swinging block, the pivot swings around the center of the pivot, and the swinging angle is approximately in direct proportion to the applied force.
Fig. 5 is a schematic diagram of a supporting device of a movable mirror according to an embodiment of the present invention. In the figure, two groups of elastic sheets are arranged in a crossed manner to form four crossed flexible elastic sheet pivots shown in the figure. The four crossed flexible elastic sheet pivots are a unified whole, the mechanical characteristics of the four crossed flexible elastic sheet pivots are synchronous, and the four crossed flexible elastic sheet pivots are not simply superposed. In this embodiment, the rotation axis is G, H, I, J four points, which completely form a plane, so that the rotation is more stable and synchronous. The four pivots are organically and synchronously combined together, and the rotation is mutually limited and matched instead of being simply connected in series, so that the device has higher precision.
In the present embodiment, the fixed plate 1, the first swing plate 2, the second swing plate 3, and the third swing plate 4 are all made of a material having a certain rigidity. All the elastic sheets are made of materials with good elasticity, such as beryllium bronze, spring steel, high-elasticity stainless steel and the like.
Alternatively, as shown in fig. 6 and 7, the side walls of the fixed plate 1 and the first swing plate 2 are fixedly connected to the first spring sheet group 5 through a plurality of first pressing plates 71, respectively. In this embodiment, one end of the first elastic sheet group 5 is fixed to the left and right sides of the fixing plate 1 by two first pressing plates 71. The other end of the first elastic sheet group 5 is fixed to the left and right sides of the first swinging plate 2 by two first pressing plates 71.
As shown in fig. 6, the upper end and the lower end of the fixing plate 1 are respectively provided with a first connecting portion 11, the first connecting portions 11 of the upper end and the lower end are respectively fixedly connected with a rear elastic sheet 62, and the middle portion of the rear elastic sheet 62 is fixedly connected with the first connecting portion 11 through a third pressing plate 73.
As shown in fig. 7, the upper end and the lower end of the first swing plate 2 are respectively provided with a second connecting portion 21, the second connecting portions 21 at the upper end and the lower end are respectively fixedly connected with a front elastic sheet 61, and the middle portion of the front elastic sheet 61 is fixedly connected with the second connecting portion 21 through a fourth pressing plate 74.
As shown in fig. 8, the side walls of the second swing plate 3 and the third swing plate 4 are fixedly connected to the second spring sheet group 6 by a plurality of second pressing plates 72, respectively. In this embodiment, one end of the second elastic sheet group 6 is fixed to the left and right sides of the second swing plate 3 by two second pressing plates 72. The left and right sides of the third swinging plate 4 fix the other end of the second elastic sheet group 6 through two second pressing plates 72.
The middle part of the second swinging plate 3 is provided with a third connecting part 31, and the third connecting part 31 is fixedly connected with the middle parts of the two left spring pieces 51 through a fifth pressing plate 75. The middle part of the third swinging plate 4 is provided with a fourth connecting part 41, and the fourth connecting part 41 is fixedly connected with the middle parts of the two right spring pieces 52 through a sixth pressing plate 76.
The left spring plate 51 of the present embodiment is connected in series with the fixed plate 1, the second swing plate 3 and the first swing plate 2; the right spring piece 52 is connected with the fixed plate 1, the third swinging plate 4 and the first swinging plate 2 in series; the front elastic sheet 61 is connected with the second swinging plate 3, the first swinging plate 2 and the third swinging plate 4 in series; the rear elastic sheet 62 is connected in series with the second swinging plate 3, the fixed plate 1 and the third swinging plate 4. Through the cooperation of shell fragment and clamp plate, connect each part into a stable whole, improve its anti-seismic performance and precision. In this embodiment, the elastic piece and the other components may be fixed by screws.
Optionally, the first spring sheet group 5 and the second spring sheet group 6 are arranged perpendicular to each other. The first elastic sheet group 5 and the second elastic sheet group 6 are perpendicular to each other, so that the capability of bearing stress in all directions of the supporting device of the movable mirror is improved, and the stability is better.
As shown in fig. 9, the supporting device of the moving mirror of the infrared spectrometer of the present embodiment further includes a voice coil motor 200, and the voice coil motor 200 includes a stator 201 and a mover 202. The stator 20 of the voice coil motor is fixedly connected with the fixing plate 1 through a base 203. The mover 202 of the voice coil motor is fixedly connected to the third swinging plate 4 through a bracket 204. When a certain voltage is applied to the coil of the voice coil motor 200, the mover 202 is acted by the electromagnetic force to push the third swinging plate 4 to move. When the third swinging plate 4 is subjected to a force, a displacement is generated; when the force is removed, the supporting device of the movable mirror can return to the original position under the action of the elastic force of the supporting device.
As another aspect of the present invention, the mover 202 of the voice coil motor may be further fixedly connected to the second swing plate 3, or the mover 202 of the voice coil motor may be fixedly connected to the first swing plate 2. When a force is applied to the swing plate fixedly connected to the mover 202 of the voice coil motor, a corresponding displacement is generated.
As shown in fig. 10, the present embodiment further provides a moving mirror scanning structure of an infrared spectrometer, which includes a hollow angled mirror 300 and a supporting device 100 for the moving mirror. The support device of the movable mirror is the support device of the movable mirror of the infrared spectrometer, and the two hollow angle mirrors 300 are respectively installed on the second swing plate 3 and the third swing plate 4. The hollow angle mirror 300 is matched with the support device 100 of the movable mirror, so that the scanning of one or more reflecting mirrors can be realized, and a scanning device is provided for the Fourier infrared spectrometer. By controlling the voltage across the coil of the voice coil motor 200, the scanning speed and stroke of the moving mirror scanning structure can be varied.
If the infrared spectrometer comprises only one hollow angled mirror, the hollow angled mirror may be mounted on the first swing plate 2. Alternatively, the hollow angle mirror may also be mounted on the second swing plate 3, or the hollow angle mirror may be mounted on the third swing plate 4.
The supporting device of the movable mirror of the embodiment enables the movable mirror scanning structure to have higher rigidity, stability and precision under the condition that the processing and assembling difficulty is not improved.
It should be noted that the above-mentioned embodiments described with reference to the drawings are only intended to illustrate the present invention and not to limit the scope of the present invention, and it should be understood by those skilled in the art that modifications and equivalent substitutions can be made without departing from the spirit and scope of the present invention. Furthermore, unless the context indicates otherwise, words that appear in the singular include the plural and vice versa. Additionally, all or a portion of any embodiment may be utilized with all or a portion of any other embodiment, unless stated otherwise.
Claims (10)
1. A supporting device for a movable mirror of an infrared spectrometer is characterized by comprising a fixed plate (1), a first swinging plate (2), a second swinging plate (3), a third swinging plate (4), a first elastic sheet group (5) and a second elastic sheet group (6),
the first swinging plate (2) is arranged opposite to the fixed plate (1), one end of the first elastic sheet group (5) is connected with the fixed plate (1), and the other end of the first elastic sheet group is connected with the first swinging plate (2);
the second swinging plate (3) and the third swinging plate (4) are respectively positioned at the left side and the right side of the fixed plate (1), one end of the second elastic sheet group (6) is connected with the second swinging plate (3), and the other end of the second elastic sheet group is connected with the third swinging plate (4);
the first elastic sheet group (5) comprises a left elastic sheet (51) and a right elastic sheet (52), the middle part of the left elastic sheet (51) is fixedly connected with the second swinging plate (3), and the middle part of the right elastic sheet (52) is fixedly connected with the third swinging plate (4);
the second elastic sheet group (6) comprises a front elastic sheet (61) and a rear elastic sheet (62), the middle of the front elastic sheet (61) is fixedly connected with the first swinging plate (2), and the middle of the rear elastic sheet (62) is fixedly connected with the fixed plate (1).
2. The supporting device of the infrared spectrometer moving mirror according to claim 1, wherein the side walls of the fixed plate (1) and the first swinging plate (2) are respectively fixedly connected with the first elastic sheet group (5) through a plurality of first pressing plates (71).
3. The supporting device of the infrared spectrometer moving mirror according to claim 1, wherein the side walls of the second swinging plate (3) and the third swinging plate (4) are respectively fixedly connected with the second elastic sheet group (6) through a plurality of second pressing plates (72).
4. The supporting device of the moving mirror of the infrared spectrometer as claimed in claim 1, wherein the upper end and the lower end of the fixed plate (1) are respectively provided with a first connecting portion (11), the first connecting portions (11) at the upper end and the lower end are respectively fixedly connected with one of the rear elastic pieces (62), and the middle portion of the rear elastic piece (62) is fixedly connected with the first connecting portion (11) through a third pressing plate (73).
5. The supporting device of the infrared spectrometer moving mirror according to claim 1, wherein the upper end and the lower end of the first swing plate (2) are respectively provided with a second connecting portion (21), the second connecting portions (21) at the upper end and the lower end are respectively fixedly connected with a front elastic sheet (61), and the middle portion of the front elastic sheet (61) is fixedly connected with the second connecting portion (21) through a fourth pressing plate (74).
6. The supporting device of the infrared spectrometer moving mirror according to claim 1, wherein a third connecting portion (31) is disposed at the middle of the second swing plate (3), and the third connecting portion (31) is fixedly connected to the middle of the two left spring pieces (51) through a fifth pressing plate (75).
7. The supporting device of the infrared spectrometer moving mirror according to claim 1, wherein a fourth connecting portion (41) is disposed at the middle of the third swinging plate (4), and the fourth connecting portion (41) is fixedly connected to the middle of the two right spring pieces (52) through a sixth pressing plate (76).
8. The supporting device of the infrared spectrometer moving mirror according to claim 1, characterized in that the first elastic sheet group (5) and the second elastic sheet group (6) are perpendicular to each other.
9. The supporting device of the infrared spectrometer moving mirror according to any one of claims 1 to 8, characterized by comprising a voice coil motor (200), wherein a stator (201) of the voice coil motor is fixedly connected with the fixed plate (1), and a rotor (202) of the voice coil motor is fixedly connected with the first swinging plate (2);
or, the mover (202) of the voice coil motor is fixedly connected with the second swinging plate (3);
or the rotor (202) of the voice coil motor is fixedly connected with the third swinging plate (4).
10. A moving mirror scanning structure of an infrared spectrometer, comprising a hollow angle mirror and a supporting device of the moving mirror, characterized in that the supporting device of the moving mirror is the supporting device of the moving mirror of the infrared spectrometer according to claim 9, the hollow angle mirror is installed on the first swing plate (2);
or the hollow corner mirror is mounted on the second swinging plate (3);
or the hollow corner mirror is arranged on the third swinging plate (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810880167.XA CN109060131B (en) | 2018-08-03 | 2018-08-03 | Supporting device for movable mirror of infrared spectrometer and movable mirror scanning structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810880167.XA CN109060131B (en) | 2018-08-03 | 2018-08-03 | Supporting device for movable mirror of infrared spectrometer and movable mirror scanning structure |
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| Publication Number | Publication Date |
|---|---|
| CN109060131A CN109060131A (en) | 2018-12-21 |
| CN109060131B true CN109060131B (en) | 2021-03-26 |
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| CN201810880167.XA Active CN109060131B (en) | 2018-08-03 | 2018-08-03 | Supporting device for movable mirror of infrared spectrometer and movable mirror scanning structure |
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| CN114967115B (en) * | 2022-04-27 | 2023-05-02 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
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| CN103528683B (en) * | 2013-10-25 | 2015-09-02 | 武汉大学 | A kind of movinglens scanning device for Fourier transformation infrared spectrometer |
| JP5761433B2 (en) * | 2014-06-27 | 2015-08-12 | 株式会社島津製作所 | Interference spectrophotometer |
| CN106066205B (en) * | 2016-05-25 | 2018-09-21 | 北京雪迪龙科技股份有限公司 | Micromotion mechanism, movable lens interferometer and the infrared spectrometer using movable lens interferometer |
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