CN114578504A - Reaction force-free quick reflecting mirror based on flexible support - Google Patents
Reaction force-free quick reflecting mirror based on flexible support Download PDFInfo
- Publication number
- CN114578504A CN114578504A CN202210241552.6A CN202210241552A CN114578504A CN 114578504 A CN114578504 A CN 114578504A CN 202210241552 A CN202210241552 A CN 202210241552A CN 114578504 A CN114578504 A CN 114578504A
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- flexible support
- reaction
- sensor
- reflector
- actuator
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
- Y02E10/47—Mountings or tracking
Abstract
The invention belongs to the field of quick reflectors, and discloses a reaction force-free quick reflector based on flexible support, which comprises a plane reflector component, a flexible support component, a sensor component, an actuator, a reaction plate and a base; the flexible support assembly comprises an upper flexible support and a lower flexible support, and the plane mirror assembly is connected with the base through the upper flexible support; the reaction plate is connected with the other side of the base through a lower flexible support; the sensor assembly and the actuator are four, the sensor assembly and the actuator are uniformly distributed on the plane mirror assembly in a staggered mode, one end of the sensor assembly is connected with the plane mirror assembly, the other end of the sensor assembly is connected with the base, one end of the actuator is connected with the plane mirror assembly, and the other end of the actuator is connected with the reaction plate. The quick reflector eliminates the reaction force of the quick reflector, greatly reduces the influence of the movement of the quick reflector on the base, and improves the performance of the whole system.
Description
Technical Field
The invention relates to the field of quick reflectors, in particular to a reaction force-free quick reflector based on flexible support.
Background
The fast transmitting mirror is an optical device developed in recent years and used for high-precision light beam control, can ensure high-precision inertial pointing precision within a wider bandwidth range, and can be applied to the fields of astronomical telescopes, precision tracking and aiming, remote detection, laser communication, laser weapons and the like.
Fast mirror systems typically use flexible structures to provide support to achieve frictionless and fast response. The flexible support is made of elastic materials or designed in a certain shape, so that the characteristics of small rigidity in the working direction and large rigidity in the non-working direction are achieved. The flexible support has the advantages of no abrasion, stable movement, no need of lubrication, wide working temperature range and higher reliability than a common mechanical structure, and is widely applied to various micro-motion mechanisms.
The existing fast reflector brings nonlinear disturbance due to factors such as shafting and actuator friction, and is not beneficial to further improvement of control precision. Meanwhile, in the process that the actuator drives the quick reflector, the quick reflector with large mass operates in a high dynamic state, the driving moment of the actuator can generate obvious reaction force, the reaction force is transmitted to the base, the stability of the whole base is affected, and the optical system is further affected. The conventional fast reflecting mirror does not consider the interference effect of the reaction force of an actuator on the motion of a platform, and the problem to be solved by the technical personnel in the field is urgently needed in order to realize stable control with higher precision and realize a fast reflecting mirror device without the reaction force.
Disclosure of Invention
The invention aims to provide a reaction force-free quick reflector based on flexible support, and aims to solve the technical problem that the reaction force of an actuator influences the precision of the reflector in the prior art.
In order to achieve the purpose, the invention provides the following scheme: a reaction force-free quick reflector based on a flexible support comprises a plane reflector component, a flexible support component, a sensor component, an actuator, a reaction plate and a base;
the flexible support assembly comprises an upper flexible support and a lower flexible support, and the plane mirror assembly is connected with the base through the upper flexible support; the reaction plate is connected with the other side of the base through the lower flexible support;
the number of the sensor components and the number of the actuators are four, and the sensor components and the actuators are uniformly distributed on the plane mirror component in a staggered mode,
one end of the sensor component is connected with the plane mirror component, the other end of the sensor component is connected with the base,
one end of the actuator is connected with the plane reflector component, and the other end of the actuator is connected with the reaction plate.
Preferably, the central axis of the upper flexible support coincides with the central axis of the lower flexible support.
Preferably, the upper flexible support and the lower flexible support have two end faces, respectively, one of the end faces having two-axis rotational degrees of freedom with respect to the other end face.
Preferably, the flexible support assembly is a cross flexible bearing based flexible assembly.
Preferably, the plane mirror assembly comprises a plane mirror and a mirror back plate, the plane mirror is mounted on the mirror back plate in a bonding mode, and the central axis of the plane mirror coincides with the Z axis of the fast mirror.
Preferably, four bosses which are distributed in central symmetry are arranged at the bottom of the reflector back plate and are used for connecting the actuator.
Preferably, the actuator comprises coils and magnetic seats, the four coils are arranged on the boss of the reflector backboard in a cross manner, and the four magnetic seats are arranged on the reaction board in a cross manner.
Preferably, the sensor assembly comprises a high-precision position sensor and a sensor mounting base, the high-precision position sensor is mounted on the base, the sensor mounting base is a flexible plate, one end of the sensor mounting base is fastened through a fixing screw, and the other end of the sensor mounting base is adjusted through an adjusting screw to the Z-direction position of the sensor mounting base.
Preferably, the high-precision position sensor is a capacitive or inductive non-contact measuring sensor.
The beneficial effects of the technical scheme of the application are that:
(1) the invention adopts a flexible supporting mode, can provide support and two-dimensional rotation freedom degrees around an X axis and a Y axis for the quick reflector and limit the freedom degrees in other directions, can meet the requirement of the freedom degrees of the quick reflector, simultaneously ensures that the quick reflector has no friction influence, and effectively reduces the friction interference of a system.
(2) The invention adopts the reaction plate structure, increases the reaction inertia, eliminates the reaction force of the quick reflector when the dynamic parameters of the plane reflector component and the reaction plate are matched, greatly reduces the influence of the movement of the quick reflector on the base, and improves the performance of the whole system.
(3) The invention adopts the flexible plate with one fixed end and the other adjustable distance to adjust and calibrate the position of the high-precision position sensor, thereby being convenient, rapid and accurate to position and greatly improving the assembly and adjustment efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic diagram of a fast reflector structure provided by an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a fast mirror apparatus in a central axis according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a plane mirror assembly provided in an embodiment of the present invention
FIG. 4 is a schematic view of an actuator coil mounting provided by an embodiment of the present invention;
FIG. 5 is a schematic diagram of a fast mirror provided in accordance with an embodiment of the present invention with the planar mirror component removed;
fig. 6 is a cross-sectional view of a fast mirror apparatus provided by an embodiment of the present invention.
The reference numbers illustrate:
1. a planar mirror assembly; 2. a flexible support; 3. a sensor assembly; 4. an actuator; 5. a reaction plate; 6. a base; 11. a plane mirror; 12. a reflector backing plate; 21. an upper flexible support; 22. a lower flexible support; 31. a high-precision position sensor; 32. a sensor mounting base; 33. adjusting the screw; 3a, a first high-precision position sensor; 3b, a second high-precision position sensor; 3c, a third high-precision position sensor; 3d, a fourth high-precision position sensor; 41. a coil; 42. a magnetic base; 4a, a first actuator; 4b, a second actuator; 4c, a third actuator; 4d, a fourth actuator.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
It will also be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
As shown in fig. 1 to 6, which are non-reaction force fast reflector based on flexible support according to an embodiment of the present invention, the mirror comprises a planar mirror assembly 1, a flexible support assembly 2, a sensor assembly 3, an actuator 4, a reaction plate 5 and a base 6;
the flexible support assembly 2 comprises an upper flexible support 21 and a lower flexible support 22, the upper flexible support 21 and the lower flexible support 22 are both provided with two end faces, one end of the upper flexible support 21 and the other end of the lower flexible support 22 have two-axis rotational freedom degrees, a quick reflector system obtains torsional motion through elastic deformation of the flexible support assembly, the plane reflector assembly 1 is fixedly connected with the upper end face of the upper flexible support 21, and the lower end face of the upper flexible support 21 is fixedly connected with the base; the reaction plate 5 is fixedly connected with the lower end face of the lower flexible support 22, the upper end face of the lower flexible support 22 is fixedly connected with the other side of the base 6, and the central axis of the lower flexible support 22 is coincided with the central axis of the upper flexible support 21.
Further, the flexible support component 2 is a flexible component based on a cross flexible bearing. The flexible support assembly may employ a flexible unit, such as a flexible shaft, a flexible plate, a flexible hinge, or the like.
Plane mirror assembly 1 includes plane mirror 11, speculum backplate 12, plane mirror 11 is installed through the mode of bonding on the speculum backplate 12, the central axis of plane mirror 11 coincides with the Z axle of quick mirror, the even cloth of lower terminal surface of speculum backplate 12 has 4 bosss 13 that the structure is the same.
The number of the actuators 4 is four, and as shown in fig. 5, the first actuator 3a, the second actuator 3b, the third actuator 3c, and the fourth actuator 3d are provided.
The actuator 4 comprises coils 41 and a magnetic seat 42, wherein 4 coils are installed on the reflector back plate 12 in a cross shape by taking a coordinate origin O as a center, two coils are respectively arranged on an X axis and a Y axis and are symmetrically distributed, and the 4 coils are respectively arranged on the bosses 13 of the plane reflector component; the 4 magnetic seats 42 are arranged on the reaction plate 5 in a cross shape by taking the coordinate origin O as the center, and are symmetrically distributed on the X axis and the Y axis. The actuator 4 is made of piezoelectric ceramics or a voice coil motor.
The sensor component 3 is fixedly connected with the base 6, the number of the sensor components 3 is four, the installation positions of the sensor components 3 and the actuators 4 are distributed in a staggered mode, for example, a first sensor component 3a, a second sensor component 3b, a third sensor component 3c and a fourth sensor component 3d in fig. 5 are arranged, the first sensor component 3a, the second sensor component 3b, the third sensor component 3c and the fourth sensor component 3d are respectively opposite to a measuring plane 14 of the lower end face of the plane mirror 11, so that the rotation angle of the plane mirror component 1 around an X axis and a Y axis is indirectly measured, and the closed-loop control of the rotation angle of the plane mirror component 1 is realized.
The sensor component 3 comprises a high-precision position sensor 31 and a sensor mounting base 32, the sensor mounting base 32 is a flexible plate, one end of the sensor mounting base 32 is fastened through a fixing screw, the other end of the sensor mounting base is adjusted through a rotary adjusting screw 33 to conduct micro distance adjustment, the Z-direction position of the sensor mounting base 32 is adjusted, and then the Z-direction position of the high-precision position sensor 31 is adjusted.
Furthermore, the front end of the adjusting screw 33 is of a ball head type, so that abrasion is reduced, and meanwhile, the workpiece is prevented from being damaged.
The high-precision position sensor 31 according to the embodiment of the present application is a capacitive or inductive non-contact measurement sensor.
The quick reflector of this application passes through screw hole on the 6 bottom surfaces of base is fixed in on the external equipment.
The plane mirror 11, the mirror back plate 12 and the coils 41 of the 4 actuators in the embodiment of the present application constitute the forward rotation part of the fast mirror; the reaction plate 5 and the magnetic mounts 42 of the 4 actuators form the counter-rotating part of the fast mirror, providing a reaction inertia; the high precision position sensor 31, sensor mounting base 32, adjustment screws 33 and base 6 form the stationary part of the fast mirror, the upper compliant support 21 provides load bearing capability for the coils 41 of the planar mirror assembly 1 and 4 actuators 4, and the lower compliant support 22 provides load bearing capability for the reaction plate 5 and the magnet mounts 42 of the 4 actuators 4.
The working principle of the quick reflector is as follows:
the flexible supporting assembly can respectively provide the rotational freedom degrees of the x-direction and the y-direction two shafts to limit the freedom degrees of other directions, and does not generate additional friction influence on the movement of the system; the actuator receives a drive signal from the control system to drive the planar mirror assembly to produce a corresponding linear displacement, thereby stabilizing the planar mirror assembly. Each actuator is divided into two moving parts, which move simultaneously. During the rotation of the plane mirror assembly, the upward part of the actuator drives the plane mirror assembly to rotate, and the downward part of the actuator simultaneously drives the reaction plate to move in the opposite direction, so that a reaction inertia is provided to eliminate the reaction force. When the dynamic parameters of the plane mirror assembly and the reaction plate are matched, namely when the ratio of the rotational inertia of the upper half parts of the mirror assembly and the actuator to the rigidity of the upper flexible support is equal to the ratio of the rotational inertia of the lower half parts of the reaction plate and the actuator to the rigidity of the lower flexible support, no extra force or moment is transmitted to external equipment, the stability of the base is improved, meanwhile, the extra interference of the fast reflector is reduced, and the pointing accuracy of the fast reflector is improved.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (9)
1. A reaction force-free quick reflector based on flexible support is characterized by comprising a plane reflector component (1), a flexible support component (2), a sensor component (3), an actuator (4), a reaction plate (5) and a base (6);
the flexible support assembly (2) comprises an upper flexible support (21) and a lower flexible support (22), and the plane mirror assembly (1) is connected with the base (6) through the upper flexible support (21); the reaction plate (5) is connected with the other side of the base (6) through the lower flexible support (22);
the number of the sensor assemblies (3) and the number of the actuators (4) are four, the sensor assemblies (3) and the actuators (4) are uniformly distributed on the plane mirror assembly (1) in a staggered mode,
one end of the sensor component (3) is connected with the plane mirror component (1), the other end is connected with the base (6),
one end of the actuator (4) is connected with the plane reflector component (1), and the other end of the actuator is connected with the reaction plate (5).
2. A reaction-force-free fast mirror based on a flexible support according to claim 1, characterized in that the central axis of the upper flexible support (21) coincides with the central axis of the lower flexible support (22).
3. A reaction-force-free fast mirror based on flexible supports as claimed in claim 2, characterized in that the upper flexible support (21) and the lower flexible support (22) have two end faces, respectively, one of which has two-axis rotational degrees of freedom with respect to the other.
4. A reaction-force-free fast mirror based on a flexible support according to claim 1, characterized in that the flexible support assembly (2) is a flexible assembly based on a cross flexible bearing.
5. A reaction-force-free fast mirror based on a flexible support according to claim 1, characterized in that the plane mirror assembly (1) comprises a plane mirror (11), a mirror back plate (12), the plane mirror (11) is mounted on the mirror back plate (12) by means of bonding, and the central axis of the plane mirror (11) coincides with the Z-axis of the fast mirror.
6. A flexure-based reaction-force-free fast reflector according to claim 5, characterized in that the bottom of the reflector backplate (12) is provided with four centrosymmetrically distributed bosses (13), and the bosses (13) are used for connecting the actuator (4).
7. A reaction-force-free fast reflector based on flexible support according to claim 6 characterized in that the actuator (4) comprises coils (41) and magnetic bases (42), four of the coils (41) are mounted in a cross on the boss (13) of the reflector back plate (12), and four of the magnetic bases (42) are mounted in a cross on the reaction plate (5).
8. A reaction-force-free fast reflector based on flexible support as claimed in claim 1, characterized in that the sensor assembly (3) comprises a high-precision position sensor (31), a sensor mounting base (32), the high-precision position sensor (31) is mounted on the base (6), the sensor mounting base (32) is a flexible plate, one end of the sensor mounting base (32) is fastened by a fixing screw, and the other end of the sensor mounting base (32) adjusts the Z-direction position of the sensor mounting base (32) by an adjusting screw (33).
9. A reaction-force-free fast mirror based on a flexible support according to claim 8, characterized in that the high precision position sensor (31) is a capacitive or inductive contactless measuring sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210241552.6A CN114578504A (en) | 2022-03-11 | 2022-03-11 | Reaction force-free quick reflecting mirror based on flexible support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210241552.6A CN114578504A (en) | 2022-03-11 | 2022-03-11 | Reaction force-free quick reflecting mirror based on flexible support |
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| Publication Number | Publication Date |
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| CN114578504A true CN114578504A (en) | 2022-06-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210241552.6A Pending CN114578504A (en) | 2022-03-11 | 2022-03-11 | Reaction force-free quick reflecting mirror based on flexible support |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115016094A (en) * | 2022-06-13 | 2022-09-06 | 北京理工大学 | Supporting type precision adjusting device for pose of multilayer nested reflector |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103576283A (en) * | 2013-12-04 | 2014-02-12 | 中国工程物理研究院总体工程研究所 | Rapid reflective mirror system based on flexible supports |
| CN109853764A (en) * | 2019-01-30 | 2019-06-07 | 同济大学 | It is used to hold damper using the self-balancing type of reciprocating screw rod |
| CN110221426A (en) * | 2019-06-25 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | Deflecting reflection lens device |
| CN111624730A (en) * | 2020-05-29 | 2020-09-04 | 中国科学院长春光学精密机械与物理研究所 | Quick reflector with double flexible structure |
| CN212001686U (en) * | 2020-02-04 | 2020-11-24 | 同济大学 | Modular self-balancing inertial container damper |
-
2022
- 2022-03-11 CN CN202210241552.6A patent/CN114578504A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103576283A (en) * | 2013-12-04 | 2014-02-12 | 中国工程物理研究院总体工程研究所 | Rapid reflective mirror system based on flexible supports |
| CN109853764A (en) * | 2019-01-30 | 2019-06-07 | 同济大学 | It is used to hold damper using the self-balancing type of reciprocating screw rod |
| CN110221426A (en) * | 2019-06-25 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | Deflecting reflection lens device |
| CN212001686U (en) * | 2020-02-04 | 2020-11-24 | 同济大学 | Modular self-balancing inertial container damper |
| CN111624730A (en) * | 2020-05-29 | 2020-09-04 | 中国科学院长春光学精密机械与物理研究所 | Quick reflector with double flexible structure |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115016094A (en) * | 2022-06-13 | 2022-09-06 | 北京理工大学 | Supporting type precision adjusting device for pose of multilayer nested reflector |
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